Loading and unloading device and wafer detection system

Abstract

The present application provides a loading and unloading device and a wafer detection system, which includes a frame mechanism, a material module, and a lifting mechanism. An opening is provided at the top of the frame mechanism, and the material module is arranged corresponding to the opening. The material module includes a carrier table mechanism and a material box. The material box is arranged on the carrier table mechanism, and the material box is used for placing samples to be tested. The lifting mechanism is arranged corresponding to the opening. The lifting mechanism includes a lifting bottom plate, a lifting guide rail assembly, and a carrier. The lifting bottom plate is arranged on the frame mechanism, the lifting guide rail assembly is arranged on the lifting bottom plate and extends along a first direction, the carrier is slidably connected to the lifting guide rail assembly along the first direction, the carrier bears the material module, and the carrier can drive the material module to move along the first direction, and then drive the material box to move along the first direction to be exposed relative to the opening. The loading and unloading device of the present application can be directly docked with the overhead crane device through a transfer device, reducing the manual operation steps of the loading and unloading device and improving the transportation efficiency and detection efficiency of the loading and unloading device.

Description

Technical Field

[0001] This application relates to the technical field of wafer detection, and particularly to a loading and unloading device and a wafer detection system. Background Art

[0002] During the performance test of a wafer, the loading and unloading device is used to transport the wafer and perform basic detection and calibration before the performance test. In the related art, the material box of the loading and unloading device cannot be docked with the overhead crane for transporting the material box, and the operator needs to manually place the material box into the loading and unloading device or take the material box out of the loading and unloading device. Summary of the Invention

[0003] The purpose of this application is to provide a loading and unloading device and a wafer detection system to solve the technical problem that the material box of the loading and unloading device in the related art needs to be manually placed or taken out by the operator.

[0004] In a first aspect, this application provides a loading and unloading device, which includes:

[0005] A frame mechanism, with an opening at the top of the frame mechanism;

[0006] A material module, arranged corresponding to the opening. The material module includes a carrier table mechanism and a material box. The material box is arranged on the carrier table mechanism, and the material box is used to place the sample to be tested;

[0007] A lifting mechanism, arranged corresponding to the opening. The lifting mechanism includes a lifting bottom plate, a lifting guide rail assembly and a carrier. The lifting bottom plate is arranged on the frame mechanism, the lifting guide rail assembly is arranged on the lifting bottom plate and extends along a first direction, the carrier is slidably connected to the lifting guide rail assembly along the first direction, the carrier bears the material module, and the carrier can drive the material module to move along the first direction, and then drive the material box to move along the first direction to be exposed relative to the opening.

[0008] In the loading and unloading device provided in the present application, an opening is provided on the top of the frame mechanism, and the material module is arranged corresponding to the opening. The material module includes a load-bearing platform mechanism and a material box. The material box is arranged on the load-bearing platform mechanism, and the material box is used to place the sample to be tested. The lifting mechanism is arranged corresponding to the opening, and the lifting mechanism includes a lifting base plate, a lifting guide rail assembly and a bearing member. The lifting base plate is arranged on the frame mechanism, the lifting guide rail assembly is arranged on the lifting base plate and extends along a first direction, the bearing member is slidably connected to the lifting guide rail assembly along the first direction, the bearing member carries the material module, and the bearing member can drive the material module to move along the first direction, thereby driving the material box to move along the first direction until it is exposed relative to the opening. The lifting mechanism can drive the load-bearing platform mechanism to move to the opening exposing the top of the frame mechanism, so that the transfer device can take out the material box of the load-bearing platform mechanism to the overhead crane device or place the material box of the overhead crane device on the load-bearing platform mechanism. The loading and unloading device of the present application can directly connect to the overhead crane device through the transfer device, and there is no need for an operator to manually take out or place the material box, thereby reducing the manual operation steps of the loading and unloading device, improving the automation performance of the loading and unloading device, and thereby improving the transportation efficiency and detection efficiency of the loading and unloading device.

[0009] Wherein, the supporting platform mechanism includes a material box sensing module, and the material box sensing module includes a supporting plate, a first sensing component, a second sensing component and a third sensing component. The supporting plate is used to support the material box, and the first sensing component, the second sensing component and the third sensing component are sequentially arranged on the supporting plate along the second direction. The first sensing component is used to abut and sense the material box of a first size, the second sensing component is used to abut and sense the material box of a second size, and the third sensing component is used to abut and sense the material box of a third size, wherein the second direction is perpendicular to the first direction, the first size is smaller than the second size, and the second size is smaller than the third size.

[0010] The first sensing component includes a first sensing member and a first sensor, wherein the first sensing member is disposed on a side of the carrier plate away from the material box and at least partially penetrates the carrier plate, the first sensing member can move in a direction opposite to the first direction, the first sensor is disposed on a side of the carrier plate away from the material box, the first sensor is disposed corresponding to the first sensing member, and the first sensor is used to detect position information of the first sensing member;

[0011] The second sensing component includes a second sensing element and a second sensor. The second sensing element is disposed on a side of the carrier plate facing away from the material box and at least partially penetrates the carrier plate. The second sensing element is capable of moving in a direction opposite to the first direction. The second sensor is disposed on a side of the carrier plate facing away from the material box. The second sensor is arranged corresponding to the second sensing element, and the second sensor is used to detect position information of the second sensing element;

[0012] The third sensing component includes a third sensing element and a third sensor. The third sensing element is disposed on a side of the carrier plate facing away from the material box and at least partially penetrates the carrier plate. The third sensing element is capable of moving in a direction opposite to the first direction. The third sensor is disposed on a side of the carrier plate facing away from the material box. The third sensor is arranged corresponding to the third sensing element, and the third sensor is used to detect position information of the third sensing element.

[0013] Wherein, the first sensing element includes a first sensing block and a first sensing sheet. The first sensing block penetrates the carrier plate. The first sensing sheet is disposed on a side of the carrier plate facing away from the material box. The first sensing sheet includes a connected first fixing portion, a first sensing portion, and a first connecting portion. The first fixing portion connects the carrier plate. The first sensing portion is bent relative to the first fixing portion. The first sensing portion is arranged corresponding to the first sensor. The first connecting portion connects the first sensing block;

[0014] The second sensing element includes a second sensing block and a second sensing sheet. The second sensing block penetrates the carrier plate. The second sensing sheet is disposed on a side of the carrier plate facing away from the material box. The second sensing sheet includes a connected second fixing portion, a second sensing portion, and a second connecting portion. The second fixing portion connects the carrier plate. The second sensing portion is bent relative to the second fixing portion. The second sensing portion is arranged corresponding to the second sensor. The second connecting portion connects the second sensing block;

[0015] The third sensing element includes a third sensing block and a third sensing sheet. The third sensing block penetrates the carrier plate. The third sensing sheet is disposed on a side of the carrier plate facing away from the material box. The third sensing sheet includes a connected third fixing portion, a third sensing portion, and a third connecting portion. The third fixing portion connects the carrier plate. The third sensing portion is bent relative to the third fixing portion. The third sensing portion is arranged corresponding to the third sensor. The third connecting portion connects the third sensing block.

[0016] Wherein, the material box sensing module further includes a first limiting component disposed on the carrier plate. The material box includes a bottom pull rod;

[0017] The first limiting component includes a first limiting block, a second limiting block, a third limiting block, and a fourth limiting block arranged in sequence along the second direction;

[0018] A first limiting gap is formed between the first limiting block and the second limiting block. The first limiting gap is used to accommodate the bottom pull rod of the material box of the first size, and the first sensing block is arranged in the first limiting gap;

[0019] A second limiting gap is formed between the second limiting block and the third limiting block. The second limiting gap is used to accommodate the bottom pull rod of the material box of the second size, and the second sensing block is arranged in the second limiting gap;

[0020] A third limiting gap is formed between the third limiting block and the fourth limiting block. The third limiting gap is used to accommodate the bottom pull rod of the material box of the third size, and the third sensing block is arranged in the third limiting gap.

[0021] Wherein, the material box sensing module further includes a second limiting component arranged on the bearing plate. The second limiting component and the first limiting component are arranged at intervals. The material box includes a first side plate and a second side plate arranged opposite to each other. The first side plate and the second side plate are respectively connected to two ends of the bottom pull rod;

[0022] The second limiting component includes a first limiting plate and a second limiting plate. The first limiting plate includes a first limiting groove, a second limiting groove, and a third limiting groove. The second limiting plate includes a fourth limiting groove, a fifth limiting groove, and a sixth limiting groove. The first limiting groove and the fourth limiting groove are used to abut against and limit the first side plate and the second side plate of the material box of the first size. The second limiting groove and the fifth limiting groove are used to abut against and limit the first side plate and the second side plate of the material box of the second size. The third limiting groove and the sixth limiting groove are used to abut against and limit the first side plate and the second side plate of the material box of the third size.

