Circulating treatment device convenient for recovering polishing solution

Abstract

The invention relates to the technical field of polishing solution purification, and provides a circulating treatment device convenient for recycling polishing solution, which comprises a circulating treatment shell, a separation mechanism, a telescopic piece, a biological purification system and a driving module, a metal particle circulation cavity in the circulating treatment shell is positioned between a liquid guide pipe and a precipitate collection cavity; the sediment collecting cavity is located below the sediment cavity, a first filter cover and a sealing sleeve are fixedly connected to the inner side of the sediment cavity, the separating mechanism comprises a piston shell, a second filter cover, a first center pipe and a piston plate, the piston shell and the piston plate are both fixedly connected with the first center pipe, and the second filter cover is embedded in the surface of the piston shell. A liquid outlet hole and a polishing particle inlet hole are formed in the surface of the first center pipe, the first center pipe communicates with the precipitation cavity and the neutralization cavity, the sealing sleeve movably sleeves the surface of the first center pipe, the piston shell and the piston plate are in sliding contact with the liquid guide pipe and the inner wall of the precipitation cavity correspondingly, and the device has the advantage of purifying metal scraps and ionic heavy metal at the same time.

Description

Technical Field

[0001] The present invention relates to the technical field of polishing liquid purification, and particularly to a circulating treatment device for facilitating the recycling of polishing liquid. Background Art

[0002] In the field of chemical mechanical polishing (CMP), the formula and stability of the polishing liquid have a great influence on the polishing effect. Since various pollutants will appear in the polishing liquid during use, it is necessary to purify the contaminated polishing liquid.

[0003] After retrieval, the existing publication number CN117283461A discloses a magnetorheological polishing liquid separation and purification device and method, including a filtering mechanism for sieving large particles of the polishing liquid, a magnetic sieve mechanism for magnetically separating magnetic components in the polishing liquid, a liquid storage mechanism for storing the separated waste liquid, a mixing mechanism for remixing the separated polishing liquid with new abrasives, and a cylinder body for installing each mechanism. The filtering mechanism, the magnetic sieve mechanism, the liquid storage mechanism, and the mixing mechanism are all arranged in the cylinder body and are connected in sequence. The cylinder body is also provided with a liquid inlet and a liquid outlet. The liquid inlet is connected to the filtering mechanism, and the liquid outlet is connected to the mixing mechanism. This invention can specifically separate the components of the used magnetorheological polishing liquid, sequentially separate and discharge the grinding debris and passivated abrasives, recycle the magnetic components with reusable characteristics and mix them with new abrasives to form a new magnetorheological polishing liquid for use, realizing the purification and sustainable utilization of the magnetorheological polishing liquid and ensuring the stability of the processing performance of the magnetorheological polishing liquid.

[0004] Since during the use of the polishing liquid, not only particulate pollutants (metal waste chips) will appear, but also chemical pollutants (including inorganic oxides and organic pollutants) will appear. Inorganic oxides are formed when metals react with oxygen in the air during polishing to form oxides or ionic metals, affecting the composition of the polishing liquid. Organic pollutants are oil stains, dust, chemical reagents, etc. mixed into the polishing liquid during operation. Therefore, simply separating the grinding debris and passivated abrasives alone cannot remove the chemical pollutants in the polishing liquid. Summary of the Invention

[0005] The purpose of the present invention is to provide a circulating treatment device for facilitating the recycling of polishing liquid, aiming to solve the problems existing in the existing magnetorheological polishing liquid separation and purification device.

[0006] To achieve the above purpose, the present invention provides the following technical solution. A circulating treatment device for facilitating the recycling of polishing liquid includes:

[0007] Circulation processing housing, the circulation processing housing includes a liquid guide pipe, a precipitation cavity, a metal particle circulation cavity, a neutralization cavity and a precipitate collection cavity. The metal particle circulation cavity is located between the liquid guide pipe and the precipitate collection cavity. The precipitation cavity is distributed inside the metal particle circulation cavity. The precipitate collection cavity is located below the precipitation cavity. A first filter cover and a sealing sleeve are fixedly connected inside the precipitation cavity;

[0008] Separation mechanism, the separation mechanism includes a piston housing, a second filter cover, a first central pipe and a piston plate. The piston housing and the piston plate are both fixedly connected to the first central pipe. The second filter cover is embedded on the surface of the piston housing. Liquid outlet holes and polishing particle inlet holes are provided on the surface of the first central pipe. The first central pipe communicates with the precipitation cavity and the neutralization cavity. The sealing sleeve is movably sleeved on the surface of the first central pipe. The piston housing and the piston plate are respectively in sliding contact with the inner wall of the liquid guide pipe and the precipitation cavity;

[0009] A telescopic member connected to the first central pipe;

[0010] A biological purification system connected to the first central pipe;

[0011] A drive module drivingly connected to the first central pipe.

