Continuous cleavage knife

Abstract

The invention discloses a continuous cleavage knife which comprises a rotary feed-in mechanism arranged on the outer side of an ultrahigh vacuum flange, the rotary feed-in mechanism comprises a plurality of rotary feed-in pieces, and each rotary feed-in piece penetrates through the ultrahigh vacuum flange and then is connected with a cutting mechanism, a stacking structure and a bearing mechanism in the ultrahigh vacuum flange; the cutting mechanism comprises a front cutter assembly, a middle cutter assembly and a rear cutter assembly which are arranged in sequence, the rear cutter assembly is used for clamping a wafer to be cleaved and driving the wafer to move, the middle cutter assembly is used for positioning the wafer, and the front cutter assembly is used for cleaving the wafer into Bar strips with preset sizes; the stacking structure is located between the front cutter assembly and the bearing mechanism and used for collecting the Bar strips and transferring the Bar strips to the bearing mechanism. And the bearing mechanism is used for caching Bars so as to realize continuous cleavage of the wafer. The device has the advantages of being compact in structure, easy to operate, stable in operation, beneficial to improving the wafer cleavage efficiency and the like.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor equipment, and particularly relates to a continuous cleaving knife. Background Art

[0002] An ultra-high vacuum chip cleaving machine is used to cleave, cut and coat semiconductor chips under ultra-high vacuum. The cleaving knife is one of the most core components of the cleaving machine and is used to cleave wafers into Bar strips of a certain size. The existing cleaving knives have complex and compact structures, and the cleaving process is realized by multiple motions. Moreover, the existing cleaving knives can usually only perform single cleaving, it is difficult to achieve continuous cleaving, and they cannot be compatible with the cleaving of Bar strips of multiple sizes. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a continuous cleaving knife with a compact structure, simple operation and capable of realizing multiple motion couplings in view of the deficiencies of the prior art.

[0004] To achieve the above object, the present invention can adopt the following technical solutions:

[0005] A continuous cleaving knife, the continuous cleaving knife is installed on the ultra-high vacuum flange of a chip cleaving machine, and includes: a cutting mechanism, a rotary feeding mechanism, a stacking structure and a carrying mechanism; the rotary feeding mechanism is arranged outside the ultra-high vacuum flange, and the rotary feeding mechanism includes a plurality of rotary feeding members. After each rotary feeding member penetrates through the ultra-high vacuum flange, it is respectively connected to the cutting mechanism, the stacking structure and the carrying mechanism; the cutting mechanism includes a front knife assembly, a middle knife assembly and a rear knife assembly arranged in sequence, the rear knife assembly is close to the ultra-high vacuum flange, the rear knife assembly is used to clamp the wafer to be cleaved and drive the wafer to move, the middle knife assembly is used to position the wafer, and the front knife assembly is used to cleave the wafer into Bar strips of a preset size; the stacking structure is located between the front knife assembly and the carrying mechanism, and the stacking structure is used to collect Bar strips and transfer the Bar strips to the carrying mechanism; the carrying mechanism is used to cache Bar strips to achieve continuous cleaving of wafers.

[0006] As a further improvement of the present invention, side plates are symmetrically arranged inside the ultra-high vacuum flange, and a front knife connecting plate, a middle knife connecting plate, a rear knife connecting plate and a second rotating shaft and a third rotating shaft arranged in sequence are provided on the side plates; both the front knife connecting plate and the middle knife connecting plate are nested on the second rotating shaft, the rear knife connecting plate is nested on the third rotating shaft, and the front knife connecting plate is connected to the rear knife connecting plate and the middle knife connecting plate through a limiting component; the front knife connecting plate is connected to the front knife assembly, the middle knife connecting plate is connected to the middle knife assembly, and the rear knife connecting plate is connected to the rear knife assembly;

[0007] The rotating feeder includes a first feeder and a second feeder; the first feeder is connected to the front knife connecting plate to drive the front knife assembly, the middle knife assembly, and the rear knife assembly to rotate; the second feeder is connected to the rear knife assembly to drive the rear knife assembly to move back and forth in the horizontal direction, thereby adjusting the size of the Bar strip.

[0008] As a further improvement of the present invention, the limiting component includes first limiting screws symmetrically penetrating through both sides of the end of the middle knife connecting plate, and limiting blocks symmetrically arranged on both sides of the front knife connecting plate. A flexible connecting piece is provided above the middle knife connecting plate on the first limiting screw. The limiting blocks cooperate with the side plates. The first limiting screw and the limiting blocks are used to limit the lifting of the middle knife assembly.

