Focusing control method and focusing control system

Abstract

The embodiment of the invention provides a focusing control method and a focusing control system, the focusing control system comprises an automatic focusing module, a controller and a driving module which are electrically connected in sequence, and the focusing control method comprises the following steps: determining whether the automatic focusing module works or not; if the automatic focusing module works, receiving a driving signal of the automatic focusing module, and controlling the driving module to focus in a first control mode according to the driving signal; if the automatic focusing module does not work, the driving module is controlled to focus in a second control mode, and the second control mode is different from the first control mode. According to the focusing control system provided by the embodiment of the invention, the driving module can be controlled to focus in two different control modes, namely, the driving module is controlled to focus in the first control mode or the second control mode, so that the stability of the system can be ensured, the use convenience of the system can be improved, and the operation efficiency of the system can also be improved.

Description

Technical Field

[0001] The present application relates to the field of automation technology, and in particular to a focus control method and a focus control system. Background Art

[0002] Currently in the automation industry, autofocus systems are widely used in semiconductor inspection, optical inspection, laser applications and other fields, and various autofocus modules are emerging. In actual applications, according to the requirements of focusing speed, focusing accuracy, etc., there are some scenarios where autofocus modules are not needed, and there are even cases where autofocus modules fail.

[0003] Currently, in a system integrated with an autofocus module, if the autofocus module is not needed or fails, the autofocus module needs to be manually disassembled, which causes inconvenience in use and reduces the operating efficiency of the system. Summary of the invention

[0004] The embodiments of the present application provide a focus control method and a focus control system, which can improve the convenience of use and the operating efficiency of the system.

[0005] The embodiment of the present application provides a focus control method, which is applied to a focus control system, wherein the focus control system includes an autofocus module, a controller, and a drive module which are electrically connected in sequence; The focus control method comprises: Determining whether the autofocus module is working; If the auto-focus module is working, receiving a driving signal of the auto-focus module, and controlling the driving module to focus in a first control mode according to the driving signal; If the automatic focusing module is not working, the driving module is controlled to focus in a second control mode, and the second control mode is different from the first control mode.

[0006] In some embodiments, the controller has a virtual motion axis, and controlling the driving module to focus in a first control manner according to the driving signal includes: The virtual motion axis is controlled to perform virtual motion according to the driving signal, and the driving module is controlled to follow the virtual motion axis to move synchronously in an automatic following manner to perform focusing.

[0007] In some embodiments, controlling the driving module to focus in a second control manner includes: A control signal of an external device is received, and the control signal is sent to the driving module, so that the driving module performs focusing according to the control signal.

[0008] In some embodiments, the focus control system further includes a host computer, the host computer is electrically connected to the autofocus module and the controller, and the host computer is used to generate the control signal; When the auto-focus module is working, the host computer sends the control signal to the auto-focus module, and the auto-focus module generates the driving signal according to the control signal; When the automatic focusing module is not working, the host computer sends the control signal to the controller.

[0009] In some embodiments, the driving module includes a driver and a motor; When the driving module performs focusing, the driver drives the motor to move to perform focusing, and the motor feeds back the movement amount to the driver in real time.

[0010] The embodiment of the present application further provides a focus control system, comprising an autofocus module, a controller, and a driving module electrically connected in sequence, wherein the controller is used to: When the automatic focusing module is working, receiving a driving signal of the automatic focusing module, and controlling the driving module to focus in a first control mode according to the driving signal; When the automatic focusing module is not working, the driving module is controlled to focus in a second control mode, and the second control mode is different from the first control mode.

[0011] In some embodiments, the controller has a virtual axis of motion; In the first control mode, the controller is used to: control the virtual motion axis to perform virtual motion according to the driving signal, and control the driving module to follow the virtual motion axis to move synchronously in an automatic following manner to perform focusing.

[0012] In some embodiments, under the second control mode, the controller is used to: receive a control signal from an external device, and send the control signal to the driving module, so that the driving module focuses according to the control signal.

[0013] In some embodiments, the focus control system further includes a host computer, the host computer is electrically connected to the autofocus module and the controller, and the host computer is used to generate the control signal; When the auto-focus module is working, the host computer sends the control signal to the auto-focus module, and the auto-focus module generates the driving signal according to the control signal; When the automatic focusing module is not working, the host computer sends the control signal to the controller.

[0014] In some embodiments, the driving module includes a driver and a motor, the driver includes a driving port and a feedback port, and the driving port and the feedback port are both electrically connected to the motor; The driving port is used to drive the motor to move for focusing, and the feedback port is used to receive the movement amount fed back by the motor in real time.

