Radio frequency power supply device and radio frequency power supply system

Abstract

The invention provides a radio frequency power supply device and a radio frequency power supply system, the radio frequency power supply device comprises a radio frequency source, a gating unit and N output ends, the radio frequency source is used for outputting initial radio frequency electric energy, and the N output ends are used for being connected with N loads in a one-to-one correspondence mode. The gating unit comprises N gating modules, and each gating module is used for selectively connecting or disconnecting an electric energy transmission path between the radio frequency source and the corresponding output end so as to correspondingly transmit or stop transmitting the initial radio frequency electric energy to the corresponding load. Wherein the N gating modules comprise at least two target gating modules, each target gating module periodically conducts an electric energy transmission path between the radio frequency source and the corresponding output end, and when any target gating module conducts the electric energy transmission path between the radio frequency source and the corresponding output end, the radio frequency source is switched on by the target gating module. And the other N-1 gating modules all disconnect the electric energy transmission path between the radio frequency source and the corresponding output end. According to the invention, pulse-type radio frequency electric energy can be output to a plurality of loads.

Description

Technical Field

[0001] This application relates to the field of radio frequency technology, and in particular, to a radio frequency power supply device and a radio frequency power supply system. Background Art

[0002] Currently, with the development of radio frequency power supply technology, a pulsed radio frequency power supply has been proposed and widely used in various semiconductor devices. During the output process of pulsed radio frequency electrical energy, the electrical energy in each low-level stage of the pulsed radio frequency electrical energy is not used for output, which greatly wastes electrical energy and reduces the utilization rate of electrical energy. Therefore, how to achieve the output of pulsed radio frequency electrical energy and improve the utilization rate of electrical energy has become an issue that needs to be considered. Summary of the Invention

[0003] This application provides a radio frequency power supply device and a radio frequency power supply system, which can output pulsed radio frequency electrical energy to multiple loads and improve the utilization rate of electrical energy.

[0004] In a first aspect, a radio frequency power supply device is provided. The radio frequency power supply device includes a radio frequency source, a gating unit, and N output terminals. The radio frequency source is configured to output initial radio frequency electrical energy, and the waveform of the initial radio frequency electrical energy is a sine wave. The N output terminals are used to be connected to N loads in one-to-one correspondence. The gating unit includes N gating modules. The N gating modules are all connected to the radio frequency source, and the N gating modules are connected to the N output terminals in one-to-one correspondence. Each gating module is configured to selectively conduct or disconnect the power transmission path between the radio frequency source and the corresponding output terminal, so as to correspondingly transmit or stop transmitting the initial radio frequency electrical energy to the corresponding load. Among them, the N gating modules include at least two target gating modules. Each target gating module periodically conducts the power transmission path between the radio frequency source and the corresponding output terminal, and when any one of the target gating modules conducts the power transmission path between the radio frequency source and the corresponding output terminal, the other N-1 gating modules disconnect the power transmission path between the radio frequency source and the corresponding output terminal, where N≥2.

[0005] In a possible implementation manner, the at least two target gating modules sequentially and cyclically conduct the power transmission path between the radio frequency source and the corresponding output terminal, and the start time of conduction of each target gating module is the end time of conduction of the previous target gating module, and the end time of conduction of each target gating module is the start time of conduction of the next target gating module. Among them, when the number of the target gating modules is not N, the N gating modules further include at least one non-target gating module, and each non-target gating module continuously disconnects the power transmission path between the radio frequency source and the corresponding output terminal.

[0006] In a possible implementation, each gating module includes a gating switch, and each gating switch is connected between the RF source and the corresponding output terminal. Among them, each gating switch is used to conduct or disconnect to correspondingly conduct or disconnect the power transmission path between the RF source and the corresponding output terminal.

[0007] In a possible implementation, the number of the target gating modules is m. When the gating switch of the m-th target gating module switches from the conducting state to the disconnecting state, the first target gating switch switches from the disconnecting state to the conducting state, so that the at least two target gating modules sequentially and cyclically conduct the power transmission path between the RF source and the corresponding output terminal, where m ≤ N.

[0008] In a possible implementation, the gating switches of each target gating module alternately conduct and disconnect at a preset period, and when the number of the target gating modules is not N, the gating switches of each non-target gating module continuously disconnect. Among them, the sum of the conduction duty ratios of the gating switches of each target gating module is less than or equal to 100%.

