Reaction furnace with scraper discharging device for CVD (chemical vapor deposition) method

Abstract

The invention discloses a reacting furnace with a scraper discharging device used in a CVD (chemical vapor deposition) method, which is characterized in that the reacting furnace comprises a belt type conveying device and a furnace body, the belt type conveying device arranged in the furnace body comprises a belt and a roller, the belt is a substrate for preparing sediments by the CVD method, the roller comprises a discharging roller, the discharging roller comprises a shaft and a cylinder, and an enveloping cylinder is wrapped outside the belt; the furnace body comprises an initial section, a reaction section and a discharging section, and chemical reaction products grow on a belt of the reaction section and are discharged at the discharging section; the discharging roller is installed in the discharging section, the discharging section comprises a scraper device, the scraper device comprises a scraper seat and a scraper, the scraper seat and the scraper are fixedly connected into a whole, the scraper comprises a blade, the scraper seat comprises a positioning hole, and the shaft is sleeved with the scraper device through the positioning hole. The device has the main advantages that continuous automatic production is achieved, efficiency is high, energy consumption is low, and the gap between the cutting edge and the steel belt can be guaranteed and adjusted according to needs.

Description

Technical Field

[0001] The present invention relates to the technical field of production equipment for chemical vapor deposition, and particularly to a reaction furnace with a scraper discharging device in the CVD method. Background Art

[0002] In the existing chemical vapor deposition method, the substrates for generating deposits in a horizontal reaction furnace are all discontinuous. For example, the carbon nanotubes generated in the horizontal reaction furnace in the CVD method are all deposited in containers made of substrate materials such as quartz boats or stainless steel material boxes. These containers are arranged one by one and are not interconnected in the horizontal furnace, and it is particularly difficult to discharge the carbon nanotubes attached to the inner wall of the container.

[0003] Currently, the addition of the catalyst and the discharging of the carbon nanotubes both need to be cooled to room temperature first and then completed through manual operations. This not only increases a large amount of energy consumption, but also makes it difficult to achieve unmanned automated continuous production under such high-temperature conditions. Therefore, the production capacity is greatly limited.

[0004] As emerging frontier materials, carbon nanotubes and carbon nanotube fibers have received extensive attention and research in the scientific and industrial communities due to their unique physical and chemical properties and broad application potential. Currently, there are three methods for preparing carbon nanotube fibers from carbon nanotubes in various countries in the world: wet spinning method, carbon nanotube array spinning method, and floating catalyst spinning method. Among them, the carbon nanotube fibers produced by the carbon nanotube array spinning method have the highest cleanliness. However, due to the discontinuous and small area of the substrate container, continuous production cannot be achieved, the production capacity is low, and the price is extremely expensive. That is, the existing technical bottleneck is that the area of the carbon nanotube growth substrate provided by the traditional structure is limited and the operation is intermittent.

[0005] In summary, it is urgent to seek a solution that can provide an unlimited growth substrate area for carbon nanotubes and enable continuous production. Summary of the Invention

[0006] Aiming at the problems existing in the prior art, the purpose of the present invention is to provide a reaction furnace with a scraper discharging device in the CVD method to solve the problems mentioned in the above background art.

[0007] To achieve the above object, the present invention provides the following technical solutions: The horizontal reaction furnace 1 continuously produced by chemical vapor deposition method includes a belt conveyor 2 and a furnace body 3. The belt conveyor 2 installed in the furnace body 3 includes a belt 2A and rollers 4. The belt 2A is the substrate for preparing the deposit by CVD method. The roller 4 includes a discharge roller 4A. The discharge roller 4A includes a shaft 4A1 and a cylinder 4A2. The belt 2A envelopes the cylinder 4A2. The furnace body 3 includes an initial section 5, a reaction section 7 and a discharge section 8. The chemical reaction product grows on the belt 2A in the reaction section 7 and is discharged in the discharge section 8. The discharge roller 4A is installed in the discharge section 8. The discharge section 8 includes a scraper device 9. The scraper device 9 includes a scraper seat 9A and a scraper 9B. The scraper seat 9A and the scraper 9B are integrally connected. The scraper 9B includes a cutting edge 9B1. The scraper seat 9A includes a positioning hole 9A1. The scraper device 9 is sleeved on the shaft 4A1 through the positioning hole 9A1.

[0008] As a further aspect of the present invention: The reaction furnace 1 includes a reaction furnace for preparing carbon nanotubes. The belt 2A includes a stainless steel belt. Carbon nanotubes grow on the belt 2A in the furnace body 3 and are discharged in the discharge section 8.

[0009] As a further aspect of the present invention: The scraper device 9 cuts and peels off the chemical reaction product adhering to the belt 2A through the cutting edge 9B1 on the scraper 9B. The peeled chemical reaction product falls by gravity to complete the discharge.

[0010] As a further aspect of the present invention: The scraper device 9 includes an integral scraper device 91. The scraper seat 9A and the scraper 9B in the integral scraper device 91 adopt an integral structure.

