Multi-roller cutting mechanism and wire cutting machine
By optimizing the groove design on the roller body in the multi-roll cutting mechanism, the problem of excessive concentration of the cutting force on the silicon wafer area and difficult to control the fluctuation of TTV is solved, and the effect of improving the cutting force and reducing the average value of TTV is achieved.
Patent Information
- Application Number
- CN202311628104.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2023-11-30
- Publication Date
- 2025-05-30
AI Technical Summary
In a multi-roll cutting mechanism, how to take into account the TTV mean and optimize the cutting force to solve the problem of excessive concentration of the cutting force on the silicon wafer area and difficult to control the TTV fluctuation.
By optimizing the groove design on different roller bodies, the shape, size and distribution of the first groove structure and the second groove structure are designed, so that the cutting line has less friction on the first groove structure, which can easily fall to the bottom of the groove, and improve the cutting force; on the second groove structure, the groove wall angle is smaller and the friction is greater, and the cutting line is generally tightened, reducing the TTV average.
It is realized that cutting force and TTV average are reduced in the multi-roll cutting mechanism, ensuring cutting quality and stability.
Smart Images

Figure CN120056285A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to a component or device for cutting, and particularly to a multi-roller cutting mechanism and a wire cutting machine. Background Art
[0002] At present, the multi-wire cutting method is mainly adopted in the slicing process of single-crystalline silicon products. With the continuous progress of technology, the cutting process pursues thinning and thinning of wires; during the process of thinning and thinning, due to the thinning of the silicon wafer and the narrowing of the wire width, the influence of the cutting force on a single silicon wafer area is more concentrated and sensitive, and the fluctuation of the TTV average value (the average deviation of the thickness of the cut product) is also increasingly difficult to control.
[0003] Particularly for the multi-roller cutting mechanism, in order to reduce the TTV average value, it is necessary to ensure that there is sufficient contact force between the cutting wire and the material to be cut (such as a silicon rod), and to maintain the balanced operation between multiple rollers. However, an excessive contact force will cause an increase in the cutting force, which may cause deformation, damage or even cutting failure of the material to be cut, while an insufficient contact force may cause the cutting wire to slip and shift, affecting the cutting quality. Therefore, the contradiction between the TTV average value and the cutting force is one of the technical difficulties of the multi-roller cutting mechanism.
[0004] Based on the above, how to design a multi-roller cutting mechanism that can take into account the TTV average value and optimize the cutting force has become a technical problem that needs to be solved urgently in this field. Summary of the Invention
[0005] Aiming at the above technical problems, the purpose of the present application is to improve the support and positioning state of the cutting wire during the cutting process by optimizing the groove design on different roller bodies, and by targeting the functional positioning of each roller body, and designing the shape, size and distribution of the wire grooves, so as to reduce the TTV average value and increase the cutting force.
[0006] Therefore, in the first aspect of the present application, a multi-roller cutting mechanism is provided. The multi-roller cutting mechanism includes: a roller body group, including at least two first roller bodies and at least one second roller body, and the first roller bodies are located on the feeding side; a first groove structure surrounding the circumferential surface is provided on the circumferential surface of the first roller body, and a second groove structure surrounding the circumferential surface is provided on the circumferential surface of the second roller body. The first groove structure and the second groove structure are used for installing the cutting wire; wherein, in the direction from the opening to the groove bottom, the cross-section of the first groove structure and the second groove structure gradually narrows, and the angle of at least one side wall of the first groove structure is greater than the angle of any side wall of the second groove structure.
[0007] In an optional solution of the present application, both the first groove structure and the second groove structure are symmetric structures; or the first groove structure is an asymmetric structure and the second groove structure is a symmetric structure.
[0008] In a further aspect of the present application, both the first groove structure and the second groove structure are symmetric structures, and the angles of the two side walls of the first groove structure are greater than the angle of any one side wall of the second groove structure; wherein, the first groove structure includes a U-shaped groove; the second groove structure includes at least one of a V-shaped groove, a trapezoidal groove or an arc-shaped groove.
[0009] In a further aspect of the present application, the first groove structure is an asymmetric structure and the second groove structure is a symmetric structure; the first groove structure includes: a first groove wall and a second groove wall, the first groove wall is perpendicular to the axial direction of the first roller body; the second groove wall forms a preset angle with the first groove wall, and the angle of the second groove wall is greater than or equal to the angle of any one side wall of the second groove structure; the second groove structure includes at least one of a V-shaped groove, a trapezoidal groove or an arc-shaped groove.
