Flow regulating valve
By using a cam plate and a cam follower in the flow regulating valve for high-pressure gas, the problems of large driving force and wear of the spiral mechanism in the prior art are solved, and the effect of efficient flow adjustment and durability is achieved.
Patent Information
- Application Number
- CN202411777603.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2024-09-26
- Filing Date
- 2024-12-05
- Publication Date
- 2025-06-06
AI Technical Summary
The existing flow regulating valve for high-pressure gas requires a large force when the drive valve body is reciprocating, resulting in the actuator or air valve becoming larger, and the spiral mechanism is prone to wear under the action of high-pressure gas, affecting durability.
The cam plate and the cam follower are used to convert the rotational movement into a linear movement, and the valve stem is moved in the axial direction through the rotation of the cam plate, thereby adjusting the valve opening. This solution avoids the use of spiral mechanisms, reduces the effect of high-pressure gas on the threads, and avoids wear.
It realizes efficient flow regulation in a high-pressure gas environment without damaging the durability of the valve, avoids the use of large actuators or air valves, and simplifies the device.
Smart Images

Figure CN120100950A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a flow regulating valve, and more particularly to a flow regulating valve for processing high-pressure gas, such as a needle valve type flow regulating valve. Background Art
[0002] A flow control valve for high-pressure gas adjusts the valve opening by reciprocating the valve body in the axial direction of the valve stem. Among such conventional flow control valves, there are valves in which the valve body or the valve stem is operated by an actuator such as a stepping motor (for example, Patent Document 1), and there are valves in which the air valve is separately provided and operated by air. However, in the case of a flow control valve for high-pressure gas, the pressure of the high-pressure gas as the working fluid acts on the valve body, so it is necessary to drive the valve body with a large force to reciprocate the valve body, which leads to the problem of the actuator or the air valve itself becoming larger. In addition, there is also the problem of the need for a device for controlling a large actuator or the air valve itself.
[0003] Here, by using a rotating device such as an electric motor as a power source and converting the rotary motion into linear motion using a screw mechanism, the valve body can be reciprocated in the axial direction of the valve stem to adjust the valve opening. If an electric motor is used as a power source, the valve opening can be directly controlled by controlling the electric motor. However, when the rotary motion is converted into linear motion using a screw mechanism, the pressure of the high-pressure gas as the working fluid acts on the threads of the screw mechanism, causing wear of the threaded portion, thereby causing durability problems.
[0004] The contents of JP2021-196001A are incorporated herein by reference in their entirety. Summary of the invention
[0005] The present invention is proposed in consideration of the above-mentioned problems of the prior art, and aims to provide a flow control valve which uses high-pressure gas as a working fluid, can withstand the high load of the high-pressure gas and work under the high load, and is not prone to wear.
[0006] The flow regulating valve 100 according to the present invention is characterized in that it includes a cam plate 11, a cam follower 12 which is pressed against a surface 11A of the cam plate 11 and moves along the rotation axis direction of the cam plate 11 as the cam plate 11 rotates, and a valve stem 1 which moves along the rotation axis direction of the cam plate 11 as the cam follower 12 moves and changes the flow rate according to its relative position relative to the flow path 3.
[0007] According to the present invention having the above-mentioned structure, the rotation of the cam plate 11 causes the cam follower 12 to move along the rotation axis direction of the cam plate 11, and the movement of the cam follower 12 causes the valve stem 1 to move along the rotation axis direction of the cam plate 11. The flow rate changes according to the relative position relative to the flow path 3, thereby realizing the flow characteristics required by the flow control valve 100.
[0008] Furthermore, in the present invention, the conversion of the rotary motion into the linear motion by the cam plate 11 and the cam follower 12 makes it possible to adjust the valve opening by reciprocating the valve element in the axial direction of the valve stem 1. According to the present invention, it is not the screw mechanism that converts the rotary motion into the linear motion, and the pressure of the high-pressure gas as the working fluid does not act on the threads of the screw mechanism, so that wear does not occur on the threaded engagement portion, and the durability of the flow control valve 100 is improved.
[0009] The valve stem 1 may be connected to one end of a valve stem support 13 , and the other end of the valve stem support 13 is connected to the cam follower 12 .
[0010] Furthermore, the cam follower 12 may have the moving portion 12A at one end, and the moving portion 12A may be pressed against the surface 11A of the cam plate 11 .
[0011] In addition, the cam follower 12 can be configured as a cam follower rod 12 which is configured as a rod as a whole, has a movable portion 12A near both ends that is rotatably pressed against the surface 11A of the cam plate 11, and one end of the cam follower rod 12 is connected to a valve stem support 13 extending in the direction of the rotation axis in the central portion of the cam plate 11.
[0012] The moving part 12A can be a rolling bearing or a sliding bearing (plain bearing). By arranging a rolling bearing or a sliding bearing to reduce resistance, the cam plate 11 can be rotated without using a large power to adjust the position of the valve stem in the direction of the central axis C, thereby eliminating the need to set a large actuator or air valve as in the prior art.
[0013] The cam follower 12 may be formed of a rotatable disc-shaped member, and the rotation axis (line) of the disc-shaped member is supported by one end of a stem support portion 13 extending from a position radially outwardly eccentric relative to the center of the cam plate 11 along the rotation axis direction of the cam plate 11 .
[0014] By making the thickness of the cam plate 111 smaller on the radially outer side and larger on the radially inner side, an inclined surface is formed on the surface 111A of the cam plate 111 on which the cam follower 112 rolls, the moving portion 112A of the cam follower 112 is formed into a truncated cone shape, and the inclined surface of the cam plate 111 is formed into a shape complementary to the moving portion, when the cam follower roller 112A rotates along the cam plate surface 111A in a circular trajectory, there is no inner race difference and no slip occurs. In this way, the cam follower roller 112A can be prevented from being worn.
[0015] In addition, a measuring device 22 that measures the number of revolutions of the output shaft of the driving source for driving the cam plates 11, 111 or the number of revolutions of the gears constituting the speed reduction mechanism 21 interposed between the driving source and the cam plates 111, 111, and a control device CU that controls the flow rate of the fluid flowing through the flow path 3 based on the measurement result of the measuring device 22 may also be provided. Providing the measuring device 22 and the control device CU allows the positions of the cam plate surfaces 11A, 111A and the cam followers 12, 112 to be identified, and controlling the number of revolutions of the output shaft of the driving source allows the position of the axial direction C of the valve stem 1 to be accurately controlled, thereby enabling the flow rate of the high-pressure gas to be accurately controlled according to the desired characteristics. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] [ Figure 1 ] A cross-sectional view of a flow control valve according to an embodiment of the present invention.
