Modular quadrupole-time-of-flight mass spectrometry system

Abstract

The invention provides a modularized quadrupole-time-of-flight mass spectrometry system. The modularized quadrupole-time-of-flight mass spectrometry system comprises an ion beam source module, a front ion lens group, a quadrupole mass selection module, a rear ion lens group, an ion acceleration module, an ion reflection module and an ion detection module. After installation, the ion emergent direction of the ion beam source module, the axis of the front ion lens group, the axis of the quadrupole rod mass selection module, the axis of the rear ion lens group and the ion incident direction of the ion acceleration module are collinear. The ion incident direction and the ion emergent direction of the ion accelerator can be collinear or vertical. The ion reflection module is used for reflecting ions emitted by the ion accelerator to the ion detection module. The ion acceleration module of the modular quadrupole-time-of-flight mass spectrometry system provided by the invention has two installation forms, and solves the problem of single combination form of a quadrupole-time-of-flight mass spectrometer in the prior art.

Description

Technical Field

[0001] The invention relates to the technical field of mass spectrometry equipment, and in particular to a modular quadrupole-time-of-flight mass spectrometry system. Background Art

[0002] Time-of-Flight Mass Spectrometry (TOF MS) is a mass spectrometry analysis technique, the basic principle of which is to measure the flight time of ions from the ion source to the detector, thereby determining the mass-to-charge ratio (m / z) of the ions. Quadrupole-time-of-flight mass spectrometer (Q-TOF) is an accurate mass analysis instrument based on quadrupole and time-of-flight technology. Its excellent sensitivity, isotope fidelity, mass accuracy and high resolution can meet the research needs of mass spectrometry analysis in different fields.

[0003] The quadrupole-time-of-flight mass spectrometer in the prior art adopts a modular design, but the structure of each module is single, only supports a fixed combination mode, and lacks flexibility in system configuration. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a modular quadrupole-time-of-flight mass spectrometer system, which aims to solve the problem that each model of the quadrupole-time-of-flight mass spectrometer in the related art has a single structure and only supports a fixed combination mode.

[0005] The present invention provides a modular quadrupole-time-of-flight mass spectrometer system, comprising an ion beam source module, a front ion lens group, a quadrupole mass selection module, a rear ion lens group, an ion acceleration module, an ion reflection module and an ion detection module, wherein the ion emission direction of the ion beam source module, the axis of the front ion lens group, the axis of the quadrupole mass selection module and the axis of the rear ion lens group are collinear;

[0006] The ion acceleration module comprises a first ion inlet, a second ion inlet and an ion outlet, the ion incident direction of the first ion inlet is collinear with the ion emission direction of the ion outlet, and the ion incident direction of the second ion inlet is perpendicular to the ion emission direction of the ion outlet;

[0007] The ion acceleration module is connected to the vacuum chamber via a detachable first supporting device, and the axis of the rear ion lens group is collinear with the ion incident direction of the first ion incident port of the ion acceleration module, or the ion acceleration module is connected to the vacuum chamber via a detachable second supporting device, and the axis of the rear ion lens group is collinear with the ion incident direction of the second ion incident port of the ion acceleration module;

[0008] The ion emission direction of the ion emission port of the ion acceleration module is collinear with the ion incident direction of the ion reflection module, and the ion emission direction of the ion reflection module is collinear with the ion incident direction of the ion detection module.

[0009] According to the modular quadrupole-time-of-flight mass spectrometry system provided by the present invention, the ion beam source module, the ion reflection module and the ion detection module are all detachably connected to the inner side wall of the vacuum chamber through a third supporting device, and the third supporting device is detachably connected to the corresponding ion beam source module, the ion reflection module and the ion detection module;

[0010] The front ion lens group, the quadrupole mass selection module and the rear ion lens group are all detachably connected to the inner wall of the vacuum chamber through a fourth supporting device, and the fourth supporting device is detachably connected to the corresponding front ion lens group, the quadrupole mass selection module and the rear ion lens group.

[0011] According to the modular quadrupole-time-of-flight mass spectrometry system provided by the present invention, the first supporting device includes a first supporting ring, which is sleeved on the outside of the first shielding shell of the ion acceleration module, and the axis of the first supporting ring is colinear with the ion emission direction of the ion acceleration module, and the outer peripheral surface of the first supporting ring is in contact with the inner wall of the vacuum chamber.