[0010] In a further aspect of the present application, the first groove depth from the groove opening to the groove bottom of the first groove structure is greater than the second groove depth from the groove opening to the groove bottom of the second groove structure.
[0011] In a further aspect of the present application, the groove bottom of the first groove structure is arc-shaped and is adapted to the bottom of the cutting line so that the bottom of the cutting line fits with the groove bottom; the groove bottom of the second groove structure is arc-shaped and is adapted to the bottom of the cutting line, and the groove bottom width of the second groove structure is greater than the groove bottom width of the first groove structure.
[0012] In an alternative aspect of the present application, the first groove structures and the second groove structures are arranged at intervals along the length directions of the first roller body and the second roller body respectively, wherein the first distance between adjacent first groove structures is greater than or equal to the second distance between adjacent second groove structures.
[0013] In a further aspect of the present application, the first groove structures on the two first roller bodies are symmetrically arranged with respect to the radial direction of the first roller body.
[0014] In a further aspect of the present application, the axial distances between the two first roller bodies and between the first roller body and the second roller body are 330 mm to 420 mm.
[0015] In an alternative aspect of the present application, the cutting line is arranged at intervals of every 1 to 5 first groove structures.
[0016] In an alternative aspect of the present application, there are two first roller bodies which are arranged in parallel at intervals; the second roller body is arranged on one side of the first roller body along the cutting direction, and the first roller bodies are symmetrically arranged with respect to the second roller body.
[0017] In an alternative aspect of the present application, the first roller bodies are equidistantly distributed from each other, and the first roller bodies and the second roller body are also equidistantly distributed from each other.
[0018] In the second aspect of the present application, a wire cutting machine is also provided, comprising: a multi-roller cutting mechanism as described above; a wire group, comprising a plurality of cutting wires, the cutting wires being wound around the surface of the roller group to form a wire net; a driving mechanism, connected to the multi-roller cutting mechanism, for driving the multi-roller cutting mechanism to rotate.
[0019] In summary, the present application provides a multi-roller cutting mechanism, which includes a roller group, the roller group includes at least two first rollers and at least one second roller, wherein the first roller is located on the feed side. The first roller and the second roller are provided with a first groove structure and a second groove structure surrounding the circumference on their circumferential surfaces, respectively. In this multi-roller cutting mechanism, the cross-sections of the first groove structure and the second groove structure gradually narrow from the opening to the bottom of the groove, so as to better fix and constrain the cutting line; at the same time, the angle of at least one groove wall of the first groove structure is greater than the angle of the groove wall of the second groove structure, so as to achieve a targeted design of the upper groove structure according to the different functional domains of each roller of the multi-roller cutting mechanism, and at least achieve the following effects:
[0020] 1. Since the angle of at least one groove wall of the first groove structure is relatively large, when the material passes through the cutting line, the friction between the first groove structure and the cutting line is smaller, making it easier for the cutting line to fall to the bottom of the groove, thereby improving the cutting force.
[0021] 2. The angle of the groove wall of the second groove structure is smaller, so that when cutting, the groove is subjected to greater friction force, and twisting occurs when it runs to the position of the groove wall. Since the groove wall is at a certain inclination angle, the twisting of the second groove structure is more likely to occur, making the cutting line as a whole tight, thereby reducing the TTV average value.
[0022] It should be noted that, in the present application, the angle of the groove wall of the first groove structure and the second groove structure is not the opening angle of the two grooves, but the groove wall on one side of the first groove structure or the second groove structure is the focus, and the angle formed by the groove wall and the horizontal direction of the groove structure is the defining reference point. For specific interpretation, please refer to the specific implementation method section below.
[0023] Other features and advantages of the embodiments of the present application will be described in the subsequent detailed description. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.
[0025] Figure 1 A schematic diagram of the structure of a multi-roller cutting mechanism provided in an embodiment of the present invention;
[0026] Figure 2 It is a cross-sectional view of the first groove structure of the first roller body provided by the embodiment of the present invention in the A-A direction;
[0027] Figure 3 It is a cross-sectional view of the second groove structure of the first roller body provided by the embodiment of the present invention in the C-C direction;
[0028] Figure 4 It is a cross-sectional view of the first groove structure of another first roller body provided by the embodiment of the present invention in the B-B direction;
[0029] Figure 5 The left and right respectively demonstrate schematic diagrams of the movement positions of the cutting line in the V-shaped groove and the inclined groove.