[0017] [ Figure 2 ] is a cross-sectional view of the flow control valve, showing Figure 1 The cross-section shown is a vertical cross-section.
[0018] [ Figure 3 ] shows a characteristic diagram of the desired valve opening-hydrogen flow rate characteristics of a flow control valve used for hydrogen filling in a fuel cell vehicle (FCV).
[0019] [ Figure 4 ] shows an enlarged cross-sectional view of the relative position of the end of the valve stem and the small diameter portion of the flow path when the flow control valve is closed.
[0020] [ Figure 5 ] shows an enlarged cross-sectional view of the relative position of the valve stem tip and the small diameter portion of the flow path in the low flow area of the flow control valve.
[0021] [ Figure 6 ] shows an enlarged cross-sectional view of the relative position of the valve stem tip and the small diameter portion of the flow path at the boundary between the low flow area and the high flow area of the flow control valve.
[0022] [ Figure 7 ] shows an enlarged cross-sectional view of the relative position of the valve stem end and the small diameter portion of the flow path in the high flow area of the flow control valve.
[0023] [ Figure 8 ]for Figure 1 and 2 A perspective view of a flow control valve is shown.
[0024] [ Fig. 9 ]for Figure 8 A perspective view of a flow control valve is shown with the housing omitted.
[0025] [ Fig.10 ] shows a perspective view of the cam plate, cam follower rod and valve stem support of the flow control valve.
[0026] [ Fig.11 ]for Fig.10 The A11 arrow view of the cam plate, cam follower, and valve stem support is shown.
[0027] [ Fig.12 ] is a perspective view of the combination of the cam plate and the gear.
[0028] [ Fig.13 ] is a perspective view of the cam plate.
[0029] [ Fig.14 ] is a flow chart of the opening and closing control in the illustrated embodiment.
[0030] [ Fig.15 ] is used to execute Fig.14 The block diagram of the control is shown.
[0031] [ Fig.16 ] shows a perspective view of the main parts of a flow regulating valve according to a first modification of the illustrated embodiment.
[0032] [ Fig.17 ] shows a perspective view of the main parts of a flow rate regulating valve according to a second modification of the illustrated embodiment.
[0033] [ Fig.18 ] shows a perspective view of the main parts of a flow rate regulating valve according to a third modification of the illustrated embodiment.
[0034] [ Fig.19 ] shows a perspective view of the combination of a cam plate, a cam follower lever, a cam follower roller and a valve stem support in a fourth modification of the illustrated embodiment.
[0035] [ Fig. 20 ] shows Fig.19 An exploded cross-sectional view of the structure of the cam follower roller at the end of the cam follower lever is shown.
[0036] [ Fig.21 ] is an explanatory diagram showing a problem when the shape of the cam follower roller is cylindrical.
[0037] [ Fig. 22 ] shows the case where the cam follower roller is conical Fig.21 Illustration showing that the problem described in has been solved.
[0038] [ Fig.23 ] is an explanatory diagram showing the external force acting when the shape of the cam follower roller is conical. DETAILED DESCRIPTION
[0039] Now, an embodiment of the present invention will be described with reference to the accompanying drawings. In the illustrated embodiment, the working fluid is, for example, high pressure hydrogen. Figures 1 to 17 In the figure showing the cross section of the flow control valve 100 according to the embodiment, Figure 1 In the flow control valve 100, high-pressure hydrogen gas as the working fluid flows from the inlet 2A in the direction of arrow A1, passes through the flow path control unit 10, and is supplied downstream from the outlet 2B in the direction of arrow A2. Figure 1 and 2 In the embodiment, the flow path regulating unit 10 has a valve body and a valve seat, and has the function of regulating the flow rate by adjusting the valve opening. Figures 3 to 7 The details of the flow path regulating portion 10 are described. Figure 1 In the example, only the gears are shaded.
[0040] exist Figure 1 and 2 In the embodiment, the flow control valve 100 comprises a main body (flow passage regulating portion housing) 2, a valve stem support 13, a cam plate 11 having an inclined surface formed on a surface 11A, a cam follower rod (cam follower) 12 and a motor (drive source) 20. A flow passage 3 ( Figure 4-7 ), and the flow path 3 constitutes the flow path regulating portion 10. The valve stem support 13 supports the valve stem 1, and the valve stem 1 has a valve stem end 1A ( Figure 4-7 The motor 20 rotates the cam plate 11 via the speed reduction mechanism 21. A spring 15 is interposed between the contact portion 2E located on the main body 2 side and the contact portion 13E near the lower end of the valve stem support 13, and the valve stem support 13 is pressed toward the valve stem support 13 by the spring 15. Figure 1 and 2 The flow control valve 100 is always biased in the opening direction. The flow control valve 100 includes a cam plate side housing 14 and a stem support housing 16, wherein the cam plate side housing 14 covers from the vicinity of the lower end of the stem support 13 to the lower side of the cam follower rod 12 and the cam plate 11, and the stem support housing 16 covers from the vicinity of the lower end of the body 2 to the vicinity of the lower end of the stem support 13 and the spring 15.
[0041] As will be referenced later Fig.13As described above, the cam plate 11 has an inclined surface ( Figure 1 and 2 Upper surface of: For cam plate 11, Figure 1 The cam plate is configured as a flat surface. Figure 1 and 2 The vertical thickness in the cam plate 12 changes smoothly in the circumferential direction. The cam follower rod 12 is constructed as a rod-shaped member as a whole, and has a cam plate contact bearing 12A ( Figure 2 : Rolling bearing: Moving portion). The cam plate contact bearing 12A is rotatably pressed against the surface 11A of the cam plate 11 by the elastic force of the spring 15. For example, a roller bearing is used for the cam plate contact bearing 12A. Although not shown, the moving portion may be constructed with a roller instead of the cam plate contact bearing 12A. Figure 2 As shown, the long hole contact bearing 12B ( Figure 2 ) are provided at both end portions of the cam follower lever 12 (portions radially outside the cam plate contact bearing 12A). The long hole contact bearing 12B is inserted into a long hole 14A (refer to Figure 8 : Figure 1 and 2 ), and can be formed in the long hole 14A along the longitudinal direction ( Figure 1 and 2 The structure in which the long hole contact bearing 12B is inserted into the long hole 14A will be referred to later. Figure 8 For example, a ball bearing can be used for the long hole contact bearing 12B.