[0023] Wherein, the bearing platform mechanism further includes a material box clamping module. The material box clamping module includes a mounting plate, a second guide rail assembly, a first clamping assembly, and a second clamping assembly. The second guide rail assembly is arranged on the mounting plate along the third direction. The first clamping assembly and the second clamping assembly at least partially penetrate the bearing plate. The first clamping assembly and the second clamping assembly are slidably connected to the second guide rail assembly along the third direction. The first clamping assembly and the second clamping assembly can move in opposite directions and abut against the first side plate and the second side plate of the material box to clamp the material box. The third direction is perpendicular to the second direction and the first direction respectively.

[0024] Among them, the cartridge clamping module further includes a driving assembly, the driving assembly includes a driving member and a conveyor belt, the conveyor belt includes a connected first conveying portion and a second conveying portion, the first conveying portion and the second conveying portion are relatively spaced apart and move in opposite directions, the first clamping assembly is connected to the first conveying portion, the second clamping assembly is connected to the second conveying portion, the driving member is connected to the first clamping assembly and is used to drive the first clamping assembly to move along the third direction, and drive the second clamping assembly to move along the opposite direction of the third direction through the conveyor belt.

[0025] Among them, the material module further includes a recycling assembly, the recycling assembly is arranged on the carrier, and the carrier table mechanism is arranged on the recycling assembly;

[0026] The recycling assembly includes a recycling substrate and a recycling moving member, the recycling substrate is fixed on the carrier, a recycling guide rail is arranged on the recycling substrate, the recycling moving member is slidably connected to the recycling guide rail and can move along the second direction, and the recycling moving member is provided with a first positioning block and a second positioning block which are relatively spaced apart, and the first positioning block and the second positioning block enclose a recycling space for placing the sample to be tested.

[0027] In a second aspect, the present application provides a wafer detection system, the wafer detection system includes a crane device, a transfer device and the loading and unloading device, the crane device is used to transport the material box, and the transfer device is used to place the material box on the carrier table mechanism.

[0028] In the wafer detection system provided by the present application, an opening is provided at the top of the frame mechanism, the material module is arranged corresponding to the opening, the material module includes a carrier table mechanism and a material box, the material box is arranged on the carrier table mechanism, the material box is used to place the sample to be tested, the lifting mechanism is arranged corresponding to the opening, the lifting mechanism includes a lifting bottom plate, a lifting guide rail assembly and a carrier, the lifting bottom plate is arranged on the frame mechanism, the lifting guide rail assembly is arranged on the lifting bottom plate and extends along the first direction, the carrier is slidably connected to the lifting guide rail assembly along the first direction, the carrier carries the material module, and the carrier can drive the material module to move along the first direction, and then drive the material box to move along the first direction to be exposed relative to the opening. The lifting mechanism can drive the carrier table mechanism to move to expose the opening at the top of the frame mechanism, so that the transfer device can take out the material box of the carrier table mechanism to the crane device or place the material box of the crane device on the carrier table mechanism. In the wafer detection system of the present application, the loading and unloading device can directly dock with the crane device through the transfer device, without the need for operators to manually take out or place the material box, reducing the manual operation steps of the wafer detection system, improving the automation performance of the wafer detection system, and further improving the transportation efficiency and detection efficiency of the wafer detection system. Description of the Drawings

[0029] To more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0030] Figure 1 It is a schematic structural diagram of a loading and unloading device provided by an embodiment of the present application;

[0031] Figure 2 It is a schematic structural diagram of a material module and a lifting mechanism provided by an embodiment of the present application;

[0032] Figure 3 It is a schematic structural diagram of a material module provided by an embodiment of the present application;

[0033] Figure 4 It is a schematic structural diagram of a material box provided by an embodiment of the present application;

[0034] Figure 5 It is a schematic structural diagram of the bottom of a material box provided by an embodiment of the present application;

[0035] Figure 6 It is a schematic structural diagram of a material box induction module provided by an embodiment of the present application;

[0036] Figure 7 It is an exploded structural diagram of a material box induction module provided by an embodiment of the present application;

[0037] Figure 8 It is a schematic structural diagram of a first induction component provided by an embodiment of the present application;

[0038] Figure 9 It is a schematic structural diagram of a second induction component provided by an embodiment of the present application;

[0039] Figure 10 It is a schematic structural diagram of a third induction component provided by an embodiment of the present application;

[0040] Figure 11 It is a schematic structural diagram of the bottom of a material box induction module provided by an embodiment of the present application;

[0041] Figure 12 It is a schematic structural diagram of a first limiting component provided by an embodiment of the present application;

[0042] Figure 13 It is a schematic structural diagram of a second limiting component provided by an embodiment of the present application;

[0043] Figure 14 is a schematic structural diagram of a carrier mechanism provided by an embodiment of the present application;

[0044] Figure 15 is a schematic structural diagram of a cartridge clamping module provided by an embodiment of the present application;

[0045] Figure 16 is a schematic structural diagram of a recycling component provided by an embodiment of the present application.

[0046] Label description:

[0047] Loading and unloading device 100, frame mechanism 10, opening 11, material module 20, carrier mechanism 30, cartridge induction module 40, carrier plate 41, first induction component 42, first induction element 421, first induction block 4211, first induction sheet 4212, first fixing part 4212a, first induction part 4212b, first connecting part 4212c, first sensor 422, second induction component 43, second induction element 431, second induction block 4311, second induction sheet 4312, second fixing part 4312a, second induction part 4312b, second connecting part 4312c, second sensor 432, third induction component 44, third induction element 441, third induction block 4411, third induction sheet 4412, third fixing part 4412a, third induction part 4412b, third connecting part 4412c, third sensor 442, first limiting component 45, first limiting block 451, second limiting block 452, third limiting block 453, fourth limiting block 454, second limiting component 46, first limiting plate 461, second limiting groove 4611, third limiting groove 4612, second limiting plate 462, fifth limiting groove 4621, sixth limiting groove 4622, fourth induction component 47, fifth induction component 48, cartridge clamping module 50, mounting plate 51, second guide rail assembly 52, first clamping component 53, detection sheet 533, second clamping component 54, drive component 55, drive element 551, conveyor belt 552, mounting slide rail 561, first detector 562, second detector 563, recycling component 60, recycling substrate 61, eighth step surface 612, ninth step surface 613, recycling moving part 62, door panel 621, support plate 622, recycling guide rail 63, first positioning block 64, second step surface 642, third step surface 643, second positioning block 65, fifth step surface 652, sixth step surface 653, material cartridge 70, first side plate 71, second side plate 72, bottom pull rod 73, strip-shaped protrusion 731, top connection panel 74, lifting mechanism 80, lifting bottom plate 81, lifting guide rail assembly 82, bearing part 83, flip door mechanism 90, manipulator mechanism 91, angle adjustment mechanism 92. Detailed implementation manners

[0048] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0049] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion.

[0050] In this specification, for convenience, terms indicating orientation or positional relationships such as "middle", "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are used to describe the positional relationships of the constituent elements with reference to the accompanying drawings. This is only for the convenience of describing this specification and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation of the present disclosure. The positional relationships of the constituent elements are appropriately changed according to the directions of the described constituent elements. Therefore, it is not limited to the terms described in the specification, and can be appropriately replaced according to the circumstances.

[0051] In this specification, unless otherwise clearly defined and limited, the terms "installed", "connected", and "connected" shall be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate member, or the communication inside two elements. For those of ordinary skill in the art, the meanings of the above terms in the present disclosure can be understood according to the circumstances.

[0052] During the performance test of the wafer, the loading and unloading device is used to transport the wafer and perform basic detection and calibration before the performance test. In the related art, the material box of the loading and unloading device cannot be docked with the overhead crane for transporting the material box, and the operator needs to manually place the material box into the loading and unloading device or take the material box out of the loading and unloading device.

[0053] The present application provides a loading and unloading device and a wafer detection system to solve the technical problem that the material box of the loading and unloading device in the related art needs to be manually placed or taken out by the operator.

[0054] Please refer to Figures 1 to 3 , Figure 1 which is a schematic structural diagram of a loading and unloading device provided by an embodiment of the present application. Figure 2It is a schematic structural diagram of a material module and a lifting mechanism provided by an embodiment of the present application. Figure 3 It is a schematic structural diagram of a material module provided by an embodiment of the present application.

[0055] The present application provides a loading and unloading device 100, and the loading and unloading device 100 includes a frame mechanism 10, a material module 20 and a lifting mechanism 80. An opening 11 is provided at the top of the frame mechanism 10. The material module 20 is arranged corresponding to the opening 11. The material module 20 includes a carrier table mechanism 30 and a material box 70. The material box 70 is arranged on the carrier table mechanism 30, and the material box 70 is used for placing samples to be tested. The lifting mechanism 80 is arranged corresponding to the opening 11. The lifting mechanism 80 includes a lifting bottom plate 81, a lifting guide rail assembly 82 and a carrier 83. The lifting bottom plate 81 is arranged on the frame mechanism 10. The lifting guide rail assembly 82 is arranged on the lifting bottom plate 81 and extends along a first direction D1. The carrier 83 is slidably connected to the lifting guide rail assembly 82 along the first direction D1. The carrier 83 carries the material module 20, and the carrier 83 can drive the material module 20 to move along the first direction D1, so as to drive the material box 70 to move along the first direction D1 to be exposed relative to the opening 11.

