Semiconductor inventory equipment maintenance system and method

By using mixed reality technology and deep learning models, a virtual perspective model of semiconductor storage equipment is generated, highlighting the location and cause of faults. This solves the problem that operators have difficulty in quickly locating and handling faults in existing technologies, and improves equipment maintenance efficiency and display effects.

CN120087937BActive Publication Date: 2026-06-12SUZHOU XINSHINUO SEMICON EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SUZHOU XINSHINUO SEMICON EQUIP CO LTD
Filing Date
2024-12-31
Publication Date
2026-06-12

AI Technical Summary

⚠Technical Problem

When existing semiconductor material storage equipment malfunctions or alarms, it requires professional personnel to inspect and handle the situation. Operators often find it difficult to intuitively and quickly understand the location and cause of the fault, which affects equipment maintenance efficiency.

⚗Method used

Using mixed reality technology, a virtual perspective model of semiconductor storage equipment is generated through MR devices to highlight the location and cause of faults and provide troubleshooting solutions. The fault type is identified by combining a deep learning model, and the display effect is improved by using generative adversarial networks and texture mapping technology.

🎯Benefits of technology

Operators can intuitively determine the location and cause of the fault, quickly handle the fault, improve maintenance efficiency, reduce the requirement for professional knowledge, and enhance the display effect and imaging quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application discloses a semiconductor storage equipment maintenance system and method, wherein the semiconductor storage equipment maintenance system comprises a server and an MR device; the server stores device structure model data of a semiconductor storage equipment, communicates with the semiconductor storage equipment to obtain operation data of the semiconductor storage equipment, and communicates with the MR device to provide data for the MR device; the MR device generates a mixed reality image according to data collected by itself and data obtained from the server and displays the mixed reality image to an operator wearing the MR device; when the MR device receives information about a fault of the semiconductor storage equipment, the MR device generates a mixed reality image which fuses a virtual perspective model of the semiconductor storage equipment, displays the mixed reality image to the operator wearing the MR device, highlights a fault position corresponding to the fault in the virtual perspective model, and displays a reason corresponding to the fault and a troubleshooting scheme. The application enables the operator to intuitively determine an actual position of the fault position in the equipment, and simultaneously displays information such as the reason of the fault and the troubleshooting scheme, thereby facilitating troubleshooting and processing of the fault, greatly facilitating the development of maintenance work, and reducing requirements on the operator.
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