Multi-sample rotation experiment supporting system in linear plasma device

Abstract

The invention belongs to the technical field of plasma and wall material interaction (PMI) assistance, and particularly discloses a multi-sample rotation experiment supporting system in a linear plasma device, which comprises a temperature inspection instrument, a bias power supply, a rotation sample table, a supporting seat, a rotation transmission shaft and a temperature measurement and negative bias loading shaft, a rotary driving unit and an automatic advancing and retreating unit are mounted outside the vacuum chamber; a plurality of sample mounting stations are circumferentially distributed on the rotary sample table; the rotary transmission shaft is coaxially and fixedly connected with the rotary sample table; one end of the temperature measurement and negative bias loading shaft is connected with a temperature measurement piece and a negative bias metal end, the temperature measurement piece and the negative bias metal end can penetrate through the rotary sample table to be in contact with a sample on the sample mounting station, the temperature measurement piece is connected with a temperature itinerant detector through a cable, and the negative bias metal end is connected with a bias power supply through a cable. According to the invention, PMI experiments of a plurality of samples can be completed in a single experiment, and the experiment period is shortened.

Description

Technical Field

[0001] The invention relates to the field of plasma-wall material interaction (PMI) auxiliary technology, and in particular to a multi-sample rotation experiment support system in a linear plasma device. Background Art

[0002] Magnetic confinement nuclear fusion energy is considered to be one of the main ways to solve human energy problems in the future, among which the tokamak device is the most important controlled nuclear fusion device. The interaction between plasma and materials is one of the key issues related to the life, safety and economy of the tokamak device. Due to the harsh experimental conditions, difficult diagnosis and high operation and maintenance costs of the tokamak device, the study of the interaction between He ions and / or D ions and materials in PMI can usually be replaced by a linear plasma device with a simple geometric structure, low device cost and easy diagnosis. This device can generate stable plasma and maintain it for minutes to hours. It can simulate and verify the boundary environment in the tokamak under relatively simple laboratory conditions. In addition, linear plasma devices can also be widely used in aerospace, biological simulation and other fields.

[0003] The linear plasma device is usually composed of a magnetic coil system, a plasma source, a power system, a cooling system, a vacuum system, etc. Among them, the magnetic coil system is generally wound outside the vacuum chamber, and its main function is to confine the plasma and make it move along the magnetic field line; the plasma source is usually a cascade arc plasma source or a lanthanum hexaboride plasma source or a radio frequency plasma source, etc.; the power system and the cooling system are used to provide power and cooling for the whole machine; the vacuum system includes a vacuum chamber, a vacuum pump group, a gas supply system, a linkage control system of the whole machine, etc., and the vacuum chamber is the main experimental area for the interaction between plasma and materials.

[0004] The traditional PMI experimental process usually requires that the material be installed on a fixed sample stage that has been placed in the vacuum chamber before vacuuming, and the temperature measurement line and bias loading line are connected. Then, the vacuum chamber hatch is closed and vacuuming is carried out. After the vacuum reaches the experimental requirements, the magnetic coil system and plasma source are turned on in turn to allow different types of plasma to interact with the material. After the reaction is over, the plasma source and magnetic coil system are turned off, the vacuum of the vacuum chamber is broken, and the sample is removed from the fixed sample stage, and the experiment is over. This experimental method allows only one sample to be tested for PMI in a single experiment, which has the disadvantages of a long PMI experimental cycle, low experimental efficiency, and high experimental operation and maintenance costs. Summary of the invention

[0005] The invention provides a multi-sample rotating experiment support system in a linear plasma device, aiming to complete PMI experiments of multiple samples in a single experiment and reduce the experiment cycle.

[0006] The present invention is realized by the following technical scheme: a multi-sample rotation experiment support system in a linear plasma device, comprising a temperature inspection instrument, a bias power supply, and a rotating sample stage, a support seat, a rotating transmission shaft, and a temperature measurement and negative bias loading shaft installed in a vacuum chamber, and a rotation drive unit and an automatic advance and retreat unit are installed outside the vacuum chamber;

[0007] A plurality of sample installation stations for installing samples are circumferentially distributed on the rotating sample stage, and the rotating transmission shaft and the temperature measurement and negative bias loading shaft all pass through the support seat;

[0008] One end of the rotating transmission shaft is coaxially fixedly connected to the rotating sample stage, and the other end of the rotating transmission shaft passes through the vacuum chamber and is rotationally matched with one side of the vacuum chamber;

[0009] One end of the temperature measuring and negative bias loading shaft passes through the vacuum chamber, and the other end of the temperature measuring and negative bias loading shaft is connected with a temperature measuring component and a negative bias metal end, and the temperature measuring component and the negative bias metal end can pass through the rotating sample stage and contact the sample on the sample installation station, the temperature measuring component is connected to the temperature inspection instrument through a cable, and the negative bias metal end is connected to the bias power supply through a cable;

[0010] The rotary drive unit is used to drive the rotary transmission shaft to rotate, and the automatic advance and retreat unit is used to drive the temperature measurement and negative bias loading shaft to move horizontally.

