Water tank for tail gas treatment, tail gas treatment equipment and control method of tail gas treatment equipment

Abstract

The invention relates to a water tank for tail gas treatment, tail gas treatment equipment and a control method thereof, belongs to the technical field of tail gas treatment, and aims to solve the problems that the dust content of waste gas is high, the equipment is easy to block, the tail gas treatment equipment is time-consuming and labor-consuming to clean after being blocked, and the energy consumption is high when the tail gas is cooled. Wherein the water tank comprises a tank body, a heat exchanger arranged outside the tank body and a control system; a mixer, a turbidimeter, a sewage draining exit and a water supplementing opening are arranged in the box body, the sewage draining exit is connected with a sewage draining pipe, the water supplementing opening is connected with a water supplementing pipe, and a sewage draining pump is arranged on the sewage draining pipe; a water replenishing pump is arranged on the water replenishing pipe; the turbidimeter, the sewage pump, the make-up pump and the heat exchanger are respectively in electric signal connection with the control system; the control system controls operation of the sewage pump, the make-up pump and the heat exchanger according to the turbidity value fed back by the turbidimeter so as to automatically control the temperature and turbidity of water in the water tank. According to the invention, the reliability of controlling the temperature and turbidity of the water in the water tank is improved, and water is saved.

Description

Technical Field

[0001] The present invention relates to the technical field of tail gas treatment, and in particular to a water tank for tail gas treatment, tail gas treatment equipment and a control method thereof. Background Art

[0002] In the manufacturing process of the pan-semiconductor industry represented by semiconductors, solar photovoltaics, flat panel displays and LEDs, exhaust gas treatment equipment is required to treat the process exhaust gas in order to meet national standards.

[0003] The dust content of process exhaust gas is high, and the exhaust gas outlet humidity after treatment by existing exhaust gas treatment equipment is high, which is easy to clog the equipment, which can easily cause equipment downtime, and it is time-consuming and labor-intensive to clean the exhaust gas treatment equipment. Summary of the invention

[0004] In view of the above analysis, an embodiment of the present invention aims to provide a water tank for exhaust gas treatment, an exhaust gas treatment device and a control method thereof, so as to solve the problems that the treated exhaust gas has high dust content, the equipment is easily blocked, the cleaning of the exhaust gas treatment equipment is time-consuming and labor-intensive after blockage, and the exhaust gas is cooled with high energy consumption.

[0005] In one aspect, the present invention provides a water tank, comprising a tank body, a heat exchanger disposed outside the tank body, and a control system; the tank body comprises:

[0006] A rectifying cavity is provided with a baffle plate therein, the baffle plate divides the rectifying cavity into a mixed flow space and an exhaust space, the mixed flow space is provided with an air inlet, and the exhaust space is provided with an air outlet; a mixer is provided in the mixed flow space, the airflow enters the mixed flow space from the air inlet, forms a cyclone when passing through the mixer, and then enters the exhaust space and is discharged from the box body from the air outlet;

[0007] The accommodating chamber is located below the rectifying chamber, and a turbidity meter is arranged therein, and the turbidity meter is electrically connected to the control system; the accommodating chamber is provided with a sewage outlet connected to the sewage pipe and a water replenishment outlet connected to the water replenishment pipe; the sewage pipe is provided with a sewage pump electrically connected to the control system; the water replenishment pipe is provided with a water replenishment pump electrically connected to the control system; the control system controls the operation of the sewage pump and the water replenishment pump according to the turbidity value fed back by the turbidity meter;

[0008] The heat exchanger is connected to the control system by electrical signals and is used for exchanging heat with the water in the accommodating chamber.

[0009] Furthermore, the heat exchanger is connected to the accommodating chamber through a first water pipe and a second water pipe. The water in the accommodating chamber enters the interior of the heat exchanger through the first water pipe, and after being cooled by the heat exchanger, returns to the accommodating chamber through the second water pipe. The heat exchanger is also connected to a cooling water inlet pipe and a cooling outlet pipe.

[0010] Furthermore, a first circulation pump is arranged on the first water pipe or the second water pipe, and the first circulation pump is electrically connected to the control system; a second circulation pump is arranged on the cooling water inlet pipe or the cooling water outlet pipe, and the second circulation pump is electrically connected to the control system.

[0011] Furthermore, the sewage outlet and the water replenishment outlet are respectively arranged on two opposite side walls of the accommodating cavity.

[0012] Furthermore, one end of the mixer is fixedly connected to the baffle, and the other end is closed; an opening is provided on the baffle, and the opening is located in the area enclosed by the connection between the baffle and the mixer.

[0013] Furthermore, the air inlet is opened at the top of the mixed flow space, and the mixer is arranged below the air inlet.

[0014] Furthermore, a spray device is provided in the mixed flow space; the spray device is provided above the mixer, and the water outlet direction of the spray device is toward the mixer.

[0015] Furthermore, a mist-making device is arranged in the mixer.

[0016] On the other hand, the present invention further provides an exhaust gas treatment device, comprising the water tank for exhaust gas treatment as described above.

[0017] On the other hand, the present invention also provides a method for controlling the exhaust gas treatment device as described above, comprising the following steps:

[0018] S1: the exhaust gas treatment device is started, and the exhaust gas enters the water tank from the air inlet and flows downward;

[0019] S2: The turbidity meter monitors the turbidity value of the liquid in the water tank in real time and feeds back to the control system;

[0020] S3: the control system compares the measured turbidity value with a preset turbidity threshold;

[0021] S4: When the measured turbidity value is greater than or equal to the preset turbidity threshold, the control system controls to turn on the sewage pump and the make-up water pump; when the measured turbidity value is less than the preset turbidity threshold, the control system controls to turn off the sewage pump and the make-up water pump.

