Accurately regulated laser beam splitting processing device

Abstract

The laser beam splitting processing device comprises an annular track, a rotating mirror module is located at the center position of the annular track, and N beam splitting light path modules are evenly distributed on the annular track; the laser device is a pulse laser device, the frequency of a laser beam output by the laser device is fHz, the laser beam emitted by the laser device enters the rotating mirror module after being collimated by the collimator, the rotating mirror module can rotate by 360 degrees around the center of an optical axis under the action of the driving device, and the rotating speed of the driving device is x revolutions per second. The control system is in control connection with the laser device and the driving device, the frequency of laser beams output by the laser device and / or the rotating speed of the driving device are regulated and controlled to meet the following formula: f = N.x, f, N and x are positive integers, the laser beams are emitted by the rotating mirror module, and the emitted laser beams are irradiated in the light splitting optical path modules while rotating, each light splitting optical path module receives a pulse laser beam, and precise regulation and control of light splitting of the beam is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of laser processing, and particularly relates to a laser beam splitting processing device with precise regulation. Background Art

[0002] The laser scribing process involves multiple parameter settings, thus posing high requirements for the efficiency, precision, and flexibility of laser processing equipment and its core optical path system. Currently, common laser processing equipment is mainly divided into two types: single-path laser equipment and multi-path laser equipment. Single-path laser equipment relies on a single laser and a simple optical path design. Although it has a simple structure and low cost, it is difficult to meet the requirements of processing and detection, resulting in low processing efficiency. Currently, parallel processing can be achieved by splitting the laser beam output from a single path to improve processing efficiency.

[0003] Laser beam splitting technology can achieve the synchronous progress of multiple workstations or multiple processing processes by splitting a laser beam into multiple sub-beams. Due to its high efficiency, high precision, and flexibility, laser beam splitting technology is widely used in multiple fields, especially in industries with high requirements for processing precision and efficiency. It is widely used in fields such as electronics, automotive, aerospace, medical devices, precision instruments, 3D printing, packaging industry, and energy and environmental protection, and is particularly suitable for high-precision and high-efficiency production requirements such as multi-hole processing, precision drilling, laser scribing, laser cutting, and surface treatment. Laser beam splitting methods mainly include technologies such as using optical beam splitters, fiber optic beam splitters, microlens arrays, polarization beam splitters, spatial light modulators (SLMs), and reflective beam splitters. Optical beam splitters divide a laser beam into multiple sub-beams through reflection or transmission; fiber optic beam splitters distribute laser energy to different optical fibers; microlens arrays focus into multiple beams through multiple small lenses; polarization beam splitters use the polarization state to split the beam; spatial light modulators achieve beam splitting by dynamically adjusting the phase and intensity of the beam; and reflective beam splitters achieve beam splitting through reflections at different angles.

[0004] The patent with the publication number CN118664067A discloses "a laser beam splitting processing method and device", including a laser, a beam expander, a reflector, a spatial light modulator, a condenser lens, a beam splitting array module, a collimating lens module, a reflector array module, and an F-Theta lens. This laser beam splitting system generates multiple foci through a spatial light modulator and separates the multiple focus arrays in space through a micro-reflector array to adjust the beam spacing. This laser beam splitting system can not only split the beam through a spatial light modulator but also combines a micro-reflector array to adjust the beam spacing.

[0005] The patent with the publication number CN117620472A discloses "Laser Processing Device, Electrode Sheet Processing Equipment, and Electrode Sheet Processing Method". The laser beam generated by the laser is divided into multiple beams by a beam splitting unit. The multiple beams of laser are adjusted by a galvanometer system and a rotating mirror system, and then focused on the processing plane by a focusing unit. The cooperation of the galvanometer system and the rotating mirror system controls the exit position of the split laser on the processing plane, so that the technologies processed by each laser beam on the processing plane are consistent, which can effectively improve the consistency of laser beam splitting.

