Graphite boat flow transfer apparatus and method

Abstract

The application discloses a graphite boat flow transfer equipment and a method thereof, and belongs to the technical field of graphite boat conveying. In the graphite boat flow transfer equipment, the well-processed graphite boats are stacked in the same empty tray and conveyed to a boat logistics cooling unit through a main machine channel, the upper and lower two layers of graphite boats are divided into different cooling stations through a graphite boat lifting tool, manual observation and treatment are performed after cooling, the graphite boats are conveyed to double-slot inserting positions of a boat loading and unloading unit after manual observation and treatment, and the silicon wafers are loaded and unloaded, the silicon wafers without film coating process are inserted into the graphite boats and then conveyed to an observation station through the lifting tool for manual observation and treatment, and the graphite boats are conveyed to a main machine for film coating process after completion. The graphite boat flow transfer equipment and the method thereof can reduce the equipment area, optimize the transmission and cooling process of the battery wafer, reduce the equipment downtime, and improve the overall production efficiency and film coating quality.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of graphite boat conveying, and particularly relates to a graphite boat flow transfer device and a method thereof. BACKGROUND

[0002] In the field of battery piece production, the application of automatic equipment is increasingly widespread, especially in the film plating process of battery pieces. At present, the mainstream film plating equipment on the market is a 6-tube film plating equipment, and the mainstream loading capacity of each furnace tube is 768Pcs. These devices automatically load battery pieces into graphite boat carriers and then transmit them to high-temperature film plating process equipment. After the process is completed, the automatic equipment takes out the battery pieces that have completed the process and loads them into a flower basket, while loading the unprocessed silicon pieces into the graphite boat for further film plating process.

[0003] Although the automatic equipment improves production efficiency, the existing technology has some limitations. At present, the stacked boat film plating automation usually needs to be transmitted, cooled and manually processed through two sections of flow transfer. First, the double-layer boat coming out of the process machine passes through the first section, the gripper grabs the graphite boat to the cooling position one by one, and then transports it to the second section of the conveying position, and distributes it to different plug-in positions for loading and unloading. This results in a relatively long equipment footprint, and the time overlap of the in-out main machine easily leads to equipment downtime. SUMMARY

[0004] In order to solve the above-mentioned problems in the prior art, the present application provides a graphite boat flow transfer device and method, which can reduce the equipment footprint, optimize the transmission and cooling process of battery pieces, reduce equipment downtime, and improve overall production efficiency and film plating quality.

[0005] The technical scheme is as follows:

[0006] On the one hand, a graphite boat flow transfer device is provided, comprising a boat logistics cooling unit and a boat loading and unloading unit,

[0007] The boat loading and unloading unit comprises a six-axis robot for loading and unloading pieces, a B piece insertion channel, an A piece insertion channel and an observation channel (2-2);

[0008] The boat logistics cooling unit comprises an inlet host channel on the lower layer, an outlet host channel on the lower layer, a circulation channel on the lower layer, a cooling station on the upper layer, a first observation station on the upper layer, a second observation station on the upper layer, the circulation channel on the lower layer and a graphite boat hoist, the boat logistics cooling unit interacts with the host through the inlet host channel or the outlet host channel, the graphite boat is arranged on the inlet host channel, the circulation channel and the outlet host channel, the graphite boat can load two layers of graphite boats stacked up and down on the graphite boat support, the upper graphite boat and the lower graphite boat are carried to the cooling station, the first observation station and the second observation station through the graphite boat hoist, the outlet host channel is used for receiving the graphite boat loaded with the processed silicon wafer transferred out from the host, the inlet host channel is used for transferring the graphite boat without processing to the host, the graphite boat on the circulation channel is transferred on the circulation channel, an A wafer channel and an observation channel respectively, the graphite boat on the A wafer channel is transferred to the observation channel for manual observation after the loading and unloading of the silicon wafer is completed, and the graphite boat is returned to the circulation channel after the observation is normal; the boat logistics cooling unit is connected with the boat wafer loading and unloading unit through the circulation channel, the inlet host channel and the outlet host channel.

[0009] In another aspect, a graphite boat transfer method is provided, comprising the following steps:

[0010] S1: a group of graphite boats processed by a coating process are transported to the boat logistics cooling unit through the outlet host channel, and the group of graphite boats is provided with two layers of graphite boats stacked up and down;

[0011] S2: the two layers of graphite boats are divided into different cooling stations, and after cooling, the upper and lower graphite boats are respectively observed at the corresponding observation stations;

[0012] S3: after manual observation, the graphite boats are transmitted to the double-wafer channel of the boat wafer loading and unloading unit for loading and unloading of the silicon wafer, and the silicon wafer without coating process is inserted into the graphite boat and then transmitted to the host through the inlet host channel for coating process;

[0013] S4: steps S1 to S3 are cyclically executed.

