Integrally-formed cutter for machining gas distribution disc and machining method

Abstract

The invention belongs to the technical field of machining, and relates to an integrally-formed tool for machining a gas distribution disc and a machining method.The integrally-formed tool comprises a rough machining tool body and a finish machining tool body, and the rough machining tool body and the finish machining tool body each independently comprise a main body part and a tool bit part; the tool bit part of the rough machining tool comprises a spiral drill bit and an inner R angle area; the tool bit part of the finish machining tool comprises a straight groove type drill bit and an inner R angle area. Wherein the designed diameter of the spiral drill bit is smaller than that of the straight groove type drill bit. The integrally-formed cutter provided by the invention can efficiently and accurately machine the gas distribution disc with a special structure, is suitable for the complex condition that the taper hole and the inner R angle exist at the same time, and improves the manufacturing quality and the production efficiency of the gas distribution disc.

Description

Technical Field

[0001] The present invention belongs to the technical field of machining, and relates to a machining method for a gas distribution plate, and particularly to an integral forming tool and a machining method for machining a gas distribution plate. Background Art

[0002] In the field of semiconductor manufacturing, a gas distribution plate is one of the key components in a semiconductor machine tool. Its main function is to evenly distribute gas into the reaction chamber to meet various process requirements in the semiconductor manufacturing process. The machining accuracy and quality of the gas distribution plate directly affect the gas distribution effect, and further affect the yield and production efficiency of semiconductor manufacturing.

[0003] The machining of a gas distribution plate involves holes with various complex structures. These holes not only need to meet specific size and shape requirements, but also need to ensure the surface finish and accuracy of the hole walls. In traditional machining, the machining of tapered holes and R corners are two common technical problems. The machining of tapered holes usually requires the use of special tapered tools, while the machining of R corners requires additional process steps. When these two structures appear in a hole at the same time, the machining difficulty will further increase.

[0004] Traditional machining methods mainly rely on two processes: milling and drilling. Although milling can achieve a certain degree of taper machining, for complex R corner structures, traditional end mills cannot meet the requirements. Drilling has obvious limitations when machining tapered holes with R corners, because traditional drills cannot machine both taper and R corners at the same time. In addition, these two traditional methods are prone to problems such as chip clogging and hairiness of the hole walls during the machining process, affecting the machining quality and efficiency.

[0005] Therefore, how to provide an integral forming tool and a machining method for machining a gas distribution plate, and efficiently and accurately machine a gas distribution plate with special structures has become an urgent problem to be solved by those skilled in the art at present. Summary of the Invention

[0006] Aiming at the deficiencies of the prior art, the purpose of the present invention is to provide an integral forming tool and a machining method for machining a gas distribution plate, which can efficiently and accurately machine a gas distribution plate with special structures, are applicable to complex situations where tapered holes and internal R corners exist at the same time, and improve the manufacturing quality and production efficiency of the gas distribution plate.

[0007] To achieve the purpose of the present invention, the following technical solutions are adopted:

[0008] In a first aspect, the present invention provides an integrally formed tool for machining a gas distribution plate, which includes a rough machining tool and a finish machining tool. The rough machining tool and the finish machining tool each independently include a main body portion and a cutting head portion. The cutting head portion of the rough machining tool includes a spiral drill bit and an inner R corner area; the cutting head portion of the finish machining tool includes a straight flute drill bit and an inner R corner area.

[0009] Among them, the designed diameter of the spiral drill bit is smaller than that of the straight flute drill bit.

[0010] In the present invention, the spiral drill bit is specifically a drill bit with a spiral chip removal design, and the straight flute drill bit is specifically a drill bit with a straight flute chip removal design.

[0011] The integrally formed tool provided by the present invention combines a spiral chip removal design and a straight flute chip removal design. The spiral drill bit significantly improves the machining efficiency during the roughing process, and the spiral chip removal can better guide the metal chips to discharge, avoiding clogging; the straight flute drill bit reduces the scraping area on the hole wall, improves the surface finish of the hole wall during finish machining, avoids phenomena such as hairiness on the inner wall of the hole, and improves the machining quality of the product.

[0012] In addition, both the rough machining tool and the finish machining tool are provided with an inner R corner area, realizing the synchronous machining and forming of the tapered hole and the R corner, significantly improving the machining efficiency, achieving an efficient and precise machining effect, meeting the strict requirements of semiconductor manufacturing for high-precision components, and providing a reliable guarantee for the stable operation of semiconductor machines.

