Half-piece sorting system

Abstract

The invention relates to the technical field of wafer manufacturing, in particular to a half wafer sorting system. The invention aims to solve the problem of low half-piece sorting efficiency. In order to achieve the purpose, the sorting system comprises a detection module used for detecting half pieces to be detected; the conveying part comprises a main conveying assembly, one end of the main conveying assembly is used for receiving the half piece to be detected, the other end of the main conveying assembly is in butt joint with the detection module, and the main conveying assembly comprises a plurality of mutually independent conveying mechanisms; the rotating part is arranged at the upstream of the detection module, is positioned between two adjacent conveying mechanisms or is embedded in one of the conveying mechanisms, and is used for rotating the direction of the to-be-detected half piece; the material receiving box is used for receiving the detected half piece; and the transfer part is used for transferring the detected half piece to a material receiving box. According to the device, the to-be-detected half pieces can be rotated through the rotating part, and therefore the sorting efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer manufacturing, and particularly relates to a half - wafer sorting system. Background Art

[0002] Wire cutting is a processing method in which a cutting wire moves reciprocally at a high speed and relatively moves with a workpiece to be cut (such as materials like photovoltaic silicon rods, semiconductors, silicon carbide, sapphires, or magnetic materials), so as to cut the workpiece to be cut into multiple wafers by the cutting wire.

[0003] In the actual production process, the processed wafers cannot be directly used, but need to be sorted, and wafers of different quality grades are transported to corresponding receiving boxes. Wafers usually include different specifications such as whole wafers and half - wafers. However, in the current wafer sorting process, usually the same device is used to sort whole wafers and half - wafers, which results in low efficiency in sorting half - wafers and seriously affects the sorting efficiency.

[0004] Correspondingly, a new technical solution is needed in this field to solve the above problems. Summary of the Invention

[0005] In order to solve at least one of the above problems in the prior art, that is, to solve the problem of low efficiency in sorting half - wafers, the present application provides a half - wafer sorting system, which includes:

[0006] A detection module for detecting a half - wafer to be detected;

[0007] A conveying part, including a main conveying component, one end of the main conveying component is used to receive the half - wafer to be detected, the other end is docked with the detection module, and the main conveying component includes a plurality of mutually independent conveying mechanism pieces;

[0008] A rotating part, arranged upstream of the detection module and located between two adjacent conveying mechanisms or embedded in one of the conveying mechanisms, the rotating part is used to rotate the direction of the half - wafer to be detected;

[0009] A receiving box for receiving the detected half - wafers;

[0010] A transfer part for transferring the detected half - wafers to the receiving box.

[0011] The half-chip sorting system of the present application can rotate the half-chip to be detected by setting a rotating part, thereby improving the sorting efficiency. Specifically, usually in order to reduce the bending of the half-chip, the support points are located at the two long sides of the half-chip when stacking the half-chips. As a result, when the half-chip enters the detection module, it is conveyed along its length direction, which will greatly extend the conveying, detection, and collection time of the half-chip. However, in the present application, by setting a rotating part, the half-chip to be detected can be rotated before entering the detection module, enabling the half-chip to be detected to be conveyed along its width direction. In this way, the walking path of the half-chip to be detected in the sorting system will be greatly reduced, which is conducive to reducing the feeding interval of the half-chip to be detected, reducing the conveying, detection, and collection time of the half-chip, and improving the sorting efficiency. Moreover, this sorting system only needs to partially upgrade and transform the existing sorting system and can be applied without large-scale adjustment, with low transformation cost.

[0012] In a preferred technical solution of the above half-chip sorting system, the rotating part is arranged to be liftable; or

[0013] When the rotating part is arranged between two adjacent conveying mechanisms, the two conveying mechanisms adjacent to the rotating part are arranged to be liftable; or

[0014] When the rotating part is embedded in one of the conveying mechanisms, the conveying mechanism in which the rotating part is embedded is arranged to be liftable.

[0015] By arranging the rotating part or the conveying mechanism to be liftable, the rotation stability of the half-chip to be detected can be improved.

[0016] In a preferred technical solution of the above half-chip sorting system, the rotating part includes a rotation driving component and a rotating member, and the rotating member is connected to the rotation driving component.

[0017] In a preferred technical solution of the above half-chip sorting system, the rotating part further includes a negative pressure adsorption device, and the negative pressure adsorption device is connected to the rotating member. The negative pressure adsorption device is configured to adsorb the half-chip to be detected on the rotating member when it is opened.

[0018] By setting the negative pressure adsorption device, the detected half-chip can be firmly adsorbed on the rotating member, thereby improving the stability during the rotation process and being conducive to improving the working reliability of the sorting system.

[0019] In a preferred technical solution of the above half-chip sorting system, the rotating part includes a first transmission component and a second transmission component that are independently arranged, and the transmission speeds of the first transmission component and the second transmission component are different.

[0020] By setting the first transmission component and the second transmission component with different transmission speeds, the speed difference can be utilized to control the gradual turning of the half-piece to be detected during transmission, ultimately achieving the turning of the half-piece to be detected, and this method does not affect the transmission efficiency, which is beneficial to improving the working continuity of the sorting system.

[0021] In the preferred technical solution of the above half-piece sorting system, both the first transmission component and the second transmission component are conveyor belt components; or

[0022] Both the first transmission component and the second transmission component are conveyor roller components.

[0023] In the preferred technical solution of the above half-piece sorting system, the rotating part further includes a negative pressure adsorption device, which is arranged between the first transmission component and the second transmission component, and the negative pressure adsorption device is configured to adsorb the half-piece to be detected on the first transmission component and the second transmission component when it is opened.