[0009] In a possible implementation, the conduction duty ratios of the gating switches of each target gating module are equal, so that the power values of the electric energy transmitted to the loads corresponding to each target gating module are equal.

[0010] In a possible implementation, the RF power supply device further includes a control unit, and the control unit is connected to the N gating modules. The control unit is used to control each gating module to conduct or disconnect the power transmission path between the RF source and the corresponding output terminal.

[0011] In a possible implementation, the control unit is further connected to the RF source, and the control unit is further used to control and adjust the power value of the initial RF electric energy according to the required power value and / or the required conduction duty ratio of each load, and / or control the corresponding target gating module to periodically conduct the power transmission path between the RF source and the corresponding output terminal, and when the number of the target gating modules is not N, control each non-target gating module to continuously disconnect the power transmission path between the RF source and the corresponding output terminal.

[0012] In a possible implementation, the RF power supply device further includes an impedance matching unit. The impedance matching unit is connected to the RF source and is also connected to the N output terminals. Among them, the impedance matching unit is used to perform impedance matching on the RF source and the loads corresponding to each target gating module.

[0013] Second aspect, a radio frequency power supply system is further provided. The radio frequency power supply system includes a radio frequency power supply device. The radio frequency power supply device includes a radio frequency source, a gating unit, and N output terminals. The radio frequency source is used to output initial radio frequency electrical energy, and the waveform of the initial radio frequency electrical energy is a sine wave. The N output terminals are used to be connected to N loads in one-to-one correspondence. The gating unit includes N gating modules. The N gating modules are all connected to the radio frequency source, and the N gating modules are connected to the N output terminals in one-to-one correspondence. Each gating module is used to selectively conduct or disconnect the power transmission path between the radio frequency source and the corresponding output terminal, so as to correspondingly transmit or stop transmitting the initial radio frequency electrical energy to the corresponding load. Wherein, the N gating modules include at least two target gating modules. Each target gating module periodically conducts the power transmission path between the radio frequency source and the corresponding output terminal, and when any one of the target gating modules conducts the power transmission path between the radio frequency source and the corresponding output terminal, the other N-1 gating modules all disconnect the power transmission path between the radio frequency source and the corresponding output terminal, N≥2.

[0014] In the radio frequency power supply device and the radio frequency power supply system of the present application, by setting N gating modules in one-to-one correspondence with N loads, and configuring each target gating module to periodically conduct the power transmission path between the radio frequency source and the corresponding output terminal, and when any one of the target gating modules conducts the power transmission path between the radio frequency source and the corresponding output terminal, the other N-1 gating modules all disconnect the power transmission path between the radio frequency source and the corresponding output terminal, it is possible to output pulsed radio frequency electrical energy to at least two loads corresponding to at least two target gating modules, improving the utilization rate of electrical energy. And, if the electrical energy in each low-level stage of the pulsed radio frequency electrical energy is not used for output, relatively large oscillating electrical energy may be generated. The oscillating electrical energy comes from the discharge of electronic components such as capacitors and inductors in the radio frequency power supply device. By improving the utilization rate of electrical energy, the oscillating electrical energy in the pulsed radio frequency electrical energy output to any load is also reduced, improving the output effect. Description of the Drawings

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background art, the following will describe the drawings required to be used in the embodiments of the present application or the background art.

[0016] Figure 1 It is a schematic diagram of a radio frequency power supply device in some embodiments of the present application.

[0017] Figure 2 It is another schematic diagram of a radio frequency power supply device in some embodiments of the present application.

[0018] Figure 3 It is yet another schematic diagram of a radio frequency power supply device in some embodiments of the present application.

[0019] Figure 4 Another schematic diagram of the radio frequency power supply device in some embodiments of the present application.

[0020] Figure 5 Schematic diagram of the radio frequency power supply system in some embodiments of the present application.

[0021] Explanation of reference numerals: 1. Radio frequency power supply system; 10. Radio frequency power supply device; 100. Radio frequency source; RF1. Initial radio frequency electrical energy; 200. Gating unit; 210. Gating module; 211. Target gating module; 212. Non-target gating module; S1. Gating switch; RF2. Pulse radio frequency electrical energy; 300. Output terminal; 400. Control unit; 500. Impedance matching unit; RL. Load. Detailed implementation manners

[0022] Next, the technical solutions in the embodiments of the present application will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0023] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly defined and limited, the terms "connected" and "connection" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0024] Hereinafter, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the embodiments of the present application, unless otherwise stated, the meaning of "a plurality" is two or more.