[0012] According to the modular quadrupole-time-of-flight mass spectrometry system provided by the present invention, the second supporting device includes a first arc-shaped support plate, a second arc-shaped support plate and a leveling mechanism, the first arc-shaped support plate and the second arc-shaped support plate are cross-arranged, the outer peripheral surfaces of the first arc-shaped support plate and the second arc-shaped support plate are used to fit with the corresponding inner wall of the vacuum chamber, the leveling mechanism is arranged between the bottom of the ion acceleration module and the top of the first arc-shaped support plate and the second arc-shaped support plate, and the leveling mechanism is used to adjust the height and horizontality of the ion acceleration module.

[0013] According to the modular quadrupole-time-of-flight mass spectrometry system provided by the present invention, the third supporting device arranged on the outside of the ion beam source module is a first flange, the first flange is connected to the outside of the second shielding shell of the ion beam source module, and the axis of the first flange is parallel to the ion emission direction of the ion beam source module.

[0014] According to the modular quadrupole-time-of-flight mass spectrometry system provided by the present invention, the third supporting device arranged on the outside of the ion reflection module is a second flange, the second flange is detachably connected to the fixing screw of the ion reflection module, and the axis of the second flange is parallel to the ion incident direction of the ion reflection module.

[0015] According to the modular quadrupole-time-of-flight mass spectrometry system provided by the present invention, the third supporting device arranged on the outside of the ion detection module is a third flange, and the third flange is detachably connected to the ion detection component of the ion detection module through a supporting rod.

[0016] According to the modular quadrupole-time-of-flight mass spectrometry system provided by the present invention, the fourth supporting device arranged on the outside of the front ion lens group is a second supporting ring, and the second supporting ring includes at least two, and the plurality of second supporting rings are all mounted on the outside of the third shielding shell of the front ion lens group, and the plurality of second supporting rings are distributed along the axial direction of the third shielding shell.

[0017] According to the modular quadrupole-time-of-flight mass spectrometry system provided by the present invention, the fourth supporting device arranged on the outside of the quadrupole mass selection module is a third supporting ring, and the third supporting ring includes at least two, and the plurality of third supporting rings are all sleeved on the outside of the fourth shielding shell of the quadrupole mass selection module, and the plurality of third supporting rings are distributed along the axial direction of the fourth shielding shell.

[0018] The present invention adopts the above technical solution, which has the following advantages:

[0019] The modular quadrupole-time of flight mass spectrometry system provided by the present invention comprises an ion beam source module, a front ion lens group, a quadrupole mass selection module, a rear ion lens group, an ion acceleration module, an ion reflection module and an ion detection module. The ion acceleration module comprises a first ion inlet, a second ion inlet and an ion outlet, the ion incident direction of the first ion inlet is collinear with the ion emission direction of the ion outlet, and the ion incident direction of the second ion inlet is perpendicular to the ion emission direction of the ion outlet. During installation, the ion beam source module, the front ion lens group, the quadrupole mass selection module and the rear ion lens group can be detachably connected in a vacuum chamber, and the ion emission direction of the ion beam source module, the axis of the front ion lens group, the axis of the quadrupole mass selection module and the axis of the rear ion lens group are collinear. Then the ion acceleration module can be detachably connected in the vacuum chamber by a first supporting device, so that the axis of the rear ion lens group is collinear with the ion incident direction of the first ion inlet of the ion acceleration module. Alternatively, the ion acceleration module can be detachably connected in the vacuum chamber through a second supporting device, and the axis of the rear ion lens group is collinear with the ion incident direction of the second ion incident port of the ion acceleration module. Finally, the ion reflection module and the ion detection module are adaptively installed according to the installation form of the ion acceleration module, so that the ion emission direction of the ion emission port of the ion acceleration module is collinear with the ion incident direction of the ion reflection module, and the ion emission direction of the ion reflection module is collinear with the ion incident direction of the ion detection module. The ion acceleration module of the modular quadrupole-time-of-flight mass spectrometer system provided in the present application can be installed in two forms through a first supporting device and a second supporting device, which solves the problem of a single combination form of quadrupole-time-of-flight mass spectrometer in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 It is a structural schematic diagram of the ion beam source module provided by the present invention;

[0022] Figure 2 is a cross-sectional view of an ion beam source module provided by the present invention;

[0023] Figure 3 It is a structural schematic diagram of a combination of a front ion lens group, a quadrupole mass selection module and a rear ion lens group provided by the present invention;