[0030] Explanation of reference numerals:
[0031] 100, multi-roller cutting mechanism;
[0032] 10, roller body group;
[0033] 11, first roller body; 111, first groove structure; 11a, first groove wall;
[0034] 12, second roller body; 121, second groove structure; 11b, second groove wall. Detailed implementation manners
[0035] Descriptions of terms such as "center", "lateral", "upper", "lower", "bottom", "side", "end", "circumferential surface", "length direction", etc. indicating orientation or positional relationship, without special instructions, are understood to be based on the orientation or positional relationship shown in the drawings, only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, so it cannot be understood as a limitation to the present application.
[0036] In addition, features defined with "first" and "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Features defined with "first" and "second" may explicitly or implicitly include at least one of the defined features. When the description of "a plurality" appears, the general meaning is at least including two, such as two, three, etc., unless otherwise clearly and specifically defined.
[0037] In this application, unless otherwise clearly specified and defined, terms such as "installed" and "connected" shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection, it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two components or the interaction relationship between two components. For those skilled in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0038] In the description of this specification, terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of this application. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.
[0039] Figure 1 The structural schematic diagram of an embodiment of the multi-roller cutting mechanism 100 is shown.
[0040] The present invention provides a multi-roller cutting mechanism 100, which includes a roller body group 10. The roller body group 10 includes at least two first roller bodies 11 located on the feeding side, and at least one second roller body 12 connected to the first roller body 11 through a cutting wire; when there are two first roller bodies 11 and one second roller body 12, the multi-roller cutting mechanism 100 is then a three-roller cutting mechanism at this time.
[0041] Those skilled in the art can understand that the first roller body 11 is close to the feeding side, and the "material" refers to the silicon material product to be cut, and the silicon rod is one specific form. When the silicon rod is sent to the side of the multi-roller cutting mechanism 100 for cutting, the first roller body 11 serves as the main roller participating in the cutting, and the cutting wire between them constitutes the cutting area.
[0042] The silicon rod is fixed by an auxiliary adhesive plate and moved to this cutting area. The first roller body 11 and the second roller body 12 are both axially rotated under the driving action. The first roller body 11 is used to make the cutting wire feed at high speed between them, so as to cut the silicon rod reciprocally. The second roller body 12 is used to realize the conveying and transfer of the cutting wire and control the tension of the cutting wire.
[0043] Refer to Figures 2 to 3 , Figures 2 to 3They are cross-sectional views of the first groove structure 111 and the second groove structure 121 along the longitudinal radial direction of the roller body. The first groove structure 111 is provided on the circumferential surface of the first roller body 11, and the second groove structure 121 is provided on the circumferential surface of the second roller body 12; the first groove structure 111 and the second groove structure 121 are arranged along the length direction of the first roller body 11 and the second roller body 12 respectively, and are used to install and position the cutting line, so that the cutting line presents a certain regular arrangement.
[0044] Taking the first groove structure 111 as an example, it is processed around the outer circumference of the first roller body 11 , and each individual first groove structure 111 is an annular groove, and the second groove structure 121 is the same.
[0045] In the embodiment of the present invention, the cross-sections of the first groove structure 111 and the second groove structure 121 gradually narrow in the direction from the opening to the groove bottom.
[0046] It can be understood that the first slot structure 111 and the second slot structure 121 are both wide at the top and narrow at the bottom, which can facilitate the workers to quickly install and remove the cutting line while positioning the cutting line.
[0047] Furthermore, the angle of at least one side of the groove wall of the first groove structure 111 is greater than the angle of any side of the groove wall of the second groove structure 121 .