[0042] exist Figure 2 , the cam follower rod 12 is connected to a base 13A of a valve stem support 13 extending in the C direction along the central axis at a position corresponding to the central portion of the cam plate 11. The cam follower rod 12 and the valve stem support 13 are connected via a connecting portion bearing 12C. For example, a roller bearing can be used for the connecting portion bearing 12C. Interposing the cam plate contact bearing 12A and the connecting portion bearing 12C in the cam follower rod 12 allows the cam plate 11 to rotate smoothly even when high pressure from compressed hydrogen is applied. The other end of the valve stem support 13 (the end away from the cam follower rod 12: Figure 1 and 2 The upper end portion in the valve stem is connected to the valve stem 1.
[0043] exist Figure 1 and 2In the embodiment shown in the figure, the speed reduction mechanism 21 is a mechanism for reducing the speed of the output end of the motor 20 as the driving source and transmitting it, but it is not limited to the structure shown in the figure, and a conventionally known structure can be applied. However, in the embodiment shown in the figure, a speed reduction mechanism of a specification and structure capable of withstanding operation under the condition of applying high-pressure hydrogen is adopted, for example, a thrust bearing is appropriately adopted. The structure of attaching the thrust bearing to the gear of the speed reduction mechanism 21 will be referred to later. Fig.11 Among the gears constituting the speed reduction mechanism 21, the gear 21-1 ( Figure 2 ) and the cam plate 11 by means of the assembly key 17 ( Figure 2 ) and integration (refer to Fig.11 and 12 ).Although Figure 1 and Figure 2 Although not explicitly shown in the figure, in the illustrated embodiment, a control unit CU (control device: see Fig.15 ), and also provided with a device for measuring the rotation amount of the output shaft of the motor 20 or constituting a speed reduction mechanism (refer to Fig.15 :exist Figure 1 and 2 A device for measuring the rotation amount of a gear (not shown) (22: rotation amount sensor).
[0044] Next, we will refer to Figures 3 to 7 The flow path adjustment unit 10 will be described. Figure 3 In the embodiment, the characteristics of the valve opening of the flow control valve and the hydrogen flow rate are represented by the characteristic line L1 (L11, L12), and the valve opening of the flow control valve changes as it changes from the closed state ( Figure 3 Origin in)Open (Move to Figure 3 The right area on the horizontal axis in the figure) gradually increases (moves to the right side of the horizontal axis in the figure) Figure 3 Then, it transitions from the low flow area R1 with a small opening to the high flow area R2 with a large opening. In the low flow area R1, since the slope θ1 of the characteristic line L11 is small and the pressure rise is also small, damage to the fuel tank and various pipes of the FCV (fuel cell vehicle) as the filling object can be minimized. On the other hand, in the high flow area R2, since the slope θ2 of the characteristic line L12 is large, the requirements of large hydrogen flow and fast hydrogen filling speed can be met. Figures 4 to 6 Describe the operation of the flow control valve in the low flow area R1 and refer to Figure 7 The following describes the operation of the flow control valve in the high flow area R2. Figure 3 In the figure, symbol L13 represents the boundary between the low flow area R1 and the high flow area R2, and the state at the boundary L13 is Figure 6 Shown in.
[0045] In the diagram showing the details of the flow path adjustment unit 10 Figure 4 In the embodiment, a flow path 3 is formed in the flow path forming portion 2C of the main body 2, and the flow path 3 has a small diameter portion 3A communicating with the outlet 2B and a flow path inlet 2A (see Figure 1 ) and the tapered portion 3AT connecting them. Figure 4 The lower side of the stem end (in the middle) is formed with a stem end tapered portion 1AT, and the inlet 2A side of the stem end tapered portion 1AT is continuous with the stem 1 (stem body: a portion with a larger diameter than the stem end 1A). Figure 4 In the state, the valve stem tip 1A is inserted into the small diameter portion 3A of the flow path, and the valve stem tip tapered portion 1AT contacts the flow path tapered portion 3AT. Figure 4 In the state, the valve stem tip 1A constitutes the valve body, the flow path tapered portion 3AT constitutes the valve seat, and the flow control valve 30 is closed. Figure 4 In the embodiment, there is an annular gap δ with a small radial dimension between the outer peripheral surface of the valve stem end 1A and the inner peripheral surface of the small-diameter flow path portion 3A. When the flow control valve 100 composed of the valve stem end tapered portion 1AT and the flow path tapered portion 3AT is opened, a small amount of hydrogen flows through the annular gap δ. In this case, the hydrogen flow rate depends on the flow path resistance in the annular gap δ, and the flow path resistance is determined by the axial length Lt of the valve stem inserted into the small-diameter flow path portion 3A by the valve stem end 1A. The valve stem axial length Lt is the distance that the hydrogen flows through the annular gap δ (the valve stem axial length).
[0046] Figure 5 It shows that the valve stem 1 (valve stem end 1A) has been Figure 4 The state in (valve closed) moves to Figure 4 The state of the lower side in Figure 5 In the valve stem 1 (stem end 1A) Figure 4 The axial length Lt of the valve stem when the valve stem end 1A is inserted into the small diameter portion 3A of the flow path is reduced compared to the state in the flow path, so the valve stem end tapered portion 1AT is separated from the flow path tapered portion 3AT, and the flow control valve 100 is opened. Figure 4 is shorter than the state in . Figure 5 In the state of , since the axial length Lt of the valve stem is long, the flow resistance in the annular gap δ is large, and the flow rate of hydrogen flowing through the gap δ is small. As the valve stem end 1A further descends and the axial length Lt of the valve stem becomes shorter, the flow resistance in the gap δ becomes smaller, and the hydrogen flow rate increases. In the flow control valve 100 according to the illustrated embodiment, by changing the axial length Lt of the valve stem inserted into the small-diameter portion 3A of the flow path by changing the flow resistance, the flow rate of hydrogen flowing through the annular gap δ can be finely adjusted.
