A method and system for determining the operating health of a vacuum pump

Abstract

The present application relates to a method and system for determining the operational health of a vacuum pump, and relates to the field of vacuum pump technology. The method includes controlling the operation of the vacuum pump to determine the actual pumping rate, controlling the vacuum pump to change the operating level detection time when the actual pumping rate is much lower than the designed pumping rate, and obtaining the container tertiary air pressure after the detection time; calculating based on the container secondary air pressure, the container tertiary air pressure, fixed calculation parameters and the theoretical pumping rate to determine the secondary pumping ratio, and performing a difference calculation based on the initial pumping ratio and the secondary pumping ratio to determine the deviation pumping ratio; judging whether the deviation pumping ratio is less than a preset similar pumping ratio; if the deviation pumping ratio is less than the similar pumping ratio, outputting a device blockage signal; if the deviation pumping ratio is not less than the similar pumping ratio, outputting a device leakage signal. The present application has the effect of improving the detection efficiency of vacuum pump abnormality detection.

Description

Technical Field

[0001] The present application relates to the field of vacuum pump technology, and more particularly to a method and a system for determining the operational health of a vacuum pump. Background Art

[0002] A vacuum pump is a device used to extract gas from a closed space to obtain a vacuum environment below atmospheric pressure. Its main function is to continuously discharge gas molecules from a container or system, thereby reducing the gas pressure inside the container.

[0003] In related technologies, the pumping rate is a key indicator of a vacuum pump, reflecting the volume of gas extracted per unit time, thereby determining the pump's operating capacity. Currently, the pumping rate is typically determined by calculating the change in air pressure before and after pumping. When the determined pumping rate is close to the designed normal rate, the overall performance of the vacuum pump is excellent.

[0004] In the above-mentioned related technologies, when the pumping rate deviates greatly from the design rate, it can be determined that there is an abnormality in the vacuum pump. The reasons affecting the pumping rate include two major categories: leakage problems and blockage problems. The staff have different maintenance methods for different problems, and the staff cannot accurately know which problem the current decrease in pumping rate belongs to. Therefore, it is necessary to detect the abnormal conditions of the vacuum pump one by one, resulting in low detection efficiency and room for improvement. Summary of the Invention

[0005] In order to improve the detection efficiency of vacuum pump anomaly detection, the present application provides a method and system for determining the operating health status of a vacuum pump.

[0006] In a first aspect, the present application provides a method for determining the operating health of a vacuum pump, using the following technical solution:

[0007] A method for determining the operational health of a vacuum pump, comprising:

[0008] Obtain the vacuum operation level and the original gas pressure of the container;

[0009] Determine the design pumping rate corresponding to the pumping operation level according to the preset level matching relationship;

[0010] Control the vacuum pump to operate at the pumping operation level for a preset detection time, and obtain the secondary air pressure of the container after the detection time;

[0011] The actual pumping rate is determined by calculating the difference between the designed pumping rate and the actual pumping rate according to the original pressure of the container, the secondary pressure of the container and the preset fixed calculation parameters, and the deviation pumping rate is determined by calculating the difference between the designed pumping rate and the actual pumping rate;

[0012] When the deviation pumping rate is greater than the preset reference impact rate, an impact signal is output, and the initial pumping ratio is determined by calculation based on the actual pumping rate and the designed pumping rate;

[0013] After the output of the impact signal, the change operation level is determined according to the preset adjustment level and the pumping operation level, and the theoretical pumping rate corresponding to the change operation level is determined according to the level matching relationship;

[0014] Control the vacuum pump to change the working level and test duration, and obtain the container's air pressure three times after the test duration;

[0015] The secondary air pumping ratio is determined by calculating based on the secondary air pressure of the container, the tertiary air pressure of the container, fixed calculation parameters and the theoretical air pumping rate, and the deviation air pumping ratio is determined by performing a difference calculation based on the initial air pumping ratio and the secondary air pumping ratio;

[0016] Determine whether the deviation extraction ratio is less than the preset similar extraction ratio;

[0017] If the deviation pumping ratio is less than the similar pumping ratio, the device blocking signal is output;

[0018] If the deviation extraction ratio is not less than the similar extraction ratio, the device leakage signal is output.