[0006] However, the existing laser beam splitting technologies have the following problems: 1. Fixed beam splitting ratio: The optomechanical structure of the laser beam splitting device using an optical beam splitter and a polarization beam splitter prism is fixed, and it is difficult to flexibly adjust according to actual needs, which limits the application scenarios; 2. Complicated design and manufacturing processes: Although the microlens array can achieve multi-beam splitting, its design and manufacturing processes are complicated, the cost is high, and it is difficult to ensure the uniformity of the split beams; 3. Large energy loss: The spatial light modulator and the diffractive optical element achieve beam splitting by dynamically adjusting the phase and intensity of the beam, but its diffraction efficiency is low and the energy loss is large. Especially in high-power laser applications, it performs poorly and is difficult to meet the requirements of efficient beam splitting. Summary of the Invention

[0007] In view of the defects existing in the existing laser beam splitting technologies, the present invention provides a precisely controllable laser beam splitting processing device, which has a flexibly adjustable beam splitting ratio, realizes precise control of multi-path laser beam splitting, ensures that each beam splitting optical path can receive a pulsed laser, the obtained focused spots are consistent, and the optical path structure is simple, which can improve the utilization rate of laser energy.

[0008] To achieve the above object, the present invention adopts the following technical solutions: The present invention provides a precisely controllable laser beam splitting processing device, including a laser, a collimator, a rotating mirror module, an annular track, N beam splitting optical path modules, and a control system; The annular track is composed of an inner track and an outer track that are concentrically arranged in the same plane. The rotating mirror module is located at the central position of the annular track. The N beam splitting optical path modules are evenly distributed on the annular track. In actual applications, the number of beam splitting optical path modules and the diameter of the annular track can be adjusted to obtain different numbers and positions of split laser beams; The laser is a pulsed laser. The output laser beam frequency of the laser is f Hz. The laser emits a laser beam, which enters the rotating mirror module after being collimated by a collimator. The optical axis center inside the rotating mirror module is perpendicular to the plane of the annular track. The rotating mirror module can rotate 360° around the optical axis center under the action of a driving device. The rotation speed of the driving device is x revolutions per second. The control system is respectively connected to the laser and the driving device for control, and regulates the output laser beam frequency of the laser and / or the rotation speed of the driving device to satisfy the following formula: f = N·x, where f, N, and x are all positive integers. The laser beam is emitted from the rotating mirror module, and the emitted laser beam irradiates on each beam splitting optical path module while rotating. Each beam splitting optical path module receives a pulsed laser beam to achieve precise regulation and splitting of the beam; The beam splitting optical path module focuses the received laser beam to form multiple split laser beams, and the output frequency of each split laser beam is the same as the output laser frequency of the laser.

[0009] Adopting the above technical solution: The core of the laser beam splitting processing device in the present invention lies in achieving precise matching between the rotation speed of the driving device and the repetition frequency of the laser output by the laser, so as to ensure that each beam splitting optical path can receive a pulsed laser. This function is achieved through the synchronous control of the control system. The control system simultaneously controls the rotation speed of the driving device and the repetition frequency of the laser output by the laser. During specific operation, first, the driving device is controlled to start through the control system. After Δt time, the rotation speed of the driving device reaches the set x revolutions per second. At this time, the laser is turned on to output pulsed laser. When the beam splitting optical path module can receive the pulsed laser to form a focused beam, the control system immediately adjusts the output laser repetition frequency of the laser to be set as f Hz, and the system follows the relationship of f = Nx (f, N, and x are all positive integers). This matching relationship is the key to the laser beam splitting function. In this case, the laser emits f pulsed lasers per second, and the corresponding driving device rotates x revolutions per second. Since the driving device passes through the beam splitting optical path N times per revolution, within 1 second, the frameless torque motor passes through the beam splitting optical path Nx times in total. When f = Nx, each beam splitting optical path exactly receives a pulsed laser, thus realizing precise regulation of multi-channel laser beam splitting.