[0012] As a further solution of the present invention, the biological purification system includes a second central pipe, a spiral plate and a microbial attachment member. The spiral plate is fixedly connected to the surface of the second central pipe. The microbial attachment members are distributed on the surface of the spiral plate. The first central pipe is movably sleeved inside the second central pipe. Second key strips and second key grooves are respectively provided on the surface of the first central pipe and the inner wall of the second central pipe. The second key strip is in sliding connection with the second key groove.

[0013] As a further solution of the present invention, the drive module includes a drive member, a transmission pipe and a transmission gear. The transmission gear is fixedly connected to the surface of the transmission pipe. The transmission pipe is movably sleeved on the surface of the first central pipe. First key strips and first key grooves are respectively provided on the surface of the first central pipe and the inner wall of the transmission pipe. The first key strip is in sliding connection with the first key groove. The drive member is drivingly connected to the transmission gear.

[0014] As a further solution of the present invention, the inner diameter of the metal particle circulation cavity is larger than the inner diameter of the liquid guide pipe, and the inner diameter of the precipitate collection cavity is larger than the inner diameter of the precipitation cavity.

[0015] As a further solution of the present invention, the cross-sections of the first filter cover, the piston plate and the second filter cover are all conical. The first filter cover and the piston plate are respectively inclined towards the liquid guide pipe and the inner wall of the precipitation cavity. The second filter cover is inclined towards the first central pipe. The inner cross-section of the piston housing is conical, and the inner part of the piston housing is inclined towards the first central pipe.

[0016] As a further solution of the present invention, the first filter cover is located below the sealing sleeve. When the telescopic member drives the piston housing and the piston plate to move into the metal particle circulation chamber and the sediment collection chamber respectively, the liquid outlet holes are distributed within the sealing sleeve, and the second key strip disengages from the second key groove. When the telescopic member drives the piston housing and the piston plate to move into the liquid guide pipe and the sediment chamber respectively, the polishing particle inlet holes are distributed within the sealing sleeve, and the second key strip is located within the second key groove.

[0017] As a further solution of the present invention, a communication pipe group is provided between the sediment chamber and the neutralization chamber. The sediment chamber and the neutralization chamber are respectively provided with a heavy metal content monitoring module and a pH value monitoring module. The neutralization chamber is connected with a delivery pipe group and a circulation pipe group.

[0018] As a further solution of the present invention, the sediment collection chamber is provided with a sewage discharge channel.

[0019] As a further solution of the present invention, the separation mechanism further includes a sealing plate, which is fixedly connected within the first central pipe and is distributed between the liquid outlet holes and the polishing particle inlet holes.

[0020] As a further solution of the present invention, the circulation processing housing further includes a central cover located within the sediment collection chamber, and both the drive module and the telescopic member are connected within the central cover.

[0021] Advantages of the present invention: (1) This application can not only purify and remove metal debris, as well as ionic heavy metals such as lead ions, copper ions, iron ions, and zinc ions in the polishing liquid, but also separately convey the polishing particles in the polishing liquid into the neutralization chamber before purifying the ionic heavy metals. It can not only prevent the loss of polishing particles during the process of purifying ionic heavy metals, but also automatically mix the polishing particles with the purified polishing liquid, featuring good integrity of polishing particle recovery and automatic mixing of polishing particles with the purified polishing liquid;

[0022] (2) By controlling the lifting and rotation of the separation mechanism, this application can not only complete the filtration and conveyance of metal particles, sediment, and polishing particles, but also control the uniform distribution of microorganisms in polishing liquid with different orientations or different heavy metal concentrations, featuring good purification effect, convenient recovery of polishing liquid, and high working efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a perspective view of the present invention.

[0024] Figure 2 is an exploded view of the present invention.

[0025] Figure 3 is a planar cross-sectional view of the circulation processing housing of the embodiment of the present invention.

[0026] Figure 4 This is a perspective view of the separation mechanism according to an embodiment of the present invention.

[0027] Figure 5 This is an assembly drawing of the separation mechanism, biological purification system and drive module according to an embodiment of the present invention.