[0047] exist Figure 6 In the state shown, the end surface 1AB of the valve stem tip 1A is aligned with the boundary 3C between the small-diameter flow path portion 3A and the tapered flow path portion 3AT, and the axial length Lt of the valve stem (refer to Figure 4 and 5 : Figure 6 ) becomes zero. Figure 6 The state shown is a boundary L13 ( L120 ) between the low flow rate region R1 and the high flow rate region R2 in the flow rate control valve 100. Figure 3 ) state. If the valve stem 1 is Figure 6 The state shown is further reduced, and it becomes Figure 7 Status shown.
[0048] exist Figure 7 In the embodiment, the end surface 1AB of the valve stem tip 1A is positioned below the boundary 3C between the small diameter portion 3A and the flow path tapered portion 3AT. Figure 5 In the case of hydrogen, the flow path is composed of the annular gap δ, and the flow path resistance is relatively large. Figure 7 In the state shown, the flow path through which hydrogen flows is formed by the area between the outer peripheral surface of the valve stem end 1A and the inner peripheral surface of the flow path tapered portion 3AT, and its cross-sectional area is much larger than Figure 5 The annular gap δ shown, the flow resistance is small, and the flow rate of hydrogen is large (high flow area). If the valve stem 1 (valve stem end 1A) is further lowered, the cross-sectional area of the hydrogen flow path will increase sharply. According to the flow control valve 100 shown, the conversion from the valve closed state → low flow state → high flow state is all continuously performed by the operation of moving the valve stem end 1A in the direction of removing it from the small-diameter portion 3A of the flow path. By continuous and smooth operation, after closing, that is, when the valve is opened, hydrogen flows at a small flow rate, and the small flow rate gradually increases (low flow area R1), and in Figure 6 The status shown ( Figure 3 After L13 in the figure, the hydrogen flow rate increases rapidly (high flow area R2). Here, Figures 3 to 7 The configuration of the flow path regulating portion A shown is merely an example. The flow path regulating portion A in the shown embodiment may also be configured similarly to a flow rate regulating valve shown in Patent Document 1, for example.
[0049] Figure 8 Shown in perspective Figure 1 and 2 Flow control valve 100 is shown in cross section. Fig. 9 Shows Figure 8 The state of the cam plate side housing 14 is omitted. Figure 8In the embodiment, long holes 14A are formed on both side surfaces of the cam plate side housing 14, and long hole contact bearings 12B are inserted into the long holes 14A. The long hole contact bearings 12B are arranged at the ends of the cam follower rods 12 (refer to Fig. 9 , however, in Fig. 9 With this configuration, when the cam plate 11 ( Fig. 9 ) is rotated by the rotation of the motor 20 (driving source) transmitted through the speed reduction mechanism 21, so that the valve stem support 13 ( Fig. 9 ) and stem 1( Figure 1 and 2 ) rotates around its central axis (co-rotates) but not in the direction of the central axis ( Figure 8 and 9 In the case of moving in the direction of arrow C. Figure 8 and 9 In the figure, symbol 2B represents the outlet of high pressure hydrogen.
[0050] like Figure 1 , 2 As shown in FIG. 9 , the valve stem support 13 is connected in a manner of surrounding the cam follower rod 12 (via the connection portion bearing 12C), and the valve stem support 13 and the cam follower rod 12 are pressed toward the cam plate 11 by the spring 15. When the cam plate 11 is driven to rotate by the motor 20 via the speed reduction mechanism 21, the valve stem support 13 and the cam follower rod 12 move in the direction of the central axis C of the valve stem 1 because the upper surface 11A of the cam plate 11 has an inclined surface.
[0051] exist Fig. 9 and 10 In the embodiment, a cam contact bearing 12A and a long hole contact bearing 12B are respectively provided at both ends of the cam follower lever 12, and the cam follower lever 12 is pressed against the surface 11A of the cam plate 11 via the cam contact bearing 12A. An inclined surface is formed on the surface 11A of the cam plate 11, and the inclined surface is formed relative to the central opening 11B ( Fig.10 and 13 ) are two point-symmetrical inclined surfaces. The reason for forming two point-symmetrical inclined surfaces is that each inclined surface presses two cam contact bearings 12A disposed near the two ends of the cam follower rod 12 with the same pressure. Fig.10 In the figure, symbol 11F denotes a flat surface constituting a part of the cam plate surface 11A, and symbol 11ST denotes a step portion on the cam plate surface 11A. The surface 11A of the cam plate 11 will be referred to later. Fig.13 Give a description.
[0052] exist Fig. 9 and 10 In the case where the motor 20 (refer to Figure 1 and2 ) rotates, its rotation is transmitted to the cam plate 11 via the speed reduction mechanism 21, and the cam plate 11 rotates. Fig.10 and 11 As shown, among the gears constituting the speed reduction mechanism 21, the gear 21-1 closest to the cam plate 11 is integrated with the cam plate 11. When the cam plate 11 rotates, due to the inclined surfaces of the cam plate surface 11A (the two inclined surfaces are arranged point-symmetrically), the positions of the cam plate surface 11A in the direction of the center axis C, which are contacted by the two cam plate contact bearings 12A near both ends of the cam follower rod 12, change, so that the cam follower rod 12 moves in the direction of the center axis C. If the cam follower rod 12 moves in the direction of the center axis C, the valve stem 1( Figure 1 and 2 ) is moved by the valve stem support 13 (base 13A) connected to the cam follower rod 12, and the valve opening of the flow control valve 100 can be adjusted. In other words, by controlling the rotation angle of the cam plate 11, the position of the cam follower rod 12 in the direction of the center axis C can be adjusted, and the valve opening of the flow control valve 100 can be controlled.
[0053] In the illustrated embodiment, the valve body 1AT ( Figure 4-7 ) reciprocates in the axial direction of the valve stem 1 to adjust the valve opening. If the motor 20 is used as the driving source, the valve opening can be directly controlled by controlling the motor 20. According to the illustrated embodiment, since the rotational motion is not converted into linear motion by the screw mechanism, the pressure of the high-pressure hydrogen gas as the working fluid does not act on the threads of the screw mechanism, and wear or damage to the threaded meshing part does not occur, thereby improving the durability of the flow control valve. In addition, by appropriately arranging bearings or rollers in the driven rod 12, the valve stem support 13 and the speed reduction mechanism 21 to reduce resistance, the cam plate 11 can be rotated, and the position of the valve stem 1 in the direction of the center axis C can be adjusted without using a large power, so there is no need to use a large actuator or air valve as in the prior art. By measuring the rotation amount of the motor 20 serving as the driving source or the rotation amount of a certain point in the reduction mechanism 21, the positions of the cam plate surface 11A and the cam follower 12 can be identified, and by controlling the rotation amount of the motor 20 or the rotation amount of a certain point in the reduction mechanism 21, the position of the valve stem 1 in the direction of the center axis C can be precisely controlled, thereby enabling the flow rate of the high-pressure gas to be precisely controlled according to the desired characteristics.