[0024] Figure 4It is a cross-sectional view of a combination of a front ion lens group, a quadrupole mass selection module and a rear ion lens group provided by the present invention;

[0025] Figure 5 It is a structural schematic diagram of the ion acceleration module provided by the present invention;

[0026] Figure 6 is a cross-sectional view of the ion acceleration module provided by the present invention;

[0027] Figure 7 is a bottom view of the ion reflection module provided by the present invention;

[0028] Figure 8 is a cross-sectional view of the ion reflection module provided by the present invention;

[0029] Fig. 9 It is a structural schematic diagram of the ion detection module provided by the present invention;

[0030] Fig.10 This is a schematic diagram of a first combination form of a modular quadrupole-time-of-flight mass spectrometer system provided by the present invention;

[0031] Fig.11 Schematic diagram of a second combination form of the modular quadrupole-time-of-flight mass spectrometry system provided by the present invention;

[0032] Fig.12 It is a schematic diagram of the experimental results of the aluminum target quadrupole-time of flight mass spectrometry provided by the present invention.

[0033] Reference numerals:

[0034] 300: ion beam source module; 310: ferrule; 320: gas guide tube; 330: fixing plate; 340: pulse valve; 350: fixing ring; 360: dual-axis motor; 370: cluster source; 380: nozzle; 390: fixing sleeve; 3100: fixing tube; 3110: metal target; 3120: coupling; 3130: first flange;

[0035] 400: front ion lens group; 410: second shielding shell; 420: insulating inlet device; 430: first lens piece; 440: insulating outlet; 450: ceramic gasket; 460: first ceramic cylinder; 470: second ceramic cylinder; 480: second supporting ring;

[0036] 500: quadrupole mass selection module; 510: quadrupole entrance lens; 520: quadrupole pre-rod; 530: quadrupole main rod; 540: quadrupole exit lens; 550: third supporting ring; 560: third shielding shell;

[0037] 600: rear ion lens group; 610: second lens piece; 620: third ceramic tube;

[0038] 700: ion acceleration module; 710: first shielding shell; 720: first fixing screw; 730: fourth ceramic cylinder; 740: first ion acceleration plate; 750: first electrode; 771: first arc support plate; 772: second arc support plate; 773: circular horizontal support plate;

[0039] 800: ion reflection module; 810: fourth shielding shell; 820: second fixing screw; 830: electrode sheet; 840: second electrode; 850: second flange;

[0040] 900: ion detection module; 910: ion detection assembly; 920: support rod; 930: third flange. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0043] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is more than two, unless otherwise clearly and specifically defined.

[0044] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0045] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0046] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0047] The modular quadrupole-time of flight mass spectrometry system provided by the present invention comprises an ion beam source module, a front ion lens group, a quadrupole mass selection module, a rear ion lens group, an ion acceleration module, an ion reflection module and an ion detection module. The ion acceleration module comprises a first ion inlet, a second ion inlet and an ion outlet, the ion incident direction of the first ion inlet is collinear with the ion emission direction of the ion outlet, and the ion incident direction of the second ion inlet is perpendicular to the ion emission direction of the ion outlet. During installation, the ion beam source module, the front ion lens group, the quadrupole mass selection module and the rear ion lens group can be detachably connected in a vacuum chamber, and the ion emission direction of the ion beam source module, the axis of the front ion lens group, the axis of the quadrupole mass selection module and the axis of the rear ion lens group are collinear. Then the ion acceleration module can be detachably connected in the vacuum chamber by a first supporting device, so that the axis of the rear ion lens group is collinear with the ion incident direction of the first ion inlet of the ion acceleration module. Alternatively, the ion acceleration module can be detachably connected in the vacuum chamber through a second supporting device, and the axis of the rear ion lens group is collinear with the ion incident direction of the second ion incident port of the ion acceleration module. Finally, the ion reflection module and the ion detection module are adaptively installed according to the installation form of the ion acceleration module, so that the ion emission direction of the ion emission port of the ion acceleration module is collinear with the ion incident direction of the ion reflection module, and the ion emission direction of the ion reflection module is collinear with the ion incident direction of the ion detection module. The ion acceleration module of the modular quadrupole-time-of-flight mass spectrometer system provided in the present application can be installed in two forms through a first supporting device and a second supporting device, which solves the problem of a single combination form of quadrupole-time-of-flight mass spectrometer in the prior art.

