Flexible self-powered dual-mode sensor, preparation method and flexible wearable device

Abstract

The invention relates to the technical field of semiconductor device preparation, and provides a flexible self-energized dual-mode sensor, a preparation method and a flexible wearable device, the flexible self-energized dual-mode sensor comprises a flexible friction thermoelectric structure, the flexible friction thermoelectric structure comprises a first flexible friction thermoelectric layer, a flexible substrate layer and a second flexible friction thermoelectric layer, the flexible substrate layer is provided with a first cavity, and the second flexible friction thermoelectric layer is provided with a second cavity; the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer cover the first cavity and extend out of the first cavity; a capping layer is on the flexible friction thermoelectric structure. Through a double-layer flexible friction thermoelectric structure of the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer, the thermoelectric effect is enhanced, and the sensitivity and response speed of the sensor are improved, so that simultaneous detection and self-energy supply of temperature and pressure signals are realized, the flexible substrate is provided as a mechanical support, and the temperature and pressure sensor is more flexible. The sensor is ensured to have good flexibility and fitness, the thermoelectric contact area is increased through the first cavity formed in the flexible substrate, and the thermoelectric conversion efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor device preparation, and in particular to a flexible self-powered dual-mode sensor, a preparation method and a flexible wearable device. Background Art

[0002] With the rapid development of flexible electronic technology, flexible wearable devices have been widely used in health monitoring, motion detection, human-computer interaction and other fields. The core of flexible wearable devices is that they can fit the curves of the human body, provide a comfortable wearing experience, and monitor the physiological signals of the human body (such as heart rate, body temperature, motion status, etc.) in real time. Existing flexible wearable devices mainly rely on flexible sensors, energy harvesting technology and data transmission technology.

[0003] There are mainly two types of sensors for existing flexible wearable devices. One is to prepare corresponding flexible sensors from a single sensor material and integrate the corresponding flexible sensors to achieve response of multiple physical quantities.

[0004] However, this method of using a single type of sensor to detect a single signal cannot detect multiple signals at the same time, which limits the application of the device in complex environments. In addition, this structural design makes it difficult to ensure the waterproofness of the entire device. Long-term wearing can easily lead to physical damage to the sensor structure and degradation of sensing performance. Summary of the invention

[0005] The present invention provides a flexible self-powered dual-mode sensor, a preparation method and a flexible wearable device, which are used to solve the defects of the prior art that a single type of sensor is used to detect a single signal, thereby affecting the use range and detection accuracy of the device, enhance the thermoelectric effect, improve the sensitivity and response speed of the sensor, and simultaneously detect temperature and pressure signals.

[0006] The present invention provides a flexible self-powered dual-mode sensor, comprising: a flexible friction thermoelectric structure, the flexible friction thermoelectric structure comprising a first flexible friction thermoelectric layer, a flexible base layer and a second flexible friction thermoelectric layer, the flexible base layer is provided with a first cavity, the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer cover the first cavity and extend outside the first cavity; a covering layer, located on the flexible friction thermoelectric structure.

[0007] According to a flexible self-powered dual-mode sensor provided by the present invention, the first flexible friction thermoelectric layer includes a first flexible adsorption layer and a first flexible conductive layer, the first flexible adsorption layer is provided with a plurality of pores, and the first flexible conductive layer is located on the surface and inside of the first flexible adsorption layer; the second flexible friction thermoelectric layer includes a second flexible adsorption layer and a second flexible conductive layer, the second flexible adsorption layer is provided with a plurality of pores, and the second flexible conductive layer is located on the surface and inside of the second flexible adsorption layer.

[0008] According to a flexible self-powered dual-mode sensor provided by the present invention, the material of the first flexible adsorption layer and / or the second flexible adsorption layer includes at least one of foam material, gel and polydimethylsiloxane; the material of the first flexible conductive layer and / or the second flexible conductive layer includes at least one of graphene, bismuth antimony alloy and a preset two-dimensional material MXene.

[0009] According to a flexible self-powered dual-mode sensor provided by the present invention, it also includes a first electrode and a second electrode. The first surface of the first flexible friction thermoelectric layer is connected to the flexible base layer, the second surface of the first flexible friction thermoelectric layer is connected to the first electrode, the first surface and the second surface of the first flexible friction thermoelectric layer are opposite surfaces on the first flexible friction thermoelectric layer, the first surface of the second flexible friction thermoelectric layer is connected to the flexible base layer, the second surface of the second flexible friction thermoelectric layer is connected to the covering layer, and the second electrode is arranged on the second surface of the second flexible friction thermoelectric layer, and the first surface and the second surface of the second flexible friction thermoelectric layer are opposite surfaces on the second flexible friction thermoelectric layer.

[0010] According to a flexible self-powered dual-mode sensor provided by the present invention, the first electrode includes a first carbon paste layer, a first wire and a first copper foil layer, the first carbon paste layer is arranged on the second surface of the first flexible friction thermoelectric layer, the first wire is arranged on the first carbon paste layer, and the first copper foil layer is arranged on the first wire; and / or, the second electrode includes a second carbon paste layer, a second wire and a second copper foil layer, the second carbon paste layer is arranged on the second surface of the second flexible friction thermoelectric layer, the second wire is arranged on the second carbon paste layer, and the second copper foil layer is arranged on the second wire.

[0011] According to a flexible self-powered dual-mode sensor provided by the present invention, the material of the flexible base layer includes a double-sided adhesive material with a preset thickness, and the double-sided adhesive material includes polyethylene foam tape; the material of the sealing layer includes at least one of polyperfluoroethylene propylene, polyethylene terephthalate and medical tape.

[0012] The present invention also provides a method for preparing a flexible self-powered dual-mode sensor, comprising: forming a flexible friction thermoelectric structure, the flexible friction thermoelectric structure comprising a first flexible friction thermoelectric layer, a flexible base layer formed on the first flexible friction thermoelectric layer, and a second flexible friction thermoelectric layer formed on the flexible base layer, the flexible base layer forming a first cavity penetrating the flexible base layer, the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer covering the first cavity and extending outside the first cavity; forming a covering layer on the flexible friction thermoelectric structure.