[0054] In the figure showing the back side of the cam plate 11 (the opposite surface to the cam plate surface 11A), Fig.11As described above, the gear 21-1 of the gears of the speed reduction mechanism 21 closest to the cam plate 11 is connected to the cam plate 11 by the assembly key 17 (not shown: refer to Figure 2 ) coupling. On the surface of the gear 21-1 opposite to the cam plate 11 ( Fig.11 A thrust roller bearing 21A-1 is provided on the lower surface of the gear 21-1. By providing the thrust roller bearing 21A-1 on the surface of the gear 21-1 opposite to the cam plate 11, it can withstand the compressive force applied by the high-pressure hydrogen. Fig.12 The cam plate 11 and the gear 21-1 are shown in a state where they are integrated, and an inclined surface 11S and a stepped portion 11ST are formed on the cam plate surface 11A. Fig.13 Describe the inclined surface 11S and the step portion 11ST. Note that Fig.12 In the embodiment, the thrust roller bearing 21A-1 provided on the gear 21-1 is omitted (see Fig.11 ) icon.
[0055] On the surface 11A of the cam plate 11 (cam plate surface: the upper surface in the example shown), a portion that is aligned with the valve stem 1 (valve body 1AT, Figure 4-7 ) corresponding to the amount of movement (displacement). Fig.13 In addition to the inclined surfaces 11S (11S-1, 11S-2), flat surfaces 11F (11F-11, 11F-12, 11F-21, 11F-22) are also formed on the surface 11A of the cam plate 11. The two inclined surfaces 11S-1, 11S-2 extending in the circumferential direction are formed symmetrically with respect to the center point of the central opening 11B of the cam plate 11. Flat surfaces 11F-11, 11F-12 are formed near both ends of the inclined surface 11S-1 in the circumferential direction, and flat surfaces 11F-21, 11F-22 are formed near both ends of the inclined surface 11S-2 in the circumferential direction. These flat surfaces are also point-symmetrical with respect to the center of the central opening 11B of the cam plate 11, have the same shape, and extend in the circumferential direction. The two inclined surfaces 11S-1, 11S-2 respectively press the two cam plate contact bearings 12A (refer to) arranged near both ends of the driven rod 12 with the same pressure. Figure 2 , 9 , 10).
[0056] exist Fig.13 In the embodiment, the flat surface 11F is provided to prevent the valve opening to be adjusted from deviating from the predetermined range when the motor 20 rotates too much and the cam plate 11 rotates too much. In other words, due to the flat surface 11F, even if the motor 20 and the cam plate 11 rotate too much, the valve stem 1 will not be excessively displaced, thereby preventing the valve opening from becoming too large or too small, and ensuring that the flow control valve 100 is opened and closed within the predetermined range. This can prevent the valve seat 3AT and the valve stem 1 from being damaged. Fig.13 As shown in FIG. 1 , the circumferential distance of the flat surface 11F is shorter than that of the inclined surface 11S. With respect to the moving direction (in the direction of arrow SU) of the valve stem 1, each inclined surface 11S-1, 11S-2 gradually protrudes from the same height as each flat surface 11F-11, 11F-21 as it moves forward in the circumferential direction (in the direction of arrow CL). Fig.13 After passing the most prominent position of the inclined surfaces 11S-1 and 11S-2 in the SU arrow direction, they reach the flat surfaces 11F-12 and 11F-22. Step portions 11ST are formed at the boundaries between the flat surface 11F-12 and the flat surface 11F-21 and at the boundaries between the flat surface 11F-22 and the flat surface 11F-11. Fig.13 In the figure, the symbol H represents the height of the step in the direction of the arrow SU. The height dimension H of the step portion 11ST (along the arrow direction SU) is equal to the height dimension H of the center axis of the valve stem in Figure 4 The distance traveled during the quick release of the valve stem end 1A from Figure 4 The position of the valve stem end 1A in the flow control valve 100 (the valve closing position) is Figure 7 The distance from the position of the valve stem end 1A in the flow control valve 100 (the high flow area).
[0057] The following will describe the method of controlling the opening and closing of the valve by rotating the cam plate 11 for the normal opening and closing of the flow control valve 100 and the rapid opening and closing of the valve. In the normal opening and closing of the valve, the cam plate near both ends of the cam follower rod 12 contacts the bearing 12A (see Figure 2 , 9 , 10) respectively rotate around the center of the central opening 11B of the cam plate 11, while contacting the inclined surfaces 11S-1 and 11S-2 (hereinafter, the two inclined surfaces are collectively referred to as inclined surfaces 11S) of the cam plate 11. At this time, according to the protrusion amount ( Fig.13The axial position of the valve stem 1 is determined by the "protrusion amount on the SU arrow side" in the contact position, and the valve opening of the flow control valve 100 is adjusted. For example, if the "protrusion amount" increases when the contact position moves forward in the CL arrow direction, the valve stem 1 moves in the direction of closing the flow control valve 100. If the "protrusion amount" decreases when the contact position moves forward in the opposite direction of the CL arrow, the valve stem 1 moves in the direction of opening the flow control valve 100. When the contact position moves forward in the CL arrow direction and the "protrusion amount" increases, thereby reaching a position adjacent to the flat surface 11F-12 or 11F-22 (a position on the inclined surface 11S), the flow control valve 100 is closed. Moreover, when the contact position moves forward in the opposite direction of the CL arrow and the "protrusion amount" decreases, thereby reaching a position adjacent to the flat surface 11F-11 or 11F-21 (a position on the inclined surface 11S), the flow control valve 100 is opened.
[0058] If the cam plate 11 rotates, and the contact position between the cam plate contact bearing 12A and the inclined surface 11S further moves in the CL arrow direction beyond the above-mentioned closed position, thereby moving over the step portion 11ST to another flat surface 11F-11 or 11F-21, the valve stem 1 moves in a direction to open the flow regulating valve 100. This allows the flow regulating valve 100 to be fully opened immediately from the closed state.
