Automatic production line for glue removal of monocrystalline silicon slice crystal support

Abstract

The invention belongs to the technical field of production related to crystal silicon slices, and discloses an automatic production line for removing glue from a crystal support of a monocrystalline silicon slice. Comprising an adhesive plate separating device, a crystal support heating mechanism, crystal support adhesive removing equipment, a crystal support cleaning and cooling device and a detecting mechanism which are arranged in sequence, a carrying mechanism used for carrying and rotating workpieces is arranged above the crystal support heating mechanism, the crystal support degumming equipment and the crystal support cleaning and cooling device, the viscose plate separating device is used for separating viscose plates on crystal supports, the crystal support heating mechanism is used for heating the crystal supports, and the crystal support degumming equipment is used for degumming the heated crystal supports. The crystal support cleaning and cooling device is used for cleaning and air-drying the degummed crystal support, and the detection mechanism is used for detecting whether the degummed crystal support is qualified or not. The adhesive plate is separated preferentially, the working time is saved due to the overall change of the process, the efficiency is shortened, and the degumming effect is good.

Description

Technical Field

[0001] The invention belongs to the technical field of production related to crystalline silicon slices, and the invention relates to an automated production line for removing glue from crystal trays for single crystal silicon slices. Background Art

[0002] Photovoltaic power generation, as an emerging industry of green and environmentally friendly energy, has attracted widespread attention in the global energy field. Its unique advantages provide strong support for improving the durability and safety of power generation. The photovoltaic slicing workshop uses a slicer to process silicon rods into silicon wafers, greatly improving the wafer output rate of monocrystalline silicon crystal materials. Its main process flow is to glue and cure the crystal rods, adhesive plates, and crystal trays in the adhesive curing production line, and then transport them to the slicer for slicing. After slicing, the silicon wafers are transported to the degumming and cleaning equipment, and the crystal trays are degummed and returned to the adhesive curing production line. The use of automated production lines improves work efficiency, reduces material loss, reduces enterprise operating costs, and accurately controls the amount of glue to reduce harmful emissions. The current mainstream process is still to boil the crystal tray and then manually scrape the glue, which has many disadvantages such as inefficiency and pollution. It seriously hinders the improvement of production efficiency and quality. From the efficiency perspective, boiling the crystal tray requires a long heating waiting process, and manual scraping of glue relies on manual labor of workers, which is slow and prone to fatigue and efficiency drops sharply, making it difficult to match the fast-paced needs of large-scale production. In terms of environmental pollution, the chemical-containing vapors produced by boiling water will pollute the atmosphere. If the scraping wastewater is discharged directly without effective treatment, it will seriously pollute the water body and increase the difficulty and cost of sewage treatment. The instability of manual operation leads to different cleanliness of the crystal tray, which affects the subsequent process and the quality of the final product. What is more important is that workers face safety risks such as scalds and burns when they come into contact with high-temperature equipment and harmful substances, which can easily lead to safety liability accidents. In addition, the existing process is to boil the adhesive board and the crystal tray together before degumming. The overall process is time-consuming and labor-intensive, takes a long time, the degumming effect is not good, and the working conditions are difficult to handle. Summary of the invention

[0003] The purpose of the present invention is to overcome the deficiencies in the above-mentioned background technology and provide an automated production line for removing adhesive from single crystal silicon slice trays, which preferentially separates adhesive plates. The overall change in the process saves working time, shortens work time, and has a good degumming effect.

[0004] The technical solution adopted by the present invention to solve its technical problems is: an automated production line for removing glue from crystal trays for single crystal silicon slices, comprising an adhesive plate separating device, a crystal tray heating mechanism, a crystal tray removing glue equipment, a crystal tray cleaning and cooling device, and a detection mechanism which are arranged in sequence; a conveying mechanism for conveying and rotating workpieces is arranged above the crystal tray heating mechanism, the crystal tray removing glue equipment, and the crystal tray cleaning and cooling device, the adhesive plate separating device is used to separate the adhesive plate on the crystal tray, the crystal tray heating mechanism is used to heat the crystal tray, the crystal tray removing glue equipment is used to remove glue from the heated crystal tray, the crystal tray cleaning and cooling device is used to clean and air-dry the crystal tray after degumming, and the detection mechanism is used to detect whether the crystal tray is qualified after degumming.

[0005] The production process of the above production line is: separation of adhesive plate → heating of crystal tray → debonding of crystal tray → cleaning and cooling of crystal tray → residual adhesive detection of crystal tray;

[0006] The crystal tray is transported to the adhesive sheet separation device via a roller conveyor to separate the adhesive sheet adhered to the crystal tray.

[0007] The crystal tray is further transported to the crystal tray heating mechanism, and then transferred to the heating water tank of the heating station by the transporting gripper of the transporting mechanism. The heating water tank of the heating station heats the crystal tray and the residual glue. After the glue layer attached to the crystal tray is heated to an inactivated state, the transporting gripper of the transporting mechanism transports the crystal tray to the preliminary scraper mechanism of the large area residual glue removal station of the crystal tray glue removal equipment to remove most of the glue layer, and then transported by the conveying roller to the scraping mechanism and polishing mechanism to continue cleaning the residual glue and glue water marks.

[0008] After debonding, the crystal tray is transported by the transporting rotating gripper of the transporting mechanism to the vibration cleaning tank of the crystal tray cleaning and cooling device for cleaning to remove the silicon powder attached to the surface of the crystal tray. At the same time, the crystal tray is cooled by cold water. After cooling, the crystal tray is transported by the transporting rotating gripper to the cleaning conveyor roller, rinsed on the cleaning conveyor roller, and then air-dried.

[0009] After rinsing and air-drying, the wafer tray is transported to the visual inspection station by the cleaning conveyor roller. The residual glue on the surface of the wafer tray is inspected by the industrial camera vision system to ensure the cleanliness of the wafer tray.

[0010] The adhesive plate separation uses a warping knife and a plate separation mechanism to separate the adhesive plate from the crystal tray. The plate picking mechanism uses a robot to grab the adhesive plate and place it on the material rack. The specific structure is limited to achieve overall separation. The overall structure is compact, which greatly reduces the production cost and reduces the overall layout space. The separation effect is good and efficient, and accurate separation can be achieved without heating. And the loss is low, and the impact on the subsequent process of the workpiece is small.

[0011] The crystal tray heating adopts a truss-type transport mechanism to transport the workpiece. The transport mechanism is driven by a servo motor and uses a constant temperature heating method of 80 degrees to heat the crystal tray.

[0012] The crystal tray degumming includes three steps: the first step is to remove the large area of ​​residual glue on the adhesive surface, and the inactivated glue after heating is removed by mechanical scraping; the second step is to scrape the glue on the vertical and end surfaces, and remove the residual glue on each surface of the crystal tray by mechanical scraping; the third step is to polish the glue marks: use a steel brush to polish and clean the residual glue and glue marks that cannot be scraped off. The crystal tray degumming equipment has a compact structure, is easy to operate, occupies a small space, and has specially defined scrapers on each surface. The scraping is cleaner and has fewer scratches. The crystal tray after scraping is also polished, and there are no small glue spots left on the surface of the crystal tray after treatment. It improves the convenience of subsequent work. Improves work efficiency and saves overall production costs.

[0013] The second and third steps of the wafer tray degumming process are driven by synchronous belts. The speed regulating motor is used as the power to drive the synchronous belt to transfer and position the materials between workstations.

[0014] The crystal tray cleaning and cooling adopts a truss type handling mechanism to carry the workpiece. The handling mechanism is driven by a servo motor and the crystal tray cleaning and cooling water is used for cooling. It meets the cleaning requirements, improves work efficiency, and ensures the effects of rinsing and air drying. It is easy to operate, has a simple structure, and runs stably. It reduces the rewashing rate of the crystal tray.

[0015] The wafer tray residual glue detection uses an industrial camera vision system to detect residual glue on the workpiece and screen out the workpieces that are not cleaned.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] The production process and equipment provided by the present invention give priority to separating the adhesive board. Separating the adhesive board when not heated can ensure that there is no residual adhesive on the adhesive surface of the adhesive board, and the heating and degumming process of the adhesive board can be eliminated, which greatly improves efficiency and saves energy. The use of a truss to transport the crystal tray not only ensures the accuracy of the action but also improves the economy of the equipment. Because the entire process is fully automated and does not require human participation, it can greatly improve work efficiency while saving labor costs. The full automation of the single crystal silicon slicing production line has been achieved, filling the automation gap in the crystal tray degumming link. The entire process is safe and reliable, which improves work efficiency, eliminates the intensity of personnel operation, and eliminates the potential safety hazards caused by workpiece handling materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention is further described below in conjunction with the accompanying drawings and embodiments:

[0019] Figure 1 It is a stereoscopic diagram of an automated production line for removing glue from a crystal tray of single crystal silicon slices according to the present invention.

[0020] Figure 2 The present invention is a top view of an automated production line for removing adhesive from a wafer support of single crystal silicon slices.

[0021] Figure 3 It is a structural schematic diagram of the adhesive plate separation device of the present invention. Figure A is a stereoscopic diagram I of the adhesive plate separation device, Figure B is a top view of the adhesive plate separation device, and Figure C is a stereoscopic diagram II of the adhesive plate separation device.

[0022] Figure 4 It is a structural schematic diagram of the crystal support positioning mechanism of the present invention. Figure A is a stereoscopic diagram, Figure B is a main view, and Figure C is a top view.

[0023] Figure 5 It is a three-dimensional diagram of the plate removing mechanism of the present invention.

[0024] Figure 6 It is a stereogram I of the reciprocating transplanting mechanism of the present invention.

[0025] Figure 7 It is a structural schematic diagram I of the reciprocating transplanting mechanism of the present invention. Figure A is a stereogram II of the reciprocating transplanting mechanism, and Figure B is a stereogram III of the reciprocating transplanting mechanism.

[0026] Figure 8 Schematic diagram II of the structure of the reciprocating transplanting mechanism of the present invention. Figure A is a front view of the reciprocating transplanting mechanism, and Figure B is a side view of the reciprocating transplanting mechanism.

[0027] Fig. 9 It is a structural schematic diagram of the pry plate mechanism of the present invention. Figure A is a side view, Figure B is a top view, Figure C is a stereogram I, and Figure D is a stereogram II.

[0028] Fig.10 It is a three-dimensional diagram of the plate separation mechanism of the present invention.

[0029] Fig.11 It is a top view of the plate separation mechanism of the present invention.

[0030] Fig.12 It is a front view of the plate separation mechanism of the present invention.

[0031] Fig.13 It is a three-dimensional diagram of the crystal support transplanting platform of the present invention.

