A high-stability thin-film thickness measurement device based on optical film thickness self-calibration

Abstract

The present invention relates to the technical field of thickness measurement, and discloses a high-stability thin film thickness measurement device based on optical film thickness self-calibration, including a measuring machine, and further including a measuring table and an optical device fixedly connected to the measuring machine, a sleeve fixedly connected to the top and bottom of the measuring table, so that the round holes at the top of the adsorption rod can adsorb the thin film. Subsequently, the adsorption rod is gradually moved to the adsorption position under the push. During this movement, multiple adsorption rods will move towards the four right angles of the thin film, thereby pulling the thin film to make it flat. Subsequently, when the adsorption rod is in the adsorption position, the thin film is fixed. Through multiple adsorption rods to form multi-point stretching, and at the same time due to the simultaneous action of the round holes and the sub-holes, when adsorbing the thin film, the thin film can be quickly and flatly spread on the measuring table, and will not damage the thin film due to excessive adsorption force. And cooperate with the closing rod to close the sub-holes, increase the adsorption force of the round holes, and effectively fix the thin film.

Description

Technical Field

[0001] The present invention relates to the technical field of thickness measurement, and in particular to a high-stability thin film thickness measurement device based on optical film thickness self-calibration. Background Art

[0002] A thin film thickness measurement device is mainly used to measure the thickness of a transparent thin film. It utilizes the principle of light wave interference. By observing the change of interference fringes, the optical path difference of the thin film is inferred, thereby determining its thickness. The principle is that when a light beam irradiates on the thin film, part of the light wave is reflected on the surface of the film, and part of the light wave passes through the film layer and is reflected back from the bottom surface. When these two light waves meet, an interference phenomenon will occur. The accurate thickness of the thin film can be obtained by analyzing the interference pattern.

[0003] However, in the prior art, the conventional method is to manually lay it on the detection table. Since the thin film material is often thin and soft, there are often bubbles, wrinkles and bending phenomena between the thin film and the detection table. That is, when the thin film is attached to the detection table, due to the difficulty of completely exhausting the air, bubbles will be formed between the two. The flexibility of the thin film itself makes it easy to produce wrinkles during the placement process. In addition, due to the thin texture of the thin film, under the action of factors such as gravity and the flatness of the detection table surface, local bending will also occur. When the measurement light beam irradiates on these uneven areas, the local reflected light beam will not be received by the receiver along the expected path due to the abnormal undulation of the thin film surface, and some reflected light may even be scattered, resulting in deviation of the measurement data and ultimately causing measurement errors. To improve this situation, some detection devices adopt a bottom adsorption method, trying to make the thin film closely attached to the detection table through the adsorption force to reduce the generation of wrinkles and bubbles. For example, in some laboratories, a detection table with multiple small air holes is used, and a negative pressure is formed at the bottom of the detection table by pumping air with a vacuum pump to adsorb the thin film. This method can indeed alleviate the unevenness problem of the thin film to a certain extent and reduce the probability of wrinkles and bubbles. However, on the one hand, it is difficult to make the adsorption force evenly distributed. There may be differences in the adsorption force at the edge and the central area of the detection table, which leads to inconsistent attachment degrees of the thin film at different positions. In the detection area of the thin film, local unevenness still occurs. On the other hand, when the thin film has wrinkles, directly adsorbing the thin film will cause damage to the detection area of the thin film by the adsorption force, affecting the accuracy of the measurement result. Summary of the Invention

[0004] The purpose of the present invention is to provide a high-stability thin film thickness measurement device based on optical film thickness self-calibration to solve the problem of unstable test results caused by insufficient flatness of the thin film detection area.

[0005] The technical solution of the present invention is as follows: A high-stability thin film thickness measuring device based on optical film thickness self-calibration, which includes a measuring machine, and also includes a measuring table and an optical device fixedly connected to the measuring machine, a sleeve fixedly connected to the bottom of the top of the measuring table, two guiding frames fixedly connected to the measuring table, a connecting rod slidably connected inside the guiding frames, suction rods fixedly connected to both ends of the connecting rod, a closing rod arranged on one side of the suction rods, an arc block fixedly connected to the bottom surface of the sleeve, a collar slidably connected to the outside of the measuring table, and a connecting rod hinged between the collar and the connecting rod. A circular hole is opened at one end of the suction rod, and a plurality of sub-holes are equiangularly opened near the closing rod of the suction rod. The circular hole is located at the top of the suction rod. The output end of the optical device is located above the measuring table. The sleeve is located above the measuring machine. When the collar moves upward, through the connecting rod and the connecting rod, the tops of the plurality of suction rods coincide with the top surface of the measuring table. The suction rod includes a suction position, and when the suction rod is located at the suction position, the thin film is fixed.

