Radio frequency power supply device and radio frequency power supply system

Abstract

The invention provides a radio frequency power supply device and a radio frequency power supply system, the radio frequency power supply device comprises a radio frequency source, a gating unit and an analog impedance unit, the radio frequency source is used for outputting initial radio frequency electric energy, and the analog impedance unit has a first impedance value. The gating unit is selectively connected with the analog impedance unit and the load, the gating unit is used for being alternately connected with one of the analog impedance unit and the load at a preset period, and the preset period is larger than the period of the initial radio frequency electric energy. When the gating unit is connected with the analog impedance unit, an electric energy transmission path from the radio frequency source to the analog impedance unit is conducted, and the initial radio frequency electric energy is transmitted to the analog impedance unit, so that the electric energy of the initial radio frequency electric energy is consumed through the analog impedance unit; and when the gating unit is connected with the load, the electric energy transmission path from the radio frequency source to the load is conducted, and the initial radio frequency electric energy is transmitted to the load so as to supply energy to the load. According to the invention, the pulse-type radio frequency electric energy can be prevented from generating oscillation electric energy in the output process.

Description

Technical Field

[0001] This application relates to the field of radio frequency technology, and in particular, to a radio frequency power supply device and a radio frequency power supply system. Background Art

[0002] At present, with the development of radio frequency power supply technology, a pulsed radio frequency power supply has been proposed and widely used in various semiconductor devices. During the output process of pulsed radio frequency electrical energy, relatively large oscillating electrical energy may be generated in each low-level stage of the pulsed radio frequency electrical energy. The oscillating electrical energy comes from the discharge of electronic components such as capacitors and inductors in the radio frequency power supply device, thus affecting the output effect. Therefore, during the output process of pulsed radio frequency electrical energy, how to avoid the generation of oscillating electrical energy and thus improve the output effect has become a problem to be considered. Summary of the Invention

[0003] This application provides a radio frequency power supply device and a radio frequency power supply system, which can avoid the generation of oscillating electrical energy during the output process of pulsed radio frequency electrical energy.

[0004] In a first aspect, a radio frequency power supply device is provided. The radio frequency power supply device includes a radio frequency source, a gating unit, and an analog impedance unit. The radio frequency source is used to output initial radio frequency electrical energy, and the waveform of the initial radio frequency electrical energy is a sine wave. The analog impedance unit has a first impedance value. The gating unit is selectively connected to both the analog impedance unit and the load. The gating unit is configured to alternately connect to one of the analog impedance unit and the load at a preset period, where the preset period is greater than the period of the initial radio frequency electrical energy. When the gating unit is connected to the analog impedance unit, the power transmission path from the radio frequency source to the analog impedance unit is turned on, and the initial radio frequency electrical energy is transmitted to the analog impedance unit to consume the electrical energy of the initial radio frequency electrical energy through the analog impedance unit. When the gating unit is connected to the load, the power transmission path from the radio frequency source to the load is turned on, and the initial radio frequency electrical energy is transmitted to the load to supply power to the load.

[0005] In a possible implementation manner, the first impedance value of the analog impedance unit has a preset relationship with the impedance value of the load.

[0006] In a possible implementation manner, the radio frequency power supply device further includes an acquisition unit and a control unit. The acquisition unit is connected to the load, and the acquisition unit is configured to acquire the impedance value of the load. The control unit is connected to the analog impedance unit, and the control unit is configured to receive the impedance value of the load and control and adjust the first impedance value of the analog impedance unit according to the impedance value of the load, so that the first impedance value of the analog impedance unit has the preset relationship with the impedance value of the load, where the preset relationship includes that the first impedance value of the analog impedance unit is equal to the impedance value of the load.

[0007] In a possible implementation manner, the acquisition unit is further connected to the analog impedance unit, and the acquisition unit is further configured to acquire the voltage value of the analog impedance unit when the gating unit is connected to the load. The control unit is further connected to the gating unit, and the control unit is further configured to receive the voltage value of the analog impedance unit and control and adjust at least the preset period and / or the conduction duty ratio of the gating unit according to the voltage value of the analog impedance unit.