[0048] In the embodiment of the present invention, "groove wall" refers to the side surface inside the first groove structure 111 and the second groove structure 121. The angle of the groove wall is shown as: the angle between the line from the edge of a groove structure notch to the end point of the groove wall at the bottom of the groove and the horizontal direction of the groove structure. For example, the angles u1 and u2 marked in the figure; the angle of at least one groove wall in the first groove structure 111 mentioned above is greater than the angle of the groove wall of the second groove structure 121, which is characterized by at least one groove wall of the first groove structure 111 being steeper than all the groove walls of the second groove structure 121, so as to achieve the multi-roller cutting mechanism 100, the cutting force of the cutting line can be increased at the first roller body 11, and the TTV mean value can be reduced at the second roller body 12. The principle is as follows:
[0049] During the cutting process of the silicon rod, the cutting wire needs to cut the silicon rod, and the first groove structure 111 directly affects the cutting force of the cutting wire. The first groove structure 111 is designed such that at least one side wall is steeper than all the side walls of the second groove structure 121. Thus, at the first roller body 11, due to the relatively large angle of the side wall, the frictional force received by the cutting wire on the side wall of the first groove structure 111 is smaller (the influencing factors of the frictional force are the contact area, the material of the side wall, and the angle of the force. When the side wall is steeper, its angle is smaller and the contact area is smaller). By reducing the frictional force of the cutting wire on the side wall, the cutting wire cannot undergo obvious torsion, its movement trajectory is more likely to incline downward, and it is easier to fall to the bottom of the groove. Relatively, when the cutting wire is supported at the bottom of the groove, the force borne by the silicon rod during the downward cutting process in the cutting area will increase, that is, the relative cutting force also correspondingly increases at this time.
[0050] At the second roller body 12, in order to achieve the purpose of reducing the average TTV value, the second groove structure 121 is designed with a smaller side wall angle. Then, the relative frictional force of the cutting wire on the inclined surface of the side wall is larger, and the cutting wire as a whole is more likely to undergo torsion. Therefore, the second groove structure 121 can make the overall cutting wire taut, effectively reduce the average TTV value, and thus achieve a better cutting effect.
[0051] In the solution provided by the present invention, both the first groove structure 111 and the second groove structure 121 are symmetric structures; alternatively, the first groove structure 111 is an asymmetric structure and the second groove structure 121 is a symmetric structure.
[0052] In an optional embodiment of the present invention, both the first groove structure 111 and the second groove structure 121 are symmetric structures, and the angles of the two side walls of the first groove structure 111 are both greater than the angle of any side wall of the second groove structure 121; wherein, the first groove structure 111 includes a U-shaped groove; the second groove structure 121 includes at least one of a V-shaped groove, a trapezoidal groove, or an arc-shaped groove.
[0053] It can be understood that since both the first groove structure 111 and the second groove structure 121 are symmetric structural designs, the distribution of forces can be better balanced, and the stability and strength of the structure can be enhanced. The difference between the "U-shaped groove" and the "arc-shaped groove" lies in the difference in the angle of their side walls, that is, both side walls of the "U-shaped groove" are perpendicular to the axis of the length direction of the roller body. When the first groove structure 111 is a U-shaped groove and the second groove structure 121 is at least one of a V-shaped groove, a trapezoidal groove, or an arc-shaped groove, the angles of the two side walls of the first groove structure 111 are both greater than the angle of any side wall of the second groove structure 121, the frictional force received by the cutting wire at the side wall within the first groove structure 111 is smaller, and the U-shaped groove makes it easier for the cutting wire to fall into the bottom of the groove.
[0054] In another alternative embodiment of the present invention, the first groove structure 111 is an asymmetric structure, and the second groove structure 121 is a symmetric structure; the first groove structure 111 includes: a first groove wall 11a and a second groove wall 11b, the first groove wall 11a is perpendicular to the axial direction of the first roller body 11; the second groove wall 11b forms a preset angle with the first groove wall 11a, and the angle u1 of the second groove wall 11b is greater than or equal to the angle u2 of any one side groove wall of the second groove structure 121; the second groove structure 121 includes at least one of a V-shaped groove, a trapezoidal groove or an arc groove.
[0055] In an embodiment of the present invention, as Figure 2 shown, this asymmetric groove structure in which one side groove wall is perpendicular to the axis of the roller where it is located and the other side groove wall is inclined relative to the axis of the roller where it is located is called an inclined groove, and the same applies hereinafter. That is, when the first groove structure 111 is an inclined groove and the second groove structure 121 is a symmetric V-shaped groove, trapezoidal groove or arc groove, since one side groove wall of the inclined groove is perpendicular to the axis of the roller where it is located, the friction force of the cutting wire on this groove wall can be reduced, so that the cutting wire is more likely to fall into the bottom of the groove, increasing the cutting force in the cutting area.