[0022] Furthermore,

[0023] In step S4, after the sewage pump and the water replenishment pump are started, the control system controls the rotation speeds of the sewage pump and the water replenishment pump according to the corresponding relationship between the preset turbidity value and the rotation speeds of the sewage pump and the water replenishment pump.

[0024] Furthermore, in step S4, when the turbidity value is less than the preset turbidity threshold value for more than 10 seconds, the control system controls the sewage pump and the water supply pump to stop working.

[0025] On the other hand, the present invention also provides a control method for an exhaust gas treatment device, wherein the exhaust gas treatment device has a water tank as described above, a temperature sensor is provided in the accommodating cavity, and the temperature sensor is electrically connected to the control system, comprising the following steps:

[0026] S1: the exhaust gas treatment device is started, and the exhaust gas enters the water tank from the air inlet and flows downward;

[0027] S2: The turbidity meter monitors the turbidity value of the liquid in the water tank in real time, and feeds back the turbidity value to the control system; the temperature sensor monitors the temperature value of the liquid in the water tank in real time, and feeds back the temperature value to the control system;

[0028] S3: The control system compares the measured turbidity value with a preset turbidity threshold;

[0029] S4: When the turbidity value is greater than or equal to a preset turbidity threshold, controlling the sewage pump and the water supply pump to operate;

[0030] S5: The control system continuously receives the turbidity signal, and when the turbidity value is less than the preset turbidity threshold, controls the sewage pump and the water supply pump to stop working; at the same time, the control system compares the measured temperature value with the preset temperature threshold;

[0031] S6: When the temperature value is greater than or equal to a preset temperature threshold, the control system controls the first circulation pump and the second circulation pump to operate.

[0032] Furthermore, in step S4, after the water supply pump and the sewage pump are started, the control system controls the rotation speed of the water supply pump and the sewage pump according to the corresponding relationship between the preset turbidity value and the rotation speed of the water supply pump and the sewage pump;

[0033] In step S6, after the first circulation pump and the second circulation pump are started, the control system controls the rotation speeds of the first circulation pump and the second circulation pump according to the correspondence between the preset temperature value and the rotation speeds of the first circulation pump and the second circulation pump.

[0034] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0035] (1) Due to the installation of a turbidity meter, heat exchanger and control system, the intensity of sewage discharge and water replenishment in the water tank can be controlled by real-time turbidity conditions, so that the water quality in the water tank is kept within a stable range, which improves the reliability of water quality control in the water tank, so that the water in the water tank can be recycled without clogging the pipeline, thus saving water and extending the maintenance period.

[0036] (2) By setting up a turbidity meter and a control system to monitor the turbidity of the water in the water tank in real time, and keeping the water quality in the water tank within a stable range, the water temperature in the water tank is controlled by an external heat exchanger, thereby improving the reliability of the control of the temperature of the water in the water tank, avoiding excessive outlet temperature, reducing outlet humidity, and reducing the risk of blockage of the exhaust gas treatment equipment. At the same time, the amount of water used is reduced, thereby achieving water conservation. Moreover, the water quality in the water tank within a stable range can also ensure that the heat exchanger pipes will not be blocked, thereby extending the maintenance period of the exhaust gas treatment equipment and the heat exchanger.

[0037] (3) The mixer of the water tank of the present invention adopts the structure of "upper arc plate + W-shaped plate", so that the exhaust gas is diverted by the upper arc plate and converges after forming a vortex in the mixer, which prolongs the flow path of the exhaust gas and increases the time the exhaust gas stays in the mixer. At the same time, the exhaust gas is in full contact with the mixer, and the heat carried by the exhaust gas is fully transferred to the mixer. At the same time, the larger dust particles in the exhaust gas collide with the wall of the mixer under the action of the vortex, and the dust particles are separated from the gas under the action of centrifugal force, reducing the risk of blockage of the exhaust gas treatment equipment and extending the maintenance period of the exhaust gas treatment equipment. In addition, there may be residual substances in the exhaust gas that have not been fully reacted and processed in the reaction chamber, such as SiH 4 For example, SiH 4 You can continue with O 2 Mix, the two react to remove SiH 4 , improve the efficiency of exhaust gas treatment.

[0038] (4) The present invention sets a spray head above the mixer of the water tank, and the spray head provides continuous spray water, and the spray water is fully mixed with the dust in the exhaust gas. The mixer is continuously flushed by the spray water in the water tank, and the dust attached to the mixer is taken away by the spray water, and the heat of the mixer and the exhaust gas is also taken away by the spray water.

[0039] (5) The present invention is provided with an ultrasonic mist maker, which is placed at the bottom of the W-shaped plate. The ultrasonic mist maker breaks the spray water into small-diameter droplets through high-frequency vibration. The small-diameter droplets can combine with the smaller-diameter dust particles in the exhaust gas to remove the small-diameter dust particles.

[0040] In the present invention, the above-mentioned technical solutions can also be combined with each other to achieve more preferred combination solutions. Other features and advantages of the present invention will be described in the subsequent description, and some advantages can become obvious from the description, or can be understood by practicing the present invention. The purpose and other advantages of the present invention can be realized and obtained through the contents particularly pointed out in the description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] The drawings are only for the purpose of illustrating particular embodiments and are not to be considered limiting of the present invention. Like reference symbols denote like components throughout the drawings.