[0013] Preferably, the taper of the spiral drill bit is 120° - 160°, and more preferably 130° - 150°.

[0014] Preferably, the designed diameter of the spiral drill bit is 2.6 - 2.8 mm, and the unilateral allowance ≤ 0.05 mm.

[0015] Preferably, the taper of the straight flute drill bit is 120° - 160°, and more preferably 130° - 150°.

[0016] Preferably, the designed diameter of the straight flute drill bit is 2.7 - 2.9 mm, and the unilateral allowance ≤ 0.05 mm.

[0017] Preferably, the inner fillet radius of the inner R corner area is 1.5 - 2.5 mm.

[0018] Preferably, the taper of the inner R corner area is 40° - 80°.

[0019] Preferably, the diameter of the main body portion of the rough machining tool is 4.6 - 4.8 mm, and the unilateral allowance ≤ 0.1 mm.

[0020] Preferably, the diameter of the main body of the finishing tool is 4.7 - 4.9 mm, and the unilateral allowance is ≤ 0.1 mm.

[0021] Preferably, the finishing tool is provided with an internal cooling structure, and the coolant inlet and outlet of the internal cooling structure are arranged on the main body.

[0022] In a second aspect, the present invention provides a processing method for a gas distribution plate, and the processing method is carried out by using the integrally formed tool as described in the first aspect.

[0023] Preferably, the processing method includes rough machining and finishing machining carried out in sequence.

[0024] Preferably, the rough machining includes: rough machining the bottom straight hole of the gas distribution plate by using a rough machining tool.

[0025] Preferably, the finishing machining includes: machining the taper and R angle of the bottom straight hole by using a finishing tool.

[0026] Preferably, the drill speed of the rough machining is lower than that of the finishing machining.

[0027] Preferably, the feed rate of the rough machining is greater than that of the finishing machining.

[0028] Preferably, the rough machining and the finishing machining are respectively accompanied by cooling treatment.

[0029] Preferably, the cooling treatment includes: spraying coolant onto the machining part.

[0030] In a third aspect, the present invention provides a gas distribution plate obtained by using the processing method as described in the second aspect. The gas distribution plate is provided with a tapered hole running through it, and the edge of the tapered hole is an internal R angle structure.

[0031] Compared with the prior art, the present invention has the following beneficial effects:

[0032] (1) The integrally formed tool provided by the present invention combines a spiral chip removal design and a straight groove chip removal design. The spiral drill significantly improves the machining efficiency during the rough machining process, and the spiral chip removal can better guide the metal chips to be discharged, avoiding blockage; the straight groove drill reduces the scraping area on the hole wall, improves the surface finish of the hole wall during the finishing machining, avoids phenomena such as hairiness on the inner wall of the hole, and improves the machining quality of the product.

[0033] (2) Both the rough machining tool and the finishing machining tool are provided with an internal R angle area, realizing the synchronous machining and forming of the tapered hole and the R angle, significantly improving the machining efficiency, achieving an efficient and precise machining effect, meeting the strict requirements of semiconductor manufacturing for high-precision components, and providing a reliable guarantee for the stable operation of semiconductor machines. Description of the Drawings

[0034] Figure 1 are schematic diagrams of the rough machining tool structures provided in Embodiments 1-3;

[0035] Figure 2 are schematic diagrams of the finish machining tool structures provided in Embodiments 1-3;

[0036] Figure 3 is a schematic cross-sectional view of the gas distribution plate obtained by the machining methods provided in Application Examples 1-3.

[0037] Wherein: 1 - spiral drill bit; 2 - straight flute drill bit; 3 - inner R corner area; 4 - tapered hole; 5 - inner R corner structure; 6 - C corner structure. Detailed implementation manners

[0038] The technical solutions of the present invention will be further described below through specific implementation manners. Those skilled in the art should understand that the described embodiments are only for helping to understand the present invention and should not be regarded as specific limitations on the present invention.

[0039] An embodiment of the present invention provides an integrally formed tool for machining a gas distribution plate, including a rough machining tool and a finish machining tool, and the rough machining tool and the finish machining tool respectively and independently include a main body part and a cutting head part. The cutting head part of the rough machining tool includes a spiral drill bit and an inner R corner area; the cutting head part of the finish machining tool includes a straight flute drill bit and an inner R corner area.