[0056] In summary, a multi-roller cutting mechanism 100 provided by an embodiment of the present invention includes: a roller body group 10, the roller body group 10 includes at least two first roller bodies 11 located on the feeding side, and at least one second roller body 12 connected to the first roller body 11 by a cutting wire; wherein, first groove structures 111 and second groove structures 121 surrounding the circumferences are respectively provided on the circumferences of the first roller body 11 and the second roller body 12, the second groove structure 121 is provided on the circumference of the second roller body 12, and the first groove structures 111 and the second groove structures 121 are used for installing cutting wires; the cross-sections of the first groove structures 111 and the second groove structures 121 gradually narrow in the direction from the opening to the bottom of the groove, and the angle of at least one groove wall of the first groove structure 111 is greater than the angle of the groove wall of the second groove structure 121, so as to improve the cutting force and reduce the average value of TTV for the multi-roller cutting mechanism 100.
[0057] The following provides a specific embodiment:
[0058] Refer to Figures 1 to 4 ; Figure 4 It is a sectional view of the first groove structure 111 along the long radial direction of the roller where it is located provided by an embodiment of the present invention.
[0059] The multi-roller cutting mechanism 100 adopts a three-roller cutting mechanism, including two first roller bodies 11 arranged in parallel at intervals. Taking the cutting direction of the silicon rod from top to bottom as the orientation reference, the second roller body 12 is arranged below the first roller body 11, and the first roller body 11 is symmetrically arranged relative to the second roller body 12.
[0060] The parallel spacing and symmetric arrangement between the first rollers 11 can improve the stability and accuracy of cutting. Those skilled in the art should understand that when the silicon rod passes through the cutting area between the first roller 11 and the second roller 12, the cutting wire will form a straight path between the two rollers. If the spacing between the rollers is not parallel, the cutting wire may shift or bend, resulting in inaccurate cutting results. Therefore, by setting the parallel spacing, the linearity of the cutting wire can be maintained to ensure the accuracy of cutting. The symmetric arrangement of the first roller 11 and the second roller 12 helps to balance the cutting force. Due to various factors such as the shape and material of the silicon rod, uneven forces may be applied to the cutting wire during the cutting process. By symmetrically arranging the first roller 11 and the second roller 12, the cutting force can be balanced as much as possible and evenly distributed on the silicon rod. This can prevent the cutting wire from deviating from the predetermined path, while reducing the stress difference on the silicon rod and improving the stability of cutting and the accuracy of the cutting wire.
[0061] Further, in the embodiment of the present invention, the first rollers 11 are equidistantly distributed from each other, and the first roller 11 and the second roller 12 are also equidistantly distributed from each other. This setting can ensure the stability of the cutting wire when passing through two different rollers, and can reduce the uneven distribution of the cutting force, improving the stability and consistency of cutting.
[0062] The axial spacing between the rollers can be adjusted according to actual needs. Generally, the axial spacing between the rollers is determined according to the size of the cutting material, the diameter of the silicon rod, and the hardware configuration of the cutting mechanism. In the preferred solution for this specific embodiment, the axial spacing between the first rollers 11 and between the first roller 11 and the second roller 12 is 330 mm to 420 mm to balance cutting accuracy and cutting speed.
[0063] Both of the two first rollers 11 are provided with a plurality of first groove structures 111, and the second roller 12 is provided with a plurality of second groove structures 121. The first groove structures 111 and the second groove structures 121 are respectively arranged at intervals along the length directions of the first roller 11 and the second roller 12. The first distance L1 between adjacent first groove structures 111 is greater than or equal to the second distance L2 between adjacent second groove structures 121.
[0064] Wherein, the first distance L1 and the second distance L2 are defined as the distance between the lowest points of the bottoms of the first groove structures 111 or the second groove structures 121.
[0065] Furthermore, the cutting wire is installed at intervals of 1 to 5 first groove structures 111.
[0066] It is understandable that the first distance L1 between the first groove structures 111 on the first roller body 11 determines the minimum thickness of the silicon rod to be cut. By reducing the distance between the first groove structures 111, a more precise cutting specification can be provided, and the cutting wire can be adaptively installed according to the thickness of the silicon rod to be cut. Exemplarily, the cutting wire is installed at every other first groove structure 111 along the length direction of the first roller body 11, that is, from one end of the first roller body 11 to the other end, winding in sequence from the 1st, 3rd, 5th... first groove structures 111. At this time, the thickness of the silicon rod to be cut is twice that of L1.
