Low-temperature adsorption pump and low-temperature adsorption array

Abstract

The invention discloses a low-temperature adsorption pump and a low-temperature adsorption array. The low-temperature adsorption pump comprises a heat insulation baffle, a liquid nitrogen pipeline, a heat shielding baffle, a supercritical helium pipeline, a helium low-temperature plate, an adsorption bin, a high heat conduction plate and a gas baffle. The liquid nitrogen pipeline is positioned between the heat insulation baffle and the heat shielding baffle; the supercritical helium pipeline, the helium low-temperature plate, the adsorption bin, the high-thermal-conductivity plate and the gas baffle are sequentially arranged in the thermal baffle; and the adsorption bin is filled with an adsorbent. The adsorbent capable of being contained in the adsorption bin is multiple times that of a low-temperature adsorption plate with the same area, and particularly, the difference is larger when a low-temperature adsorption array is formed. Meanwhile, a single-stage heat shielding baffle can be used, enough high conductance is guaranteed, high pumping speed and large capacity can be achieved, the problem that activated carbon falls off in the operation process of the low-temperature adsorption pump is effectively solved, and the low-temperature adsorption pump can be used in the strong neutron irradiation environment such as a fusion device in the future.

Description

Technical Field

[0001] The present invention relates to the technical field of cryogenic adsorption pumps, in particular to a cryogenic adsorption pump and a cryogenic adsorption array. Background Art

[0002] Cryogenic adsorption pumps have many advantages such as high pumping speed, large capacity, and resistance to magnetic field interference. They are often used in large scientific devices to provide a stable vacuum environment. At present, cryogenic adsorption pumps mostly use activated carbon materials as adsorbents. Taking the neutral beam injector as an example, the cryogenic adsorption pump uses coconut shell activated carbon materials as adsorbents to perform low-temperature adsorption of gases.

[0003] At present, the activated carbon on the cryogenic adsorption pump is mainly fixed by cryogenic glue. However, since the cryogenic adsorption pump is an embedded cryogenic pump, it will be exposed to neutron irradiation for a long time. After the cryogenic pump has been running for a period of time, the cryogenic glue will fail due to neutron irradiation, and the activated carbon structure on the cryogenic adsorption plate will fall off, causing the cryogenic adsorption pump to fail to work properly. In addition, since the cryogenic pump needs to be regenerated after adsorption saturation, the viscosity of the cryogenic glue will also decrease after multiple regeneration processes. In addition, during the transportation and installation of the cryogenic adsorption pump, the sticky activated carbon will also fall off. After the cryogenic adsorption pump is fully installed, it is found that at least 10% of the bonded activated carbon has fallen off.

[0004] The traditional cryopump structure uses a sticky method to fix activated carbon. The thickness of activated carbon is limited, and high capacity needs to be achieved by increasing the area of ​​the cryogenic adsorption plate. Under limited size, increasing the area needs to be achieved by adopting a multi-stage structure, but the cryogenic adsorption plate needs to be used in conjunction with a heat shielding baffle. Since the molecular conductance of the multi-stage heat shielding baffle structure is smaller than that of the single-layer heat shielding structure, this will cause the pumping speed of the cryogenic pump to decrease.

[0005] In the prior art, the invention patent application with the patent publication number CN117386580A discloses a built-in hydrogen extraction cryogenic pump with a blackbody-like radiation cavity, including a mounting flange, and a refrigerator, a liquid nitrogen input pipe, a nitrogen return pipe, a front radiation shielding plate, and a back radiation shielding plate installed thereon; the cross section of the front radiation shielding plate is designed to be V-shaped, with the tip facing the airflow inlet; the cross section of the back radiation shielding plate is designed to be concave, and the opening is opposite to the V-shaped opening of the front radiation shielding plate and has a gap, forming a blackbody-like radiation cavity; the cold head of the refrigerator is located in the blackbody-like radiation cavity. The front radiation shielding plate is designed as a V-shaped structure, and the back radiation shielding plate is designed as a concave structure. The two form a blackbody-like radiation cavity to increase the probability of gas molecules colliding with the condensation adsorption plate. The built-in hydrogen extraction cryogenic pump with a blackbody-like radiation cavity is used in neutral beam injection heating experiments to obtain a high hydrogen extraction speed. However, the adsorbent in this patent is adhesive. Summary of the invention