[0032] Fig.14 It is a three-dimensional diagram of the transport mechanism of the present invention.

[0033] Fig.15 It is a structural schematic diagram of the carrying gripper of the present invention. Figure A is a side view, and Figure B is a stereogram.

[0034] Fig.16 It is a structural schematic diagram of the transport rotary gripper of the present invention. Figure A is a stereogram I, Figure B is a side view, Figure C is a stereogram II, and Figure D is a stereogram III.

[0035] Fig.17It is a structural schematic diagram of the transport rotating assembly and the transport clamping claw of the present invention. Figure A is a stereoscopic diagram of the rotating assembly, and Figure B is a stereoscopic diagram of the transport clamping claw.

[0036] Fig.18 It is a three-dimensional diagram of the crystal support heating mechanism of the present invention.

[0037] Fig.19 It is a structural schematic diagram of the heating water tank and the heating preliminary positioning assembly of the present invention. Figure A is a stereoscopic diagram of the heating water tank, and Figure B is a stereoscopic diagram of the heating preliminary positioning assembly.

[0038] Fig. 20 It is a three-dimensional diagram of the wafer tray debonding device of the present invention.

[0039] Fig.21 It is a front view of the preliminary scraper mechanism of the present invention.

[0040] Fig. 22 It is a three-dimensional diagram of the preliminary scraper mechanism of the present invention.

[0041] Fig.23 It is a structural schematic diagram of the lifting and turning mechanism and the lifting and positioning mechanism of the present invention. Figure A is a stereoscopic diagram of the lifting and turning mechanism, Figure B is a front view of the lifting and turning mechanism, Figure C is a side view of the lifting and turning mechanism, and Figure D is a stereoscopic diagram of the lifting and positioning mechanism.

[0042] Fig.24 It is a structural schematic diagram of the scraping mechanism and the scraping frame of the present invention. Figure A is a stereoscopic diagram of the scraping mechanism, and Figure B is a stereoscopic diagram of the scraping frame.

[0043] Fig.25 It is a structural schematic diagram of the glue-coating surface scraping assembly and the glue-coating unit of the present invention. Figure A is a front view of the glue-coating surface scraping assembly, Figure B is a side view of the glue-coating surface scraping assembly, Figure C is a front view of the glue-coating surface scraping unit, and Figure D is a stereoscopic view of the glue-coating unit.

[0044] Fig.26 1 is a structural schematic diagram of the front and rear end surface scraping assembly of the present invention. Figure A is a main view, and Figure B is a side view.

[0045] Fig. 27 This is a structural schematic diagram II of the front and rear end surface scraping assembly of the present invention. Figure A is a stereoscopic diagram, and Figure B is a top view.

[0046] Fig.28 It is a three-dimensional diagram of the grinding mechanism of the present invention.

[0047] Fig.29 It is a structural schematic diagram of the adhesive surface grinding mechanism of the present invention. Figure A is a main view, and Figure B is a stereogram.

[0048] Fig.30 It is a structural schematic diagram of the crystal tray cleaning and cooling device of the present invention.

[0049] Fig.31 It is a structural schematic diagram of the flushing and air-drying mechanism of the present invention.

[0050] Fig.32 It is a structural schematic diagram of the detection mechanism of the present invention.

[0051] In the figure, 1. adhesive plate separation device, 2. conveying mechanism, 3. crystal tray heating mechanism, 4. crystal tray degumming equipment, 5. crystal tray cleaning and cooling device, 6. detection mechanism, 101. main frame, 102. crystal tray positioning mechanism, 103. plate picking mechanism, 104. reciprocating transplanting mechanism, 105. prying plate mechanism, 106. plate separation mechanism, 107. crystal tray transplanting platform, 10201. stop cylinder fixed beam, 10202. stop cylinder bracket, 10203. stop cylinder A, 10204. positioning cylinder A, 10205. positioning support plate, 10206 positioning cylinder bracket, 10207. positioning cylinder fixed beam, 10208. stop block, 10209. positioning guide, 10210. in-position sensor bracket, 10211. Crystal support positioning block, 10301. Robot base, 10302. Clamping cylinder, 10303. Adhesive plate clamp, 10401. Rotating transplanting frame, 10402. Transplanting base, 10403. Linear guide rail A, 10404. Linear bearing A, 10405. Guide rod, 10406. Lifting support frame, 10407. Lifting cylinder A, 10408. Lifting positioning frame, 10409. Positioning seat, 10410. Speed ​​regulating motor A, 10411. Rotating positioning plate, 10412. Positioning clamping cylinder, 10413. Limiting groove, 10414. Locking bottom plate, 10501. Warping cylinder support, 10502. Warping cylinder, 10503. Linear guide rail B, 10504 .Warping knife, 10505.Linear guide C, 10506.Lifting support A, 10507.Lifting cylinder A, 10601.Fixed rod, 10602.Linear guide D, 10603.Scraper A, 10604.Rodless cylinder A, 10701.Transplanting frame, 10702.Linear guide E, 10703.Transplanting platform, 10704.Rodless cylinder B, 10705.Location column, 10706.Foot, 201.Truss beam, 202.Transporting gripper, 203.Transporting claw, 204.Transporting rotating assembly, 205.Transporting rotating gripper, 206.Accent cover, 20201.X-axis servo motor A, 20202.Z-axis servo motor A, 20203.Motor fixing frame A, 20 204. Z-axis rack A, 20205. Z-axis column A, 20206. Z-axis limit block A, 20207. Gripper connection seat, 20301. Gripper base plate, 20302. Linear guide F, 20303. Gripper cylinder, 20304. Gripper hand plate, 2041. Rotating motor, 2042. Rotating gripper connection seat, 20501. X-axis servo motor B, 20502. Z-axis servo motor B, 20503. Motor fixing frame B, 20504. Z-axis rack B, 20505. Z-axis column B, 301. Heating base, 302. Preliminary positioning assembly, 303. Heating water tank, 304. Heating water tank fixing frame, 305. Waterproof baffle, 30201. Preliminary positioning frame, 30202.Preliminary positioning cylinder, 30203. Preliminary positioning cylinder bracket, 30204. Guide limiter, 30301. Heating water tank frame, 30302. Tray, 30303. Tray support frame, 30304. Heating rod, 401. Bottom overall frame, 402. Preliminary scraper mechanism, 403. Lifting and flipping mechanism, 404. Conveying roller, 405. Lifting and positioning mechanism, 406. Glue scraping mechanism, 407. Grinding mechanism, 40201. Scraper support seat, 40202. Rodless cylinder C, 40203. Waterproof cover A, 40204. Bearing support, 40205. Guide shaft A, 40206. Spring A, 40207. Scraper bracket, 40208. Scraper B, 40209. Slide plate A, 40210. Oil-free bushing, 40211. Linear guide G, 40301. Lifting base, 40302. Lifting cylinder B, 40303. Flip base, 40304. Guide shaft B, 40305. Linear bearing B, 40306. Rotary cylinder bracket, 40307. Rotary cylinder, 40308. Bearing, 40309. Drive shaft, 40310. Rotary clamp, 40311. Stop cylinder support, 40312. Stop cylinder B, 40313. Cylinder connecting support plate, 40314. Baffle plate, 40315. Bearing seat, 40501 Lifting base, 40502. Positioning base, 40503. Lifting cylinder B, 40504. Positioning block, 40505. Positioning cylinder B, 40 61. Glue scraping frame, 4062. Glue scraping assembly on the glue coating surface, 4063. Glue scraping assembly on the front and rear ends, 406101. Glue scraping frame, 406102. Motor support, 406103. Servo motor, 406104. Synchronous belt A, 406105. Idle wheel bracket, 406106. Idle wheel, 406107. Positioning pin, 406108. Driving wheel, 406109. Linear guide H, 406201. Fixed bracket, 406202. Sliding block A, 406203. Vertical plate, 406204. Lifting slide plate, 406205. Sliding block B, 406206. Lifting cylinder C, 406207. Side scraper slide plate, 406208. Scraper cylinder, 406209. Cylinder connecting plate, 406210. Sliding block, 406211. Pin, 406212. Side tool holder, 406213. Side scraper, 406214. Adapter block, 406215. Scraper main plate, 406216. Step pin, 406217. Spring B, 406218. Scraper support block, 406219. Rotating shaft, 406220. Tool holder A, 406221. Scraper C, 406222. Timing belt limit block A, 406223. Water nozzle, 406301. Slide plate B, 406302. Cylinder connector, 406303. Cylinder A, 406304. Cylinder bracket, 406305. Sliding block C, 406306. Motor, 406307. Reciprocating slide plate, 406308.Linear guide I, 406309. Rotary axis A, 406310. Cam, 406311. Linear guide J, 406312. Cylinder movable end connector, 406313. Drive block, 406314. Sliding plate, 406315. Tool holder B, 406316. Spring washer, 406317. Connecting pin, 406318. Waterproof cover B, 406319. Water pipe support Frame, 406320. Water pipe A, 406321. Water spray pipe, 406322. Scraper D, 4071. Grinding frame, 4072. Adhesive surface grinding mechanism, 407101. Synchronous belt B, 407201. Slide plate C, 407202. Sliding block D, 407203. Cylinder B, 407204. Speed ​​regulating motor B, 407205. Lifting support B, 407206 .Linear guide rail K, 407207. Rotary axis B, 407208. Brush fixing plate, 407209. Wire brush, 407210. Water pipe B, 407211. Nozzle, 407212. Timing belt limit block B, 501. Cleaning and cooling fixed frame, 502. Vibration cleaning tank, 503. Flushing and air-drying mechanism, 50301. Cleaning conveying roller, 50302. Box, 50303. Lifting cylinder D, 50304. Flushing nozzle, 50305. Air-drying nozzle, 50306. Driving motor, 50307. Transmission shaft, 50308. Lifting sliding door, 50309. Proximity switch, 50310. Cleaning and air-drying base, 601. Detection conveying roller, 602. Detection fixed frame, 603. Industrial camera, 604. Light source, 605. Opposition switch. . DETAILED DESCRIPTION

[0052] The present invention is further described below in conjunction with the accompanying drawings, but the present invention is not limited to the following embodiments.

[0053] Example 1

[0054] An automated production line for removing adhesive from a monocrystalline silicon wafer tray, such as Figure 1-32 As shown, it includes an adhesive plate separating device 1, a crystal tray heating mechanism 3, a crystal tray degumming equipment 4, a crystal tray cleaning and cooling device 5, and a detection mechanism 6 which are arranged in sequence; a conveying mechanism 2 for conveying and rotating the workpiece is arranged above the crystal tray heating mechanism 3, the crystal tray degumming equipment 4, and the crystal tray cleaning and cooling device 5; the adhesive plate separating device 1 is used to separate the adhesive plate on the crystal tray; the crystal tray heating mechanism 3 is used to heat the crystal tray; the crystal tray degumming equipment 4 is used to degumming the heated crystal tray; the crystal tray cleaning and cooling device 5 is used to clean and air-dry the crystal tray after degumming; and the detection mechanism 6 is used to detect whether there is residual glue on the crystal tray after degumming.