[0025] In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or server that includes a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0026] Please refer to Figure 1 , Figure 1Schematic diagram of a radio frequency power supply device in some embodiments of the present application. As Figure 1 shown, the present application provides a radio frequency power supply device 10, which includes a radio frequency source 100, a gating unit 200, and N output terminals 300. The radio frequency source 100 is used to output initial radio frequency electrical energy RF1, and the waveform of the initial radio frequency electrical energy RF1 is a sine wave. The N output terminals 300 are used to be connected to N loads RL in one-to-one correspondence. The gating unit 200 includes N gating modules 210. The N gating modules 210 are all connected to the radio frequency source 100, and the N gating modules 210 are connected to the N output terminals 300 in one-to-one correspondence. Each gating module 210 is used to selectively conduct or disconnect the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300, so as to correspondingly transmit or stop transmitting the initial radio frequency electrical energy RF1 to the corresponding load RL. Among them, the N gating modules 210 include at least two target gating modules 211. Each target gating module 211 periodically conducts the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300, and when any one of the target gating modules 211 conducts the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300, the other N-1 gating modules 210 disconnect the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300, N≥2.

[0027] Thus, in the above radio frequency power supply device 10 of the present application, by setting the N gating modules 210 in one-to-one correspondence with the N loads RL, and configuring each target gating module 211 to periodically conduct the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300, and when any one of the target gating modules 211 conducts the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300, the other N-1 gating modules 210 disconnect the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300, it is possible to output pulsed radio frequency electrical energy to at least two loads RL corresponding to at least two target gating modules 211, improving the utilization rate of electrical energy. And, if the electrical energy in each low-level stage of the pulsed radio frequency electrical energy is not used for output, relatively large oscillating electrical energy may be generated. The oscillating electrical energy comes from the discharge effect of electronic components such as capacitors and inductors in the radio frequency power supply device 10. By improving the utilization rate of electrical energy, the oscillating electrical energy in the pulsed radio frequency electrical energy output to any load RL is reduced, improving the output effect.

[0028] In some embodiments, at least two target gating modules 211 sequentially and cyclically conduct the power transmission path between the RF source 100 and the corresponding output terminal 300. The start time of conduction of each target gating module 211 is the end time of conduction of the previous target gating module 211, and the end time of conduction of each target gating module 211 is the start time of conduction of the next target gating module 211. Wherein, when the number of target gating modules 211 is not N, the N gating modules 210 further include at least one non-target gating module 212, and each non-target gating module 212 continuously disconnects the power transmission path between the RF source 100 and the corresponding output terminal 300.

[0029] Thus, in the above RF power supply device 10 of the present application, by configuring at least two target gating modules 211 to sequentially and cyclically conduct the power transmission path between the RF source 100 and the corresponding output terminal 300, the RF power transmitted to the load RL corresponding to any one of the target gating modules 211 can be pulsed RF power. The start time of conduction of each target gating module 211 is the end time of conduction of the previous target gating module 211, and the end time of conduction of each target gating module 211 is the start time of conduction of the next target gating module 211. The utilization rate of electric energy is very high. Therefore, the oscillating electric energy in the pulsed RF power output to any load RL is greatly reduced, and the output effect is improved.

[0030] Wherein, in the present application, it is assumed that the number of sequentially conducted target gating modules 211 is m, that is, the 1st to mth target gating modules 211. For the i-th target gating module 211, when i is not equal to 1 and m, the previous target gating module 211 of the i-th target gating module 211 is the (i - 1)-th target gating module 211, and the next target gating module 211 of the i-th target gating module 211 is the (i + 1)-th target gating module 211. Wherein, since the m target gating modules 211 are sequentially and cyclically conducted, when i is equal to 1, the previous target gating module 211 of the i-th target gating module 211 is the m-th target gating module 211, and when i is equal to m, the next target gating module 211 of the i-th target gating module 211 is the first target gating module 211. Wherein, m ≥ i ≥ 1.

[0031] Specifically, as Figure 1 shown, the pulsed RF power RF2 is the RF power actually transmitted to the load RL corresponding to any one of the target gating modules 211. The waveform of the pulsed RF power RF2 in each high level stage is the same as the waveform of the initial RF power RF1, and the waveform in each low level stage is a straight line wave with an amplitude equal to zero.