[0013] According to a method for preparing a flexible self-powered dual-mode sensor provided by the present invention, the first flexible friction thermoelectric layer includes a first flexible adsorption layer and a first flexible conductive layer, and the second flexible friction thermoelectric layer includes a second flexible adsorption layer and a second flexible conductive layer to form a flexible friction thermoelectric structure, including: providing a first flexible adsorption layer and a second flexible adsorption layer respectively; soaking the first flexible adsorption layer in a first preset flexible conductive solution for a first preset soaking time, and combining with a first preset drying process to form a first flexible conductive layer, and the first flexible conductive layer covers the first flexible adsorption layer; soaking the second flexible adsorption layer in a second preset flexible conductive solution for a second preset soaking time, and combining with a second preset drying process to form a second flexible conductive layer, and the second flexible conductive layer covers the second flexible adsorption layer; forming a flexible base layer having a first cavity on the first flexible conductive layer or the second flexible conductive layer, and covering the second flexible conductive layer corresponding to the first flexible conductive layer or the first flexible conductive layer corresponding to the second flexible conductive layer on the flexible base layer to cover the first cavity of the flexible base layer.

[0014] According to a method for preparing a flexible self-powered dual-mode sensor provided by the present invention, after forming a flexible friction thermoelectric structure, the method comprises: coating a first preset carbon paste material on a first flexible friction thermoelectric layer, attaching a first wire provided previously to the first preset carbon paste material, and performing a preliminary curing treatment on the first preset carbon paste material attached to the first wire, thereby forming a preliminary cured first carbon paste layer and a first wire attached to the first carbon paste layer; attaching a first copper foil to the first wire, and performing a secondary curing treatment on the first carbon paste layer after the first copper foil is attached, thereby forming a secondary cured first carbon paste layer and a first wire attached to the first carbon paste layer. The first conductive wire and the first copper foil layer on the flexible friction thermoelectric layer are coated with a second preset carbon paste material, and the second preset carbon paste material bonded to the second conductive wire is preliminarily cured to form a preliminarily cured second carbon paste layer and a second conductive wire bonded to the second carbon paste layer; a second copper foil is attached to the second conductive wire, and the second carbon paste layer after the second copper foil is attached is subjected to a secondary curing treatment to form a second carbon paste layer after the secondary curing, a second conductive wire bonded to the second carbon paste layer, and a second copper foil layer, to obtain a second electrode.

[0015] The present invention also provides a flexible wearable device, which includes any of the flexible self-powered dual-mode sensors described above, and the device also includes: a data processing module, which processes the pressure signal and temperature signal collected by the flexible self-powered dual-mode sensor to obtain pressure data and temperature data; a data transmission module, which transmits the pressure data and temperature data to a third-party device; an energy collection module, which collects the energy generated by the flexible friction thermoelectric structure and provides energy for the flexible self-powered dual-mode sensor, the data processing module and the data transmission module.

[0016] The present invention also provides an electronic device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein when the processor executes the computer program, a method for preparing a flexible self-powered dual-mode sensor as described above is implemented.

[0017] The present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, and when the computer program is executed by a processor, the method for preparing the flexible self-powered dual-mode sensor as described in any one of the above is implemented.

[0018] The present invention also provides a computer program product, comprising a computer program, wherein when the computer program is executed by a processor, the method for preparing the flexible self-powered dual-mode sensor as described in any one of the above is implemented.

[0019] The flexible self-powered dual-mode sensor, preparation method and flexible wearable device provided by the present invention enhance the thermoelectric effect through a double-layer flexible friction thermoelectric structure of a first flexible friction thermoelectric layer and a second flexible friction thermoelectric layer, thereby providing an efficient conductive channel, improving the sensitivity and response speed of the sensor, and thus facilitating the use of friction electric effect and thermoelectric effect to achieve simultaneous detection and self-powering of temperature and pressure signals, reducing dependence on batteries, and further combining with a flexible substrate layer provided with a first cavity to provide a flexible substrate as mechanical support, ensuring that the sensor has good flexibility and conformability, and increasing the thermoelectric contact area through the first cavity to improve the thermoelectric conversion efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 It is a structural schematic diagram of the flexible self-powered dual-mode sensor provided by the present invention; Figure 2 It is a schematic diagram of thermoelectric signals generated by the flexible self-powered dual-mode sensor provided by the present invention at different distances from the heating platform; Figure 3 It is a schematic diagram of the thermoelectric effect of the flexible self-powered dual-mode sensor provided by the present invention when different temperatures are applied; Figure 4 It is a schematic diagram of the response time and recovery time of the thermoelectric signal of the flexible self-powered dual-mode sensor provided by the present invention; Figure 5 This is one of the schematic diagrams of the change of the output voltage of the flexible self-powered dual-mode sensor provided by the present invention with the temperature gradient; Figure 6 is an enlarged schematic diagram of a single friction signal provided by the present invention; Figure 7 This is the second schematic diagram of the change of the output voltage of the flexible self-powered dual-mode sensor provided by the present invention with the pressure gradient; Figure 8 It is a schematic diagram of voltage changes when different pressures are applied to the flexible self-powered dual-mode sensor provided by the present invention; Fig. 9 It is a schematic diagram of voltage changes when pressure is applied to the flexible self-powered dual-mode sensor using different materials provided by the present invention; Fig.10 It is a schematic diagram of the flexible self-powered dual-mode sensor provided by the present invention for simultaneously measuring temperature and pressure; Fig.11 It is a schematic diagram of voltage changes at the same pressure and different temperatures provided by the present invention; Fig.12 It is an enlarged schematic diagram of the simultaneous measurement of a single friction signal and a thermoelectric signal provided by the present invention; Fig.13 It is a schematic diagram of voltage changes at the same temperature and different pressures provided by the present invention; Fig.14 It is a schematic diagram of a test tube provided by the present invention sliding on a flexible self-powered dual-mode sensor; Fig.15 It is a schematic diagram of the output voltage of different contact materials provided by the present invention in the flexible self-powered dual-mode sensing sliding friction; Fig.16 It is a schematic flow chart of a method for preparing a flexible self-powered dual-mode sensor provided by the present invention; Fig.17 is a schematic structural diagram of a flexible wearable device provided by the present invention; Fig.18 is a schematic diagram of the structure of an electronic device provided by the present invention; Reference numerals: 1: flexible friction thermoelectric structure; 11: first flexible friction thermoelectric layer; 12: flexible substrate layer; 121: first cavity; 13: second flexible friction thermoelectric layer; 2: capping layer. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] Figure 1 is a schematic diagram of the structure of the flexible self-powered dual-mode sensor provided by the present invention, such as Figure 1 As shown, the sensor includes: A flexible friction thermoelectric structure 1, the flexible friction thermoelectric structure 1 comprises a first flexible friction thermoelectric layer 11, a flexible base layer 12 and a second flexible friction thermoelectric layer 13, the flexible base layer 12 is provided with a first cavity 121, the first flexible friction thermoelectric layer 11 and the second flexible friction thermoelectric layer 13 cover the first cavity 121 and extend outside the first cavity 121; The capping layer 2 is located on the flexible friction thermoelectric structure 1 .