[0024] By setting the negative pressure adsorption device, the half-piece to be detected can be firmly adsorbed on the first transmission component and the second transmission component, thereby improving the stability of the rotation process of the half-piece to be detected, which is beneficial to improving the working reliability of the sorting system.

[0025] In the preferred technical solution of the above half-piece sorting system, the receiving box includes:

[0026] The first half-piece receiving box for receiving the first type of half-piece;

[0027] The second half-piece receiving box for receiving the second type of half-piece.

[0028] The above setting method is beneficial to the classified receiving of the detected half-pieces.

[0029] In the preferred technical solution of the above half-piece sorting system, there are multiple first half-piece receiving boxes, and the transfer part can transfer at least two first-type half-pieces to the corresponding number of first half-piece receiving boxes during one transfer process.

[0030] By setting multiple first half-piece receiving boxes and transferring at least two first-type half-pieces to the corresponding number of first half-piece receiving boxes during one transfer process, multiple first-type half-pieces can be continuously conveyed and the one-time receiving of multiple first-type half-pieces can be achieved, thereby reducing the waiting time during the individual receiving process and improving the sorting efficiency.

[0031] In the preferred technical solution of the above half-piece sorting system, the multiple first half-piece receiving boxes are arranged adjacent to each other; and / or

[0032] During one transfer process, the transfer unit can transfer the same number of first-type half sheets as the number of the first half-sheet receiving boxes to the corresponding number of the first half-sheet receiving boxes.

[0033] Multiple first half-sheet receiving boxes are arranged adjacent to each other, which can reduce the difficulty of receiving materials and facilitate centralized material receiving. The transfer unit can sequentially transfer the same number of half sheets as the number of the first half-sheet receiving boxes to the first half-sheet receiving boxes, which can maximize the material receiving speed and sorting efficiency.

[0034] In a preferred technical solution of the above half-sheet sorting system, the conveying unit further includes a first auxiliary conveying component and a second auxiliary conveying component. The conveying direction of the first auxiliary conveying component is the same as the direction in which the detected half sheet is conveyed out of the detection module. The second auxiliary conveying component is docked with the first auxiliary conveying component. Multiple first half-sheet receiving boxes are arranged corresponding to one of the first auxiliary conveying component and the second auxiliary conveying component, and the second half-sheet receiving box is arranged corresponding to the other of the first auxiliary conveying component and the second auxiliary conveying component.

[0035] By respectively arranging the first half-sheet receiving box and the second half-sheet receiving box corresponding to the first auxiliary conveying component and the second auxiliary conveying component, parallel conveying and material receiving of different types of detected half sheets can be realized, further improving the sorting efficiency.

[0036] In a preferred technical solution of the above half-sheet sorting system, a transfer mechanism is arranged between the first auxiliary conveying component and the second auxiliary conveying component, and the transfer mechanism is used to transfer the detected half sheet to the second auxiliary conveying component.

[0037] By arranging the transfer mechanism, it is convenient for the transfer of half sheets between the first auxiliary conveying component and the second auxiliary conveying component, and the conveying efficiency is improved.

[0038] In a preferred technical solution of the above half-sheet sorting system, the transfer mechanism is a lifting and transferring mechanism, and the lifting and transferring mechanism has a first position not higher than the first auxiliary conveying component and a second position that is lifted above the first auxiliary conveying component under the action of a driving force and is docked with the second auxiliary conveying component.

[0039] In a preferred technical solution of the above half-sheet sorting system, the conveying components corresponding to multiple first half-sheet receiving boxes in the first auxiliary conveying component and the second auxiliary conveying component include multiple independent conveyor belts, and each first half-sheet receiving box corresponds to one conveyor belt.

[0040] The setting method that each first half-sheet receiving box corresponds to one conveyor belt is convenient for separately parking and controlling the first-type half sheets, and improves the sorting control accuracy.

[0041] In the preferred technical solution of the above-mentioned half-cell sorting system, the transfer part includes a lifting and transfer mechanism, and the lifting and transfer mechanism has a third position not higher than the conveying part and a fourth position that is lifted above the conveying part under the action of a driving force and docked with the receiving box.

[0042] In the preferred technical solution of the above-mentioned half-cell sorting system, each receiving box is correspondingly provided with one lifting and transfer mechanism.

[0043] Configuring one lifting and transfer mechanism for each receiving box can achieve separate transfer of multiple ones, improving the scenario adaptability of half-cell sorting. Description of the Drawings

[0044] The present application will be described below with reference to the accompanying drawings. In the drawings:

[0045] Figure 1 is a system diagram of the first embodiment of the half-cell sorting system of the present application;

[0046] Figure 2 is a schematic diagram (one) of the half-cell transfer process of the half-cell sorting system of the present application;

[0047] Figure 3 is a schematic diagram (two) of the half-cell transfer process of the half-cell sorting system of the present application;

[0048] Figure 4 is a schematic diagram (one) of the half-cell rotation process in the first embodiment of the half-cell sorting system of the present application;

[0049] Figure 5 is a schematic diagram (two) of the half-cell rotation process in the first embodiment of the half-cell sorting system of the present application;

[0050] Figure 6 is a system diagram of the second embodiment of the half-cell sorting system of the present application.

[0051] List of Reference Numerals

[0052] 1. Detection module; 21. First half-cell receiving box; 22. Second half-cell receiving box; 3. Rotation part; 31. Rotation drive assembly; 32. Rotating part; 33. Negative pressure adsorption device; 34. First transmission assembly; 35. Second transmission assembly; 4. Conveying part; 41. Main conveying assembly; 42. First sub-conveying assembly; 421. Conveyor belt; 43. Second sub-conveying assembly; 5. Transfer part; 51. Lifting and transfer mechanism; 6. Cleaning basket; 7. Transfer mechanism; 71. Hydraulic cylinder; 72. Driving motor; 73. Belt; 81. Half-cell to be detected; 82. First type of half-cell; 83. Second type of half-cell. Detailed Embodiments

[0053] The preferred embodiments of the present application will be described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principle of the present application and are not intended to limit the protection scope of the present application. For example, although there are two second half-piece receiving boxes in the accompanying drawings, this quantitative relationship is not fixed. Those skilled in the art can adjust it according to needs to adapt to specific application scenarios. For example, the number of second half-piece receiving boxes can be one, three or more.