[0040] Wherein, the designed diameter of the spiral drill bit is smaller than that of the straight flute drill bit.

[0041] The integrally formed tool provided by the present invention has both a spiral chip removal design and a straight flute chip removal design. The spiral drill bit in it significantly improves the machining efficiency during rough machining, and the spiral chip removal can better guide the metal chips to be discharged, avoiding blockage; the straight flute drill bit reduces the scraping area on the hole wall, improves the surface finish of the hole wall during finish machining, avoids phenomena such as hairiness on the inner wall of the hole, and improves the machining quality of the product.

[0042] In addition, both the rough machining tool and the finish machining tool are provided with inner R corner areas, realizing the synchronous machining and forming of the tapered hole and the R corner, significantly improving the machining efficiency, achieving an efficient and precise machining effect, meeting the strict requirements of semiconductor manufacturing for high-precision components, and providing a reliable guarantee for the stable operation of semiconductor machines.

[0043] In some embodiments, the taper of the spiral drill bit is 120° - 160°, for example, it can be 120°, 125°, 130°, 135°, 140°, 145°, 150°, 155° or 160°. Further preferably, it is 130° - 150°. However, it is not limited to the listed values, and other unlisted values within this numerical range are equally applicable.

[0044] In some embodiments, the designed diameter of the spiral drill bit is 2.6 - 2.8 mm. For example, it can be 2.6 mm, 2.62 mm, 2.64 mm, 2.66 mm, 2.68 mm, 2.7 mm, 2.72 mm, 2.74 mm, 2.76 mm, 2.78 mm or 2.8 mm. The unilateral allowance ≤ 0.05 mm. For example, it can be 0.01 mm, 0.02 mm, 0.03 mm, 0.04 mm or 0.05 mm. However, it is not limited to the listed values, and other unlisted values within this numerical range are equally applicable.

[0045] In some embodiments, the taper of the straight flute drill bit is 120° - 160°, for example, it can be 120°, 125°, 130°, 135°, 140°, 145°, 150°, 155° or 160°. Further preferably, it is 130° - 150°. However, it is not limited to the listed values, and other unlisted values within this numerical range are equally applicable.

[0046] In some embodiments, the designed diameter of the straight flute drill bit is 2.7 - 2.9 mm. For example, it can be 2.7 mm, 2.72 mm, 2.74 mm, 2.76 mm, 2.78 mm, 2.8 mm, 2.82 mm, 2.84 mm, 2.86 mm, 2.88 mm or 2.9 mm. The unilateral allowance ≤ 0.05 mm. For example, it can be 0.01 mm, 0.02 mm, 0.03 mm, 0.04 mm or 0.05 mm. However, it is not limited to the listed values, and other unlisted values within this numerical range are equally applicable.

[0047] In some embodiments, the inner fillet radius of the inner R - corner area is 1.5 - 2.5 mm. For example, it can be 1.5 mm, 1.6 mm, 1.7 mm, 1.8 mm, 1.9 mm, 2 mm, 2.1 mm, 2.2 mm, 2.3 mm, 2.4 mm or 2.5 mm. However, it is not limited to the listed values, and other unlisted values within this numerical range are equally applicable.

[0048] In some embodiments, the taper of the inner R corner region is 40°-80°, for example, it can be 40°, 45°, 50°, 55°, 60°, 65°, 70°, 75° or 80°, but is not limited to the listed values, and other unlisted values within this numerical range are equally applicable.

[0049] In some embodiments, the diameter of the main body of the roughing tool is 4.6-4.8 mm, for example, it can be 4.6 mm, 4.62 mm, 4.64 mm, 4.66 mm, 4.68 mm, 4.7 mm, 4.72 mm, 4.74 mm, 4.76 mm, 4.78 mm or 4.8 mm, and the unilateral allowance ≤ 0.1 mm, for example, it can be 0.01 mm, 0.02 mm, 0.03 mm, 0.04 mm, 0.05 mm, 0.06 mm, 0.07 mm, 0.08 mm, 0.09 mm or 0.1 mm, but is not limited to the listed values, and other unlisted values within this numerical range are equally applicable.