[0010] Furthermore, the output laser beam frequency f of the laser is adjustable within the range of 1 - 4000 kHz.

[0011] Specifically, the laser in the present invention is a pulsed laser, and the repetition frequency f of the laser output is adjustable within the range of 1 - 4000 kHz. The control of the laser repetition frequency is achieved through computer software control. The wavelength of the laser used in the present invention is consistent with the optical path. For example, the wavelength of the laser beam emitted by the laser is 1064 nm, and the specifications applicable to 1064 nm are also required for the reflectors and lenses in the optical path structure.

[0012] Further, during the processing, the rotational speed x of the driving device is adjustable within the range of 0 - 70 revolutions per second.

[0013] Specifically, when the driving device uses a frameless torque motor, the maximum rotational speed of the frameless torque motor is 4200 revolutions per minute. During the processing, its rotational speed is regulated by the control system to maintain a rotational speed of x revolutions per second (0 < x ≤ 70). It is also possible to use a motor + gear + bearing instead of the frameless torque motor, and use gear speed change to achieve high-speed output, so as to match a higher pulse repetition frequency.

[0014] Further, the rotating mirror module includes a rotating mirror barrel and a first reflector; the rotating mirror barrel is driven by the driving device and can rotate 360° around the center of the optical axis. A first reflector is fixedly installed inside the rotating mirror barrel along the center of the optical axis and is inclined at 45°. The laser beam enters vertically into the rotating mirror barrel and is reflected by the first reflector, and then a horizontally transmitted laser beam is emitted backward.

[0015] Specifically, the first reflector and the driving device are fixed inside the rotating mirror barrel. The rotating mirror barrel is drivingly connected to the driving device and rotates with the driving device. The laser beam enters vertically into the rotating mirror barrel and is reflected and emitted by the first reflector located at the bottom of the rotating mirror barrel, and will rotate 360° around the center of the optical axis. The emitted laser irradiates on the beam splitting optical path module while rotating.

[0016] Further, the beam splitting optical path module includes a beam splitting mirror barrel, a second reflector and a lens; the second reflector and the lens are sequentially installed inside the beam splitting mirror barrel along the center of the optical axis from top to bottom. The second reflector is inclined at 45°, and the second reflector is horizontally facing the first reflector. The second reflector changes the horizontally transmitted laser beam emitted by the rotating mirror module into a vertically transmitted laser beam, and the vertically transmitted laser beam is focused by the lens.

[0017] Further, the central axis of the rotating mirror barrel coincides with the center of the internal optical axis.

[0018] Further, a third reflector inclined at 45° is provided between the collimator and the rotating mirror module. The third reflector changes the horizontally laser beam collimated by the collimator into a vertically transmitted laser beam.

[0019] Compared with the prior art, the present invention has the following beneficial effects: (1) The rotating mirror module is located at the center of the annular track, and multiple beam splitting optical path modules are evenly distributed on the annular track outside the rotating mirror module. The number and position of the beam splitting optical path modules can be reasonably arranged according to the number of beam splittings and the focal position. The rotating mirror module can rotate at a high speed and emit laser at 360° at the center of the annular track. After the laser is emitted, it can sweep to the position of each beam splitting optical path module in space to achieve beam splitting; (2) The control system controls the rotation speed of the driving device to match the repetition frequency of the laser output by the laser, ensuring that each beam splitting optical path module can receive a pulsed laser, and each split beam laser is consistent, the spot is consistent and no manual adjustment is required; each split beam laser is generated by changing the laser emission direction through the rotation of the rotating mirror module. Therefore, by adjusting the repetition frequency of the laser to match the rotation speed of the rotating mirror, laser beam splitting can be achieved without manual adjustment for each path. At the same time, the optical imaging system is consistent, and the obtained focused spots are also consistent; (3) The beam splitting device in the present invention is realized only by a driving device and three reflecting mirrors, and the number of optical devices used is small, reducing the cost. Description of the Drawings

[0020] The present invention will be further described in detail below with reference to the drawings and specific embodiments.