[0054] It should be noted that in the description of the present application, the terms indicating directions or positional relationships such as "upper", "lower", "left", "inner", "outer", etc. are based on the directions or positional relationships shown in the accompanying drawings. This is only for convenience of description and does not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present application. In addition, the terms "first", "second", "third", "fourth" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance. In addition, in the description of the present application, "a plurality" means at least two.

[0055] In addition, it should also be noted that in the description of the present application, unless otherwise clearly specified and limited, the terms "installation", "connection", "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and can be the communication inside two elements. For those skilled in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0056] First, a systematic description of the half-piece sorting system of the present application will be given. To solve the problem of low half-piece sorting efficiency, the half-piece sorting system of the present application includes a detection module, a conveying part, a rotating part, a receiving box, and a transfer part. The detection module is used to detect the half-piece to be detected. The conveying part includes a main conveying component. One end of the main conveying component is used to receive the half-piece to be detected, and the other end is docked with the detection module. And the main conveying component includes a plurality of independent conveying mechanisms. The rotating part is arranged upstream of the detection module and is located between two adjacent conveying mechanisms or embedded in one of the conveying mechanisms. The rotating part is used to rotate the direction of the half-piece to be detected. The receiving box is used to receive the detected half-piece. The transfer part is used to transfer the detected half-piece to the receiving box.

[0057] It should be noted that the half-wafer described in this application refers to a wafer whose length in one direction is greater than its length in another direction, such as half of an elliptical wafer, a rectangular wafer, a quasi-square wafer, etc. In the following embodiments of this application, taking the half-wafer as half of a quasi-square wafer as an example, during the half-wafer sorting process, the half-wafer to be detected is conveyed by the main conveying component along its length direction. Before being conveyed to the detection module, the rotating part rotates the half-wafer to be detected, so that the half-wafer to be detected is conveyed into the detection module along its width direction. The detection module detects the half-wafer to be detected, and the detected half-wafer is conveyed to the vicinity of the receiving box by the conveying part. Subsequently, the transfer part transfers the detected half-wafer that has been conveyed to the vicinity of the receiving box into the corresponding receiving box to complete the receiving of the half-wafer.

[0058] In the half-wafer sorting system of this application, by setting the rotating part, the rotating part can be used to rotate the half-wafer to be detected, thereby improving the sorting efficiency. Specifically, usually in order to reduce the bending of the half-wafer, the support points are located at the two long sides of the half-wafer when stacking the half-wafers. As a result, the half-wafer is conveyed along its length direction when entering the detection module, which will greatly extend the conveying, detection, and collection time of the half-wafer. However, in this application, by setting the rotating part, the half-wafer to be detected can be rotated before entering the detection module, and the half-wafer to be detected can be conveyed along its width direction. In this way, the walking path of the half-wafer to be detected in the sorting system will be greatly reduced, which is beneficial to reducing the feeding interval of the half-wafer to be detected, reducing the conveying, detection, and collection time of the half-wafer, and improving the sorting efficiency. Moreover, this sorting system only needs to upgrade and transform some parts of the existing sorting system and can be applied without large-scale adjustment, with low transformation cost.

[0059] The following combines Figures 1 to 5 , and introduces the first preferred embodiment of this application.

[0060] As Figure 1 shown, in a preferred embodiment, the half-wafer sorting system includes a detection module 1, a first half-wafer receiving box 21, a second half-wafer receiving box 22, a rotating part 3, a conveying part 4, a transfer part 5, a transfer mechanism 7, and a loading component (not shown in the figure).

[0061] The detection module 1 is used to detect the half-wafer 81 to be detected, and then classify the half-wafer 81 to be detected according to the quality grade. In this application, the half-wafer 81 to be detected can be at least divided into a first-class half-wafer 82 and a second-class half-wafer 83 according to the quality grade, where the first-class half-wafer 82 is a half-wafer with qualified quality, and the second-class half-wafer 83 is a half-wafer with unqualified quality. The specific detection method and classification method of the detection module 1 are conventional technologies in the art, and this detection method and classification method are not the key points of improvement in this application, so they will not be elaborated here.

[0062] Of course, the method of classifying the half wafers according to the quality grade is not the only one. In other embodiments, the second type of half wafers 83 can be further refined into different types according to the defect type, or the first type of half wafers 82 can be further refined into different qualified categories according to more specific classification rules, and then collected into different collection boxes.

[0063] The conveying unit 4 is used to convey the half wafers 81 to be detected to the detection module 1 and convey the half wafers completed by the detection of the detection module 1. Specifically, the conveying unit 4 includes a main conveying component 41, a first sub-conveying component 42, and a second sub-conveying component 43. One end of the main conveying component 41 is used to receive the half wafers 81 to be detected, and the other end is docked with the detection module 1. The first sub-conveying component 42 is docked with the main conveying component 41, and the second sub-conveying component 43 is docked with the first sub-conveying component 42. Figure 1 In the shown embodiment, the conveying direction of the second sub-conveying component 43 is perpendicular to the conveying direction of the first sub-conveying component 42, and the conveying direction of the first sub-conveying component 42 is the same as the conveying direction of the main conveying component 41. In this application, the main conveying component 41, the first sub-conveying component 42, and the second sub-conveying component 43 are all conveyor belts. The method of conveying half wafers by conveyor belts is a conventional means in the art and will not be elaborated in this application.