[0067] In a further embodiment of the present invention, the cutting wire is installed in an offset groove manner on the first groove structure 111 and the second groove structure 121. Exemplarily, the cutting wire is spaced and wired starting from the 1st first groove structure 111 along the length direction of one of the first roller bodies 11, that is, winding in sequence from the 1st, 3rd, 5th... first groove structures 111. In the other first roller body 11, it starts to be spaced and wired from the 3rd first groove structure 111, that is, winding in sequence from the 3rd, 5th, 7th... first groove structures 111. In the second roller body 12, it starts to be spaced and wired from the 2nd second groove structure 121, that is, winding in sequence from the 2nd, 4th, 6th... second groove structures 121. This installation method can make the cutting wire inclined and straightened to control the tension of the cutting wire and ensure stability and consistency. In addition, using the offset groove installation can also optimize the force, reduce wear and friction, and extend the service life of the device and the cutting wire.
[0068] In a preferred embodiment of the present invention, the first distance L1 and the second distance L2 are equal, and both are 0.17 mm to 0.21 mm.
[0069] As a further preferred embodiment of the present invention, the first groove structure 111 adopts an inclined groove, including a first groove wall 11a and a second groove wall 11b, wherein the first groove wall 11a is perpendicular to the axial direction of the first roller body 11; the second groove wall 11b is arranged at an angle (it can be known from common sense that this angle can only be an acute angle) with the first groove wall 11a; the second groove structure 121 adopts a V-shaped groove.
[0070] Such as Figure 2 And Figure 4, in the embodiment of the present application, the first groove structures 111 on the two first roller bodies 11 are symmetrically arranged along the radial plane of the first roller body 11, that is, on the two parallel first roller bodies 11, the process parameters of the grooves of the first groove structures 111 are kept consistent. However, the first groove structure 111 on one of the first roller bodies 11 is the mirror image of the first groove structure 111 on the other first roller body 11 along the radial plane. Specifically, assuming the direction from one end to the other end along the axial direction of the first roller body 11, for the first groove structure 111 on one of the first roller bodies 11, its first groove wall 11a is on the left and the inclined second groove wall 11b is on the right (as Figure 2 ), then for the first groove structure 111 on the other first roller body 11, its second groove wall 11a is on the right and the inclined second groove wall 11b is on the left (as Figure 4 ).
[0071] When installing the cutting wire, the wire winding and unwinding are routed into one of the first roller bodies 11 from the end along the length direction and pulled out from the other end, while the cutting wire is installed in the reverse way on the other first roller body 11. By reversing the direction of the cutting wire, a more stable cutting environment can be formed between the two first roller bodies 11. Since the forces and frictions applied to the silicon rod during the cutting process will have a certain impact on the silicon rod, the reverse installation method may help to balance and reduce these impacts, improve the cutting accuracy and stability, and reduce the risks such as the cutting wire jumping or breaking.
[0072] In another solution, the first groove structures 111 on the two first roller bodies 11 are arranged in the same way, that is, the first groove structures 111 are symmetrically arranged along the central plane of the first roller body 11 in the axial direction, and can be specifically arranged adaptively according to the required installation form of the cutting wire.
[0073] As can be known to those skilled in the art from the above, except for the different angles of the groove walls, the first groove structure 111 and the second groove structure 121 can be improved in terms of process or material. For example, when processing the groove walls of the first groove structure 111 and the second groove structure 121, a spray coating or a heat treatment nitride layer, etc. can be applied to the groove walls to achieve different roughnesses, or the first roller body 11 and the second roller body 12 are made of different known materials, which all fall within the extended protection scope of the present invention.
[0074] Refer to Figure 2 , further, the first groove depth h1 from the groove opening to the groove bottom of the first groove structure 111 is greater than the second groove depth h2 from the groove opening to the groove bottom of the second groove structure 121. In an optional embodiment of the present invention, the first groove depth h1 is between 0.16 mm and 0.22 mm; the second groove depth h2 is between 0.14 mm and 0.20 mm.