[0006] The technical problem to be solved by the present invention is to provide a cryogenic adsorption pump which can solve the problem of fixing the cryogenic adsorbent and increase the flow conductance of the gas to ensure a sufficiently large pumping speed.

[0007] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0008] A cryogenic adsorption pump, comprising: a heat insulation baffle 10, a liquid nitrogen pipeline 20, a heat shielding baffle 30, a supercritical helium pipeline 40, a helium cryopanel 50, an adsorption chamber 60, a high thermal conductivity plate 70 and a gas baffle 80;

[0009] The heat insulation baffle 10 is located at the back of the heat shielding baffle 30, and the liquid nitrogen pipeline 20 is located between the heat insulation baffle 10 and the heat shielding baffle 30; the supercritical helium pipeline 40, the helium cryopanel 50, the adsorption chamber 60, the high thermal conductivity plate 70 and the gas baffle 80 are arranged in sequence in the heat insulation baffle 10; and the adsorption chamber 60 is filled with adsorbent.

[0010] Technical effect: The adsorption chamber 60 can accommodate multiple times the amount of adsorbent as the cryogenic adsorption plate of the same area, especially when forming a cryogenic adsorption array, the difference is even greater. At the same time, a single-stage heat shielding baffle 30 can be used to ensure a sufficiently high flow conductance, which can not only achieve high pumping speed and large capacity, but also effectively solve the problem of activated carbon shedding during the operation of the cryogenic adsorption pump, and can be used in strong neutron irradiation environments such as future fusion devices.

[0011] In one embodiment of the present invention, the adsorption chamber 60 is disposed with its side opening facing the high thermal conductivity plate 70 ; the high thermal conductivity plate 70 also serves as a baffle on the side opening of the adsorption chamber 60 .

[0012] Technical effect: It combines the adsorption chamber 60 with the high thermal conductivity plate 70. Compared with sticking the activated carbon to the low-temperature helium cold plate, it can fix more activated carbon, thereby improving the gas adsorption capacity and increasing the regeneration cycle of the low-temperature adsorption pump. At the same time, it can prevent the activated carbon from falling off during installation and operation due to external force and failure of the low-temperature glue, thereby affecting the performance and normal operation of the low-temperature adsorption pump.

[0013] In one embodiment of the present invention, the helium cryopanel 50 is closely attached to the opposite side of the opening of the adsorption chamber 60 .

[0014] In one embodiment of the present invention, the high thermal conductivity plate 70 is honeycomb-shaped.

[0015] Technical effect: The honeycomb-shaped high thermal conductivity plate 70 has good thermal conductivity, which can take away the heat of the incoming gas in time to further cool the gas. At the same time, the honeycomb flow holes make the gas flow into different positions of the activated carbon adsorption bin 8 more uniform, ensuring the uniformity of activated carbon adsorption.

[0016] In one embodiment of the present invention, the liquid nitrogen pipeline 20 is fixed to the back of the heat shielding baffle 30 .

[0017] In one embodiment of the present invention, the supercritical helium pipeline 40 is fixed on the helium cryopanel 50 .

[0018] In one embodiment of the present invention, the heat shielding baffle 30 is rectangular, and one of the main panels of the heat shielding baffle 30 is opened.

[0019] In one embodiment of the present invention, the gas baffle 80 is in a “human” shape; and the end of the gas baffle 80 is fixedly connected to the vertical surface of the heat shielding baffle 30 .