[0056] The loading and unloading device 100 includes the frame mechanism 10, and the frame mechanism 10 can be used to carry other structural components of the loading and unloading device 100, such as the material module 20, the lifting mechanism 80 or other structural components, etc.

[0057] The loading and unloading device 100 further includes the material module 20. The material module 20 includes a carrier table mechanism 30 and a material box 70. The carrier table mechanism 30 is used for carrying the material box 70, and the material box 70 is used for storing a plurality of samples to be tested. Among them, the samples to be tested include, but are not limited to, wafers, wafers or other products. In the present application, the sample to be tested is taken as an example of a wafer, which should not be construed as a limitation to the present application.

[0058] The loading and unloading device 100 further includes a lifting mechanism 80, and the lifting mechanism 80 is fixed on the frame mechanism 10. The lifting mechanism 80 includes the lifting bottom plate 81, the lifting guide rail assembly 82 and the carrier 83. The lifting bottom plate 81 extends along the first direction D1 and is arranged on the frame mechanism 10. The lifting bottom plate 81 includes a machined aluminum alloy part, which can improve the support performance and structural rigidity at the bottom of the lifting mechanism 80 and improve the structural stability of the lifting mechanism 80.

[0059] Among them, please refer to Figure 1, the first direction D1 is the height direction of the loading and unloading device 100. Further, the first direction D1 is the vertically upward direction.

[0060] Further, the lifting mechanism 80 further includes a lifting motor and a lead screw assembly. The lifting motor is fixed on the lifting bottom plate 81. The lead screw assembly is arranged on the lifting bottom plate 81 along the first direction D1 and is connected to the lifting motor. The carrier 83 carries the material module 20 and the carrier 83 is connected to the lead screw assembly. The lifting motor drives the carrier 83 and the material module 20 to move along the first direction D1 or the opposite direction of the first direction D1 through the lead screw assembly.

[0061] Further, in this embodiment, the lifting guide rail assembly 82 includes two lifting guide rails, and the two lifting guide rails are respectively arranged at both ends of the lifting bottom plate 81. Similarly, the carrier 83 is respectively slidably connected to the two lifting guide rails to improve the stability of the lifting and sliding of the carrier 83. Further, the lifting guide rail assembly 82 further includes two lifting sliders, and the two lifting sliders are arranged on the lifting guide rails and are used to connect the carrier 83.

[0062] Further, in this embodiment, the carrier table mechanism 30 of the material module 20 is arranged on the carrier 83. The lifting motor and the lead screw assembly cooperate to drive the carrier 83 to move along the extension direction of the lifting guide rail assembly 82 (the first direction D1 or the opposite direction of the first direction D1), and the carrier 83 further drives the carrier table mechanism 30 and the material box 70 to move along the first direction D1 or the opposite direction of the first direction D1.

[0063] In other words, the lifting mechanism 80 of the present application can drive the carrier table mechanism 30 and the material box 70 to move up along the first direction D1 through the carrier 83, or drive the carrier table mechanism 30 and the material box 70 to move down along the opposite direction of the first direction D1.

[0064] In the loading and unloading device in the related art, the material box cannot be docked with the overhead crane for transporting the material box, and the operator needs to manually place the material box into the loading and unloading device or take the material box out of the loading and unloading device.

[0065] The lifting mechanism 80 of the present application can drive the carrier table mechanism 30 and the material box 70 to move and rise along the first direction D1 through the carrier 83, and can move the carrier table mechanism 30 and the material box 70 to expose the opening 11 at the top of the frame mechanism 10, so that the transfer device can take out the material box 70 exposed at the opening 11 and move it to the overhead crane device for transporting the material box 70.

[0066] Moreover, when the transfer device needs to place the material box 70 of the overhead crane device on the loading and unloading device 100 of the present application, the lifting mechanism 80 can drive the carrier table mechanism 30 to move and rise along the first direction D1 to expose the opening 11 at the top of the frame mechanism 10, so that the carrier table mechanism 30 can carry the material box 70 of the transfer device.

[0067] Further, after the transfer device places the material box 70 on the carrier table mechanism 30, the lifting mechanism 80 can drive the carrier table mechanism 30 to move and descend along the opposite direction of the first direction D1, so that the height of the material box 70 corresponds to the manipulator mechanism 91 in the loading and unloading device 100, and the test sample in the material box 70 can be transported by the manipulator mechanism 91 and subsequent detection steps can be carried out.

[0068] In the loading and unloading device 100 provided by the present application, an opening 11 is provided at the top of the frame mechanism 10. The material module 20 is arranged corresponding to the opening 11. The material module 20 includes the carrier table mechanism 30 and the material box 70. The material box 70 is arranged on the carrier table mechanism 30. The material box 70 is used for placing the sample to be tested. The lifting mechanism 80 is arranged corresponding to the opening 11. The lifting mechanism 80 includes the lifting bottom plate 81, the lifting guide rail assembly 82 and the carrier 83. The lifting bottom plate 81 is arranged on the frame mechanism 10. The lifting guide rail assembly 82 is arranged on the lifting bottom plate 81 and extends along the first direction D1. The carrier 83 is slidably connected to the lifting guide rail assembly 82 along the first direction D1. The carrier 83 carries the material module 20. The carrier 83 can drive the material module 20 to move along the first direction D1, and further drive the material box 70 to move along the first direction D1 to be exposed relative to the opening 11. The lifting mechanism 80 can drive the carrier table mechanism 30 to move to expose the opening 11 at the top of the frame mechanism 10, so that the transfer device can take out the material box 70 of the carrier table mechanism 30 to the overhead crane device or place the material box 70 of the overhead crane device on the carrier table mechanism 30. The loading and unloading device 100 of the present application can directly connect to the overhead crane device through the transfer device, without the operator manually taking out or placing the material box 70, reducing the manual operation steps of the loading and unloading device 100, improving the automation performance of the loading and unloading device 100, and further improving the transportation efficiency and detection efficiency of the loading and unloading device 100.

[0069] Further, in the present embodiment, the loading and unloading device 100 further includes a flip door mechanism 90. The flip door mechanism 90 is arranged on the frame mechanism 10, and the flip door mechanism 90 covers the opening 11 at the top of the frame mechanism 10. The flip door mechanism 90 can be used to open and expose the opening 11, so that the carrier table mechanism 30 and the material box 70 can be exposed through the opening 11 and the flip door mechanism 90. Moreover, the flip door mechanism 90 can be used to close the opening 11 to prevent dust and other impurities in the external environment from entering the loading and unloading device 100 through the opening 11 of the frame mechanism 10, and improve the air cleanliness inside the loading and unloading device 100.

[0070] Specifically, please refer to Figures 1 to 5 , Figure 4 which is a schematic structural diagram of a material box provided by an embodiment of the present application, Figure 5 and which is a schematic bottom structural diagram of a material box provided by an embodiment of the present application.

[0071] In this embodiment, the material box 70 includes a first side plate 71, a second side plate 72, a bottom tie rod 73, and a top connection panel 74. The bottom tie rod 73 is respectively connected to the first side plate 71 and the second side plate 72. Among them, the bottom tie rod 73 is located in the middle area between the first side plate 71 and the second side plate 72, which can improve the connection stability between the first side plate 71 and the second side plate 72. The top connection panel 74 is provided at the top of the first side plate 71 and the second side plate 72 and is respectively connected to the first side plate 71 and the second side plate 72. The first side plate 71 and the second side plate 72 are fixed to each other through the bottom tie rod 73 and the top connection panel 74, and the first side plate 71, the second side plate 72, the bottom tie rod 73, and the top connection panel 74 enclose a receiving space for receiving the sample to be tested. Further, a plurality of engaging grooves are respectively provided on the first side plate 71 and the second side plate 72, and the sample to be tested is placed and fixed on the first side plate 71 and the second side plate 72 through the engaging grooves.

[0072] It should be noted that in this embodiment, the loading and unloading device 100 can transport and detect the samples to be tested of three sizes, and the carrier mechanism 30 of the loading and unloading device 100 can load three material boxes 70 of different sizes, that is, the types of the material boxes 70 include the material box 70 of the first size, the material box 70 of the second size, and the material box 70 of the third size. Among them, the first size is smaller than the second size, and the second size is smaller than the third size. In other words, the first size, the second size, and the third size increase in sequence.

[0073] Optionally, in this embodiment, the material box 70 of the first size is used to place the sample to be tested of 4 inches, the material box 70 of the second size is used to place the sample to be tested of 6 inches, and the material box 70 of the third size is used to place the sample to be tested of 8 inches. In other embodiments, the material box 70 of the first size can also place samples to be tested of other sizes, such as 1 inch, or 2 inches, or 3 inches, or 5 inches, or 6 inches, or 7 inches, or 8 inches, or 9 inches, or 10 inches, or other sizes of the sample to be tested. The material box 70 of the second size can also place samples to be tested of other sizes, such as 1 inch, or 2 inches, or 3 inches, or 5 inches, or 6 inches, or 7 inches, or 8 inches, or 9 inches, or 10 inches, or other sizes of the sample to be tested. The material box 70 of the third size can also place samples to be tested of other sizes, such as 1 inch, or 2 inches, or 3 inches, or 5 inches, or 6 inches, or 7 inches, or 8 inches, or 9 inches, or 10 inches, or other sizes of the sample to be tested. The present application does not limit this.