[0048] Combine the following Figures 1 to 12 A modular quadrupole-time-of-flight mass spectrometry system of the present invention.

[0049] The embodiment of the present invention provides a modular quadrupole-time-of-flight mass spectrometer system, including an ion beam source module 300, a front ion lens group 400, a quadrupole mass selection module 500, a rear ion lens group 600, an ion acceleration module 700, an ion reflection module 800 and an ion detection module 900. The ion acceleration module 700 includes a first ion inlet, a second ion inlet and an ion outlet, the ion incident direction of the first ion inlet is collinear with the ion emission direction of the ion outlet, and the ion incident direction of the second ion inlet is perpendicular to the ion emission direction of the ion outlet.

[0050] The modular quadrupole-TOF mass spectrometer system has at least two installation configurations:

[0051] First, the ion reflection module 800 is installed horizontally coaxially with the ion beam source module 300 , the front ion lens group 400 , the quadrupole mass selection module 500 and the rear ion lens group 600 in a horizontal direct-entry manner.

[0052] Specifically, the ion beam source module 300, the front ion lens group 400, the quadrupole mass selection module 500 and the rear ion lens group 600 are first detachably connected in a vacuum chamber, and the ion emission direction of the ion beam source module 300, the axis of the front ion lens group 400, the axis of the quadrupole mass selection module 500 and the axis of the rear ion lens group 600 are collinear.

[0053] Then, the ion acceleration module 700 is detachably connected in the vacuum chamber by the first supporting device, so that the axis of the rear ion lens group 600 is collinear with the ion incident direction of the first ion incident port of the ion acceleration module 700. At this time, the ion emission direction of the ion beam source module 300, the axis of the front ion lens group 400, the axis of the quadrupole mass selection module 500, the rear ion lens group 600, the ion incident direction of the ion acceleration module 700 and the ion emission direction of the ion acceleration module 700 are collinear.

[0054] Finally, the ion reflection module 800 and the ion detection module 900 are adaptively installed in the vacuum chamber so that the ion emission direction of the ion output port of the ion acceleration module 700 is collinear with the ion incident direction of the ion reflection module 800, and the ion emission direction of the ion reflection module 800 is collinear with the ion incident direction of the ion detection module 900.

[0055] Second, the ion reflection module 800 is configured above the ion acceleration module 700 by vertically throwing.

[0056] Specifically, the ion beam source module 300, the front ion lens group 400, the quadrupole mass selection module 500 and the rear ion lens group 600 are first detachably connected in a vacuum chamber, and the ion emission direction of the ion beam source module 300, the axis of the front ion lens group 400, the axis of the quadrupole mass selection module 500 and the axis of the rear ion lens group 600 are collinear.

[0057] Then, the ion acceleration module 700 is detachably connected in the vacuum chamber by the second supporting device, so that the axis of the rear ion lens group 600 is collinear with the ion incident direction of the second ion incident port of the ion acceleration module 700. At this time, the ion emission direction of the ion beam source module 300, the axis of the front ion lens group 400, the axis of the quadrupole mass selection module 500, the rear ion lens group 600 and the ion incident direction of the ion acceleration module 700 are collinear, and the ion emission direction of the ion acceleration module 700 is perpendicular to the ion incident direction of the ion acceleration module 700.

[0058] Finally, the ion reflection module 800 and the ion detection module 900 are adaptively installed in the vacuum chamber so that the ion emission direction of the ion output port of the ion acceleration module 700 is collinear with the ion incident direction of the ion reflection module 800, and the ion emission direction of the ion reflection module 800 is collinear with the ion incident direction of the ion detection module 900.

[0059] The ion acceleration module 700 of the modular quadrupole-time-of-flight mass spectrometer system provided in the present application can be installed in two forms through a first supporting device and a second supporting device, thereby solving the problem of a single combination form of quadrupole-time-of-flight mass spectrometer in the prior art.

[0060] In some embodiments, the ion beam source module 300, the ion reflection module 800 and the ion detection module 900 are all detachably connected to the inner side wall of the vacuum chamber through a third supporting device, and the third supporting device is detachably connected to the corresponding ion beam source module 300, the ion reflection module 800 and the ion detection module 900. The front ion lens group 400, the quadrupole mass selection module 500 and the rear ion lens group 600 are all detachably connected to the inner side wall of the vacuum chamber through a fourth supporting device, and the fourth supporting device is detachably connected to the corresponding front ion lens group 400, the quadrupole mass selection module 500 and the rear ion lens group 600.

