Multi-direction continuous uninterrupted measuring jig

Abstract

The invention relates to a multi-direction continuous uninterrupted measuring jig, and relates to the technical field of wafer grinding platform decks, the multi-direction continuous uninterrupted measuring jig comprises a reference disc, the bottom of the reference disc is provided with a plurality of adjusting bottom feet, the center of the reference disc is provided with a center hole, the reference disc is also provided with at least four strip-shaped holes, and the strip-shaped holes are distributed along the circumferential direction of the reference disc. The strip-shaped length direction of the strip-shaped hole is along the radial direction of the reference disc; the adjusting bottom feet comprise upper bottom feet and lower bottom feet which are in sliding connection, the upper bottom feet are rotationally connected with adjusting knobs, and the adjusting knobs are in threaded connection with the lower bottom feet. During measurement, the center hole corresponds to the center position of the carrying table, the strip-shaped holes correspond to different positions in the circumferential direction of the carrying table, the strip-shaped holes can achieve movement while measurement of the dial indicator and stepless adjustment of the measurement position, and the measurement continuity is improved. The position of the reference disc is kept unchanged in each measurement, so that deviation is avoided, and the data accuracy is improved; and by arranging the first adjusting piece and the second adjusting piece, leveling of the reference disc can be achieved conveniently, and the leveling precision can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of wafer grinding stages, and in particular to a multi-directional continuous and uninterrupted measurement fixture. Background Art

[0002] TTV (Total Thickness Variation) refers to the maximum difference between thickness values ​​measured at different locations on the wafer. Specifically, TTV is the difference between the maximum and minimum thickness of the wafer from the reference plane when it is clamped, usually expressed in microns (μm). TTV is an important parameter. Too large a TTV value may lead to unstable chip performance because the thickness variation affects the uniformity and consistency of the circuit layer; a larger TTV value will increase the difficulty of packaging, and it will become more complicated to ensure good contact and matching between the chip and the packaging substrate; in extreme cases, too large a TTV value may even cause chip failure because extreme thickness variations may damage the circuit structure or cause problems such as short circuits.

[0003] Therefore, on the wafer grinding stage, it is necessary to ensure that the levelness of the grinding stage is within a certain range after installation; after using it for a period of time, it is necessary to detect the surface deformation of the stage caused by vacuum adsorption / grinding process / grinding liquid, etc., and exceeding the range will affect the subsequent TTV of the wafer grinding thickness. Generally, the deformation is measured by a micrometer, and then the necessary grinding removal amount is calculated, and then the stage surface is ground with a special grinding wheel to achieve the correction effect.

[0004] The existing design of the carrier flatness detection method is to open a number of measuring holes for the insertion of micrometers on a bar cantilever, which has two problems: first, the measurement points are discontinuous and can only measure a few fixed and limited points; second, when measuring in different directions, the cantilever needs to be moved. Each time it is moved, the level of the cantilever needs to be readjusted, which will introduce adjustment errors and cause the measurement benchmark to change. Each time it is moved, there may be deviations after the level adjustment, resulting in inconsistent benchmark levels of the overall data and reduced data accuracy. Summary of the invention

[0005] The present application provides a multi-directional continuous and uninterrupted measuring fixture, in which mounting holes with different orientations are provided at multiple positions on a reference disk. When changing the measuring position, only the micrometer needs to be moved without changing the position of the reference disk, thereby reducing errors and improving the accuracy of the measurement data.

[0006] The present application provides a multi-directional continuous and uninterrupted measurement fixture, which adopts the following technical solutions: A multi-directional continuous and uninterrupted measuring fixture comprises a reference plate, a plurality of adjusting feet are arranged at the bottom of the reference plate, a center hole is arranged at the center of the reference plate, and at least four strip holes are arranged on the reference plate, the strip holes are distributed along the circumference of the reference plate, and the strip length direction of the strip holes is along the radial direction of the reference plate.

[0007] By adopting the above technical solution, the reference plate is placed on the stage to be measured, and the reference plate is leveled by adjusting the bottom feet. After the leveling is completed, the top surface of the reference plate is the reference surface. During measurement, the center hole corresponds to the center position of the stage, and the strip holes correspond to different positions of the stage circumference. The strip holes can realize the movement of the micrometer while measuring, and the measurement position can be infinitely adjusted to improve the continuity of the measurement. The position of the reference plate remains unchanged each time it is measured, avoiding the generation of deviations and improving the accuracy of the data.

[0008] Optionally, the number of the strip-shaped holes is eight, and they are evenly distributed along the circumference of the reference disk.