[0011] Compared with the prior art, this solution has the following advantages and beneficial effects:

[0012] In this scheme, based on the plasma working conditions of high heat flux density, high plasma flux and low energy and large beam current, without modifying the vacuum chamber of the original linear device, the fixed-angle rotation of the sample in the PMI experiment, the switching contact between the temperature measuring component and the negative bias metal end are completed in a high vacuum environment at the lowest cost. The rotating drive unit drives the rotating transmission shaft to drive the rotating sample stage to rotate, thereby facilitating the switching of samples on the corresponding sample installation station at a fixed angle, thereby facilitating the completion of PMI experiments of multiple samples in a single experiment and reducing the experimental cycle.

[0013] Furthermore, the sample installation station includes a back plate, a pressing plate and a fastener, the back plate is connected to the rotating sample stage, the pressing plate is connected to the back plate via the fastener, and the pressing plate is used to press the sample placed on the back plate.

[0014] Beneficial effects: The sample installation work in this solution is used to install and fix the sample. Under the action of the pressing plate and the fasteners, the sample can be fixed on the back plate to complete the installation of the sample.

[0015] Furthermore, the rotating sample table is provided with a plurality of circumferentially distributed sockets, the number of the sockets is the same as the number of the sample installation stations, and the sockets are arranged opposite to the samples installed on the sample installation stations.

[0016] Beneficial effect: In this scheme, multiple circumferentially distributed sockets correspond to multiple sample installation positions in sequence, so that after the rotary drive unit drives the rotary sample stage to rotate and switches the angles of different sample installation positions, the side temperature component and the negative bias metal end can be inserted into the sockets corresponding to the corresponding sample installation positions, thereby facilitating PMI experiments on samples at different sample installation positions.

[0017] Furthermore, the jack includes a thermocouple jack and a bias jack, and the temperature measuring element and the negative bias metal end can pass through the thermocouple jack and the bias jack respectively.

[0018] Beneficial effect: In this solution, the temperature measuring component and the negative bias metal end can pass through the thermocouple jack and the bias jack respectively, which can avoid isolating the temperature measuring component and the negative bias metal end and prevent the two from interfering with each other.

[0019] Furthermore, the temperature measuring and negative bias loading shaft is hollow inside, and two-hole ceramic tubes are coaxially arranged inside the temperature measuring and negative bias loading shaft. Two through holes are opened inside the two-hole ceramic tube along its axial direction, and the wires of the temperature measuring component and the cables of the negative bias metal end are respectively inserted into the two through holes of the two-hole ceramic tube.

[0020] Beneficial effects: The two-hole ceramic tube in this solution can ensure that the temperature measuring component and the negative bias metal end are insulated from each other, and facilitate the installation and arrangement of the wires of the temperature measuring component and the cables of the negative bias metal end.

[0021] Furthermore, a sleeve is provided on the outer side of the temperature measuring element and / or the negative bias metal end.

[0022] Beneficial effects: The sleeve in this solution can prevent the temperature measuring component and the negative bias metal end from contacting each other, avoiding mutual interference, and can prevent the possibility of the plasma flow connecting with the negative bias metal end during the experiment.

[0023] Furthermore, it also includes a front baffle, which is located inside the vacuum chamber and on one side of the rotating sample stage. A circular hole is opened on the front baffle, and the circular hole can be arranged in sequence opposite to the multiple sample installation stations on the rotating sample stage.

[0024] Beneficial effects: The front baffle in this scheme can block excess plasma flow to prevent it from reacting with samples not participating in the PMI experiment, while preventing its high temperature from damaging the rotating sample stage and other components on which the samples are installed. The setting of the circular hole enables the samples on different sample installation positions to face the plasma, facilitating the experimental reaction of the samples.

[0025] Furthermore, a guide seat is provided at the bottom of the vacuum chamber, the lower part of the front baffle is connected to a first connecting plate, the lower part of the first connecting plate is connected to a first base, the first base is slidably matched with the guide seat; the support seat is slidably matched with the guide seat.

[0026] Beneficial effect: In this scheme, the front baffle can slide on the guide seat under the action of the first connecting plate and the first base, so that the distance between the front baffle and the rotating sample table can be adjusted. Similarly, the sliding cooperation between the support seat and the guide seat can adjust the support position of the support seat for the rotating transmission shaft and the temperature measurement and negative bias loading shaft.

[0027] Furthermore, the automatic advance and retreat unit includes a motor, a screw and a slider. A mounting frame is connected to the outside of the vacuum chamber, the motor is installed on the mounting frame, one end of the screw is coaxially fixedly connected to the motor, and the screw is rotatably connected to the mounting frame, the slider is threadedly connected to the screw, and the slider is fixedly connected to the temperature measurement and negative bias loading shaft.

[0028] Beneficial effect: In this scheme, the automatic advance and retreat unit can drive the horizontal movement of the temperature measurement and negative bias loading axis through the cooperation of the motor, the screw and the slider, thereby driving the temperature measurement component and the negative bias metal end to contact with the sample or move away from the sample, which makes it convenient to switch the samples on the rotating sample stage and conduct experiments.