[0042] Figure 1 A three-dimensional perspective view of a water tank structure according to a specific embodiment of the present invention;

[0043] Figure 2 for Figure 1 A front view of a water tank of a specific embodiment (heat exchanger not shown);

[0044] Figure 3 for Figure 2 A sectional view of the water tank along the AA line of the specific embodiment;

[0045] Figure 4 for Figure 2 A top view of a water tank of a specific embodiment;

[0046] Figure 5 for Figure 4 A CC sectional view of a water tank of a specific embodiment;

[0047] Figure 6 A schematic diagram of a cross section of a mixer according to a specific embodiment;

[0048] Figure 7 A schematic structural diagram of an embodiment of an exhaust gas treatment device;

[0049] Figure 8 It is a schematic diagram of the connection relationship between the control system of the water tank of the present invention and other components.

[0050] Reference numerals:

[0051] 10-water tank; 100-rectifier chamber; 101-mixing space; 102-exhaust space; 103-baffle; 1031-opening; 110-air inlet; 120-mixer; 121-upper arc plate; 122-W-shaped plate; 1221-first lower arc plate; 1222-second lower arc plate; 130-sprinkler; 140-air outlet; 150-ultrasonic mist maker;

[0052] 200-accommodation chamber; 210-drainage outlet; 220-water supply outlet; 230-turbidimeter;

[0053] 300-heat exchanger; 301-first water pipe; 302-second water pipe; 303-cooling water inlet pipe; 304-cooling water outlet pipe; 305-first circulation pump; 306-second circulation pump;

[0054] 20-air inlet chamber; 30-reaction chamber; 40-spray tower. DETAILED DESCRIPTION

[0055] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the present invention and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not used to limit the scope of the present invention.

[0056] It should be noted that in all the drawings, hidden structures are represented by dotted lines.

[0057] Example 1

[0058] A specific embodiment of the present invention, as Figure 1-Figure 6 As shown, a water tank 10 is disclosed, which is suitable for exhaust gas treatment equipment.

[0059] See attached Figure 2-3 , the water tank 10 includes a rectifying chamber 100 and a containing chamber 200. The rectifying chamber 100 is above the containing chamber 200, and the containing chamber 200 is used to collect and store water used in the operation of the exhaust gas treatment equipment, such as the spray water in the spray tower 40, the water in the reaction chamber 30, and the water sprayed from the spray head 130 in the rectifying chamber 100 of the water tank 10, etc. These waters are collected in the containing chamber 200 of the water tank 10, and are cleaned, purified and cooled in the containing chamber 200, and then recycled into the exhaust gas treatment process. Under normal working conditions, the water in the rectifying chamber 100 falls into the containing chamber 200, and the water level in the water tank 10 does not reach the rectifying chamber 100.

[0060] See attached Figure 5 A baffle 103 is disposed in the middle of the rectifying chamber 100 of the water tank 10, dividing the rectifying chamber 100 into a mixed flow space 101 and an exhaust space 102. The baffle 103 may also partially or completely extend into the accommodating chamber 200. The exhaust gas rotates in the mixed flow space 101 and is fully mixed with the water mist, and then enters the spray tower 40 through the exhaust space 102.

[0061] The air inlet 110 is arranged at the top of the mixed flow space 101, and the exhaust gas to be treated enters the mixed flow space 101 of the water tank 10 from the air inlet 110. A mixer 120 is arranged below the air inlet 110, and the distance between the lower end of the air inlet 110 and the top of the mixer 120 should be greater than 100 mm and less than 500 mm. The above arrangement can better ensure the guiding effect of the mixer 120 on the air flow, so that the exhaust gas generates a cyclone in the mixer 120. For example, the distance between the lower end of the air inlet 110 and the top of the mixer 120 can be set to 100 mm, 300 mm or 500 mm, all of which do not depart from the scope of the present invention, and those skilled in the art can set it according to actual needs.

[0062] A spray head 130 is arranged around the air inlet 110 and above the mixer 120, and the water outlet direction of the spray head 130 is toward the mixer 120. A plurality of spray heads 130 may be arranged, evenly distributed along the length direction of the mixer 120, and are used to spray water mist toward the upper surface of the mixer 120 to absorb dust in the air flow. It should be understood that the arrangement of the spray head 130 is not limited to Figure 1 The uniform distribution along the width direction of the mixer 120 shown only needs to be arranged in the direction of travel of the exhaust gas flowing from the air inlet 110 and can absorb dust in the exhaust gas. For example, a plurality of spray heads 130 surround the periphery of the air inlet 110 and are located above the mixer 120. The plurality of spray heads 130 can be uniformly distributed or unevenly arranged.

[0063] In this embodiment, the spray device is a spray head 130 , but the spray device of the present invention is not limited to the spray head 130 , as long as it can achieve the spray function, which will not be described in detail below.

[0064] See also Figure 1 , Figure 2 , Figure 3 The baffle 103 is provided with an opening 1031, and the opening 1031 is provided corresponding to the outlet of the mixer 120. The airflow entering from the air inlet 110 passes through the mixer 120 and then enters the exhaust space 102 of the rectifying cavity 100 of the water tank 10 through the opening 1031.

[0065] See also Figure 4 An air outlet 140 is provided at the upper portion of the exhaust space 102 , and the air flow leaves the water tank 10 from the air outlet 140 .