[0021] Figure 1 It is the spatial position diagram of 16-beam laser beam splitting in the embodiment; Figure 2 It is the structural schematic diagram of the laser beam splitting processing device in the embodiment; Figure 3 It is the control system flow chart of N-beam laser beam splitting in the embodiment.

[0022] Among them, the specific reference numerals are: Laser 1, collimator 2, third reflecting mirror 3, rotating mirror module 4, rotating mirror barrel 5, driving device 6, first reflecting mirror 7, annular track 8, beam splitting optical path module 9, beam splitting barrel 10, second reflecting mirror 11, lens 12, control system 13. Specific Embodiments

[0023] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0024] The embodiment of the present invention discloses a precisely regulated laser beam splitting processing device, as Figure 1and Figure 2 As shown, it includes a laser 1, a collimator 2, a rotating mirror module 4, an annular track 8, N beam splitting optical path modules 9, and a control system 13; The annular track 8 is composed of an inner track and an outer track that are in the same plane and concentrically arranged. The rotating mirror module 4 is located at the central position of the annular track 8. The N beam splitting optical path modules 9 are evenly distributed on the annular track 8. In practical applications, the number of beam splitting optical path modules 9 and the diameter of the annular track 8 can be adjusted to obtain different numbers and positions of split laser beams. In this embodiment, 16 beam splitting optical path modules 9 are evenly distributed on the annular track 8; The laser 1 is a pulsed laser. The output laser beam frequency of the laser 1 is f Hz. The laser 1 emits a laser beam, which enters the rotating mirror module 4 after being collimated by the collimator 2. The optical axis center inside the rotating mirror module 4 is perpendicular to the plane of the annular track 8. The rotating mirror module 4 can rotate 360° around the optical axis center under the action of the driving device 6. The rotation speed of the driving device 6 is x revolutions per second. The control system 13 is respectively connected to the laser 1 and the driving device 6 for control, and regulates the output laser beam frequency of the laser 1 and / or the rotation speed of the driving device 6 to satisfy the following formula: f = N·x, where f, N, and x are all positive integers. The laser beam is emitted from the rotating mirror module 4, and the emitted laser beam irradiates on each beam splitting optical path module 9 while rotating. Each beam splitting optical path module 9 receives a pulsed laser beam to achieve precise regulation and splitting of the beam; The beam splitting optical path module 9 focuses the received laser beam to form multiple split laser beams, and the output frequency of each split laser beam is the same as the frequency of the laser output by the laser 1.

[0025] The core of the laser beam splitting processing device in the present invention lies in achieving precise matching of the rotation speed of the driving device 6 and the repetition frequency of the laser output by the laser 1, so as to ensure that each beam splitting optical path can receive a pulsed laser. This function is achieved through the synchronous control of the control system 13. The control system 13 simultaneously controls the rotation speed of the driving device 6 and the repetition frequency of the laser output by the laser 1. As Figure 3As shown, during specific operation, first, the control system 13 controls the start of the driving device 6. After Δt time, the rotational speed of the driving device 6 reaches the set x revolutions per second. At this time, the laser 1 is turned on to output pulsed laser. When the beam splitting optical path module 9 can receive the pulsed laser to form a focused beam, the control system 13 immediately adjusts the output laser repetition frequency of the laser 1 to be set at f Hz, and the system follows the relationship f = Nx (f, N, and x are all positive integers). This matching relationship is the key to the laser beam splitting function. In this case, the laser 1 emits f pulsed lasers per second, and the corresponding driving device 6 rotates x revolutions per second. Since the driving device 6 passes through the beam splitting optical path N times per revolution, within 1 second, the frameless torque motor passes through the beam splitting optical path Nx times in total. When f = Nx, each beam splitting optical path exactly receives one pulsed laser, thus achieving precise control of multi-path laser beam splitting.