[0009] As a further improvement of the present invention, the limiting component further includes first adjusting screws symmetrically arranged on both sides of the middle knife connecting plate. The first adjusting screws are located between the first limiting screw and the second limiting screw;

[0010] When the cutting mechanism moves upward in the vertical direction, the front knife connecting plate abuts against the first adjusting screw to drive the middle knife assembly to move upward; when the cutting mechanism moves downward in the vertical direction, if the middle knife assembly clamps the wafer, the first adjusting screw is separated from the front knife connecting plate, and the flexible connecting piece on the first limiting screw assists the middle knife assembly to press the silicon wafer.

[0011] As a further improvement of the present invention, the limiting component further includes a sliding seat connected to the third rotating shaft, and a second limiting screw sequentially penetrating through the middle knife connecting plate, the rear knife connecting plate, and the sliding seat in the vertical direction. A flexible connecting piece is provided between the bottom of the second limiting screw and the bottom of the sliding seat. The second limiting screw is used to limit the rotation of the middle knife assembly and the rear knife assembly and to realize the rear knife assembly pressing the wafer.

[0012] As a further improvement of the present invention, the second feeder is connected to the rear knife assembly through a sliding seat; guide rails are symmetrically provided inside the side plates, and multiple groups of roller sets are symmetrically provided on both sides of the sliding seat. The roller sets are slidably nested on the guide rails. When the second feeder pushes the sliding seat to reciprocate along the guide rails, the rear knife assembly reciprocates.

[0013] As a further improvement of the present invention, the rotating feeder further includes a fourth feeder; the stacking structure includes a first rotating shaft, a first cable, and a wafer picking clamp. The first rotating shaft straddles the ends of the two side plates and is located below the front knife assembly. The wafer picking clamp is nested on the first rotating shaft. The side of the first rotating shaft is connected to the fourth feeder through the first cable; when the fourth feeder pulls the first cable to drive the first rotating shaft to rotate, the wafer picking clamp rotates between the front knife assembly and the loading mechanism to complete the transfer of the Bar strip.

[0014] As a further improvement of the present invention, the rotary feeder further includes a third feeder; the stacking structure further includes a toggle lever, a second cable, a toggle block, and a tension spring; the carrying mechanism includes a sheet holder, on which a toggle spring and a counterbore for storing Bar strips are provided. One end of the toggle spring is fixedly connected to the sheet holder, the other end of the toggle spring contacts the toggle lever, and the middle part of the toggle spring is located in the counterbore; the toggle block is arranged at the end of the side plate and above the first rotating shaft. One end of the toggle block is connected to the third feeder through the second cable, and the other end of the toggle block is connected to the toggle lever through the tension spring. The toggle lever is located between the end of the side plate and the sheet holder.

[0015] When the third feeder is screwed to make the second cable pull the toggle block to rotate, the toggle block pulls the toggle lever through the tension spring, and the toggle lever pushes the toggle spring out of the counterbore, so that the sheet gripper can store the Bar strip in the counterbore; when the third feeder is screwed to release the second cable, the toggle lever releases the toggle spring, and the toggle spring presses the Bar strip in the counterbore.

[0016] As a further improvement of the present invention, the carrying mechanism further includes a carrying seat, a lifting plate, a push rod, and a fourth rotating shaft; a plurality of carrying seats are provided at one end of the lifting plate, the sheet holder is arranged on the carrying seat, the other end of the lifting plate is nested on the fourth rotating shaft, the fourth rotating shaft spans between the two side plates, and a push rod is provided at one end of the fourth rotating shaft. The push rod matches the third feeder. When the third feeder is pushed to drive the push rod to rotate, the fourth rotating shaft drives the lifting plate to tilt downward to facilitate the conversion of the sheet holder.

[0017] As a further improvement of the present invention, the rotary feeder further includes a fifth feeder; the carrying mechanism further includes a rotating table, a transmission rod, and a belt drive assembly; the carrying seat is arranged on the rotating table, the belt drive assembly is arranged on the lifting plate and is respectively connected to the transmission rod and the rotating table. The transmission rod is connected to the fifth feeder. When the fifth feeder is screwed, the belt drive assembly drives the rotating table to rotate to realize the conversion of the sheet holder.

[0018] Compared with the prior art, the advantages of the present invention are as follows:

[0019] The continuous cleavage knife of the present invention realizes the precise control of each mechanism by arranging a plurality of rotary feed-in components outside the ultra-high vacuum flange. After each rotary feed-in component penetrates the ultra-high vacuum flange, it is respectively connected to the cutting mechanism, stacking structure, and bearing mechanism inside the ultra-high vacuum flange. Further, the cutting mechanism includes a front knife assembly, a middle knife assembly, and a rear knife assembly arranged in sequence. The rear knife assembly is used to clamp the wafer to be cleaved and drive the wafer to move, and the middle knife assembly is used to accurately position the wafer to assist the front knife assembly in cleaving the wafer into Bar strips of a preset size. Through the coupling of various movements of the cutting mechanism, the clamping and positioning of the wafer are realized, and the precise cleavage of the wafer is also realized. Furthermore, by arranging the stacking structure between the front knife assembly and the bearing mechanism, the collection and transfer of the Bar strips are realized. The Bar strips are cached by the bearing mechanism, realizing the continuous cleavage of the wafer, and the cleavage of Bar strips of different sizes can be realized in the same ultra-high vacuum chip cleavage machine, significantly improving the cleavage efficiency of the wafer. Description of the Drawings