[0066] Wherein, the mixer 120 includes an upper arc plate 121 and a W-shaped plate 122. The upper arc plate 121 and the W-shaped plate 122 are both in the shape of long strips, one end of which is connected to the baffle 103, and the other end is connected to the side wall of the water tank 10 away from the baffle 103. The cross section of the upper arc plate 121 is a circular arc protruding upward, and one side of the upper arc plate 121 forms a first air path inclined downward, and the other side forms a second air path inclined downward. The airflow entering from the air inlet 110 has a certain pressure and flow rate, rushes to the upper surface of the upper arc plate 121, and is divided into two parts by the top of the upper arc plate 121, sliding down along the first air path and the second air path on the upper surface of the upper arc plate 121, and finally leaves the edges on both sides of the upper arc plate 121 and continues to descend.

[0067] The W-shaped plate 122 is located below the upper arc plate 121 and is spaced apart from the upper arc plate 121. The length directions of the W-shaped plate 122 and the upper arc plate 121 are arranged parallel to each other. The W-shaped plate 122 includes a first lower arc plate 1221 and a second lower arc plate 1222 of the same shape and size arranged in parallel. The connection between the first lower arc plate 1221 and the second lower arc plate 1222 is aligned with the highest point of the upper arc plate 121 in the vertical direction. In this way, the mixer 120 is bilaterally symmetrical, and the airflow moving to the W-shaped plate 122 through the first gas path and the second gas path can form two symmetrical cyclones, so that the overall purification effect on the exhaust gas is balanced. The connection between the first lower arc plate 1221 and the second lower arc plate 1222 does not need to be strictly aligned with the highest point of the upper arc plate 121 in the vertical direction, and can have a certain deviation. The first lower arc plate 1221 and the second lower arc plate 1222 do not need to be completely symmetrical.

[0068] The relationship between the radius R of the upper arc plate 121 and the radius r of the first lower arc plate 1221 satisfies the following condition: 1.2r≤R≤1.8r. Through this setting, it can be ensured that the airflow leaving the upper arc plate 121 runs downward to contact the upper surface of the outer side of the first lower arc plate 1221 or the second lower arc plate 1222, and under the guidance of the arc surface, moves downward and inward, and finally forms a cyclone between the upper arc plate 121 and the W-shaped plate 122.

[0069] The water tank 10 is provided with a sewage outlet 210, a water supply outlet 220, and a turbidity meter 230 on the side wall of the accommodating chamber 200. A heat exchanger 300 is provided outside the water tank 10 to cool the water in the water tank 10. The heat exchanger 300 can reduce the water temperature in the water tank 10 by 10-20°C. A control system is also provided outside the water tank 10, see Figure 8 shown.

[0070] The sewage outlet 210 is arranged at the bottom of the accommodating chamber 200, for example, it can be arranged below the mixed flow space 101, close to the bottom of the accommodating chamber 200. The sewage outlet 210 is connected to a sewage pipe, and a sewage pump (not shown in the figure) is arranged on the sewage pipe. The sewage pump is connected to the control system by electrical signals, and the speed of the sewage pump can be controlled by the control system.

[0071] The turbidity meter 230 is disposed below the exhaust space 102. When the exhaust gas treatment equipment is in operation, the turbidity meter 230 is located in the sewage contained in the water tank 10. The turbidity meter 230 can monitor the turbidity of the water in the receiving chamber 200 in real time. The turbidity meter 230 is connected to the control system of the water tank 10 by an electrical signal, and the turbidity value in the receiving chamber 200 is fed back to the control system in real time.

[0072] The water replenishment port 220 is arranged on the side wall of the accommodating chamber 200, for example, it can be arranged on the side wall away from the mixed flow space 101 and close to the bottom of the accommodating chamber 200. Preferably, the sewage outlet 210 and the water replenishment port 220 are respectively located on two opposite side walls of the accommodating chamber 200, so that the sewage outlet 210 and the water replenishment port 220 are far apart. The water replenishment port 220 is connected to a water replenishment pipe, and a water replenishment pump (not shown in the figure) is arranged on the water replenishment pipe. The water replenishment pump is electrically connected to the control system of the water tank 10, and the speed of the water replenishment pump can be controlled by the control system.

[0073] A temperature sensor can also be set in the water tank 10, and the temperature sensor is connected to the control system by electrical signals. When the temperature sensor detects that the water temperature in the water tank 10 is greater than the preset temperature, the temperature sensor transmits a signal to the control system, and the control system can control the heat exchanger 300 to start working.

[0074] The heat exchanger 300 is connected to the water tank 10 through two water pipes. The water in the accommodating chamber 200 of the water tank 10 enters the heat exchanger 300 through the first water pipe 301, and after cooling down in the heat exchanger 300, returns to the accommodating chamber 200 of the water tank 10 through the second water pipe 302. A first circulating pump 305 is provided on the first water pipe 301, and the first circulating pump 305 is connected to the control system of the water tank 10 by electrical signals, and the speed of the first circulating pump 305 can be controlled by the control system. This setting can reduce the water temperature in the water tank 10 by 10°C-20°C.

[0075] The heat exchanger 300 is also provided with a cooling water inlet pipe 303 and a cooling water outlet pipe 304, and a second circulation pump 306 is provided on the cooling water outlet pipe 304. The second circulation pump 306 is electrically connected to the control system of the water tank 10, and the speed of the second circulation pump 306 can be controlled by the control system.