[0024] In this embodiment, the first flexible friction thermoelectric layer includes a first flexible adsorption layer and a first flexible conductive layer, the first flexible adsorption layer is provided with a plurality of pores, and the first flexible conductive layer is located on the surface and inside of the first flexible adsorption layer; the second flexible friction thermoelectric layer includes a second flexible adsorption layer and a second flexible conductive layer, the second flexible adsorption layer is provided with a plurality of pores, and the second flexible conductive layer is located on the surface and inside of the second flexible adsorption layer.

[0025] It should be supplemented that the first flexible conductive layer is coated on the first flexible adsorption layer and penetrates into the first flexible adsorption layer through a plurality of pores; the second flexible conductive layer is coated on the second flexible adsorption layer and penetrates into the second flexible adsorption layer through a plurality of pores.

[0026] Furthermore, the material of the first flexible adsorption layer and / or the second flexible adsorption layer includes at least one of a foam material, a gel and polydimethylsiloxane (PDMS); the material of the first flexible conductive layer and / or the second flexible conductive layer includes at least one of graphene, bismuth antimony alloy and a preset two-dimensional material MXene. It should be noted that MXene is a new type of two-dimensional material composed of transition metal carbides / nitrides, with high conductivity, mechanical strength and porous structure. Elastic porous MXene can be formed into a flexible porous material by compounding with a polymer (such as PDMS), which can be used for flexible electrodes, electromagnetic shielding, etc.

[0027] It is worth noting that when the material of the first flexible adsorption layer and / or the second flexible adsorption layer is foam material, the material of the first flexible conductive layer and / or the second flexible conductive layer can be graphene, so as to form the corresponding first flexible conductive layer and / or the second flexible conductive layer by immersing the first flexible adsorption layer and / or the second flexible adsorption layer in a graphene solution of a previously determined concentration, and using a preset drying process to dry the first flexible adsorption layer and / or the second flexible adsorption layer immersed for a certain time.

[0028] It should be added that the concentration of the graphene solution, the immersion time and the corresponding preset drying process can be determined based on experimental results or prior experience. For example, flexible adsorption layers of different thicknesses are selected, and the flexible adsorption layers of each thickness are immersed in graphene solutions of different concentrations. After immersion for a certain period of time, they are dried using a preset drying process to obtain the corresponding first flexible conductive layer and / or second flexible conductive layer. By detecting whether the resistance of the corresponding flexible conductive layer is within the preset resistance range, the concentration of the graphene solution to be immersed in the flexible adsorption layer of the corresponding thickness can be determined.

[0029] Furthermore, after obtaining the flexible self-powered dual-mode sensor based on the above method, the flexible self-powered dual-mode sensor can also be subjected to thermoelectric signal performance test, friction signal performance test, friction signal-thermoelectric signal performance test and sliding friction performance test, so as to ensure the detection accuracy and response speed of the flexible self-powered dual-mode sensor.

[0030] Thermoelectric signal performance test can refer to Figure 2-Figure 5 ,in, Figure 2 The thermoelectric signals generated by the flexible self-powered dual-mode sensor at different distances from the heating platform are obtained based on the above experimental method; Figure 3 It is a schematic diagram of the thermoelectric effect of the flexible self-powered dual-mode sensor when different temperatures are applied, that is, the flexible self-powered dual-mode sensor is placed on a heating platform, and the thermoelectric effect when different temperatures are applied to the heating platform; Figure 4 Schematic diagram of the response time and recovery time of the thermoelectric signal of the flexible self-powered dual-mode sensor; Figure 5 This is one of the schematic diagrams showing how the output voltage of the flexible self-powered dual-mode sensor changes with temperature gradient.

[0031] It can be clearly seen from the figure that the sensor can distinguish different temperatures. Different heating temperatures will give different corresponding signals. For example, the temperature of a cup of water can be 20℃, 40℃ and 100℃. When a person who has lost his sense of touch wears the sensor, he can distinguish the corresponding water temperature. For another example, at different distances, wearing the corresponding sensor can also show that the farther the distance from the contact material with the same temperature, the smaller the signal.

[0032] Friction signal performance test can refer to Figure 6-Figure 9 ,in, Figure 6 It is an enlarged schematic diagram of a single friction signal; Figure 7 This is the second schematic diagram of the change of the output voltage of the flexible self-powered dual-mode sensor with the pressure gradient; Figure 8 Schematic diagram of voltage changes when different pressures are applied to the flexible self-powered dual-mode sensor; Fig. 9 Schematic diagram of the voltage change when pressure is applied to the flexible self-powered dual-mode sensor using different materials.