[0028] Figure 6 This is the first plane cross-sectional view of the present invention.

[0029] Figure 7 For the present invention Figure 6 A partial enlarged view at position a in the present invention.

[0030] Figure 8 This is the second plane cross-sectional view of the present invention.

[0031] Figure 9 This is a plane cross-sectional view of the present invention assembled with the liquid tank.

[0032] Reference numerals: 1 - liquid tank;

[0033] 2 - circulation processing housing, 21 - liquid guide pipe, 22 - precipitation cavity, 221 - first filter cover, 222 - sealing sleeve, 23 - metal particle circulation cavity, 24 - fixing sleeve, 25 - neutralization cavity, 26 - precipitate collection cavity, 261 - sewage discharge channel, 27 - central cover; 3 - separation mechanism, 31 - piston housing, 32 - second filter cover, 33 - first central pipe, 34 - liquid outlet hole, 35 - polishing particle inlet hole, 36 - sealing plate, 37 - piston plate, 38 - first key strip, 39 - second key strip;

[0034] 4 - biological purification system, 41 - second central pipe, 42 - spiral plate, 43 - microbial attachment member;

[0035] 5 - drive module, 51 - drive member, 52 - transmission pipe, 53 - transmission gear;

[0036] 6 - heavy metal content monitoring module, 7 - connecting pipe group;

[0037] 8 - conveying pipe group, 9 - circulation pipe group, 10 - pH value monitoring module, 11 - telescopic member, 111 - lifting plate. Detailed implementation manners

[0038] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0039] The following describes the specific implementation of the present invention in detail with reference to specific embodiments.

[0040] Please refer toFigures 1 to 9 , in an embodiment of the present invention, a circulating treatment device for facilitating the recycling of polishing liquid includes:

[0041] A circulating treatment housing 2, the circulating treatment housing 2 includes a liquid guiding pipe 21, a precipitation cavity 22, a metal particle circulation cavity 23, a neutralization cavity 25 and a precipitate collection cavity 26. The metal particle circulation cavity 23 is located between the liquid guiding pipe 21 and the precipitate collection cavity 26. The precipitation cavity 22 is distributed inside the metal particle circulation cavity 23. The precipitate collection cavity 26 is located below the precipitation cavity 22. A first filter cover 221 and a sealing sleeve 222 are fixedly connected inside the precipitation cavity 22;

[0042] A separation mechanism 3, the separation mechanism 3 includes a piston housing 31, a second filter cover 32, a first central pipe 33 and a piston plate 37. The piston housing 31 and the piston plate 37 are both fixedly connected to the first central pipe 33. The second filter cover 32 is embedded on the surface of the piston housing 31. Liquid outlet holes 34 and polishing particle inlet holes 35 are provided on the surface of the first central pipe 33. The first central pipe 33 communicates with the precipitation cavity 22 and the neutralization cavity 25. The sealing sleeve 222 is movably sleeved on the surface of the first central pipe 33. The piston housing 31 and the piston plate 37 are respectively in sliding contact with the inner walls of the liquid guiding pipe 21 and the precipitation cavity 22. The mesh number of the first filter cover 221 is greater than that of the second filter cover 32;

[0043] A telescopic member 11 connected to the first central pipe 33;

[0044] A biological purification system 4 connected to the first central pipe 33;

[0045] A driving module 5 drivingly connected to the first central pipe 33.

[0046] Please refer to Figure 5 and Figure 6 , further, the driving module 5 includes a driving member 51, a transmission pipe 52 and a transmission gear 53. The transmission gear 53 is fixedly connected to the surface of the transmission pipe 52. The transmission pipe 52 is movably sleeved on the surface of the first central pipe 33. First key strips 38 and first key grooves are respectively provided on the surface of the first central pipe 33 and the inner wall of the transmission pipe 52. The first key strips 38 are in sliding connection with the first key grooves. The driving member 51 is in transmission connection with the transmission gear 53.

[0047] Please refer to Figure 1 , further, the precipitate collection cavity 26 is provided with a sewage discharge channel 261, which facilitates users to collect the precipitates or heavy metal waste scraps inside the precipitate collection cavity 26 through the sewage discharge channel 261.

[0048] Please refer to Figure 7, Further, the separation mechanism 3 further includes a sealing plate 36, which is fixedly connected inside the first central tube 33, and the sealing plate 36 is distributed between the liquid outlet hole 34 and the polishing particle inlet hole 35.