[0076] When the water tank 10 of the present invention starts working, the exhaust gas enters the mixed flow space 101 to form a cyclone, and dust particles and other dirt in the exhaust gas are removed by centrifugal force and the adhesion of water, and then the exhaust gas enters the spray tower 40 from the exhaust space 102. The circulating return water such as spray water carries dirt such as particles into the accommodating chamber 200 of the water tank 10. Since the temperature of the exhaust gas is very high, the circulating return water temperature at this time is also relatively high. At this time, the first circulating pump 305 and the second circulating pump 306 are controlled to start, so that the water in the accommodating chamber 200 enters the inside of the heat exchanger 300 through the first water pipe 301, and after cooling by the heat exchanger 300, it returns to the accommodating chamber 200 of the water tank 10 through the first water pipe 302.

[0077] The turbidity meter 230 detects the turbidity of the water in the water tank 10 in real time. At this time, as the exhaust gas purification work continues, the turbidity of the water in the water tank 10 will continue to rise. When the turbidity meter 230 detects that the turbidity is greater than or equal to the preset turbidity threshold, the control system controls the first circulation pump 305 and the second circulation pump 306 to stop working, that is, at this time, the heat exchanger 300 does not perform heat exchange and cooling on the water in the water tank 10 to prevent the first water pipe 301, the second water pipe 302 and the internal pipeline of the heat exchanger 300 from being blocked. At the same time, the control system controls the sewage pump to increase the speed to increase the sewage discharge speed, and controls the water supply pump to increase the speed to increase the water supply speed.

[0078] In this process, due to sewage discharge and water replenishment, turbidity and temperature will continue to decrease. When the turbidity meter 230 detects that the turbidity is less than the preset turbidity threshold, the control system controls the first circulation pump 305 and the second circulation pump 306 to work after receiving the turbidity signal, and uses the heat exchanger 300 to cool the water in the water tank 10. At the same time, the control system controls the sewage pump to slow down to reduce the sewage discharge speed and controls the water replenishment pump to slow down to reduce the water replenishment speed. The lower the turbidity value, the smaller the sewage discharge speed of the sewage outlet 210 and the water replenishment speed of the water replenishment port 220. The preset value described above can be 100NTU, 200NTU or other values, and those skilled in the art can set it according to the actual working conditions.

[0079] Compared with the prior art, the water tank 10 with the mixer 120 provided in this embodiment adopts the structure of "upper arc plate + W-shaped plate" in the mixer 120, so that the exhaust gas is diverted by the upper arc plate 121, and converges after forming a vortex in the mixer 120, thereby extending the flow path of the exhaust gas and increasing the time the exhaust gas stays in the mixer 120. At the same time, the exhaust gas is in full contact with the mixer 120, and the heat carried by the exhaust gas is fully transferred to the mixer 120. At the same time, the dust particles in the exhaust gas collide with the wall of the mixer 120 under the action of the vortex, and the dust particles are separated from the gas under the action of centrifugal force and are taken away by the spray water. In addition, there may be residual substances in the exhaust gas that have not been fully reacted and processed in the reaction chamber 30, such as SiH 4 For example, SiH4 You can continue with O 2 Mix, the two react to remove SiH 4 .

[0080] In this embodiment, a spray head 130 is arranged above the mixer 120 of the water tank 10. The spray head 130 provides continuous spray water, which is fully mixed with the dust in the exhaust gas. On the other hand, the spray water also removes the dust on the wall of the mixer 120. The mixer 120 is continuously flushed by the spray water in the water tank 10, and its heat is also removed by the spray water.

[0081] In this embodiment, the heat exchanger 300 can quickly cool down the water in the water tank 10. Since the turbidity meter 230, the heat exchanger 300 and the control system are provided, the sewage discharge, water replenishment and cooling intensity of the water tank 10 can be controlled according to the real-time turbidity conditions, thereby improving the reliability of controlling the temperature of the water in the water tank 10, while reducing the water consumption and realizing water conservation.

[0082] Example 2

[0083] Another specific embodiment of the present invention, as Figure 1-Figure 6 As shown, a water tank 10 is disclosed, which is suitable for exhaust gas treatment equipment.

[0084] Based on the structure of Example 1, further, see Figure 6 , the value range of the center angle a of the upper arc plate 121 is: 150°≤a≤200°, and the value range of the center angle b of the first lower arc plate 1221 and the second lower arc plate 1222 is: 150°≤b≤200°. For example, the center angle a of the upper arc plate 121 can be set to 150°, 170°, 190° or 200°. The center angle b of the first lower arc plate 1221 and the second lower arc plate 1222 can be set to: 150°, 170°, 190° or 200°.

[0085] Preferably, the central angle a of the upper arc plate 121 and the central angle b of the first lower arc plate 1221 and the second lower arc plate 1222 are both 180°.

[0086] Among them, if the central angle a of the upper arc plate 121 and the central angle b of the first lower arc plate 1221 and the second lower arc plate 1222 are too large, a relatively small space will be formed for the airflow to form a cyclone. The airflow escaping from the space will be difficult to be driven by the cyclone to re-enter the main airflow, so that the purification effect of the exhaust gas will be reduced.

[0087] Conversely, if the central angle a of the upper arc plate 121 and the central angle b of the first lower arc plate 1221 and the second lower arc plate 1222 are too small, the guiding surface for the airflow is too small and the opening for escape and divergence is too large, making it difficult to form a space capable of producing a complete cyclone. Ultimately, the direction of the airflow cannot be controlled and a cyclone cannot be produced.