[0055] The adhesive plate separation device 1 includes a main frame 101, a crystal support positioning mechanism 102, a plate picking mechanism 103, a reciprocating transfer mechanism 104, a prying plate mechanism 105, a plate separation mechanism 106, and a crystal support transfer platform 107; the crystal support positioning mechanism 102 is arranged on a frame at one end of the main frame 101, the reciprocating transfer mechanism 104 is arranged on a base of the main frame 101, the plate picking mechanism 103 is arranged adjacent to the reciprocating transfer mechanism 104, the plate separation mechanism 106 and the prying plate mechanism 105 are arranged on the main frame 101, and the crystal support transfer platform 107 is arranged at the other end of the main frame 101, the crystal support transfer platform 107 is arranged behind the reciprocating transfer mechanism 104, the plate separation mechanism 106 is arranged above the reciprocating transfer mechanism 104, the prying plate mechanism 105 is arranged on a frame on the side of the main frame 101, and the prying plate mechanism 105 is arranged in front of the plate separation mechanism 106.

[0056] The crystal support positioning mechanism 102 includes a stop cylinder fixed beam 10201 and a positioning cylinder fixed beam 10207 arranged up and down; a stop cylinder 10203A for stopping the workpiece is arranged on the stop cylinder fixed beam 10201, a stop block 10208 is arranged at the front end of the cylinder rod of the stop cylinder A10203, and a positioning cylinder A10204 for positioning the workpiece is arranged at each end of the positioning cylinder fixed beam 10207, wherein the cylinder rod of one of the positioning cylinders A10204 is A positioning guide 10209 is arranged at the front end for positioning and guiding the workpiece, and a crystal support positioning block 10211 is arranged at the front end of the cylinder rod of another positioning cylinder A10204. The positioning guide 10209 is a U-shaped structure, and its U-shaped groove is interference fit with the workpiece; the crystal support positioning block 10211 is connected to the front end of the cylinder rod of the positioning cylinder A10204 through the positioning support plate 10205, and a crystal support positioning block 10211 is arranged at each of the four corners of the front end of the positioning support plate 10205 for positioning the workpiece.

[0057] The stopping cylinder A10203 is arranged vertically, and the positioning cylinder A10204 is arranged horizontally and facing each other.

[0058] The positioning cylinder A10204 is set on the positioning cylinder fixed beam 10207 through the positioning cylinder bracket 10206.

[0059] The crystal support positioning block 10211 is preferably a round block or a square block. The crystal support positioning block 10211 and the positioning support plate 10205 are elastically connected.

[0060] The stop cylinder A10203 is arranged on the stop cylinder fixed beam 10201 through the stop cylinder bracket 10202. Preferably, two stop cylinders A10203 are arranged, and the two stop cylinders A10203 are symmetrically arranged on the stop cylinder fixed beam 10201.

[0061] An in-position sensor is arranged adjacent to the stop cylinder A10203, and the in-position sensor is fixed on the stop cylinder fixed beam 10201 through an in-position sensor bracket 10210.

[0062] It is preferred to provide two in-place sensors, with one in-place sensor correspondingly provided adjacent to each side of the stop cylinder A10203.

[0063] The two positioning cylinders A10204 are symmetrically arranged.

[0064] The positioning guide 10209 is connected to the front end of the cylinder rod of the positioning cylinder A10204 through the positioning support plate 10205. The positioning support plate 10205 is set at the front end of the cylinder rod of the positioning cylinder A10204, and the positioning guide 10209 is set on the positioning support plate 10205.

[0065] The stopping cylinder fixed beam 10201 and the positioning cylinder fixed beam 10207 are connected to form a frame structure with an upper and lower layout, or are respectively fixed on the main frame 101 to form a structure with an upper and lower layout.

[0066] The stopping cylinder fixed beam 10201 and the positioning cylinder fixed beam 10207 are preferably arranged in an up-down staggered layout.

[0067] The board picking mechanism 103 includes a board picking robot, which is arranged on a robot base 10301, and a glue board clamp 10303 is arranged at the front end of the board picking robot; the glue board clamp 10303 includes a clamping cylinder 10302, which is connected to the front end of the board picking robot through a cylinder connecting plate, and the two ends of the clamping cylinder 10302 are respectively connected to a gripper connecting plate, and the bottom of the gripper connecting plate is connected to the clamp, and a limit guide groove is arranged on the side of the clamp. The board picking robot is installed to the ground through the robot base 10301.

[0068] The panel removing robot is preferably a six-axis robot. The panel removing mechanism 103 is arranged on the side of the main frame 101 .

[0069] The reciprocating transplanting mechanism 104 includes a rotating transplanting frame 10401, on which a transplanting assembly is arranged, a rotating assembly is arranged at the front end and the rear end of the transplanting assembly respectively, the rotating assembly is arranged at a position higher than the transplanting assembly, the transplanting assembly reciprocates on the rotating transplanting frame 10401 through a sliding assembly, a lifting assembly is also arranged on the transplanting assembly, and a locking assembly for locking the workpiece is also arranged in the lifting assembly.

[0070] The reciprocating transplanting mechanism 104 is connected to the main frame 101 through a rotating transplanting frame 10401.

[0071] The transplanting assembly includes a transplanting base 10402, a lifting support frame 10406 ​​is arranged on the transplanting base 10402, a lifting positioning frame 10408 is arranged on the top of the lifting support frame 10406, two lifting positioning frames 10408 are preferably arranged, each lifting positioning frame 10408 is preferably arranged on the top surface of the side of the lifting support frame 10406, and each lifting positioning frame 10408 is provided with a plurality of limiting grooves 10413, and the limiting grooves 10413 on the two lifting positioning frames 10408 are symmetrically arranged. Preferably, four limiting grooves 10413 are arranged.

[0072] The rotating assembly includes a speed regulating motor A10410 and two rotating positioning plates 10411. The two rotating positioning plates 10411 are connected by a rotating shaft, one end of the rotating shaft is connected to the output end of the speed regulating motor A10410, and the other end is connected to the bearing seat. The bearing seat is arranged on the rotating transplanting frame 10401.

[0073] A long workpiece groove is provided in the middle of the rotating positioning plate 10411 for limiting the workpiece.

[0074] The speed regulating motor A10410 is arranged on the rotating transplanting frame 10401, and the speed regulating motor A10410 is arranged on the rotating transplanting frame 10401 through the motor fixing seat. The rotating shaft passes through the bearing seat and is connected to the output end of the speed regulating motor A10410.

[0075] The lifting assembly includes a lifting support frame 10406 ​​and a lifting cylinder A10407. The lifting cylinder A10407 is arranged on the transplanting base 10402. The front end of the cylinder rod of the lifting cylinder A10407 is connected to the ground of the lifting support frame 10406 ​​through a cylinder connecting piece. A guide rod 10405 is arranged on the bottom surface of the lifting support frame 10406. A linear bearing A10404 is arranged on the transplanting base 10402. The lifting support frame 10406 ​​is movably connected to the transplanting base 10402 through the guide rod 10405 and the linear bearing A10404.

[0076] Preferably, four guide rods 10405 and four linear bearings A10404 are provided.

[0077] The sliding assembly includes a linear guide rail A10403 and a slider, the linear guide rail A10403 is arranged on the rotating transplanting frame 10401, the slider is arranged on the ground of the transplanting base 10402, and the transplanting base 10402 moves on the rotating transplanting frame 10401 through the sliding assembly. Preferably, two linear guide rails A10403 are arranged.

[0078] The rotating transplanting frame 10401 is provided with a workpiece in-place sensor, and the workpiece in-place sensor is arranged on the outer side of the rotating positioning plate 10411 .

[0079] The locking assembly includes a locking base plate 10414, both ends of which are fixed on the rotating transplanting frame 10401, the locking base plate 10414 is arranged below the jacking and positioning frame 10408, a positioning and clamping cylinder 10412 is arranged on the locking base plate 10414, and a locking block is arranged at the front end of the cylinder rod of the positioning and clamping cylinder 10412; a positioning seat 10409 for placing a workpiece is arranged at one end of the locking base plate 10414, and a base for assisting in placing the workpiece is arranged at the other end. The positioning seat 10409 and the base are arranged outside the jacking and positioning frame 10408.

[0080] A workpiece in-place sensor is disposed on the locking base plate 10414 , and the workpiece in-place sensor is disposed adjacent to the positioning seat 10409 .

[0081] The pry plate mechanism 105 includes a warping cylinder support 10501, a sliding component is arranged on the back of the warping cylinder support 10501, and the warping cylinder support 10501 is slidably connected to the main frame 101 through the sliding component. A warping cylinder 10502 is also arranged on the back of the warping cylinder support 10501, and the front end of the cylinder rod of the warping cylinder 10502 penetrates the warping cylinder support 10501 and is connected to the warping knife 10504, a lifting support A10506 is arranged below the warping cylinder support 10501, and a lifting cylinder A10507 is arranged on the lifting support A10506, and the front end of the cylinder rod of the lifting cylinder A10507 penetrates the lifting support A10506 and is connected to the bottom surface of the warping cylinder support 10501 through a connecting piece.

[0082] The front end of the cylinder rod of the warping cylinder 10502 is connected to the warping knife 10504 through a connecting block.

[0083] A position sensor for detecting the upper and lower distances from the workpiece is also provided on the warping cylinder support, and is used to detect the position distance from the workpiece.

[0084] The tilting knife 10504 includes a tilting knife support and a tilting knife plate. The bottom of the tilting knife support is connected to the tilting edge cylinder support 10501 through a linear guide rail C10505 and a slider to achieve forward and backward sliding. A tilting knife connecting plate is arranged on the tilting knife support. The front end of the tilting knife connecting plate is connected to the end of the tilting knife plate, and the front end of the tilting knife connecting plate is an inclined surface. The tilting knife plate is inclined, and a plurality of grooves are arranged at the front end of the tilting knife plate, and the protrusion is an inclined knife tip.

[0085] The warping cylinder 502 is arranged on the warping cylinder support 10501 through a cylinder fixing part.

[0086] The sliding assembly includes a linear guide rail B10503 and a slider, the slider is arranged on the warping cylinder support 10501, and the linear guide rail B10503 is arranged on the main frame 101. The side of the lifting support A10506 is arranged on the main frame 101.