[0033] Similarly, through Figure 6-Figure 9It can be seen that when the same pressure is applied to different materials, the flexible self-powered dual-mode sensor gives different signals. For different pressures, the sensor outputs different signals, thereby distinguishing the pressure, allowing the sensor to accurately detect pressure.

[0034] Friction signal-thermoelectric signal performance detection can refer to Figure 10-13 ,in, Fig.10 Schematic diagram of flexible self-powered dual-mode sensing for simultaneous measurement of temperature and pressure; Fig.11 This is a schematic diagram of voltage changes at the same pressure and different temperatures. In this figure, a pressure of 0.5N is used. By changing the temperature, the voltage changes are observed. Fig.12 A magnified schematic diagram of the simultaneous measurement of a single friction signal and a thermoelectric signal; Fig.13 This is a schematic diagram of voltage changes at the same temperature and different pressures, that is, at the same temperature (27 degrees), different pressures are applied and the resulting voltage changes are observed.

[0035] It can be seen that according to Figure 10-13 The flexible self-powered dual-mode sensor can clearly detect pressure and temperature at the same time. When the pressure of the contact materials is the same, it can rely on temperature for detection; when the temperature of the contact materials is the same, it can rely on different pressures for detection, and the detection accuracy is higher.

[0036] Sliding friction performance test can refer to Figure 14-15 ,in, Fig.14 Schematic diagram of a test tube sliding on the flexible self-powered dual-mode sensor; Fig.15 This is a schematic diagram of the output voltage of different contact materials in flexible self-powered dual-mode sensing sliding friction. Seven different contact materials are selected for the output voltage of sliding friction, which can clearly distinguish the seven different contact materials.

[0037] It can be seen that after multiple frictions, the performance of the flexible self-powered dual-mode sensor is intact, and the signals given by contact materials with different degrees of roughness are different, which makes it easy to distinguish different contact materials.

[0038] Furthermore, when sliding friction is performed on different contact materials to obtain the corresponding output voltage, a pre-trained classification model can be used to input the output voltage obtained from each contact material into the classification model to determine the contact material category corresponding to the output voltage, thereby facilitating the distinction between different contact materials; wherein the classification model is previously trained based on historical output voltages and corresponding contact materials.

[0039] Furthermore, the output voltage obtained from each contact material is input into a classification model, including: sliding a convolution kernel on the input output voltage image to extract local features; pooling the extracted features to reduce the size of the feature map and reduce the amount of calculation; using a fully connected layer to comprehensively process the pooled features to obtain image features; and using a classifier to classify the extracted image features; wherein the classifier is usually composed of multiple fully connected layers.

[0040] In addition, the preset resistance range can be configured according to actual design requirements or prior experience, such as 60-40kΩ, which is not further limited here; the preset drying process can select the corresponding drying temperature according to the applicable temperature range of the adopted graphene and foam materials, and select the corresponding drying time according to the drying temperature. For example, if the drying temperature is 70-40°C, the corresponding drying time can be selected to be about 20 minutes, which is not further limited here.

[0041] It should be noted that the first flexible friction thermoelectric layer and / or the second flexible friction thermoelectric layer adopts porous foam soaked in graphene solution to provide support structure and adsorption capacity through the foam material, and increase the contact area through the porous structure of the foam material, which is conducive to the porous foam adsorbing the corresponding graphene material, thereby enhancing the thermoelectric effect, improving the thermoelectric conversion efficiency, providing an efficient conductive channel, improving the sensitivity and response speed of the sensor, and realizing real-time detection of the signal. In addition, these pores can effectively disperse and absorb pressure, making the pressure signal more uniform during the transmission process, thereby reducing signal distortion caused by pressure concentration.

[0042] Furthermore, by soaking the porous foam in a graphene solution to form a first flexible adsorption layer and / or a second flexible adsorption layer, the sensor can simultaneously detect temperature and pressure using the thermoelectric effect and the triboelectric effect, that is, when the sensor is in a temperature gradient environment, the electrons in the graphene material move from the high temperature end to the low temperature end to generate a thermoelectric signal and output it, so as to facilitate subsequent signal processing based on the output thermoelectric signal to calculate the corresponding temperature, and when the sensor is subjected to an external force and the external force is removed, the porous structure in the graphene contacts and separates, generates static charge and outputs a corresponding friction signal, so as to facilitate subsequent signal conversion and signal processing based on the output friction signal to calculate the corresponding pressure. In addition, static charge is generated by contacting and separating the first flexible triboelectric layer and the second flexible triboelectric layer, so as to facilitate energy collection using an energy collection module, thereby realizing self-power supply, increasing battery life, reducing dependence on batteries, and avoiding the large-volume battery for the comfort and portability of wearable devices manufactured based on sensors.

[0043] It should be added that signal processing can adopt means such as signal amplification and filtering, which can be configured according to actual design requirements. Signal conversion is used to convert the charge signal collected based on the generated electrostatic charge into a voltage or current signal for subsequent pressure calculation, which is not further limited here.

[0044] In an optional embodiment, the size, shape and distribution of the pores can be adjusted to optimize the thermoelectric conversion efficiency. The size, shape and distribution of the pores can be determined based on the actual required thermoelectric conversion efficiency in combination with experiments. For example, porous foams with different pore sizes, shapes and distributions are selected and immersed in a graphene solution of a previously determined concentration. After obtaining the corresponding first flexible conductive layer and / or second flexible conductive layer, the thermoelectric conversion efficiency is detected, thereby determining which porous foam to select based on the determined thermoelectric conversion efficiency. No further limitation is made here.