[0020] Figure 1 It is a schematic structural principle diagram of the continuous cleavage knife in a specific embodiment of the present invention;

[0021] Figure 2 It is a schematic structural principle diagram of another perspective of the continuous cleavage knife in a specific embodiment of the present invention;

[0022] Figure 3 It is an exploded schematic structural principle diagram of the continuous cleavage knife in a specific embodiment of the present invention;

[0023] Figure 4 It is a schematic structural principle diagram of the cutting mechanism in a specific embodiment of the present invention;

[0024] Figure 5 It is a schematic side structural principle diagram of the cutting mechanism in a specific embodiment of the present invention;

[0025] Figure 6 It is a schematic structural principle diagram of the stacking mechanism in a specific embodiment of the present invention;

[0026] Figure 7 It is a schematic structural principle diagram of the wafer carrier in a specific embodiment of the present invention;

[0027] Figure 8 It is a schematic structural principle diagram of the bearing mechanism in a specific embodiment of the present invention;

[0028] Figure 9 It is an exploded schematic structural principle diagram of the bearing mechanism in a specific embodiment of the present invention;

[0029] Figure 10 It is a schematic process diagram of the cleavage knife cleaving the wafer in a specific embodiment of the present invention.

[0030] Legend: 1. Cutting mechanism; 2. First rotating shaft; 3. Bearing seat; 4. Lifting plate; 5. Poking rod; 6. First cable; 7. Second cable; 8. Pushing rod; 9. Chip holder; 10. First limit screw; 11. First feeder; 12. Second feeder; 13. Third feeder; 14. Fourth feeder; 15. Fifth feeder; 16. Front knife assembly; 17. Middle knife assembly; 18. Rear knife assembly; 19. First adjusting screw; 20. Second rotating shaft; 21. Third rotating shaft; 22. Second limit screw; 23. Claw; 24. Limit block; 25. Poking block; 26. Tension spring; 27. Chip picking clamp; 28. Poking rod spring; 29. Fourth rotating shaft; 30. Third limit screw; 31. Second adjusting screw; 32. Rotary table; 33. Transmission rod; 34. Belt drive assembly; 91. Counterbore; 100. Ultra-high vacuum flange; 200. Side plate; 201. Front knife connecting plate; 202. Middle knife connecting plate; 203. Rear knife connecting plate; 204. Clamping seat; 205. Sliding seat; 206. Roller group; 207. Guide rail; 300. Bar strip. Detailed implementation

[0031] The present invention will be further described below in conjunction with the accompanying drawings of the specification and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0032] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "side", "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0033] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality" means two or more, unless otherwise specifically defined.

[0034] Embodiment

[0035] As Figures 1 to 9As shown in the figure, the continuous cleavage knife of the present invention is installed on the ultra-high vacuum flange 100 of the chip cleavage machine, and includes: a cutting mechanism 1, a rotary feeding mechanism, a stacking structure and a carrying mechanism. The rotary feeding mechanism is arranged outside the ultra-high vacuum flange 100. The rotary feeding mechanism includes a plurality of rotary feeding members. After each rotary feeding member penetrates the ultra-high vacuum flange 100, it is respectively connected to the cutting mechanism 1, the stacking structure and the carrying mechanism to operate the cutting mechanism 1, the stacking structure and the carrying mechanism to move. The cutting mechanism 1 includes a front knife assembly 16, a middle knife assembly 17 and a rear knife assembly 18 arranged in sequence. The rear knife assembly 18 is close to the ultra-high vacuum flange 100. The rear knife assembly 18 is used to clamp the wafer to be cleaved and drive the wafer to move, so that part of the wafer is exposed outside the cleavage knife. The middle knife assembly 17 is used to position the wafer according to the preset scratch on the wafer. The wafer is clamped and fixed by the rear knife assembly 18 and the middle knife assembly 17. The front knife assembly 16 is used to cleave the wafer into Bar strips 300 of a preset size. The stacking structure is located between the front knife assembly 16 and the carrying mechanism. The stacking structure is used to collect the Bar strips 300 and transfer the Bar strips 300 to the carrying mechanism. The carrying mechanism is used to cache the Bar strips 300 to achieve continuous cleavage of the wafer. It can be understood that corresponding detection devices are provided in the chip cleavage machine to detect the state of wafer cleavage in real time.