[0006] Further, the measuring table includes a bottom plate fixedly connected inside the measuring machine, a wire tube fixedly connected to the top of the bottom plate, and a measuring disc fixedly connected to the top of the wire tube. The measuring disc is located above the measuring machine. The sleeve is fixedly connected to the bottom of the measuring disc.

[0007] Further, the two guiding frames are symmetrically arranged about the central axis of the bottom plate. The number of the guiding frames is equal to that of the connecting rods. Two guiding slots are opened on the guiding frames. The two guiding slots are parallel. The guiding slots are divided into a short straight section, an inclined section and a long straight section. The length of the short straight section is greater than the diameter of the circular hole. When the connecting rod is located in the short straight section, the vertical length of the inclined section is equal to the distance from the top surface of the measuring disc to the top of the suction rod.

[0008] Further, the closing rod includes an arc rod slidably connected to the suction rod, and a spring connected between the arc rod and the suction rod. One end of the arc rod is located inside the suction rod, and the radian of this end is equal to the inner diameter of the suction rod. The other end of the arc rod is provided with an arc surface.

[0009] Further, the connecting rod includes a double-rod frame slidably connected inside the guiding slot, and two straight rods respectively fixedly connected to both ends of the double-rod frame. The suction rod is fixedly connected to the straight rod.

[0010] Further, the arc block is located on the side where the arc rod is provided with the arc surface. The side of the arc block close to the arc rod is an arc surface. When the spring is completely squeezed by the arc block, the suction rod is located at the suction position.

[0011] Further, two adsorption devices are fixedly connected to the top of the bottom plate. An air pipe is connected between the adsorption rod and the adsorption device. A driving motor is arranged on the top of the bottom plate. A lead screw is rotatably connected to the top of the bottom plate. A transmission belt is sleeved between the driving motor and the lead screw. A guide rod fixedly connected to the top of the bottom plate. The collar is slidably connected to the outside of the lead screw and the guide rod. A baffle is arranged on the bottom plate, and the baffle is located between the air pipe and the driving motor.

[0012] Further, a plurality of straight notches are formed in the sleeve. The number of the straight notches, the adsorption rods, the closing rods, the arc blocks and the air pipes is equal.

[0013] Further, when the double-rod frame is located in the short straight section, the round hole is located near the straight notch of the adsorption rod. When the adsorption rod is in the adsorption position, the arc-shaped rod fits with the arc block and simultaneously closes the sub-hole.

[0014] Further, the collar is slidably connected to the outside of the wire pipe. The connecting rod is sleeved between the double-rod frame and the collar. The number of the connecting rods and the double-rod frames is equal.

[0015] Advantages of the present invention:

[0016] 1. Multiple adsorption rods form multi-point stretching. At the same time, due to the simultaneous action of the round hole and the sub-hole, when adsorbing the film, it can not only pull the film with a gentle pulling force, effectively overcoming problems such as wrinkles and bending of the film caused by its own flexibility and improper placement, enabling the film to be quickly and smoothly spread on the measuring table, but also will not damage the film due to excessive adsorption force. And the closing rod is used to close the sub-hole, increasing the adsorption force of the round hole, effectively fixing the film, and then measuring the thickness.

[0017] 2. By moving the collar, the connecting rod is pushed to slide in the guiding notch of the guiding frame, thereby driving the four adsorption rods to work synchronously and cooperatively. While moving towards the four right angles of the film, a uniform force is applied to the film. Compared with single bottom adsorption, it can better handle films of different shapes and sizes, with a wider adaptation range. The film can be quickly and smoothly spread on the measuring table, providing a reliable premise for accurately measuring the thickness of the film, avoiding measurement errors caused by unevenness of the film, and improving the accuracy of the measurement result.