[0045] In addition, when detecting the thermoelectric conversion efficiency of the corresponding flexible conductive layer, the electrical conductivity of the corresponding flexible conductive layer can be measured by a four-probe method or a Hall effect meter, and the thermal conductivity of the corresponding flexible conductive layer can be measured using a thermal conductivity meter (such as a laser flash method or a thermal bridge method). The Seebeck coefficient of the graphene layer can be measured using a Seebeck coefficient meter. The Seebeck coefficient represents the voltage generated under the corresponding temperature difference. The thermoelectric figure of merit is calculated based on the measured electrical conductivity, thermal conductivity and Seebeck coefficient, and the corresponding thermoelectric conversion efficiency is determined by estimation based on the thermoelectric figure of merit.

[0046] In an optional embodiment, the material of the flexible base layer is a double-sided adhesive material with a preset thickness, and the double-sided adhesive material includes a polyethylene foam tape.

[0047] It should be noted that when polyethylene foam tape is used as the material of the flexible base layer, it can provide better mechanical support to ensure that the sensor has good flexibility and conformability, and utilize the good softness and elasticity of the polyethylene foam material so that when the sensor is subjected to external force, the flexible base layer can be squeezed and deformed under pressure to avoid contact between multiple pores on the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer, thereby avoiding affecting the pressure detection of the sensor, and the flexible base layer rebounds after the pressure is removed to isolate the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer when the sensor is not subjected to external force, thereby preventing the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer from directly contacting and causing a short circuit.

[0048] In addition, the first cavity design of the flexible substrate layer can create an isolation layer between the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer to effectively prevent the temperature signal from affecting the lower flexible friction thermoelectric layer by direct conduction, thereby reducing the direct coupling between the temperature and pressure signals, reducing the signal crosstalk between the temperature and pressure, and improving the detection accuracy. The first cavity can also increase the thermoelectric contact area between the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer, and improve the thermoelectric conversion efficiency. In addition, through the first cavity design, when the sensor is under pressure, the impact force can be absorbed to provide additional buffering protection, and it can effectively ensure that when the sensor is under pressure, the multiple pores on the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer can contact and separate, thereby generating a friction signal using the triboelectric effect, which is convenient for the subsequent determination of pressure data based on the friction signal to achieve pressure detection.

[0049] In an optional embodiment, the material of the sealing layer includes at least one of fluoroethylene propylene (FEP), polyethylene terephthalate (PET) and medical tape.

[0050] It should be noted that by adopting flexible materials such as FEP, the flexibility of the sensor is enhanced to ensure that the sensor is suitable for wearable devices while preventing current leakage and encapsulating and protecting the internal structure.

[0051] In an optional embodiment, the sensor also includes a first electrode and a second electrode, the first surface of the first flexible friction thermoelectric layer is connected to the flexible base layer, the second surface of the first flexible friction thermoelectric layer is connected to the first electrode, the first surface and the second surface of the first flexible friction thermoelectric layer are opposite surfaces on the first flexible friction thermoelectric layer, the first surface of the second flexible friction thermoelectric layer is connected to the flexible base layer, the second surface of the second flexible friction thermoelectric layer is connected to the covering layer, and the second electrode is arranged on the second surface of the second flexible friction thermoelectric layer, and the first surface and the second surface of the second flexible friction thermoelectric layer are opposite surfaces on the second flexible friction thermoelectric layer.

[0052] It should be noted that the first electrode and the second electrode are used to transmit the friction signal and the thermoelectric signal obtained by the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer based on the thermoelectric effect and the triboelectric effect detection, so as to facilitate the transmission of the friction signal and the thermoelectric signal to the data processing module for signal processing to determine the corresponding temperature data and pressure data.

[0053] Specifically, the first electrode includes a first carbon paste layer, a first wire and a first copper foil layer, the first carbon paste layer is arranged on the second surface of the first flexible friction thermoelectric layer, the first wire is arranged on the first carbon paste layer, and the first copper foil layer is arranged on the first wire; and / or, the second electrode includes a second carbon paste layer, a second wire and a second copper foil layer, the second carbon paste layer is arranged on the second surface of the second flexible friction thermoelectric layer, the second wire is arranged on the second carbon paste layer, and the second copper foil layer is arranged on the second wire.

[0054] It should be noted that by forming a corresponding carbon slurry layer, a wire and a copper foil layer on the corresponding flexible friction thermoelectric layer, the conductivity of the electrode is significantly improved, thereby reducing the power loss during signal transmission, and the carbon slurry layer and the copper foil layer have good thermal conductivity, which helps to prevent the corresponding flexible friction thermoelectric layer from overheating. In addition, the multi-layer structure design of the carbon slurry layer, the wire and the copper foil layer increases the mechanical strength and stability of the electrode, ensuring the overall flexibility.

[0055] To summarize, the embodiment of the present invention enhances the thermoelectric effect through a double-layer flexible friction thermoelectric structure of a first flexible friction thermoelectric layer and a second flexible friction thermoelectric layer, thereby providing an efficient conductive channel, improving the sensitivity and response speed of the sensor, and further facilitating the use of friction electric effect and thermoelectric effect to achieve simultaneous detection and self-power supply of temperature and pressure signals, reducing dependence on batteries, and further combining with a flexible substrate layer having a first cavity to provide a flexible substrate as mechanical support, ensuring that the sensor has good flexibility and conformability, and increasing the thermoelectric contact area through the first cavity to improve the thermoelectric conversion efficiency.

[0056] The following is a description of a method for preparing the flexible self-powered dual-mode sensor provided by the present invention. The method for preparing the flexible self-powered dual-mode sensor described below and the flexible self-powered dual-mode sensor described above can be referenced to each other.

[0057] Fig.16 A schematic flow chart of a method for preparing a flexible self-powered dual-mode sensor is shown, the method comprising: S161, forming a flexible friction thermoelectric structure, the flexible friction thermoelectric structure comprising a first flexible friction thermoelectric layer, a flexible base layer formed on the first flexible friction thermoelectric layer, and a second flexible friction thermoelectric layer formed on the flexible base layer, the flexible base layer forming a first cavity penetrating the flexible base layer, the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer covering the first cavity and extending outside the first cavity; S162, forming a capping layer on the flexible friction thermoelectric structure.