[0019] Optionally, after the device leakage signal is output, the method for determining the operating health of the vacuum pump further includes:

[0020] On a preset time axis, a detection interval with a width twice the detection duration is constructed with the time point when the vacuum pump starts operating as the front end point, and the detection interval is divided into a determination interval and a review interval based on the midpoint of the detection interval;

[0021] In the judgment interval, the leakage amount is calculated based on the original gas pressure of the container, the secondary gas pressure of the container, the designed pumping rate and the test time, and the equivalent pore size is determined based on the leakage amount;

[0022] In the recheck interval, the recheck leakage volume is calculated based on the secondary air pressure of the container, the tertiary air pressure of the container, the theoretical pumping rate, and the test time, and the recheck equivalent aperture is determined based on the recheck leakage volume;

[0023] Perform difference calculation based on the determined equivalent aperture and the verified equivalent aperture to determine the equivalent deviation aperture;

[0024] Determine whether the equivalent deviation aperture is smaller than the preset allowable deviation aperture;

[0025] If the equivalent deviation aperture is smaller than the permissible deviation aperture, a single leakage signal is output;

[0026] If the equivalent deviation aperture is not less than the allowable deviation aperture, a leakage blockage signal is output.

[0027] Optionally, the step of calculating and determining the leakage amount in the determination interval based on the original air pressure of the container, the secondary air pressure of the container, the designed air extraction rate, and the detection time includes:

[0028] definition:

[0029] S0: designed pumping rate;

[0030] P0: original pressure of the container;

[0031] P1: secondary air pressure of the container;

[0032] t0: detection duration;

[0033] V0: container volume in fixed calculation parameters;

[0034] R: gas constant in fixed calculation parameters;

[0035] T: thermodynamic temperature in fixed calculation parameters;

[0036] P atm : atmospheric pressure;

[0037] Δn0: Determine the leakage amount;

[0038] but

[0039] Optionally, the step of determining the equivalent pore size based on the determined leakage volume includes:

[0040] definition:

[0041] μ: preset gas dynamic viscosity;

[0042] L: preset simulated hole length;

[0043] d0: Determine the equivalent aperture;

[0044] but

[0045] Optionally, after the leakage blockage signal is output, the method for determining the operating health of the vacuum pump further includes:

[0046] Control the vacuum pump to stop operation and obtain the real-time air pressure of the container in real time, and control the preset stop time which is initially zero to count, and define the corresponding stop time as the reset time when the real-time air pressure of the container is consistent with the original air pressure of the container;

[0047] The actual equivalent aperture is determined by calculation based on the reset time, the original air pressure of the container, and the three-time air pressure of the container, and a leakage confirmation signal is output at the actual equivalent aperture;

[0048] definition:

[0049] t1: reset duration;

[0050] P2: tertiary air pressure of the container;

[0051] d2: actual equivalent aperture;

[0052] but

[0053] Optionally, after a single leakage signal or a leakage confirmation signal is output, the method for determining the operating health of the vacuum pump further includes:

[0054] On the time axis, a historical interval with a preset historical length is constructed with the current time point as the end point;

[0055] Determine similar leakage points based on the current equivalent aperture in the historical interval, and determine similar leakage types at similar leakage points;

[0056] Count each similar leakage type to determine the number of similar types, and sum up all the similar types to determine the overall number of types;

[0057] The type ratio is determined based on the number of similar types and the overall number of types, and similar leakage types whose type ratio is greater than the preset general ratio are defined as reference leakage types for output.

[0058] In a second aspect, the present application provides a system for determining the operating health of a vacuum pump, which adopts the following technical solution:

[0059] A system for determining the operational health of a vacuum pump, comprising:

[0060] An acquisition module is used to obtain the vacuum operation level and the original gas pressure of the container;

[0061] A processing module, connected to the acquisition module and the judgment module, for storing and processing information;

[0062] The judgment module is connected with the acquisition module and the processing module and is used for judging the information;

[0063] The processing module determines the design pumping rate corresponding to the pumping operation level according to the preset level matching relationship;

[0064] The processing module controls the vacuum pump to operate at the pumping operation level for a preset detection time, and the acquisition module obtains the secondary air pressure of the container after the detection time;

[0065] The processing module calculates the actual pumping rate based on the original air pressure of the container, the secondary air pressure of the container and the preset fixed calculation parameters, and calculates the difference between the designed pumping rate and the actual pumping rate to determine the deviation pumping rate;

[0066] The processing module outputs an impact signal when the deviation pumping rate is greater than the preset reference impact rate, and calculates the initial pumping ratio based on the actual pumping rate and the designed pumping rate;

[0067] After the impact signal is output, the processing module determines the change operation level according to the preset adjustment level and the pumping operation level, and determines the theoretical pumping rate corresponding to the change operation level according to the level matching relationship;

[0068] The processing module controls the vacuum pump to change the operation level detection time, and the acquisition module obtains the container's air pressure three times after the detection time;

[0069] The processing module calculates the secondary air pressure of the container, the tertiary air pressure of the container, fixed calculation parameters and the theoretical air extraction rate to determine the secondary air extraction ratio, and performs a difference calculation based on the initial air extraction ratio and the secondary air extraction ratio to determine the deviation air extraction ratio;

[0070] The judgment module judges whether the deviation extraction ratio is less than the preset similar extraction ratio;

[0071] If the judgment module determines that the deviation extraction ratio is less than the similar extraction ratio, the processing module outputs a device blocking signal;

[0072] If the judgment module determines that the deviation extraction ratio is not less than the similar extraction ratio, the processing module outputs a device leakage signal.