[0018] 3. The sliding of the connecting rod is accurately guided by the guiding frame to ensure that the adsorption rod moves along a predetermined trajectory. The collar is hinged to the connecting rod through the connecting rod to achieve smooth power transmission. During long-term continuous measurement operations, the stability of the device operation can be ensured, greatly reducing the influence of device shaking or component displacement on the measurement result, improving the durability and reliability of the device, and reducing the long-term maintenance cost. Description of the drawings

[0019] Figure 1 Schematic diagram of the three-dimensional structure from the first perspective of the present invention;

[0020] Figure 2 Internal front view of the measuring machine of the present invention;

[0021] Figure 3 Schematic diagram of the structure of the measuring table of the present invention;

[0022] Figure 4 Schematic diagram of the structure of the guide frame of the present invention;

[0023] Figure 5 Schematic diagram of the structure of the adsorption rod of the present invention;

[0024] Figure 6 For the present invention Figure 5 Enlarged schematic diagram at position A in;

[0025] Figure 7 Schematic diagram of the structure of the housing of the present invention;

[0026] Figure 8 Cross-sectional view of the measuring table of the present invention;

[0027] Figure 9 Schematic diagram of the internal structure of the measuring machine of the present invention.

[0028] In the figure:

[0029] 1. Measuring machine; 2. Measuring table; 21. Bottom plate; 22. Wire tube; 23. Measuring disc; 3. Optical device; 4. Housing; 41. Straight notch; 5. Guide frame; 51. Guide notch; 511. Short straight section; 512. Inclined section; 513. Long straight section; 6. Connecting rod; 61. Double-rod frame; 62. Straight rod; 7. Adsorption rod; 71. Round hole; 72. Sub-hole; 8. Sealing rod; 81. Arc rod; 82. Spring; 9. Arc block; 10. Sleeve ring; 11. Link rod; 12. Adsorption device; 13. Air pipe; 14. Driving motor; 15. Lead screw; 16. Transmission belt; 17. Guide rod; 18. Baffle. Detailed implementation manners

[0030] In order to make the above objects, features and advantages of the present invention more obvious and understandable, the following will make a detailed description of the specific implementation manners of the present invention with reference to the accompanying drawings of the specification.

[0031] Refer to Figures 1-9, for an embodiment of the present invention, a high-stability thin film thickness measuring device based on optical film thickness self-calibration is provided, which includes a measuring machine 1, and also includes a measuring table 2 and an optical device 3 fixedly connected to the measuring machine 1, a sleeve 4 fixedly connected to the top and bottom of the measuring table 2, two guiding frames 5 fixedly connected to the measuring table 2, a connecting rod 6 slidably connected inside the guiding frames 5, suction rods 7 fixedly connected to both ends of the connecting rod 6, a closing rod 8 arranged on one side of the suction rods 7, an arc block 9 fixedly connected to the bottom surface of the sleeve 4, a collar 10 slidably connected to the outside of the measuring table 2, and a connecting rod 11 hinged between the collar 10 and the connecting rod 6. A round hole 71 is opened at one end of the suction rod 7, and a plurality of sub-holes 72 are equiangularly opened near the closing rod 8 of the suction rod 7. The round hole 71 is located at the top of the suction rod 7. The output end of the optical device 3 is located above the measuring table 2. The sleeve 4 is located above the measuring machine 1. When the collar 10 moves upward, through the connecting rod 11 and the connecting rod 6, the tops of the plurality of suction rods 7 coincide with the top surface of the measuring table 2, that is, the round hole 71 at the top of the suction rod 7 can adsorb the thin film. Subsequently, the suction rod 7 is gradually pushed to move to the adsorption position. During this movement, the plurality of suction rods 7 will move towards the four right angles of the thin film, thereby pulling the thin film to make the thin film flat. The suction rod 7 includes an adsorption position. Subsequently, when the suction rod 7 is in the adsorption position, the thin film is fixed.

[0032] Among them, there are two guiding frames 5, so the number of connecting rods 6 slidably connected inside the guiding frames 5 is also two. And suction rods 7 are arranged at both ends of a single connecting rod 6. Therefore, the number of suction rods 7 is twice that of the connecting rods 6, and the number of suction rods 7 is four.