[0058] It should be noted that the step numbers "S161-S162" in this specification do not represent the sequence of the preparation method of the flexible self-powered dual-mode sensor. The preparation method of the flexible self-powered dual-mode sensor of the present invention is described in detail below.

[0059] Step S161, forming a flexible friction thermoelectric structure, the flexible friction thermoelectric structure includes a first flexible friction thermoelectric layer, a flexible base layer formed on the first flexible friction thermoelectric layer, and a second flexible friction thermoelectric layer formed on the flexible base layer, the flexible base layer is formed with a first cavity penetrating the flexible base layer, the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer cover the first cavity and extend outside the first cavity.

[0060] In this embodiment, the first flexible friction thermoelectric layer includes a first flexible adsorption layer and a first flexible conductive layer, and the second flexible friction thermoelectric layer includes a second flexible adsorption layer and a second flexible conductive layer to form a flexible friction thermoelectric structure, including: providing a first flexible adsorption layer and a second flexible adsorption layer respectively; soaking the first flexible adsorption layer in a first preset flexible conductive solution for a first preset soaking time, and combining with a first preset drying process to form a first flexible conductive layer, and the first flexible conductive layer covers the first flexible adsorption layer; soaking the second flexible adsorption layer in a second preset flexible conductive solution for a second preset soaking time, and combining with a second preset drying process to form a second flexible conductive layer, and the second flexible conductive layer covers the second flexible adsorption layer; forming a flexible base layer having a first cavity on the first flexible conductive layer or the second flexible conductive layer, and covering the second flexible conductive layer corresponding to the first flexible conductive layer or the first flexible conductive layer corresponding to the second flexible conductive layer on the flexible base layer to cover the first cavity of the flexible base layer.

[0061] It should be added that the solution concentration of the first preset flexible conductive solution, the solution concentration of the second preset flexible conductive solution, the first preset immersion time, the second preset immersion time, the first preset drying process and the second preset drying process can be configured according to experimental results or prior experience. For details, please refer to the above description and will not be repeated here.

[0062] It should be noted that by presetting the soaking time and drying process, corresponding flexible conductive layers are formed on the first flexible adsorption layer and the second flexible adsorption layer, respectively, so as to accurately control the thickness and performance of the conductive layer and realize customized thermoelectric performance adjustment. In addition, both the adsorption layer and the conductive layer are made of flexible materials to ensure that the entire thermoelectric structure has good flexibility and bendability, so as to ensure that the sensor has good flexibility and fit.

[0063] In an optional embodiment, after forming a flexible friction thermoelectric structure, the method includes: coating a first preset carbon paste material on the first flexible friction thermoelectric layer, attaching the first wire provided previously to the first preset carbon paste material, and performing a preliminary curing treatment on the first preset carbon paste material attached to the first wire, thereby forming a preliminarily cured first carbon paste layer and a first wire attached to the first carbon paste layer; attaching a first copper foil to the first wire, and performing a secondary curing treatment on the first carbon paste layer after attaching the first copper foil, thereby forming a secondarily cured first carbon paste layer, a first wire attached to the first carbon paste layer, and a first wire attached to the first carbon paste layer. A copper foil layer is provided to obtain a first electrode; and / or, a second preset carbon paste material is coated on the second flexible friction thermoelectric layer, a second wire provided previously is bonded to the second preset carbon paste material, and the second preset carbon paste material bonded to the second wire is preliminarily cured to form a preliminarily cured second carbon paste layer and a second wire bonded to the second carbon paste layer; a second copper foil is attached to the second wire, and the second carbon paste layer after the second copper foil is attached is subjected to a secondary curing treatment to form a second carbon paste layer after the secondary curing, a second wire bonded to the second carbon paste layer, and a second copper foil layer to obtain a second electrode.

[0064] It should be noted that by coating carbon paste material on the corresponding flexible friction thermoelectric layer and bonding the corresponding wires and copper foil, and combining the initial curing and secondary curing treatments, multi-layer protection is provided for the wires, the mechanical strength and stability of the corresponding electrodes are enhanced, and the corresponding electrodes can still maintain good performance under deformation conditions such as bending and stretching, which helps to transmit signals more efficiently. In addition, by using carbon paste material as an intermediate layer, the contact between the corresponding wires and the flexible friction thermoelectric layer can be improved, reducing the contact resistance, thereby improving the thermoelectric conversion efficiency.

[0065] Step S162, forming a capping layer on the flexible friction thermoelectric structure.

[0066] It should be added that the capping layer is a thin film to cover the second flexible friction thermoelectric layer. While encapsulating and protecting the internal structure, it enhances the flexibility of the sensor and ensures that the sensor is suitable for wearable devices.

[0067] Furthermore, the material of the sealing layer is polytetrafluoroethylene propylene (FEP). Accordingly, a sealing layer is formed on the flexible friction thermoelectric structure, including: using a preset cleaning agent to clean the flexible friction thermoelectric structure and drying it; placing a FEP film of a preset size on the upper flexible friction thermoelectric layer of the flexible friction thermoelectric structure, or coating a FEP solution on the upper flexible friction thermoelectric layer of the flexible friction thermoelectric structure and drying it.

[0068] It should be added that the preset cleaning agent can use a cleaning agent such as anhydrous ethanol to remove impurities on the surface of the flexible friction thermoelectric structure, and the drying treatment can use nitrogen blowing or natural drying to ensure that there are no water stains on the surface of the flexible friction thermoelectric structure.

[0069] In addition, when placing an FEP film of a preset size on the upper flexible friction thermoelectric layer of the flexible friction thermoelectric structure, a pressure roller or manual pressing can be used to make the FEP film fit tightly against the surface of the flexible friction thermoelectric structure to ensure uniform coverage without bubbles; when coating the FEP solution on the upper flexible friction thermoelectric layer of the flexible friction thermoelectric structure, a scraper, coating machine or spray equipment can be used to control the coating thickness to ensure that the coating layer is uniform, without missing coating or accumulation, and after coating, let it stand for a while to allow the solution to flow and flatten naturally, and then dry it. The drying temperature and time can be configured based on prior experience and FEP characteristics, and are not further limited here.