[0061] In this way, by replacing the third supporting device and the fourth supporting device of different sizes, the corresponding modules mentioned above can be installed in vacuum chambers with different inner diameters, thereby improving the flexibility and versatility of module assembly.

[0062] In some embodiments, the ion beam source module 300 may be a dual-axis controlled laser sputtering (LaVa) ion beam source module, and the third supporting device disposed outside the ion beam source module 300 may be a first flange 3130 .

[0063] The ion beam source module 300 includes a ferrule 310 , an air guide tube 320 , a fixing plate 330 , a pulse valve 340 , a fixing ring 350 , a dual-axis motor 360 , a cluster source 370 , a nozzle 380 , a fixing sleeve 390 , a fixing tube 3100 , a metal target 3110 and a coupling 3120 .

[0064] One end of the fixed sleeve 390 is open and the other end is closed, the pulse valve 340 is detachably connected to the inner side of the closed end of the fixed sleeve 390, and the cluster source 370 is detachably connected to the outer side of the closed end of the fixed sleeve 390. The open end of the fixed sleeve 390 is sleeved on the right end of the fixed tube 3100 and is fixed to the fixed tube 3100 by the fixing ring 350.

[0065] Specifically, the fixing ring 350 is connected to the fixing sleeve 390 by four screws, and is connected to the fixing pipe 3100 by another four screws. The fixing pipe 3100 is connected to the first flange 3130 by four fixing plates 330. The first flange 3130 is a standard flange, which can be a 150 flange, a 200 flange, a 250 flange, etc.

[0066] The ferrule 310 is connected to the left end of the air duct 320, the right end of the air duct 320 is connected to the air inlet end of the pulse valve 340, the air outlet end of the pulse valve 340 is connected to the air inlet end of the cluster source 370 through the gas channel on the fixed sleeve 390, and the nozzle 380 is connected to the air outlet end of the cluster source 370.

[0067] The dual-axis motor 360 is connected to the metal target 3110 via a coupling 3120 , and the ion generating end of the metal target 3110 is located in the gas channel of the cluster source 370 .

[0068] like Figure 1 and Figure 2 As shown, a schematic diagram of a dual-axis controlled laser sputtering (LaVa) ion beam source module is given, gas is ejected through a pulse valve 340, and at the same time, the laser bombards the dual-axis rotating metal target 3110 to generate ions, and the ions are carried by the gas through the nozzle 380 to undergo ultrasonic expansion to generate the required ion clusters. Afterwards, the ion clusters are introduced into a quadrupole mass selection module 500 including a front ion lens group 400 and a rear ion lens group 600 along with the movement of the gas.

[0069] The first flange 3130 can be replaced with a standard 150 flange or a standard 200 flange as required, so that it can be installed in vacuum chambers with different inner diameters.

[0070] In some embodiments, the fourth supporting device disposed outside the front ion lens assembly 400 may be a second supporting ring 480 .

[0071] The front ion lens assembly 400 includes a second shielding body 410, an insulating inlet device 420, five first lens pieces 430 and an insulating outlet device 440. The second support ring 480 is sleeved on the outside of the second shielding body 410, and two second support rings 480 are provided. The second support ring 480 is detachably connected to the second shielding body 410, so that the second support ring 480 with different outer diameters can be replaced according to the inner diameter of the vacuum chamber, so that the outer peripheral surface of the second support ring 480 can be attached to the inner wall of the vacuum chamber.

[0072] The insulating inlet device 420, five first lens pieces 430 and the insulating outlet device 440 are sequentially arranged from left to right along the axial direction of the second shielding shell 410. The five first lens pieces 430 are coaxially connected in series, and a ceramic gasket 450 is arranged between two adjacent first lens pieces 430. The outer peripheral surface of each first lens piece 430 is sleeved with a first ceramic cylinder 460. A second ceramic cylinder 470 is arranged between the first lens piece 430 on the left and the insulating inlet device 420, and between the first lens piece 430 on the right and the insulating outlet device 440. A first voltage is applied to the first, third and fifth first lens pieces 430, and a second voltage is applied to the second and fourth first lens pieces 430 to achieve ion focusing.

[0073] The fourth supporting device disposed outside the quadrupole mass selection module 500 may be a third supporting ring 550 .