[0059] Main references Fig.14 The opening and closing control of the flow control valve 100 is described. Fig.14 In the flowchart of FIG. 1 , in step S1, the rotation amount measuring device 22 (see FIG. 1 ) is used to measure the rotation amount of the rotating shaft. Fig.15 )Measurement of motor 20( Figure 1 and 2 When measuring the rotation amount, the rotation amount of the speed reduction mechanism 21 ( Figure 1 and 2 ) is measured. In step S2, the valve opening of the flow control valve 100 is calculated and determined based on the detected rotation amount of the motor 20 or the like measured in step S1. When calculating the valve opening of the flow control valve 100, the movement amount of the valve stem 1 in the direction of the central axis C is calculated based on the rotation amount of the motor 20 or the like, and the valve opening of the flow control valve 100 is calculated. Here, various parameters can be determined by calculation, but formulas or graphs representing their relationships can also be specified in advance, and necessary parameters can be determined by referring to these formulas or graphs.
[0060] In the next step S3, the valve opening of the flow control valve 100 calculated and determined in step S2 is compared with the target value ( Figure 3 The target value of the valve opening is, for example, a target value with the elapsed time as a parameter, such as Figure 3, but it can also be determined by parameters other than the elapsed time. In step S4, based on the comparison result of step S3, it is determined whether the valve opening of the flow control valve 100 determined in step S2 is within the predetermined range of the target value. As a result of the judgment in step S4, if the valve opening of the flow control valve 100 is less than the predetermined range of the target value, the processing proceeds to step S5, and if the valve opening is greater than the predetermined range of the target value, the processing proceeds to step S6. If the valve opening of the flow control valve 100 is within the predetermined range of the target value (step S4 is "yes"), the processing proceeds to step S7 without rotating the motor 20.
[0061] exist Fig.14 In step S5 (when the valve opening is less than the predetermined range of the target value), the motor 20 is rotated a predetermined small amount in the direction of increasing the valve opening of the flow regulating valve 100. In step S6 (when the valve opening is greater than the predetermined range of the target value), the motor 20 is rotated a predetermined small amount in the direction of decreasing the valve opening of the flow regulating valve 100. In step S7, it is determined whether the filling of the system including the flow regulating valve 100 is completed. In step S7, if it is determined that "filling is completed" (step S7 is "Yes"), the control is terminated. If it is not determined that "filling is completed" (step S7 is "No"), the processing returns to step S1 (the loop when step S7 is "No"). Although in Fig.14 Not shown, but in the case where the quick valve is opened, it is determined whether the flow regulating valve 100 is in a closed state, whether it should be quickly opened, and if it should be quickly opened, the rotation of the motor 20 is controlled so that the contact position of the cam contact bearing 12A and the inclined surface 11S moves from the flat surfaces 11F-12, 11F-22 to the flat surfaces 11F-21, 11F-11 via the step portion 11ST.
[0062] Reference Fig.15 The control unit CU (control device) that performs the opening and closing control of the flow control valve 100 will be described. Fig.15In the control unit CU, there is a valve opening determination module B1, a comparison module B2, a control signal output module B3 and a storage module B4. The valve opening determination module B1 obtains the detection value of the rotation amount from the motor rotation amount detection sensor (measuring device) 22 that measures the rotation amount of the motor 20 via the signal transmission line SL1. The valve opening determination module B1 obtains the "characteristics of the motor 20 rotation amount-valve opening of the flow control valve 100" stored in the storage module B4 via the signal transmission line SL2. The relationship between the rotation amount of the motor 20, the protrusion amount of the contact position between the cam plate inclined surface 11S and the cam follower rod 12 in the direction of the central axis (the movement amount of the valve stem 1 and the valve stem end 1A in the direction of the central axis) and the valve opening of the flow control valve can be predetermined. Using this predetermined relationship, the valve opening of the flow control valve can be calculated based on the rotation amount of the motor 20, etc.
[0063] The valve opening determination module B1 has a function of calculating and determining the valve opening of the flow control valve 100 by referring to the "rotation amount of the motor 20-valve opening characteristic of the flow control valve 100" based on the acquired rotation amount detection value of the motor 20. The "valve opening of the flow control valve 100" determined in the valve opening determination module B1 is sent to the comparison module B2 via the signal transmission line SL3.
[0064] The comparison module B2 obtains the target value of the valve opening of the flow control valve 100 (for example, the target value with the elapsed time as a parameter) from the storage module B4 via the signal transmission line SL4. The comparison module B2 has the function of comparing the valve opening of the flow control valve 100 determined in the valve opening determination module B1 with the target value of the valve opening. The comparison result of the comparison module B2 is sent to the control signal output module B3 via the signal transmission line SL5.
[0065] The control signal output module B3 has a function of outputting a control signal to the motor 20 (or the speed reduction mechanism 21) via the signal transmission line SL6 based on the comparison result of the comparison module B2 so that the valve opening of the flow control valve 100 becomes a target value (or a value within a predetermined range of the target value). Fig.14As described in steps S5 and S6 of , the control signal is "a control signal that causes the motor 20 to rotate in a direction that increases the valve opening of the flow control valve 100" or "a control signal that causes the motor 20 to rotate in a direction that decreases the valve opening of the flow control valve 100". The storage module B4 has a function of pre-acquiring and storing information and data required for the opening and closing control of the flow control valve 100 and providing it to each functional module as needed. The information and data stored in the storage module B4 are, for example, specification data related to the components constituting the flow control valve 100 (valve stem 1, main body 2, flow path 3, cam plate 11, inclined surface 11S of cam plate 11, cam follower rod 12, motor 20, speed reduction mechanism 21), characteristics of the rotation amount of the motor 20-valve opening of the flow control valve 100, target value of the valve opening of the flow control valve 100, etc.