[0026] Among them, the output laser beam frequency f of the laser 1 is adjustable within the range of 1 - 4000 kHz. Specifically, the laser 1 in the present invention is a pulsed laser, the repetition frequency f of the laser 1 output laser is adjustable within the range of 1 - 4000 kHz, and the control of the repetition frequency of the laser 1 is achieved through computer software control. The wavelength of the laser 1 adopted in the present invention is consistent with the optical path. For example, the wavelength of the laser beam emitted by the laser 1 is 1064 nm, and the reflectors and the lens 12 in the optical path structure also need to adopt specifications suitable for 1064 nm.

[0027] Among them, the rotational speed x of the driving device 6 during processing is adjustable within the range of 0 - 70 revolutions per second. Specifically, when the driving device 6 adopts a frameless torque motor, the maximum rotational speed of the frameless torque motor is 4200 revolutions per minute, and during processing, its rotational speed is regulated by the control system 13 to maintain a rotational speed of x revolutions per second (0 < x ≤ 70). It is also possible to use a motor + gear + bearing to replace the frameless torque motor, and use gear speed change to achieve high-speed output, so as to match a higher pulse repetition frequency.

[0028] Among them, the rotating mirror module 4 includes a rotating mirror barrel 5 and a first reflector 7; the rotating mirror barrel 5 is driven by the driving device 6, and it can rotate 360° around the optical axis center. A first reflector 7 is fixedly installed inside the rotating mirror barrel 5 along the optical axis center at an inclination of 45°. The laser beam enters vertically into the inside of the rotating mirror barrel 5 and is reflected by the first reflector 7, and then a horizontally transmitted laser beam is emitted backward. Specifically, the first reflector 7 and the driving device 6 are fixed inside the rotating mirror barrel 5, the rotating mirror barrel 5 is drivingly connected to the driving device 6, and the rotating mirror barrel 5 rotates with the driving device 6. The laser beam enters vertically into the inside of the rotating mirror barrel 5, is reflected by the first reflector 7 located at the bottom of the rotating mirror barrel 5 and emitted, and will rotate 360° around the optical axis center. The emitted laser irradiates on the beam splitting optical path module 9 while rotating.

[0029] Among them, the beam splitting optical path module 9 includes a beam splitting lens barrel 10, a second reflecting mirror 11 and a lens 12; inside the beam splitting lens barrel 10, the second reflecting mirror 11 and the lens 12 are successively installed along the optical axis center from top to bottom. The second reflecting mirror 11 is disposed at an inclination of 45°, and the second reflecting mirror 11 is horizontally opposite to the first reflecting mirror 7. The second reflecting mirror 11 changes the horizontally transmitted laser beam emitted by the rotating mirror module 4 into a vertically transmitted laser beam, and the vertically transmitted laser beam is focused by the lens 12.

[0030] Among them, the central axis of the rotating mirror barrel 5 coincides with the internal optical axis center.

[0031] Among them, a third reflecting mirror 3 disposed at an inclination of 45° is provided between the collimator 2 and the rotating mirror module 4. The third reflecting mirror 3 changes the horizontally laser beam collimated by the collimator 2 into a vertically transmitted laser beam.