[0009] By adopting the above technical solution, more bar-shaped holes are used to increase the available measurement positions, and it is also convenient to adapt to a larger-sized carrier.

[0010] Optionally, a plurality of annular scale lines are provided on the top surface of the reference disk, and the centers of the scale lines are all at the center of the reference disk.

[0011] By adopting the above technical solution, the scale lines are used to accurately locate the specific measurement position (generally needs to be selected symmetrically), which makes it easier for personnel to determine the distance between the detection position and the center of the reference disk according to the scale lines.

[0012] Optionally, the adjustment foot comprises an upper foot and a lower foot that are slidably connected, the upper foot is fixed to the reference plate, the upper foot is rotatably connected to an adjustment knob, and the adjustment knob is threadedly connected to the lower foot.

[0013] By adopting the above technical solution, by turning the adjusting knob, the adjusting knob drives the lower foot to move up and down through the threaded connection, thereby changing the total height of the adjusting foot.

[0014] Optionally, the upper base is provided with a slide groove along the vertical direction, and the lower base includes a connecting rod, and the connecting rod is slidably connected to the slide groove.

[0015] By adopting the above technical solution, the connecting rod is used to prevent the upper base and the lower base from sliding off and to prevent the lower base from rotating. During the height adjustment process, the lower base will not rotate and wear the carrier.

[0016] Optionally, the lower base also includes a threaded barrel, which is fixed to the outer end of the connecting rod, and the threaded barrel is sleeved outside the upper base, and the threaded barrel is threadedly connected to the inner wall of the adjusting knob through the outer wall.

[0017] By adopting the above technical solution, the lower base is threadedly connected to the adjusting knob through the threaded barrel.

[0018] Optionally, the adjusting knob is coaxially fixed with a driven gear, and the bottom surface of the reference plate is rotatably connected with an adjusting member 1 near the outer edge, and the adjusting member 1 includes a gear 1 that meshes with the driven gear, and the diameter of the gear 1 is smaller than the diameter of the driven gear.

[0019] By adopting the above technical solution, the adjustment piece 1 close to the outer edge of the reference disk is easier for personnel to rotate, and because the diameter of gear 1 is smaller than that of the driven gear, a reduction transmission can be achieved, thereby improving the accuracy of personnel turning the adjustment knob, making it easier to level the reference disk and less likely to over-adjust.

[0020] Optionally, the reference plate is made of iron material, a magnet is fixed at the center of the gear, a rotating rod is fixed to the magnet, and a positioning hole for inserting the magnet and a rotating hole for plugging the rotating rod are provided on the bottom surface of the reference plate.

[0021] By adopting the above technical solution, the magnet 1 is inserted into and adsorbed in the positioning hole 1, so that the adjusting member 1 will not fall off spontaneously. The rotating rod 1 is inserted into the rotating hole, so that the adjusting member 1 is connected to the reference plate in rotation.

[0022] Optionally, the rotating hole passes through the reference plate upward, and an adjusting member 2 is inserted at the top of the rotating hole, and the adjusting member 2 includes a gear 2, and a rotating rod 2 is fixed to the gear 2; a plurality of slots 1 are provided at circumferential intervals on the rotating rod 1, and the slot 1 passes through the rotating rod 1 upward, and a plurality of slots 2 are provided at circumferential intervals on the rotating rod 2, and the slot 2 passes through the rotating rod 2 downward, and the rotating rod 1 is inserted into the slot 2, and the rotating rod 2 is inserted into the slot 1.

[0023] By adopting the above technical solution, after the rotating rod 1 and the rotating rod 2 are connected through the slot 1 and the slot 2, the torque can be transmitted. If it is difficult to rotate the gear 1 on the bottom surface of the reference disk due to the small space, the gear 1 can be driven to rotate by rotating the gear 2 on the top surface of the reference disk, which is convenient for operation.

[0024] Optionally, a second magnet is fixed between the second gear and the second rotating rod, and a second positioning hole for inserting the second magnet is provided on the top surface of the reference plate; the structures of the first adjusting member and the second adjusting member are the same.

[0025] By adopting the above technical solution, the structures of the adjusting member 1 and the adjusting member 2 are the same, so the adjusting member 1 and the adjusting member 2 can be used interchangeably. The same structure can be manufactured during production to meet the needs of use, and multiple ones can be produced for backup, which is more flexible and convenient to use.