[0074] In this embodiment, the carrier mechanism 30 can be used to place the material boxes 70 of the first size, the material boxes 70 of the second size, and the material boxes 70 of the third size. It should be noted that if the material box 70 of the third size does not contain the sample to be tested, the material boxes 70 of the second size and the third size can be placed on the carrier mechanism 30 simultaneously, and the material box 70 of the third size is disposed outside the material box 70 of the second size. If the material box 70 of the second size does not contain the sample to be tested, the material boxes 70 of the first size and the second size can be placed on the carrier mechanism 30 simultaneously, and the material box 70 of the second size is disposed outside the material box 70 of the first size. If the material boxes 70 of the third size and the second size do not contain the sample to be tested, the material boxes 70 of the third size, the second size, and the first size can be placed on the carrier mechanism 30 simultaneously.

[0075] Please refer to Figures 1 to 6 , Figure 6 which is a schematic structural diagram of a material box induction module provided by an embodiment of the present application.

[0076] In one embodiment, the carrier mechanism 30 includes a material box induction module 40. The material box induction module 40 includes a carrier plate 41, a first induction component 42, a second induction component 43, and a third induction component 44. The carrier plate 41 is used to carry the material box 70. The first induction component 42, the second induction component 43, and the third induction component 44 are sequentially disposed on the carrier plate 41 along the second direction D2. The first induction component 42 is used to abut against and sense the material box 70 of the first size. The second induction component 43 is used to abut against and sense the material box 70 of the second size. The third induction component 44 is used to abut against and sense the material box 70 of the third size. Wherein, the second direction D2 is perpendicular to the first direction D1.

[0077] Among them, please refer to Figure 1 , the second direction D2 is the length direction of the loading and unloading device 100, and the second direction D2 is perpendicular to the first direction D1.

[0078] Furthermore, the first sensing component 42 , the second sensing component 43 , and the third sensing component 44 are all electrically connected to the controller component of the loading and unloading device 100 , and the controller component outputs the size information of the material box 70 according to the sensor signal output by at least one of the first sensing component 42 , the second sensing component 43 , and the third sensing component 44 .

[0079] Specifically, when the material box 70 of the first size abuts against the first sensing component 42, the first sensing component 42 outputs a first sensing signal to the controller component, and the controller component outputs information that the size of the material box 70 is the first size according to the first sensing signal; when the material box 70 of the second size abuts against the first sensing component 42, the second sensing component 43 outputs a second sensing signal to the controller component, and the controller component outputs information that the size of the material box 70 is the second size according to the second sensing signal; when the material box 70 of the third size abuts against the third sensing component 44, the third sensing component 44 outputs a third sensing signal to the controller component, and the controller outputs information that the size of the material box 70 is the third size according to the third sensing signal.

[0080] In this embodiment, the bottom pull rod 73 of the material box 70 abuts against the first induction component 42, or the second induction component 43, or the third induction component 44. Specifically, the bottom pull rod 73 of the material box 70 of the first size is used to abut against the first induction component 42, the bottom pull rod 73 of the material box 70 of the second size is used to abut against the second induction component 43, and the bottom pull rod 73 of the material box 70 of the third size is used to abut against the second induction component 43.

[0081] Please refer to Figures 1 to 7 , Figure 7 It is a schematic diagram of the explosion structure of a material box sensing module provided in an embodiment of the present application.

[0082] In one embodiment, the first sensing component 42 includes a first sensing member 421 and a first sensor 422. The first sensing member 421 is disposed on a side of the supporting plate 41 away from the material box 70 and at least partially penetrates the supporting plate 41. The first sensing member 421 is used to abut the material box 70 of a first size. The first sensing member 421 can move in the opposite direction of the first direction D1. The first sensor 422 is disposed on a side of the supporting plate 41 away from the material box 70. The first sensor 422 is disposed corresponding to the first sensing member 421, and the first sensor 422 is used to detect position information of the first sensing member 421.

[0083] Specifically, in the present embodiment, the first sensing member 421 can move along the first direction D1 to protrude from the carrier plate 41 or be flush with the carrier plate 41. The initial state of the first sensing member 421 is to protrude from the carrier plate 41. When the loading and unloading mechanism 30 places the material box 70 of the first size, the material box 70 abuts against the first sensing member 421 and drives the first sensing member 421 to move in the opposite direction of the first direction D1, so that the first sensing member 421 enters a pressed state and is flush with the carrier plate 41 (or slightly higher than the carrier plate 41). At this time, the first sensor 422 detects the movement of the first sensing member 421 and outputs corresponding sensing information to the controller assembly of the loading and unloading device 100, and the controller assembly outputs the size information of the material box 70 corresponding to the first size.

[0084] The second sensing assembly 43 includes a second sensing member 431 and a second sensor 432. The second sensing member 431 is disposed on a side of the carrier plate 41 away from the material box 70 and at least partially penetrates the carrier plate 41. The second sensing member 431 can move in the opposite direction of the first direction D1. The second sensor 432 is disposed on a side of the carrier plate 41 away from the material box 70. The second sensor 432 is arranged corresponding to the second sensing member 431, and the second sensor 432 is used to detect the position information of the second sensing member 431.

[0085] Specifically, in the present embodiment, the second sensing member 431 can move along the first direction D1 to protrude from the carrier plate 41 or be flush with the carrier plate 41. The initial state of the second sensing member 431 is to protrude from the carrier plate 41. When the loading and unloading mechanism 30 places the material box 70 of the second size, the material box 70 abuts against the second sensing member 431 and drives the second sensing member 431 to move in the opposite direction of the first direction D1, so that the second sensing member 431 enters a pressed state and is flush with the carrier plate 41 (or slightly higher than the carrier plate 41). At this time, the second sensor 432 detects the movement of the second sensing member 431 and outputs corresponding sensing information to the controller assembly of the loading and unloading device 100, and the controller assembly outputs the size information of the material box 70 corresponding to the second size.

[0086] The third sensing component 44 includes a third sensing element 441 and a third sensor 442. The third sensing element 441 is disposed on a side of the carrier plate 41 away from the material box 70 and at least partially penetrates the carrier plate 41. The third sensing element 441 is capable of moving in a direction opposite to the first direction D1. The third sensor 442 is disposed on a side of the carrier plate 41 away from the material box 70. The third sensor 442 is arranged corresponding to the third sensing element 441, and the third sensor 442 is used to detect the position information of the third sensing element 441.

[0087] Specifically, in this embodiment, the third sensing element 441 is capable of moving in the first direction D1 to protrude from the carrier plate 41 or be flush with the carrier plate 41. The initial state of the third sensing element 441 is to protrude from the carrier plate 41. When the carrier table mechanism 30 places the material box 70 of the third size, the material box 70 abuts against the third sensing element 441 and drives the third sensing element 441 to move in a direction opposite to the first direction D1, so that the third sensing element 441 enters a pressed state and is flush with the carrier plate 41 (or slightly higher than the carrier plate 41). At this time, the third sensor 442 detects the movement of the third sensing element 441 and outputs corresponding sensing information to the controller component of the loading and unloading device 100, and the controller component outputs the size information of the material box 70 of the third size.

[0088] It should be noted that taking the first sensing element 421 and the first sensor 422 as an example, in this embodiment, when the first sensing element 421 is in the initial state, the first sensor 422 emits a detection light beam to the first sensing element 421. When the first sensing element 421 moves, the first sensor 422 detects the movement of the first sensing element 421 and emits a corresponding sensing signal. In other embodiments, it may also be that when the first sensing element 421 is in the initial state, the detection light beam emitted by the first sensor 422 is spaced from the first sensing element 421. When the first sensing element 421 moves downward in a direction opposite to the first direction D1, the detection light beam emitted by the first sensor 422 shines on the first sensing element 421. The first sensor 422 detects the movement of the first sensing element 421 and emits a corresponding sensing signal. The present application does not limit this.

[0089] Please refer to Figures 1 to 11 , Figure 8 which is a schematic structural diagram of a first sensing component provided by an embodiment of the present application, Figure 9 which is a schematic structural diagram of a second sensing component provided by an embodiment of the present application, Figure 10 which is a schematic structural diagram of a third sensing component provided by an embodiment of the present application,Figure 11 It is a bottom schematic diagram of a cartridge induction module provided by an embodiment of the present application.

[0090] Further, in one embodiment, the first sensing member 421 includes a first sensing block 4211 and a first sensing sheet 4212. The first sensing block 4211 penetrates through the carrier plate 41. The first sensing sheet 4212 is disposed on a side of the carrier plate 41 away from the material box 70. The first sensing sheet 4212 includes a connected first fixing portion 4212a, a first sensing portion 4212b, and a first connecting portion 4212c. The first fixing portion 4212a connects to the carrier plate 41. The first sensing portion 4212b is bent relative to the first fixing portion 4212a. The first sensing portion 4212b is disposed corresponding to the first sensor 422. The first connecting portion 4212c connects to the first sensing block 4211.