[0064] The first half wafer collection box 21 is used to receive and store the first type of half wafers 82. Figure 1 In the shown embodiment, there are four first half wafer collection boxes 21, and the four first half wafer collection boxes 21 are arranged adjacent to each other on the same side of the second sub-conveying component 43 ( Figure 1 the upper side in ). The second half wafer collection box 22 is used to receive and store the second type of half wafers 83. Figure 1 In the shown embodiment, there are two second half wafer collection boxes 22. The two second half wafer collection boxes 22 are arranged corresponding to the first sub-conveying component 42 and are both arranged on one side of the first sub-conveying component 42 ( Figure 1 the left side in ).

[0065] By respectively arranging the first half wafer collection box 21 and the second half wafer collection box 22 corresponding to the first sub-conveying component 42 and the second sub-conveying component 43, parallel conveying and collection of different types of half wafers can be realized, thereby improving the half wafer sorting efficiency. The multiple first half wafer collection boxes 21 are arranged adjacent to each other, which can reduce the collection difficulty and facilitate centralized collection.

[0066] Of course, the specific number and installation position of the first half-piece receiving box 21 and the second half-piece receiving box 22 are not unique, and those skilled in the art can adjust them based on specific application scenarios. For example, at least one first half-piece receiving box 21 can be provided, or it can be provided in other quantities such as two, three, five, etc. The second half-piece receiving box 22 can be provided with at least one, or three or more can be provided. In the case of providing multiple ones, the first half-piece receiving box 21 or the second half-piece receiving box 22 can be provided on the same side of the corresponding conveying component, or on different sides, and the preferred implementation is to provide them on the same side. Again, although the number of the second secondary conveying component 43 is described in combination with two, this is only a preference, and those skilled in the art can adjust its number to one, three or more. In addition, it is also preferred that the conveying direction of the second secondary conveying component 43 is perpendicular to the conveying direction of the first secondary conveying component 42, and those skilled in the art can set the conveying direction between the two at any angle, and of course, it is preferably set to 90°.

[0067] In addition, the first half-piece receiving box 21 is provided corresponding to the second secondary conveying component 43, and the second half-piece receiving box 22 is provided corresponding to the first secondary conveying component 42, which is only a possible implementation manner, and the corresponding relationship between the two can also be interchanged.

[0068] Further referring to Figure 1 , a transfer mechanism 7 is further provided between the first secondary conveying component 42 and the second secondary conveying component 43. The transfer mechanism 7 is used to transfer the detected half-piece on the first secondary conveying component 42 to the second secondary conveying component 43. Specifically, the transfer mechanism 7 is a lifting and transferring mechanism. The lifting and transferring mechanism has a first position not higher than the first secondary conveying component 42 and a second position that is lifted above the first secondary conveying component 42 under the action of a driving force and docks with the second secondary conveying component 43. In this way, after the half-piece is detected by the detection module 1, if it needs to be conveyed to the first secondary conveying component 42, the lifting and transferring mechanism is controlled to be in the first position. At this time, the half-piece reaches one side of the second half-piece receiving box 22 under the conveyance of the conveyor belt 421 of the first secondary conveying component 42. If it needs to be conveyed to the second secondary conveying component 43 after being detected by the detection module 1, when the half-piece passes through the transfer mechanism 7, the lifting and transferring mechanism is controlled to be in the second position. At this time, the half-piece is lifted and docked with the second secondary conveying component 43. The lifting and transferring mechanism transfers the half-piece to the second secondary conveying component 43 and reaches one side of the first half-piece receiving box 21 under the conveyance of the second secondary conveying component 43.

[0069] In a preferred implementation manner, the lifting and transferring mechanism is provided between several adjacent conveyor belts 421. In the present application, the lifting and transferring mechanism is located on the first secondary conveying component 42, and the lifting and transferring mechanism straddles one conveyor belt 421. Refer to Figure 2 and Figure 3, the lifting and transfer mechanism includes a hydraulic cylinder 71, a driving motor 72 and a belt 73. The hydraulic cylinder 71 is connected to the belt 73 (such as connected to the frame of the belt 73), and is used to drive the belt 73 to lift between a first position not higher than the first sub-conveying assembly 42 and a second position higher than the first sub-conveying assembly 42 and docked with the second sub-conveying assembly 43. The driving motor 72 is in transmission connection with the belt 73 (such as installed on the frame of the belt 73 and the output shaft is in transmission connection with the belt 73), and is used to drive the belt 73 to rotate. As Figure 2 and Figure 3 shown, two gaps are formed between three adjacent independent conveyor belts 421. A hydraulic cylinder 71, a driving motor 72 and a belt 73 are correspondingly arranged in each gap, and the two belts 73 are in transmission connection through a transmission rod, so that two belts 73 can be driven to rotate synchronously by one driving motor 72. In this application, the transmission direction of the belt 73 is perpendicular to the transmission direction of the conveyor belt 421, so that the semi-sheet can be conveyed from the first sub-conveying assembly 42 to the second sub-conveying assembly 43 on one side of the conveyor belt 421.

[0070] As Figure 2 shown, during the conveying process of the first type of semi-sheet 82, the lifting and transfer mechanism is controlled to be in the first position. The first type of semi-sheet 82 arrives above the lifting and transfer mechanism under the conveyance of the conveyor belt 421 of the main conveying assembly 41. At this time, the conveyor belt 421 under the lower side of the first type of semi-sheet 82 stops running, so that the first type of semi-sheet 82 is temporarily stored on the conveyor belt 421. See Figure 3 , and then the lifting and transfer mechanism is controlled to be in the second position. At this time, the first type of semi-sheet 82 is lifted and docked with the second sub-conveying assembly 43, and then the driving motor 72 is controlled to operate, and the first type of semi-sheet 82 is conveyed to the second sub-conveying assembly 43 through the belt 73.