[0029] Furthermore, the front and rear ends of the vacuum chamber are respectively detachably connected with a front cover plate and a rear cover plate, the automatic advance and retreat unit and the rotation drive unit are both installed on the rear cover plate, one end of the rotation transmission shaft and the temperature measurement and negative bias loading shaft both pass through the rear cover plate, and a magnetic fluid seal is provided between the rotation transmission shaft and the temperature measurement and negative bias loading shaft and the rear cover plate.

[0030] Beneficial effects: In this solution, the automatic advance and retreat unit and the rotation drive unit are integrated and installed on the rear cover plate, which is convenient for installation and disassembly. At the same time, the setting of the magnetic fluid seal can ensure the vacuum degree of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The drawings described herein are used to provide a further understanding of the embodiments of the present invention, constitute a part of this application, and do not constitute a limitation of the embodiments of the present invention. In the drawings:

[0032] Figure 1 A three-dimensional diagram of an embodiment of a multi-sample rotation experiment support system in a linear plasma device of the present invention;

[0033] Figure 2 It is a stereoscopic view from one viewing angle of an embodiment of a multi-sample rotation experiment support system in a linear plasma device of the present invention after removing the front cover plate and the vacuum chamber;

[0034] Figure 3 for Figure 2 A partial enlarged view of point B in the middle;

[0035] Figure 4 It is a left view of the rotating sample stage, the supporting seat, the sliding seat and the guiding seat;

[0036] Figure 5 It is a longitudinal cross-sectional view of an embodiment of a multi-sample rotation experiment support system in a linear plasma device of the present invention;

[0037] Figure 6 for Figure 5 A partial enlarged view of point C in the middle;

[0038] Figure 7 for Figure 5 A partial enlarged view of point D in the middle;

[0039] Figure 8 This is a stereoscopic view from another perspective of an embodiment of a multi-sample rotation experiment support system in a linear plasma device of the present invention after removing the front cover plate and the vacuum chamber.

[0040] Marks and corresponding parts names in the attached drawings:

[0041] Vacuum chamber 100, front baffle 1, first connecting plate 101, first base 102, circular hole 103;

[0042] Rotating sample stage 2, back plate 201, pressing plate 202, fastening bolts 203, connecting rod 204, nut 205, biasing socket 206, thermocouple socket 207;

[0043] Support seat 3, through plate 301, second connecting plate 302, second base 303;

[0044] Rotating transmission shaft 4, temperature measurement and negative bias loading shaft 5, rear cover plate 6, front cover plate 60, rotating driving unit 7;

[0045] Automatic advance and retreat unit 8, motor 801, screw rod 802, slider 803, mounting bracket 804;

[0046] Bias power supply 9, temperature inspection instrument 10, integrated control cabinet 11, thermocouple 12, negative bias metal end 13, sleeve 14, two-hole ceramic tube 15;

[0047] Sliding seat 24 , guide seat 25 , magnetic fluid seal 25 , origin arrival sensor 26 , end arrival sensor 27 . DETAILED DESCRIPTION

[0048] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with embodiments and drawings. The exemplary embodiments of the present invention and their description are only used to explain the present invention and are not intended to limit the present invention.

[0049] like Figure 1-Figure 2 As shown, this embodiment provides a multi-sample rotation experiment support system in a linear plasma device, including a temperature patrol meter 10, a bias power supply 9, and a rotating sample stage 2, a support seat 3, a rotating transmission shaft 4 and a temperature measurement and negative bias loading shaft 5 installed in a vacuum chamber 100, and a rotation drive unit 7 and an automatic advance and retreat unit 8 are installed on the outside of the vacuum chamber 100.

[0050] In this embodiment, the rotating sample stage 2 is disposed in the vacuum chamber 100 of the device and integrated at the head end of the entire support system for mounting and fastening the sample. The rotating sample stage 2 in this embodiment has a single rotation angle of 120° and an accuracy of 1°.

[0051] The support seat 3 is independently arranged in the vacuum chamber 100, located at the lower part of the whole support system, and is used to support the rotating transmission shaft 4 and the temperature measurement and negative bias loading shaft 5;

[0052] The rotating transmission shaft 4 is disposed in the vacuum chamber 100 of the device, between the rotating sample stage 2 and the rear cover plate 6 of the vacuum chamber 100, and is used to connect the rotating sample stage 2 and the rotating driving unit 7;

[0053] The temperature measurement and negative bias loading shaft 5 is arranged in the vacuum chamber 100 of the device, below the rotating transmission shaft 4, and a temperature measurement component and a negative bias metal end 13 are installed at the end thereof for measuring temperature and loading negative bias;

[0054] The rotation driving unit 7 is a stepping motor 801, which is located outside the vacuum chamber 100 and mounted on the rear cover plate 6, and is used to provide power for the sample to rotate;

[0055] The automatic advance and retreat unit 8 is located outside the vacuum chamber 100 and installed on the rear cover plate 6, and is used to control the automatic advance and retreat of the temperature measurement and negative bias loading shaft 5. In this embodiment, the telescopic distance range of the automatic advance and retreat unit 8 is ±20mm, and the accuracy is 1mm;

[0056] The bias power supply 9 is arranged outside the vacuum chamber 100 of the device, and is used to apply a DC negative bias voltage. In this embodiment, the bias power supply 9 includes a bias motor 801 and a bias power supply 9, and applies a DC negative bias voltage within 200V to the sample.