[0033] Specifically, the round hole 71 and the sub-holes 72 of each suction rod 7 can generate adsorption force. At this time, the adsorption force is dispersed, and the adsorption force of the round hole 71 on the thin film is reduced by the sub-holes 72. At this time, when the round hole 71 adsorbs the thin film, it can pull the thin film to make the thin film flatly placed on the measuring table 2. At the same time, since the adsorption force is small at this time, it will not damage the thin film. When the suction rod 7 is in the adsorption position, at this time, the sub-holes 72 will be blocked by the closing rod 8, thereby enhancing the adsorption force of the round hole 71. At the same time, the suction rod 7 stops moving, and the thin film is adsorbed and fixed, ensuring the accuracy of the measurement result and not damaging the thin film coating and affecting the measurement.

[0034] Refer to Figures 1-4 , the measuring table 2 includes a bottom plate 21 fixedly connected inside the measuring machine 1, a wire pipe 22 fixedly connected to the top of the bottom plate 21, and a measuring disc 23 fixedly connected to the top of the wire pipe 22. The measuring disc 23 is located above the measuring machine 1. The sleeve 4 is fixedly connected to the bottom of the measuring disc 23.

[0035] Refer to Figures 1-6, two guiding frames 5 are symmetrically arranged with respect to the central axis of the bottom plate 21. The number of guiding frames 5 is equal to that of the connecting rods 6. Two guiding slots 51 are formed in the guiding frame 5. The two guiding slots 51 are parallel. The guiding slot 51 is divided into a short straight section 511, an inclined section 512 and a long straight section 513. The length of the short straight section 511 is greater than the diameter of the round hole 71. When the connecting rod 6 is located in the short straight section 511, the vertical length of the inclined section 512 is equal to the distance from the top surface of the measuring disc 23 to the top end of the adsorption rod 7.

[0036] Specifically, the guiding slot 51 restricts the connecting rod 6. When the connecting rod 6 is pushed, the connecting rod 6 can only move along the guiding slot 51, and the connecting rod 6 will drive the adsorption rod 7 to move synchronously. When the connecting rod 6 moves in the guiding slot 51, it will first move in the short straight section 511 of the guiding slot 51, and its moving distance is the length of the short straight section 511, which can provide enough moving distance for the round hole 71 at the top end of the adsorption rod 7, so that the round hole 71 can completely leave the inner sleeve 4. At this time, since the connecting rod 6 is located in the short straight section 511, the vertical length of the inclined section 512 is equal to the distance from the top surface of the measuring disc 23 to the top end of the adsorption rod 7. Therefore, when the connecting rod 6 enters the inclined section 512 at this time, the connecting rod 6 will drive the adsorption rod 7 to move upward, and the top end of the adsorption rod 7 just coincides with the top surface of the measuring disc 23 after moving upward. And the thin film is located above the measuring disc 23, so as to ensure that the joint between the adsorption rod 7 and the thin film is at a suitable height to support the thin film and make the thin film in a horizontal state. Subsequently, the connecting rod 6 moves in the long straight section 513, so that multiple adsorption rods 7 apply partial adsorption forces to the thin film from multiple positions to pull the thin film and make the thin film flat.

[0037] Among them, the vertical length of the inclined section 512 refers to the distance from the bottommost end to the topmost end of the inclined section 512, and can also be regarded as the distance from the top end of the short straight section 511 to the bottom end of the long straight section 513, and both the short straight section 511 and the long straight section 513 are horizontal.

[0038] Refer to Figures 2-6 , the closing rod 8 includes an arc rod 81 slidably connected to the adsorption rod 7 and a spring 82 connected between the arc rod 81 and the adsorption rod 7. One end of the arc rod 81 is located inside the adsorption rod 7, and the radian of this end is equal to the inner diameter of the adsorption rod 7. The other end of the arc rod 81 is provided with an arc surface.

[0039] Specifically, when the arc rod 81 is pressed, it will move. At this time, the arc rod 81 slides into the adsorption rod 7. One end of the arc rod 81 located inside the adsorption rod 7 will directly be tangent to the inner surface of the adsorption rod 7, and a flat inner surface can be formed. At the same time, the arc rod 81 will close the sub-hole 72, and the adsorption force of the sub-hole 72 is eliminated, which can increase the adsorption force of the round hole 71, thereby fixing the thin film.