[0071] By setting the transfer mechanism 7, it is convenient to transfer the semi-sheet between the first sub-conveying assembly 42 and the second sub-conveying assembly 43, and the conveying efficiency is improved.

[0072] Of course, the specific setting method of the transfer mechanism 7 is not unique. As long as the function of transferring the semi-sheet can be realized, the above-mentioned lifting and transfer mechanism can be replaced. For example, a push rod can be set, and the semi-sheet on the first sub-conveying assembly 42 is pushed to the second sub-conveying assembly 43 by the push rod. In addition, the setting of the transfer mechanism 7 is not necessary. When the first sub-conveying assembly 42 has the function of two-way conveyance at the same time, the setting of the transfer mechanism 7 can be omitted. For example, a rotating table can be set at the docking position of the first sub-conveying assembly 42 and the second sub-conveying assembly 43 to control the overall rotation of the conveyor belt 421, so as to realize the change of the conveying direction.

[0073] In addition, the transfer mechanism 7 is introduced in conjunction with the example of being set on the first sub-transmission component 42, but this is only a preferred embodiment. In other embodiments, the transfer mechanism 7 can also be set on the main transmission component 41, or between the main transmission component 41 and the first sub-transmission component 42, etc.

[0074] Reference Figure 1 , Figure 4 and Figure 5 In a preferred embodiment, the rotating part 3 is arranged in the main conveying assembly 41. Specifically, the main conveying assembly 41 includes a plurality of independent conveying mechanisms, and the rotating part 3 is embedded in one of the conveying mechanisms. The conveying mechanism is a conveyor belt, more specifically, two conveyor belts driven by the same driving motor with a certain distance from each other, and the rotating part 3 is arranged in the distance between the two conveyor belts. The rotating part 3 includes a rotating drive assembly 31, a rotating member 32 and a negative pressure adsorption device 33. The rotating drive assembly 31 includes a motor and a gear set, and the rotating member 32 is a turntable, and the motor drives the turntable through the gear set. Among them, the motor is fixedly connected to a fixed bracket (not shown in the figure), the turntable is rotatably connected to the fixed bracket, and the motor is connected to the turntable through the gear set. The negative pressure adsorption device 33 is connected to the turntable, and the turntable is provided with an adsorption hole. When the negative pressure adsorption device 33 is opened, negative pressure is generated through the adsorption hole, so that the half piece 81 to be detected is adsorbed on the turntable. Among them, the specific form and principle of the negative pressure adsorption device 33 are not limited in this application, and those skilled in the art can choose arbitrarily in the prior art. Furthermore, the conveying mechanism embedded in the rotating part 3 can be raised and lowered, and its lifting method is similar to the above-mentioned lifting and transferring mechanism, which will not be described in detail.

[0075] See also Figures 4 to 5 When the conveying mechanism is at a position higher than the turntable in the height direction, the rotating part 3 does not contact the half sheet to be detected. When the conveying mechanism descends to a position lower than the turntable, the rotating part 3 contacts the half sheet to be detected 81. At this time, the negative pressure adsorption device 33 is turned on to adsorb the half sheet only on the turntable, and the rotation drive component 31 is turned on to drive the turntable to rotate, thereby realizing the rotation of the half sheet. When the rotation is 90°, the rotation drive component 31 is controlled to stop rotating, and the rotation of the half sheet is completed.

[0076] By arranging the rotating part 3 in the main conveying assembly 41, the difficulty of modifying the system can be reduced, the degree of system integration can be improved, and the modification cost can be saved. By arranging the negative pressure adsorption device 33, the detected half-piece can be firmly adsorbed on the rotating member 32, thereby improving the stability of the rotation process, which is conducive to improving the working reliability of the sorting system. By arranging the conveying mechanism to be raised and lowered, the rotation stability of the half-piece 81 to be detected can be improved.

[0077] Of course, the setting manner of the rotating part 3 is not unique. Those skilled in the art can adjust the specific setting manner of the rotating part 3 on the premise of not deviating from the principle of this application, so that this application is applicable to more specific application scenarios. For example, the rotation driving assembly 31 may further include a motor and a speed reducer. The output shaft of the motor is connected to the input shaft of the speed reducer, and the input shaft of the speed reducer is connected to the turntable. For another example, in addition to the turntable, the rotating member 32 may be any component that can support and drive the rotation of the half piece, such as a claw, a strip plate, etc. For another example, when the turntable can effectively avoid slipping, the negative pressure adsorption device 33 may also be omitted. For another example, in addition to embedding the rotating part 3 in the conveying mechanism, the rotating part 3 may also be independently arranged between two adjacent conveying mechanisms, as long as the setting of the rotating part 3 does not affect the normal conveying of the half piece 81 to be detected. In addition, although the above embodiments are introduced in combination with the liftable setting of the conveying mechanism, this setting manner is not fixed. In other possible embodiments, the rotating part 3 may also be set to be liftable, or the two conveying mechanisms adjacent to the rotating part 3 may be set to be liftable. Of course, on the premise of not affecting rotation and conveying, neither the rotating part 3 nor the conveying mechanism needs to be provided with a lifting mechanism.

[0078] Continuing to refer to Figure 1 and Figure 2 , in a preferred embodiment, the first sub-conveying assembly 42 includes a plurality of independently operating conveyor belts 421. The plurality of independent conveyor belts 421 are sequentially butted to form a complete first sub-conveying assembly 42. Among them, each of the two second half-piece receiving boxes 22 corresponds to one conveyor belt 421. Similarly, the second sub-conveying assembly 43 includes a plurality of independent conveyor belts. The plurality of independent conveyor belts are sequentially butted to form a complete second sub-conveying assembly 43. Among them, each first half-piece receiving box 21 corresponds to one conveyor belt.