[0057] The temperature inspection instrument 10 is arranged outside the vacuum chamber 100 of the device and is used to measure the real-time temperature of the sample during the PMI experiment;

[0058] The integrated control cabinet 11 is arranged outside the vacuum chamber 100 of the device, and is used to control the fixed angle rotation of the rotating transmission shaft 4, the temperature measurement, and the extension or retraction of the negative bias loading shaft 5.

[0059] In this embodiment, an integrated control cabinet 11 is provided outside the vacuum chamber 100, and the temperature inspection instrument 10 and the bias power supply 9 are installed on the integrated control cabinet 11. The front end and the rear section of the vacuum chamber 100 in this embodiment are detachably connected with a front cover plate 60 and a rear cover plate 6, respectively, and the front cover plate 60 and the rear cover plate 6 are detachably connected and fixed to the vacuum chamber 100 through flanges.

[0060] Combination Figure 3 and Figure 4 As shown, in this embodiment, a plurality of sample installation stations for installing samples are circumferentially distributed on the rotating sample stage 2. In this embodiment, there are three sample installation stations, which are evenly arranged circumferentially.

[0061] The sample installation station in this embodiment is located on the side of the rotating sample stage 2 facing the front cover plate 60. The sample installation station includes a back plate 201, a pressing plate 202 and fasteners. The rotating sample stage 2 is made of ceramic material. The back plate 201 and the pressing plate 202 are both supported by metal molybdenum material. The back plate 201 is connected to the rotating sample stage 2. The pressing plate 202 is connected to the back plate 201 through fasteners. The pressing plate 202 is used to press the sample placed on the back plate 201. Specifically: Figure 3 , Figure 5 and Figure 6 As shown, the back plate 201 is a circular plate structure, and three circumferentially evenly distributed connecting rods 204 are fixedly connected to the back plate 201. The connecting rods 204 are welded or threaded or connected to the back plate 201 in other fixed ways. Through holes that cooperate with the connecting rods 204 are opened at positions corresponding to the three sample installation positions on the rotating sample stage 2. After the three connecting rods 204 on each back plate 201 pass through the through holes at the corresponding positions on the rotating sample stage 2, they are fixed by nuts 205, so that the back plate 201 is installed on the rotating sample stage 2.

[0062] In this embodiment, the fastener is a fastening bolt 203. The pressing plate 202 is connected and fixed to the back plate 201 by inserting the fastening bolt 203. After the sample is placed on the back plate 201, the pressing plate 202 is pressed against the sample by tightening the fastening bolt 203, thereby completing the installation and fixation of the sample. A through hole is provided in the center of the back plate 201, so that when the sample is fixed on the back plate 201, the back of the sample can be exposed, so as to facilitate the later contact with the thermocouple 12 and the negative bias metal end 13. In this embodiment, the pressing plate 202 is a rectangular plate-like structure, and U-shaped holes are provided on the left and right parts of the pressing plate 202, respectively. The fastening bolt 203 can be inserted into the U-shaped hole. The setting of the U-shaped hole facilitates the removal and placement of the pressing plate 202 when the fastening bolt 203 is completely removed. The pressing plate 202 can be pulled out from the fastening bolt 203 by only loosening the fastening bolt 203, thereby facilitating the removal and placement of the sample.

[0063] Combination Figure 2 As shown, the rotating transmission shaft 4 and the temperature measurement and negative bias loading shaft 5 both pass through the support seat 3. In this embodiment, two groups of support seats 3 are provided, and the two groups of support seats 3 support the left and right parts of the rotating transmission shaft 4 and the temperature measurement and negative bias loading shaft 5 respectively.

[0064] One end of the rotating transmission shaft 4 is coaxially fixedly connected to the rotating sample stage 2, and the other end of the rotating transmission shaft 4 passes through the vacuum chamber 100 and rotates with one side of the vacuum chamber 100. Specifically: the rotating transmission shaft 4 is coaxially fixed to the rotating sample stage 2 by screws, or coaxially fixed to the rotating sample stage 2 by welding.

[0065] The temperature measuring and negative bias loading shaft 5 is located below the rotating transmission shaft 4, one end of the temperature measuring and negative bias loading shaft 5 passes through the vacuum chamber 100, and the other end of the temperature measuring and negative bias loading shaft 5 is connected with a temperature measuring component and a negative bias metal end 13, the temperature measuring component and the negative bias metal end 13 can pass through the rotating sample stage 2 and contact the sample on the sample installation station, the temperature measuring component is connected to the temperature patrol meter 10 through a cable, and the negative bias metal end 13 is connected to the bias power supply 9 through a cable; in this embodiment, one end of the rotating transmission shaft 4 and the temperature measuring and negative bias loading shaft 5 both pass through the rear cover plate 6, and a magnetic fluid seal 25 is provided between the rotating transmission shaft 4 and the temperature measuring and negative bias loading shaft 5 and the rear cover plate 6, and the magnetic fluid seal 25 is used to realize the sealed assembly with the rear cover plate 6 to ensure the vacuum degree of the vacuum chamber 100.