[0036] In this embodiment, by arranging a plurality of rotary feeding members outside the ultra-high vacuum flange 100, and after each rotary feeding member penetrates the ultra-high vacuum flange 100, it is respectively connected to the cutting mechanism, the stacking structure and the carrying mechanism inside the ultra-high vacuum flange 100, precise control of each mechanism is achieved. Further, the cutting mechanism includes a front knife assembly 16, a middle knife assembly 17 and a rear knife assembly 18 arranged in sequence. The rear knife assembly 18 is used to clamp the wafer to be cleaved and drive the wafer to move, and the middle knife assembly 17 is used to precisely position the wafer to assist the front knife assembly 16 in cleaving the wafer into Bar strips 300 of a preset size. Through the coupling of various motions of the cutting mechanism, both clamping and positioning of the wafer and precise cleavage of the wafer are achieved. Furthermore, by arranging the stacking structure between the front knife assembly 16 and the carrying mechanism, the collection and transfer of the Bar strips 300 are achieved. By caching the Bar strips 300 through the carrying mechanism, continuous cleavage of the wafer is achieved, and cleavage of Bar strips 300 of different sizes can be achieved in the same ultra-high vacuum chip cleavage machine, significantly improving the cleavage efficiency of the wafer.

[0037] As Figure 1 and Figure 3As shown, two side plates 200 are symmetrically arranged on the inner side of the ultra-high vacuum flange 100, and the inner sides of the two side plates 200 are provided with a front blade connecting plate 201, a middle blade connecting plate 202, a rear blade connecting plate 203, and a second rotating shaft 20 and a third rotating shaft 21 arranged in sequence. The front blade connecting plate 201 and the middle blade connecting plate 202 are both nested on the second rotating shaft 20, and the rear blade connecting plate 203 is nested on the third rotating shaft 21. The front blade connecting plate 201 is connected to the rear blade connecting plate 203 and the middle blade connecting plate 202 through a limiting assembly to realize the coupling movement of the front blade connecting plate 201, the middle blade connecting plate 202, and the rear blade connecting plate 203. The front blade connecting plate 201 is connected to the front blade assembly 16, the middle blade connecting plate 202 is connected to the middle blade assembly 17, and the rear blade connecting plate 203 is connected to the rear blade assembly 18.

[0038] like Figure 2 As shown, the rotary feed-in includes a No. 1 feed-in 11 and a No. 2 feed-in 12. The No. 1 feed-in 11 is connected to the front blade connecting plate 201 through a transmission push rod. By screwing the No. 1 feed-in 11, the transmission push rod drives the front blade connecting plate 201 to rotate, thereby realizing the coupled rotation of the front blade assembly 16, the middle blade assembly 17 and the rear blade assembly 18. The No. 2 feed-in 12 is connected to the rear blade assembly 18. By screwing the No. 2 feed-in 12, the rear blade assembly 18 is driven to move forward and backward in the horizontal direction, thereby adjusting the size of the Bar bar 300.

[0039] like Figure 3 , Figure 4 and Figure 5 As shown, the limiting assembly includes a first limiting screw 10 symmetrically arranged on both sides of the end of the middle blade connecting plate 202, and a limiting block 24 symmetrically arranged on both sides of the front blade connecting plate 201. The first limiting screw 10 is provided with a spring connector above the middle blade connecting plate 202, and the spring connector is used to limit the maximum lifting height of the middle blade connecting plate 202, thereby limiting the maximum lifting height of the middle blade assembly 17. The limiting block 24 cooperates with the side plate 200. When the front blade connecting plate 201 moves downward to a preset position, the limiting block 24 will be resisted by the side plate 200, thereby limiting the displacement of the front blade connecting plate 201 and the middle blade connecting plate 202 moving downward, and preventing the middle blade assembly 17 from falling too much.

[0040] like Figure 4 and Figure 5 As shown, the limiting assembly also includes a first adjusting screw 19 symmetrically arranged on both sides of the middle knife connecting plate 202, the first adjusting screw 19 is located between the first limiting screw 10 and the second limiting screw 22, and the first adjusting screw 19 cooperates with the front knife connecting plate 201.

[0041] When the first feeding member 11 is screwed to drive the cutting mechanism 1 to rotate upward in the vertical direction, the front knife connecting plate 201 abuts against the first adjusting screw 19 to drive the middle knife assembly 17 to rotate upward; when the first feeding member 11 is screwed to drive the cutting mechanism 1 to rotate downward in the vertical direction, if the middle knife assembly 17 clamps the wafer, the first adjusting screw 19 is separated from the front knife connecting plate 201, and the spring connecting member on the first limiting screw 10 assists the middle knife assembly 17 to press the silicon wafer.