[0070] In summary, the embodiment of the present invention forms a double-layer thermoelectric structure of a first flexible friction thermoelectric layer and a second flexible friction thermoelectric layer to enhance the thermoelectric effect and provide an efficient conductive channel, so that the sensor can detect temperature and pressure at the same time, thereby improving the sensitivity and response speed of the sensor. A flexible substrate layer having a first cavity is formed between the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer, so that the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer are isolated by the flexible substrate layer to prevent the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer from directly contacting each other and causing a short circuit. At the same time, the thermoelectric contact area between the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer is increased through the first cavity to improve the thermoelectric conversion efficiency, and a capping layer is further formed on the flexible friction thermoelectric structure to enhance the flexibility of the sensor while encapsulating and protecting the internal structure, thereby ensuring the flexibility and fit of the sensor.

[0071] Fig.17 A schematic diagram of the structure of a flexible wearable device is shown, the device includes any of the flexible self-powered dual-mode sensors described above, and the device also includes: A data processing module processes the pressure signal and temperature signal collected by the flexible self-powered dual-mode sensor to obtain pressure data and temperature data; Data transmission module, which transmits pressure data and temperature data to third-party devices; The energy collection module collects the energy generated by the flexible friction thermoelectric structure and provides energy for the flexible self-powered dual-mode sensor, data processing module and data transmission module.

[0072] It should be added that the pressure signal collected by the flexible self-powered dual-mode sensor is the friction signal mentioned above, and the temperature signal collected by the flexible self-powered dual-mode sensor is the thermoelectric signal mentioned above. The specific signal processing method can refer to the above, which will not be repeated here. In addition, the energy collection module is mainly based on the energy generated by the thermoelectric effect and the triboelectric effect of the flexible friction thermoelectric structure to achieve self-powering. The specific details can be referred to the above, which will not be repeated here. In addition, data transmission can be transmitted by means such as Bluetooth, WI-FI wireless network, etc., which is not further limited here.

[0073] Fig.18 An example of a physical structure diagram of an electronic device is shown in FIG. Fig.18 As shown, the electronic device may include: a processor 1810, a communication interface 1820, a memory 1830 and a communication bus 1840, wherein the processor 1810, the communication interface 1820 and the memory 1830 communicate with each other through the communication bus 1840. The processor 1810 may call the logic instructions in the memory 1830 to execute the method for preparing a flexible self-powered dual-mode sensor, the method comprising: forming a flexible friction thermoelectric structure, the flexible friction thermoelectric structure comprising a first flexible friction thermoelectric layer, a flexible substrate layer formed on the first flexible friction thermoelectric layer and a second flexible friction thermoelectric layer formed on the flexible substrate layer, the flexible substrate layer forming a first cavity penetrating the flexible substrate layer, the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer covering the first cavity and extending outside the first cavity; forming a capping layer on the flexible friction thermoelectric structure.

[0074] In addition, the logic instructions in the above-mentioned memory 1830 can be implemented in the form of a software functional unit and can be stored in a computer-readable storage medium when it is sold or used as an independent product. Based on such an understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art or the part of the technical solution, can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk, etc. Various media that can store program codes.

[0075] On the other hand, the present invention also provides a computer program product, which includes a computer program. The computer program can be stored on a non-transitory computer-readable storage medium. When the computer program is executed by a processor, the computer can execute the preparation method of the flexible self-powered dual-mode sensor provided by the above methods, the method including: forming a flexible friction thermoelectric structure, the flexible friction thermoelectric structure including a first flexible friction thermoelectric layer, a flexible substrate layer formed on the first flexible friction thermoelectric layer, and a second flexible friction thermoelectric layer formed on the flexible substrate layer, the flexible substrate layer forms a first cavity penetrating the flexible substrate layer, the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer cover the first cavity and extend outside the first cavity; forming a covering layer on the flexible friction thermoelectric structure.

[0076] On the other hand, the present invention also provides a non-transitory computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, is implemented to execute a method for preparing a flexible self-powered dual-mode sensor provided by the above-mentioned methods, the method comprising: forming a flexible friction thermoelectric structure, the flexible friction thermoelectric structure comprising a first flexible friction thermoelectric layer, a flexible substrate layer formed on the first flexible friction thermoelectric layer, and a second flexible friction thermoelectric layer formed on the flexible substrate layer, the flexible substrate layer forming a first cavity penetrating the flexible substrate layer, the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer covering the first cavity and extending outside the first cavity; forming a capping layer on the flexible friction thermoelectric structure.

[0077] The device embodiments described above are merely illustrative, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of this embodiment. Ordinary technicians in this field can understand and implement it without paying creative labor.

[0078] Through the description of the above implementation methods, those skilled in the art can clearly understand that each implementation method can be implemented by means of software plus a necessary general hardware platform, and of course, can also be implemented by hardware. Based on this understanding, the above technical solution is essentially or the part that contributes to the prior art can be embodied in the form of a software product, and the computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, a disk, an optical disk, etc., including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to execute the methods described in each embodiment or some parts of the embodiments.

[0079] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A flexible self-powered dual-mode sensor, characterized in that: include: A flexible friction thermoelectric structure, the flexible friction thermoelectric structure comprising a first flexible friction thermoelectric layer, a flexible base layer and a second flexible friction thermoelectric layer, the flexible base layer is provided with a first cavity, the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer cover the first cavity and extend outside the first cavity; The capping layer is located on the flexible friction thermoelectric structure.