[0049] Please refer to Figure 6 , Further, the circulation processing housing 2 further includes a central cover 27 located inside the sediment collection chamber 26, and both the drive module 5 and the telescopic member 11 are connected inside the central cover 27.

[0050] In an embodiment of the present invention, the liquid guide tube 21 is used to be fixedly connected to the liquid discharge port at the bottom of the liquid tank 1, and a control switch is provided at the liquid discharge port. When the polishing liquid inside the liquid tank 1 needs to be purified, the control switch is opened. The inner diameter of the metal particle circulation chamber 23 is larger than the inner diameter of the liquid guide tube 21, the inner diameter of the sediment collection chamber 26 is larger than the inner diameter of the sediment chamber 22, the cross-sections of the first filter cover 221, the piston plate 37, and the second filter cover 32 are all conical. The first filter cover 221 and the piston plate 37 are respectively inclined towards the liquid guide tube 21 and the inner wall of the sediment chamber 22, the second filter cover 32 is inclined towards the first central tube 33, the inner cross-section of the piston housing 31 is conical, and the inner part of the piston housing 31 is inclined towards the first central tube 33. The first filter cover 221 is located below the sealing sleeve 222. When the telescopic member 11 drives the piston housing 31 and the piston plate 37 to move into the metal particle circulation chamber 23 and the sediment collection chamber 26 respectively, the liquid outlet holes 34 are distributed inside the sealing sleeve 222, and the second key strip 39 disengages from the second key groove. When the telescopic member 11 drives the piston housing 31 and the piston plate 37 to move into the liquid guide tube 21 and the sediment chamber 22 respectively, the polishing particle inlet holes 35 are distributed inside the sealing sleeve 222, and the second key strip 39 is located in the second key groove.

[0051] Please refer to Figure 5 and Figure 6 , In an embodiment of the present invention, the biological purification system 4 includes a second central tube 41, a spiral plate 42, and a microbial attachment member 43. The spiral plate 42 is fixedly connected to the surface of the second central tube 41, the microbial attachment member 43 is distributed on the surface of the spiral plate 42, the first central tube 33 is movably sleeved inside the second central tube 41, second key strips 39 and second key grooves are respectively provided on the surface of the first central tube 33 and the inner wall of the second central tube 41, and the second key strips 39 are slidably connected to the second key grooves.

[0052] Please refer to Figure 6 and Figure 7 , Further, a communication pipe group 7 is provided between the sediment chamber 22 and the neutralization chamber 25. A heavy metal content monitoring module 6 and a pH value monitoring module 10 are respectively provided in the sediment chamber 22 and the neutralization chamber 25. The neutralization chamber 25 is connected with a delivery pipe group 8 and a circulation pipe group 9.

[0053] In an embodiment of the present invention, fixing sleeves 24 are fixedly connected to both the bottom of the first filter cover 221 and the inner wall of the precipitation cavity 22. The second central tube 41 is connected within the fixing sleeve 24. The external shape structure of the microbial attachment 43 is not limited and will not be elaborated further. The heavy metal content monitoring module 6 is a portable heavy metal detector, which is usually miniaturized and suitable for on-site use, and can quickly detect the concentration of heavy metals in the liquid. The pH value monitoring module 10 is a pH sensor.

[0054] Working principle: First, open the switch at the drain opening at the bottom of the liquid tank 1. The polishing liquid enters the second filter cover 32 through the liquid guide tube 21. The second filter cover 32 is used to filter large particle metal debris in the polishing liquid. The filtered polishing liquid flows through the piston housing 31, the first central tube 33, and the liquid outlet hole 34 to the first filter cover 221. The second filter cover 32 is used to filter polishing particles in the polishing liquid. The polishing liquid after secondary filtration enters the precipitation cavity 22. The microorganisms attached to the surface of the microbial attachment 43 remove heavy metals such as lead ions, copper ions, iron ions, zinc ions, etc. and organic pollutants such as oil stains in the polishing liquid through adsorption, precipitation, or biological transformation. On the one hand, it is used to convert the toxic form of heavy metals into a low-toxicity or non-toxic form, and on the other hand, it is used to reduce the heavy metal concentration in the environment. Then, the driving member 51 and the transmission gear 53 are used to control the transmission tube 52, the first central tube 33, the second central tube 41, and the spiral plate 42 to rotate at a low speed at a certain frequency, which is used to ensure uniform contact between the microorganisms and the heavy metals in the polishing liquid, achieving the purpose of uniform distribution of microorganisms in the polishing liquid with different orientations or different heavy metal concentrations, improving the microbial activity and the heavy metal purification efficiency. The precipitate generated by the purification adheres to the surface of the piston plate 37.