[0073] In a third aspect, the present application provides a computer storage medium capable of storing corresponding programs, which has the characteristics of improving the detection efficiency of vacuum pump anomaly detection, and adopts the following technical solutions:

[0074] A computer-readable storage medium stores a computer program capable of being loaded by a processor and executing any one of the above methods for determining the operational health of a vacuum pump.

[0075] In summary, this application includes at least one of the following beneficial technical effects:

[0076] 1. During the use of the vacuum pump, if an abnormal pumping rate is detected, the specific problem causing the abnormal pumping rate can be determined by adjusting the operation level, thereby improving the detection efficiency of vacuum pump abnormality;

[0077] 2. When a leak is detected, the data can be analyzed to determine whether there is a blockage problem;

[0078] 3. When analyzing leakage, the size of the opening at the leakage point can be simulated to determine the specific leakage situation that may occur and provide maintenance staff with reference. BRIEF DESCRIPTION OF THE DRAWINGS

[0079] Figure 1 is a flow chart of a method for determining the operational health of a vacuum pump.

[0080] Figure 2 is a block flow diagram of a method for determining the operational health of a vacuum pump. DETAILED DESCRIPTION

[0081] In order to make the purpose, technical solutions and advantages of this application more clear, the following Figure 1-Figure 2 It should be understood that the specific embodiments described herein are only used to explain the present application and are not intended to limit the present application.

[0082] The embodiments of the present application are described in further detail below with reference to the accompanying drawings.

[0083] The present application discloses a method for determining the health status of a vacuum pump. Figure 1 The method for determining the operating health of a vacuum pump comprises the following steps:

[0084] Step S100: Obtain the air extraction operation level and the original air pressure of the container.

[0085] The vacuum operation level is the vacuum level of the vacuum pump currently in use. The higher the level, the stronger the corresponding horsepower and the higher the vacuum rate. The original air pressure of the container is the air pressure of the container before the vacuum pump starts working to create a vacuum environment. The data can be obtained by installing an air pressure detection device inside the container. Under normal circumstances, the original air pressure of the container is consistent with the atmospheric pressure.

[0086] Step S101: determining a designed pumping rate corresponding to a pumping operation level according to a preset level matching relationship.

[0087] The designed pumping rate is the pumping rate that the vacuum pump can achieve when operating at the pumping operation level. Different pumping operation levels correspond to different designed pumping rates, and the level matching relationship between the two is determined in advance by the staff.

[0088] Step S102: Control the vacuum pump to operate at the vacuum operation level for a preset detection time, and obtain the secondary air pressure of the container after the detection time.

[0089] The detection time is a fixed time set by the staff, which needs to be less than half of the time it takes for the vacuum pump to completely evacuate the vacuum environment inside the container; the vacuum pump operation detection time is controlled to facilitate the acquisition of the vacuum pump operation data, which is convenient for subsequent analysis; the secondary air pressure of the container is the air pressure value inside the container after the vacuum pump operation detection time.

[0090] Step S103: performing calculation based on the original air pressure of the container, the secondary air pressure of the container and preset fixed calculation parameters to determine the actual pumping rate, and performing difference calculation based on the designed pumping rate and the actual pumping rate to determine the deviation pumping rate.

[0091] Fixed calculation parameters include container volume, gas constant, and thermodynamic temperature. The actual pumping rate is the pumping rate that the vacuum pump can achieve within the test time. The calculation formula is: Where S1 is the actual pumping rate, V0 is the container volume, t0 is the detection time, P0 is the original air pressure of the container, and P1 is the secondary air pressure of the container; the deviation pumping rate is the difference between the designed pumping rate and the actual pumping rate, and the difference is an absolute value.

[0092] Step S104: outputting an influence signal when the deviation pumping rate is greater than a preset reference influence rate, and performing calculations based on the actual pumping rate and the designed pumping rate to determine an initial pumping ratio.