[0088] Furthermore, the value range of the height difference ΔH between the lower edge of the upper arc plate 121 and the outer upper edge of the W-shaped plate 122 is: -r / 10≤ΔH≤r / 10.

[0089] Preferably, the height difference ΔH between the lower edge of the upper arc plate 121 and the outer upper edge of the W-shaped plate 122 is 0.

[0090] The upper arc plate 121 and the W-shaped plate 122 can be spaced apart by a certain distance in the vertical direction, or can overlap by a certain distance. As long as they are within a certain range, the generation of cyclones can be guaranteed. In the best case, the lower edge of the upper arc plate 121 and the outer upper edge of the W-shaped plate 122 are on the same horizontal plane. In this case, the pressure loss of the exhaust gas is small, and the effect of the gas cyclone is better.

[0091] Furthermore, the air inlet 110 is arranged away from the baffle 103, and the axis of the air inlet 110 is vertically aligned with the highest point of the upper arc plate 121. Such an arrangement can ensure that the flow path of the exhaust gas is longer, and the air flow of the intake air can be distributed as evenly as possible, so that the gas flow in the first air path and the second air path remains balanced, thereby improving the purification effect.

[0092] Example 3

[0093] On the basis of any of the foregoing embodiments, an ultrasonic mist maker 150 is disposed at the bottom of the first lower arc plate 1221 and the bottom of the second lower arc plate 1222 .

[0094] The atomizing device in this embodiment uses an ultrasonic mist maker 150. In other embodiments, atomizing devices such as a jet atomizer, a mesh atomizer, etc. can also be used.

[0095] Furthermore, a plurality of ultrasonic mist generators 150 are provided, which are evenly distributed along the length direction of the first lower arc plate 1221 and the second lower arc plate 1222 .

[0096] Furthermore, an ultrasonic mist generator 150 may be arranged within 10 mm below the water surface in the accommodating chamber 200 .

[0097] The ultrasonic mist maker 150 breaks the spray water into small-diameter droplets through high-frequency vibration. The small-diameter droplets can combine with the small-diameter dust particles in the exhaust gas to achieve the separation of the small-diameter dust particles.

[0098] Further, one end of the upper arc plate 121 and the W-shaped plate 122 is fixedly connected to the side wall of the mixed flow space 101 of the water tank 10 away from the exhaust space 102, and the other end is fixedly connected to the baffle 103. The above-mentioned fixed connection method can be welding, or can be fixed by bolts, or other connection methods in the prior art.

[0099] The baffle 103 is provided with an opening 1031, and the opening 1031 is located in the area of ​​the projection of the mixer 120 on the baffle 103. Preferably, the outer contour of the opening 1031 is located within the projection of the upper arc plate 121 and the W-shaped plate 122 on the baffle 103, and the outer contour of the opening 1031 can be set to coincide with the projection of the upper arc plate 121 and the W-shaped plate 122 on the baffle 103. In this case, the pressure loss of the exhaust gas flow is small and the airflow is more stable.

[0100] In this embodiment, a fogging device is provided, and the fogging device is arranged at the bottom of the W-shaped plate 122. The fogging device breaks the spray water into small-diameter droplets through high-frequency vibration. The small-diameter droplets can combine with the smaller-diameter dust particles in the exhaust gas. After the two are combined, they are easier to separate from the exhaust gas flow, thereby removing the small-diameter dust particles in the micron level.

[0101] Example 4

[0102] On the other hand, see Appendix Figure 7 As shown, the present invention provides an exhaust gas treatment device including the aforementioned water tank 10, the exhaust gas treatment device includes the aforementioned water tank 10, and also includes an air inlet chamber 20, a reaction chamber 30 and a spray tower 40. The air inlet chamber 20 is connected to the reaction chamber 30, the reaction chamber 30 is connected to the water tank 10 through the air inlet 110, and the air outlet 140 of the water tank 10 is connected to the spray tower 40.

[0103] When the exhaust gas treatment equipment is in operation, the exhaust gas enters the water tank 10 from the air inlet 110 and flows downward, and is divided into two gas paths by the upper arc plate 121. The two gas paths move downward along the upper arc plate 121 and enter the W-shaped plate 122, and after spiral movement along the space formed by the W-shaped plate 122 and the upper arc plate 121, enter the exhaust space 102 on the right side of the water tank 10 through the opening 1031 on the baffle plate 103, and enter the spray tower 40 from the air outlet 140. At the same time, the water of the spray head 130 sprays the exhaust gas, and the water flows downward to the W-shaped plate 122 and then flows from the opening 1031 of the baffle plate 103 into the accommodating cavity 200 of the water tank 10.

[0104] On the other hand, the present invention also relates to a control method for the exhaust gas treatment device as described above, comprising the following steps:

[0105] S1: The exhaust gas treatment equipment is started, and the exhaust gas enters the water tank 10 from the air inlet 110 and flows downward;

[0106] S2: The turbidity meter 230 monitors the turbidity value of the liquid in the water tank 10 in real time and feeds back to the control system;

[0107] S3: The control system compares the measured turbidity value with a preset turbidity threshold;

[0108] S4: When the turbidity value is greater than or equal to the preset turbidity threshold, the control system controls the water supply pump and the sewage pump to start synchronously or asynchronously; the control system continues to receive turbidity signals until the turbidity is lower than the turbidity threshold, and the control system controls the water supply pump and the sewage pump to stop working.