[0015] The focus control system of the embodiment of the present application can control the driving module to focus in two different control modes, that is, controlling the driving module to focus in a first control mode or a second control mode. Therefore, in different focus demand scenarios, even in the scenario where the automatic focus module fails, the driving module can be controlled to focus without the need to disassemble or repair the system. Therefore, the stability of the system can be guaranteed, the ease of use of the system can be improved, and the operating efficiency of the system can also be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application, and those skilled in the art can obtain other drawings based on these drawings without creative work.

[0017] Figure 1 A first structural schematic diagram of a focus control system is provided for an embodiment of the present application.

[0018] Figure 2 A second structural schematic diagram of a focus control system is provided for an embodiment of the present application.

[0019] Figure 3 A first flow chart of a focus control method provided in an embodiment of the present application.

[0020] Figure 4 A second flow chart of the focus control method provided in an embodiment of the present application. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0022] The embodiments of the present application provide a focus control system that can be applied to semiconductor detection, optical detection, laser application and other fields to achieve automatic focusing of the device.

[0023] refer to Figure 1 , Figure 1 A first structural schematic diagram of a focus control system 100 is provided for an embodiment of the present application. The focus control system 100 includes an automatic focusing module (Automatic Tracking Focus, ATF for short) 10, a controller 20, and a driving module 30. The automatic focusing module 10, the controller 20, and the driving module 30 are electrically connected in sequence.

[0024] Among them, the autofocus module 10 can realize the autofocus function. The model of the autofocus module 10 can be selected according to the needs, and the autofocus module 10 is an autofocus module without a driver and a motor. In practical applications, the autofocus module 10 may work or not work. For example, in a scenario where high focusing accuracy is required, the autofocus module 10 works and participates in the control of focusing to achieve high-precision focusing; and in a scenario where the focusing accuracy is not required, or fast focusing is required, the autofocus module 10 does not work to achieve fast focusing. In addition, in practical applications, there may also be scenarios where the autofocus module 10 fails, such as the autofocus module 10 may be damaged. Once the autofocus module 10 is damaged, it cannot work. When the autofocus module 10 is working, a drive signal is generated and sent to the controller 20, and the controller 20 processes the drive signal. The drive signal may be, for example, an A / B phase pulse signal.

[0025] The controller 20 can receive a driving signal from the auto-focus module 10, or can receive an external control signal. The controller 20 is used to control the driving module 30 to achieve focusing. The driving module 30 is used to perform a specific process of focusing.

[0026] It can be understood that in one example, the controller 20 can determine whether the autofocus module 10 is working based on the communication between the controller 20 and the autofocus module 10. For example, if the communication between the two is normal, it means that the autofocus module 10 is working, and if the communication between the two is abnormal, it means that the autofocus module 10 is not working. In another example, the autofocus module 10 can report its own working status to the controller 20 at intervals. If the controller 20 receives the working status reported by the autofocus module 10 at a predetermined time and the working status is normal, it can be determined that the autofocus module 10 is working; if the controller 20 does not receive the working status reported by the autofocus module 10 at a predetermined time, or the received working status is abnormal, it can be determined that the autofocus module 10 is not working. It should be noted that the controller 20 can also determine whether the autofocus module 10 is working in other ways, and the above examples do not constitute a limitation on the embodiments of the present application.

[0027] The controller 20 is used to: when the auto-focus module 10 is working, receive the driving signal of the auto-focus module 10, and control the driving module 30 to focus in a first control mode according to the driving signal; when the auto-focus module 10 is not working, control the driving module 30 to focus in a second control mode. The second control mode is different from the first control mode.

[0028] In some embodiments, the controller 20 has a virtual motion axis (e.g., a B_Drive motion axis). In the first control mode, the controller 20 is used to: control the virtual motion axis to perform virtual motion according to the received drive signal, and control the drive module 30 to automatically follow the virtual motion axis to move synchronously for focusing. It should be noted that the virtual motion axis is not an actual motion axis, and can be understood as a motion axis digitally simulated inside the controller 20, which can perform simulated motion under the action of the drive signal, that is, virtual motion, but does not produce actual physical motion.

[0029] In one example, the controller 20 is a drive-control integrated controller with programming function. For example, the controller 20 has a script editing function, and the user can edit the follow command through the script editing function to make the control drive module 30 follow the virtual motion axis of the controller 20 in an automatic follow manner and move synchronously. Therefore, the drive signal of the auto-focus module 20 can realize the control drive module 30 to achieve focusing.

[0030] In some embodiments, in the second control mode, the controller 20 is used to: receive a control signal from an external device and send the control signal to the driving module 30, so that the driving module 30 performs focusing according to the control signal. It can be understood that in the second control mode, the controller 20 may not process the control signal from the external device.

[0031] In one example, the second control method is an Ethernet control automation technology (EtherCAT) control method.

[0032] In some embodiments, reference Figure 2 , Figure 2 A second structural schematic diagram of a focus control system 100 is provided for an embodiment of the present application.