[0008] In a possible implementation manner, the analog impedance unit includes a first resistor, a first capacitor, and a first inductor, and the first resistor, the first capacitor, and the first inductor are all connected to the gating unit. Wherein, the first impedance value of the analog impedance unit is the impedance value presented by the first resistor, the first capacitor, and the first inductor as a whole, and the first resistor is an adjustable resistor, and the first capacitor is an adjustable capacitor, so that the first impedance value is adjustable.

[0009] In a possible implementation manner, the radio frequency power supply device further includes an adjustment unit, and the adjustment unit is connected to both the first resistor and the first capacitor. Wherein, the adjustment unit is configured to adjust the resistance value of the first resistor and the capacitance value of the first capacitor to adjust the first impedance value of the analog impedance unit.

[0010] In a possible implementation manner, the gating unit includes a first switch and a second switch. The first switch is connected between the radio frequency source and the analog impedance unit, and the second switch is connected between the radio frequency source and the load. Wherein, the first switch and the second switch conduct complementarily, so that the gating unit is alternately connected to one of the analog impedance unit and the load at the preset period.

[0011] In a possible implementation manner, the radio frequency power supply device further includes a coupling unit, and the coupling unit is connected between the radio frequency source and the gating unit. The coupling unit is configured to couple the initial radio frequency electric energy output by the radio frequency source to the gating unit.

[0012] In a possible implementation, the RF power supply device further includes an impedance matching unit, which is connected between the RF source and the gating unit. The impedance matching unit is used to perform impedance matching on the RF source, the analog impedance unit, and the load.

[0013] In a second aspect, a RF power supply system is further provided. The RF power supply system includes a RF power supply device. The RF power supply device includes a RF source, a gating unit, and an analog impedance unit. The RF source is used to output initial RF electrical energy, and the waveform of the initial RF electrical energy is a sine wave. The analog impedance unit has a first impedance value. The gating unit is selectively connected to both the analog impedance unit and the load. The gating unit is used to alternately connect to one of the analog impedance unit and the load at a preset period, where the preset period is greater than the period of the initial RF electrical energy. When the gating unit is connected to the analog impedance unit, the power transmission path from the RF source to the analog impedance unit is turned on, and the initial RF electrical energy is transmitted to the analog impedance unit to consume the electrical energy of the initial RF electrical energy through the analog impedance unit. When the gating unit is connected to the load, the power transmission path from the RF source to the load is turned on, and the initial RF electrical energy is transmitted to the load to supply power to the load.

[0014] In the RF power supply device and the RF power supply system of the present application, by setting the gating unit to alternately connect to one of the analog impedance unit and the load at a preset period, and since the preset period is greater than the period of the initial RF electrical energy, pulsed RF output to the load can be achieved. Then, in each high-level stage of the pulsed RF output, the initial RF electrical energy is transmitted to the load to supply power to the load. In each low-level stage of the pulsed RF output, the electrical energy of the initial RF electrical energy is consumed by the analog impedance unit and will not be transmitted to the load, thus avoiding the generation of oscillating electrical energy during the output of the pulsed RF electrical energy and improving the output effect. Description of the Drawings

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background art, the drawings required for use in the embodiments of the present application or the background art will be described below.

[0016] Figure 1 Schematic diagram of the RF power supply device in some embodiments of the present application.

[0017] Figure 2 Another schematic diagram of the RF power supply device in some embodiments of the present application.

[0018] Figure 3Another schematic diagram of the radio frequency power supply device in some embodiments of the present application.

[0019] Figure 4 Another schematic diagram of the radio frequency power supply device in some embodiments of the present application.

[0020] Figure 5 is Figure 1 A schematic diagram showing that the radio frequency power supply device further includes a coupling unit.

[0021] Figure 6 is Figure 1 A schematic diagram showing that the radio frequency power supply device further includes an impedance matching unit.