[0091] Wherein, the first fixing portion 4212a is fixed on the carrier plate 41. The first connecting portion 4212c connects to the first sensing block 4211. The first connecting portion 4212c can move to be bent relative to the first fixing portion 4212a. In other words, the first sensing block 4211 can drive the first connecting portion 4212c to move in the opposite direction of the first direction D1, and further drive the first sensing portion 4212b to move in the opposite direction of the first direction D1, so that the first sensor 422 disposed corresponding to the first sensing portion 4212b detects the movement of the first sensing member 421 and emits a corresponding sensing signal.

[0092] Wherein, when the material box 70 of the first size is placed on the carrier table mechanism 30, the material box 70 abuts against the first sensing block 4211 and drives the first sensing block 4211 to move in the opposite direction of the first direction D1, so as to drive the first connecting portion 4212c and the first sensing portion 4212b to move downward in the opposite direction of the first direction D1; when the material box 70 of the first size is removed from the carrier table mechanism 30, the first connecting portion 4212c and the first sensing portion 4212b recover their deformation and drive the first sensing block 4211 to move upward in the first direction D1 and protrude from the carrier plate 41.

[0093] The second sensing member 431 includes a second sensing block 4311 and a second sensing sheet 4312. The second sensing block 4311 passes through the supporting plate 41. The second sensing sheet 4312 is arranged on the side of the supporting plate 41 away from the material box 70. The second sensing sheet 4312 includes a second fixed portion 4312a, a second sensing portion 4312b and a second connecting portion 4312c that are connected. The second fixed portion 4312a is connected to the supporting plate 41. The second sensing portion 4312b is bent relative to the second fixed portion 4312a. The second sensing portion 4312b is arranged corresponding to the second sensor 432. The second connecting portion 4312c is connected to the second sensing block 4311.

[0094] Among them, the second fixed portion 4312a is fixed on the supporting plate 41, the second connecting portion 4312c is connected to the second sensing block 4311, and the second connecting portion 4312c can be moved to bend relative to the second fixed portion 4312a. In other words, the second sensing block 4311 can drive the second connecting portion 4312c to move in the opposite direction of the first direction D1, and then drive the second sensing portion 4312b to move in the opposite direction of the first direction D1, so that the second sensor 432 corresponding to the second sensing portion 4312b detects the movement of the second sensing element 431 and sends a corresponding sensing signal.

[0095] Among them, when the material box 70 of the second size is placed on the supporting platform mechanism 30, the material box 70 abuts against the second sensing block 4311 and drives the second sensing block 4311 to move in the opposite direction of the first direction D1, so as to drive the second connecting part 4312c and the second sensing part 4312b to move downward in the opposite direction of the first direction D1; when the material box 70 of the second size moves out of the supporting platform mechanism 30, the second connecting part 4312c and the second sensing part 4312b recover their deformation and drive the second sensing block 4311 to move upward in the first direction D1 and protrude from the supporting plate 41.

[0096] The third sensing member 441 includes a third sensing block 4411 and a third sensing sheet 4412. The third sensing block 4411 passes through the supporting plate 41. The third sensing sheet 4412 is arranged on three sides of the supporting plate 41 away from the material box 70. The third sensing sheet 4412 includes a third fixed portion 4412a, a third sensing portion 4412b and a third connecting portion 4412c that are connected. The third fixed portion 4412a is connected to the supporting plate 41. The third sensing portion 4412b is bent relative to the third fixed portion 4412a. The third sensing portion 4412b is arranged corresponding to the third sensor 442. The third connecting portion 4412c is connected to the third sensing block 4411.

[0097] Among them, the third fixing part 4412a is fixed on the carrier plate 41, the third connecting part 4412c is connected to the third sensing block 4411, and the third connecting part 4412c can move to bend relative to the third fixing part 4412a. In other words, the third sensing block 4411 can drive the third connecting part 4412c to move in the opposite direction of the first direction D1, and further drive the third sensing part 4412b to move in the opposite direction of the first direction D1, so that the third sensor 442 corresponding to the third sensing part 4412b detects the movement of the third sensing part 441 and emits a corresponding sensing signal.

[0098] Among them, when the material box 70 of the third size is placed on the carrier table mechanism 30, the material box 70 abuts against the third sensing block 4411 and drives the third sensing block 4411 to move in the opposite direction of the first direction D1, so as to drive the third connecting part 4412c and the third sensing part 4412b to move downward in the opposite direction of the first direction D1; when the material box 70 of the third size is removed from the carrier table mechanism 30, the third connecting part 4412c and the third sensing part 4412b recover their deformation and drive the third sensing block 4411 to move upward in the first direction D1 and protrude from the carrier plate 41.

[0099] Furthermore, in this embodiment, the first sensing block 4211, the second sensing block 4311, and the third sensing block 4411 are arranged in sequence along the second direction D2, and the first sensing piece 4212, the second sensing piece 4312, and the third sensing piece 4412 are also arranged in sequence along the second direction D2.

[0100] Moreover, the extending directions of the first sensing piece 4212 and the second sensing piece 4312 are opposite, and the extending direction of the third sensing piece 4412 is perpendicular to the extending direction of the first sensing piece 4212. Specifically, the first connecting part 4212c, the second connecting part 4312c, and the third connecting part 4412c are arranged in sequence along the second direction D2, the first fixing part 4212a extends in the opposite direction of the third direction D3 relative to the first connecting part 4212c, the second fixing part 4312a extends along the third direction D3 relative to the second connecting part 4312c, and the third fixing part 4412a extends along the second direction D2 relative to the third connecting part 4412c. Among them, please refer to Figure 1 that the third direction D3 is the width direction of the loading and unloading device 100, and the third direction D3 is perpendicular to the second direction D2 and the first direction D1 respectively.

[0101] The first induction sheet 4212, the second induction sheet 4312, and the third induction sheet 4412 are arranged at intervals, and their extending directions are all different, so that the space area on the side of the carrier plate 41 facing away from the material box 70 can be reasonably utilized to avoid interference between the first induction sheet 4212, the second induction sheet 4312, and the third induction sheet 4412.

[0102] In one embodiment, the cartridge induction module 40 further includes a fourth induction component 47 and a fifth induction component 48. The fourth induction component 47 and the fifth induction component 48 are arranged at intervals, and the fourth induction component 47 is used to abut against the first side plate 71 of the material box 70, and the fifth induction component 48 is used to abut against the second side plate 72 of the material box 70. It should be noted that the fourth induction component 47 and the fifth induction component 48 can abut against and sense the material boxes 70 of different sizes. The fourth induction component 47 and the fifth induction component 48 can be used to improve the induction accuracy of the loading and unloading device 100 for the material box 70 and avoid problems such as induction errors of the first induction component 42, the second induction component 43, and the third induction component 44.

[0103] Optionally, the specific induction structures of the fourth induction component 47 and the fifth induction component 48 are similar to those of the first induction component 42, the second induction component 43, and the third induction component 44, and the present application does not limit this.

[0104] Further, in one embodiment, a strip-shaped protrusion 731 is provided on the bottom pull rod 73 of the material box 70, and the strip-shaped protrusion 731 is provided on the side of the bottom pull rod 73 facing away from the top connection panel 74.

[0105] Please refer to Figures 1 to 12 , Figure 12 which is a schematic structural diagram of a first limiting component provided by an embodiment of the present application.

[0106] Further, in one embodiment, the cartridge induction module 40 further includes a first limiting component 45 provided on the carrier plate 41.

[0107] Specifically, the first limiting component 45 includes a first limiting block 451, a second limiting block 452, a third limiting block 453, and a fourth limiting block 454 arranged in sequence along the second direction D2.

[0108] A first limiting gap is formed between the first limiting block 451 and the second limiting block 452. The first limiting gap is used to accommodate the bottom pull rod 73 of the material box 70 of the first size, and the first induction block 4211 is arranged in the first limiting gap.

[0109] Specifically, the strip-shaped protrusion 731 on the bottom pull rod 73 of the material box 70 of the first size is disposed in the first limit gap and abuts against the first induction block 4211. The first limit gap extends along the third direction D3, and the first limit block 451 and the second limit block 452 respectively abut against the strip-shaped protrusion 731 of the material box 70 of the first size to limit the movement of the strip-shaped protrusion 731 along the second direction D2, thereby limiting the movement of the material box 70 of the first size relative to the carrier mechanism 30 along the second direction D2.

[0110] A second limit gap is formed between the second limit block 452 and the third limit block 453. The second limit gap is used to receive the bottom pull rod 73 of the material box 70 of the second size, and the second induction block 4311 is disposed in the second limit gap.

[0111] Specifically, the strip-shaped protrusion 731 on the bottom pull rod 73 of the material box 70 of the second size is disposed in the second limit gap and abuts against the second induction block 4311. The second limit gap extends along the third direction D3, and the second limit block 452 and the third limit block 453 respectively abut against the strip-shaped protrusion 731 of the material box 70 of the second size to limit the movement of the strip-shaped protrusion 731 along the second direction D2, thereby limiting the movement of the material box 70 of the second size relative to the carrier mechanism 30 along the second direction D2.