[0066] The temperature measuring component in this embodiment is a thermocouple 12, and the thermocouple 12 in this embodiment is a K-type armored thermocouple 12, and the maximum temperature measurement value is 1200°C. The thermocouple 12 and the negative bias metal end 13 on the temperature measurement and negative bias loading shaft 5 are used for temperature measurement and negative bias loading.

[0067] Combination Figure 2 and Figure 3As shown, the rotating sample stage 2 is provided with a plurality of circumferentially distributed sockets, and the number of the sockets is the same as the number of the sample installation stations, that is, three groups of sockets are provided in this embodiment, and the sockets are arranged opposite to the samples installed on the sample installation stations. In this embodiment, the sockets include a thermocouple socket 207 and a bias socket 206, so that the sockets are in an 8-shaped structure as a whole, and the temperature measuring component and the negative bias metal end 13 can pass through the thermocouple socket 207 and the bias socket 206 respectively, and the two do not interfere with each other.

[0068] Combination Figure 5 and Figure 6 As shown, the temperature measuring and negative bias loading shaft 5 is hollow inside, and a two-hole ceramic tube 15 is coaxially arranged inside the temperature measuring and negative bias loading shaft 5. In this embodiment, a space for loading the two-hole ceramic tube 15 is opened inside the temperature measuring and negative bias loading shaft 5, and two through holes are opened inside the two-hole ceramic tube 15 along its axial direction. The wires of the temperature measuring component and the cables of the negative bias metal end 13 are respectively inserted into the two through holes of the two-hole ceramic tube 15. In this embodiment, the two-hole ceramic tube 15 is used to insulate the wires of the thermocouple 12 and the negative bias cable from each other. The rear ends of the temperature measuring component and the negative bias metal end 13 use a vacuum sealing plug to lead out the thermocouple 12 wires and the negative bias cable, which are respectively connected to the temperature patrol meter 10 and the bias power supply 9.

[0069] In another embodiment, a sleeve 14 is provided outside the temperature measuring element and / or the negative bias metal end 13. The sleeve 14 can prevent the thermocouple 12 from contacting the negative bias metal end 13 due to plasma flow during the experiment.

[0070] In another embodiment, a multi-sample rotating experiment support system in a linear plasma device also includes a front baffle 1, which is located inside the vacuum chamber 100 and on one side of the rotating sample stage 2. In this embodiment, the front baffle 1 is located at the front end of the entire device, and is used to block excess plasma flow to prevent it from reacting with samples not participating in the PMI experiment, while protecting the rotating sample stage 2 used to install samples and whose main body is made of ceramic from being damaged by high temperature.

[0071] Combination Figure 8 As shown, a circular hole 103 is opened on the front baffle 1, and the size of the circular hole 103 is the same as the size of the back plate 201 on the rotating sample stage 2. The circular hole 103 can be arranged in sequence opposite to the multiple sample installation stations on the rotating sample stage 2, that is, by rotating the rotating sample stage 2 and switching samples at different angles, the samples on the three sample installation stations can be arranged in sequence opposite to the circular hole 103 on the front baffle 1, so that the samples can react facing the plasma.

[0072] like Figure 2As shown, in this embodiment, a guide seat 25 is provided at the bottom of the vacuum chamber 100, and the bottom of the guide seat 25 is an arc shape matching the contour shape of the vacuum chamber 100. The lower part of the front baffle 1 is connected to the first connecting plate 101 by bolts, and the lower part of the first connecting plate 101 is connected to the first base 102 by bolts. The first base 102 slides with the guide seat 25; the support seat 3 slides with the guide seat 25. In this embodiment, the support seat 3 includes a through plate 301, a second connecting plate 302, and a second base 303. The through plate 301 is provided with two through holes, and the rotating transmission shaft 4 and the temperature measurement and negative bias loading shaft 5 pass through the two through holes on the through plate 301 respectively. The upper and lower parts of the second connecting plate 302 are respectively fixed to the lower part of the through plate 301 and the upper part of the second base 303 by bolts. In this embodiment, the front baffle 1, the sliding seat 24 and the temperature measurement and negative bias loading shaft 5 are made of metal, and the first connecting plate 101 and the second connecting plate 302 are made of ceramic.

[0073] In this embodiment, the bottom of the first base 102 and the second base 303 are both welded or bolted with a sliding seat 24, and a groove is opened on the guide seat 25 along its length direction. The sliding seats 24 at the bottom of the first base 102 and the second base 303 are slidably matched with both sides of the groove of the guide seat 25, so that the supporting position of the two supporting seats 3 can be changed according to actual needs and the distance between the front baffle 1 and the rotating sample stage 2 can be adjusted.