[0050] In some embodiments, the diameter of the main body of the finishing tool is 4.7-4.9 mm, for example, it can be 4.7 mm, 4.72 mm, 4.74 mm, 4.76 mm, 4.78 mm, 4.8 mm, 4.82 mm, 4.84 mm, 4.86 mm, 4.88 mm or 4.9 mm, and the unilateral allowance ≤ 0.1 mm, for example, it can be 0.01 mm, 0.02 mm, 0.03 mm, 0.04 mm, 0.05 mm, 0.06 mm, 0.07 mm, 0.08 mm, 0.09 mm or 0.1 mm, but is not limited to the listed values, and other unlisted values within this numerical range are equally applicable.

[0051] In some embodiments, the finishing tool is provided with an internal cooling structure, and the coolant inlet and outlet of the internal cooling structure are arranged on the main body.

[0052] A certain embodiment of the present invention also provides a processing method for a gas distribution disk, and the processing method is carried out by using the integrally formed tool described in any of the above embodiments.

[0053] In some embodiments, the processing method includes roughing and finishing carried out in sequence.

[0054] In some embodiments, the roughing includes: using a roughing tool to perform roughing on the bottom straight hole of the gas distribution disk.

[0055] In some embodiments, the finishing includes: using a finishing tool to perform taper and R corner processing on the bottom straight hole.

[0056] The present invention adopts a two-stage processing method of "rough machining + finish machining". First, rough machining is carried out to remove the excess amount, reducing the machining allowance for subsequent finish machining, extending the service life of the forming tool. Then, finish machining is carried out to drill the tapered hole and the R corner, significantly improving the machining efficiency and at the same time improving the drilling effect.

[0057] In some embodiments, the rotational speed of the drill bit for rough machining is lower than that of the drill bit for finish machining.

[0058] In some embodiments, the feed rate for rough machining is greater than that for finish machining.

[0059] In some embodiments, rough machining and finish machining are respectively accompanied by cooling treatment.

[0060] In some embodiments, the cooling treatment includes: spraying a coolant onto the machining site.

[0061] In the present invention, the coolant is a cutting fluid conventionally used in the art, as long as it can achieve the cooling function, so the specific composition of the coolant is not particularly limited herein.

[0062] An embodiment of the present invention further provides a gas distribution plate obtained by using the processing method described in any of the above embodiments. The gas distribution plate is provided with a tapered hole penetrating therethrough, and the edge of the tapered hole is an inner R corner structure.

[0063] The numerical ranges described in the present invention not only include the above-listed point values, but also include any point values between the above numerical ranges not listed. Due to space limitations and for the sake of simplicity, the present invention does not exhaustively list the specific point values included in the ranges.

[0064] Example 1

[0065] This embodiment provides an integrally formed tool for machining a gas distribution plate, including a rough machining tool (see Figure 1 ) and a finish machining tool (see Figure 2 ), and the rough machining tool and the finish machining tool each independently include a main body portion and a tool head portion. Among them, the tool head portion of the rough machining tool includes a spiral drill bit 1 and an inner R corner region 3; the tool head portion of the finish machining tool includes a straight groove drill bit 2 and an inner R corner region 3.

[0066] In this embodiment, the taper α of the spiral drill bit 1 1 is 140°, the designed diameter is 2.7 mm, and the unilateral allowance is 0.03 mm; the taper α of the straight groove drill bit 2 2is 140°, the designed diameter is 2.8 mm, and the single-side allowance is 0.03 mm; the inner fillet radius of the inner R corner area 3 is 2 mm, and the taper β is 60°; the diameter of the main body of the roughing tool is 4.7 mm, and the single-side allowance is 0.05 mm; the diameter of the main body of the roughing tool is 4.8 mm, and the single-side allowance is 0.05 mm; the finishing tool is provided with an internal cooling structure, and the coolant inlet and outlet of the internal cooling structure are arranged on the main body (not shown in the figure).

[0067] Example 2

[0068] This embodiment provides an integrally formed tool for machining a gas distribution plate, including a roughing tool (see Figure 1 ) and a finishing tool (see Figure 2 ), and the roughing tool and the finishing tool each independently include a main body portion and a tool head portion. Among them, the tool head portion of the roughing tool includes a spiral drill bit 1 and an inner R corner area 3; the tool head portion of the finishing tool includes a straight flute drill bit 2 and an inner R corner area 3.