[0011] As a further aspect of the present invention: The scraper device 9 includes a split scraper device 92. The split scraper seat 92A and the split scraper 92B in the split scraper device 92 adopt independent structures.

[0012] As a further aspect of the present invention: The split scraper device 92 includes a gap adjustment device 6. The gap adjustment device 6 includes an adjustment nut 6A. The split scraper seat 92A includes a screw head 92A1 at the end. The split scraper 92B includes a threaded hole 92B1. The split scraper 92B is sleeved on the screw head 92A1 through the threaded hole 92B1, and then the gap between the cutting edge 9B1 and the belt 2A is adjusted through the adjustment nut 6A.

[0013] As a further solution of the present invention: the scraper device 9 includes an angle adjustment device 10, and the angle adjustment device 10 includes an adjustment screw 10A. One end of the adjustment screw 10A is connected to the discharge section 8, and the other end is connected to the scraper seat 9A or the scraper 9B; by adjusting the length of the center distance between the two fixed positions of the adjustment screw 10A, the angle of the scraper seat 9A relative to the discharge roller 4A is adjusted.

[0014] As a further solution of the present invention: the discharge roller 4A includes a driving roller.

[0015] In summary, compared with the prior art, since the present invention adopts a unique structure with a belt as the base, a continuous production solution is provided, and the specific advantages are as follows: 1) Since the belt in the conveyor runs continuously, the base area in the CVD method is not limited; 2) Because the conveyor belt is flat, the discharge and cleaning of carbon nanotubes are particularly easy; 3) Low energy consumption; 4) Since the gap between the cutting edge and the steel belt can be guaranteed, the discharge of carbon nanotubes is particularly convenient. Description of the Drawings

[0016] Figure 1 It is a schematic structural diagram of the belt conveyor device 2 and the furnace body 3 that make up the horizontal reaction furnace 1, and also a schematic structural diagram of the belt 2A and the roller 4 that make up the belt conveyor device 2, and also a schematic structural diagram of the discharge roller 4A, the shaft 4A1 and the cylinder 4A2, and also a schematic structural diagram of the scraper seat 9A and the scraper 9B that make up the scraper device 9, and also a schematic structural diagram of the overall scraper device 91, and still a schematic structural diagram of the initial section 5, the reaction section 7 and the discharge section 8 that make up the furnace body 3; Figure 2 It is Figure 1 A-A cross-sectional view of; Figure 3 It is a schematic structural diagram of the split scraper device 92 and also a schematic structural diagram of the angle adjustment device 10; Figure 4 It is Figure 3 The partial enlarged view at I in; Figure 5 It is Figure 3 View in the direction of B of; Figure 6 It is a schematic structural diagram of the integral furnace body 3.

[0017] Reactor 1, belt conveyor 2, belt 2A, furnace body 3, roller 4, discharge roller 4A, shaft 4A1, cylinder 4A2, initial section 5, gap adjustment device 6, adjusting nut 6A, reaction section 7, discharge section 8, scraper device 9, scraper seat 9A, positioning hole 9A1, scraper 9B, cutting edge 9B1, integral scraper device 91, split scraper device 92, split scraper seat 92A, screw head 92A1, split scraper 92B, screw hole 92B1, angle adjustment device 10, adjusting screw 10A. Detailed implementation

[0018] The following will describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0019] Please refer to Figures 1-6 In the embodiment of the present invention, the horizontal reactor 1 for continuous production by chemical vapor deposition method includes a belt conveyor 2 and a furnace body 3. The belt conveyor 2 installed in the furnace body 3 includes a belt 2A and rollers 4. The belt 2A is the substrate for preparing the deposit by CVD method. The roller 4 includes a discharge roller 4A, and the discharge roller 4A includes a shaft 4A1 and a cylinder 4A2. The belt 2A envelopes the cylinder 4A2. The furnace body 3 includes an initial section 5, a reaction section 7, and a discharge section 8. The chemical reaction products grow on the belt 2A in the reaction section 7 and are discharged in the discharge section 8. The discharge roller 4A is installed in the discharge section 8. The discharge section 8 includes a scraper device 9. The scraper device 9 includes a scraper seat 9A and a scraper 9B. The scraper seat 9A and the scraper 9B are integrally connected. The scraper 9B includes a cutting edge 9B1. The scraper seat 9A includes a positioning hole 9A1. The scraper device 9 is sleeved on the shaft 4A1 through the positioning hole 9A1.

[0020] The reactor 1 includes a reactor for preparing carbon nanotubes. The belt 2A includes a stainless steel belt. Carbon nanotubes grow on the belt 2A in the furnace body 3 and are discharged in the discharge section 8.

[0021] The scraper device 9 cuts and peels off the chemical reaction products adhering to the belt 2A through the cutting edge 9B1 on the scraper 9B. The peeled chemical reaction products fall by gravity to complete the discharge.

[0022] The scraper device 9 includes an integral scraper device 91. The scraper seat 9A and the scraper 9B in the integral scraper device 91 adopt an integral structure.

[0023] The described scraper device 9 includes a split scraper device 92, and the split scraper seat 92A and the split scraper 92B in the split scraper device 92 adopt independent structures respectively.