[0074] In this embodiment, the rotation drive unit 7 and the automatic advance and retreat unit 8 are both integrated and installed on the rear cover plate 6. The rear cover plate 6 is arranged outside the vacuum chamber 100 of the device to ensure the sealing of the vacuum chamber 100 of the entire linear device and integrate the rotation drive unit 7 and the automatic advance and retreat unit 8. The rotation drive unit 7 is used to drive the rotation transmission shaft 4 to rotate, and the automatic advance and retreat unit 8 is used to drive the temperature measurement and negative bias loading shaft 5 to move horizontally.

[0075] Specific: Combined Figure 7As shown, in this embodiment, the rotation drive unit 7 is a stepper motor 801, which is located outside the vacuum chamber 100 and installed on the rear cover 6, and is used to provide power for sample rotation. The automatic advance and retreat unit 8 is located outside the vacuum chamber 100 and installed on the rear cover 6, and is used to control the automatic advance and retreat of the temperature measurement and negative bias loading shaft 5. In this embodiment, the automatic advance and retreat unit 8 includes a motor 801, a screw rod 802 and a slider 803. The outside of the vacuum chamber 100 is connected to a mounting frame 804, and the mounting frame 804 is welded or bolted to the rear cover 6. The motor 801 is installed on the mounting frame 804 by bolts, one end of the screw rod 802 is coaxially fixedly connected to the motor 801 by a coupling, and the screw rod 802 is rotatably connected to the mounting frame 804 by a bearing, the slider 803 is threadedly connected to the screw rod 802, and the upper part of the slider 803 is fixedly connected to the temperature measurement and negative bias loading shaft 5 by screws. In this way, when the motor 801 is started, it will drive the screw rod 802 to rotate. During the rotation of the screw rod 802, the slider 803 will move horizontally to drive the temperature measurement and negative bias loading shaft 5 to move forward or backward.

[0076] In another embodiment, the automatic advance and retreat unit 8 is a cylinder, the output shaft of the cylinder is coaxially connected to the temperature measuring and negative bias loading shaft 5, and the temperature measuring and negative bias loading shaft 5 is controlled to advance and retreat by the cylinder.

[0077] In another embodiment, an origin position sensor 26 and an end point position sensor 27 are respectively installed on the left and right parts of the mounting frame 804. The origin position sensor 26 and the end point position sensor 27 can detect the sliding position of the slider 803, so that the slider 803 moves between the origin position sensor 26 and the end point position sensor 27, thereby making the movement of the temperature measurement and negative bias loading shaft 5 more accurate.

[0078] Except for the components specially described in the multi-sample rotating experiment support system in a linear plasma device in the present invention, other metal components such as the rear cover plate 6, the first base 102, the second base 303, the rotating transmission shaft 4, the temperature measurement and negative bias loading shaft 5, etc. are all made of stainless steel.

[0079] The specific implementation process is as follows:

[0080] The temperature measurement and negative bias loading shaft 5 is driven forward by the automatic advance and retreat unit 8 to press the thermocouple 12 and the negative bias metal end 13 against the back of the sample. After a certain sample finishes the PMI experiment, the temperature measurement and negative bias loading shaft 5 is withdrawn by the automatic advance and retreat unit 8, so that the thermocouple 12 and the negative bias metal end 13 are away from the back of the sample. Then, after the rotating sample stage 2 is driven to rotate a fixed angle by the rotation drive unit 7, the automatic advance and retreat unit 8 drives the temperature measurement and negative bias loading shaft 5 to advance and press the thermocouple 12 and the bias loading metal end against the back of another sample that needs to undergo a PMI experiment. Specifically:

[0081] In this embodiment, three pieces of metal tungsten with a diameter of φ10-φ20 mm and a thickness of 3 mm are used as samples. The plasma source adopts a three-cathode cascade arc source, and the discharge power, working gas, gas flow rate and magnetic field strength are set to 12KW, helium, 6000sccm and 2000Gs respectively.

[0082] Combination Figure 1 and Figure 4 Before the linear device is evacuated, the front baffle 1, the rotating sample stage 2 with the sample installed, the support seat 3, the rotating transmission shaft 4, the temperature measurement and negative bias loading shaft 5, and the rear cover 6 of the vacuum chamber 100 are installed inside and outside the vacuum chamber 100 of the linear device in sequence, and the front cover 60 of the vacuum chamber 100 is closed.

[0083] The system adopts a three-stage exhaust method of mechanical pump + Roots pump with two different speeds (300rpm and 1200rpm). First, the mechanical pump exhausts the vacuum chamber 100 to about 100Pa, and then the 300rpm Roots pump is turned on for further exhaust. After the vacuum degree reaches 5E10-1Pa, the 1200rpm Roots pump is turned on until the vacuum degree reaches below 5E10-2Pa.

[0084] Combination Figure 4 As shown, before the device of the present invention is evacuated, the samples need to be mounted on the metal molybdenum back plate 201 of the rotating sample stage 2, and the samples are further fixed by the metal molybdenum pressure plate 202 and the fastening bolts 203 to prevent them from falling off during the PMI experiment.