[0079] In this way, during the process of conveying the half piece, the half piece can be parked at a preset position by controlling the operation and stop of each independent conveyor belt. For example, when the half piece is conveyed to one side of a first half-piece receiving box 21, the conveyor belt under the half piece is controlled to stop working, so as to realize the parking and temporary storage of the half piece.

[0080] By setting that each first half-piece receiving box 21 corresponds to one conveyor belt and each second half-piece receiving box 22 corresponds to one conveyor belt, it is convenient to control the separate parking of the first type of half piece 82 and the second type of half piece 83, and improve the sorting control accuracy.

[0081] Of course, the above setting method is only preferred, and those skilled in the art can adjust it so that this application is applicable to more specific application scenarios. For example, all the first half-piece receiving boxes 21 can correspond to a complete conveyor belt, and by controlling the half-piece conveying interval and the start and stop of the conveyor belt, multiple half-pieces can be controlled to be parked on one side of the corresponding first half-piece receiving box 21. For another example, it can also be set that some of the first half-piece receiving boxes 21 correspond to one conveyor belt, etc. The same applies to the second half-piece receiving box 22 and will not be elaborated here.

[0082] Still referring to Figure 1 , the transfer unit 5 is used to transfer the inspected half-pieces to the first half-piece receiving box 21 or the second half-piece receiving box 22. Specifically, the transfer unit 5 includes a lifting and transfer mechanism 51. The lifting and transfer mechanism 51 has a third position not higher than the conveying unit 4 and a fourth position that is lifted above the conveying unit 4 under the action of a driving force and docks with the first half-piece receiving box 21 or the second half-piece receiving box 22. More specifically, each first half-piece receiving box 21 and each second half-piece receiving box 22 correspond to a lifting and transfer mechanism 51. In other words, the number of lifting and transfer mechanisms 51 is equal to the sum of the numbers of the first half-piece receiving boxes 21 and the second half-piece receiving boxes 22. Figure 1 In the shown embodiment, the transfer unit 5 includes six lifting and transfer mechanisms 51, among which four lifting and transfer mechanisms 51 are arranged corresponding to the first half-piece receiving boxes 21, and two lifting and transfer mechanisms 51 are arranged corresponding to the second half-piece receiving boxes 22.

[0083] In this application, the structural forms and working principles of the lifting and transfer mechanisms 51 included in the transfer unit 5 and the lifting and transfer mechanisms included in the transfer mechanism 7 are similar and will not be elaborated here.

[0084] Furthermore, the transfer unit 5 can transfer at least two first-type half-pieces 82 into the corresponding number of first half-piece receiving boxes 21 during one transfer process. More preferably, the transfer unit 5 can transfer the same number of first-type half-pieces 82 as the number of first half-piece receiving boxes 21 into the corresponding number of first half-piece receiving boxes 21 during one transfer process. In other words, corresponding Figure 1 to the embodiment, whenever four first-type half-pieces 82 are parked on a second auxiliary conveying component 43, four lifting and transfer mechanisms 51 are started to receive the four first-type half-pieces 82 in four first half-piece receiving boxes 21.

[0085] By configuring one lifting and transfer mechanism 51 for each first half-piece receiving box 21, the individual transfer of multiple first-type half-pieces 82 can be realized, improving the scene adaptability of half-piece sorting. Transferring the same number of first-type half-pieces 82 as the number of first half-piece receiving boxes 21 at one time can maximize the receiving speed and sorting efficiency.

[0086] Of course, the lifting and transfer mechanism 51 is only a specific implementation of the transfer unit 5. Without departing from the principle of the present application, those skilled in the art can adjust the setting method of the transfer unit 5. For example, a rotating table can be provided below the conveyor belt to achieve the collection of half pieces. It is also possible not to provide a hydraulic cylinder, but only to provide a motor and a belt, and provide a protrusion higher than the conveyor belt at a certain position on the belt, and use the process of the protrusion rotating with the belt to "push" the half piece into the collection box. Of course, the above replacement embodiments are also applicable to the transfer mechanism 7.

[0087] Furthermore, the method of the transfer unit 5 transferring the same number of first-class half pieces 82 as the number of the first half-piece collection boxes 21 at one time is not fixed. Those skilled in the art can arbitrarily adjust this number, but the efficiency of transferring the same number of first-class half pieces 82 as the number of the first half-piece collection boxes 21 at one time is the highest.

[0088] Continue to refer to Figure 1 In an embodiment, the loading component is docked with one end of the conveying unit 4 and is located upstream of the detection module 1. The loading component is used to convey the half pieces 81 to be detected to the conveying unit 4. Usually, the half pieces to be detected are placed in the cleaning basket 6. After the cleaning basket 6 is installed on the loading component, the loading component conveys the half pieces in the cleaning basket 6 to the main conveying component 41 one by one. Preferably, the loading component can accommodate two cleaning baskets 6 at the same time, and the loading component controls the two cleaning baskets 6 to alternately convey the half pieces during the loading process. After the half pieces in the first cleaning basket 6 are conveyed, the second cleaning basket 6 takes over and continues to convey the half pieces. At this time, the first cleaning basket 6 is replaced with a new basket filled with half pieces. Among them, the specific structure and working principle of the loading component are conventional means in the art, and will not be elaborated in the present application.

[0089] By providing the loading component, it is beneficial to realize the automatic loading of the half pieces 81 to be detected, and improve the automation degree and sorting efficiency.