[0055] When the heavy metal content monitoring module 6 detects that the heavy metal content in the precipitation cavity 22 meets the set threshold, first, the connecting pipe group 7 is used to transport the polished liquid after precipitation into the neutralization cavity 25. Then, the telescopic member 11 is used to control the lowering of the lifting plate 111 and the first central pipe 33, so that the piston housing 31 and the piston plate 37 move into the metal particle circulation cavity 23 and the sediment collection cavity 26 respectively. Since the liquid outlet holes 34 are distributed within the sealing sleeve 222, the polishing particle inlet hole 35 extends out of the fixed sleeve 24, and the second key strip 39 disengages from the second key groove. Therefore, the driving module 5 can independently control the high-speed rotation of the first central pipe 33, the piston housing 31, and the piston plate 37. Since the inner diameter of the metal particle circulation cavity 23 is larger than the inner diameter of the liquid guide pipe 21, and the inner diameter of the sediment collection cavity 26 is larger than the inner diameter of the precipitation cavity 22, the centrifugal force generated by the rotation of the piston housing 31 is used to fly the metal debris on the surface of the second filter cover 32 into the metal particle circulation cavity 23, and the metal debris enters the sediment collection cavity 26 through the metal particle circulation cavity 23. The centrifugal force generated by the rotation of the piston plate 37 is used to fly the sediment into the sediment collection cavity 26. The polishing particles on the surface of the first filter cover 221 automatically enter the neutralization cavity 25 through the polishing particle inlet hole 35 and the first central pipe 33 under the action of gravity. On the premise of determining the pH value parameter monitored by the pH value monitoring module 10, then the neutralizing agent is transported into the neutralization cavity 25 by using the conveying pipe group 8. When the pH value of the purified polished liquid meets the preset threshold, the turbidity meter can also be used to measure the concentration of the polishing particles in the neutralization cavity 25. When the concentration of the polishing particles is lower than the threshold, polishing particles are replenished into the neutralization cavity 25. Finally, the circulation pipe group 9 is used to circulate and transport the polished liquid into the liquid spraying pipe group, so as to realize the function of recycling and treating the polished liquid.

[0056] In summary, the present application can not only purify and remove metal debris and ionic heavy metals such as lead ions, copper ions, iron ions, and zinc ions in the polished liquid, but also transport the polishing particles in the polished liquid into the neutralization cavity 25 alone before purifying the ionic heavy metals. It can not only prevent the loss of polishing particles during the process of purifying ionic heavy metals, but also automatically mix the polishing particles with the purified polished liquid, and has the characteristics of good integrity of polishing particle recovery and automatic mixing of polishing particles with the purified polished liquid;

[0057] By controlling the lifting and rotation of the separation mechanism 3, the present application can not only complete the filtration and transportation of metal particles, sediment, and polishing particles, but also control the uniform distribution of microorganisms in the polished liquid with different orientations or different heavy metal concentrations, and has the characteristics of good purification effect, convenient recovery of polished liquid, and high working efficiency.

[0058] For those skilled in the art, although several embodiments and examples of the present invention are described, these embodiments and examples are presented as examples and are not intended to limit the scope of the invention. These new embodiments can be implemented in various other ways, and various omissions, substitutions, and changes can be made without departing from the gist of the invention.

[0059] In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative manner of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A circulation treatment device for recovering polishing liquid, characterized in that: include: A circulation treatment shell (2), the circulation treatment shell (2) comprising a liquid guide tube (21), a sedimentation chamber (22), a metal particle circulation chamber (23), a neutralization chamber (25) and a sediment collection chamber (26), the metal particle circulation chamber (23) being located between the liquid guide tube (21) and the sediment collection chamber (26), the sedimentation chamber (22) being distributed inside the metal particle circulation chamber (23), the sediment collection chamber (26) being located below the sedimentation chamber (22), and a first filter cover (221) and a sealing sleeve (222) being fixedly connected to the inside of the sedimentation chamber (22); A separation mechanism (3), the separation mechanism (3) comprising a piston shell (31), a second filter cover (32), a first central tube (33) and a piston plate (37), the piston shell (31) and the piston plate (37) are both fixedly connected to the first central tube (33), the second filter cover (32) is embedded in the surface of the piston shell (31), the surface of the first central tube (33) is provided with a liquid outlet (34) and a polishing grain inlet (35), the first central tube (33) is connected to the precipitation chamber (22) and the neutralization chamber (25), the sealing sleeve (222) is movably sleeved on the surface of the first central tube (33), and the piston shell (31) and the piston plate (37) are in sliding contact with the inner wall of the liquid guide tube (21) and the precipitation chamber (22) respectively; A telescopic member (11) connected to the first central tube (33); A biological purification system (4) connected to the first central tube (33); A driving module (5) is drivingly connected to the first central tube (33).