[0109] The control system can control the water supply pump to supply clean water to the water tank 10 and control the sewage pump to discharge the sewage in the water tank 10 according to the corresponding relationship between the preset turbidity value and the rotation speed of the water supply pump and the sewage pump, so as to discharge the sewage in the water tank 10 in time.

[0110] The water supply pump and the sewage pump are both connected to a frequency converter, and the control system controls the motor speed of the water supply pump and the sewage pump by controlling the frequency of the frequency converter.

[0111] The turbidity meter 230 can monitor the turbidity value in real time. In order to prevent the system from misjudging, it can be set that when the signal of the turbidity value is greater than or equal to the preset turbidity threshold is greater than 10 seconds, the control system will control the synchronous or asynchronous start of the water supply pump and the sewage pump according to the received signal.

[0112] In order to prevent the system from misjudging, it can also be set that when the turbidity value is less than the turbidity threshold for more than 10 seconds, the control system controls the water supply pump and the sewage pump to stop working.

[0113] The water supply pump and the sewage discharge pump are started synchronously, and can be made to work at the same or different motor speeds for water supply and sewage discharge.

[0114] The water replenishment pump and the sewage pump are started asynchronously, and can be set to start the sewage pump first, discharge the sewage in the water tank 10, close the sewage pump, and then start the water replenishment pump to replenish water in the water tank 10, so that the turbidity value is less than the turbidity threshold. Specifically, two liquid level gauges at different heights can be set in the water tank 10 to control the drainage of the sewage pump, so that when the water level is lower than the liquid level at the lower height, the sewage is stopped, and the water replenishment pump is turned on to make the water level in the water tank 10 higher than the liquid level at the higher height. Among them, the higher height liquid level gauge is preferably 5-15 cm away from the bottom of the W-shaped plate 122, and the lower height liquid level gauge is preferably 5-10 cm away from the bottom of the water tank 10.

[0115] The feed water pump and the sewage pump can be started asynchronously, and can also be set to start the sewage pump for a period of time first, and then start the feed water pump. After the sewage pump and the feed water pump work for a period of time, the sewage pump is turned off. After the feed water pump works alone for a period of time, the feed water pump is turned off.

[0116] Example 5

[0117] On the other hand, the present invention also provides a control method for an exhaust gas treatment device. The water tank 10 of the exhaust gas treatment device is provided with a temperature sensor in the accommodating cavity 200. The temperature sensor is connected to the control system by an electrical signal. The control method comprises the following steps:

[0118] S1: The exhaust gas treatment equipment is started, and the exhaust gas enters the water tank 10 from the air inlet 110 and flows downward;

[0119] S2: The turbidity meter 230 monitors the turbidity value of the liquid in the water tank 10 in real time, and feeds the turbidity value back to the control system; the temperature sensor monitors the temperature value of the liquid in the water tank 10 in real time, and feeds the temperature value back to the control system;

[0120] S3: The control system compares the measured turbidity value with a preset turbidity threshold;

[0121] S4: When the turbidity value is greater than or equal to the preset turbidity threshold, the sewage pump and the water supply pump are controlled to work;

[0122] S5: The control system continuously receives turbidity signals. When the turbidity value is less than the preset turbidity threshold, the sewage pump and the water supply pump are controlled to stop working. At the same time, the control system compares the measured temperature value with the preset temperature threshold.

[0123] S6: When the temperature value is greater than or equal to the preset temperature threshold, the control system controls the first circulation pump 305 and the second circulation pump 306 to operate.

[0124] In order to further improve the sewage discharge efficiency, in step S4, after the water supply pump and the sewage pump are turned on, the control system controls the speed of the water supply pump and the sewage pump according to the corresponding relationship between the preset turbidity value and the speed of the water supply pump and the sewage pump.

[0125] In order to further improve the cooling efficiency, in step S6, after the first circulation pump 305 and the second circulation pump 306 are turned on, the control system controls the rotation speed of the first circulation pump 305 and the second circulation pump 306 according to the corresponding relationship between the preset temperature value and the rotation speed of the first circulation pump 305 and the second circulation pump 306.

[0126] Among them, the temperature sensor can monitor the temperature value in real time. In order to prevent the system from misdetection, it can be set that when the temperature value is greater than or equal to the preset temperature threshold signal is greater than 10 seconds, the control system will control the synchronous start of the first circulation pump 305 and the second circulation pump 306 according to the received signal.

[0127] Similarly, it can also be set that when the temperature value is less than the temperature threshold value for more than 10 seconds, the control system controls the first circulation pump 305 and the second circulation pump 306 to stop working.

[0128] Through the exhaust gas treatment equipment of the present invention, after the exhaust gas enters the water tank 10, a cyclone is formed in the mixer 120, and is fully mixed with the water mist sprayed by the spray head 130. Through the combined action of centrifugal force, gravity and the adhesion force of the water mist, dust and other impurities in the exhaust gas are separated from the airflow, thereby achieving the purification effect of the exhaust gas.

[0129] At the same time, the water in the water tank 10 is controlled at an appropriate temperature and cleanliness, ensuring that the outlet temperature is below 60°C, avoiding excessive humidity caused by excessive outlet temperature, thereby clogging the cavity at the rear end of the water tank 10 and causing equipment shutdown.

[0130] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by any technician familiar with the technical field within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention.