[0026] In summary, the present application includes at least one of the following beneficial technical effects: 1. During measurement, the center hole corresponds to the center position of the stage, and the strip holes correspond to different positions of the stage circumference. The strip holes can realize the movement of the micrometer while measuring, and the measuring position can be infinitely adjusted to improve the continuity of measurement; 2. The position of the reference disk remains unchanged each time it is measured, avoiding deviation and improving data accuracy; 3. By setting the adjustment member 1 and the adjustment member 2, it is easy to realize the leveling of the reference plate and the accuracy of the leveling can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a top perspective view of a multi-directional continuous and uninterrupted measuring fixture of the first embodiment; Figure 2 is a bottom perspective view of the first embodiment; Figure 3 yes Figure 2 A magnified image of point A; Figure 4 is a partial cross-sectional view of the first embodiment; Figure 5 is a partial exploded view of the first embodiment; Figure 6 It is a top view of the second embodiment.

[0028] Explanation of the accompanying drawings: 1. reference plate; 2. adjusting foot; 11. center hole; 12. bar hole; 13. scale line; 3. upper foot; 4. lower foot; 31. adjusting knob; 32. slide groove; 41. connecting rod; 42. threaded cylinder; 33. driven gear; 5. adjusting member one; 51. gear one; 52. magnet one; 53. rotating rod one; 14. positioning hole one; 15. rotating hole; 6. adjusting member two; 61. gear two; 62. rotating rod two; 54. slot one; 63. slot two; 64. magnet two; 16. positioning hole two. DETAILED DESCRIPTION

[0029] The present application is further described in detail below in conjunction with the accompanying drawings.

[0030] Embodiment 1:

[0031] Reference Figure 1 and Figure 2 The present embodiment discloses a multi-directional continuous and uninterrupted measuring fixture, including a reference plate 1, which is made of iron material, preferably stainless steel. A plurality of adjustment feet 2 are provided at the bottom of the reference plate 1, and the plurality of adjustment feet 2 are evenly distributed along the circumference of the reference plate 1. A center hole 11 is provided at the center of the reference plate 1, and at least four strip holes 12 are also provided on the reference plate 1, and the strip holes 12 are distributed along the circumference of the reference plate 1, and the strip length direction of the strip holes 12 is along the radial direction of the reference plate 1.

[0032] The number of the strip holes 12 in this embodiment is four and they are evenly distributed along the circumference of the reference plate 1. Instruments such as a dial gauge can be placed in the center hole 11 or one of the strip holes 12 according to the selection, and the dial gauge can be arbitrarily adjusted in the length direction of the strip hole 12. The outer end of the strip hole 12 does not penetrate the reference plate 1, and the inner end of the strip hole 12 does not penetrate the center hole 11, so that the reference plate 1 has enough physical connection parts, improves rigidity, and avoids deformation.

[0033] The top surface of the reference disk 1 is provided with a plurality of annular scale lines 13 , the centers of the scale lines 13 are all at the center of the reference disk 1 , and the spacing between adjacent scale lines 13 is the same, so that personnel can determine the distance between the detection position and the center of the reference disk 1 according to the scale lines 13 .

[0034] Reference Figure 3 and Figure 4 The adjusting foot 2 includes an upper foot 3 and a lower foot 4 which are slidably connected. The upper foot 3 is fixed to the bottom surface of the reference plate 1. The upper foot 3 is rotatably connected to an adjusting knob 31, and the adjusting knob 31 is threadedly connected to the lower foot 4. By rotating the adjusting knob 31, the adjusting knob 31 drives the lower foot 4 to move up and down through the threaded connection, thereby changing the total height of the adjusting foot 2.

[0035] The upper foot 3 is sleeve-shaped and sleeved outside the lower foot 4. The upper foot 3 is provided with a slide groove 32 in the vertical direction. The lower foot 4 includes a connecting rod 41, which is slidably connected to the slide groove 32. The connecting rod 41 passes from the inner wall of the upper foot 3 to the outer wall of the upper foot 3. The connecting rod 41 prevents the upper foot 3 from sliding away from the lower foot 4 and prevents the lower foot 4 from rotating. In this way, during the height adjustment process of the adjusting foot 2, the lower foot 4 will not rotate and wear the carrier.

[0036] The lower base 4 further includes a threaded tube 42 , which is fixed to the outer end of the connecting rod 41 , and is sleeved on the outer side of the upper base 3 . The threaded tube 42 is threadedly connected to the inner wall of the adjusting knob 31 through the outer wall.