[0075] It can be understood that since the first groove structure 111 is located on the first roller body 11 on the feeding side, the cutting wire inside it directly participates in the silicon material cutting, and the frictional force on the inner wall of its first groove structure 111 is relatively small. Therefore, by making the first groove depth h1 greater than the second groove depth h2, the groove depth of the first roller body 11 is ensured, avoiding the situation of wire jumping caused by the interaction between the silicon rod and the cutting wire during the cutting process, and improving the stability and reliability during the cutting process.
[0076] In a preferred solution of the embodiment of the present invention, the bottom of the first groove structure 111 is arc-shaped and matches the bottom of the cutting wire, so that the bottom of the cutting wire fits with the bottom of the groove, improving the constraint on the wire body of the cutting wire when the cutting wire falls into the bottom of the first groove structure 111, ensuring that the cutting wire remains stable during the cutting operation, and improving the cutting quality.
[0077] In a further solution of the embodiment of the present invention, the second groove structure 121 is an axially symmetric V-shaped groove, and its bottom can also be arc-shaped or flat, and by increasing the width of the bottom of the second groove structure 121, the bottom width w2 of the second groove structure 121 is greater than the bottom width w1 of the first groove structure 111.
[0078] It can be understood that by increasing the bottom width of the second groove structure 121 and increasing the internal lateral space of the second groove structure 121, the cutting wire has movable space inside the second groove structure 121, reducing the friction with the groove wall of the second groove structure 121, thereby reducing the energy loss of the steel wire during the cutting process and improving the cutting force of the cutting wire.
[0079] Specifically, in an optional solution for processing the second groove structure 121, a tool is used for circumferential groove processing. The selected radius of the rounded corner of the tool is between 0.03 mm and 0.04 mm, and the cross-feed amount for grooving at the bottom of the groove is between 0.012 mm and 0.02 mm to increase the bottom width of the second groove structure 121.
[0080] In an optional solution of the embodiment of the present invention, the angle of the second groove structure 121 is 25 degrees to 40 degrees (this angle is the included angle formed between the two groove walls, and the definition of the groove wall angle refers to the above).
[0081] For easy understanding, continue to refer to Figure 5 as shown in Figure 5 The left and right respectively demonstrate schematic diagrams of the movement positions of the cutting wire in the V-shaped groove and the inclined groove.
[0082] During a motion cycle (referring to the cutting process cycle of a piece of silicon material, that is, entering the cutting area for cutting and then moving out), when the cutting wire contacts and is stressed by the silicon rod in the cutting area, the cutting wire in the V-shaped groove is twisted by the frictional force of the groove wall at the bottom of the groove and runs to the position of the groove wall, that is, from Figure 5The position a1 in it moves to position a2 or position a3. Since the groove walls of the V-shaped groove have a certain inclination angle, a relatively large frictional force occurs at position a2 or position a3 with the groove wall, so the twisting of the cutting line in the second groove structure 121 is more likely to occur.
[0083] Comparing with the inclined groove adopted by the first groove structure 111, the cutting line moves from the groove bottom to the first groove wall 11a and the second groove wall 11b, that is, from position b1 in the figure to position b2 or b3. Since only the side surface of the first groove wall 11a contacts the cutting line, and the cutting line does not receive a large lateral force, the frictional force between the first groove wall 11a and the cutting line is relatively small, and the cutting line cannot be significantly twisted; it can be characterized that the V-shaped groove is more likely to twist the cutting line than the first groove structure 111, which can tighten the cutting lines in the overall wire group, and thus reduce the average value of TTV. On the contrary, in the first groove structure 111, the frictional force is small and the relative angle of the first groove wall 11a is steeper. It is difficult for the cutting line to twist in the first groove structure 111 and it is easier to fall to the bottom of the groove during the cutting process, thereby reducing the wire bow (referring to the protrusion amount or curvature of the cutting line on the main roller body) and the additional cutting ratio (referring to the inclination degree of the cutting angle of the cutting line on the main roller body relative to the workpiece surface).
[0084] The embodiment of the present invention also provides a wire cutting machine (not shown in the figure), including the multi-roller cutting mechanism 100 as described above; it also includes a wire group and a driving mechanism. The wire group includes multiple cutting lines, and the cutting lines are usually made of materials with high hardness and high strength, such as diamond wires, steel wires, etc. It can be adjusted according to specific processing requirements, and the cutting lines are wound around the roller set 10 to form a wire mesh; the driving mechanism is connected to the multi-roller cutting mechanism 100, and the driving mechanism can adopt a motor, a hydraulic system or a pneumatic system, etc., to achieve precise control and movement of the roller set 10 in the roller cutting mechanism, and is used to drive the cutting lines to move, so as to cut the silicon rod.