[0085] The integrated control cabinet 11 of the support system is provided with an anti-misoperation protection and an alarm system. When the rotating sample stage 2 has not rotated to the specified angle, or the rotating sample stage 2 is still in a rotating state, the automatic advance and retreat unit 8 will not drive the temperature measurement and negative bias loading axis 5 to perform telescopic movement; the bias power supply 9 is provided with an alarm system. When the negative bias metal end 13 is loaded with a negative bias, if it is connected to the inner wall of the vacuum chamber 100, an alarm sound will be issued, that is, press the start button of the bias power supply 9 before the experiment. If no alarm is issued, it is considered that there is no connection with the inner wall of the vacuum chamber 100.

[0086] The specific implementation steps of the multi-sample rotation experiment support system in a linear plasma device of the present invention are as follows:

[0087] 1. Open the front cover 60 of the vacuum chamber 100 of the linear device, fix the sample on the metal molybdenum back plate 201 on the rotating sample stage 2 through the metal molybdenum pressure plate 202 and the fastening bolts 203, place the front baffle 1 in front of the rotating sample stage 2 and adjust the position between the two; install and adjust each component in turn, such as Figure 1 and Figure 2As shown, debug the rotating sample stage 2 and the rotating transmission shaft 4 to see if they can work normally; start the automatic advance and retreat unit 8 to make the thermocouple 12 and the negative bias metal end 13 on the temperature measurement and negative bias loading shaft 5 fully contact with the sample, and when the bias power supply 9 confirms that the negative bias metal end 13 is not connected to the inner wall of the vacuum chamber 100, turn off the bias power supply 9, and finally close the front baffle of the linear device vacuum chamber 100.

[0088] 2. Turn on the water cooling system, and turn on the mechanical pump and Roots pump in turn, and evacuate the vacuum degree in the vacuum chamber 100 of the linear device to below 5E10-2Pa. The vacuum degree is measured using a resistance gauge and an ionization gauge. Turn on the magnetic coil and set the magnetic field strength to 2000Gs (variable range: 0 to 4000Gs) to confine the generated plasma. Before using the cascade arc plasma source, turn on the gas supply system and adjust the working gas (helium) flow rate to 6000sccm. The cascade arc plasma source generates high-density plasma. Under the confinement of the magnetic field, the plasma is transported along the magnetic field and bombards the sample.

[0089] 3. The bias power supply 9 of the present invention includes a DC negative bias voltage of less than 200V that can be loaded on the sample, and can display the actual bias value and the current value of the bias loop in real time; the loading of the negative bias voltage must be given in a plasma environment to accelerate ion bombardment of the sample surface, and study the erosion and damage of the sample during the PMI process, as well as the generation of impurities. The temperature patrol meter 10 can display the temperature changes of the sample during the experiment in real time.

[0090] 4. After the sample completes the specified PMI experiment, turn off the bias power supply 9, and retract the temperature measurement and negative bias loading shaft 5 axially through the automatic advance and retreat unit 8, and use the integrated control cabinet 11 to control the stepper motor 801 to drive the rotating transmission shaft 4 to rotate, thereby driving the rotating sample stage 2 to rotate a fixed angle (in this embodiment, the stepper motor 801 is controlled by a single-chip microcomputer control program to ensure that its rotation angle is 120 degrees each time), so that another sample faces the plasma, and then the temperature measurement and negative bias loading shaft 5 is extended axially through the automatic advance and retreat unit 8, so that the thermocouple 12 and the negative bias metal end 13 are in contact with the back of the sample, and the bias power supply 9 is turned on to complete the PMI experiment of the sample.

[0091] 5. Complete the PMI experiment of all samples according to the above step 4, turn off the cascade arc plasma, working gas, and magnetic coil, continue to evacuate the linear device for about 30 minutes, wait for the sample to cool to room temperature to ensure that its surface after the PMI experiment will not be oxidized by air, turn off the Roots pump and mechanical pump in turn, turn off the water cooling system, open the front cover 60 of the vacuum chamber 100, and take out the sample.

[0092] In order to complete the PMI experiment of multiple samples in a single experiment in a linear device, it is necessary to invent a multi-sample rotation experiment support system in a linear plasma device. However, in a vacuum environment, it is very difficult to solve the problem that the thermocouple 12 and the negative bias metal end 13 can be separated from the back of the sample after the PMI experiment of one sample, and another sample can be rotated to a specified angle and then fully contact the back of the sample. At the same time, it is also very difficult to prevent them from being affected by the conduction of high-density plasma generated by discharge.

[0093] The innovation of the present invention is that: (1) based on the plasma working conditions of high heat flux density, high plasma flux and low energy and large beam current, the fixed angle rotation of the sample in the PMI experiment, the switching contact of the thermocouple 12 and the negative bias metal end 13 are completed in a high vacuum environment at the lowest cost without modifying the vacuum chamber 100 in the original linear device, and ceramic insulating materials are used in various components to insulate the short circuit phenomenon caused by high-density plasma; (2) the present invention can not only realize multi-sample PMI experiments, but also realize the shielding of the entire support system mechanical device in the plasma; (3) the negative bias of the support system involved in the present invention is adjustable from 0 to 200V, with an adjustment accuracy of 1V, which can meet the needs of plasma irradiation samples under different working conditions and more realistically simulate various complex working conditions in the tokamak nuclear fusion device; (4) the sample transmission support system involved in the present invention can not only be used for linear plasma devices with a long axial length, but also can be expanded to other larger experimental or industrial vacuum devices to meet the multi-functional sample delivery needs of vacuum chambers in different fields.