[0112] A third limit gap is formed between the third limit block 453 and the fourth limit block 454. The third limit gap is used to receive the bottom pull rod 73 of the material box 70 of the third size, and the third induction block 4411 is disposed in the third limit gap.

[0113] Specifically, the strip-shaped protrusion 731 on the bottom pull rod 73 of the material box 70 of the third size is disposed in the third limit gap and abuts against the third induction block 4411. The third limit gap extends along the third direction D3, and the third limit block 453 and the fourth limit block 454 respectively abut against the strip-shaped protrusion 731 of the material box 70 of the third size to limit the movement of the strip-shaped protrusion 731 along the second direction D2, thereby limiting the movement of the material box 70 of the third size relative to the carrier mechanism 30 along the second direction D2.

[0114] Please refer to Figures 1 to 13 , Figure 13 which is a schematic structural diagram of a second limit component provided by an embodiment of the present application.

[0115] In one embodiment, the cartridge sensing module 40 further includes a second limiting component 46 disposed on the carrier plate 41. The second limiting component 46 and the first limiting component 45 are spaced apart. The material cartridge 70 includes a first side plate 71 and a second side plate 72 disposed opposite to each other. The first side plate 71 and the second side plate 72 are respectively connected to two ends of the bottom draw bar 73.

[0116] Further, the second limiting component 46 includes a first limiting plate 461 and a second limiting plate 462. The first limiting plate 461 and the second limiting plate 462 are spaced apart along the second direction D2. The first limiting plate 461 and the second limiting plate 462 abut against the material cartridge 70 to limit the movement of the material cartridge 70 along the second direction D2 and the third direction D3.

[0117] Specifically, the first limiting plate 461 includes a first limiting groove (not shown), a second limiting groove 4611, and a third limiting groove 4612. The second limiting plate 462 includes a fourth limiting groove (not shown), a fifth limiting groove 4621, and a sixth limiting groove 4622. The first limiting groove, the second limiting groove 4611, and the third limiting groove 4612 are sequentially disposed on a side of the first limiting plate 461 facing away from the second limiting plate 462 along the third direction D3. The fourth limiting groove, the fifth limiting groove 4621, and the sixth limiting groove 4622 are sequentially disposed on a side of the second limiting plate 462 facing away from the first limiting plate 461 along the third direction D3.

[0118] The first limiting groove and the fourth limiting groove are used to abut against and limit the first side plate 71 and the second side plate 72 of the material cartridge 70 of the first size. The first limiting groove and the fourth limiting groove are right-angled grooves, and the first limiting groove and the fourth limiting groove are used to limit the movement of the material cartridge 70 of the first size along the second direction D2 and the third direction D3.

[0119] The second limiting groove 4611 and the fifth limiting groove 4621 are used to abut against and limit the first side plate 71 and the second side plate 72 of the material cartridge 70 of the second size.

[0120] The second limiting groove 4611 and the fifth limiting groove 4621 are used to abut against and limit the first side plate 71 and the second side plate 72 of the material cartridge 70 of the second size. The second limiting groove 4611 and the fifth limiting groove 4621 are right-angled grooves, and the second limiting groove 4611 and the fifth limiting groove 4621 are used to limit the movement of the material cartridge 70 of the second size along the second direction D2 and the third direction D3.

[0121] The third limiting groove 4612 and the sixth limiting groove 4622 are used to abut against and limit the first side plate 71 and the second side plate 72 of the material box 70 with the third dimension.

[0122] The third limiting groove 4612 and the sixth limiting groove 4622 are used to abut against and limit the first side plate 71 and the second side plate 72 of the material box 70 with the third dimension. The third limiting groove 4612 and the sixth limiting groove 4622 are right-angled grooves, and the third limiting groove 4612 and the sixth limiting groove 4622 are used to limit the movement of the material box 70 with the third dimension along the second direction D2 and the third direction D3.

[0123] Please refer to Figures 1 to 14 , Figure 14 which is a schematic structural diagram of a carrier mechanism provided by an embodiment of the present application.

[0124] In one embodiment, the carrier mechanism 30 further includes a material box clamping module 50. The material box clamping module 50 includes a mounting plate 51, a second guide rail assembly 52, a first clamping assembly 53, and a second clamping assembly 54. The second guide rail assembly 52 is disposed on the mounting plate 51 along the third direction D3. The first clamping assembly 53 and the second clamping assembly 54 at least partially penetrate the carrier plate 41. The first clamping assembly 53 and the second clamping assembly 54 are slidably connected to the second guide rail assembly 52 along the third direction D3. The first clamping assembly 53 and the second clamping assembly 54 can move in opposite directions and abut against the first side plate 71 and the second side plate 72 of the material box 70 to clamp the material box 70. The third direction D3 is perpendicular to the second direction D2 and the first direction D1 respectively.

[0125] Specifically, in this embodiment, after the material box 70 is placed on the carrier structure, the first clamping assembly 53 can move along the third direction D3 and abut against the first side plate 71 of the material box 70, applying a thrust along the third direction D3 to the first side plate 71 of the material box 70. The second clamping assembly 54 can move in the opposite direction of the third direction D3 and abut against the second side plate 72 of the material box 70, applying a thrust along the third direction D3 to the second side plate 72 of the material box 70. The first clamping assembly 53 and the second clamping assembly 54 cooperate to clamp the material box 70 on the carrier mechanism 30.

[0126] Further, in one embodiment, the cartridge clamping module 50 includes a retracted state and a clamping state. Specifically, when the cartridge clamping module 50 is in the retracted state, the first clamping assembly 53 and the second clamping assembly 54 move in a direction approaching each other. In other words, the first clamping assembly 53 moves in the opposite direction of the third direction D3, the second clamping assembly 54 moves in the third direction D3, and the first clamping assembly 53 and the second clamping assembly 54 approach each other. When the cartridge clamping module 50 is in the clamping state, the first clamping assembly 53 and the second clamping assembly 54 move in a direction away from each other. In other words, the first clamping assembly 53 moves in the third direction D3, the second clamping assembly 54 moves in the opposite direction of the third direction D3, and the first clamping assembly 53 and the second clamping assembly 54 move away from each other and respectively abut against the first side plate 71 and the second side plate 72 of the material cartridge 70.

[0127] Please refer to Figures 1 to 15 , Figure 15 which is a schematic structural diagram of a cartridge clamping module provided by an embodiment of the present application.

[0128] Further, in one embodiment, the cartridge clamping module 50 further includes a driving assembly 55. The driving assembly 55 includes a driving member 551 and a conveyor belt 552. The conveyor belt 552 includes a connected first conveying portion and a second conveying portion. The first conveying portion and the second conveying portion are relatively spaced apart and move in opposite directions. The first clamping assembly 53 is connected to the first conveying portion, the second clamping assembly 54 is connected to the second conveying portion, and the driving member 551 is connected to the first clamping assembly 53 and is used to drive the first clamping assembly 53 to move in the third direction D3 and drive the second clamping assembly 54 to move in the opposite direction of the third direction D3 through the conveyor belt 552.

[0129] Specifically, in this embodiment, the driving member 551 is a driving cylinder, and the driving member 551 is used to drive the first clamping assembly 53 to move in the third direction D3 and its opposite direction.

[0130] Specifically, when the cartridge clamping module 50 is in the retracted state, the driving member 551 drives the first clamping assembly 53 to move in the opposite direction of the third direction D3, and further drives the first conveying portion to move in the opposite direction of the third direction D3. The second conveying portion is connected to the first conveying portion and moves in the opposite direction. The second conveying portion synchronously moves in the third direction D3, and further drives the second clamping assembly 54 to move in the third direction D3, so that the first clamping assembly 53 and the second clamping assembly 54 approach each other.

[0131] Specifically, when the cartridge clamping module 50 is in the clamping state, the driving member 551 drives the first clamping assembly 53 to move along the third direction D3, and then drives the first conveying portion to move along the third direction D3. The second conveying portion is connected to the first conveying portion and moves in the opposite direction. The second conveying portion synchronously moves in the opposite direction of the third direction D3, and then drives the second clamping assembly 54 to move in the opposite direction of the third direction D3, so that the first clamping assembly 53 and the second clamping assembly 54 move away from each other, and further enables the first clamping assembly 53 and the second clamping assembly 54 to respectively abut against the first side plate 71 and the second side plate 72 of the cartridge 70, so as to clamp the cartridge 70 on the carrier mechanism 30.

[0132] Further, in an embodiment, the second guide rail assembly 52 includes a linear guide rail, a first slider and a second slider. The linear guide rail extends along the third direction D3. The first slider and the second slider are disposed on the linear guide rail and are slidably connected to the linear guide rail along the third direction D3.