[0087] The plate separation mechanism 106 includes a fixed rod 10601, both ends of which are respectively connected and fixed to the main frame 101, a rodless cylinder A10604 is arranged on the fixed rod 10601, the movable end of the rodless cylinder A10604 is connected to the scraper A10603 through a connecting block, a linear guide D10602 is arranged on the top surface of the fixed rod 10601, and the connecting block is slidably connected to the linear guide D10602 through a slider.

[0088] The plate separation mechanism 106 is fixed to the main frame 101 via a fixing rod 10601 .

[0089] The scraper A10603 is an L-shaped structure, the inner angle of the L-shape is a curved surface structure, and the long side of the L-shaped scraper A10603 is a wedge-shaped three-dimensional structure.

[0090] The crystal tray transplanting platform 107 includes a transplanting frame 10701 and a transplanting platform 10703. The transplanting platform 10703 is arranged on the top surface of the transplanting frame 10701. The transplanting platform 10703 is slidably connected to the top surface of the transplanting frame 10701 through a linear guide rail E10702 and a slider. A rodless cylinder B10704 is also arranged on the transplanting frame 10701. The movable end of the rodless cylinder B10704 is connected to the bottom surface of the transplanting platform 10703 through a connecting piece. A positioning column 10705 for limiting the position of the workpiece is arranged on the transplanting platform 10703. The positioning column 10705 is arranged at the end corner of the top surface of the transplanting platform 10703.

[0091] A foot 10706 is provided at the bottom of the transplanting platform 10703, and the transplanting platform 10703 is set on the ground through the foot 10706.

[0092] The transport mechanism 2 includes a truss beam 201, on which a transport gripper 202 and a transport rotating gripper 205 are arranged, and the transport gripper 202 and the transport rotating gripper 205 are connected to the truss beam 201 through a transport walking guide assembly. The transport gripper 202 includes an X-axis walking assembly and a Z-axis walking assembly, and the Z-axis walking assembly is arranged on the X-axis walking assembly, and a transport clamp 203 is arranged at the bottom of the Z-axis walking assembly; the transport rotating gripper 205 includes an X-axis walking assembly and a Z-axis walking assembly, and the Z-axis walking assembly is arranged on the X-axis walking assembly, and a transport rotating assembly 204 is arranged at the bottom of the Z-axis walking assembly, and the bottom of the transport rotating assembly 204 is connected to the transport clamp 203.

[0093] The transport walking guide assembly is a rack, and two racks are arranged on the truss beam 201. The transport mechanism 2 is arranged on the top of the frame of the crystal tray heating mechanism 3, the crystal tray degumming equipment 4, and the crystal tray cleaning and cooling device 5 through a fixed frame.

[0094] The X-axis walking assembly of the carrying gripper 202 includes an X-axis servo motor, which is arranged on a motor fixing frame. The output end of the X-axis servo motor is connected to a gear box, and both ends of the gear box are respectively connected to two X-axis transmission shafts. The X-axis transmission shafts are respectively connected to gears, and the gears are meshed with the racks on the truss beam 201.

[0095] The Z-axis walking assembly of the carrying gripper 202 includes a Z-axis servo motor, which is arranged on a motor fixing frame, on which a Z-axis column is inserted, on which a Z-axis rack is arranged, and the output end of the Z-axis servo motor is connected to a Z-axis transmission shaft, which is connected to a gear, and the gear is meshed with the Z-axis rack; the bottom of the Z-axis column is connected to the carrying clamp 203 through a clamp connecting seat 20207.

[0096] A slider is arranged on the motor fixing frame, a Z-axis linear guide is arranged on the Z-axis column, and the Z-axis linear guide is used for a Z-axis limit block for limiting the displacement of the Z-axis. The Z-axis linear guide is slidably connected with the slider.

[0097] The carrying clamp 203 of the carrying gripper 202 includes a clamp base plate 20301, through which the carrying clamp 203 is connected to the clamp connection seat 20207, a clamp cylinder 20303 is arranged on the bottom surface of the clamp base plate 20301, and two movable ends of the clamp cylinder 20303 are respectively connected to a gripper plate 20304 through a connecting piece, a linear guide F20302 is arranged on the bottom surface of the clamp base plate 20301, a slider is arranged on the top of the gripper plate 20304, and the linear guide F20302 and the slider are slidably connected. A bottom baffle for grabbing a workpiece is arranged at the bottom of the gripper plate 20304.

[0098] The X-axis walking assembly of the carrying rotating gripper 205 includes an X-axis servo motor, which is arranged on a motor fixing frame. The output end of the X-axis servo motor is connected to a gear box, and the two ends of the gear box are respectively connected to two X-axis transmission shafts. The X-axis transmission shafts are respectively connected to gears, and the gears are meshed with the racks on the truss beam 201.

[0099] The Z-axis walking assembly of the transport rotating gripper 205 includes a Z-axis servo motor, which is arranged on a motor fixing frame, on which a Z-axis column is inserted, on which a Z-axis rack is arranged, and the output end of the Z-axis servo motor is connected to a Z-axis transmission shaft, which is connected to a gear, and the gear is meshed with the Z-axis rack; the bottom of the Z-axis column is connected to the transport clamp 203 through the transport rotating assembly 204.

[0100] A slider is arranged on the motor fixing frame, a Z-axis linear guide is arranged on the Z-axis column, and the Z-axis linear guide is used for a Z-axis limit block for limiting the displacement of the Z-axis. The Z-axis linear guide is slidably connected with the slider.

[0101] The transport rotating assembly 204 includes a rotating jaw connecting seat 2042 and a rotating motor 2041. The rotating motor 2041 is arranged on the rotating jaw connecting seat 2042. The output end of the rotating motor 2041 is connected to the jaw base plate 20301. The rotating jaw connecting seat 2042 is connected to the bottom of the Z-axis column.

[0102] The transporting clamp 203 of the transporting rotating gripper 205 includes a clamp base plate 20301, through which the transporting clamp 203 is connected to the rotating motor 2041, a clamp cylinder 20303 is arranged on the bottom surface of the clamp base plate 20301, and two movable ends of the clamp cylinder 20303 are respectively connected to a gripper plate 20304 through a connecting piece, a linear guide F20302 is arranged on the bottom surface of the clamp base plate 20301, a slider is arranged on the top of the gripper plate 20304, and the linear guide F20302 and the slider are slidably connected. A bottom baffle for grabbing a workpiece is arranged at the bottom of the gripper plate 20304.

[0103] The outer periphery of the transport clamp 203 and the Z-axis column is also provided with an accordion cover 206 for waterproofing.

[0104] The transport gripper 202 is used to transfer the crystal tray positioned by the preliminary positioning assembly 302 to the heating water tank 303 of the crystal tray heating mechanism 3. The transport gripper 202 is also used to transfer the crystal tray cleaned by the heating water tank to the crystal tray degumming equipment 4. The transport rotating gripper 205 transfers the crystal tray after degumming by the crystal tray degumming equipment 4 to the crystal tray cleaning and cooling device 5 for cleaning, and completes the rotation work during the transport process.

[0105] The crystal support heating mechanism 3 includes a heating base 301 and a preliminary positioning assembly 302; the preliminary positioning assembly 302 is arranged at the front end of the heating base 301, and a heating water tank 303 is arranged at the rear end of the preliminary positioning assembly 302, and the heating water tank 303 is fixed on the heating base 301 through a heating water tank fixing frame 304; a waterproof baffle 305 for waterproofing is also arranged on the upper part of the heating base 301. The waterproof baffle 305 is preferably in a grid shape.

[0106] The preliminary positioning assembly 302 includes a preliminary positioning frame 30201, and a preliminary positioning cylinder 30202 is respectively arranged at both ends of the preliminary positioning frame 30201. The two preliminary positioning cylinders 30202 are arranged opposite to each other. The front end of the cylinder rod of the preliminary positioning cylinder 30202 is connected to the guide limit member 30204 through a connecting member, and the front end surface of the guide limit member 30204 is a U-shaped structure.

[0107] The heating water tank 303 comprises a heating water tank frame 30301, the heating water tank frame 30301 is filled with hot water, a tray support frame 30303 is arranged in the heating water tank frame 30301, a tray 30302 is arranged on the tray support frame 30303, a filter rubber net is arranged on the tray 30302, and a plurality of heating rods 30304 are arranged in the heating water tank frame 30301. The heating rods 30304 are commercially available products.

[0108] The preliminary positioning cylinder 30202 is fixed on the preliminary positioning frame 30201 through the preliminary positioning cylinder bracket 30203.

[0109] A temperature sensor for detecting water temperature is arranged in the heating water tank 303, and the water temperature is preferably 80 degrees Celsius.

[0110] The heating water tank 303 is also provided with a liquid level meter for detecting the water level.

[0111] The heating water tank 303 is also provided with a water inlet, which is connected to a water inlet pipeline, and a solenoid valve is provided on the water inlet pipeline.

[0112] The bottom of the heating water tank 303 is also provided with a drain outlet and a glue discharge outlet.

[0113] A preliminary positioning assembly 302 is disposed in the middle of the end of the wafer tray transplanting platform 107 .

[0114] The crystal tray degumming equipment 4 includes a bottom overall frame 401; a preliminary scraper mechanism 402 is arranged at one end of the bottom overall frame 401, and a lifting and flipping mechanism 403, a scraping mechanism 406, and a grinding mechanism 407 are arranged in sequence on the bottom overall frame 401; a conveying roller 404 for conveying workpieces is also arranged on the bottom overall frame 401, and the conveying roller 404 is inserted and arranged in the lifting and flipping mechanism 403, and the conveying roller 404 is arranged below the scraping mechanism 406 and the grinding mechanism 407, and a lifting and positioning mechanism 405 is arranged below the scraping mechanism 406 and the grinding mechanism 407, and the lifting and positioning mechanism 405 is arranged on the bottom overall frame 401 and in the middle of the conveying roller 404, and the preliminary scraper mechanism 402 is arranged at the front end of the conveying roller 404.

[0115] The preliminary scraper mechanism 402 includes a scraper support seat 40201, on which a rodless cylinder C40202 is arranged, and the movable end of the rodless cylinder C40202 is connected to a slide plate A40209, and the slide plate A40209 is slidingly connected to the scraper support seat 40201 through a sliding assembly; a bearing support 40204 is arranged in front of the slide plate A40209, on which a scraper bracket 40207 is arranged, and a scraper B40208 is arranged at the front end of the scraper bracket 40207, and the scraper bracket 40207 and the bearing support 40204 are flexibly connected, and the lower part of the scraper bracket 40207 is connected to a guide shaft A40205, and the guide shaft A40205 passes through a spring A40206 and is sleeved and connected with an oil-free bushing 40210.

[0116] Two guide shafts A40205 are preferably provided.