[0020] In one embodiment of the present invention, a liquid nitrogen pipeline 20 is provided at the baffle connection of the herringbone-shaped gas baffle 80 and is fixedly connected to the liquid nitrogen pipeline 20 .

[0021] Technical effect: The heat shielding baffle 30 and the gas baffle 80 provide a stable radiant heat environment for the helium cryopanel 50, the adsorption chamber 60 and the high thermal conductivity plate 70. The adsorbent is filled into the adsorption chamber 60 by filling, avoiding the use of viscous objects such as low-temperature glue for fixing, thereby improving the stability and service life of the cryogenic adsorption pump.

[0022] The present invention also provides a cryogenic adsorption array, including the cryogenic adsorption pump described above, wherein a plurality of cryogenic adsorption pumps are arranged on the inner wall of the vacuum chamber according to the connection method of the supercritical helium pipeline 40 and the liquid nitrogen pipeline 20.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] The present invention aims at the shortcoming that the current cryogenic adsorption pump cannot be used in strong irradiation environments such as fusion. It combines an activated carbon adsorption chamber with a honeycomb high thermal conductivity plate. Compared with sticking the activated carbon to a low-temperature helium cold plate, it can fix more activated carbon, thereby increasing the gas adsorption capacity and the regeneration cycle of the cryogenic adsorption pump. At the same time, it can prevent the activated carbon from falling off during installation and operation due to external forces and failure of the low-temperature glue, which affects the performance and normal operation of the cryogenic adsorption pump. The present invention can ensure that the pumping performance is not affected under the premise that the activated carbon will not fall off, and the flow conductivity of the structure is high, which not only solves the problem of fixing the cryogenic adsorbent, but also increases the flow conductivity of the gas as much as possible to ensure a sufficiently large pumping speed.

[0025] The low-temperature adsorption array can be used in high-irradiation environments such as fusion reactors. It has strong stability and a structure that is convenient for space adjustment. The activated carbon adsorption chamber structure can make the low-temperature adsorption pump have a larger adsorption capacity and a longer regeneration cycle. The honeycomb high thermal conductivity plate can both cool the gas and make the gas adsorption more uniform. The structure of the present invention is simple to process, highly practical, and highly operable. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 Schematic diagram of a cryogenic adsorption pump according to an embodiment of the present invention.

[0027] Figure 2 This is a partial enlarged view of the cryogenic adsorption pump according to an embodiment of the present invention.

[0028] Figure 3 4 is a cross-sectional view of a cryogenic adsorption pump according to an embodiment of the present invention. DETAILED DESCRIPTION

[0029] In order to facilitate those skilled in the art to understand the technical solution of the present invention, the technical solution of the present invention is further described in conjunction with the accompanying drawings of the specification.

[0030] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0031] See also Figure 1 As shown, the present invention provides a cryogenic adsorption pump, comprising: a heat insulation baffle 10, a liquid nitrogen pipeline 20, a heat shielding baffle 30, a supercritical helium pipeline 40, a helium cryopanel 50, an adsorption chamber 60, a high thermal conductivity plate 70 and a gas baffle 80.

[0032] The heat insulation baffle 10 is located at the back of the heat shielding baffle 30, and the liquid nitrogen pipeline 20 is located between the heat insulation baffle 10 and the heat shielding baffle 30; the supercritical helium pipeline 40, the helium cryopanel 50, the adsorption chamber 60, the high thermal conductivity plate 70 and the gas baffle 80 are sequentially arranged in the heat insulation baffle 10; and the adsorption chamber 60 is filled with an adsorbent. When in use, the side where the gas baffle 80 is located faces the gas source.

[0033] See also Figures 1 to 3 As shown, in one embodiment of the present invention, the heat insulation baffle 10 includes a first heat insulation baffle 11, a second heat insulation baffle 12 and a third heat insulation baffle 13 which are arranged in sequence, and a hanging ear structure is provided on the first heat insulation baffle 11, which is installed on the inner wall surface of the vacuum chamber through the hanging ear structure.