2. A circulation treatment device for recovering polishing liquid according to claim 1, characterized in that: The biological purification system (4) comprises a second central tube (41), a spiral plate (42) and a microorganism attachment part (43); the spiral plate (42) is fixedly connected to the surface of the second central tube (41); the microorganism attachment part (43) is distributed on the surface of the spiral plate (42); the first central tube (33) is movably sleeved in the second central tube (41); the surface of the first central tube (33) and the inner wall of the second central tube (41) are respectively provided with a second key strip (39) and a second key groove; the second key strip (39) is slidably connected to the second key groove.

3. A circulation treatment device for recovering polishing liquid according to claim 2, characterized in that: The driving module (5) comprises a driving member (51), a transmission tube (52) and a transmission gear (53); the transmission gear (53) is fixedly connected to the surface of the transmission tube (52); the transmission tube (52) is movably sleeved on the surface of the first central tube (33); the surface of the first central tube (33) and the inner wall of the transmission tube (52) are respectively provided with a first key strip (38) and a first key groove; the first key strip (38) is slidably connected to the first key groove; the driving member (51) is transmission-connected to the transmission gear (53).

4. A circulation treatment device for recovering polishing liquid according to claim 1, characterized in that: The inner diameter of the metal particle circulation cavity (23) is greater than the inner diameter of the liquid guiding tube (21), and the inner diameter of the sediment collection cavity (26) is greater than the inner diameter of the sedimentation cavity (22).

5. A circulating treatment device for recovering polishing liquid according to claim 1, characterized in that: The first filter cover (221), the piston plate (37) and the second filter cover (32) are all conical in cross-section; the first filter cover (221) and the piston plate (37) are inclined toward the inner wall of the liquid guide tube (21) and the sedimentation chamber (22) respectively; the second filter cover (32) is inclined toward the first central tube (33); the internal cross-section of the piston shell (31) is conical; the interior of the piston shell (31) is inclined toward the first central tube (33).

6. A circulation treatment device for recovering polishing liquid according to claim 3, characterized in that: The first filter cover (221) is located below the sealing sleeve (222); when the telescopic member (11) drives the piston shell (31) and the piston plate (37) to move into the metal particle circulation chamber (23) and the sediment collection chamber (26) respectively, the liquid outlet hole (34) is distributed in the sealing sleeve (222), and the second key strip (39) is separated from the second key groove; when the telescopic member (11) drives the piston shell (31) and the piston plate (37) to move into the liquid guide tube (21) and the sedimentation chamber (22) respectively, the polishing particle inlet hole (35) is distributed in the sealing sleeve (222), and the second key strip (39) is located in the second key groove.

7. A circulation treatment device for recovering polishing liquid according to claim 1, characterized in that: A connecting pipe group (7) is provided between the precipitation chamber (22) and the neutralization chamber (25); the precipitation chamber (22) and the neutralization chamber (25) are provided with a heavy metal content monitoring module (6) and a pH value monitoring module (10) respectively; and the neutralization chamber (25) is connected to a conveying pipe group (8) and a circulation pipe group (9).

8. A circulation treatment device for recovering polishing liquid according to claim 1, characterized in that: The sediment collection chamber (26) is provided with a sewage discharge channel (261).

9. A circulation treatment device for recovering polishing liquid according to claim 1, characterized in that: The separation mechanism (3) further comprises a sealing plate (36), wherein the sealing plate (36) is fixedly connected inside the first central tube (33), and the sealing plate (36) is distributed between the liquid outlet hole (34) and the polishing grain inlet hole (35).

10. A circulation treatment device for recovering polishing liquid according to claim 3, characterized in that: The circulation treatment housing (2) further comprises a central cover (27) located in the sediment collection chamber (26), and the driving module (5) and the telescopic member (11) are both connected in the central cover (27).

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