[0024] The described split scraper device 92 includes a gap adjustment device 6. The gap adjustment device 6 includes an adjustment nut 6A. The split scraper seat 92A includes a screw head 92A1 at the end, and the split scraper 92B includes a threaded hole 92B1. The split scraper 92B is sleeved on the screw head 92A1 through the threaded hole 92B1, and then the gap between the cutting edge 9B1 and the belt 2A is adjusted by the adjustment nut 6A.

[0025] The described scraper device 9 includes an angle adjustment device 10. The angle adjustment device 10 includes an adjustment screw 10A. One end of the adjustment screw 10A is connected to the discharge section 8, and the other end is connected to the scraper seat 9A or the scraper 9B. By adjusting the length of the center distance between the two fixed positions at both ends of the adjustment screw 10A, the angle of the scraper seat 9A relative to the discharge roller 4A is adjusted.

[0026] It should be noted that: the angle adjustment device 10 can also be an anti-rotation device of the scraper device 9.

[0027] The described discharge roller 4A includes a driving roller.

[0028] It should be noted that: the roller 4 includes a driving roller and a driven roller.

[0029] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "front", "rear", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation to the present invention. In the present invention, it should also be noted that the terms "installation" and "connection" should be understood in a broad sense. For example, it can be fixedly connected, or detachably connected, or integrally formed, or mechanically connected, or indirectly connected through an intermediate medium. The specific meaning of the terms in the present invention can be understood according to specific situations.

[0030] In addition, it should be understood that although this specification is described according to embodiments, not every embodiment only contains an independent technical solution. This narrative way of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A reactor with a scraper discharge device for use in a CVD method, characterized in that The horizontal reaction furnace (1) for continuous production using a chemical vapor deposition method comprises a belt conveyor (2) and a furnace body (3). The belt conveyor (2) installed in the furnace body (3) comprises a belt (2A) and a roller (4). The belt (2A) is a substrate for preparing a deposit using a CVD method. The roller (4) comprises a discharge roller (4A). The discharge roller (4A) comprises a shaft (4A1) and a cylinder (4A2). The belt (2A) wraps around the cylinder (4A2). The furnace body (3) comprises an initial section (5), a reaction section (7) and a discharge section (8). Chemical reaction products grow on the belt (2A) in the reaction section (7) and are discharged in the discharge section (8). The discharge roller (4A) is installed in the discharge section (8). The discharge section (8) includes a scraper device (9). The scraper device (9) includes a scraper seat (9A) and a scraper (9B). The scraper seat (9A) and the scraper (9B) are fixedly connected to form a whole. The scraper (9B) includes a blade (9B1). The scraper seat (9A) includes a positioning hole (9A1). The scraper device (9) is sleeved on the shaft (4A1) through the positioning hole (9A1).

2. A reactor with a scraper discharge device for CVD method according to claim 1, characterized in that The reaction furnace (1) comprises a reaction furnace for preparing carbon nanotubes, and the belt (2A) comprises a stainless steel belt; the carbon nanotubes grow on the belt (2A) in the furnace body (3) and are discharged in the discharge section (8).

3. A reactor with a scraper discharge device for CVD method according to claim 2, characterized in that The scraper device (9) cuts and peels off the chemical reaction products adhering to the belt (2A) through the blade (9B1) on the scraper (9B), and the peeled chemical reaction products fall due to gravity to complete the discharge.

4. A reactor with a scraper discharge device for CVD method according to claim 3, characterized in that The scraper device (9) comprises an integral scraper device (91), wherein the scraper seat (9A) and the scraper (9B) in the integral scraper device (91) adopt an integrated structure.

5. The reaction furnace with a scraper discharge device for CVD method according to claim 3, characterized in that The scraper device (9) comprises a split scraper device (92), wherein the split scraper seat (92A) and the split scraper (92B) in the split scraper device (92) have independent structures.

6. A reactor with a scraper discharge device for CVD method according to claim 5, characterized in that The split scraper device (92) comprises a gap adjustment device (6), the gap adjustment device (6) comprises an adjustment nut (6A), the split scraper seat (92A) comprises a screw head (92A1) located at the end, and the split scraper (92B) comprises a screw hole (92B1); the split scraper (92B) is sleeved on the screw head (92A1) through the screw hole (92B1), and the gap between the blade (9B1) and the belt (2A) is adjusted by the adjustment nut (6A).

7. A reactor with a scraper discharge device for CVD method according to claim 4 or 6, characterized in that The scraper device (9) includes an angle adjustment device (10), and the angle adjustment device (10) includes an adjustment screw (10A), one end of the adjustment screw (10A) is connected to the discharge section (8), and the other end is connected to the scraper seat (9A) or the scraper (9B); by adjusting the length of the center distance between the fixed positions at both ends of the screw (10A), the angle of the scraper seat (9A) relative to the discharge roller (4A) is adjusted.

8. The reaction furnace with a scraper discharge device for CVD method according to claim 1, characterized in that The discharge roller (4A) comprises a driving roller.

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