[0093] The baseline impact rate is the maximum deviation pumping rate allowed when the pumping rate set by the staff basically meets the design requirements. When the deviation pumping rate is greater than the baseline impact rate, it means that the pumping rate has dropped significantly, that is, the vacuum pump has a blockage or leakage problem. Therefore, an impact signal is output to identify the situation, so that the staff can be informed of the situation in time and facilitate subsequent analysis of abnormal situations; the initial pumping ratio is the ratio of the actual pumping rate to the design pumping rate, which is determined by dividing the actual pumping rate by the design pumping rate.

[0094] Step S105 : After the influencing signal is output, a changed operation level is determined according to the preset adjustment level and the pumping operation level, and a theoretical pumping rate corresponding to the changed operation level is determined according to the level matching relationship.

[0095] The adjustment level is the level set by the staff to adjust the operating level of the vacuum pump, for example, adjusting it down two levels. The changed operating level is the operating level of the vacuum pump obtained by adjusting the exhaust operating level according to the adjustment level; the theoretical exhaust rate is the exhaust rate that the vacuum pump can achieve when operating at the changed operating level.

[0096] Step S106: Control the vacuum pump to change the operation level and operation detection time, and obtain the container air pressure three times after the detection time.

[0097] The tertiary air pressure of the container is the air pressure value inside the container after the vacuum pump operates at a varying operating level and for a varying period of time based on the secondary air pressure of the container.

[0098] Step S107: Calculate the secondary pumping ratio based on the secondary pressure of the container, the tertiary pressure of the container, fixed calculation parameters and theoretical pumping rate, and calculate the difference between the initial pumping ratio and the secondary pumping ratio to determine the deviation pumping ratio.

[0099] The method for determining the secondary pumping ratio is the same as that for the initial pumping ratio, and will not be elaborated here; the deviation pumping ratio is the difference between the initial pumping ratio and the secondary pumping ratio, and the difference is an absolute value.

[0100] Step S108: Determine whether the deviation extraction ratio is less than the preset similar extraction ratio.

[0101] The similar pumping ratio is the maximum deviation pumping ratio allowed when the pumping rate set by the staff is reduced proportionally. The purpose of the judgment is to know whether the pumping rate is reduced proportionally according to the adjustment of the vacuum pump level. If it is reduced proportionally, it can be explained that the decrease in the vacuum pump pumping rate is only caused by gas blockage. Otherwise, there must be a gas leakage.

[0102] Step S1081: If the deviation extraction ratio is smaller than the similar extraction ratio, a device blockage signal is output.

[0103] When the deviation extraction ratio is smaller than the similar extraction ratio, it means that the extraction rate is reduced proportionally, that is, the equipment is only blocked by gas at this time. At this time, the equipment blockage signal is output to identify the situation, which is convenient for the staff to perform subsequent maintenance.

[0104] Step S1082: If the deviation extraction ratio is not less than the similar extraction ratio, a device leakage signal is output.

[0105] When the deviation extraction ratio is not less than the similar extraction ratio, it means that the extraction rate is not reduced proportionally, that is, there is gas leakage into the container at this time. Therefore, the output device leakage signal is used to identify the situation to facilitate subsequent maintenance by the staff.

[0106] After the device leak signal is output, the method for determining the operating health of the vacuum pump also includes:

[0107] Step S200: On a preset time axis, a detection interval with a width twice the detection duration is constructed with the time point when the vacuum pump starts operating as the front end point, and the detection interval is divided into a determination interval and a review interval according to the midpoint of the detection interval.

[0108] When the device outputs a leakage signal, it indicates that there is a gas leakage problem in the vacuum pump, which may also be accompanied by a pipeline gas blockage problem, which requires further analysis; the time axis is a coordinate axis formed by the combination of various time points, and the coordinate axis points from the time point that has passed to the time point that has not yet arrived, where the time point that has passed is on the left side of the time axis, and the left side is defined as the front end of the time axis; constructing a detection interval can facilitate the acquisition and analysis of data during the operation of the vacuum pump; the judgment interval is the time interval when the vacuum pump operates at the exhaust operation level, and the review interval is the time interval when the vacuum pump operates at the variable operation level.

[0109] Step S201: Calculate the leakage amount in the determination interval according to the original air pressure of the container, the secondary air pressure of the container, the designed pumping rate, and the detection time, and determine the equivalent pore size according to the leakage amount.