[0133] Wherein, the first clamping assembly 53 is disposed on the first slider. Specifically, the first clamping assembly 53 includes a first clamping block and a first connecting member. The first connecting member is fixed on the first slider, the first clamping block is fixed on the first connecting member. The first clamping block is provided with a plurality of waist-shaped holes, and the first connecting member is provided with threaded holes. The first clamping block and the first connecting member are fixed by the waist-shaped holes, screws and the first connecting member. The waist-shaped holes extend along the third direction D3, and the first clamping block can be finely adjusted relative to the first connecting member along the third direction D3 and its opposite direction through the waist-shaped holes, so that the first clamping block can effectively abut against the first side plate 71 of the cartridge 70.

[0134] Wherein, the second clamping assembly 54 is disposed on the second slider. Specifically, the second clamping assembly 54 includes a second clamping block and a second connecting member. The second connecting member is fixed on the second slider, the second clamping block is fixed on the second connecting member. The second clamping block is provided with a plurality of waist-shaped holes, and the second connecting member is provided with threaded holes. The second clamping block and the second connecting member are fixed by the waist-shaped holes, screws and the second connecting member. The waist-shaped holes extend along the third direction D3, and the second clamping block can be finely adjusted relative to the second connecting member along the third direction D3 and its opposite direction through the waist-shaped holes, so that the second clamping block can effectively abut against the second side plate 72 of the cartridge 70.

[0135] It should be noted that in this embodiment, when the first clamping assembly 53 and the second clamping assembly 54 move in a direction away from each other until they abut against the first side plate 71 and the second side plate 72 of the material box 70, the driving member 551 continues to apply a force in the third direction D3 to the first clamping assembly 53, so that the first clamping assembly 53 and the second clamping assembly 54 can clamp the material box 70.

[0136] Optionally, in this embodiment, the driving member 551 is connected to the first slider, and then connected to the first clamping assembly 53 through the first slider. In other embodiments, the driving member 551 may also be directly connected to the first clamping block or the first connecting member of the first clamping assembly 53, or the driving member 551 may also be connected to the second slider or the second clamping assembly 54. The present application does not limit this.

[0137] In one embodiment, the first clamping assembly 53 further includes a detection piece 533, and the detection piece 533 is fixedly connected to the first connecting member. The material box clamping module 50 further includes a detection component, and the detection component includes a mounting slide rail 561, a first detector 562 and a second detector 563. The first detector 562 and the second detector 563 are fixed on the mounting slide rail 561, and the first detector 562 and the second detector 563 are arranged at intervals. The first detector 562 and the second detector 563 are used to detect the detection piece 533 of the first clamping assembly 53.

[0138] In this embodiment, when the detection piece 533 of the first clamping assembly 53 corresponds to the first detector 562, the distance between the first clamping assembly 53 and the second clamping assembly 54 is relatively close, and the first clamping assembly 53 and the second clamping assembly 54 do not clamp the material box 70; when the detection piece 533 of the first clamping assembly 53 corresponds to the second detector 563, the distance between the first clamping assembly 53 and the second clamping assembly 54 is relatively far, and the first clamping assembly 53 and the second clamping assembly 54 can clamp the material box 70.

[0139] It should be noted that in this embodiment, the first detector 562 and the second detector 563 are slidably connected to the mounting slide rail 561, and the positions of the first detector 562 and the second detector 563 can be adjusted through the mounting slide rail 561 to ensure that the first detector 562 and the second detector 563 can be arranged corresponding to the detection piece 533, and improve the detection accuracy of the first clamping assembly 53 and the second clamping assembly 54.

[0140] Please refer toFigures 1 to 16 , Figure 16 is a schematic structural diagram of a recycling component provided by an embodiment of the present application.

[0141] In one embodiment, the material module 20 further includes a recycling component 60, the recycling component 60 is disposed on the carrier 83, and the carrier table mechanism 30 is disposed on the recycling component 60.

[0142] The recycling component 60 includes a recycling substrate 61 and a recycling moving member 62. The recycling substrate 61 is fixed to the carrier 83. A recycling guide rail 63 is provided on the recycling substrate 61. The recycling moving member 62 is slidably connected to the recycling guide rail 63 and can move along the second direction D2. A first positioning block 64 and a second positioning block 65 are relatively spaced apart on the recycling moving member 62. The first positioning block 64 and the second positioning block 65 enclose a recycling space for placing the sample to be tested.

[0143] The first positioning block 64 is provided with a first step surface (not shown), a second step surface 642, and a third step surface 643 along the first direction D1. The second positioning block 65 is provided with a fourth step surface (not shown), a fifth step surface 652, and a sixth step surface 653 along the first direction D1. The first step surface and the fourth step surface are used to abut against and limit the sample to be tested received in the material box 70 of the first size. The second step surface 642 and the fifth step surface 652 are used to abut against and limit the sample to be tested received in the material box 70 of the second size. The third step surface 643 and the sixth step surface 653 are used to abut against and limit the sample to be tested received in the material box 70 of the third size.

[0144] Specifically, the recycling moving member 62 includes a door plate 621 and a support plate 622 connected to each other. The door plate 621 and the support plate 622 are vertically connected. Among them, the door plate 621 is disposed on the side of the support plate 622 away from the manipulator mechanism 91, and the door plate 621 is used for the user to pull out and take out the sample to be tested in the recycling component 60. The support plate 622 is used for slidably connecting to the recycling guide rail 63 and for setting the first positioning block 64 and the second positioning block 65.

[0145] Further, the recycling component 60 further includes a photoelectric sensor, which is disposed between the first positioning block 64 and the second positioning block 65 and on the side of the first positioning hole and the second positioning hole close to the door panel 621. The photoelectric sensor is electrically connected to the controller component. The photoelectric sensor is configured to detect the sample to be tested and send the detection signal to the controller component. The controller component is configured to notify the user whether the sample to be tested is placed in the recycling component 60 according to the detection signal, facilitating the user to control the loading and unloading device 100.

[0146] Among them, it should be noted that the recycling component 60 is used to place the unqualified sample to be tested. Specifically, for example, in this embodiment, the loading and unloading device 100 further includes an angle adjustment mechanism 92. The angle adjustment mechanism 92, the recycling component 60, and the carrier table mechanism 30 are sequentially arranged along the first direction D1. The controller component is configured to control the manipulator mechanism 91 to extend along the second direction D2 in the first time period, so that the fork arm of the manipulator mechanism 91 adsorbs and takes out the sample to be tested in the material box 70; the controller component is configured to control the fork arm of the manipulator mechanism 91 to retract along the opposite direction of the second direction D2 in the second time period, and transport the sample to be tested back to the first position; the controller component is configured to control the manipulator mechanism 91 to lift and drive the fork arm to lift in the third time period, so that the fork arm corresponds to the angle adjustment mechanism 92; the controller component is configured to control the fork arm of the manipulator mechanism 91 to extend along the second direction D2 in the fourth time period, so as to place the sample to be tested on the fork arm on the angle adjustment mechanism 92 for preliminary detection. If the sample to be tested is preliminarily detected as unqualified, the manipulator mechanism 91 transports the sample to be tested on the angle adjustment mechanism 92 into the recycling component 60 for the user to take out and recycle. If the sample to be tested is preliminarily detected as qualified, the manipulator mechanism 91 transports the sample to be tested on the angle adjustment mechanism 92 to the probe table for the next performance test.

[0147] Further, in this embodiment, the recycling moving part 62 is disposed on the recycling substrate 61 and is spaced from the recycling substrate 61. The recycling substrate 61 is provided with a seventh step surface, an eighth step surface 612, and a ninth step surface 613. The seventh step surface is used to abut against and limit the sample to be tested received in the material box 70 of the first size. The eighth step surface 612 is used to abut against and limit the sample to be tested received in the material box 70 of the second size. The ninth step surface 613 is used to abut against and limit the sample to be tested received in the material box 70 of the third size.

[0148] Both the recycling moving part 62 and the recycling substrate 61 can place the unqualified samples to be tested, which can increase the storage capacity of the unqualified samples to be tested, facilitate reducing the number of times the operator takes out the samples to be tested in the recycling component 60, and improve the transportation and detection efficiency of the loading and unloading device 100 for the wafers to be tested.

[0149] Please refer to Figures 1 to 16 , this application also provides a wafer detection system, which includes an overhead crane device, a transfer device and the loading and unloading device 100. The overhead crane device is used to transport the material box 70, and the transfer device is used to place the material box 70 on the carrier mechanism 30.

[0150] In the wafer detection system provided by this application, an opening 11 is provided at the top of the frame mechanism 10. The material module 20 is correspondingly arranged with respect to the opening 11. The material module 20 includes the carrier mechanism 30 and the material box 70. The material box 70 is arranged on the carrier mechanism 30. The material box 70 is used to place the samples to be tested. The lifting mechanism 80 is correspondingly arranged with respect to the opening 11. The lifting mechanism 80 includes the lifting bottom plate 81, the lifting guide rail assembly 82 and the carrier 83. The lifting bottom plate 81 is arranged on the frame mechanism 10. The lifting guide rail assembly 82 is arranged on the lifting bottom plate 81 and extends along the first direction D1. The carrier 83 is slidably connected to the lifting guide rail assembly 82 along the first direction D1. The carrier 83 carries the material module 20. The carrier 83 can drive the material module 20 to move along the first direction D1, and then drive the material box 70 to move along the first direction D1 to be exposed relative to the opening 11. The lifting mechanism 80 can drive the carrier mechanism 30 to move to expose the opening 11 at the top of the frame mechanism 10, so that the transfer device can take out the material box 70 of the carrier mechanism 30 to the overhead crane device or place the material box 70 of the overhead crane device on the carrier mechanism 30. In the wafer detection system of this application, the loading and unloading device 100 can directly connect to the overhead crane device through the transfer device, without the operator manually taking out or placing the material box 70, reducing the manual operation steps of the wafer detection system, improving the automation performance of the wafer detection system, and further improving the transportation efficiency and detection efficiency of the wafer detection system.