Claims

1. A water tank for tail gas treatment, It is characterized in that It includes a box body, a heat exchanger outside the box body, and a control system; the box body includes: A rectifying cavity is provided with a baffle plate therein, the baffle plate divides the rectifying cavity into a mixed flow space and an exhaust space, the mixed flow space is provided with an air inlet, and the exhaust space is provided with an air outlet; a mixer is provided in the mixed flow space, the airflow enters the mixed flow space from the air inlet, forms a cyclone when passing through the mixer, and then enters the exhaust space and is discharged from the box body from the air outlet; The accommodating chamber is located below the rectifying chamber, and a turbidity meter is arranged therein, and the turbidity meter is electrically connected to the control system; the accommodating chamber is provided with a sewage outlet connected to the sewage pipe and a water replenishment outlet connected to the water replenishment pipe; the sewage pipe is provided with a sewage pump electrically connected to the control system; the water replenishment pipe is provided with a water replenishment pump electrically connected to the control system; the control system controls the operation of the sewage pump and the water replenishment pump according to the turbidity value fed back by the turbidity meter; The heat exchanger is connected to the control system by electrical signals and is used for exchanging heat with the water in the accommodating chamber.

2. The water tank for tail gas treatment according to claim 1, It is characterized in that The heat exchanger is connected to the accommodating chamber through a first water pipe and a second water pipe. Water in the accommodating chamber enters the interior of the heat exchanger through the first water pipe, and after being cooled by the heat exchanger, returns to the accommodating chamber through the second water pipe. The heat exchanger is also connected to a cooling water inlet pipe and a cooling outlet pipe.

3. The water tank for tail gas treatment according to claim 2, It is characterized in that A first circulating pump is arranged on the first water pipe or the second water pipe, and the first circulating pump is electrically connected to the control system; a second circulating pump is arranged on the cooling water inlet pipe or the cooling water outlet pipe, and the second circulating pump is electrically connected to the control system.

4. The water tank for tail gas treatment according to claim 1, It is characterized in that The sewage outlet and the water replenishment outlet are respectively arranged on two opposite side walls of the accommodating cavity.

5. The water tank for tail gas treatment according to claim 1, It is characterized in that One end of the mixer is fixedly connected to the baffle, and the other end is closed; an opening is provided on the baffle, and the opening is located in an area enclosed by the connection between the baffle and the mixer.

6. The water tank for tail gas treatment according to claim 1, It is characterized in that The air inlet is opened at the top of the mixed flow space, and the mixer is arranged below the air inlet.

7. The water tank for tail gas treatment according to claim 6, It is characterized in that A spray device is provided in the mixed flow space; the spray device is arranged above the mixer, and the water outlet direction of the spray device is toward the mixer.

8. The water tank for tail gas treatment according to claim 1, It is characterized in that A mist making device is arranged in the mixer.

9. An exhaust gas treatment device, It is characterized in that The invention comprises a water tank for tail gas treatment according to any one of claims 1 to 8.

10. A method for controlling an exhaust gas treatment device according to claim 9, It is characterized in that The steps include: S1: the exhaust gas treatment device is started, and the exhaust gas enters the water tank from the air inlet and flows downward; S2: The turbidity meter monitors the turbidity value of the liquid in the water tank in real time and feeds back to the control system; S3: the control system compares the measured turbidity value with a preset turbidity threshold; S4: When the measured turbidity value is greater than or equal to the preset turbidity threshold, the control system controls to turn on the sewage pump and the make-up water pump; when the measured turbidity value is less than the preset turbidity threshold, the control system controls to turn off the sewage pump and the make-up water pump.

11. The control method according to claim 10, It is characterized in that In step S4, after the sewage pump and the water replenishment pump are started, the control system controls the rotation speeds of the sewage pump and the water replenishment pump according to the corresponding relationship between the preset turbidity value and the rotation speeds of the sewage pump and the water replenishment pump.

12. The control method according to claim 10, Features: In step S4, when the turbidity value is less than the preset turbidity threshold value for more than 10 seconds, the control system controls the sewage pump and the water supply pump to stop working.

13. A control method for an exhaust gas treatment device, the exhaust gas treatment device comprising the water tank for exhaust gas treatment as claimed in claim 3, a temperature sensor is arranged in the accommodating cavity, the temperature sensor is connected to the control system by an electrical signal, It is characterized in that The steps include: S1: the exhaust gas treatment device is started, and the exhaust gas enters the water tank from the air inlet and flows downward; S2: The turbidity meter monitors the turbidity value of the liquid in the water tank in real time, and feeds back the turbidity value to the control system; the temperature sensor monitors the temperature value of the liquid in the water tank in real time, and feeds back the temperature value to the control system; S3: The control system compares the measured turbidity value with a preset turbidity threshold; S4: When the turbidity value is greater than or equal to a preset turbidity threshold, controlling the sewage pump and the water supply pump to operate; S5: The control system continuously receives the turbidity signal, and when the turbidity value is less than the preset turbidity threshold, controls the sewage pump and the water supply pump to stop working; at the same time, the control system compares the measured temperature value with the preset temperature threshold; S6: When the temperature value is greater than or equal to a preset temperature threshold, the control system controls the first circulation pump and the second circulation pump to operate.

14. The control method according to claim 15, Features: In step S4, after the water supply pump and the sewage pump are started, the control system controls the rotation speed of the water supply pump and the sewage pump according to the corresponding relationship between the preset turbidity value and the rotation speed of the water supply pump and the sewage pump; In step S6, after the first circulation pump and the second circulation pump are started, the control system controls the rotation speeds of the first circulation pump and the second circulation pump according to the correspondence between the preset temperature value and the rotation speeds of the first circulation pump and the second circulation pump.

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