[0117] The oil-free bushing 40210 is nested and fixed on the bearing support 40204. The number of the oil-free bushing 40210 and the guide shaft A40205 is the same.

[0118] The sliding assembly includes a linear guide G40211 and a slider. The linear guide G40211 is arranged on the scraper support seat 40201, and the slider is arranged on the back of the slide plate A40209.

[0119] The lower two sides of the slide plate A40209 are movably connected to the scraper support seat 40201 through a slider and a linear guide G40211, and the upper back side of the slide plate A40209 is connected to the movable end of the rodless cylinder C40202.

[0120] The preliminary scraper mechanism 402 is fixed on the bottom integral frame 401 through a scraper support seat 40201 .

[0121] A waterproof cover A40203 is fixedly arranged above the scraper support seat 40201.

[0122] The scraper bracket 40207 sets the surface of the scraper B40208 as an inclined surface.

[0123] A proximity switch for detecting whether the workpiece is in place is also provided on the scraper support seat 40201.

[0124] The conveying roller 404 is an existing device, a commercially available device, and is not particularly limited. It can just realize the conveyance of the workpiece.

[0125] The lifting and flipping mechanism 403 includes a lifting base 40301, a lifting cylinder B40302 is arranged at the bottom of the lifting base 40301, the front end of the cylinder rod of the lifting cylinder B40302 is connected to the flipping base 40303, a rotary cylinder 40307 is arranged on each side of the upper part of the flipping base 40303, the rotary cylinder 40307 is connected to the rotary clamp 40310 through the driving shaft 40309, and a stop cylinder B40312 is also arranged on the lifting base 40301, and the stop cylinder B40312 is arranged on one side of the long side of the lifting base 40301, and the front end of the cylinder rod of the stop cylinder B40312 is connected to the material blocking plate 40314.

[0126] A guide shaft B40304 is provided at the lower part of the flip base 40303, and a linear bearing B40305 is provided on the lifting base 40301. The guide shaft B40304 and the linear bearing B40305 are sleeved and connected. Preferably, four guide shafts B40304 and four linear bearings B40305 are provided respectively.

[0127] The front end of the cylinder rod of the lifting cylinder B40302 is connected to the bottom surface of the flip base 40303 through a connecting block.

[0128] The lifting and flipping mechanism 403 is fixed on the bottom overall frame 401 through a lifting base 40301.

[0129] The rotary cylinder 40307 is set on the flip base 40303 through the rotary cylinder bracket 40306.

[0130] The stop cylinder B40312 is arranged on the lifting base 40301 through the stop cylinder B support 40311.

[0131] The material blocking plate 40314 is connected to the front end of the cylinder rod of the stopping cylinder B40312 through the cylinder connecting support plate 40313.

[0132] The rotary clamping jaw 40310 includes a clamping jaw bottom plate and clamping jaw plates symmetrically arranged above and below the clamping jaw bottom plate. The clamping jaw bottom plate is connected to the driving shaft 40309, and a proximity switch is arranged on the clamping jaw plate.

[0133] A bearing seat 40315 is arranged on the rotary cylinder bracket 40306. The bearing seat 40315 is concentric with the rotary shaft of the rotary cylinder 40307. A bearing 40308 is embedded in the bearing seat 40315. The driving shaft 40309 passes through the bearing 40308 and is fitted with the rotary shaft of the rotary cylinder 40307. The rotary clamp 40310 is installed at the front end of the driving shaft 40309.

[0134] The lifting and positioning mechanism 405 includes a lifting base 40501, on which a lifting cylinder B40503 is arranged, and the top end of the cylinder rod of the lifting cylinder B40503 is connected to the positioning base 40502, and the positioning base 40502 and the lifting base 40501 are connected via guide columns and bearings; a limit block is arranged at each end of the positioning base 40502, and a positioning cylinder B40505 is arranged on the inner side of each limit block, and a positioning plate is arranged at the upper end of the positioning cylinder B40505, and the top end of the cylinder rod of the positioning cylinder B40505 passes through the positioning plate and is connected to the positioning block 40504.

[0135] The setting height of the positioning plate is lower than the height of the limit block.

[0136] A crystal support limiting protrusion is arranged on each limiting block.

[0137] The top end of the cylinder rod of the positioning cylinder B40505 is connected to the positioning block 40504 through a connecting piece.

[0138] The positioning block 40504 is in the shape of an elongated strip, and the width of the positioning block 40504 is smaller than the width of the narrow side of the crystal support groove, and the length of the positioning block 40504 is greater than the width of the narrow side of the crystal support groove.

[0139] The top end of the cylinder rod of the lifting cylinder B40503 is connected to the positioning base 40502 through a connecting block.

[0140] The lifting and positioning mechanism 405 is arranged on the bottom integral frame 401 through a lifting base 40501 .

[0141] The scraper mechanism 406 includes a scraper frame 4061, and a front and rear end scraper component 4063 for removing the glue on the front and rear surfaces of the crystal support is respectively arranged at both ends of the scraper frame 4061, and a glue-coated surface scraper component 4062 for removing the glue on the surface of the crystal support is arranged in the middle, and a driving component for driving the glue-coated surface scraper component 4062 to reciprocate is arranged on the scraper frame 4061.

[0142] The scraper mechanism 6 is fixed on the bottom integral frame 401 through the scraper frame 4061 .

[0143] The scraper frame 4061 includes a scraper frame 406101, a driving assembly is arranged on the scraper frame 406101, and the driving assembly includes a servo motor 406103, the servo motor 406103 is arranged at one end of the scraper frame 406101, and an idler wheel 406106 is arranged on the scraper frame 406101 at the other end, the output end of the servo motor 406103 is connected to a driving wheel 406108, and the driving wheel 406108 is arranged on the scraper frame 406101, and the driving wheel 406108 and the idler wheel 406106 are connected through a synchronous belt A406104.

[0144] Linear guide rails H406109 for guiding are also provided on both sides of the upper surface of the scraper frame 406101. Preferably, two linear guide rails H406109 are provided.

[0145] The driving wheel 406108 is arranged on the scraper frame 406101.

[0146] The idler wheel 406106 is installed on the scraper frame 406101 through the positioning pin 406107 and the idler wheel bracket 406105. The bottom of the idler wheel bracket 406105 is installed on the scraper frame 406101, and the positioning pin 406107 passes through the idler wheel 406106 and is connected to the idler wheel bracket 406105.

[0147] The servo motor 406103 is arranged on the scraper frame 406101 through the motor support 406102, and the driving shaft of the servo motor 406103 is connected to the driving wheel 406108.

[0148] The glue scraping assembly 4062 for the glue-coated surface includes a fixed bracket 406201, on which a lifting cylinder C406206 is arranged, and the cylinder rod of the lifting cylinder C406206 penetrates downward through the fixed bracket 406201 and is connected to a glue scraping unit through a connecting rod, and the glue scraping unit is used to scrape glue off the glue-coated surface; the bottom surface of the fixed bracket 406201 is connected to a vertical plate 406203, and the vertical plate 406203 is connected to the glue scraping unit through a sliding assembly so that the glue scraping unit can move up and down driven by the lifting cylinder C406206.

[0149] A synchronous belt limit block A406222 is set on the upper surface of the fixed bracket 406201, and the glue coating surface scraper component 4062 is connected to the synchronous belt A406104 through the synchronous belt limit block A406222. The synchronous belt limit block A406222 and the synchronous belt A406104 are meshed and connected, and the synchronous belt A406104 is inserted through the synchronous belt limit block A406222.

[0150] The glue-coating surface scraper assembly 40624062 is connected to the linear guide rail H406109 on the scraper frame 406101 through the sliding block A406202 arranged on the bottom surface of the fixed bracket 406201.

[0151] The vertical plate 406203 is connected to the lifting slide plate 406204 on the scraper unit through a sliding assembly. The sliding assembly includes a linear guide rail and a sliding block B406205. The linear guide rail is set on the vertical plate 406203, and the sliding block B406205 is set on the lifting slide plate 406204.

[0152] The scraper unit includes a lifting slide 406204, the front end of which is connected to the scraper fixing plate, a scraper cylinder 406208 is arranged on each side of the scraper fixing plate, the front end of the cylinder rod of the scraper cylinder 406208 is connected to the side scraper slide 406207 through a connecting piece, and the side scraper slide 406207 is connected to the bottom surface of the scraper fixing plate through a sliding component; the bottom surface of the side scraper slide 406207 is connected to the side tool holder 406208 6212, the pin shaft 406211 passes through the side tool holder 406212 and is fixed to the bottom of the side scraper slide plate 406207; the side scrapers 406213 are connected to the two sides of the side tool holder 406212; a transfer block 406214 is arranged at the center of the bottom surface of the scraper fixing plate; a scraper main plate 406215 is arranged at the lower part of the transfer block 406214, and a plurality of groups of main scrapers are arranged on the bottom surface of the scraper main plate 406215, and the plurality of groups of main scrapers are arranged in a staggered and progressive manner.

[0153] The total scraper includes a scraper support block 406218 and a scraper C406221. The top surface of the scraper support block 406218 is connected to the scraper total plate 406215. The bottom of the scraper support block 406218 is connected to the tool holder A406220 through a rotating shaft 406219. The rotating shaft 406219 passes through the tool holder A406220 and the scraper support block 406218 for rotational cooperation. The scraper total plate 406215 and the tool holder A406220 are connected by a step pin 406216, and a spring B406217 is sleeved on the outside of the step pin 406216.

[0154] A scraper C406221 is arranged on the tool holder A406220, and the scraper C406221 is a wedge-shaped three-dimensional structure.

[0155] The total scraper is preferably arranged in three groups.

[0156] Three sets of water spray nozzles 406223 are installed on both sides of the adapter block 406214.

[0157] The sliding assembly includes a linear guide rail and a sliding slider 406210. The linear guide rail is arranged on the bottom surface of the scraper fixing plate, and the sliding slider 406210 is arranged on the side scraper slide plate 406207.

[0158] The cylinder rod of the lifting cylinder C406206 passes downward through the fixed bracket 406201 and is connected to the scraper fixing plate through the connecting rod and the connecting block.

[0159] The scraper cylinder 406208 is arranged on the scraper fixing plate through the cylinder connecting plate 406209.