[0066] Fig.16 1 shows the main parts of the flow control valve according to the first variation of the illustrated embodiment. Figures 1 to 15 In the embodiments described in Fig.10 As shown, the cam plate contact bearing 12A and the long hole contact bearing 12B are respectively provided at both ends of the cam follower rod 12 arranged to pass through the valve stem support 13, and the cam plate contact bearing 12A rolls on the surface 11A of the cam plate 11. The cam plate contact bearing 12A constitutes a rolling bearing. In contrast, in Fig.16 In the first variation shown, the long hole contact bearings 12B are provided at both ends of the cam follower rod 12-1 passing through the valve stem support 13, but no cam plate contact bearings or rolling bearings are provided. Fig.16 In the embodiment, the cam follower rod 12-1 contacts the surface 11A of the cam plate 11 from the area radially inward of the long hole contact bearing 12B and slides on the surface 11A. When the cam plate 11 rotates, the position of the cam plate surface 11A contacted by the cam follower rod 12-1 in the direction of the center axis C changes, whereby the cam follower rod 12-1 moves in the direction of the center axis C, and the valve stem 1( Figure 1 and 2 ) moves, and is capable of adjusting the valve opening of the flow control valve 100. Fig.16 The other configurations and effects of the first modification are similar to those of Figures 1 to 15 The same as in the embodiment.
[0067] exist Fig.16In the first modification, the cam follower rod 12-1 is a cylindrical member with a constant radius, and it contacts the area from the inner diameter to the outer diameter of the cam plate 11. Due to the difference in radial dimensions from the rotation axis (center axis C) at the contact point, the area where the cam follower rod 12-1 contacts the cam plate surface 11A is larger near the outer diameter of the cam plate 11 than near the inner diameter at the same rotation speed. Therefore, the amount of wear of the cam follower rod 12-1 and / or the cam plate surface 11A increases near the outer diameter of the cam plate 11. Fig.17 The second modification in the embodiment has a relatively large diameter region 12-2A and a relatively small diameter region 12-2B in the radially inner region of the bearing 12B of the cam follower 12-2, and a step is formed at the boundary between the large diameter region 12-2A and the small diameter region 12-2B. With such a configuration, only the large diameter region 12-2A slides on the cam plate surface 11A, whereby the size of the portion of the cam follower 12-2 in contact with the cam plate surface 11A can be adjusted by appropriately setting the axial length of the large diameter region 12-2A. This can reduce the above-mentioned difference in the amount of wear caused by the above-mentioned difference in the radial dimension from the center axis C. The large diameter region 12-2A can be composed of a sliding bearing. Fig.17 The other configurations and effects of the second modification are similar to those of Fig.16 The same as the first modification.
[0068] Fig.18 A flow control valve according to a third modification of the illustrated embodiment is shown. Figures 1 to 15 In the embodiment of , two cam contact bearings 12A are in contact with the surface 11A of the cam plate 11, and the cam contact bearings 12A are respectively provided near both ends of the cam follower rod 12 extending in the diameter direction of the cam plate 11. The cam follower rod 12 is connected to one end of the valve stem support 13. The valve stem support 13 extends in the direction of the central axis C (arrow C direction) at the center of the cam plate 11. In contrast, in Fig.18 In the third modification, the valve stem support 13-1 extends in the center axis direction (arrow C direction) at a position eccentrically offset radially outward from the center of the cam plate 11-1. Instead of the cam follower rod, a cam follower roller 12-3 (cam follower) rotatably supported is provided at the cam plate side end of the valve stem support 13-1, and the cam follower roller moves on the cam plate surface 11A-1. The cam follower roller 12-3 is constructed as a thin disk-shaped member and constitutes a rolling bearing.
[0069] like Fig.18As shown, about half of the cam plate surface 11A-1 is a flat surface 11F-1, and the remaining about half is an inclined surface 11S-1, and a step portion 11ST-1 with a height H is formed at the boundary between the most protruding position of the inclined surface 11S-1 along the central axis direction (arrow C direction) and the flat surface 11F-1. Since the portion in contact with the cam plate surface 11A-1 is a single cam follower roller 12-3, the shape of the cam plate surface 11A-1 is not like Fig.10 and 13 As in FIG. 1 , the cam plate 11-1 is symmetrical about the center point of the cam plate 11-1. Fig.18 In the embodiment, the rotation axis (not shown) of the cam follower roller 12-3 is supported by the branches of the base 13A-1 of the valve stem support 13-1 divided into two parts.
[0070] according to Fig.18 In the third modification, when the cam plate 11-1 rotates, the valve stem support 13 moves up and down, so that the valve stem 1 does not rotate only around its axis without moving in the axial direction (direction of arrow C) (so-called "joint rotation"). Figures 1 to 15 As in the embodiment of the present invention, a common rotation prevention mechanism is provided (a mechanism in which the long hole contact bearing 12B at the end of the cam follower rod 12 is inserted into the long hole 14A of the cam plate side housing 14: refer to Figure 8 However, a pin extending radially outward may be provided on the valve stem support 13-1 ( Fig.18 The pin is inserted into the long hole (not shown) of the housing covering the outside of the valve stem support 13-1. Fig.18 ) so that the valve body 1AT and the valve seat 3AT (refer to Figure 4 ) will not rotate and contact in the same position every time.
[0071] exist Fig.18 In, with Fig.16 and 17 As in the illustrated modification, a member (for example, a semi-spherical member) which smoothly slides on the cam plate surface 11A may be provided in place of the cam follower roller 12-3, and the sliding member may constitute a sliding bearing. Fig.18 Only the cam plate 11-1, the valve stem support 13-1 and the cam follower roller 12-3 are shown, but other configurations and effects are similar to those of FIG. Figures 1 to 17 The configuration and effect are the same as described in .
[0072] Next, we will refer to Figures 19 to 23 A fourth modification of the illustrated embodiment is described. In the following description, components identical to those in the above-described flow rate regulating valve are given the same reference numerals and will not be described again.
[0073] In the figure showing the cam plate 111, the cam follower rod 112, the cam follower roller 112A and the valve stem support 13 assembled together, Fig.19 , the upper end side of the valve stem support 13 is connected to the shaft 1 (valve stem). The lower end side of the valve stem support 13 is connected to the cam follower rod 112 (cam follower). The portion of the cam follower roller 112A that abuts against the cam plate surface 111A (upper surface) is formed into a truncated cone shape. In the cam follower rod 112, a first thrust bearing 112D, a thrust bearing receiving member 112E, a second thrust bearing 112F, and a fastening member 112G are provided on the radially outer side of the cam follower roller 112A. The second thrust bearing 112F and the thrust bearing receiving member 112E constitute a long hole contact bearing 12B.