[0040] It is understandable that, according to the overall balance principle of the adsorption force, after the adsorption force of the sub-holes 72 is eliminated, the adsorption force of the round holes 71 will increase correspondingly. Furthermore, the enhanced adsorption force of the round holes 71 is much greater than that when the sub-holes 72 are not closed, which can firmly fix the film, and the film can be in contact with the measuring disc 23 at this time, ensuring that the film always maintains a stable state throughout the measurement process.

[0041] Referring to Figures 2-7 , the connecting rod 6 includes a double-rod frame 61 slidably connected inside the guiding slot 51, two straight rods 62 respectively fixedly connected to both ends of the double-rod frame 61, and the adsorption rod 7 is fixedly connected to the straight rod 62.

[0042] Specifically, two guiding slots 51 are formed on a single guiding frame 5, and the double-rod frame 61 is composed of two round shaft rods and a side plate. The two round shaft rods are respectively located in the corresponding guiding slots 51, and the surfaces of the round shaft rods are treated smoothly. Pulleys can also be directly installed. By using the two guiding slots 51 to limit the two round shaft rods, the rotation of a single round shaft rod can be avoided, ensuring the overall stability of the double-rod frame 61.

[0043] Referring to Figures 2-7 , the arc block 9 is located on one side of the arc surface provided on the arc-shaped rod 81. The side of the arc block 9 close to the arc-shaped rod 81 is an arc surface. When the spring 82 is completely compressed by the arc block 9, the adsorption rod 7 is in the adsorption position.

[0044] Specifically, when the arc-shaped rod 81 moves along with the adsorption rod 7, the arc-shaped rod 81 will be squeezed by the fixed arc block 9, causing the arc-shaped rod 81 to slide and compress the spring 82 at the same time.

[0045] Referring to Figures 1-8 , a plurality of straight slots 41 are formed on the sleeve housing 4. Two adsorption devices 12 are fixedly connected to the top of the bottom plate 21. An air pipe 13 is connected between the adsorption rod 7 and the adsorption device 12. The numbers of the straight slots 41, the adsorption rod 7, the closing rod 8, the arc block 9 and the air pipe 13 are equal.

[0046] A driving motor 14 is arranged on the top of the bottom plate 21. A lead screw 15 is rotatably connected to the top of the bottom plate 21. A transmission belt 16 is sleeved between the driving motor 14 and the lead screw 15. A guiding rod 17 fixedly connected to the top of the bottom plate 21. A collar 10 is slidably connected to the outside of the lead screw 15 and the guiding rod 17. A baffle 18 is arranged on the bottom plate 21. The baffle 18 is located between the air pipe 13 and the driving motor 14. The baffle 18 separates the driving motor 14 from the lead screw 15, preventing the driving device from damaging the air pipe 13.

[0047] Specifically, the drive motor 14 drives the lead screw 15 to rotate, enabling the collar 10 to move up and down. When the collar 10 moves, it drives the connecting rod 11 to move synchronously. At this time, if the collar 10 moves upward, the connecting rod 11 will push the double-rod frame 61 to move. If the collar 10 moves downward, the connecting rod 11 will pull the double-rod frame 61 back, and then the double-rod frame 61 and the straight rod 62 drive the adsorption rod 7 to move synchronously.

[0048] Referring to Figures 1-9 , when the double-rod frame 61 is located within the short straight section 511, the circular hole 71 is located near the straight slot opening 41 of the adsorption rod 7. At this time, if the adsorption rod 7 moves, the circular hole 71 will first move out of the housing 4, and the circular hole 71 of the fast adsorption rod 7 will be attached to the film. When the adsorption rod 7 is in the adsorption position, the arc rod 81 is attached to the arc block 9 and simultaneously closes the sub-hole 72, thereby increasing the adsorption force of the circular hole 71.

[0049] Referring to Figures 1-9 , the collar 10 is slidably connected to the outside of the wire tube 22, and the wire tube 22 is used to restrict the collar 10. The connecting rod 11 is sleeved between the double-rod frame 61 and the collar 10, and the number of the connecting rods 11 and the double-rod frames 61 is equal.