[0110] The leakage volume is determined to be the volume of gas that leaks into the container during the determination interval. The calculation formula is: Where S0 is the designed pumping rate, R is the gas constant in the fixed calculation parameters, T is the thermodynamic temperature in the fixed calculation parameters, P atm is atmospheric pressure, Δn0 is the leakage volume; the derivation process of the calculation formula is as follows: ① According to the definition of the pumping rate, the volume of gas V pumped out by the vacuum pump within time t0 抽 =S0t0;② According to the ideal gas state equation, the amount of gas in the container at the initial moment is The amount of gas in the container after evacuation time t0 ③During the process of pumping, leakage occurs and the external atmospheric pressure P atm The gas below enters the container through the leak. At this time, the amount of this gas substance Where V 漏 The volume of gas that enters the container through the leak; ④ According to n 初 +Δn0-n 抽 =n 二 Solvable At this time n 抽 is the amount of gaseous material extracted by the vacuum pump within time t0; ⑤ V 漏 Substituting Δn0 into the calculation formula can be solved

[0111] The equivalent pore size is determined by simulating the current leak to form a hole by kneading it. That is, the opening size of the leak is determined by determining the equivalent pore size. The calculation formula is: Where μ is the preset gas dynamic viscosity, L is the preset simulated hole length, the specific value is set in advance by the staff, and d0 is the equivalent aperture. The derivation process of the calculation formula is as follows: ① Poiseuille's law describes the volume flow rate of laminar flow through a circular pipe ②V 漏 =Qt0; ③ Combine Q and V 漏 Can be determined

[0112] Step S202: In the verification interval, calculation is performed based on the secondary pressure of the container, the tertiary pressure of the container, the theoretical pumping rate, and the detection time to determine the verification leakage amount, and the verification equivalent aperture is determined based on the verification leakage amount.

[0113] The verified leakage volume is the amount of gas leaked into the container during the review interval. The calculation method is the same as that for the determined leakage volume, and will not be elaborated here. The verified equivalent aperture is the size of the opening of the leakage point calculated based on the amount of gas leaked in the review interval. The calculation method is the same as that for the determined equivalent aperture, and will not be elaborated here.

[0114] Step S203: performing difference calculation based on the determined equivalent aperture and the verified equivalent aperture to determine the equivalent deviation aperture.

[0115] The equivalent deviation aperture is the difference between the determined equivalent aperture and the verified equivalent aperture, and the difference is an absolute value.

[0116] Step S204: determining whether the equivalent deviation aperture is smaller than a preset allowable deviation aperture.

[0117] The allowable deviation aperture is the maximum equivalent deviation aperture allowed when the opening size of the leak determined in two operations is relatively consistent, set by the staff. The purpose of the judgment is to know whether there is only leakage that affects the current pumping rate.

[0118] Step S2041: If the equivalent deviation aperture is smaller than the allowable deviation aperture, a single leakage signal is output.

[0119] When the equivalent deviation aperture is smaller than the allowable deviation aperture, it means that the opening size of the fitted leak is relatively similar, that is, the pipeline can be normally pumped during the vacuum pumping process, that is, there is no pipeline blockage in the vacuum pump at this time, so a single leakage signal is output to identify the situation, so that the staff can determine the specific abnormal situation of the vacuum pump.

[0120] Step S2042: If the equivalent deviation aperture is not less than the allowable deviation aperture, a leakage blocking signal is output.

[0121] When the equivalent deviation aperture is not less than the allowable deviation aperture, it means that the size of the opening simulated at the leakage point has changed, that is, there is not only a gas leakage, but also a gas pipeline blockage. At this time, a leakage blockage signal can be output to identify the situation.

[0122] After the leakage blockage signal is output, the method for determining the operating health of the vacuum pump further includes:

[0123] Step S300: Control the vacuum pump to stop operation and obtain the real-time air pressure of the container in real time, and control the preset stop time that is initially zero to count, and define the corresponding stop time as the reset time when the real-time air pressure of the container is consistent with the original air pressure of the container.

[0124] The real-time air pressure of the container is the real-time air pressure value inside the container after the vacuum pump stops operating. The stop duration can be used to know the duration of external gas leakage into the container after the vacuum pump stops operating. When the real-time air pressure of the container is consistent with the original air pressure of the container, it means that the interior of the container has returned to the state before the vacuum pump was operated. At this time, the corresponding stop duration is defined as the reset duration to distinguish different stop durations, which is convenient for subsequent analysis.

[0125] Step S301: Calculate the actual equivalent aperture according to the reset time, the original air pressure of the container, and the three air pressures of the container, and output a leakage determination signal at the actual equivalent aperture.