[0160] The front and rear end face scraper assembly 4063 includes a slide plate B406301, a cylinder A406303 is arranged on the upper surface of the slide plate B406301, the front end of the cylinder rod of the cylinder A406303 is connected to the cylinder connecting piece 406302, the cylinder connecting piece 406302 is fixed on the scraper frame 406101, a vertical fixed plate is arranged below the slide plate B406301, a motor 406306 is arranged on one side of the vertical fixed plate, and the vertical fixed plate is also connected to the reciprocating slide plate 406307 through a sliding assembly, and the output shaft of the motor 406306 is connected to the cam follower and the cam 406310 through a rotary shaft A406309 The reciprocating slide plate 406307 then drives the reciprocating slide plate 406307 to move up and down; the reciprocating slide plate 406307 is connected to the sliding fixed plate, the sliding fixed plate is horizontally arranged, and the two ends of the bottom surface of the sliding fixed plate are connected to the sliding plate 406314 through a moving component, and a centering cylinder is also arranged on the bottom surface of the sliding fixed plate, and the movable ends at both ends of the centering cylinder are connected to the driving block 406313 through the cylinder movable end connecting piece 406312, and the driving block 406313 is connected to the sliding plate 406314, and a tool holder B406315 is flexibly connected to the bottom of the sliding plate 406314, and a scraper D406322 is arranged on the tool holder B406315.

[0161] The sliding assembly includes a linear guide rail I406308 and a slider. The linear guide rail I406308 is set on a vertical fixed plate, and the slider is set on a reciprocating slide plate 406307.

[0162] The moving assembly includes a linear guide rail J406311 and a slider. The linear guide rail J406311 is arranged on the bottom surface of the sliding fixed plate, and the slider is arranged on the sliding plate 406314.

[0163] The front and rear end surface scraper components are connected to the scraper frame through the slide plate B and the sliding component.

[0164] The glue-coating surface scraper assembly 40624063 is connected to the linear guide rail H406109 on the glue-scraping frame 406101 through the sliding block C406305 arranged on the bottom surface of the slide plate B406301.

[0165] Cylinder A406303 is set on the slide plate B406301 through the cylinder bracket 406304.

[0166] A waterproof cover B406318 is also provided on the sliding fixing plate.

[0167] The tool holder B406315 is connected to the sliding plate 406314 through the spring washer 406316 and the connecting pin 406317. The connecting pin 406317 passes through the spring washer 406316 and is installed on the sliding plate 406314. The tool holder B406315 is fitted with the spring washer 406316 and is pressed to the lower surface of the sliding plate 406314 by the connecting pin 406317.

[0168] A water pipe bracket 406319 is also provided on the skateboard B406301, and a water pipe A406320 is provided on the water pipe bracket 406319. The water pipe A406320 is externally connected to a water inlet pipe. The water pipe A406320 is connected to two water spray pipes 406321. A nozzle is provided at the bottom of the water spray pipe 406321, and the nozzle is provided above the front end of the sliding fixed plate.

[0169] The grinding mechanism 7 comprises a grinding frame 4071 , an adhesive surface grinding mechanism 4072 is arranged in the middle of the grinding frame 4071 , and a driving component for driving the adhesive surface grinding mechanism 4072 to reciprocate is arranged on the grinding frame 4071 .

[0170] The grinding frame 4071 includes a grinding frame, on which a driving assembly is arranged, and the driving assembly includes a grinding servo motor, which is arranged at one end of the grinding frame, and a grinding idler wheel is arranged on the grinding frame at the other end. The output end of the grinding servo motor is connected to the grinding driving wheel, and the grinding driving wheel is arranged on the grinding frame. The grinding driving wheel and the grinding idler wheel are connected by a synchronous belt B.

[0171] The grinding mechanism 7 is fixed on the bottom overall frame 401 through the grinding frame 4071 .

[0172] Both sides of the upper surface of the polishing frame are also provided with linear guide rails for guiding. Preferably, two linear guide rails are provided.

[0173] The grinding driving wheel is arranged on the grinding frame.

[0174] The grinding idler wheel is installed on the grinding frame through a positioning pin and a grinding idler wheel bracket. The bottom of the grinding idler wheel bracket is installed on the grinding frame, and the grinding positioning pin passes through the grinding idler wheel and is connected with the grinding idler wheel bracket.

[0175] The grinding servo motor is arranged on the grinding frame through a grinding motor support, and a driving shaft of the grinding servo motor is connected with the grinding driving wheel.

[0176] The adhesive surface grinding mechanism 4072 includes a skateboard C407201, on which a cylinder B407203 is arranged, a cylinder rod of the cylinder B407203 is connected to a connecting rod which passes downward through the skateboard C407201 and is connected to a lifting support B407205 through a connecting extension rod, a speed regulating motor B407204 is arranged on the lifting support B407205, a driving shaft of the speed regulating motor B407204 passes through a bearing and is connected to a rotating shaft B407207, and the bottom surface of the rotating shaft B407207 is connected to a brush fixing plate 407208; a plurality of wire brushes are arranged on the bottom surface of the brush fixing plate 407208 and are used for grinding workpieces; the lifting support B407205 is connected to a vertical plate support plate arranged on the bottom surface of the skateboard C407201 through a guide assembly.

[0177] The guide assembly includes a linear guide rail K407206 and a slider. The linear guide rail K407206 is arranged on the vertical plate support plate, and the slider is arranged on the lifting support B407205.

[0178] The adhesive surface grinding mechanism 4072 is connected to the linear guide rail on the grinding frame 4071 through the sliding block D407202 arranged on the bottom surface of the slide plate C407201.

[0179] A synchronous belt limit block B407212 is set on the upper surface of the skateboard C407201, the adhesive surface grinding mechanism 4072 is connected with the synchronous belt B407101 through the synchronous belt limit block B407212, the synchronous belt limit block B407212 and the synchronous belt B407101 are meshed and connected, and the synchronous belt B407101 is inserted through the synchronous belt limit block B407212.

[0180] A water pipe B407210 is also provided on the lifting support B407205. The water pipe B407210 is connected to an external water inlet pipe. The water pipe B407210 is connected to two water spray pipes. A nozzle 407211 is provided at the bottom of the water spray pipe. The nozzle 407211 is provided above the front end of the brush fixing plate 407208.

[0181] The wafer tray cleaning and cooling device 5 comprises a cleaning and cooling fixed frame 501, on which a vibration cleaning tank 502 and a flushing and air-drying mechanism 503 are sequentially arranged. The vibration cleaning tank 502 is a commercially available product. The vibration cleaning tank 502 is preferably an ultrasonic cleaning tank, which is cooled by cold water and cleaned by ultrasound.

[0182] The flushing and air-drying mechanism includes a cleaning conveying roller 50301 for conveying crystal trays; a box 50302 is arranged on the cleaning conveying roller 50301, and a flushing component and an air-drying component are arranged in sequence in the box 50302, which are respectively used for flushing the crystal trays and air-drying the crystal trays, a driving motor 50306 for driving the cleaning conveying roller 50301 to transport is arranged on one side of the cleaning conveying roller 50301, and the output end of the driving motor 50306 is connected to the cleaning conveying roller 50301, and a lifting component for opening the box door is arranged at the front end of the box 50302, a baffle is arranged between the flushing component and the air-drying component, the baffle is arranged in the box, and a channel for the crystal tray to pass through is arranged on the baffle, and the shape of the channel imitates the setting of the crystal tray.

[0183] The flushing assembly includes a flushing bracket, which is fixed in the box body 50302 and arranged above the cleaning conveying roller 50301. The flushing bracket is provided with a plurality of flushing nozzles 50304. The flushing nozzles 50304 are arranged at equal intervals, and the vertical plane of the flushing nozzles 50304 is arranged at an angle. Preferably, four flushing nozzles 50304 are arranged. The flushing nozzles 50304 are connected to a water spray pipe, which passes through the box body 50302 and is connected to an external water pipe. A solenoid valve is arranged on the water pipe. The connection between the water spray pipe and the box body 50302 is sealed.

[0184] The air-drying assembly includes an air-drying bracket, which is fixed in the box 50302 and arranged above the cleaning conveying roller 50301. A plurality of air-drying nozzles 50305 are arranged on the air-drying bracket. The air-drying nozzles 50305 are arranged equidistantly, and the vertical planes of the air-drying nozzles 50305 are arranged obliquely. Preferably, four air-drying nozzles 50305 are arranged. The air-drying nozzles 50305 are connected to a vacuum pipe, which passes through the box 50302 and is externally connected to a vacuum generator. A solenoid valve is arranged on the vacuum pipe. The connection between the vacuum pipe and the box 50302 is sealed.

[0185] A proximity switch 9 is provided at the end of the box body 50302 for detecting whether the crystal holder is in place.

[0186] The box body 50302 is covered on the cleaning and conveying roller 50301.

[0187] The lifting assembly includes a lifting cylinder D50303 and a lifting sliding door 50308; the lifting cylinder D50303 is arranged on the front outer wall of the box body 50302, and the front end of the cylinder rod of the lifting cylinder D50303 is connected to the upper part of the lifting sliding door 50308 through a connecting piece.

[0188] The front wall panel of the box 50302 is provided with a passage for the crystal holder to pass through, which is opened and closed by a lifting sliding door 50308.

[0189] The flushing and air-drying mechanism is arranged on the cleaning and air-drying base 50310 and is fixed on the cleaning and cooling fixing frame 501 through the cleaning and air-drying base 50310.

[0190] The cleaning conveying roller 50301 includes a conveying frame body, two side frames are arranged on the conveying frame body, and a plurality of transmission shafts 50307 are arranged between the two side frame brackets. The plurality of transmission shafts 50307 are arranged equidistantly and the two ends are respectively arranged in the two side frames. The ends of the transmission shafts 50307 on the same side are connected by gear and rack meshing, and one of the gears is connected to the driving shaft of the driving motor 50306 to realize driving.

[0191] The lifting cylinder D50303 is arranged on the box body 50302 through a cylinder fixing frame, and a workpiece position detection sensor is arranged on the cylinder fixing frame to detect whether the crystal support is in place.

[0192] The rinsing assembly and the air drying assembly are both provided with sensors for detecting the position of the workpiece, and are used to detect the position of the wafer support. Preferably, two sensors are provided in each assembly, and both are provided in the box body 50302.

[0193] The detection mechanism 6 is used to detect whether there is residual glue. The detection mechanism 6 includes a detection conveying roller 601. A detection fixed frame 602 is set on the upper part of the detection conveying roller 601. An industrial camera 603 is set on the detection fixed frame 602. A light source 604 is set adjacent to the industrial camera 603.

[0194] The detection conveyor roller 601 is arranged at the end of the washing conveyor roller 50301. The detection conveyor roller 601 is an existing device and is not specifically arranged, and it only needs to be able to convey the workpiece. The detection conveyor roller 601 is provided with a shooting switch 605 for detecting the workpiece. The industrial camera 603 is a commercially available product.