[0014] The technical scheme at least has the following technical effects:

[0015] The stacked boat group stacked up and down transported from the host is transmitted to the boat logistics cooling unit for cooling at different cooling stations, and after the two layers of graphite boats are cooled simultaneously, observation is performed; after manual processing, the graphite boats are transmitted to the double-wafer insertion position of the boat wafer loading and unloading unit for wafer loading and unloading, which is convenient to operate and occupies less area, optimizes the transmission and cooling process of the battery wafer, reduces the equipment downtime, and improves the overall production efficiency and coating quality.

[0016] It should be understood that the above general description and the following detailed description are only exemplary and cannot limit the present application. BRIEF DESCRIPTION OF DRAWINGS

[0017] The accompanying drawings, which are incorporated herein and constitute part of this specification, illustrate embodiments consistent with the application and, together with the description, further serve to explain the principles of the application.

[0018] Figure 1 Structure diagram of the stacked boat coating equipment of an exemplary embodiment of the present application;

[0019] Figure 2 Structure diagram of the stacked boat coating equipment of an exemplary embodiment of the present application from another angle;

[0020] Figure 3 Timing diagram of the stacked boat coating equipment of an exemplary embodiment of the present application;

[0021] Figure 4 Flow chart of the stacked boat coating equipment of an exemplary embodiment of the present application;

[0022] Figure 5 Structure diagram of the stacked boat coating equipment of an exemplary embodiment of the present application when the host channel, with some parts hidden;

[0023] Figure 6 Structure diagram of the stacked boat coating equipment of an exemplary embodiment of the present application when the host channel is transported to the cooling station and then to the manual observation station, with some parts hidden;

[0024] Figure 7 Structure diagram of the stacked boat coating equipment of an exemplary embodiment of the present application when the host channel is transported to the circulation channel and then to the A-insertion piece channel, with some parts hidden;

[0025] Figure 8 Structure diagram of the stacked boat coating equipment of an exemplary embodiment of the present application when the host channel is transported to the B-insertion piece channel, with some parts hidden;

[0026] Figure 9 Structure diagram of the stacked boat coating equipment of an exemplary embodiment of the present application when the circulation channel is transported to the observation channel, with some parts hidden;

[0027] BRIEF DESCRIPTION OF THE DRAWINGS

[0028] 1, boat logistics cooling unit; 1-1, fan; 1-2, graphite boat hanger; 1-3, first cooling station; 1-4, second cooling station; 1-5, third cooling station; 1-6, fourth cooling station; 1-7, buffer station; 1-8, first observation station; 1-9, second observation station; 1-10, main machine access channel; 1-11, main machine exit channel; 1-12, circulation channel; 2, boat loading and unloading unit; 2-1, six-axis robot; 2-2, observation channel; 2-3, B plug channel; 2-4, A plug channel; 3, graphite boat; 4, boat holder. DETAILED DESCRIPTION

[0029] The exemplary embodiments will be described in detail herein with reference to the attached drawings. In the following description, like reference numerals refer to like elements, unless the context clearly dictates otherwise. The following exemplary embodiments described are not meant to represent all embodiments consistent with the present invention. Rather, they are merely examples of apparatus and methods consistent with some aspects of the present invention as detailed in the appended claims.

[0030] Embodiment One:

[0031] As shown in the accompanying drawings, Figure 1 and Figure 2 The embodiment of the present application provides a graphite boat logistics equipment, including, boat logistics cooling unit 1 and boat loading and unloading unit 2, boat logistics cooling unit 1 through circulation channel 1-12, main machine access channel 1-11, main machine exit channel 1-10 and boat loading and unloading unit 2 docking.

[0032] The boat loading and unloading unit 2 includes a six-axis robot 2-1 for loading and unloading, B plug channel 2-3, A plug channel 2-4 and observation channel 2-2;