[0022] Figure 7 A schematic diagram of the radio frequency power supply system in some embodiments of the present application.

[0023] Explanation of reference numerals: 1, radio frequency power supply system; 10, radio frequency power supply device; 100, radio frequency source; RF1, initial radio frequency electrical energy; 200, gating unit; S1, first switch; S2, second switch; RF2, pulsed radio frequency electrical energy; 300, analog impedance unit; R1, first resistor; C1, first capacitor; L1, first inductor; 400, acquisition unit; ZL, impedance value; UR, voltage value; 500, control unit; 600, adjustment unit; 700, coupling unit; 800, impedance matching unit; RL, load; GND, ground. Detailed implementation manners

[0024] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0025] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "connected" and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0026] Hereinafter, the terms "first" and "second" are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the embodiments of the present application, unless otherwise specified, the meaning of "a plurality" is two or more.

[0027] In addition, the terms "comprise" and "have" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or server that comprises a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0028] Please refer to Figure 1 , Figure 1 which is a schematic diagram of a radio frequency power supply device in some embodiments of the present application. As Figure 1 shown, the present application provides a radio frequency power supply device 10, which includes a radio frequency source 100, a gating unit 200, and an analog impedance unit 300. The radio frequency source 100 is used to output initial radio frequency electrical energy RF1, and the waveform of the initial radio frequency electrical energy RF1 is a sine wave. The analog impedance unit 300 has a first impedance value. The gating unit 200 is selectively connected to both the analog impedance unit 300 and the load RL. The gating unit 200 is configured to alternately connect to one of the analog impedance unit 300 and the load RL at a preset period, where the preset period is greater than the period of the initial radio frequency electrical energy RF1. When the gating unit 200 is connected to the analog impedance unit 300, the power transmission path from the radio frequency source 100 to the analog impedance unit 300 is turned on, and the initial radio frequency electrical energy RF1 is transmitted to the analog impedance unit 300 to consume the electrical energy of the initial radio frequency electrical energy RF1 through the analog impedance unit 300. When the gating unit 200 is connected to the load RL, the power transmission path from the radio frequency source 100 to the load RL is turned on, and the initial radio frequency electrical energy RF1 is transmitted to the load RL to supply power to the load RL.

[0029] Thus, in the above radio frequency power supply device 10 of the present application, by setting the gating unit 200 to be alternately connected to one of the analog impedance unit 300 and the load RL at a preset period, and since the preset period is greater than the period of the initial radio frequency electrical energy RF1, it is possible to achieve a pulsed radio frequency output to the load RL. Then, in each high-level stage of the pulsed radio frequency output, the initial radio frequency electrical energy RF1 is transmitted to the load RL to supply energy to the load RL. And in each low-level stage of the pulsed radio frequency output, the electrical energy of the initial radio frequency electrical energy RF1 is consumed by the analog impedance unit 300 and will not be transmitted to the load RL, thus avoiding the generation of oscillating electrical energy during the output of the pulsed radio frequency electrical energy and improving the output effect.

[0030] Specifically, as Figure 1 shown, the pulsed radio frequency electrical energy RF2 is the radio frequency electrical energy actually transmitted to the load RL, that is, the gating unit 200 is alternately connected to and disconnected from the load RL at a preset period, so that the radio frequency electrical energy transmitted to the load RL is the pulsed radio frequency electrical energy RF2 in a pulsed manner. Among them, the waveform of the pulsed radio frequency electrical energy RF2 in each high-level stage is the same as the waveform of the initial radio frequency electrical energy RF1, and the waveform in each low-level stage is a straight-line wave with an amplitude equal to zero.

[0031] Among them, the analog impedance unit 300 is used to consume the electrical energy of the initial radio frequency electrical energy RF1 when the gating unit 200 is connected to the analog impedance unit 300.

[0032] In some embodiments, the ratio of the preset period to the period of the initial radio frequency electrical energy RF1 is greater than a first ratio.

[0033] In some embodiments, the conduction duty cycle of the period when the gating unit 200 is connected to the load RL in the preset period can be set according to the needs of the load RL. For example, it can be set to 50%, 60%, etc.