[0126] The actual equivalent aperture is the simulated leakage opening size obtained by analyzing the gas leakage during the reset time. The calculation formula is: Where t1 is the reset time, P2 is the three-times pressure of the container, and d2 is the actual equivalent aperture; the derivation process of the formula is as follows:

[0127] ① According to Poiseuille's law, the volume flow rate of gas through a small hole is Where P(t) represents the real-time air pressure of the container at time t;

[0128] ②In the time interval dt, the volume of gas entering the container through the leakage hole dV=Q V dt;

[0129] ③ Determine the amount of gas entering the container based on the ideal gas state equation

[0130] ④ For the gas in the container, the change of n(t) with time satisfies

[0131] ⑤Substitute dV into the dn expression and sort it out to determine At this time, when t=0, P(t)=P2, so the above differential equation is integrated to determine After sorting, it can be determined

[0132] Step S302: After a single leakage signal or a leakage confirmation signal is output, a history interval with a width of a preset history length is constructed on the time axis with the current time point as the end point.

[0133] When a single leakage signal or a leakage confirmation signal is output, it means that the currently determined aperture is the equivalent aperture of the leakage point under actual circumstances, so the leakage situation of the vacuum pump can be further analyzed; the historical duration is the duration set by the staff to obtain the historical usage data of the vacuum pump, and a historical interval is constructed to facilitate data acquisition.

[0134] Step S303: determining similar leakage points in the historical interval according to the current equivalent aperture, and determining similar leakage types at the similar leakage points.

[0135] A similar leakage point is the time point when the equivalent aperture in a historical situation is consistent with the currently determined equivalent aperture when a leakage occurred. A similar leakage type is the leakage type in the actual situation obtained after the staff repairs the leakage corresponding to the similar leakage point, such as a damaged check valve, poor sealing performance of the seal, etc.

[0136] Step S304: Counting each similar leakage type to determine the number of similar types, and summing up all the numbers of similar types to determine the overall number of types.

[0137] The number of similar types is the total number of single similar leakage types determined, and the number of overall types is the total number of all similar leakage types determined, which is obtained by adding up the numbers of all similar types.

[0138] S305: Calculate the type ratio based on the number of similar types and the total number of types, and define the similar leakage type whose type ratio is greater than the preset general ratio as a reference leakage type for output.

[0139] The type ratio is the ratio of the number of a single similar leakage type to the number of all similar leakage types, which is determined by dividing the number of similar types by the total number of types. The general ratio is the type ratio that the staff needs to reach in order to determine that the type that occurs is relatively common and is likely to be the type of the current leakage. The reference leakage type is defined to mark some types that may cause the current leakage situation, which is convenient for the staff to refer to for subsequent maintenance.

[0140] Reference Figure 2 Based on the same inventive concept, an embodiment of the present invention provides a system for determining the operating health of a vacuum pump, comprising:

[0141] An acquisition module is used to obtain the vacuum operation level and the original gas pressure of the container;

[0142] A processing module, connected to the acquisition module and the judgment module, for storing and processing information;

[0143] The judgment module is connected with the acquisition module and the processing module and is used for judging the information;

[0144] The processing module determines the design pumping rate corresponding to the pumping operation level according to the preset level matching relationship;

[0145] The processing module controls the vacuum pump to operate at the pumping operation level for a preset detection time, and the acquisition module obtains the secondary air pressure of the container after the detection time;

[0146] The processing module calculates the actual pumping rate based on the original air pressure of the container, the secondary air pressure of the container and the preset fixed calculation parameters, and calculates the difference between the designed pumping rate and the actual pumping rate to determine the deviation pumping rate;

[0147] The processing module outputs an impact signal when the deviation pumping rate is greater than the preset reference impact rate, and calculates the initial pumping ratio based on the actual pumping rate and the designed pumping rate;

[0148] After the impact signal is output, the processing module determines the change operation level according to the preset adjustment level and the pumping operation level, and determines the theoretical pumping rate corresponding to the change operation level according to the level matching relationship;

[0149] The processing module controls the vacuum pump to change the operation level detection time, and the acquisition module obtains the container's air pressure three times after the detection time;

[0150] The processing module calculates the secondary air pressure of the container, the tertiary air pressure of the container, fixed calculation parameters and the theoretical air extraction rate to determine the secondary air extraction ratio, and performs a difference calculation based on the initial air extraction ratio and the secondary air extraction ratio to determine the deviation air extraction ratio;

[0151] The judgment module judges whether the deviation extraction ratio is less than the preset similar extraction ratio;

[0152] If the judgment module determines that the deviation extraction ratio is less than the similar extraction ratio, the processing module outputs a device blocking signal;

[0153] If the judgment module determines that the deviation extraction ratio is not less than the similar extraction ratio, the processing module outputs a device leakage signal;

[0154] Leakage analysis module, used to analyze gas leakage during vacuum pump operation;

[0155] A leakage determination calculation module is used to calculate the leakage determination amount more accurately;

[0156] An equivalent aperture calculation module is used to calculate the equivalent aperture;

[0157] Actual equivalent aperture calculation module, used to calculate the actual equivalent aperture;

[0158] The leakage type reference module is used to determine the type of leakage that may have occurred for reference in subsequent repairs.