[0050] The working principle of the present invention is as follows: The collar 10 is located outside the wire tube 22 and fits against the top of the bottom plate 21. At this time, the adsorption rod 7 is completely inside the housing 4, and the double-rod frame 61 is located in the short straight section 511 of the guiding slot 51. At the same time, the arc rod 81 of the closing rod 8 is not squeezed. When work is required, the driving motor 14 and the adsorption device 12 are started. The adsorption device 12 uses the air pipe 13 to cause the round hole 71 and the sub-hole 72 of the adsorption rod 7 to generate adsorption force. At this time, the driving motor 14 drives the lead screw 15 to rotate through the transmission belt 16, and then makes the collar 10 move upward along the lead screw 15 and the guiding rod 17. During the upward movement of the collar 10, the connecting rod 11 hinged to it moves synchronously. The connecting rod 11 will push the double-rod frame 61 to move in the guiding slot 51. First, the double-rod frame 61 moves in the short straight section 511 of the guiding slot 51. The double-rod frame 61 will use the straight rod 62 to first drive the adsorption rod 7 to gradually be taken out of the housing 4, and the round hole 71 at its top also moves out of the housing 4. When the double-rod frame 61 moves in the inclined section 512 of the guiding slot 51, the double-rod frame 61 will move upward, thereby driving the adsorption rod 7 to move upward, so that the top of the adsorption rod 7 coincides with the top surface of the measuring disc 23. The adsorption rod 7 will fit with the thin film to generate adsorption. However, at this time, the sub-hole 72 disperses the adsorption force. Subsequently, the double-rod frame 61 moves in the long straight section 513, so that the pulling force of the adsorption rod 7 will pull the thin film without tearing the thin film, effectively overcoming problems such as wrinkles and bending of the thin film due to its own flexibility and improper placement, enabling the thin film to be quickly and flatly spread on the measuring disc 23. When the end of the arc surface of the arc rod 81 contacts and is squeezed by the fixed arc block 9, as the adsorption rod 7 moves, the arc rod 81 will slide into the adsorption rod 7, and at the same time compress the spring 82 connected between it and the adsorption rod 7. The end of the arc rod 81 located inside the adsorption rod 7 will be tangent to the inner surface of the adsorption rod 7, and at the same time close the sub-hole 72. After the adsorption force of the sub-hole 72 is eliminated, the adsorption force of the round hole 71 increases accordingly, and can firmly fix the thin film on the measuring disc 23, ensuring that the thin film always maintains a stable state throughout the measurement process. After measuring the thickness of a single thin film, after completion, the adsorption device 12 is turned off, and the driving motor 14 is controlled to quickly reverse, driving the lead screw 15 to rotate in the reverse direction, so that the collar 10 moves downward along the lead screw 15 and the guiding rod 17. During the downward movement of the collar 10, the double-rod frame 61 is pulled back through the connecting rod 11. Then, the double-rod frame 61 and the straight rod 62 drive the adsorption rod 7 to move synchronously into the housing 4. During the movement of the adsorption rod 7, the arc rod 81 is no longer squeezed by the arc block 9. Under the elastic force of the spring 82, the arc rod 81 moves back, and the sub-hole 72 is reopened. Finally, the adsorption rod 7 returns to the inside of the housing 4, and the components are completely reset, preparing for the next thin film thickness measurement.

Claims

1. A high-stability thin-film thickness measurement device based on optical film thickness self-calibration, comprising a measuring machine (1), characterized in that: It further includes a measuring table (2) and an optical device (3) fixedly connected to the measuring machine (1), a casing (4) fixedly connected to the top and bottom of the measuring table (2), two guiding frames (5) fixedly connected to the measuring table (2), a connecting rod (6) slidably connected inside the guiding frames (5), suction rods (7) fixedly connected to both ends of the connecting rod (6), a closing rod (8) arranged on one side of the suction rod (7), an arc block (9) fixedly connected to the bottom surface of the casing (4), a collar (10) slidably connected to the outside of the measuring table (2), and a connecting rod (11) hinged between the collar (10) and the connecting rod (6). A round hole (71) is opened at one end of the suction rod (7), and a plurality of sub-holes (72) are equiangularly opened near the closing rod (8) of the suction rod (7). The round hole (71) is located at the top of the suction rod (7). The output end of the optical device (3) is located above the measuring table (2). The casing (4) is located above the measuring machine (1). When the collar (10) moves upward, through the connecting rod (11) and the connecting rod (6), the tops of the plurality of suction rods (7) coincide with the top surface of the measuring table (2). The suction rod (7) includes a suction position, and when the suction rod (7) is in the suction position, the film is fixed.