[0034] Among them, the first impedance value of the analog impedance unit 300 has a preset relationship with the impedance value of the load RL.

[0035] Thus, in the above radio frequency power supply device 10 of the present application, to avoid conflicts between the analog impedance unit 300 and the load RL, especially conflicts between the first impedance value of the analog impedance unit 300 and the impedance value of the load RL resulting in a large reflected power and further more serious oscillating electrical energy, by configuring the first impedance value of the analog impedance unit 300 to have a preset relationship with the impedance value of the load RL, the reflected power generated due to the conflict between the analog impedance unit 300 and the load RL can be reduced.

[0036] Furthermore, the first impedance value of the analog impedance unit 300 changes with the change of the impedance value of the load RL.

[0037] Please refer toFigure 2 , Figure 2 is another schematic diagram of the radio frequency power supply device in some embodiments of the present application. As Figure 2 shown, the radio frequency power supply device 10 further includes an acquisition unit 400 and a control unit 500. The acquisition unit 400 is connected to the load RL, and the acquisition unit 400 is configured to acquire the impedance value ZL of the load RL. The control unit 500 is connected to the analog impedance unit 300, and the control unit 500 is configured to receive the impedance value ZL of the load RL and control and adjust the first impedance value of the analog impedance unit 300 according to the impedance value ZL of the load RL, so that the first impedance value of the analog impedance unit 300 has a preset relationship with the impedance value ZL of the load RL, wherein the preset relationship includes that the first impedance value of the analog impedance unit 300 is equal to the impedance value ZL of the load RL.

[0038] Thus, for the above radio frequency power supply device 10 in the present application, by configuring the acquisition unit 400 to acquire the impedance value ZL of the load RL, the control unit 500 can control and adjust the first impedance value of the analog impedance unit 300 according to the impedance value ZL of the load RL, so that the first impedance value of the analog impedance unit 300 has a preset relationship with the impedance value ZL of the load RL.

[0039] In some embodiments, the fact that the first impedance value of the analog impedance unit 300 has a preset relationship with the impedance value ZL of the load RL may include: the first impedance value of the analog impedance unit 300 is equal to the impedance value ZL of the load RL.

[0040] In some embodiments, the preset relationship may further include that the ratio of the first impedance value of the analog impedance unit 300 to the impedance value ZL of the load RL is a second ratio. The second ratio is calculated according to the conduction duty cycle of the connection between the gating unit 200 and the load RL.

[0041] As Figure 2 shown, the acquisition unit 400 is further connected to the analog impedance unit 300, and the acquisition unit 400 is further configured to acquire the voltage value UR of the analog impedance unit 300 when the gating unit 200 is connected to the load RL. The control unit 500 is further connected to the gating unit 200, and the control unit 500 is further configured to receive the voltage value UR of the analog impedance unit 300 and control and adjust at least the preset period and / or the conduction duty cycle of the gating unit 200 according to the voltage value UR of the analog impedance unit 300.

[0042] Therefore, for the above radio frequency power supply device 10 in the present application, the acquisition unit 400 is further configured to acquire the voltage value UR of the analog impedance unit 300 when the gating unit 200 is connected to the load RL. The control unit 500 can determine whether the analog impedance unit 300 can completely consume the electrical energy of the initial radio frequency electrical energy RF1 when the gating unit 200 is connected to the load RL, so as to determine how to control and adjust the preset period and / or conduction duty ratio of the gating unit 200.

[0043] Among them, the conduction duty ratio can be the ratio of the time when the gating unit 200 is connected to the load RL to the preset period.

[0044] In some embodiments, the control unit 500 is configured to, when the received voltage value UR of the analog impedance unit 300 is not zero, control to increase the preset period of the gating unit 200 and / or decrease the conduction duty ratio of the gating unit 200 connected to the load RL. Therefore, more time can be provided for the analog impedance unit 300 to completely consume the electrical energy of the initial radio frequency electrical energy RF1.