[0090] Of course, the setting of the loading component is only a preferred embodiment. Those skilled in the art can choose whether to set it and the specific form of the loading component based on the specific application scenario. For example, the loading component can also not be provided, or be provided as a loading component that can accommodate one cleaning basket 6, three or more cleaning baskets.

[0091] In addition, it should be noted that although in the first embodiment, the material receiving box includes the first half material receiving box 21 and the second half material receiving box 22, and the conveying part 4 includes the first auxiliary conveying component 41 and the second auxiliary conveying component 42 as examples for introduction, this is only one possible embodiment. In other embodiments, those skilled in the art can adjust the above structure so that the present application is applicable to more specific application scenarios. For example, those skilled in the art can only set the first half material receiving box 21 to collect the first type of half piece 82. At this time, the first auxiliary conveying component 41 and the second auxiliary conveying component 42 can be retained, and the first half material receiving box can be set on both auxiliary conveying components, or only one auxiliary conveying component can be set to receive the first type of half piece. When only one auxiliary conveying component is set, the transfer mechanism 7 can be omitted. Another example is that those skilled in the art can also set the first half material receiving box 21 and the second half material receiving box 22 while only setting one auxiliary conveying component, and set the two correspondingly on the auxiliary conveying component at the same time.

[0092] Next, in conjunction with Figure 6 , the second preferred embodiment of the present application will be introduced.

[0093] As Figure 6 shown, in the second preferred embodiment of the present application, compared with the first preferred embodiment, the specific form of the rotating part 3 is adjusted. Specifically, the rotating part 3 includes a first transmission component 34 and a second transmission component 35 that are parallel and independently arranged with each other, and the transmission speeds of the first transmission component 34 and the second transmission component 35 are different. Preferably, the rotating part 3 is arranged upstream of the detection module 1 and between the two transmission mechanisms of the main transmission component 41. The first transmission component 34 and the second transmission component 35 are both conveyor roller assemblies, and the first transmission component 34 and the second transmission component 35 are respectively driven to operate by a driving mechanism. In this way, by controlling the rotation speeds of the two conveyor roller assemblies, the rotation speed difference can be used to control the gradual turning of the half piece during transmission. Among them, those skilled in the art can obtain the rotation speed control of the two conveyor roller assemblies based on specific application scenarios and tests, and the present application will not elaborate.

[0094] Furthermore, the rotating part 3 further includes a negative pressure adsorption device 33. The negative pressure adsorption device 33 is arranged between the first transmission component 34 and the second transmission component 35, and the negative pressure adsorption device 33 is configured to adsorb the half piece to be detected 81 on the first transmission component 34 and the second transmission component 35 when it is opened. In this embodiment, the negative pressure adsorption device 33 includes a plurality of adsorption holes, and the plurality of adsorption holes are arranged in sequence along the conveying direction of the first transmission component 34 and the second transmission component 35. When the negative pressure adsorption device 33 is opened, negative pressure is generated through the adsorption holes, so that the detected half piece is adsorbed on the first transmission component 34 and the second transmission component 35.

[0095] By setting the first transmission component 34 and the second transmission component 35 with different transmission speeds, the speed difference can be utilized to control the gradual turning of the half wafer during transmission, ultimately achieving the turning of the half wafer, and this method does not affect the transmission efficiency, which is beneficial to improving the working continuity of the sorting system. By setting the negative pressure adsorption device 33, the detected half wafer can be firmly adsorbed on the first transmission component 34 and the second transmission component 35, thereby improving the stability of the half wafer during rotation and being beneficial to improving the working reliability of the sorting system.

[0096] Of course, the specific setting method of the above-mentioned rotating part 3 is only preferred, and those skilled in the art can adjust it so that this application is applicable to more specific application scenarios. For example, although in the above-mentioned embodiment, the rotating part 3 is arranged upstream of the detection module 1 and between the two conveying mechanisms of the main conveying component 41, the setting position of the rotating part 3 is not unique, and those skilled in the art can adjust it as long as it is ensured that the half wafer has rotated 90° before reaching the detection module. For example, in addition to the roller group, the first transmission component 34 and the second transmission component 35 can also be set as conveyor belt components. Another example is that the negative pressure adsorption device 33 can also be not set on the premise of ensuring the rotation effect of the half wafer.

[0097] The following will briefly describe Figures 1 to 5 a possible working process of the half wafer sorting system of this application.

[0098] In a possible workflow, first, two cleaning baskets 6 with half wafers 81 to be detected are installed in the loading component, and then the loading component is started. The loading component transports the half wafers 81 to be detected in the cleaning basket 6 to the main transfer component 41. Then, when the main transfer component 41 transports the half wafers 81 to be detected above the rotating part 3, the transfer mechanism descends, and the rotating part rotates the half wafers 81 to be detected by 90°. After the rotation is completed, the transfer mechanism rises and lifts the half wafers 81 to be detected, and continues to transport the half wafers 81 to the detection module 1 for detection. The detection module 1 classifies the half wafers 81 to be detected according to the quality grade, and then transports the classified half wafers through the first auxiliary transfer component 42. If the half wafer grade is the first type of half wafer 82, when the first type of half wafer 82 is transported to the transfer mechanism 7, the transfer mechanism 7 lifts the first type of half wafer 82, and then the transfer mechanism 7 transfers the first type of half wafer 82 to the second auxiliary transfer component 43. Furthermore, the second auxiliary transfer component 43 transports the first type of half wafer 82 to the conveyor belt 421 on one side of the first half wafer receiving box 21 and parks it for temporary storage. When all the first half wafer receiving boxes 21 are parked with the first type of half wafer 82 correspondingly, control the lifting and transfer mechanism 51 below the first type of half wafer 82 to act, and transport all the first type of half wafer 82 to the corresponding first half wafer receiving boxes 21. If the half wafer grade is the second type of half wafer 83, the second type of half wafer 83 is directly transported to the conveyor belt 421 on one side of the second half wafer receiving box 22 and parked for temporary storage under the transportation of the first auxiliary transfer component 42. When all the second half wafer receiving boxes 22 are parked with the second type of half wafer 83 correspondingly, control the lifting and transfer mechanism 51 below the second type of half wafer 83 to act, and transport all the second type of half wafer 83 to the second half wafer receiving boxes 22.