[0069] In this embodiment, the taper α of the spiral drill bit 1 1 is 130°, the designed diameter is 2.6 mm, and the single-side allowance is 0.02 mm; the taper α of the straight flute drill bit 2 2 is 130°, the designed diameter is 2.7 mm, and the single-side allowance is 0.02 mm; the inner fillet radius of the inner R corner area 3 is 1.5 mm, and the taper β is 40°; the diameter of the main body of the roughing tool is 4.6 mm, and the single-side allowance is 0.03 mm; the diameter of the main body of the roughing tool is 4.7 mm, and the single-side allowance is 0.03 mm; the finishing tool is provided with an internal cooling structure, and the coolant inlet and outlet of the internal cooling structure are arranged on the main body (not shown in the figure).

[0070] Example 3

[0071] This embodiment provides an integrally formed tool for machining a gas distribution plate, including a roughing tool (see Figure 1 ) and a finishing tool (see Figure 2 ), and the roughing tool and the finishing tool each independently include a main body portion and a tool head portion. Among them, the tool head portion of the roughing tool includes a spiral drill bit 1 and an inner R corner area 3; the tool head portion of the finishing tool includes a straight flute drill bit 2 and an inner R corner area 3.

[0072] In this embodiment, the taper α of the spiral drill bit 1 1 is 150°, the designed diameter is 2.8 mm, and the single-side allowance is 0.05 mm; the taper α of the straight flute drill bit 2 2The angle is 150°, the designed diameter is 2.9 mm, and the single-sided allowance is 0.05 mm; the inner fillet radius of the inner R-angle area 3 is 2.5 mm, and the taper β is 80°; the diameter of the main body of the roughing tool is 4.8 mm, and the single-sided allowance is 0.1 mm; the diameter of the main body of the roughing tool is 4.9 mm, and the single-sided allowance is 0.1 mm; the finishing tool is provided with an internal cooling structure, and the coolant inlet and outlet of the internal cooling structure are arranged on the main body (not shown in the figure).

[0073] Application Example 1

[0074] In this application example, the integral forming tool provided in Example 1 is used for machining the gas distribution plate, which specifically includes the following steps:

[0075] (1) Roughing: Use a roughing tool to perform roughing on the bottom straight hole of the gas distribution plate, and control the drill speed to be 20000 rpm and the feed rate to be 0.05 mm / r;

[0076] (2) Finishing: Use a finishing tool to perform taper and R-angle machining on the bottom straight hole, and control the drill speed to be 50000 rpm and the feed rate to be 0.02 mm / r;

[0077] (3) C-angle machining: Use a milling cutter to perform C-angle machining on the hole edge to complete the machining of the gas distribution plate.

[0078] In this application example, the roughing, finishing, and C-angle machining are all accompanied by cooling treatment, that is, spraying coolant on the machining part.

[0079] As Figure 3 shown, the gas distribution plate obtained in this application example is provided with a tapered hole 4 running through it, and the edge of the tapered hole 4 is an inner R-angle structure 5 and a C-angle structure 6.

[0080] Application Example 2

[0081] In this application example, the integral forming tool provided in Example 2 is used for machining the gas distribution plate, which specifically includes the following steps:

[0082] (1) Roughing: Use a roughing tool to perform roughing on the bottom straight hole of the gas distribution plate, and control the drill speed to be 40000 rpm and the feed rate to be 0.03 mm / r;

[0083] (2) Finishing: Use a finishing tool to perform taper and R-angle machining on the bottom straight hole, and control the drill speed to be 60000 rpm and the feed rate to be 0.01 mm / r;

[0084] (3) C-angle machining: Use a milling cutter to perform C-angle machining on the hole edge to complete the machining of the gas distribution plate.

[0085] In this application example, rough machining, finish machining, and C-corner machining are all accompanied by cooling treatment, that is, coolant is sprayed onto the machining area.

[0086] As Figure 3 shown, the gas distribution plate obtained in this application example is provided with a tapered hole 4 running through it, and the edge of the tapered hole 4 is an inner R-corner structure 5 and a C-corner structure 6.

[0087] Application Example 3

[0088] In this application example, the integral forming tool provided in Example 3 is used for machining the gas distribution plate, which specifically includes the following steps:

[0089] (1) Rough machining: Use a rough machining tool to perform roughing on the bottom straight hole of the gas distribution plate, and control the drill speed at 10,000 rpm and the feed rate at 0.06 mm / r;

[0090] (2) Finish machining: Use a finish machining tool to perform taper and R-corner machining on the bottom straight hole, and control the drill speed at 30,000 rpm and the feed rate at 0.03 mm / r;

[0091] (3) C-corner machining: Use a milling cutter to perform C-corner machining on the hole edge to complete the machining of the gas distribution plate.