[0074] The quadrupole mass selection module 500 includes a third shielding shell 560 and a quadrupole entrance lens 510, a quadrupole pre-rod 520, a quadrupole main rod 530 and a quadrupole exit lens 540 which are sequentially connected in series in the third shielding shell 560, wherein the quadrupole main rod 530 applies a reverse DC voltage and a radio frequency voltage to two adjacent rods. The third support ring 550 is connected to the outside of the third shielding shell 560, and there are at least two third support rings 550. The third support ring 550 is detachably connected to the third shielding shell 560, so that the third support ring 550 of different outer diameters can be replaced according to the inner diameter of the vacuum chamber, so that the outer peripheral surface of the third support ring 550 can fit the inner wall of the vacuum chamber.

[0075] The post-ion lens group 600 includes five coaxially arranged second lens pieces 610 and a third ceramic tube 620 sleeved on the outside of the second lens pieces 610. The five second lens pieces 610 are arranged at intervals, wherein a first voltage is applied to the first, third and fifth second lens pieces 610, and a second voltage is applied to the second and fourth second lens pieces 610.

[0076] like Figure 3 , 4 shows a schematic structural diagram of a combination of a front ion lens group 400, a quadrupole mass selection module 500 and a rear ion lens group 600.

[0077] After being introduced into the front ion lens group 400, the ions are constrained and focused by the electric field and enter the quadrupole mass selection module 500. The quadrupole mass selection module 500 can be set to the mass selection mode or the ion guide mode according to experimental needs. After passing through the quadrupole mass selection module 500, the ions enter the rear ion lens group 600, and enter the ion acceleration module 700 after being constrained and focused by the rear ion lens group 600.

[0078] In some embodiments, the ion acceleration module 700 includes a first shielding shell 710 , a first fixing screw 720 , a fourth ceramic cylinder 730 , a first ion acceleration plate 740 , and a first electrode 750 .

[0079] The first shielding shell 710 can be a rectangular shell structure, the first fixed screws 720 include four, and the four first fixed screws 720 are arranged in parallel, all inserted into the first shielding shell 710 from the top of the first shielding shell 710 in the vertical direction, and the first fixed screws 720 are arranged near the four edges of the first shielding shell 710. A fourth ceramic cylinder 730 is sleeved on the outer side of each first fixed screw 720 located in the first shielding shell 710 for insulation. There are seven first ion acceleration plates 740, and the seven first ion acceleration plates 740 are all arranged horizontally and stacked in the vertical direction. The first ion acceleration plates 740 are all connected to the fourth ceramic cylinder 730. A rectangular channel for ions to pass through is provided in the middle of the first ion acceleration plate 740, wherein each level of the first ion acceleration plate 740 is composed of two electrode plates sandwiching a nickel wire mesh.

[0080] Correspondingly, the first electrodes 750 also include seven, and the seven first electrodes 750 are all connected to the first shielding shell 710, and one end of the seven first electrodes 750 located in the first shielding shell 710 is connected to the seven ion acceleration plates one by one.

[0081] See also Fig.10 When the ion reflection module 800 is installed horizontally and coaxially with the ion beam source module 300, the front ion lens group 400, the quadrupole mass selection module 500 and the rear ion lens group 600 in a horizontal direct-entry manner, the first supporting device can be a first supporting ring 760, and the first supporting ring 760 is detachably mounted on the outer side of the first shielding shell 710. The detachable connection method can replace the first supporting ring 760 with different outer diameters according to the inner diameter of the vacuum chamber, so that the outer peripheral surface of the first supporting ring 760 can fit the inner wall of the vacuum chamber.

[0082] See also Figure 5 , Figure 6 and Fig.11 When the ion reflection module 800 is configured above the ion acceleration module 700 in a vertical horizontal throwing manner, the second support device may include a first arc support plate 771, a second arc support plate 772 and a leveling mechanism, the first arc support plate 771 and the second arc support plate 772 are cross-arranged, and the arc top generatrix of the first arc support plate 771 and the second arc support plate 772 is located on the same plane, the first arc support plate 771 and the second arc support plate 772 are made of plastic material, so that the outer peripheral surface of the first arc support plate 771 and the second arc support plate 772 fits with the inner wall of the corresponding vacuum chamber to adapt to vacuum chambers with different inner diameters.