[0032] Please refer to Figure 2 , Figure 2Another schematic diagram of the radio frequency power supply device in some embodiments of the present application. As Figure 2 shown, each gating module 210 includes a gating switch S1, and each gating switch S1 is connected between the radio frequency source 100 and the corresponding output terminal 300. Among them, each gating switch S1 is used to conduct or disconnect to correspondingly conduct or disconnect the power transmission path between the radio frequency source 100 and the corresponding output terminal 300.

[0033] Thus, in the above radio frequency power supply device 10 of the present application, by setting the gating switch S1, the conduction or disconnection of the power transmission path between the radio frequency source 100 and the corresponding output terminal 300 is realized.

[0034] Among them, the number of target gating modules 211 is m. When the gating switch S1 of the mth target gating module 211 switches from the conducting state to the disconnecting state, the first target gating switch S1 switches from the disconnecting state to the conducting state, so that at least two target gating modules 211 sequentially and cyclically conduct the power transmission path between the radio frequency source 100 and the corresponding output terminal 300, where m ≤ N.

[0035] Thus, in the above radio frequency power supply device 10 of the present application, for the switching of the conducting state or disconnecting state of the selection switch of the m target gating modules 211, when the gating switch S1 of the mth target gating module 211 switches from the conducting state to the disconnecting state, the first target gating switch S1 switches from the disconnecting state to the conducting state, so that at least two target gating modules 211 sequentially and cyclically conduct the power transmission path between the radio frequency source 100 and the corresponding output terminal 300.

[0036] In some embodiments, the gating switch S1 of each target gating module 211 alternately conducts and disconnects at a preset period, and when the number of target gating modules 211 is not N, the gating switch S1 of each non-target gating module 212 continuously disconnects. Among them, the sum of the conduction duty ratios of the gating switches S1 of each target gating module 211 is less than or equal to 100%.

[0037] Thus, in the above radio frequency power supply device 10 of the present application, the highest power utilization rate is 100%. Therefore, it is necessary that the sum of the conduction duty ratios of the gating switches S1 of each target gating module 211 is less than or equal to 100% to be able to transmit pulsed radio frequency power to multiple loads RL, and the pulsed radio frequency power repeats at a preset period.

[0038] In some embodiments, the ratio of the preset period to the period of the initial radio frequency power RF1 is greater than the first ratio.

[0039] In some embodiments, the conduction duty cycle of each target gating module 211 can be set according to the needs of the load RL. For example, it can be set to 50%, 60%, etc.

[0040] In some embodiments, the conduction duty cycles of the gating switches S1 of each target gating module 211 are equal, so that the power values of the electrical energy transmitted to the loads RL corresponding to each target gating module 211 are equal.

[0041] Thus, in the above radio frequency power supply device 10 of the present application, during the pulsed radio frequency electrical energy transmission process, the conduction duty cycles of the gating switches S1 of each target gating module 211 are equal, so that the power values of the electrical energy transmitted to the loads RL corresponding to each target gating module 211 are equal, which can maintain the consistency of the output and increase the process effect consistency of multiple loads RL.

[0042] Please refer to Figure 3 , Figure 3 which is another schematic diagram of the radio frequency power supply device in some embodiments of the present application. As Figure 3 shown, the radio frequency power supply device 10 further includes a control unit 400. The control unit 400 is connected to all N gating modules 210. The control unit 400 is used to control the conduction or disconnection of the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300 for each gating module 210.

[0043] Thus, in the above radio frequency power supply device 10 of the present application, by setting the control unit 400, the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300 can be controllably conducted or disconnected.

[0044] In some embodiments, the control unit 400 is further connected to the radio frequency source 100. The control unit 400 is further used to control and adjust the power value of the initial radio frequency electrical energy RF1 according to the required power value and / or required conduction duty cycle of each load RL, and / or control the corresponding target gating module 211 to periodically conduct the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300, and when the number of target gating modules 211 is not N, control each non-target gating module 212 to continuously disconnect the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300.

[0045] Thus, in the above radio frequency power supply device 10 of the present application, when the sum of the required power values of each load RL is relatively large, the control unit 400 can correspondingly adjust the power value of the initial radio frequency electrical energy RF1, and / or when the required conduction duty cycle of each load RL is not zero, the control unit 400 can control the corresponding target gating module 211 to periodically conduct the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300.