[0045] In some embodiments, the acquisition unit 400 may include a voltage sensor, an impedance sensor, etc.

[0046] In some embodiments, the control unit 500 may be a general-purpose processor such as a Central Processing Unit (CPU), or may be a logic control device such as a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), a Field-Programmable Gate Array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, etc., or may also be a microprocessor such as a Micro Control Unit (MCU).

[0047] Please refer to Figure 3 , Figure 3 which is another schematic diagram of the radio frequency power supply device in some embodiments of the present application. As Figure 3 shown, the analog impedance unit 300 includes a first resistor R1, a first capacitor C1, and a first inductor L1. The first resistor R1, the first capacitor C1, and the first inductor L1 are all connected to the gating unit 200. Among them, the first impedance value of the analog impedance unit 300 is the impedance value presented by the first resistor R1, the first capacitor C1, and the first inductor L1 as a whole, and the first resistor R1 is an adjustable resistor, and the first capacitor C1 is an adjustable capacitor, so that the first impedance value can be adjusted.

[0048] Thus, in the above-mentioned radio frequency power supply device 10 of the present application, by arranging the cooperation of the first resistor R1, the first capacitor C1 and the first inductor L1, and configuring the first resistor R1 as an adjustable resistor and the first capacitor C1 as an adjustable capacitor, the analog impedance unit 300 can achieve the power consumption of the initial radio frequency electrical energy RF1, and can also adjust the first impedance value according to the impedance value of the load RL.

[0049] As Figure 3 shown, the first resistor R1, the first capacitor C1 and the first inductor L1 can be sequentially connected between the gating unit 200 and the ground GND.

[0050] Among them, the analog impedance unit 300 is obtained according to the resistance of the first resistor R1, the capacitance value of the first capacitor C1 and the inductance value of the first inductor L1.

[0051] As Figure 3 shown, the radio frequency power supply device 10 further includes an adjustment unit 600, and the adjustment unit 600 is connected to both the first resistor R1 and the first capacitor C1. Among them, the adjustment unit 600 is used to adjust the resistance value of the first resistor R1 and the capacitance value of the first capacitor C1 to adjust the first impedance value of the analog impedance unit 300.

[0052] Thus, in the above-mentioned radio frequency power supply device 10 of the present application, by arranging the adjustment unit 600, the adjustment of the resistance value of the first resistor R1 and the capacitance value of the first capacitor C1 can be realized, and further the adjustment of the first impedance value of the analog impedance unit 300 can be realized.

[0053] In some embodiments, the adjustment unit 600 may include an adjustment motor.

[0054] In some embodiments, the control unit 500 may also be connected to the adjustment unit 600, and the control unit 500 is further used to control the adjustment unit 600 to adjust the resistance value of the first resistor R1 and / or the capacitance value of the first capacitor C1 to adjust the first impedance value of the analog impedance unit 300, so that the first impedance value of the analog impedance unit 300 has a preset relationship with the impedance value of the load RL.

[0055] Please refer to Figure 4 , Figure 4 which is another schematic diagram of the radio frequency power supply device in some embodiments of the present application. As Figure 4 shown, the gating unit 200 includes a first switch S1 and a second switch S2. The first switch S1 is connected between the radio frequency source 100 and the analog impedance unit 300, and the second switch S2 is connected between the radio frequency source 100 and the load RL. Among them, the first switch S1 and the second switch S2 conduct complementarily, so that the gating unit 200 is alternately connected to one of the analog impedance unit 300 and the load RL at a preset period.

[0056] Thus, in the above radio frequency power supply device 10 of the present application, by setting complementary channels of the first switch S1 and the second switch S2, the gating unit 200 can be enabled to alternately connect to one of the analog impedance unit 300 and the load RL at a preset period.

[0057] In some embodiments, the control unit 500 can also be connected to the first switch S1 and the second switch S2. The control unit 500 is further configured to control the on or off states of the first switch S1 and the second switch S2, so that the first switch S1 and the second switch S2 conduct complementarily.