[0037] Reference Figure 4 and Figure 5 The adjusting knob 31 is coaxially fixed with a driven gear 33. The bottom surface of the reference disk 1 is rotatably connected with an adjusting member 5 near the outer edge. The adjusting member 5 includes a gear 51. The gear 51 is meshed with the driven gear 33. The diameter of the gear 51 is smaller than the diameter of the driven gear 33. The adjusting member 5 can be separated from the bottom surface of the reference disk 1.

[0038] The adjustment member 5 near the outer edge of the reference plate 1 is easier for personnel to rotate, and because the diameter of the gear 51 is smaller than that of the driven gear 33, a reduction transmission can be realized, that is, when the gear 51 rotates multiple times, the driven gear 33 rotates one circle, thereby improving the accuracy of personnel turning the adjustment knob 31. The wear tolerance range of the carrier is very small, generally at the micron level, and the leveling of the reference plate 1 requires very high accuracy. Therefore, the method of toggling the gear 51 is adopted, which makes it easier to level the reference plate 1 and is not easy to adjust too much; when the adjustment foot 2 needs to be greatly extended and retracted, the adjustment knob 31 is directly turned by hand.

[0039] A magnet 52 is fixed at the center of the gear 51, and a rotating rod 53 is fixed to the magnet 52. The bottom surface of the reference plate 1 is provided with a positioning hole 14 for inserting the magnet 52 and a rotating hole 15 for inserting the rotating rod 53. The magnet 52 is inserted into the positioning hole 14 and adsorbed therein, so that the adjusting member 5 will not fall off spontaneously.

[0040] The rotating hole 15 penetrates the reference plate 1 upwards, and the top of the rotating hole 15 is plugged with the adjusting member 2 6, which includes the gear 2 61, and the gear 2 61 is fixed with the rotating rod 2 62. The rotating rod 1 53 is provided with a plurality of slots 1 54 at intervals in the circumferential direction, and the slots 1 54 penetrate the rotating rod 1 53 upwards, and the rotating rod 2 62 is provided with a plurality of slots 2 63 at intervals in the circumferential direction, and the slots 2 63 penetrate the rotating rod 2 62 downwards, and the rotating rod 1 53 is inserted into the slots 2 63, and the rotating rod 2 62 is inserted into the slots 1 54.

[0041] The top edge of slot 1 54 and the bottom edge of slot 2 63 are both chamfered to facilitate the insertion of rotating rod 1 53 and rotating rod 2 62, and torque can be transmitted after the insertion. If it is difficult to rotate gear 1 51 on the bottom surface of reference plate 1 due to narrow space, gear 1 51 can be driven to rotate by rotating gear 2 61 on the top surface of reference plate 1, which is convenient for operation. After the height adjustment of adjusting foot 2 is completed, adjuster 2 6 is pulled out upward to prevent gear 2 61 from affecting the measurement.

[0042] A magnet 2 64 is fixed between the gear 2 61 and the rotating rod 2 62, and a positioning hole 2 16 is provided on the top surface of the reference plate 1 for inserting the magnet 2 64. It should be noted that the structures of the adjusting member 1 5 and the adjusting member 2 6 are the same, so the adjusting member 1 5 and the adjusting member 2 6 can be used interchangeably. The same parts can be manufactured during production to meet the needs of use, and multiple parts can be produced for backup, which is more flexible and convenient to use.

[0043] The implementation principle of a multi-directional continuous and uninterrupted measuring fixture of the embodiment of the present application is as follows: place the reference plate 1 on the platform to be measured, and adjust the foot 2 to contact the top surface of the platform. Then take a high-precision level and place it on the platform, and adjust the height of the adjusting foot 2 by turning the adjusting knob 31 until the top surface of the reference plate 1 is completely horizontal; when leveling, the adjusting member 2 6 can be inserted as needed, and the adjusting knob 31 can be driven to rotate by turning the gear 1 51 or the gear 2 61.

[0044] After the reference disk 1 is leveled, the top surface of the reference disk 1 is the reference surface. Take a micrometer or other measuring instrument, insert the measuring head of the micrometer into the center hole 11 or the strip hole 12, and fit the bottom reference surface of the micrometer on the top surface of the reference disk 1. Make the measuring head of the micrometer abut the top surface of the carrier, so that the reading can be read and the distance between the corresponding position of the carrier and the reference surface can be measured.

[0045] During measurement, the center hole 11 corresponds to the center position of the stage, and the strip holes 12 correspond to different positions of the stage in the circumferential direction. The strip holes 12 can realize the movement of the micrometer while measuring, and the measuring position can be infinitely adjusted to improve the continuity of the measurement. The position of the reference disk 1 remains unchanged each time it is measured, avoiding the generation of deviations and improving the accuracy of the data.