[0034] In this embodiment, the first insulation baffle 11, the second insulation baffle 12 and the third insulation baffle 13 are all made of aluminum plate structure. The first insulation baffle 11 is fixed to the inner wall surface of the vacuum chamber by bolts, the second insulation baffle 12 is fixed to the first insulation baffle 11 by bolts, and the third insulation baffle 13 is fixed to the second insulation baffle 12 by bolts.

[0035] In this embodiment, the liquid nitrogen pipeline 20 is fixed to the back of the heat shielding baffle 30, which can be understood as the opposite side of the opening side of the heat shielding baffle 30. Specifically, the liquid nitrogen pipeline 20 and the heat shielding baffle 30 are connected by welding.

[0036] In this embodiment, the heat shielding baffle 30 is rectangular, and one of the main panels of the heat shielding baffle 30 is opened. The rectangular heat shielding baffle 30 has two main panels, and the other main panel serves as the back of the heat shielding baffle 30.

[0037] In this embodiment, the supercritical helium pipeline 40 is fixed on the helium cryopanel 50. Specifically, the supercritical helium pipeline 40 and the helium cryopanel 50 are also connected by welding.

[0038] The adsorption chamber 60 is set to face the side opening of the high thermal conductivity plate 70, and the high thermal conductivity plate 70 also serves as a baffle on the side of the opening of the adsorption chamber 60. The adsorption chamber 60 is filled with an adsorbent, such as activated carbon. Based on the low-temperature condensation adsorption effect, the gas enters the adsorption chamber 60 through the high thermal conductivity plate 70 and is adsorbed by the adsorbent. Among them, the high thermal conductivity plate 70 is honeycomb-shaped. Specifically, the adsorption chamber 60 is fixed to the helium cryopanel 50 by bolts, and the high thermal conductivity plate 70 is fixed to the adsorption chamber 60 by bolts.

[0039] In this embodiment, the gas baffle 80 is in a "human" shape, and the end of the gas baffle 80 is fixedly connected to the vertical surface of the heat shielding baffle 30. A liquid nitrogen pipeline 20 is provided at the baffle connection of the "human" shaped gas baffle 80, and is fixedly connected to the liquid nitrogen pipeline 20 to prevent the helium cryopanel 50 from directly radiating heat exchange with the normal temperature vacuum chamber or other components in the vacuum chamber, and cool it through the liquid nitrogen pipeline 20.

[0040] See also Figures 1 to 3 As shown, in one embodiment of the present invention, the cryogenic adsorption pump is installed on the inner wall of the vacuum chamber through the hanging ear, and the gas baffle 80 faces the gas source. After passing through the gas baffle 80, the gas enters the adsorption chamber 60 through the high thermal conductivity plate 70 to complete the low-temperature adsorption. After the incoming gas molecules collide with the gas baffle 80, they will exchange energy with it, and the gas molecules will be cooled. When the gas molecules pass through the high thermal conductivity plate 70, since the honeycomb-shaped high thermal conductivity plate 70 has good thermal conductivity, it can take away the heat of the incoming gas in time, thereby further cooling the gas. At the same time, the honeycomb-shaped flow holes make the gas flow into different positions of the activated carbon adsorption chamber 8 more uniform, ensuring the uniformity of activated carbon adsorption. The adsorption chamber 60 and the high thermal conductivity plate 70 are cooled by the helium cryopanel 50. The heat shielding baffle 30 and the gas baffle 80 provide a stable radiant heat environment for the helium cryopanel 50, the adsorption chamber 60 and the high thermal conductivity plate 70. The adsorbent is filled into the adsorption chamber 60 by filling, avoiding the use of sticky objects such as low-temperature glue for fixing, thereby improving the stability and service life of the cryogenic adsorption pump.