[0033] The boat logistics cooling unit 1 includes a lower-layer main machine access channel 1-11, a lower-layer main machine exit channel 1-10, a lower-layer circulation channel 1-12, an upper-layer cooling station, an upper-layer first observation station 1-8, an upper-layer second observation station 1-9, a lower-layer circulation channel 1-12, and a graphite boat hoist 1-2. The boat logistics cooling unit 1 interacts with the main machine through the main machine access channel 1-11 or the main machine exit channel 1-10. The main machine access channel 1-11, the circulation channel 1-12, and the main machine exit channel 1-10 are provided with a boat support 4. The boat support 4 can load two layers of graphite boats stacked up and down. The upper-layer graphite boats and the lower-layer graphite boats are carried to the cooling station, the first observation station 1-8, and the second observation station 1-9 by the graphite boat hoist 1-2. The main machine exit channel 1-10 is used to receive the graphite boats loaded with processed silicon wafers from the main machine. The main machine access channel 1-11 is used to transmit unprocessed graphite boats to the main machine. The graphite boats on the circulation channel 1-12 flow through the circulation channel 1-12, an A plug channel 2-4, and an observation channel 2-2. After the graphite boats on the A plug channel 2-4 finish loading and unloading the silicon wafers, they flow through the circulation channel 1-12 to the observation channel 2-2 for manual observation of abnormalities. After no abnormalities are observed, the graphite boats return to the circulation channel 1-12.

[0034] The boat support 3 is made of metal material, preferably stainless steel and aluminum.

[0035] The device overlaps the manual observation positions when accessing and exiting the main machine in different time periods. The main machine can buffer up to four groups of graphite boats, each group of graphite boats can load two layers of graphite boats stacked up and down, and up to eight graphite boats can be buffered, which can leave a certain buffering time for automation and eliminate the production capacity loss caused by the interaction time of the main machine and automation. The device is convenient to operate and occupies less area. The graphite boat 3 is loaded with silicon wafers 5. A belt is provided on the runway to drive the boat support to move on the runway. The graphite boat hoist 1-2 is provided with a gripper to carry the graphite boat.

[0036] The cooling station includes a first cooling station 1-3 on the upper layer, a second cooling station 1-4 on the upper layer, a third cooling station 1-5 on the middle layer, and a fourth cooling station 1-6 on the middle layer. The cooling station is provided with a fan 1-1 connected with the power output end of a motor. The fan 1-1 is driven by the motor to move on the runway. The fan 1-1 on the cooling station can move. There are actually three buffering positions, two cooling positions, and one separate buffering position.

[0037] The first observation station 1-8 on the upper layer and the second observation station 1-9 on the upper layer are horizontally moved on the runway by a motor drive, and the first observation station 1-8 can be moved along the direction of the boat loading and unloading unit. The cooled graphite boat is manually observed and processed for abnormality on the first observation station 1-8 on the upper layer and the second observation station 1-9 on the upper layer, the unprocessed graphite boat about to enter the main machine is manually observed and processed for abnormality on the observation passage 2-2 on the lower layer and the entrance passage 1-11 of the main machine, the upper graphite boat on the observation passage 2-2 on the lower layer and the boat support 4 are transferred to the circulation passage 1-12, the upper graphite boat in the circulation passage 1-12 is carried and stacked on the lower graphite boat on the entrance passage 1-11 by the graphite boat lifting device 1-2, and then the graphite boat is transferred into the main machine through the entrance passage 1-11.

[0038] Embodiment two:

[0039] As shown in Figure 3 and Figure 4 , the embodiment of the present application provides a graphite boat transfer method, and the specific process is as follows:

[0040] S1: the first group of graphite boats are transported from the main machine to the boat logistics cooling unit 1 through the exit passage 1-10 of the main machine;

[0041] The graphite boat with a film coating process is transported to the boat logistics cooling unit 1 through the exit passage 1-10 of the main machine, and there are two layers of graphite boats stacked on the tray, and the exit passage 1-10 is horizontally moved from the rightmost side to the middle position.

[0042] S2: the upper and lower two layers of graphite boats are divided into different cooling stations, and after cooling, the upper and lower layers of graphite boats are respectively transferred to the corresponding observation station for manual observation and processing;

[0043] Two graphite boats are carried separately, the upper graphite boat (a1 in Figure 3 ) is carried to the cooling station by the graphite boat lifting device first, and is cooled in any one of the four cooling stations (cooling A1 in Figure 3 ), after the gripper returns to the lower graphite boat, the lower graphite boat (b1 in Figure 3 ) is carried to any one of the remaining three cooling stations for cooling (cooling B1 in Figure 3 ), then, the second group of graphite boats comes after 10 minutes, and the first group of graphite boats is cooled when the third group of graphite boats comes out; after 14 minutes, the first group of two graphite boats has been cooled, the upper graphite boat (a1 in Figure 3 ) of the first group is carried to the first observation station 1-8 (observation 2 in Figure 3 ), and then the lower graphite boat (b1 in Figure 3 ) is carried to the second observation station 1-9 (observation 3 inFigure 3 S2: After the observation 1) in the observation channel 2-2, the observation 2) is carried out for 2 minutes, the lower graphite boat (attached Figure 5 - Figure 9 S1: The b1) in the observation channel 2-2 is carried back to the out host channel 1-10, the first group of boat holders move the boat material cooling platform and the boat loading and unloading platform on the runway to the interface, the second group of graphite boat holders enter the out host channel 1-10, the graphite boat observed by the artificial observation is placed on the boat holder, and the graphite boat observed by the artificial observation is transferred from the out host channel 1-10 to the boat loading and unloading platform;