[0042] As Figure 4 and Figure 5 shown, the limiting assembly further includes a sliding seat 205 connected to the third rotating shaft 21, and a second limiting screw 22 penetrating through the middle knife connecting plate 202, the rear knife connecting plate 203 and the sliding seat 205 in sequence in the vertical direction. An upper nut is provided between the upper part of the second limiting screw 22 and the top of the middle knife connecting plate 202, and a lower nut is also provided between the middle part of the second limiting screw 22 and the bottom of the rear knife connecting plate 203. The range of the up-and-down rotation of the rear knife connecting plate 203 is limited between the upper nut and the lower nut. A spring connecting member is provided between the bottom of the second limiting screw 22 and the bottom of the sliding seat 205, and the spring always pulls the rear knife connecting plate 203 downward to press the wafer by the rear knife assembly 18.

[0043] In this embodiment, the coupling between the front knife connecting plate 201, the middle knife connecting plate 202 and the rear knife connecting plate 203 is realized through components such as the second rotating shaft 20, the third rotating shaft 21, the first limiting screw 10, the first adjusting screw 19 and the second limiting screw 22. The lifting of the middle knife connecting plate 202 is driven by the front knife connecting plate 201, and the lifting of the rear knife connecting plate 203 is driven by the middle knife connecting plate 202, and is limited by the upper and lower nuts. Once the rear knife assembly 18 presses the wafer, the upper nut is separated from the middle knife connecting plate 202, and the wafer is pressed by the spring at the lower part of the second limiting screw 22.

[0044] As Figure 3 and Figure 4 shown, the second feeding member 12 is connected to the rear knife assembly 18 through the sliding seat 205, and a transmission push rod is provided between the second feeding member 12 and the sliding seat 205; at the same time, two guide rails 207 are symmetrically provided inside the side plate 200, and multiple sets of roller groups 206 are symmetrically provided on both sides of the sliding seat 205, and the roller groups 206 are slidably nested on the guide rails 207. When the second feeding member 12 is screwed to push the sliding seat 205 to reciprocate along the guide rail 207, the rear knife assembly 18 reciprocates to adjust the size of the Bar strip 300.

[0045] As Figure 4As shown, in this embodiment, a jaw 23 is provided at the end of the sliding seat 205, and the rear tool assembly 18 cooperates with the jaw 23 to clamp the wafer; a clamping seat 204 is provided at the end of the side plate 200, and the clamping seat 204 cooperates with the front tool assembly 16 and the middle tool assembly 17 respectively to complete the cleavage of the wafer into Bar strips 300.

[0046] As Figure 2 shown, the rotary feeder further includes a fourth feeder 14. As Figure 1 , Figure 3 and Figure 6 shown, the stacking structure includes a first rotating shaft 2, a first cable 6 and a wafer pick-up clamp 27. The first rotating shaft 2 straddles the ends of two side plates 200 and is located below the front tool assembly 16. The wafer pick-up clamp 27 is nested on the first rotating shaft 2. The wafer pick-up clamp 27 is used to pick up the Bar strips 300 cleaved by the front tool assembly 16. The side part of the first rotating shaft 2 is connected to the fourth feeder 14 through the first cable 6. When the number of Bar strips 300 stored on the wafer pick-up clamp 27 reaches a certain amount, the fourth feeder 14 is screwed to pull the first cable 6 to drive the first rotating shaft 2 to rotate, so as to realize the rotation of the wafer pick-up clamp 27 between the front tool assembly 16 and the loading mechanism, and complete the transfer of the Bar strips 300.

[0047] As Figure 2 shown, the rotary feeder further includes a third feeder 13. As Figure 1 and Figure 6 shown, the stacking structure further includes a toggle lever 5, a second cable 7, a toggle block 25 and a tension spring 26. As Figure 7 shown, the loading mechanism includes a wafer carrier 9. A toggle spring 28 and a counterbore 91 for storing Bar strips 300 are provided on the wafer carrier 9. One end of the toggle spring 28 is fixedly connected to the wafer carrier 9, the other end of the toggle spring 28 contacts the toggle lever 5, and the middle part of the toggle spring 28 is located in the counterbore 91. The toggle block 25 is arranged at the end of the side plate 200 and is located above the first rotating shaft 2. One end of the toggle block 25 is connected to the third feeder 13 through the second cable 7, the other end of the toggle block 25 is connected to the toggle lever 5 through the tension spring 26, and the toggle lever 5 is located between the end of the side plate 200 and the wafer carrier 9.

[0048] When the third feeder 13 is screwed to make the second cable 7 pull the toggle block 25 to rotate, the toggle block 25 pulls the toggle lever 5 through the tension spring 26, and the toggle lever 5 pushes the toggle spring 28 out of the counterbore 91, leaving enough space for the wafer pick-up clamp 27 to store the Bar strips 300 in the counterbore 91. When the third feeder 13 is screwed to release the second cable 7, the toggle lever 5 releases the toggle spring 28, and the toggle spring 28 resets in the counterbore 91 to press the Bar strips 300 in the counterbore 91.