[0074] like Fig. 20 As shown, Fig. 20 112A is an exploded cross-sectional view of the mounting structure of the cam follower roller 112A. A bearing 112H that bears radial loads is provided inside the cam follower roller 112A. A bearing 112I that bears radial loads is provided inside the thrust bearing housing member 112E. The first thrust bearing 112D is provided radially inside the thrust bearing housing member 112E (in the axial direction of the cam follower rod 112, Fig. 20 The second thrust bearing 112F is disposed radially outward (in the axial direction of the cam follower rod 112, Fig. 20 on the right side of the screen).
[0075] As will be referenced later Fig.23 As described above, the force represented by the symbol RA always acts radially outward on the truncated cone-shaped member of the cam follower roller 112A. However, the first thrust bearing 112D supports the radially outward force RA, thereby preventing the cam follower roller 112A from deviating (moving) radially outward. In addition, the first thrust bearing 112D has the function of absorbing the rotation difference between the rotatable cam follower roller 112A and the non-rotating thrust bearing receiving member 112E. The two cam follower rollers 112A arranged on the cam follower rod 112 rotate in opposite directions, causing the rod 112 to twist. The second thrust bearing 112F absorbs the torsion of the rod 112 and prevents the fastening member 112G from loosening due to the torsion.
[0076] Unlike the variants shown, reference will be made to Fig.21The problem of the cam follower roller 112A being cylindrical will be described. When the cam plate 111 rotates, the cylindrical member 112P, which serves as the cam follower roller, rolls along the cam plate surface 111A in a circular trajectory such as trajectory α. At this time, the distance that the cam follower roller moves on the cam plate surface 111A varies depending on the distance from the rotation center point of the cam plate 111. On the other hand, since the moving distance when the cylindrical member 112P rotates one circle is constant, the cylindrical member 112P slides at any point of the dimension R. In order to solve this problem, it is necessary to make the ratio of the travel distance when the cam follower rod 112 rotates one circle to the travel distance when the cam follower roller 112A rotates one circle equal, regardless of the distance from the rotation center of the cam plate 111.
[0077] In contrast, in the illustrated modification, a truncated cone-shaped member is used as the cam follower roller 112A. When the virtual apex VT of the truncated cone-shaped member 112A (the apex of an imaginary cone when the roller 112A is assumed to be a cone) coincides with the rotation center RC of the cam plate 111, and when the intersection of the extensions of the ridges on both sides of the truncated cone coincides with the rotation center RC of the cam plate 111, the ratio between the travel distance of the cam follower rod 112 and the travel distance when the cam follower roller 112A rotates one circle becomes equal, and slippage is prevented. In the illustrated modification, the virtual apex VT of the truncated cone-shaped roller 112A coincides with the rotation center RC of the cam plate 111.
[0078] Here, in the side view showing the truncated cone-shaped member 112A on the cam plate surface 111A, Fig.23 In the embodiment, a downward pressure F1 generated by the high pressure of the working gas always acts on the truncated cone-shaped member 112A as the cam driving roller, and thus a radially outward force RA always acts on the truncated cone-shaped member 112A. Fig.19 and 20 The illustrated first thrust bearing 112D is arranged to support radially outward forces RA acting on the frustoconical member 112A.
[0079] It should be noted that the illustrated embodiments are merely examples and are not intended to limit the technical scope of the present invention.
[0080] Reference Signs
[0081] 1 Valve stem
[0082] 1A Stem end
[0083] 2 Main body
[0084] 3 flow path
[0085] 3A Flow path small diameter part
[0086] 3B Flow path large diameter part
[0087] 11, 111 Cam plate
[0088] 11A, 111A cam plate surface
[0089] 12, 12-1, 12-3, 112 Cam follower (cam follower rod or cam follower roller)
[0090] 12A, 12A-1, 112A moving part (roller or bearing)
[0091] 13 Valve stem support
[0092] 20 Electric motor (driving source)
[0093] 21. Speed reduction mechanism
[0094] 22 Measuring device
[0095] 100 Flow Control Valve
[0096] CU control unit (control device)
[0097] LtThe dimension of the valve stem (small diameter part of the valve stem) inserted into the small diameter part of the flow path
[0098] δ Gap.
Claims
1. A flow control valve, comprising: Cam plate; a cam follower which is pressed against the surface of the cam plate and moves in the direction of the rotation axis of the cam plate as the cam plate rotates; and The valve stem moves along the rotation axis direction of the cam plate as the cam follower moves, and changes the flow rate according to the relative position with respect to the flow path.
2. The flow control valve according to claim 1, wherein: The valve stem is connected to one end of a valve stem support portion, and the other end of the valve stem support portion is connected to the cam follower.
3. The flow control valve according to claim 1, wherein: The cam follower has a moving portion at one end, the moving portion being pressed against a surface of the cam plate.
4. The flow control valve according to claim 1 or 2, wherein: The cam follower is a cam follower rod configured as a rod as a whole, having a movable portion near both ends thereof that is rotatably pressed against the surface of the cam plate, and one end of the cam follower rod is connected to a valve stem support portion extending along the rotation axis direction at the center of the cam plate.
5. The flow control valve according to claim 3, wherein: The moving part is a rolling bearing.
6. The flow control valve according to claim 3, wherein: The moving part is a sliding bearing.
7. The flow control valve according to claim 4, wherein: The moving part is a rolling bearing.
8. The flow control valve according to claim 4, wherein: The moving part is a sliding bearing.
9. The flow control valve according to claim 1, wherein: The cam follower is constituted by a rotatable disc-shaped member, and the rotation axis of the disc-shaped member is supported by one end of a stem support portion extending from a position eccentric radially outward relative to the center of the cam plate in the direction of the rotation axis of the cam plate.
10. The flow control valve according to claim 3, wherein: The thickness of the cam plate is smaller on the radial outside and larger on the radial inside, a slope is formed on the surface of the cam plate for the cam follower to roll, the moving part of the cam follower is in a truncated cone shape, and the inclined surface of the cam plate is complementary to the moving part.
11. The flow control valve according to claim 10, wherein: The moving portion of the cam follower is set so that an extended portion of a ridge line of the moving portion intersects with a rotation center of the cam plate.
12. The flow control valve according to claim 1, 2, 9 or 10, further comprising: a measuring device for measuring the number of revolutions of an output shaft of a driving source for driving the cam plate or the number of revolutions of a gear constituting a speed reduction mechanism interposed between the driving source and the cam plate; as well as A control device controls the flow rate of the fluid flowing through the flow path based on the measurement result of the measurement device.
Citation Information
Patent Citations
Flow regulating valve
JP2021196001A