[0159] Those skilled in the art will clearly understand that for the sake of convenience and brevity, the division of the above-mentioned functional modules is only used as an example for illustration. In actual applications, the above-mentioned functions can be assigned to different functional modules as needed, that is, the internal structure of the device can be divided into different functional modules to complete all or part of the functions described above. The specific working processes of the above-mentioned systems, devices, and units can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0160] An embodiment of the present invention provides a computer-readable storage medium storing a computer program capable of being loaded and executed by a processor for a method for determining the operational health of a vacuum pump. Examples of computer storage media include various media capable of storing program code, such as a USB flash drive, a mobile hard drive, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk.

Claims

1. A method for determining the operational health of a vacuum pump, characterized in that include: Obtain the vacuum operation level and the original gas pressure of the container; Determine the design pumping rate corresponding to the pumping operation level according to the preset level matching relationship; Control the vacuum pump to operate at the pumping operation level for a preset detection time, and obtain the secondary air pressure of the container after the detection time; The actual pumping rate is determined by calculating the difference between the designed pumping rate and the actual pumping rate according to the original pressure of the container, the secondary pressure of the container and the preset fixed calculation parameters, and the deviation pumping rate is determined by calculating the difference between the designed pumping rate and the actual pumping rate; When the deviation pumping rate is greater than the preset reference impact rate, an impact signal is output, and the initial pumping ratio is determined by calculation based on the actual pumping rate and the designed pumping rate; After the output of the impact signal, the change operation level is determined according to the preset adjustment level and the pumping operation level, and the theoretical pumping rate corresponding to the change operation level is determined according to the level matching relationship; Control the vacuum pump to change the working level and test duration, and obtain the container's air pressure three times after the test duration; The secondary air pumping ratio is determined by calculating based on the secondary air pressure of the container, the tertiary air pressure of the container, fixed calculation parameters and the theoretical air pumping rate, and the deviation air pumping ratio is determined by performing a difference calculation based on the initial air pumping ratio and the secondary air pumping ratio; Determine whether the deviation extraction ratio is less than the preset similar extraction ratio; If the deviation pumping ratio is less than the similar pumping ratio, the device blocking signal is output; If the deviation extraction ratio is not less than the similar extraction ratio, the device leakage signal is output; After the device leak signal is output, the method for determining the operating health of the vacuum pump also includes: On a preset time axis, a detection interval with a width twice the detection duration is constructed with the time point when the vacuum pump starts operating as the front end point, and the detection interval is divided into a determination interval and a review interval based on the midpoint of the detection interval; In the judgment interval, the leakage amount is calculated based on the original gas pressure of the container, the secondary gas pressure of the container, the designed pumping rate and the test time, and the equivalent pore size is determined based on the leakage amount; In the recheck interval, the recheck leakage volume is calculated based on the secondary air pressure of the container, the tertiary air pressure of the container, the theoretical pumping rate, and the test time, and the recheck equivalent aperture is determined based on the recheck leakage volume; Perform difference calculation based on the determined equivalent aperture and the verified equivalent aperture to determine the equivalent deviation aperture; Determine whether the equivalent deviation aperture is smaller than the preset allowable deviation aperture; If the equivalent deviation aperture is smaller than the permissible deviation aperture, a single leakage signal is output; If the equivalent deviation aperture is not less than the allowable deviation aperture, a leakage blockage signal is output.