[0049] In this embodiment, the blades used for cleaving wafers are all coated with Teflon material (polytetrafluoroethylene PTFE), which has a very low coefficient of friction and excellent lubrication performance, making the blades smoother, facilitating the reduction of friction between the blades and the wafers, and reducing damage. A 0.2 mm sunken platform is designed on the surfaces such as the workpiece table and the surface of the wafer carrier 9 that may come into contact with the cleavage surface to ensure that only the two ends have surface contact during the clamping process of the wafer and the Bar strip 300, while the middle cleavage surface is effectively protected.

[0050] As Figure 8 shown, the loading mechanism further includes a loading seat 3, a lifting plate 4, a push rod 8, and a fourth rotating shaft 29. The middle part of the lifting plate 4 is provided with a third limit screw 30 and a second adjusting screw 31 to limit the displacement of the lifting plate 4 rotating up and down; one end of the lifting plate 4 is provided with four loading seats 3, and four wafer carriers 9 are respectively arranged on the four loading seats 3; the other end of the lifting plate 4 is nested on the fourth rotating shaft 29, the fourth rotating shaft 29 spans between two side plates 200, and one end of the fourth rotating shaft 29 is provided with a push rod 8, and the push rod 8 matches the third feeder 13. When the number of Bar strips 300 cached on the wafer carrier 9 reaches the preset quantity, the third feeder 13 is pushed horizontally to drive the push rod 8 to rotate, and the fourth rotating shaft 29 rotates along the Figure 8 arrow direction in the figure, driving the lifting plate 4 to tilt downward to facilitate the conversion of the wafer carrier 9.

[0051] As Figure 2 shown, the rotating feeder further includes a fifth feeder 15. As Figure 9 shown, the loading mechanism further includes a rotating table 32, a transmission rod 33, and a belt drive assembly 34. The loading seat 3 is arranged on the rotating table 32, the belt drive assembly 34 is arranged on the lifting plate 4 and is respectively connected to the transmission rod 33 and the rotating table 32, and the transmission rod 33 is connected to the fifth feeder 15. When the fifth feeder 15 is screwed, the belt drive assembly 34 drives the rotating table 32 to rotate to achieve the conversion of the wafer carrier 9. It can be understood that the belt drive assembly 34 adopts a conventional setting in the art. For example, a constant force spring can be used for transmission, and the specific structure will not be elaborated here.

[0052] In this embodiment, in the working state of the cleaving machine, the four rotating tables 32 are rotated and driven by the belt drive assembly 34 to rotate the cleaved Bar strips 300 to the transfer position and rotate the wafers to be cleaved to the cleaving position, so as to realize continuous cleaving by the cleaving knife. During the cleaving process, the moving distance of the rear knife assembly 18 determines the size of the Bar strip 300 after cleavage, and the linear motion of the rear knife assembly 18 is controlled by an independent second feeder 12 to ensure compatibility with wafers with a width of 12 - 16 mm and a length of 15 - 42 mm, and cleave them into Bar strips 300 with a cavity length of 1 - 6 mm.

[0053] AsFigure 10 As shown, in this embodiment, when the first feeder 11 rotates to push the transmission push rod of the cutting mechanism 1, the front knife assembly 16, the middle knife assembly 17, and the rear knife assembly 18 rotate together, and the rear knife assembly 18 first clamps the wafer. The first feeder 11 continues to move. At this time, the rear knife assembly 18 stops rotating due to the spring limit at the lower part of the second limit screw 22, and the front knife assembly 16 and the middle knife assembly 17 continue to rotate until the middle knife assembly 17 clamps the wafer downward. Subsequently, the first feeder 11 continues to move. At this time, only the front knife assembly 16 can rotate and cleaves the wafer into Bar strips 300 of corresponding sizes downward. When the rear knife assembly 18 first clamps the wafer, the second feeder 12 can push the trolley back and forth to adjust the size of the Bar strip 300 to be cleaved.

[0054] After the Bar strip 300 is cleaved, it falls onto the wafer pick-up clamp 27 and is stacked in sequence on the wafer pick-up clamp 27. Then, the third feeder 13 moves, pulling the toggle block 25 and the toggle rod 5 to actuate the toggle spring 28 on the wafer carrier 9. The fourth feeder 14 moves, pulling the first rotating shaft 2 and the wafer pick-up clamp 27 to rotate, so that the Bar strip 300 is transferred into the sink 91 of the wafer carrier 9.