[0151] As used in this application, the terms "embodiment" and "implementation" mean that the specific features, structures, or characteristics described in connection with the embodiments may be included in at least one embodiment of this application. The phrase appearing at various positions in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described in this application may be combined with other embodiments. In addition, it should also be understood that the features, structures, or characteristics described in each embodiment of this application can be arbitrarily combined with each other without contradiction to form another embodiment that does not depart from the spirit and scope of the technical solution of this application.

[0152] The above are some implementation manners of this application. It should be noted that for those of ordinary skill in the art, without departing from the principle of this application, several improvements and refinements can be made, and these improvements and refinements are also regarded as the protection scope of this application.

Claims

1. A loading and unloading device, characterized in that, Comprising: A frame mechanism, with an opening provided at the top of the frame mechanism; A material module, the material module is arranged corresponding to the opening. The material module includes a carrier table mechanism and a material box. The material box is arranged on the carrier table mechanism, and the material box is used for placing the sample to be tested; A lifting mechanism, the lifting mechanism is arranged corresponding to the opening. The lifting mechanism includes a lifting bottom plate, a lifting guide rail assembly and a carrier. The lifting bottom plate is arranged on the frame mechanism, the lifting guide rail assembly is arranged on the lifting bottom plate and extends along a first direction. The carrier is slidably connected to the lifting guide rail assembly along the first direction. The carrier carries the material module, and the carrier can drive the material module to move along the first direction, thereby driving the material box to move along the first direction to be exposed relative to the opening; The carrier table mechanism includes a cartridge induction module. The cartridge induction module includes a carrier plate, a first induction component, a second induction component and a third induction component. The carrier plate is used for carrying the material box. The first induction component, the second induction component and the third induction component are sequentially arranged on the carrier plate along a second direction. The first induction component is used to abut against and sense the material box of the first size. The second induction component is used to abut against and sense the material box of the second size. The third induction component is used to abut against and sense the material box of the third size. Wherein, the second direction is perpendicular to the first direction, the first size is smaller than the second size, and the second size is smaller than the third size; The first induction component includes a first induction element and a first sensor. The first induction element includes a first induction block and a first induction sheet. The first induction block penetrates through the carrier plate; the second induction component includes a second induction element and a second sensor. The second induction element includes a second induction block and a second induction sheet. The second induction block penetrates through the carrier plate; the third induction component includes a third induction element and a third sensor. The third induction element includes a third induction block and a third induction sheet. The third induction block penetrates through the carrier plate; The cartridge induction module further includes a first limiting component arranged on the carrier plate. The material box includes a bottom pull rod; the first limiting component includes a first limiting block, a second limiting block, a third limiting block and a fourth limiting block arranged in sequence along the second direction; a first limiting gap is formed between the first limiting block and the second limiting block. The first limiting gap is used to accommodate the bottom pull rod of the material box of the first size, and the first induction block is arranged in the first limiting gap; a second limiting gap is formed between the second limiting block and the third limiting block. The second limiting gap is used to accommodate the bottom pull rod of the material box of the second size, and the second induction block is arranged in the second limiting gap; a third limiting gap is formed between the third limiting block and the fourth limiting block. The third limiting gap is used to accommodate the bottom pull rod of the material box of the third size, and the third induction block is arranged in the third limiting gap.

2. The loading and unloading device according to claim 1, wherein The first sensing member is disposed on a side of the carrying plate away from the material box and at least partially penetrates the carrying plate, the first sensing member can move in a direction opposite to the first direction, the first sensor is disposed on a side of the carrying plate away from the material box, the first sensor is disposed corresponding to the first sensing member, and the first sensor is used to detect position information of the first sensing member; The second sensing member is disposed on a side of the carrying plate away from the material box and at least partially penetrates the carrying plate, the second sensing member can move in a direction opposite to the first direction, the second sensor is disposed on a side of the carrying plate away from the material box, the second sensor is disposed corresponding to the second sensing member, and the second sensor is used to detect position information of the second sensing member; The third sensing member is arranged on a side of the carrying plate away from the material box and at least partially penetrates the carrying plate. The third sensing member can move in the opposite direction of the first direction. The third sensor is arranged on a side of the carrying plate away from the material box. The third sensor is arranged corresponding to the third sensing member, and the third sensor is used to detect position information of the third sensing member.

3. The loading and unloading device according to claim 2, wherein The first sensing sheet is arranged on a side of the carrying plate away from the material box, the first sensing sheet comprises a first fixing portion, a first sensing portion and a first connecting portion which are connected to each other, the first fixing portion is connected to the carrying plate, the first sensing portion is bent relative to the first fixing portion, the first sensing portion is arranged corresponding to the first sensor, and the first connecting portion is connected to the first sensing block; The second sensing sheet is arranged on a side of the carrying plate away from the material box, the second sensing sheet comprises a second fixed portion, a second sensing portion and a second connecting portion which are connected to each other, the second fixed portion is connected to the carrying plate, the second sensing portion is bent relative to the second fixed portion, the second sensing portion is arranged corresponding to the second sensor, and the second connecting portion is connected to the second sensing block; The third sensing sheet is arranged on three sides of the carrying plate away from the material box, and the third sensing sheet includes a third fixed portion, a third sensing portion and a third connecting portion that are connected to each other. The third fixed portion is connected to the carrying plate, and the third sensing portion is bent relative to the third fixed portion. The third sensing portion is arranged corresponding to the third sensor, and the third connecting portion is connected to the third sensing block.

4. The loading and unloading device according to claim 3, characterized in that The material box sensing module further includes a second limit assembly disposed on the carrying plate, the second limit assembly and the first limit assembly are spaced apart, the material box includes a first side plate and a second side plate disposed opposite to each other, the first side plate and the second side plate are respectively connected to two ends of the bottom pull rod; The second limiting component includes a first limiting plate and a second limiting plate. The first limiting plate includes a first limiting groove, a second limiting groove, and a third limiting groove. The second limiting plate includes a fourth limiting groove, a fifth limiting groove, and a sixth limiting groove. The first limiting groove and the fourth limiting groove are used to abut against and limit the first side plate and the second side plate of the material box with the first size. The second limiting groove and the fifth limiting groove are used to abut against and limit the first side plate and the second side plate of the material box with the second size. The third limiting groove and the sixth limiting groove are used to abut against and limit the first side plate and the second side plate of the material box with the third size.

5. The loading and unloading device according to claim 4, wherein, The carrier table mechanism further includes a material box clamping module. The material box clamping module includes a mounting plate, a second guide rail assembly, a first clamping assembly, and a second clamping assembly. The second guide rail assembly is arranged on the mounting plate along the third direction. The first clamping assembly and the second clamping assembly at least partially penetrate the carrier plate. The first clamping assembly and the second clamping assembly are slidably connected to the second guide rail assembly along the third direction. The first clamping assembly and the second clamping assembly can move in opposite directions and abut against the first side plate and the second side plate of the material box to clamp the material box. The third direction is perpendicular to the second direction and the first direction respectively.

6. The loading and unloading device according to claim 5, wherein The material box clamping module further includes a driving component. The driving component includes a driving member and a conveyor belt. The conveyor belt includes a connected first conveying part and a second conveying part. The first conveying part and the second conveying part are relatively spaced apart and move in opposite directions. The first clamping assembly is connected to the first conveying part. The second clamping assembly is connected to the second conveying part. The driving member is connected to the first clamping assembly and is used to drive the first clamping assembly to move along the third direction, and drive the second clamping assembly to move in the opposite direction of the third direction through the conveyor belt.

7. The loading and unloading device according to claim 2, characterized in that The material module further includes a recycling component. The recycling component is arranged on the carrier. The carrier table mechanism is arranged on the recycling component. The recycling component includes a recycling base plate and a recycling moving member. The recycling base plate is fixed on the carrier. A recycling guide rail is arranged on the recycling base plate. The recycling moving member is slidably connected to the recycling guide rail and can move along the second direction. Relatively spaced first positioning block and second positioning block are arranged on the recycling moving member. The first positioning block and the second positioning block enclose a recycling space for placing the sample to be tested.

8. A wafer inspection system, characterized in that, It includes an overhead crane device, a transfer device, and the loading and unloading device according to any one of claims 1-7. The overhead crane device is used to transport the material box. The transfer device is used to place the material box on the carrier table mechanism.

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