[0058] In some embodiments, the gating unit 200 can also include a third switch. The third switch is a single-pole double-throw switch, and the third switch alternately connects to one of the analog impedance unit 300 and the load RL at a preset period.

[0059] Please refer to Figure 5 , Figure 5 For Figure 1 a schematic diagram of the radio frequency power supply device further including a coupling unit. As Figure 5 shown, the radio frequency power supply device 10 further includes a coupling unit 700. The coupling unit 700 is connected between the radio frequency source 100 and the gating unit 200, and the coupling unit 700 is configured to couple the initial radio frequency electrical energy RF1 output by the radio frequency source 100 to the gating unit 200.

[0060] Thus, in the above radio frequency power supply device 10 of the present application, since the initial radio frequency electrical energy RF1 is bidirectional alternating current electrical energy, by setting the coupling unit 700 to isolate the radio frequency source 100 from the load RL and the analog impedance unit 300 and couple the initial radio frequency electrical energy RF1 to the gating unit 200 through the coupling unit 700, the isolation effect is improved.

[0061] In some embodiments, the coupling unit 700 can include a first winding and a second winding that are magnetically coupled. The first winding is connected to the radio frequency source 100, and the second winding is connected to the gating unit 200.

[0062] Please refer to Figure 6 , Figure 6 For Figure 1 a schematic diagram of the radio frequency power supply device further including an impedance matching unit. As Figure 6 shown, the radio frequency power supply device 10 further includes an impedance matching unit 800. The impedance matching unit 800 is connected between the radio frequency source 100 and the gating unit 200, and the impedance matching unit 800 is configured to perform impedance matching on the radio frequency source 100, the analog impedance unit 300, and the load RL.

[0063] Thus, for the above-mentioned radio frequency power supply device 10 in the present application, since the radio frequency power supply device 10 further includes an analog impedance unit 300 having a first impedance value, the impedance matching unit 800 needs to perform impedance matching on the radio frequency source 100, the analog impedance unit 300, and the load RL to avoid generating a large amount of reflected power.

[0064] With the above structure, the radio frequency power supply device 10 of the present application can directly avoid the generation of oscillating electrical energy during the output of pulsed radio frequency electrical energy, improve the output effect, and avoid damage to the radio frequency power supply device 10.

[0065] Please refer to Figure 7 , Figure 7 which is a schematic diagram of a radio frequency power supply system in some embodiments of the present application. As Figure 7 shown, the present application further provides a radio frequency power supply system 1, and the radio frequency power supply system 1 includes the radio frequency power supply device 10 in any of the foregoing embodiments.

[0066] Please refer to Figure 1 . As Figure 1 shown, the radio frequency power supply device 10 includes a radio frequency source 100, a gating unit 200, and an analog impedance unit 300. The radio frequency source 100 is used to output initial radio frequency electrical energy RF1, and the waveform of the initial radio frequency electrical energy RF1 is a sine wave. The analog impedance unit 300 has a first impedance value. The gating unit 200 is selectively connected to both the analog impedance unit 300 and the load RL. The gating unit 200 is used to alternately connect to one of the analog impedance unit 300 and the load RL at a preset period, where the preset period is greater than the period of the initial radio frequency electrical energy RF1. When the gating unit 200 is connected to the analog impedance unit 300, the power transmission path from the radio frequency source 100 to the analog impedance unit 300 is turned on, and the initial radio frequency electrical energy RF1 is transmitted to the analog impedance unit 300 to consume the electrical energy of the initial radio frequency electrical energy RF1 through the analog impedance unit 300. When the gating unit 200 is connected to the load RL, the power transmission path from the radio frequency source 100 to the load RL is turned on, and the initial radio frequency electrical energy RF1 is transmitted to the load RL to supply power to the load RL.

[0067] Specifically, for the structure of the radio frequency power supply device 10, reference may be made to the relevant content of the radio frequency power supply device 10 in any of the foregoing embodiments, which will not be elaborated herein.