[0055] When the wafer carrier 9 needs to be rotated, the third feeder 13 continues to move horizontally, pushing the push rod 8, so that the lifting plate 4 rotates around the fourth rotating shaft 29 to lower the wafer carrier 9. The fifth feeder 15 moves, pulling the belt drive assembly 34 to rotate, so that the rotating table 32 drives the wafer carrier 9 to rotate. When restoration is needed, the fifth feeder 15 moves in the reverse direction, and the belt drive assembly 34 moves in the reverse direction, so that the rotating table 32 drives the wafer carrier 9 to rotate in the reverse direction.

[0056] Although the present invention is disclosed above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make many possible changes and modifications to the technical solution of the present invention, or modify it into an equivalent embodiment with equivalent changes, without departing from the spirit and technical solution of the present invention. Therefore, any simple modification, equivalent replacement, equivalent change, and modification made to the above embodiments based on the technical essence of the present invention without departing from the technical solution of the present invention still fall within the scope of protection of the technical solution of the present invention.

Claims

1. A continuous cleaving knife, characterized in that: The continuous cleaving knife is installed on the ultra-high vacuum flange (100) of the chip cleaving machine, and comprises: a cutting mechanism (1), a rotary feed-in mechanism, a stacking structure and a bearing mechanism; the rotary feed-in mechanism is arranged outside the ultra-high vacuum flange (100), and the rotary feed-in mechanism comprises a plurality of rotary feed-in components, each rotary feed-in component penetrates the ultra-high vacuum flange (100) and is respectively connected to the cutting mechanism (1), the stacking structure and the bearing mechanism; the cutting mechanism (1) comprises a front knife assembly (16), a middle knife assembly (17) and a rear knife assembly (18) which are arranged in sequence, and the rear knife assembly (18) The component (18) is close to the ultra-high vacuum flange (100), the rear knife component (18) is used to clamp the chip to be cleaved and drive the chip to move, the middle knife component (17) is used to realize chip positioning, and the front knife component (16) is used to cleave the chip into Bar bars (300) of a preset size; the stacking structure is located between the front knife component (16) and the supporting mechanism, the stacking structure is used to collect the Bar bars (300) and transfer the Bar bars (300) to the supporting mechanism; the supporting mechanism is used to cache the Bar bars (300) to realize continuous chip cleavage.

2. The continuous cleaving knife according to claim 1, characterized in that: A side plate (200) is symmetrically arranged on the inner side of the ultra-high vacuum flange (100); a front knife connecting plate (201), a middle knife connecting plate (202), a rear knife connecting plate (203), and a second rotating shaft (20) and a third rotating shaft (21) are arranged in sequence on the side plate (200); the front knife connecting plate (201) and the middle knife connecting plate (202) are both nested on the second rotating shaft (20), the rear knife connecting plate (203) is nested on the third rotating shaft (21), and the front knife connecting plate (201) is connected to the rear knife connecting plate (203) and the middle knife connecting plate (202) through a limiting assembly; the front knife connecting plate (201) is connected to the front knife assembly (16), the middle knife connecting plate (202) is connected to the middle knife assembly (17), and the rear knife connecting plate (203) is connected to the rear knife assembly (18); The rotary feed-in component comprises a first feed-in component (11) and a second feed-in component (12); the first feed-in component (11) is connected to the front knife connecting plate (201) to drive the front knife assembly (16), the middle knife assembly (17) and the rear knife assembly (18) to rotate; the second feed-in component (12) is connected to the rear knife assembly (18) to drive the rear knife assembly (18) to move forward and backward in the horizontal direction, thereby adjusting the size of the Bar bar (300).

3. The continuous cleaving knife according to claim 2, characterized in that: The limiting assembly comprises a first limiting screw (10) symmetrically arranged on both sides of the end of the middle knife connecting plate (202), and a limiting block (24) symmetrically arranged on both sides of the front knife connecting plate (201), the first limiting screw (10) is provided with a flexible connecting piece above the middle knife connecting plate (202), the limiting block (24) cooperates with the side plate (200), and the first limiting screw (10) and the limiting block (24) are used to limit the lifting and lowering of the middle knife assembly (17).

4. The continuous cleaving knife according to claim 3, characterized in that: The limiting assembly further comprises first adjusting screws (19) symmetrically arranged on both sides of the middle blade connecting plate (202), wherein the first adjusting screws (19) are located between the first limiting screw rod (10) and the second limiting screw rod (22); When the cutting mechanism (1) moves upward in the vertical direction, the front knife connecting plate (201) presses against the first adjusting screw (19) to drive the middle knife assembly (17) to move upward; when the cutting mechanism (1) moves downward in the vertical direction, if the middle knife assembly (17) clamps the wafer, the first adjusting screw (19) separates from the front knife connecting plate (201), and the flexible connecting piece on the first limiting screw (10) assists the middle knife assembly (17) to press the silicon wafer.