[0094] It should be noted that the above description of the disclosed embodiments enables professionals and technicians in the field to implement or use the present application. Various modifications to these embodiments will be apparent to professionals and technicians in the field, and the general principles defined herein can be implemented in other embodiments without departing from the scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but should conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A multi-sample rotation experiment support system in a linear plasma device, characterized in that: It includes a temperature inspection instrument, a bias power supply, and a rotating sample stage, a support seat, a rotating transmission shaft, and a temperature measurement and negative bias loading shaft installed in the vacuum chamber. A rotating drive unit and an automatic advance and retreat unit are installed outside the vacuum chamber. A plurality of sample installation stations for installing samples are circumferentially distributed on the rotating sample stage, and the rotating transmission shaft and the temperature measurement and negative bias loading shaft all pass through the support seat; One end of the rotating transmission shaft is coaxially fixedly connected to the rotating sample stage, and the other end of the rotating transmission shaft passes through the vacuum chamber and is rotationally matched with one side of the vacuum chamber; One end of the temperature measuring and negative bias loading shaft passes through the vacuum chamber, and the other end of the temperature measuring and negative bias loading shaft is connected with a temperature measuring component and a negative bias metal end, and the temperature measuring component and the negative bias metal end can pass through the rotating sample stage and contact the sample on the sample installation station, the temperature measuring component is connected to the temperature inspection instrument through a cable, and the negative bias metal end is connected to the bias power supply through a cable; The rotary drive unit is used to drive the rotary transmission shaft to rotate, and the automatic advance and retreat unit is used to drive the temperature measurement and negative bias loading shaft to move horizontally.

2. The multi-sample rotation experiment support system in a linear plasma device according to claim 1, characterized in that: The sample installation station comprises a back plate, a pressing plate and a fastener, wherein the back plate is connected to the rotating sample stage, the pressing plate is connected to the back plate via the fastener, and the pressing plate is used to press the sample placed on the back plate.

3. The multi-sample rotation experiment support system in a linear plasma device according to claim 2, characterized in that: The rotating sample table is provided with a plurality of circumferentially distributed sockets, the number of the sockets is the same as the number of the sample installation stations, and the sockets are arranged opposite to the samples installed on the sample installation stations.

4. The multi-sample rotation experiment support system in a linear plasma device according to claim 3, characterized in that: The jack includes a thermocouple jack and a bias jack, and the temperature measuring element and the negative bias metal end can pass through the thermocouple jack and the bias jack respectively.

5. A multi-sample rotation experiment support system in a linear plasma device according to any one of claims 1 to 4, characterized in that: The temperature measuring and negative bias loading shaft is hollow inside, and two-hole ceramic tubes are coaxially arranged inside the temperature measuring and negative bias loading shaft. Two through holes are opened inside the two-hole ceramic tubes along their axial direction, and the wires of the temperature measuring component and the cables of the negative bias metal end are respectively inserted into the two through holes of the two-hole ceramic tubes.

6. The multi-sample rotation experiment support system in a linear plasma device according to claim 1, characterized in that: The outer side of the temperature measuring element and / or the negative bias metal end is covered with a sleeve.

7. A multi-sample rotation experiment support system in a linear plasma device according to any one of claims 1 to 4, characterized in that: It also includes a front baffle, which is located inside the vacuum chamber and on one side of the rotating sample stage. A circular hole is opened on the front baffle, and the circular hole can be arranged in sequence opposite to the multiple sample installation stations on the rotating sample stage.

8. The multi-sample rotation experiment support system in a linear plasma device according to claim 7, characterized in that: A guide seat is provided at the bottom of the vacuum chamber, a first connecting plate is connected to the lower part of the front baffle, a first base is connected to the lower part of the first connecting plate, the first base is slidably matched with the guide seat; the support seat is slidably matched with the guide seat.

9. The multi-sample rotation experiment support system in a linear plasma device according to claim 1, characterized in that: The automatic advance and retreat unit includes a motor, a screw and a slider. A mounting frame is connected to the outside of the vacuum chamber. The motor is installed on the mounting frame. One end of the screw is coaxially and fixedly connected to the motor, and the screw is rotatably connected to the mounting frame. The slider is threadedly connected to the screw, and the slider is fixedly connected to the temperature measurement and negative bias loading shaft.

10. The multi-sample rotation experiment support system in a linear plasma device according to claim 1, characterized in that: The front end and the rear end of the vacuum chamber are respectively detachably connected with a front cover plate and a rear cover plate, the automatic advance and retreat unit and the rotation drive unit are both installed on the rear cover plate, one end of the rotation transmission shaft and the temperature measurement and negative bias loading shaft both pass through the rear cover plate, and a magnetic fluid seal is provided between the rotation transmission shaft and the temperature measurement and negative bias loading shaft and the rear cover plate.

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