[0083] The leveling mechanism is disposed between the bottom of the ion acceleration module 700 and the tops of the first arc-shaped support plate 771 and the second arc-shaped support plate 772 , and is used to adjust the height and levelness of the ion acceleration module 700 .

[0084] Specifically, the leveling mechanism may include a circular horizontal support plate 773 and an adjusting bolt, the bottom of the circular horizontal support plate 773 is connected to the first arc support plate 771 and the second arc support plate 772, and the top of the circular horizontal support plate 773 is connected to the bottom of the first shielding shell 710 of the ion acceleration module 700 through the adjusting bolt. Further, the adjusting bolts may include four groups, which are respectively arranged in the front, back, left, and right directions of the first shielding shell 710. By rotating the adjusting bolts in the four directions, the height of the ion acceleration module 700 in the four directions can be adjusted respectively to achieve the effect of leveling and height adjustment.

[0085] When the ion reflection module 800 is configured above the ion acceleration module 700 in a vertical horizontal projection manner, the ions gain acceleration in a direction perpendicular to the initial motion direction after entering the ion acceleration module 700, and enter the ion reflection module 800 after flying in the field-free flight zone.

[0086] In some embodiments, the ion reflection module 800 includes a fourth shielding shell 810 , four second fixing screws 820 , thirty electrode sheets 830 and a second electrode 840 . The third supporting device disposed on the ion reflection module 800 may be a second flange 850 .

[0087] Four second fixing screws 820 penetrate into the fourth shielding shell 810 in the vertical direction and are distributed near the four edges of the fourth shielding shell 810. The second flange 850 is connected to one end of the second fixing screw 820 located outside the fourth shielding shell 810. Multiple electrode sheets 830 are sleeved on the second fixing screw 820 in parallel with each other, and the adjacent electrode sheets 830 and the electrode sheets 830 and the second fixing screws 820 are insulated. The second electrode 840 can be an MHV electrode. The center of the electrode sheet 830 is an elliptical notch to adapt to the trajectory of the ion flight path.

[0088] The second flange 850 is detachably connected to the second fixing screw 820, so that the second flange 850 with the corresponding outer diameter can be replaced according to the inner diameter of the vacuum chamber, so that the outer peripheral surface of the second flange 850 can fit the inner wall of the vacuum chamber.

[0089] like Figure 7 and Figure 8As shown, a schematic diagram of the structure of the ion reflection module 800 is given. The voltage required for the reflection field is supplied by the second electrode 840, and a resistor is added between two adjacent electrode plates to realize the step-by-step pressurization of the reflection field. After entering the ion reflection module 800, the ions first decelerate and then accelerate, and then arrive at the ion detection module 900 after a field-free flight.

[0090] See also Fig. 9 In some embodiments, the ion detection module 900 includes an ion detection assembly 910 and a support rod 920. The third support device disposed outside the ion detection module 900 may be a third flange 930. One end of the support rod 920 is connected to the ion detection assembly 910, and the third flange 930 is detachably connected to the other end of the support rod 920. The detachable connection method can replace the third flange 930 with different outer diameters according to the inner diameter of the vacuum chamber, so that the outer peripheral surface of the third flange 930 can be fitted with the flange surface of the vacuum chamber.

[0091] The preliminary experimental results of aluminum targets are as follows Fig.12 The experimental results show that the several easily detachable modular components for time-of-flight mass spectrometry of the present invention show good sensitivity and resolution.

[0092] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application, and they should all be included in the scope of the claims and specification of the present application. In particular, as long as there is no structural conflict, the various technical features mentioned in the various embodiments can be combined in any way. The present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions that fall within the scope of the claims.

Claims

1. A modular quadrupole-time-of-flight mass spectrometry system, characterized in that: It comprises an ion beam source module (300), a front ion lens group (400), a quadrupole mass selection module (500), a rear ion lens group (600), an ion acceleration module (700), an ion reflection module (800) and an ion detection module (900), wherein the ion emission direction of the ion beam source module (300), the axis of the front ion lens group (400), the axis of the quadrupole mass selection module (500) and the axis of the rear ion lens group (600) are collinear; The ion acceleration module (700) comprises a first ion inlet, a second ion inlet and an ion outlet, the ion incident direction of the first ion inlet is collinear with the ion emission direction of the ion outlet, and the ion incident direction of the second ion inlet is perpendicular to the ion emission direction of the ion outlet; The ion acceleration module (700) is connected to the vacuum chamber via a detachable first supporting device, and the axis of the rear ion lens group (600) is collinear with the ion incident direction of the first ion incident port of the ion acceleration module (700); or, the ion acceleration module (700) is connected to the vacuum chamber via a detachable second supporting device, and the axis of the rear ion lens group (600) is collinear with the ion incident direction of the second ion incident port of the ion acceleration module (700); The ion emission direction of the ion emission port of the ion acceleration module (700) is collinear with the ion incident direction of the ion reflection module (800), and the ion emission direction of the ion reflection module (800) is collinear with the ion incident direction of the ion detection module (900).