[0046] In some embodiments, when the sum of the required power values of each load RL is greater than the power value of the initial radio frequency electrical energy RF1, the control unit 400 controls and adjusts the power value of the initial radio frequency electrical energy RF1 to the sum of the required power values of each load RL.

[0047] In some embodiments, when the sum of the required conduction duty cycles of each load RL is greater than 100%, the control unit 400 controls the target gating module 211 corresponding to some loads RL to periodically conduct the power transmission path between the radio frequency source 100 and the corresponding output terminal 300, and controls each non-target gating module 212 to continuously disconnect the power transmission path between the radio frequency source 100 and the corresponding output terminal 300.

[0048] Furthermore, the control unit 400 first controls the corresponding target gating module 211 to periodically conduct the power transmission path between the radio frequency source 100 and the corresponding output terminal 300 according to the required conduction duty cycle of each load RL, and then controls and adjusts the power value of the initial radio frequency electrical energy RF1 according to the required power value of each load RL corresponding to each target gating module 211.

[0049] Wherein, the required conduction duty cycle can be the ratio of the time when the target gating module 211 is connected to the corresponding load RL to the preset period.

[0050] Please refer to Figure 4 , Figure 4 which is another schematic diagram of the radio frequency power supply device in some embodiments of the present application. As Figure 4 shown, the radio frequency power supply device 10 further includes an impedance matching unit 500. The impedance matching unit 500 is connected to the radio frequency source 100, and the impedance matching unit 500 is also connected to N output terminals 300. Wherein, the impedance matching unit 500 is used to perform impedance matching on the radio frequency source 100 and the load RL corresponding to each target gating module 211.

[0051] Thus, for the above-mentioned radio frequency power supply device 10 in the present application, since the radio frequency power supply device 10 includes N loads RL, and the load RL corresponding to each target gating module 211 is connected to the radio frequency source 100, therefore, the impedance matching unit 500 needs to perform impedance matching on the radio frequency source 100 and the load RL corresponding to each target gating module 211 to avoid generating a large reflected power.

[0052] In some embodiments, the control unit 400 can also be connected to the impedance matching unit 500, and the control unit 400 is used to control the impedance matching unit 500 to perform impedance matching on the radio frequency source 100 and the load RL corresponding to each target gating module 211.

[0053] In some embodiments, the control unit 400 may be a general-purpose processor such as a Central Processing Unit (CPU), or a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), a Field-Programmable Gate Array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, etc. logical control devices, or may also be a microprocessor such as a Micro Control Unit (MCU).

[0054] With the above structure, the radio frequency power supply device 10 of the present application can output pulsed radio frequency electric energy to at least two loads RL corresponding to at least two target gating modules 211, improving the utilization rate of electric energy. Moreover, since the utilization rate of electric energy is improved, the oscillating electric energy in the pulsed radio frequency electric energy output to any load RL is reduced, improving the output effect.

[0055] Please refer to Figure 5 , Figure 5 which is a schematic diagram of a radio frequency power supply system in some embodiments of the present application. As Figure 5 shown, the present application also provides a radio frequency power supply system 1, and the radio frequency power supply system 1 includes the radio frequency power supply device 10 in any of the foregoing embodiments.

[0056] Please refer to again Figure 1 . As Figure 1As shown in the figure, the radio frequency power supply device 10 includes a radio frequency source 100, a gating unit 200, and N output terminals 300. The radio frequency source 100 is used to output initial radio frequency electrical energy RF1, and the waveform of the initial radio frequency electrical energy RF1 is a sine wave. The N output terminals 300 are used to be connected to N loads RL in one-to-one correspondence. The gating unit 200 includes N gating modules 210. The N gating modules 210 are all connected to the radio frequency source 100, and the N gating modules 210 are connected to the N output terminals 300 in one-to-one correspondence. Each gating module 210 is used to selectively conduct or disconnect the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300, so as to correspondingly transmit or stop transmitting the initial radio frequency electrical energy RF1 to the corresponding load RL. Among them, the N gating modules 210 include at least two target gating modules 211. Each target gating module 211 periodically conducts the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300. And when any one of the target gating modules 211 conducts the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300, the other N - 1 gating modules 210 all disconnect the electrical energy transmission path between the radio frequency source 100 and the corresponding output terminal 300, where N≥2.