[0044] S3: After the artificial observation treatment, the double-channel plug-in position of the boat loading and unloading piece unit 2 is transmitted to load and unload the silicon wafer, the silicon wafer without film coating process is inserted into the graphite boat, and then the silicon wafer is transmitted to the host through the in-host channel 1-11 to carry out the film coating process;

[0045] The lower graphite boat is first inserted into the silicon wafer, an already processed silicon wafer is inserted into an unprocessed silicon wafer, and the feeding and discharging treatment is carried out. At this time, the upper graphite boat is in the buffer station 1-7, the upper graphite boat is carried to the circulating channel 1-12 through the graphite boat hoist 1-2, is transmitted to the A plug-in channel 2-4 from the circulating channel 1-12 through the belt, the lower graphite boat is transmitted to the in-host channel 1-11 after being inserted, the upper graphite boat returns to the circulating channel 1-12 after the silicon wafer is inserted, the upper graphite boat and the lower graphite boat are combined and transmitted to the in-host channel 1-11, and the film coating process is carried out through the in-host channel 1-11.

[0046] The upper graphite boat and the boat holder 4 on the observation channel 2-2 in the lower layer are transferred to the circulating channel 1-12, the upper graphite boat in the circulating channel 1-12 is carried and stacked on the lower graphite boat on the in-host channel 1-11 through the graphite boat hoist 1-2, and then the film coating process is carried out through the in-host channel 1-11.

[0047] S4: The steps S1 to S3 are repeatedly executed.

[0048] The whole cycle time needs less than 35 minutes, the whole cycle of the first group of graphite boats ends, then the second group of graphite boats repeats the action of the first group of graphite boats, at this time, the third group enters, and then the steps S1 to S3 are repeatedly repeated.

[0049] As ​As shown, the graphite boat loaded with the processed silicon wafer on the host machine channel 1-10 is transferred out of the host machine, the graphite boat loaded with the unprocessed silicon wafer on the host machine channel 1-11 is transferred to the host machine, the graphite boat on the circulation channel 1-12 is transferred on the circulation channel 1-12, the A wafer insertion channel 2-4, and the observation channel 2-2, respectively, the graphite boat on the A wafer insertion channel 2-4 is unloaded after the silicon wafer is unloaded, and then is transferred to the observation channel through the circulation channel 1-12, the abnormality is observed manually on the observation channel 2-2, and after no abnormality is observed, the graphite boat is returned to the circulation channel 1-12.

[0050] The automatic equipment matching battery piece double-sided silicon nitride passivation and coating process host machine of the embodiment of the application. The single furnace tube of the stacked boat coating process host machine device can place two graphite boats, there are four furnace tubes in total, the silicon wafer is inserted into the graphite boat groove, and the total wafer loading capacity is 1224Pcs; the stacked boat group transported out of the host machine is stacked up and down, is cooled through the single-section boat transfer device, and is distributed to different wafer insertion channels for wafer loading and unloading; at the same time, the double-sided robot wafer loading and unloading double stations are used, one is used and one is standby, and the situation of line shutdown and waiting for material does not occur.

[0051] In the boat logistics cooling unit, the graphite boats are distributed to different cooling platforms through the graphite boat hoist, manual observation and processing are performed after cooling, the wafer loading and unloading are performed at the double-channel wafer insertion position after manual observation and processing are completed, the graphite boats are transported to the observation position and are transported to the host machine for coating process after manual observation and processing are completed again.

[0052] It should be noted that the terms "first", "second", "third", "fourth" involved in the embodiments of the application are only to distinguish similar objects, and do not represent a specific order of the objects. Understandably, "first", "second", "third", "fourth" can be interchanged in a specific order or sequence as appropriate. It should be understood that the objects distinguished by "first", "second", "third", "fourth" can be interchanged as appropriate, so that the embodiments of the application described herein can be implemented in an order other than those illustrated or described herein.

[0053] Other embodiments of the application will be apparent to those skilled in the art from consideration of the specification and practice of the application disclosed herein. It is intended that the application cover any and all variations of the application that come within the scope of the general concept of the application and that the claims be interpreted not to be limited to the specific examples described herein. The specification and examples are to be considered exemplary only, with the true scope and spirit of the application indicated by the appended claims.