[0092] In this application example, rough machining, finish machining, and C-corner machining are all accompanied by cooling treatment, that is, coolant is sprayed onto the machining area.

[0093] As Figure 3 shown, the gas distribution plate obtained in this application example is provided with a tapered hole 4 running through it, and the edge of the tapered hole 4 is an inner R-corner structure 5 and a C-corner structure 6.

[0094] Thus, it can be seen that the integral forming tool provided by the present invention has both a spiral chip removal design and a straight groove chip removal design. The spiral drill significantly improves the machining efficiency during the roughing process, and the spiral chip removal can better guide the metal chips to be discharged, avoiding blockage; the straight groove drill reduces the scraping area on the hole wall, improves the surface finish of the hole wall during finish machining, avoids phenomena such as hairiness on the inner wall of the hole, and improves the machining quality of the product.

[0095] In addition, both the rough machining tool and the finish machining tool are provided with an inner R-corner area, realizing the synchronous machining and forming of the tapered hole and the R-corner, significantly improving the machining efficiency, achieving an efficient and precise machining effect, meeting the strict requirements of semiconductor manufacturing for high-precision components, and providing a reliable guarantee for the stable operation of semiconductor machines.

[0096] The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention fall within the protection scope and the disclosure scope of the present invention.

Claims

1. An integrated tool for machining a gas distribution plate, comprising a rough machining tool and a fine machining tool, wherein the rough machining tool and the fine machining tool independently comprise a main body and a tool head, wherein: The cutter head of the rough machining tool comprises a spiral drill bit and an inner R angle area; the cutter head of the finishing tool comprises a straight groove drill bit and an inner R angle area; Wherein, the design diameter of the spiral drill bit is smaller than the design diameter of the straight groove drill bit.

2. The one-piece molded tool according to claim 1, characterized in that: The taper of the spiral drill bit is 120°-160°, more preferably 130°-150°; Preferably, the spiral drill bit has a design diameter of 2.6-2.8 mm, and a single-side margin of ≤0.05 mm.

3. The one-piece molded tool according to claim 1 or 2, characterized in that: The taper of the straight groove drill bit is 120°-160°, more preferably 130°-150°; Preferably, the straight groove drill bit has a design diameter of 2.7-2.9 mm, and a single-side margin of ≤0.05 mm.

4. The one-piece molded tool according to any one of claims 1 to 3, characterized in that: The inner fillet radius of the inner R corner area is 1.5-2.5mm; Preferably, the taper of the inner R angle area is 40°-80°.

5. The one-piece molded tool according to any one of claims 1 to 4, characterized in that: The main body diameter of the rough machining tool is 4.6-4.8 mm, and the single-side allowance is ≤0.1 mm; Preferably, the main body diameter of the finishing tool is 4.7-4.9 mm, and the single-side margin is ≤0.1 mm; Preferably, the finishing tool is provided with an internal cooling structure, and the coolant inlet and outlet of the internal cooling structure are arranged on the main body.

6. A method for processing a gas distribution plate, characterized in that: The processing method is carried out using the one-piece forming tool as described in any one of claims 1-5.

7. The processing method according to claim 6, characterized in that: The processing method includes rough processing and fine processing performed sequentially; Wherein, the rough machining comprises: using a rough machining tool to perform rough machining of the bottom straight holes of the gas distribution plate; The finishing process includes: using a finishing tool to perform taper and R angle processing on the bottom straight hole.

8. The processing method according to claim 7, characterized in that: The drill speed of the rough machining is lower than the drill speed of the fine machining; Preferably, the feed rate of the rough machining is greater than the feed rate of the fine machining.

9. The processing method according to claim 7 or 8, characterized in that: The rough machining and the fine machining are respectively accompanied by cooling treatment; Preferably, the cooling process comprises: spraying cooling liquid onto the processing part.

10. A gas distribution plate obtained by the processing method according to any one of claims 6 to 9, characterized in that: The gas distribution plate is penetrated with a tapered hole, and the edge of the tapered hole is an inner R angle structure.

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