[0099] Those skilled in the art can understand that although some of the embodiments described herein include certain features included in other embodiments rather than other features, the combination of the features of different embodiments means that it is within the scope of this application and forms different embodiments. For example, in the claims of this application, any one of the claimed embodiments can be used in any combination.

[0100] So far, the technical solutions of this application have been described in conjunction with the preferred embodiments shown in the drawings. However, it is easy for those skilled in the art to understand that the protection scope of this application is obviously not limited to these specific embodiments. Without departing from the principle of this application, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will fall within the protection scope of this application.

Claims

1. A half-sheet sorting system, characterized in that: The half-sheet sorting system comprises: The detection module is used to detect the half wafer to be detected; The conveying part comprises a main conveying assembly, one end of which is used to receive the half-sheet to be inspected, and the other end is connected to the inspection module, and the main conveying assembly comprises a plurality of independent conveying mechanisms; A rotating part, arranged upstream of the detection module and located between two adjacent conveying mechanisms or embedded in one of the conveying mechanisms, the rotating part is used to rotate the direction of the half sheet to be detected; A receiving box for receiving the inspected half sheets; The transfer unit is used to transfer the detected half-sheet to the receiving box.

2. The half-sheet sorting system according to claim 1, characterized in that: The rotating part can be raised and lowered; or When the rotating part is disposed between two adjacent conveying mechanisms, the two conveying mechanisms adjacent to the rotating part are disposed so as to be liftable; or When the rotating part is embedded in one of the conveying mechanisms, the conveying mechanism in which the rotating part is embedded can be raised and lowered.

3. The half-sheet sorting system according to claim 1 or 2, characterized in that: The rotating part includes a rotation driving assembly and a rotating member, and the rotating member is connected to the rotation driving assembly.

4. The half-sheet sorting system according to claim 3, characterized in that: The rotating part further comprises a negative pressure adsorption device, which is connected to the rotating member. The negative pressure adsorption device is configured to adsorb the half sheet to be detected onto the rotating member when the negative pressure adsorption device is opened.

5. The half-sheet sorting system according to claim 1, characterized in that: The rotating part includes a first transmission component and a second transmission component which are independently provided. The first transmission component and the second transmission component have different transmission speeds.

6. The half-sheet sorting system according to claim 5, characterized in that: The first transmission component and the second transmission component are both conveyor belt components; or The first transmission component and the second transmission component are both conveying roller components.

7. The half-sheet sorting system according to claim 6, characterized in that: The rotating part also includes a negative pressure adsorption device, which is arranged between the first transmission component and the second transmission component. The negative pressure adsorption device is configured to allow the half piece to be detected to be adsorbed on the first transmission component and the second transmission component when it is opened.

8. The half-sheet sorting system according to claim 1, characterized in that: The material receiving box comprises: A first half-sheet receiving box, for receiving the first type of half-sheets; The second half-sheet receiving box is used to receive the second type of half-sheets.

9. The half-sheet sorting system according to claim 8, characterized in that: A plurality of the first half-sheet receiving boxes are provided, and the transfer unit can transfer at least two first-type half-sheets to a corresponding number of the first half-sheet receiving boxes during one transfer process.

10. The half-sheet sorting system according to claim 9, characterized in that: A plurality of the first half sheet receiving boxes are arranged adjacent to each other; and / or The transfer unit can transfer the same number of first-category half sheets as the number of the first half-sheet receiving boxes to a corresponding number of the first half-sheet receiving boxes during one transfer process.

11. The half-sheet sorting system according to claim 8, characterized in that: The conveying part also includes a first sub-conveying component and a second sub-conveying component. The conveying direction of the first sub-conveying component is the same as the direction in which the detected half-sheet is conveyed out of the detection module. The second sub-conveying component is docked with the first sub-conveying component. A plurality of the first half-sheet receiving boxes correspond to one of the first sub-conveying component and the second sub-conveying component, and the second half-sheet receiving boxes correspond to the other of the first sub-conveying component and the second sub-conveying component.

12. The half-sheet sorting system according to claim 11, characterized in that: A transfer mechanism is provided between the first auxiliary conveying assembly and the second auxiliary conveying assembly, and the transfer mechanism is used to transfer the detected half-sheet to the second auxiliary conveying assembly.

13. The half-sheet sorting system according to claim 12, characterized in that: The transfer mechanism is a lifting and transfer mechanism, which has a first position not higher than the first sub-conveying component and a second position lifted to the top of the first sub-conveying component under the action of a driving force and docked with the second sub-conveying component.

14. The half-sheet sorting system according to claim 11, characterized in that: The conveying components corresponding to the plurality of first half-sheet receiving boxes in the first auxiliary conveying component and the second auxiliary conveying component include a plurality of independent conveying belts, and each of the first half-sheet receiving boxes corresponds to one conveying belt.

15. The half-sheet sorting system according to claim 1, characterized in that: The transfer part includes a lifting transfer mechanism, which has a third position not higher than the conveying part and a fourth position lifted to the top of the conveying part under the action of a driving force and docked with the material receiving box.

16. The half-sheet sorting system according to claim 15, characterized in that: Each of the material receiving boxes is correspondingly configured with one of the lifting and transporting mechanisms.

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