[0195] The production line is also equipped with a PLC control system, including the stop cylinder A10203, positioning cylinder A10204, in-place sensor, plate picking robot, clamping cylinder 10302, lifting cylinder A10407, speed regulating motor A10410, positioning clamping cylinder 10412, warping cylinder 10502, rodless cylinder A10604, rodless cylinder B10704, workpiece in-place sensor, position sensor, X-axis servo motor, Z-axis servo motor, clamping cylinder 20303, rotating motor 2041, preliminary positioning cylinder 30202, heating rod 30304, temperature sensor, liquid level gauge, solenoid valve\preliminary scraper mechanism 2, lifting and flipping mechanism 3, conveying roller 4, lifting and positioning mechanism 5, scraping glue mechanism 6, grinding mechanism 7, rodless cylinder C40202, lifting cylinder B40302, rotary Cylinder 40307, ​​stop cylinder B40312, lifting cylinder B40503, positioning cylinder B40505, servo motor 406103, lifting cylinder C406206, scraper cylinder 406208, water nozzle 406223, cylinder A406303, motor 406306, cylinder B407203, speed regulating motor B407204, nozzle 407211, proximity switch, lifting cylinder D50303, flushing nozzle 50304, air drying nozzle 50305, drive motor 50306, proximity switch 50309, vacuum generator, workpiece in-place sensor, vibration cleaning tank 502, conveyor roller detection 601, industrial camera 603, and shooting switch 605 are respectively connected to the PLC control system, and are not limited to a specific model, as long as their working functions are realized.

[0196] During specific operation, the material conveying roller of the previous process (existing technology equipment, used for conveying materials, not the device of the present invention, so it will not be described in detail, and it is sufficient to realize its working function) conveys materials (crystal trays, crystal rods, and adhesive materials of adhesive boards) to the bottom of the crystal tray positioning mechanism 102 in the main frame 101. After the in-place sensor in the crystal tray positioning mechanism 102 detects that the materials are in place, the stopping cylinder A10203 starts working, and the cylinder rod of the stopping cylinder A10203 extends downward, and the stopping block 10208 moves downward to stop the materials. At this time, the positioning cylinder A10204 starts working, and the positioning cylinder A10204 with the positioning guide 10209 positions the materials through the U-shaped structure, and further accurately positions and straightens the materials through the crystal tray positioning block 10211 of another positioning cylinder A10204. At this time, the front end rotating assembly on the reciprocating transfer mechanism 104 starts working, and the height of the rotating assembly and its rotating positioning plate is increased. Matching the height setting of the materials placed in the material conveying roller, after the crystal support positioning mechanism 102 completes its work, the material conveying roller continues to work and conveys the positioned materials to the long workpiece slot of the rotating positioning plate 10411. After the workpiece in-place sensor arranged on the rotating transplanting frame 10401 and on the outside of the rotating positioning plate 10411 detects that the workpiece is in place, the speed regulating motor A10410 starts to work, and drives the rotating positioning plate 10411 through the rotating shaft, thereby driving the material to flip 180 degrees. After flipping, the cylinder under the transplanting base 10402 in the transplanting assembly starts to work, driving the transplanting base 10402 and then driving the lifting positioning frame 10408 to start moving forward. After the cylinder runs into place, the lifting assembly starts to work, and the gas rod of the lifting cylinder A10407 extends, thereby driving the lifting positioning frame 10408 to move upward. At this time, both ends of the material are just stuck in the limit slot 10413.

[0197] At this time, the cylinder under the transplanting base 10402 drives the transplanting base 10402 and then drives the jacking and positioning frame 10408 to move backward. After the cylinder runs to the set working stroke, that is, above the locking assembly, the lifting cylinder A10407 in the lifting assembly drives the jacking and positioning frame 10408 and the material to move downward as a whole until the material falls on the locking base plate 10414. At this time, the positioning and clamping cylinder 10412 on the locking base plate 10414 starts to work, which drives the locking block to start rotating 90 degrees to lock the material. This is because after the material is flipped 180 degrees, the crystal support is located at the bottom and the adhesive plate is located at the top. The shape of the crystal support, like the prior art, has a long groove inside. At the beginning, the long locking block is deep into the long groove and is parallel to the long groove of the crystal support. After rotation, they are perpendicular to each other to achieve locking and fixing of the material. At this time, both ends of the material are also fixed on the positioning seat 10409 and the base. At this time, the adhesive plate is placed just in front of the plate separation mechanism 106 and is located at the starting end of the warping knife mechanism 105. At this time, the position sensor on the warping knife mechanism 105 detects the distance from the workpiece and starts working. The lifting cylinder A10507 in the warping knife mechanism 105 starts working, driving the warping cylinder support 10501 to move up and down to achieve the adjustment of the upper and lower positions, so that the warping knife corresponds to the interface where the adhesive plate in the material needs to be separated. After adjustment, the warping cylinder 10502 starts working, and the cylinder rod of the warping cylinder 10502 The lifting knife 10504 extends out, thereby driving the lifting knife 10504 to move forward, and the tip of the lifting knife 10504 is tilted at the front end to lift the adhesive board. When the lifting cylinder 10502 moves to the set travel stroke, the adhesive board is lifted, and the plate separation mechanism 106 starts to work. The movable end of the rodless cylinder A10604 drives the scraper A10603 to move through the connecting block. The long side wedge-shaped three-dimensional structure of the scraper A10603 scrapes the adhesive board, and the scraped adhesive board is transferred to the adhesive board placement station area through the adhesive board clamp 10303 set on the board picking robot of the board picking mechanism 103 for subsequent circulation and use.The warping knife mechanism 105 and the plate separation mechanism 106 are reset, and the reciprocating transfer mechanism 104 transports the material with the adhesive plate removed to the crystal support transfer platform 107. Specifically, the reciprocating transfer mechanism 104 rotates through the locking block to release the material with the adhesive plate removed, and the lifting component drives the material with the adhesive plate removed to move upward, and the transfer component drives it to move backward. When it moves to the rear end, the rotating component starts to work, and the height of the rotating positioning plate 10411 of the rotating component is matched with the height of the material with the adhesive plate removed on the lifting component, and the material is transported to the long workpiece slot of the rotating positioning plate. After the workpiece in-place sensor arranged on the outer side of the rotating positioning plate 10411 detects that the workpiece is in place, the speed regulating motor A10410 starts to work, and then drives the rotating positioning plate 10411 through the rotating shaft. 411 then drives the material to flip 180 degrees. After flipping, the transfer platform 10703 receives the material. After the positioning column 10705 positions the workpiece, the rodless cylinder B10704 on the transfer platform 10703 works to drive the transfer platform 10703 to the preliminary positioning component 302 set at its end. The preliminary positioning component 302 starts to work, and the cylinder rods of the two preliminary positioning cylinders 30202 extend to drive the guide limiter 30204 to preliminarily position the crystal tray. After the preliminary positioning, the crystal tray is transferred to the tray of the heating water tank 303 through the transport gripper 202. The heating water tank 303 heats the tray to remove the glue. After the predetermined time is up, the PLC control system gives a signal to the transport gripper 202, and the transport gripper 202 takes the heated crystal tray to the crystal tray degumming equipment 4 for degumming. The crystal support, i.e. the workpiece, whose adhesive sheet has been removed in the previous process is transported to the front end of the preliminary scraper mechanism 401. After the proximity switch on the scraper support seat 40201 in the preliminary scraper mechanism 401 detects the workpiece, the rodless cylinder C40202 starts to work, and the movable end of the rodless cylinder C40202 drives the slide plate A40209 only to drive the scraper bracket 40207 to move, and the scraper bracket 40207 drives the scraper B40209 to perform preliminary scraping on the large residual glue on the crystal support surface. Because the scraper bracket 40207 and the bearing support 40204 are flexibly connected, the whole is a floating scraper, and the overall wear is small. The waterproof cover A40203 provided on the preliminary scraper mechanism 402 prevents the residual water adhered to the workpiece in the previous process from splashing onto the preliminary scraper mechanism 402 after the preliminary scraper working stroke is completed. After the preliminary scraper mechanism 402 finishes working, the workpiece is inserted into the rotary clamp 40310 of the rotary cylinder 40307 through the transport gripper 202, and the rotary cylinder 40307 starts to work. The rotary cylinder 40307 drive shaft 40309 drives the rotary clamp 40310 to flip 180 degrees, and the flat end of the crystal support is located at the upper end. At this time, the lifting cylinder B40302 on the lifting base 40301 starts to work, driving the flip base 40303 to move downward as a whole until the workpiece is placed on the conveyor roller 404, and the conveyor roller 404 conveys the workpiece forward.The baffle plate 40314 connected to the front end of the cylinder rod of the stopping cylinder B40312 stops the workpiece and makes a preliminary adjustment. After stopping, the baffle plate 40314 of the stopping cylinder B40312 releases the workpiece, and the conveyor roller 404 conveys the workpiece forward to the top of the lifting and positioning mechanism 405 and the bottom of the scraper mechanism 406. The lifting cylinder B40503 starts to work, and the cylinder rod of the lifting cylinder B40503 extends upward and drives the positioning base 40502 to move upward. The two ends of the long groove of the workpiece crystal support correspond to the crystal support limit protrusions set on the limit block for rough positioning. At this time, the cylinder rod of the positioning cylinder B40505 drives the positioning block 40504 to rotate 90 degrees in the crystal support groove to lock the crystal support positioning. After positioning, the scraper mechanism 406 starts to work, and the glue-coated surface scraper component 4062 on the scraper mechanism 406 starts to work, and the servo motor 406103 drives the active wheel 406108, which in turn drives the synchronous belt A406104 to move, driving the synchronous belt limit block A406222 to move, and then drives the glue-coated surface scraper component 4062 to move, and at the same time, the lifting cylinder C406206 on the glue-coated surface scraper component 4062 drives the scraper unit to move downward until the scraper unit contacts the workpiece, and the scraper C406221 on the staggered progressive arrangement of the scraper main plate 406215 on the scraper unit elastically scrapes the glue without wearing the workpiece, and the side scraper slide plate 406207 on the scraper unit scrapes the side of the workpiece crystal support driven by the scraper cylinder 406208, and scrapes the side through the side scraper 406213 at the bottom of the side slide plate. During the process of scraping glue, the water spray nozzle 406223 sprays water to play a role of lubrication. The front and rear end face scraping glue assembly 4063 moves as a whole to contact the end face of the workpiece crystal support by extending the cylinder rod on the cylinder A406303. The output shaft of the motor 406306 is connected to the reciprocating slide 406307 through the rotary shaft A406309, the cam follower and the cam 406310, and then drives the reciprocating slide 406307 to move up and down; then drives the sliding fixed plate to move up and down, and the centering cylinder on the sliding fixed plate drives the tool holder B406315 and then drives the scraper D406322 to move back and forth to scrape glue. When scraping glue, the nozzle sprays water to play a role of lubrication.After the scraping is completed, the lifting and positioning mechanism 5 drives the workpiece to move down to the conveying roller 4 as a whole, and the positioning cylinder B505 drives the positioning block 504 to rotate 90 degrees in the crystal support groove to release the workpiece. The conveying roller 4 transports the workpiece to the top of the lifting and positioning mechanism 5 and the bottom of the grinding mechanism 7. After the lifting and positioning mechanism 5 lifts and positions the workpiece, the grinding mechanism 7 starts to work, and the adhesive surface grinding mechanism 4072 on the grinding mechanism 7 starts to work. The grinding servo motor drives the grinding active wheel to drive the synchronous The movement of belt B407101 drives the synchronous belt limit block B407212 to move, and then drives the adhesive surface grinding mechanism 4072 to move. At the same time, the cylinder rod of cylinder B407203 drives the lifting support B407205 to move downward until the wire brush 407209 contacts the workpiece. The drive shaft of the speed regulating motor B407204 passes through the bearing and drives the rotating shaft B407207 to drive the brush fixing plate 407208 to rotate, and then drives the wire brush 407209 to grind the workpiece. The overall process is completed. During the grinding process, the nozzle 407211 sprays water to play a lubricating role. After the grinding work is completed, the lifting and positioning mechanism 5 drives the workpiece to move down to the conveying roller 4 as a whole, and the positioning cylinder B505 drives the positioning block 504 to rotate 90 degrees in the crystal support groove to release the workpiece. At this time, the transport rotating gripper 205 transfers the crystal support after the crystal support glue removal equipment 4 to the crystal support cleaning and cooling device 5 for cleaning.After the crystal tray is cleaned in the vibration cleaning tank 502, it is moved to the cleaning conveyor roller 50301 by the handling rotating gripper 205, and the driving motor 50306 on the cleaning conveyor roller 50301 starts to work. The driving motor 50306 is connected through the driving shaft and the gear. The gear and the rack drive the transmission shaft 50307 to move as a whole, thereby driving the transfer crystal tray forward. When the workpiece arrival sensor at the lifting cylinder D50303 detects the crystal tray, the lifting cylinder D50303 starts to work, and the cylinder rod of the lifting cylinder D50303 contracts, thereby driving the lifting sliding door 50308 to open. The front wall panel of the box 50302 is provided with a channel for the crystal tray to pass through, allowing the crystal tray to enter the washing component in the box 50302. When the workpiece arrival sensor detects that the crystal tray has arrived at the cleaning position, a feedback signal is given to the PLC control system. The C control system feeds back a signal to the flushing nozzle 50304 to flush the crystal tray. The crystal tray passes through the channel on the baffle for the crystal tray to pass through while flushing and enters the air-drying component. When the sensor for detecting the position of the workpiece detects that the crystal tray has reached the air-drying position, it feeds back a signal to the PLC control system. The PLC control system feeds back a signal to the air-drying nozzle 50305 to air-dry the crystal tray. After air-drying, it is transported through the cleaning conveyor roller 50301. When the proximity switch 50309 detects the crystal tray, if the opposing switch 605 in the detection mechanism 6 detects the presence of a workpiece, the cleaning conveyor roller 50301 stops working first. If the opposing switch 605 in the detection mechanism 6 detects that there is no workpiece on the detection conveyor roller 601, the workpiece crystal tray is transported to the detection conveyor roller 601, and the industrial camera 603 takes pictures to feedback whether there is residual glue and whether it is qualified. Qualified products can be circulated and used normally.