[0046] Embodiment 2:

[0047] Reference Figure 6 , a multi-directional continuous and uninterrupted measuring fixture, the difference between the second embodiment and the first embodiment is that the number of the strip holes 12 is eight.

[0048] The eight strip holes 12 are evenly distributed along the circumference of the reference disk 1. Compared with the first embodiment, the number of the strip holes 12 is further increased, thereby increasing the available measurement positions and facilitating the adaptation of a larger-sized stage.

[0049] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A multi-directional continuous and uninterrupted measurement fixture, characterized by: The invention comprises a reference plate (1), wherein a plurality of adjusting feet (2) are provided at the bottom of the reference plate (1), a central hole (11) is provided at the center of the reference plate (1), and at least four strip holes (12) are also provided on the reference plate (1), wherein the strip holes (12) are distributed along the circumference of the reference plate (1), and the strip length direction of the strip holes (12) is along the radial direction of the reference plate (1).

2. A multi-directional continuous and uninterrupted measuring fixture according to claim 1, characterized in that: The number of the strip-shaped holes (12) is eight and they are evenly distributed along the circumference of the reference disk (1).

3. The multi-directional continuous and uninterrupted measuring fixture according to claim 1, characterized in that: The top surface of the reference disk (1) is provided with a plurality of annular scale lines (13), and the centers of the scale lines (13) are all located at the center of the reference disk (1).

4. The multi-directional continuous and uninterrupted measuring fixture according to claim 1, characterized in that: The adjusting foot (2) comprises an upper foot (3) and a lower foot (4) which are slidably connected, the upper foot (3) being fixed to the reference plate (1), the upper foot (3) being rotatably connected to an adjusting knob (31), and the adjusting knob (31) being threadedly connected to the lower foot (4).

5. The multi-directional continuous and uninterrupted measuring fixture according to claim 4, characterized in that: The upper base (3) is provided with a sliding groove (32) along the vertical direction, and the lower base (4) includes a connecting rod (41), and the connecting rod (41) is slidably connected to the sliding groove (32).

6. The multi-directional continuous and uninterrupted measuring fixture according to claim 5, characterized in that: The lower base (4) further comprises a threaded barrel (42), the threaded barrel (42) being fixed to the outer end of the connecting rod (41), the threaded barrel (42) being sleeved outside the upper base (3), and the threaded barrel (42) being threadedly connected to the inner wall of the adjusting knob (31) via the outer wall.

7. The multi-directional continuous and uninterrupted measuring fixture according to claim 4, characterized in that: The adjusting knob (31) is coaxially fixed with a driven gear (33); the bottom surface of the reference plate (1) is rotatably connected to an adjusting member (5) near the outer edge; the adjusting member (5) comprises a gear (51); the gear (51) is meshed with the driven gear (33); the diameter of the gear (51) is smaller than the diameter of the driven gear (33).

8. The multi-directional continuous and uninterrupted measuring fixture according to claim 7, characterized in that: The reference plate (1) is made of iron material, a magnet (52) is fixed at the center of the gear (51), a rotating rod (53) is fixed to the magnet (52), and a positioning hole (14) for inserting the magnet (52) and a rotating hole (15) for inserting the rotating rod (53) are provided on the bottom surface of the reference plate (1).

9. The multi-directional continuous and uninterrupted measuring fixture according to claim 8, characterized in that: The rotating hole (15) passes through the reference plate (1) upwards, and an adjusting member (6) is inserted at the top end of the rotating hole (15), and the adjusting member (6) comprises a gear (61), and a rotating rod (62) is fixed to the gear (61); a plurality of slots (54) are arranged at intervals in the circumferential direction of the rotating rod (53), and the slots (54) pass through the rotating rod (53) upwards, and a plurality of slots (63) are arranged at intervals in the circumferential direction of the rotating rod (62), and the slots (63) pass through the rotating rod (62) downwards, and the rotating rod (53) is inserted into the slots (63), and the rotating rod (62) is inserted into the slots (54).

10. The multi-directional continuous and uninterrupted measuring fixture according to claim 9, characterized in that: A second magnet (64) is fixed between the second gear (61) and the second rotating rod (62), and a second positioning hole (16) is provided on the top surface of the reference plate (1) for inserting the second magnet (64); the structures of the first adjusting member (5) and the second adjusting member (6) are the same.

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