2. The modular quadrupole-time-of-flight mass spectrometry system according to claim 1, characterized in that: The ion beam source module (300), the ion reflection module (800) and the ion detection module (900) are all detachably connected to the inner side wall of the vacuum chamber via a third supporting device, and the third supporting device is detachably connected to the corresponding ion beam source module (300), the ion reflection module (800) and the ion detection module (900); The front ion lens group (400), the quadrupole mass selection module (500) and the rear ion lens group (600) are all detachably connected to the inner wall of the vacuum chamber via a fourth supporting device, and the fourth supporting device is detachably connected to the corresponding front ion lens group (400), the quadrupole mass selection module (500) and the rear ion lens group (600).

3. The modular quadrupole-time-of-flight mass spectrometry system according to claim 1, characterized in that: The first supporting device comprises a first supporting ring, the first supporting ring is sleeved on the outside of a first shielding shell (710) of the ion acceleration module (700), the axis of the first supporting ring is colinear with the ion emission direction of the ion acceleration module (700), and the outer peripheral surface of the first supporting ring is in contact with the inner wall of the vacuum chamber.

4. The modular quadrupole-time-of-flight mass spectrometry system according to claim 1, characterized in that: The second supporting device comprises a first arc-shaped supporting plate (771), a second arc-shaped supporting plate (772) and a leveling mechanism, wherein the first arc-shaped supporting plate (771) and the second arc-shaped supporting plate (772) are cross-arranged, and the outer peripheral surfaces of the first arc-shaped supporting plate (771) and the second arc-shaped supporting plate (772) are used to fit with the inner wall of the corresponding vacuum chamber, and the leveling mechanism is arranged between the bottom of the ion acceleration module (700) and the top of the first arc-shaped supporting plate (771) and the second arc-shaped supporting plate (772), and the leveling mechanism is used to adjust the height and horizontality of the ion acceleration module (700).

5. The modular quadrupole-time-of-flight mass spectrometry system according to claim 2, characterized in that: The third supporting device arranged on the outside of the ion beam source module (300) is a first flange (3130), the first flange (3130) is connected to the outside of the fixed tube (3100) of the ion beam source module (300), and the axis of the first flange (3130) is parallel to the ion emission direction of the ion beam source module (300).

6. The modular quadrupole-time-of-flight mass spectrometry system according to claim 2, characterized in that: The third supporting device arranged on the outside of the ion reflection module (800) is a second flange (850), the second flange (850) is detachably connected to the second fixing screw (820) of the ion reflection module (800), and the axis of the second flange (850) is parallel to the ion incident direction of the ion reflection module (800).

7. The modular quadrupole-time-of-flight mass spectrometry system according to claim 2, characterized in that: The third supporting device arranged on the outside of the ion detection module (900) is a third flange (930), and the third flange (930) is detachably connected to the ion detection component of the ion detection module (900) via a supporting rod (920).

8. The modular quadrupole-time-of-flight mass spectrometry system according to claim 2, characterized in that: The fourth supporting device arranged on the outside of the front ion lens group (400) is a second supporting ring (480), and the second supporting ring (480) includes at least two, and the plurality of second supporting rings (480) are all sleeved on the outside of the second shielding shell (410) of the front ion lens group (400), and the plurality of second supporting rings (480) are distributed along the axial direction of the second shielding shell (410).

9. The modular quadrupole-time-of-flight mass spectrometry system according to claim 2, characterized in that: The fourth supporting device arranged on the outside of the quadrupole mass selection module (500) is a third supporting ring (550), and the third supporting ring (550) includes at least two, and the plurality of third supporting rings (550) are all sleeved on the outside of the third shielding shell (560) of the quadrupole mass selection module (500), and the plurality of third supporting rings (550) are distributed along the axial direction of the third shielding shell (560).

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