2. The flexible self-powered dual-mode sensor according to claim 1, characterized in that: The first flexible friction thermoelectric layer includes a first flexible adsorption layer and a first flexible conductive layer, the first flexible adsorption layer is provided with a plurality of pores, and the first flexible conductive layer is located on the surface and inside of the first flexible adsorption layer; The second flexible friction thermoelectric layer includes a second flexible adsorption layer and a second flexible conductive layer. The second flexible adsorption layer is provided with a plurality of pores. The second flexible conductive layer is located on the surface and inside of the second flexible adsorption layer.

3. The flexible self-powered dual-mode sensor according to claim 2, characterized in that: The material of the first flexible adsorbent layer and / or the second flexible adsorbent layer comprises at least one of foam material, gel and polydimethylsiloxane; The material of the first flexible conductive layer and / or the second flexible conductive layer includes at least one of graphene, bismuth antimony alloy and a preset two-dimensional material MXene.

4. The flexible self-powered dual-mode sensor according to claim 1, characterized in that: It also includes a first electrode and a second electrode, the first surface of the first flexible friction thermoelectric layer is connected to the flexible base layer, the second surface of the first flexible friction thermoelectric layer is connected to the first electrode, the first surface and the second surface of the first flexible friction thermoelectric layer are opposite surfaces on the first flexible friction thermoelectric layer, the first surface of the second flexible friction thermoelectric layer is connected to the flexible base layer, the second surface of the second flexible friction thermoelectric layer is connected to the covering layer, and the second electrode is arranged on the second surface of the second flexible friction thermoelectric layer, and the first surface and the second surface of the second flexible friction thermoelectric layer are opposite surfaces on the second flexible friction thermoelectric layer.

5. The flexible self-powered dual-mode sensor according to claim 4, characterized in that: The first electrode comprises a first carbon slurry layer, a first wire and a first copper foil layer, wherein the first carbon slurry layer is disposed on the second surface of the first flexible friction thermoelectric layer, the first wire is disposed on the first carbon slurry layer, and the first copper foil layer is disposed on the first wire; and / or, The second electrode includes a second carbon paste layer, a second wire and a second copper foil layer, the second carbon paste layer is arranged on the second surface of the second flexible friction thermoelectric layer, the second wire is arranged on the second carbon paste layer, and the second copper foil layer is arranged on the second wire.

6. The flexible self-powered dual-mode sensor according to claim 1, characterized in that: The material of the flexible base layer is a double-sided adhesive material with a preset thickness, and the double-sided adhesive material includes a polyethylene foam tape; The material of the sealing layer includes at least one of polyperfluoroethylene propylene, polyethylene terephthalate (PET) and medical tape.

7. A method for preparing a flexible self-powered dual-mode sensor, characterized in that: include: forming a flexible friction thermoelectric structure, the flexible friction thermoelectric structure comprising a first flexible friction thermoelectric layer, a flexible base layer formed on the first flexible friction thermoelectric layer, and a second flexible friction thermoelectric layer formed on the flexible base layer, the flexible base layer forming a first cavity penetrating the flexible base layer, the first flexible friction thermoelectric layer and the second flexible friction thermoelectric layer covering the first cavity and extending outside the first cavity; A capping layer is formed on the flexible friction thermoelectric structure.

8. The method for preparing the flexible self-powered dual-mode sensor according to claim 7, characterized in that: The first flexible friction thermoelectric layer includes a first flexible adsorption layer and a first flexible conductive layer, the second flexible friction thermoelectric layer includes a second flexible adsorption layer and a second flexible conductive layer, and the formation of the flexible friction thermoelectric structure includes: providing a first flexible adsorption layer and a second flexible adsorption layer respectively; Soaking the first flexible adsorption layer in a first preset flexible conductive solution for a first preset soaking time, and combining with a first preset drying process to form a first flexible conductive layer, wherein the first flexible conductive layer covers the first flexible adsorption layer; Soaking the second flexible adsorption layer in a second preset flexible conductive solution for a second preset soaking time, and combining with a second preset drying process to form a second flexible conductive layer, wherein the second flexible conductive layer covers the second flexible adsorption layer; A flexible base layer having a first cavity is formed on the first flexible conductive layer or the second flexible conductive layer, and a second flexible conductive layer corresponding to the first flexible conductive layer or a first flexible conductive layer corresponding to the second flexible conductive layer is covered on the flexible base layer to cover the first cavity of the flexible base layer.

9. The method for preparing the flexible self-powered dual-mode sensor according to claim 7, characterized in that: After forming the flexible friction thermoelectric structure, including: Coating a first preset carbon paste material on the first flexible friction thermoelectric layer, attaching the first wire provided previously to the first preset carbon paste material, and performing a preliminary curing treatment on the first preset carbon paste material attached to the first wire, thereby forming a preliminary cured first carbon paste layer and a first wire attached to the first carbon paste layer; A first copper foil is attached to the first conductive wire, and the first carbon paste layer after the first copper foil is attached is subjected to secondary curing treatment to form the secondarily cured first carbon paste layer, the first conductive wire attached to the first carbon paste layer, and the first copper foil layer to obtain a first electrode; and / or, Coating a second preset carbon paste material on the second flexible friction thermoelectric layer, attaching the previously provided second wire to the second preset carbon paste material, and performing a preliminary curing treatment on the second preset carbon paste material attached to the second wire to form a preliminary cured second carbon paste layer and a second wire attached to the second carbon paste layer; A second copper foil is attached to the second wire, and the second carbon paste layer after the second copper foil is attached is subjected to secondary curing treatment to form the second carbon paste layer after secondary curing, the second wire attached to the second carbon paste layer, and the second copper foil layer to obtain a second electrode.

10. A flexible wearable device, characterized in that: The device comprises the flexible self-powered dual-mode sensor according to any one of claims 1 to 6, and further comprises: A data processing module processes the pressure signal and temperature signal collected by the flexible self-powered dual-mode sensor to obtain pressure data and temperature data; A data transmission module, transmitting the pressure data and the temperature data to a third-party device; The energy collection module collects the energy generated by the flexible friction thermoelectric structure and provides energy for the flexible self-powered dual-mode sensor, the data processing module and the data transmission module.

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