[0033] The focus control system 100 also includes a host computer 40. The host computer 40 is electrically connected to the autofocus module 10 and the controller 20. The host computer 40 is used to generate the above control signal. The host computer 40 can be used for user operation and / or for the user to view various performance parameters, working parameters, working status, etc. of the system. The host computer 40 can generate the above control signal under the operation of the user, for example, when the user operates to focus; the host computer 40 can also be automatically controlled by a program, and the above control signal is generated when the program determines or recognizes that focusing is required.

[0034] In practical applications, the host computer 40 may be a device such as a computer, etc. In one example, the host computer 40 may communicate with the auto-focus module 10 in a RS232 / RS485 communication manner.

[0035] When the auto-focus module 10 is working, the host computer 40 sends a control signal to the auto-focus module 10, and the auto-focus module 10 generates a driving signal according to the control signal. When the auto-focus module 10 is not working, the host computer 40 sends a control signal to the controller 20.

[0036] The overall working process of the focus control system 100 is as follows: The host computer 40 generates a control signal when detecting the user's focusing operation, or judging or identifying that focusing is required. When the autofocus module 10 is working, the host computer 40 sends the control signal to the autofocus module 10; the autofocus module 10 generates a drive signal according to the control signal, and sends the drive signal to the controller 20; the controller 20 controls the virtual motion axis to perform virtual motion according to the received drive signal, and controls the drive module 30 to follow the virtual motion axis in an automatic following manner to move synchronously for focusing. When the autofocus module 10 is not working, the host computer 40 sends the control signal to the controller 20; the controller 20 sends the received control signal to the drive module 30, so that the drive module 30 focuses according to the control signal.

[0037] The focus control system 100 of the embodiment of the present application can control the driving module 30 to focus in two different control modes, that is, controlling the driving module 30 to focus in a first control mode or a second control mode. Therefore, in different focus demand scenarios, even in the scenario where the automatic focus module 10 fails, the driving module 30 can be controlled to focus without the need to disassemble or repair the system. Therefore, the stability of the system can be guaranteed, the ease of use of the system can be improved, and the operating efficiency of the system can also be improved.

[0038] In some embodiments, continue to refer to Figure 2The driving module 30 includes a driver (e.g., Z_Drive) 31 and a motor (e.g., Z_Montor) 32. The driver 31 can drive the motor 32 to move and can also receive feedback signals from the motor 32. The driver 31 includes a driving port and a feedback port, and both the driving port and the feedback port are electrically connected to the motor 32. The driving port is used to drive the motor 32 to move for focusing, and the feedback port is used to receive the movement amount fed back by the motor 32 in real time.

[0039] It is understandable that since the motor 32 can feed back the movement amount to the driver 31 in real time, a closed-loop feedback can be formed. In the process of driving the motor 32 to focus, the driver 31 can adjust the movement amount of the motor 32 according to the real-time feedback signal of the motor 32 to achieve high-precision focusing, thereby improving the focusing accuracy.

[0040] At present, most of the focusing modules on the market use an open-loop system to control the motor to achieve focusing. For example, the WDI, MSG and other focusing modules on the market are open-loop control systems equipped with stepper motors. Taking the MSG focusing module on the market as an example, the laser processor emits a laser beam to detect the surface of the object. The laser receiving module receives the laser signal and transmits it to the controller. The controller generates a control signal and sends it to the driver. The driver controls the stepper motor to focus. Since there is no feedback mechanism between the stepper motor and the driver and controller, it is impossible to determine whether the motor has reached the specified position after the stepper motor executes the movement and stops. It cannot meet the use requirements for occasions with high focusing accuracy requirements, and has a great impact on the detection accuracy of the product. Even in application scenarios such as laser cutting and laser drilling, the offset of the focus will cause direct damage to the product.

[0041] In the focus control system 100 of the embodiment of the present application, the motor 32 can feed back the movement amount to the driver 31 in real time, so the driver 31 can adjust the movement amount of the motor 32 according to the real-time feedback signal of the motor 32, thereby improving the focusing accuracy and solving the problem of insufficient focus alignment and motor movement positioning accuracy.

[0042] The embodiment of the present application further provides a focus control method, which is applied to the focus control system 100 of any of the above embodiments. The focus control method can be executed by the controller 20 of the focus control system 100.

[0043] refer to Figure 3 , Figure 3 A first flow chart of a focus control method provided in an embodiment of the present application. The focus control method includes: 210. Determine whether the auto focus module is working; 220. If the auto-focus module is working, receive a driving signal of the auto-focus module, and control the driving module to focus in a first control mode according to the driving signal; 230. If the auto focus module is not working, control the driving module to focus in a second control mode, where the second control mode is different from the first control mode.