[0085] The above-described technical features can be combined arbitrarily. Although not all possible combinations of these technical features are described, any combination of these technical features should be considered to be covered by this specification as long as such a combination does not exist in contradiction.
[0086] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: they can still adjust the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these adjustments or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.
Claims
1. A multi-roll cutting mechanism, characterized in that, it includes: a roll body group (10), including at least two first roll bodies (11) and at least one second roll body (12), and the first roll bodies (11) are located on the feeding side; a first groove structure (111) surrounding the circumferential surface is provided on the circumferential surface of the first roll body (11), a second groove structure (121) surrounding the circumferential surface is provided on the circumferential surface of the second roll body (12), and the first groove structure (111) and the second groove structure (121) are used for installing cutting wires; wherein, in the direction from the opening to the bottom of the groove, the cross-sections of the first groove structure (111) and the second groove structure (121) gradually become narrower; and the angle of at least one side wall of the first groove structure (111) is greater than the angle of any side wall of the second groove structure (121).
2. The multi-roll cutting mechanism according to claim 1, characterized in that, both the first groove structure (111) and the second groove structure (121) are symmetric structures; or the first groove structure (111) is an asymmetric structure, and the second groove structure (121) is a symmetric structure.
3. The multi-roll cutting mechanism according to claim 2, characterized in that, both the first groove structure (111) and the second groove structure (121) are symmetric structures, and the angles of both side walls of the first groove structure (111) are greater than the angle of any side wall of the second groove structure (121); wherein, the first groove structure (111) includes a U-shaped groove; the second groove structure (121) includes at least one of a V-shaped groove, a trapezoidal groove or an arc-shaped groove.
4. The multi-roll cutting mechanism according to claim 2, characterized in that, the first groove structure (111) is an asymmetric structure, and the second groove structure (121) is a symmetric structure; the first groove structure (111) includes: a first groove wall (11a) and a second groove wall (11b), the first groove wall (11a) is perpendicular to the axial direction of the first roll body (11); the second groove wall (11b) forms a preset angle with the first groove wall (11a), and the angle of the second groove wall (11b) is greater than or equal to the angle of any side wall of the second groove structure (121); the second groove structure (121) includes at least one of a V-shaped groove, a trapezoidal groove or an arc-shaped groove.
5. The multi-roll cutting mechanism according to claim 1, characterized in that, the first groove depth from the groove opening to the bottom of the first groove structure (111) is greater than the second groove depth from the groove opening to the bottom of the second groove structure (121).
6. The multi-roll cutting mechanism according to claim 1, characterized in that, the bottom of the first groove structure (111) is arc-shaped and is mutually adapted to the bottom of the cutting wire, so that the bottom of the cutting wire can be attached to the bottom of the groove; the bottom of the second groove structure (121) is arc-shaped and is mutually adapted to the bottom of the cutting wire, and the bottom width of the second groove structure (121) is greater than the bottom width of the first groove structure (111).
7. The multi-roll cutting mechanism according to claim 2, characterized in that, The first groove structure (111) and the second groove structure (121) are arranged at intervals along the length directions of the first roller body (11) and the second roller body (12) respectively, wherein a first distance between adjacent first groove structures (111) is greater than or equal to a second distance between adjacent second groove structures (121).
8. The multi-roller cutting mechanism according to claim 4, characterized in that the first groove structures (111) on the two first roller bodies (11) are symmetrically arranged in the radial direction facing each other of the first roller bodies (11).
9. The multi-roller cutting mechanism according to any one of claims 1 to 8, characterized in that an axial distance between the two first roller bodies (11) and between the first roller body (11) and the second roller body (12) is 330 mm to 420 mm.
10. A wire cutting machine, characterized in that it comprises: the multi-roller cutting mechanism (100) according to any one of claims 1 to 9; a wire group, comprising a plurality of cutting wires, and the cutting wires are wound on the surface of the roller body group (10) to form a wire mesh; a driving mechanism, connected to the multi-roller cutting mechanism (100) and used for driving the multi-roller cutting mechanism (100) to rotate.