[0068] With the above structure, the radio frequency power supply device 10 and the radio frequency power supply system 1 of the present application can directly avoid the generation of oscillating electrical energy during the output of pulsed radio frequency electrical energy, improve the output effect, and avoid damage to the radio frequency power supply device 10.

[0069] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of changes or substitutions, which should all be covered within the protection scope of the present application; without conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A radio frequency power supply device, characterized in that: It includes a radio frequency source, a gating unit and a simulated impedance unit, wherein the radio frequency source is used to output initial radio frequency electric energy, the waveform of the initial radio frequency electric energy is a sine wave, and the simulated impedance unit has a first impedance value; The gating unit is selectively connected to the simulated impedance unit and the load, and the gating unit is used to alternately connect to one of the simulated impedance unit and the load at a preset period, wherein the preset period is greater than the period of the initial RF power; Wherein, when the gating unit is connected to the analog impedance unit, the power transmission path from the RF source to the analog impedance unit is turned on, and the initial RF power is transmitted to the analog impedance unit so as to consume the power of the initial RF power through the analog impedance unit; when the gating unit is connected to the load, the power transmission path from the RF source to the load is turned on, and the initial RF power is transmitted to the load so as to supply power to the load.

2. The radio frequency power supply device according to claim 1, characterized in that: The first impedance value of the simulated impedance unit has a preset relationship with the impedance value of the load.

3. The radio frequency power supply device according to claim 2, characterized in that: The radio frequency power supply device also includes an acquisition unit and a control unit; The acquisition unit is connected to the load, and is used to acquire the impedance value of the load; The control unit is connected to the analog impedance unit, and is used to receive the impedance value of the load and control and adjust the first impedance value of the analog impedance unit according to the impedance value of the load so that the first impedance value of the analog impedance unit and the impedance value of the load have the preset relationship, wherein the preset relationship includes that the first impedance value of the analog impedance unit is equal to the impedance value of the load.

4. The radio frequency power supply device according to claim 3, characterized in that: The acquisition unit is also connected to the analog impedance unit, and the acquisition unit is further used to acquire the voltage value of the analog impedance unit when the gating unit is connected to the load; The control unit is also connected to the gating unit, and is further used to receive the voltage value of the analog impedance unit, and control and adjust the preset period and / or conduction duty cycle of the gating unit at least according to the voltage value of the analog impedance unit.

5. The radio frequency power supply device according to claim 2, characterized in that: The analog impedance unit includes a first resistor, a first capacitor and a first inductor, and the first resistor, the first capacitor and the first inductor are all connected to the gating unit; The first impedance value of the simulated impedance unit is the impedance value presented by the first resistor, the first capacitor and the first inductor as a whole, and the first resistor is an adjustable resistor and the first capacitor is an adjustable capacitor, so that the first impedance value is adjustable.

6. The radio frequency power supply device according to claim 5, characterized in that: The RF power supply device further includes an adjustment unit, and the adjustment unit is connected to both the first resistor and the first capacitor; The adjusting unit is used to adjust the resistance value of the first resistor and the capacitance value of the first capacitor to adjust the first impedance value of the analog impedance unit.

7. The radio frequency power supply device according to claim 6, characterized in that: The gating unit includes a first switch and a second switch, the first switch is connected between the RF source and the analog impedance unit, and the second switch is connected between the RF source and the load; The first switch and the second switch are complementarily turned on, so that the gating unit is alternately connected to one of the analog impedance unit and the load at the preset period.

8. The radio frequency power supply device according to claim 1, characterized in that: The RF power supply device further includes a coupling unit, which is connected between the RF source and the gating unit, and is used to couple the initial RF power output by the RF source to the gating unit.

9. The radio frequency power supply device according to claim 1, characterized in that: The RF power supply device further includes an impedance matching unit, which is connected between the RF source and the gating unit, and is used for performing impedance matching on the RF source, the analog impedance unit and the load.

10. A radio frequency power supply system, characterized in that: Comprising a radio frequency power supply device as described in any one of claims 1 to 9.

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