5. The continuous cleaving knife according to claim 3, characterized in that: The limiting assembly also includes a sliding seat (205) connected to the third rotating shaft (21), and a second limiting screw (22) which vertically passes through the middle knife connecting plate (202), the rear knife connecting plate (203) and the sliding seat (205), and a flexible connecting piece is provided between the bottom of the second limiting screw (22) and the bottom of the sliding seat (205). The second limiting screw (22) is used to limit the rotation of the middle knife assembly (17) and the rear knife assembly (18), and to enable the rear knife assembly (18) to press the wafer.

6. The continuous cleaving knife according to claim 5, characterized in that: The second feed-in component (12) is connected to the rear blade assembly (18) via a sliding seat (205); a guide rail (207) is symmetrically provided on the inner side of the side plate (200); a plurality of roller groups (206) are symmetrically provided on both sides of the sliding seat (205); the roller groups (206) are slidably nested on the guide rail (207); when the second feed-in component (12) pushes the sliding seat (205) to reciprocate along the guide rail (207), the rear blade assembly (18) can be reciprocated.

7. The continuous cleaving knife according to any one of claims 1 to 6, characterized in that: The rotating feed component also includes a fourth feed component (14); the stacking structure includes a first rotating shaft (2), a first cable (6) and a film taking clamp (27); the first rotating shaft (2) spans across the ends of the two side panels (200) and is located below the front knife assembly (16); the film taking clamp (27) is nested on the first rotating shaft (2); the side of the first rotating shaft (2) is connected to the fourth feed component (14) through the first cable (6); when the fourth feed component (14) pulls the first cable (6) to drive the first rotating shaft (2) to rotate, the film taking clamp (27) is rotated between the front knife assembly (16) and the bearing mechanism to complete the transfer of the Bar strip (300).

8. The continuous cleaving knife according to claim 7, characterized in that: The rotary feed-in component also includes a third feed-in component (13); the stacking structure also includes a toggle lever (5), a second cable (7), a toggle block (25) and a tension spring (26); the bearing mechanism includes a sheet support (9), the sheet support (9) is provided with a toggle lever spring (28) and a sink (91) for storing the Bar strip (300), one end of the toggle lever spring (28) is connected and fixed to the sheet support (9), and the other end of the toggle lever spring (28) is connected to the toggle lever (5) is in contact with the toggle rod spring (28), and the middle part of the toggle rod spring (28) is located in the sink (91); the toggle block (25) is arranged at the end of the side plate (200) and is located above the first rotating shaft (2), one end of the toggle block (25) is connected to the third feed-in component (13) through the second cable (7), and the other end of the toggle block (25) is connected to the toggle rod (5) through the tension spring (26), and the toggle rod (5) is located between the end of the side plate (200) and the sheet support (9); When the third feed-in component (13) is rotated to make the second cable (7) pull the toggle block (25) to rotate, the toggle block (25) pulls the toggle lever (5) through the tension spring (26), and the toggle lever (5) pushes the toggle lever spring (28) out of the sink (91), so that the film clip (27) can store the Bar bar (300) in the sink (91); when the third feed-in component (13) is rotated to loosen the second cable (7), the toggle lever (5) loosens the toggle lever spring (28), and the toggle lever spring (28) presses the Bar bar (300) in the sink (91).

9. The continuous cleaving knife according to claim 8, characterized in that: The bearing mechanism further comprises a bearing seat (3), a lifting plate (4), a pushing rod (8) and a fourth rotating shaft (29); one end of the lifting plate (4) is provided with a plurality of bearing seats (3), the film holder (9) is arranged on the bearing seat (3), the other end of the lifting plate (4) is nested on the fourth rotating shaft (29), the fourth rotating shaft (29) spans between the two side plates (200), and one end of the fourth rotating shaft (29) is provided with a pushing rod (8), the pushing rod (8) matches the third feeding member (13), when the third feeding member (13) is pushed to drive the pushing rod (8) to rotate, the fourth rotating shaft (29) drives the lifting plate (4) to tilt downward, so as to facilitate the conversion of the film holder (9).

10. The continuous cleaving knife according to claim 9, characterized in that: The rotary feed-in component further comprises a No. 5 feed-in component (15); the bearing mechanism further comprises a rotating platform (32), a transmission rod (33) and a pulley transmission assembly (34); the bearing seat (3) is arranged on the rotating platform (32); the pulley transmission assembly (34) is arranged on the lifting plate (4) and is respectively connected to the transmission rod (33) and the rotating platform (32); the transmission rod (33) is connected to the No. 5 feed-in component (15); when the No. 5 feed-in component (15) is screwed, the pulley transmission assembly (34) drives the rotating platform (32) to rotate, so as to realize the conversion of the sheet support (9).

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