[0054] It should be understood that the application is not limited to the precise construction that has been described above and illustrated in the accompanying drawings, and that various modifications and changes can be made without departing from the scope thereof. The scope of the application is indicated by the appended claims, rather than by the description.

Claims

1. A graphite boat transfer device, characterized in that: Includes a boat logistics cooling unit (1) and a boat loading and unloading unit (2). The boat loading and unloading unit (2) includes a six-axis robot (2-1) for loading and unloading pieces, a B-type insert channel (2-3), an A-type insert channel (2-4), and an observation channel (2-2); The boat cooling unit (1) includes an inlet channel (1-11) on the lower level, an outlet channel (1-10) on the lower level, a circulation channel (1-12) on the lower level, two cooling stations on the upper level, two cooling stations on the middle level, a first observation station (1-8) on the upper level, a second observation station (1-9) on the upper level, and a graphite boat lifting device (1-2). The boat cooling unit (1) connects to the main engine via the inlet channel (1-11) or the outlet channel (1-10). The machine interface includes a boat support (4) on the main machine inlet channel (1-11), circulation channel (1-12), and main machine outlet channel (1-10). The boat support (4) can hold two stacked graphite boats. The upper and lower graphite boats are transported to different cooling stations, the first observation station (1-8), and the second observation station (1-9) via graphite boat lifting devices (1-2). The main machine outlet channel (1-10) receives finished graphite boats flowing out of the main machine. The main machine inlet channel (1-11) is used to receive unfinished graphite boats. The graphite boats in the process are transferred to the host machine, which can buffer up to 4 sets of graphite boats. Each set of graphite boats can load two stacked graphite boats, with a maximum of 8 graphite boats buffered (3). The graphite boats on the circulation channel (1-12) flow through the circulation channel (1-12), the A-insertion channel (2-4), and the observation channel (2-2), respectively. After the graphite boats on the A-insertion channel (2-4) have finished loading and unloading silicon wafers, they flow through the circulation channel (1-12) to the observation channel (2-2) for manual observation of abnormalities. If no abnormalities are observed, the graphite boats on the A-insertion channel (2-4) are transferred to the observation channel (2-2) for manual observation of abnormalities. Afterwards, it returns to the circulation channel (1-12); the boat logistics cooling unit (1) is connected to the boat loading and unloading unit (2) through the circulation channel (1-12), the main machine inlet channel (1-11), and the main machine outlet channel (1-10); the cooling station is equipped with a fan (1-1), which is connected to the power output end of the motor; the first observation station (1-8) and the second observation station (1-9) are driven to move horizontally by the motor, and the first observation station (1-8) moves along the direction of the boat loading and unloading unit.

2. The graphite boat transfer device according to claim 1, characterized in that, The boat support (4) is made of stainless steel and aluminum.

3. The graphite boat transfer device according to claim 1, characterized in that, The graphite boat lifting device (1-2) is equipped with claws.

4. A method for transferring graphite boats, applied in the graphite boat transfer equipment described in claim 1, characterized in that, include, S1: A group of graphite boats with the coating process completed is transported to the boat material cooling unit (1) through the main machine channel (1-10). The group of graphite boats is equipped with two layers of graphite boats stacked on top of each other. S2: The upper and lower graphite boats are assigned to different cooling stations. After cooling, the upper and lower graphite boats are each sent to their respective observation stations for manual observation. S3: After manual observation and processing, the silicon wafers are transferred to the dual insertion channel of the wafer loading and unloading unit (2) for loading and unloading. The uncoated silicon wafers are inserted into the graphite boat and then transferred to the host machine through the host machine channel (1-11) for coating process. S4: Repeat steps S1 to S3.

5. The graphite boat circulation method according to claim 4, characterized in that, Step S3 also includes inserting silicon wafers into the lower graphite boat first, and the upper graphite boat being in the cache station. The upper graphite boat is transported to the circulation channel (1-12) by the graphite boat hoist (1-2). The cooled graphite boat is manually observed and processed for abnormalities at the first observation station (1-8) and the second observation station (1-9) located on the upper layer. The graphite boats that are not yet processed and are entering the host are manually observed and processed for abnormalities at the observation channel (2-2) and the host entry channel (1-11) located on the lower layer. The upper graphite boat and boat carrier (4) on the observation channel (2-2) are transferred to the circulation channel (1-12). The upper graphite boat in the circulation channel (1-12) is transported and stacked on the lower graphite boat on the host entry channel (1-11) by the graphite boat hoist (1-2), and then transferred to the host through the host entry channel (1-11).

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