[0044] In some embodiments, reference Figure 4 , Figure 4 A second flow chart of the focus control method provided in an embodiment of the present application.

[0045] Wherein, step 220, controlling the driving module to focus in a first control mode according to the driving signal, includes: 221. Control the virtual motion axis to perform virtual motion according to the drive signal; 222. Control the driving module to follow the virtual motion axis to move synchronously in an automatic following manner to perform focusing.

[0046] In some embodiments, step 230, controlling the driving module to focus in a second control mode, includes: 231. Receive control signals from external devices; 232. Send the control signal to the driving module, so that the driving module performs focusing according to the control signal.

[0047] In some embodiments, the focus control system also includes a host computer, which is used to generate a control signal; when the autofocus module is working, the host computer sends the control signal to the autofocus module, and the autofocus module generates a driving signal according to the control signal; when the autofocus module is not working, the host computer sends the control signal to the controller.

[0048] In some embodiments, the driving module includes a driver and a motor; when the driving module performs focusing, the driver drives the motor to move to perform focusing, and the motor feeds back the movement amount to the driver in real time.

[0049] It can be understood that the specific implementation of each step of the above focus control method can refer to the description of the above focus control system 100, which will not be repeated here.

[0050] In the description of this application, it should be understood that terms such as "first" and "second" are only used to distinguish similar objects and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features.

[0051] The above is a detailed introduction to the focus control method and focus control system provided by the embodiments of the present application. Specific examples are used herein to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the present application. At the same time, for those skilled in the art, according to the ideas of the present application, there will be changes in the specific implementation methods and application scopes. In summary, the content of this specification should not be understood as limiting the present application.

Claims

1. A focus control method, applied to a focus control system, characterized in that: The focus control system comprises an autofocus module, a controller, and a driving module which are electrically connected in sequence; The focus control method comprises: Determining whether the autofocus module is working; If the auto-focus module is working, receiving a driving signal of the auto-focus module, and controlling the driving module to focus in a first control mode according to the driving signal; If the automatic focusing module is not working, the driving module is controlled to focus in a second control mode, and the second control mode is different from the first control mode.

2. The focus control method according to claim 1, characterized in that: The controller has a virtual motion axis, and controlling the driving module to focus in a first control manner according to the driving signal includes: The virtual motion axis is controlled to perform virtual motion according to the driving signal, and the driving module is controlled to follow the virtual motion axis to move synchronously in an automatic following manner to perform focusing.

3. The focus control method according to claim 2, characterized in that: Controlling the driving module to focus in a second control mode includes: A control signal of an external device is received, and the control signal is sent to the driving module, so that the driving module performs focusing according to the control signal.

4. The focus control method according to claim 3, characterized in that: The focus control system further includes a host computer, the host computer is electrically connected to the autofocus module and the controller, and the host computer is used to generate the control signal; When the auto-focus module is working, the host computer sends the control signal to the auto-focus module, and the auto-focus module generates the driving signal according to the control signal; When the automatic focusing module is not working, the host computer sends the control signal to the controller.

5. The focus control method according to any one of claims 1 to 4, characterized in that: The driving module includes a driver and a motor; When the driving module performs focusing, the driver drives the motor to move to perform focusing, and the motor feeds back the movement amount to the driver in real time.

6. A focus control system, characterized in that: It includes an autofocus module, a controller, and a driving module which are electrically connected in sequence, wherein the controller is used for: When the automatic focusing module is working, receiving a driving signal of the automatic focusing module, and controlling the driving module to focus in a first control mode according to the driving signal; When the automatic focusing module is not working, the driving module is controlled to focus in a second control mode, and the second control mode is different from the first control mode.

7. The focus control system according to claim 6, characterized in that: The controller has a virtual motion axis; In the first control mode, the controller is used to: control the virtual motion axis to perform virtual motion according to the driving signal, and control the driving module to follow the virtual motion axis to move synchronously in an automatic following manner to perform focusing.

8. The focus control system according to claim 7, characterized in that: In the second control mode, the controller is used to: receive a control signal from an external device, and send the control signal to the driving module, so that the driving module performs focusing according to the control signal.

9. The focus control system according to claim 8, characterized in that: It also includes a host computer, which is electrically connected to the auto-focus module and the controller, and is used to generate the control signal; When the auto-focus module is working, the host computer sends the control signal to the auto-focus module, and the auto-focus module generates the driving signal according to the control signal; When the automatic focusing module is not working, the host computer sends the control signal to the controller.

10. The focus control system according to any one of claims 1 to 9, characterized in that: The driving module includes a driver and a motor, the driver includes a driving port and a feedback port, and both the driving port and the feedback port are electrically connected to the motor; The driving port is used to drive the motor to move for focusing, and the feedback port is used to receive the movement amount fed back by the motor in real time.

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