[0041] Furthermore, the adsorption chamber 60 of this embodiment can accommodate multiple times the amount of adsorbent as the cryogenic adsorption plate of the same area, especially when forming a cryogenic adsorption array, the difference is even greater. At the same time, a single-stage heat shielding baffle 30 can be used to ensure a sufficiently high flow conductance, which can not only achieve high pumping speed and large capacity, but also effectively solve the problem of activated carbon falling off during the operation of the cryogenic adsorption pump, and can be used in strong neutron irradiation environments such as future fusion devices.

[0042] See also Figures 1 to 3 As shown, the present invention also provides a cryogenic adsorption array, including the cryogenic adsorption pump described above, and multiple cryogenic adsorption pumps are arranged on the inner wall of the vacuum chamber according to the connection method of the supercritical helium pipeline 40 and the liquid nitrogen pipeline 20. The connection method here is that the supercritical helium pipelines 40 on the multiple cryogenic adsorption pumps are connected in series or in parallel, and the liquid nitrogen pipelines 20 are connected in series or in parallel.

[0043] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-limiting from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention, and any reference numerals in the claims should not be regarded as limiting the claims involved.

[0044] The above-described embodiments merely represent implementation methods of the invention. The protection scope of the present invention is not limited to the above-described embodiments. For those skilled in the art, several modifications and improvements may be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A cryogenic adsorption pump, characterized in that: include: A heat insulation baffle (10), a liquid nitrogen pipeline (20), a heat shielding baffle (30), a supercritical helium pipeline (40), a helium cryopanel (50), an adsorption chamber (60), a high heat conductivity plate (70) and a gas baffle (80); The heat insulation baffle (10) is located at the back of the heat shielding baffle (30); the liquid nitrogen pipeline (20) is located between the heat insulation baffle (10) and the heat shielding baffle (30); the supercritical helium pipeline (40), the helium cryoplate (50), the adsorption chamber (60), the high heat conductivity plate (70) and the gas baffle (80) are sequentially arranged in the heat insulation baffle (10); and the adsorption chamber (60) is filled with an adsorbent.

2. The cryogenic adsorption pump according to claim 1, characterized in that: The adsorption bin (60) is arranged with its side opening facing the high heat conductivity plate (70); the high heat conductivity plate (70) also serves as a baffle on the side opening of the adsorption bin (60).

3. The cryogenic adsorption pump according to claim 2, characterized in that: The helium cryopanel (50) is in close contact with the opposite side of the opening of the adsorption chamber (60).

4. The cryogenic adsorption pump according to claim 2, characterized in that: The high heat conductive plate (70) is honeycomb-shaped.

5. The cryogenic adsorption pump according to claim 1, characterized in that: The liquid nitrogen pipeline (20) is fixed on the back of the heat shielding baffle (30).

6. The cryogenic adsorption pump according to claim 1, characterized in that: The supercritical helium pipeline (40) is fixed on the helium cryopanel (50).

7. The cryogenic adsorption pump according to claim 1, characterized in that: The heat shielding baffle (30) is rectangular in shape, and one of the main panels of the heat shielding baffle (30) is provided with an opening.

8. The cryogenic adsorption pump according to claim 1, characterized in that: The gas baffle (80) is in the shape of a human figure; and the end of the gas baffle (80) is fixedly connected to the vertical surface of the heat shielding baffle (30).

9. The cryogenic adsorption pump according to claim 8, characterized in that: A liquid nitrogen pipeline (20) is provided at the baffle connection portion of the herringbone-shaped gas baffle (80) and is fixedly connected to the liquid nitrogen pipeline (20).

10. A low temperature adsorption array, characterized in that: It comprises the cryogenic adsorption pump according to any one of claims 1 to 9, wherein a plurality of cryogenic adsorption pumps are arranged on the inner wall of the vacuum chamber according to the connection mode of the supercritical helium pipeline (40) and the liquid nitrogen pipeline (20).

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