[0198] Although the present invention has been described in detail above by general description and specific embodiments, it is obvious to those skilled in the art that some modifications or improvements can be made to the present invention. Therefore, these modifications or improvements made without departing from the spirit of the present invention all belong to the scope of protection claimed by the present invention.

Claims

1. An automated production line for removing glue from a monocrystalline silicon wafer tray, characterized in that: The invention comprises an adhesive plate separation device (1), a crystal tray heating mechanism (3), a crystal tray degumming device (4), a crystal tray cleaning and cooling device (5), and a detection mechanism (6) which are arranged in sequence; a transport mechanism (2) for transporting and rotating workpieces is arranged above the crystal tray heating mechanism (3), the crystal tray degumming device (4), and the crystal tray cleaning and cooling device (5); the adhesive plate separation device (1) is used to separate the adhesive plate on the crystal tray; the crystal tray heating mechanism (3) is used to heat the crystal tray; the crystal tray degumming device (4) is used to degumming the heated crystal tray; the crystal tray cleaning and cooling device (5) is used to clean and air-dry the crystal tray after degumming; and the detection mechanism (6) is used to detect whether there is residual adhesive on the crystal tray after degumming.

2. The single crystal silicon slice tray debonding automated production line as claimed in claim 1, characterized in that: The adhesive plate separation device (1) comprises a main frame (101), a crystal support positioning mechanism (102), a plate picking mechanism (103), a reciprocating transfer mechanism (104), a prying plate mechanism (105), a plate separation mechanism (106), and a crystal support transfer platform (107); the crystal support positioning mechanism (102) is arranged on a frame at one end of the main frame (101), the reciprocating transfer mechanism (104) is arranged on a base of the main frame (101), and the plate picking mechanism (103) is arranged adjacent to the reciprocating transfer mechanism (104). The plate separation mechanism (106) and the pry plate mechanism (105) are arranged on the main frame (101); a crystal tray transfer platform (107) is arranged at the other end of the main frame (101); the crystal tray transfer platform (107) is arranged behind the reciprocating transfer mechanism (104); the plate separation mechanism (106) is arranged above the reciprocating transfer mechanism (104); the pry plate mechanism (105) is arranged on a frame body on the side of the main frame (101); and the pry plate mechanism (105) is arranged in front of the plate separation mechanism (106).

3. The single crystal silicon slice tray debonding automated production line as claimed in claim 1, characterized in that: The transport mechanism (2) comprises a truss crossbeam (201), on which a transport gripper (202) and a transport rotating gripper (205) are arranged, the transport gripper (202) and the transport rotating gripper (205) are connected to the truss crossbeam (201) via a transport walking guide assembly, the transport gripper (202) comprises an X-axis walking assembly and a Z-axis walking assembly, the Z-axis walking assembly is arranged on the X-axis walking assembly, and a transport clamp (203) is arranged at the bottom of the Z-axis walking assembly; the transport rotating gripper (205) comprises an X-axis walking assembly and a Z-axis walking assembly, the Z-axis walking assembly is arranged on the X-axis walking assembly, and a transport rotating assembly (204) is arranged at the bottom of the Z-axis walking assembly, and the bottom of the transport rotating assembly (204) is connected to the transport clamp (203).

4. The automatic production line for removing adhesive from a wafer support of a single crystal silicon slice as claimed in claim 1, characterized in that: The crystal support heating mechanism (3) comprises a heating base (301) and a preliminary positioning component (302); the preliminary positioning component (302) is arranged at the front end of the heating base (301), and a heating water tank (303) is arranged at the rear end of the preliminary positioning component (302), and the heating water tank (303) is fixed on the heating base (301) through a heating water tank fixing frame (304); a waterproof baffle (305) for waterproofing is also arranged on the upper part of the heating base (301); the preliminary positioning component (302) comprises a preliminary positioning frame (30201), and a preliminary positioning cylinder (30202) is arranged at each end of the preliminary positioning frame (30201), and the two preliminary positioning cylinders (30202) are arranged opposite to each other, and the front end of the cylinder rod of the preliminary positioning cylinder (30202) is connected to the guide limiter (30204) through a connecting piece, and the front end surface of the guide limiter (30204) is a U-shaped structure.

5. The automatic production line for removing adhesive from a wafer tray of single crystal silicon slices as claimed in claim 1, characterized in that: The crystal support degumming equipment (4) comprises a bottom integral frame (401); a preliminary scraper mechanism (402) is arranged at one end of the bottom integral frame (401); a lifting and flipping mechanism (403), a scraping mechanism (406), and a grinding mechanism (407) are arranged on the bottom integral frame (401) in sequence; a conveying roller (404) for conveying workpieces is also arranged on the bottom integral frame (401); the conveying roller (404) is inserted and arranged in the lifting and flipping mechanism (403); the conveying roller (404) is arranged below the scraping mechanism (406) and the grinding mechanism (407); a lifting and positioning mechanism (405) is arranged below the scraping mechanism (406) and the grinding mechanism (407); the lifting and positioning mechanism (405) is arranged on the bottom integral frame (401) and in the middle of the conveying roller (404); and the preliminary scraper mechanism (402) is arranged at the front end of the conveying roller (404).

6. The automatic production line for removing adhesive from a wafer tray of single crystal silicon slices as claimed in claim 1, characterized in that: The crystal tray cleaning and cooling device (5) comprises a cleaning and cooling fixing frame (501), on which a vibration cleaning tank (502) and a flushing and air-drying mechanism (503) are sequentially arranged.

7. In the automated production line for removing glue from a wafer support for single crystal silicon slices as described in claim 1, a detection mechanism (6) is used to detect whether there is residual glue, and the detection mechanism (6) includes a detection conveying roller (601), a detection fixed frame (602) is arranged on the upper part of the detection conveying roller (601), an industrial camera (603) is arranged on the detection fixed frame (602), and a light source (604) is arranged adjacent to the industrial camera (603).

8. In the automated production line for removing glue from crystal trays for single crystal silicon slices as described in claim 2, the transport and walking guide components are racks, and two racks are arranged on the truss crossbeam (201); the transport mechanism (2) is arranged on the top of the frame of the crystal tray heating mechanism (3), the crystal tray degumming equipment (4), and the crystal tray cleaning and cooling device (5) through a fixed frame.

9. An automated production line for removing glue from crystal trays for single crystal silicon slices as described in claim 6, wherein the flushing and air-drying mechanism comprises a cleaning and conveying roller (50301) for conveying crystal trays; a box (50302) is arranged on the cleaning and conveying roller (50301), a flushing component and an air-drying component are arranged in sequence in the box (50302), which are respectively used for flushing the crystal trays and air-drying the crystal trays; a driving motor (50306) for driving the cleaning and conveying roller (50301) for transmission is arranged on one side of the cleaning and conveying roller (50301), an output end of the driving motor (50306) is connected to the cleaning and conveying roller (50301), a lifting component for opening a box door is arranged at the front end of the box (50302), a baffle is arranged between the flushing component and the air-drying component, the baffle is arranged in the box, and a channel for the crystal tray to pass through is arranged on the baffle, and the shape of the channel imitates the setting of the crystal tray.

10. In the automated production line for removing adhesive from trays for single crystal silicon slices as described in claim 7, the detection conveyor roller (601) is arranged at the end of the washing conveyor roller (50301).

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