2. The high-stability thin film thickness measurement device based on optical film thickness self-calibration according to claim 1, characterized in that: The measuring table (2) includes a bottom plate (21) fixedly connected inside the measuring machine (1), a wire pipe (22) fixedly connected to the top of the bottom plate (21), and a measuring disc (23) fixedly connected to the top of the wire pipe (22). The measuring disc (23) is located above the measuring machine (1). The casing (4) is fixedly connected to the bottom of the measuring disc (23).

3. The high-stability thin-film thickness measurement device based on optical film thickness self-calibration according to claim 2, wherein: The two guiding frames (5) are symmetrically arranged about the central axis of the bottom plate (21). The number of the guiding frames (5) is equal to that of the connecting rods (6). Two guiding slots (51) are opened on the guiding frame (5). The two guiding slots (51) are parallel. The guiding slot (51) is divided into a short straight section (511), an inclined section (512), and a long straight section (513). The length of the short straight section (511) is greater than the diameter of the round hole (71). When the connecting rod (6) is located in the short straight section (511), the vertical length of the inclined section (512) is equal to the distance from the top surface of the measuring disc (23) to the top of the suction rod (7).

4. The high-stability thin-film thickness measurement device based on optical film thickness self-calibration according to claim 3, wherein: The closing rod (8) includes an arc rod (81) slidably connected to the suction rod (7), and a spring (82) connected between the arc rod (81) and the suction rod (7). One end of the arc rod (81) is located inside the suction rod (7), and the radian of this end is equal to the inner diameter of the suction rod (7). The other end of the arc rod (81) is provided with an arc surface.

5. The high-stability thin-film thickness measurement device based on optical film thickness self-calibration according to claim 4, wherein: The connecting rod (6) includes a double-rod frame (61) slidably connected inside the guiding slot (51), and two straight rods (62) respectively fixedly connected to both ends of the double-rod frame (61). The suction rod (7) is fixedly connected to the straight rod (62).

6. The high-stability thin film thickness measuring device based on optical film thickness self-calibration according to claim 4, characterized in that: The arc block (9) is located on one side of the arc surface of the arc rod (81). The side of the arc block (9) close to the arc rod (81) is an arc surface. When the spring (82) is completely squeezed by the arc block (9), the adsorption rod (7) is in the adsorption position.

7. The high-stability thin-film thickness measurement device based on optical film thickness self-calibration according to claim 2, wherein: Two adsorption devices (12) are fixedly connected to the top of the bottom plate (21). An air pipe (13) is connected between the adsorption rod (7) and the adsorption device (12). A driving motor (14) is arranged on the top of the bottom plate (21). A lead screw (15) is rotatably connected to the top of the bottom plate (21). A transmission belt (16) is sleeved between the driving motor (14) and the lead screw (15). A guide rod (17) fixedly connected to the top of the bottom plate (21). The collar (10) is slidably connected to the outside of the lead screw (15) and the guide rod (17). A baffle (18) is arranged on the bottom plate (21). The baffle (18) is located between the air pipe (13) and the driving motor (14).

8. The high-stability thin-film thickness measurement device based on optical film thickness self-calibration according to claim 5, wherein: A plurality of straight notches (41) are formed in the housing (4). The number of the straight notches (41), the adsorption rods (7), the closing rods (8), the arc blocks (9) and the air pipes (13) is equal.

9. The high-stability thin film thickness measuring device based on optical film thickness self-calibration according to claim 8, characterized in that: When the double-rod frame (61) is located in the short straight section (511), the circular hole (71) is located near the adsorption rod (7) close to the straight notch (41). When the adsorption rod (7) is in the adsorption position, the arc rod (81) is in contact with the arc block (9) and simultaneously closes the sub-hole (72).

10. The high-stability thin film thickness measurement device based on optical film thickness self-calibration according to claim 5, characterized in that: The collar (10) is slidably connected to the outside of the wire pipe (22). The connecting rod (11) is sleeved between the double-rod frame (61) and the collar (10). The number of the connecting rods (11) and the double-rod frames (61) is equal.

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