2. The method for determining the operational health of a vacuum pump according to claim 1, characterized in that The steps of calculating and determining the leakage amount in the determination interval based on the original gas pressure of the container, the secondary gas pressure of the container, the designed pumping rate, and the detection time include: definition: S0: designed pumping rate; P0: original pressure of the container; P1: secondary air pressure of the container; t0: detection duration; V0: container volume in fixed calculation parameters; R: gas constant in fixed calculation parameters; T: thermodynamic temperature in fixed calculation parameters; P atm : atmospheric pressure; Δn0: Determine the leakage amount; but 3. The method for determining the operational health of a vacuum pump according to claim 2, characterized in that The steps for determining the equivalent pore size based on the leakage amount include: definition: μ: preset gas dynamic viscosity; L: preset simulated hole length; d0: Determine the equivalent aperture; but 4. The method for determining the operational health of a vacuum pump according to claim 3, characterized in that After the leakage blockage signal is output, the method for determining the operating health of the vacuum pump further includes: Control the vacuum pump to stop operation and obtain the real-time air pressure of the container in real time, and control the preset stop time which is initially zero to count, and define the corresponding stop time as the reset time when the real-time air pressure of the container is consistent with the original air pressure of the container; The actual equivalent aperture is determined by calculation based on the reset time, the original air pressure of the container, and the three-time air pressure of the container, and a leakage confirmation signal is output at the actual equivalent aperture; definition: t1: reset duration; P2: tertiary air pressure of the container; d2: actual equivalent aperture; but 5. The method for determining the operational health of a vacuum pump according to claim 4, characterized in that After a single leak signal or a leak confirmation signal is output, the method for determining the operating health of the vacuum pump further includes: On the time axis, a historical interval with a preset historical length is constructed with the current time point as the end point; Determine similar leakage points based on the current equivalent aperture in the historical interval, and determine similar leakage types at similar leakage points; Count each similar leakage type to determine the number of similar types, and sum up all the similar types to determine the overall number of types; The type ratio is determined based on the number of similar types and the overall number of types, and similar leakage types whose type ratio is greater than the preset general ratio are defined as reference leakage types for output.

6. A system for determining the operational health of a vacuum pump, characterized in that include: An acquisition module is used to obtain the vacuum operation level and the original gas pressure of the container; A processing module, connected to the acquisition module and the judgment module, for storing and processing information; The judgment module is connected with the acquisition module and the processing module and is used for judging the information; The processing module determines the design pumping rate corresponding to the pumping operation level according to the preset level matching relationship; The processing module controls the vacuum pump to operate at the pumping operation level for a preset detection time, and the acquisition module obtains the secondary air pressure of the container after the detection time; The processing module calculates the actual pumping rate based on the original air pressure of the container, the secondary air pressure of the container and the preset fixed calculation parameters, and calculates the difference between the designed pumping rate and the actual pumping rate to determine the deviation pumping rate; The processing module outputs an impact signal when the deviation pumping rate is greater than the preset reference impact rate, and calculates the initial pumping ratio based on the actual pumping rate and the designed pumping rate; After the impact signal is output, the processing module determines the change operation level according to the preset adjustment level and the pumping operation level, and determines the theoretical pumping rate corresponding to the change operation level according to the level matching relationship; The processing module controls the vacuum pump to change the operation level detection time, and the acquisition module obtains the container's air pressure three times after the detection time; The processing module calculates the secondary air pressure of the container, the tertiary air pressure of the container, fixed calculation parameters and the theoretical air extraction rate to determine the secondary air extraction ratio, and performs a difference calculation based on the initial air extraction ratio and the secondary air extraction ratio to determine the deviation air extraction ratio; The judgment module judges whether the deviation extraction ratio is less than the preset similar extraction ratio; If the judgment module determines that the deviation extraction ratio is less than the similar extraction ratio, the processing module outputs a device blocking signal; If the judgment module determines that the deviation extraction ratio is not less than the similar extraction ratio, the processing module outputs a device leakage signal; After the equipment leak signal is output, the processing module constructs a detection interval with a width of twice the detection duration on a preset time axis, starting from the time when the vacuum pump starts operating as the front point. The detection interval is then divided into a determination interval and a review interval based on the midpoint of the detection interval. The processing module calculates the leakage amount according to the original air pressure of the container, the secondary air pressure of the container, the designed pumping rate and the detection time in the determination interval, and determines the equivalent pore size according to the leakage amount; The processing module calculates the verified leakage amount according to the secondary pressure of the container, the tertiary pressure of the container, the theoretical pumping rate and the detection time in the verification interval, and determines the verified equivalent aperture according to the verified leakage amount; The processing module performs difference calculation based on the determined equivalent aperture and the verified equivalent aperture to determine the equivalent deviation aperture; The judging module judges whether the equivalent deviation aperture is smaller than the preset allowable deviation aperture; If the judging module determines that the equivalent deviation aperture is smaller than the permissible deviation aperture, the processing module outputs a single leakage signal; If the judging module determines that the equivalent deviation aperture is not less than the allowable deviation aperture, the processing module outputs a leakage blocking signal.

7. A computer-readable storage medium, characterized in that A computer program is stored which can be loaded by a processor and execute the method for determining the operating health of a vacuum pump according to any one of claims 1 to 5.

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