[0032] In the present invention, the rotating mirror module 4 is located at the center of the annular track 8, and a plurality of beam splitting optical path modules 9 are evenly distributed on the annular track 8 outside the rotating mirror module 4. The number and position of the beam splitting optical path modules 9 can be reasonably arranged according to the number of beam splittings and the focal position. The rotating mirror module 4 can rotate at a high speed and emit laser at 360° at the center of the annular track 8. After the laser is emitted, it can sweep to the position where each beam splitting optical path module 9 is located in space to realize the beam splitting of the light beam; the control system 13 controls the rotation speed of the driving device 6 to match the repetition frequency of the laser output by the laser 1, ensuring that each beam splitting optical path module 9 can receive a pulsed laser, and each beam of split laser is consistent, the light spot is consistent and no manual adjustment is required. Each beam of split laser is generated by changing the emission direction of the laser through the rotation of the rotating mirror module 4. Therefore, by adjusting the repetition frequency of the laser 1 to match the rotation speed of the rotating mirror, laser beam splitting can be realized without manual adjustment for each path, and at the same time, the optical imaging system is consistent, and the obtained focused light spots are also consistent. The beam splitting device in the present invention is realized only through the driving device 6 and three reflecting mirrors, and the number of optical devices used is small, reducing the cost.

[0033] Although the embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made in these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A precisely controlled laser beam splitting processing device, characterized in that: It includes a laser, a collimator, a rotating mirror module, a circular track, N beam splitting optical path modules and a control system; The annular track is composed of an inner track and an outer track which are located in the same plane and are arranged with the same center. The rotating mirror module is located at the center of the annular track, and N light splitting optical path modules are evenly distributed on the annular track. The laser is a pulse laser, and the laser output frequency of the laser beam is fHz. The laser emits a laser beam, which enters the rotating mirror module after being laser collimated by a collimator. The center of the optical axis inside the rotating mirror module is perpendicular to the plane of the circular track. The rotating mirror module can rotate 360° around the center of the optical axis under the action of the driving device. The speed of the driving device is x revolutions per second. The control system is respectively connected to the laser and the driving device for controlling and regulating the laser output laser beam frequency and / or the driving device speed to meet the following formula: f=N·x, wherein f, N and x are all positive integers. The laser beam is emitted by the rotating mirror module, and the emitted laser beam is irradiated into each splitting optical path module while rotating. Each splitting optical path module receives a pulsed laser beam, so that the beam is precisely regulated and split; The beam splitting optical path module focuses the received laser beam to form a plurality of split laser beams.

2. The precisely controlled laser beam splitting processing device according to claim 1, characterized in that: The laser output beam frequency f of the laser is adjustable within the range of 1 to 4000 kHz.

3. The precisely controlled laser beam splitting processing device according to claim 1 or 2, characterized in that: The rotation speed x of the driving device during the processing is adjustable within the range of 0 to 70 rpm.

4. The precisely controlled laser beam splitting processing device according to claim 1, characterized in that: The rotating mirror module includes a rotating mirror barrel and a first reflecting mirror; the rotating mirror barrel is driven by a driving device and can rotate 360° around the center of the optical axis. A first reflecting mirror inclined at 45° is fixedly installed inside the rotating mirror barrel along the center of the optical axis. The laser beam enters the rotating mirror barrel vertically, is reflected by the first reflecting mirror, and emits a horizontally transmitted laser beam backward.

5. The precisely controlled laser beam splitting processing device according to claim 4, characterized in that: The spectroscopic optical path module includes a spectroscopic tube, a second reflector and a lens; the second reflector and the lens are installed in sequence from top to bottom along the center of the optical axis inside the spectroscopic tube, the second reflector is set at an angle of 45°, and the second reflector is horizontally arranged opposite to the first reflector, the second reflector converts the horizontally transmitted laser beam emitted by the rotating mirror module into a vertically transmitted laser beam, and the vertically transmitted laser beam is focused by the lens.

6. The precisely controlled laser beam splitting processing device according to claim 4 or 5, characterized in that: The central axis of the rotating mirror barrel coincides with the center of the internal optical axis.

7. The precisely controlled laser beam splitting processing device according to claim 1, characterized in that: A third reflector inclined at 45° is provided between the collimator and the rotating mirror module, and the third reflector converts the horizontal laser beam collimated by the collimator into a vertically transmitted laser beam.

8. The precisely controlled laser beam splitting processing device according to claim 1, characterized in that: The driving device is a frameless torque motor or a motor, gear and bearing matching structure.

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