[0057] Among them, for the more specific structure of the radio frequency power supply device 10, reference can be made to the relevant content of the radio frequency power supply device 10 in any of the foregoing embodiments, which will not be elaborated here.

[0058] With the above structure, the radio frequency power supply device 10 and the radio frequency power supply system 1 of the present application can output pulsed radio frequency electrical energy to at least two loads RL corresponding to at least two target gating modules 211, improving the utilization rate of electrical energy. Moreover, the utilization rate of electrical energy is also improved, thereby reducing the oscillating electrical energy in the pulsed radio frequency electrical energy output to any load RL and improving the output effect.

[0059] The above description is only the specific implementation manner of the present application. However, the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of changes or substitutions, which should all be covered within the protection scope of the present application; without conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A radio frequency power supply device, characterized in that: It comprises a radio frequency source, a gating unit and N output terminals, wherein the radio frequency source is used to output initial radio frequency electric energy, the waveform of the initial radio frequency electric energy is a sine wave, and the N output terminals are used to be connected to N loads in a one-to-one correspondence; The gating unit includes N gating modules, each of which is connected to the RF source, and each of which is connected to the N output terminals in a one-to-one correspondence, and each gating module is used to selectively turn on or off the power transmission path between the RF source and the corresponding output terminal, so as to correspondingly transmit or stop transmitting the initial RF power to the corresponding load; Among them, the N gating modules include at least two target gating modules, each target gating module periodically turns on the power transmission path between the RF source and the corresponding output end, and when any target gating module turns on the power transmission path between the RF source and the corresponding output end, the other N-1 gating modules all disconnect the power transmission path between the RF source and the corresponding output end, N≥2.

2. The radio frequency power supply device according to claim 1, characterized in that: The at least two target gating modules sequentially and cyclically conduct the power transmission path between the RF source and the corresponding output end, and the conduction start time of each target gating module is the conduction end time of the previous target gating module, and the conduction end time of each target gating module is the conduction start time of the next target gating module; Wherein, when the number of the target gating modules is not N, the N gating modules further include at least one non-target gating module, and each non-target gating module continuously disconnects the power transmission path between the RF source and the corresponding output end.

3. The radio frequency power supply device according to claim 2, characterized in that: Each gating module includes a gating switch, and each gating switch is connected between the radio frequency source and the corresponding output terminal; Each of the gate switches is used to turn on or off, so as to correspondingly turn on or off the power transmission path between the radio frequency source and the corresponding output terminal.

4. The radio frequency power supply device according to claim 3, characterized in that: The number of the target gating modules is m. When the gating switch of the mth target gating module is switched from the on state to the off state, the first target gating switch is switched from the off state to the on state, so that the at least two target gating modules sequentially and cyclically conduct the power transmission path between the RF source and the corresponding output end, wherein m≤N.

5. The radio frequency power supply device according to claim 3, characterized in that: The gating switch of each target gating module is alternately turned on and off at a preset cycle, and when the number of target gating modules is not N, the gating switch of each non-target gating module is continuously turned off; The sum of the on-duty ratios of the gate switches of each target gate module is less than or equal to 100%.

6. The radio frequency power supply device according to claim 5, characterized in that: The conduction duty cycle of the gate switch of each target gate module is equal, so that the power value of the electric energy transmitted to the load corresponding to each target gate module is equal.

7. The radio frequency power supply device according to claim 2, characterized in that: The RF power supply device also includes a control unit, which is connected to the N gating modules. The control unit is used to control each gating module to turn on or off the power transmission path between the RF source and the corresponding output end.

8. The radio frequency power supply device according to claim 7, characterized in that: The control unit is also connected to the RF source, and is further used to control and adjust the power value of the initial RF power according to the required power value and / or required conduction duty cycle of each load, and / or control the corresponding target gating module to periodically conduct the power transmission path between the RF source and the corresponding output end, and when the number of the target gating modules is not N, control each non-target gating module to continuously disconnect the power transmission path between the RF source and the corresponding output end.

9. The radio frequency power supply device according to claim 1, characterized in that: The RF power supply device further comprises an impedance matching unit, wherein the impedance matching unit is connected to the RF source, and the impedance matching unit is connected to the N gating modules; The impedance matching unit is used to perform impedance matching between the RF source and the load corresponding to each target gating module.

10. A radio frequency power supply system, characterized in that: Comprising a radio frequency power supply device as described in any one of claims 1 to 9.

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