Multi-degree-of-freedom cross-scale integrated series precision positioning device

Abstract

The invention discloses a multi-degree-of-freedom cross-scale integrated series precision positioning device which is used for realizing large-stroke and high-positioning-precision operation. Comprising a multi-degree-of-freedom macro space positioning mechanism, a three-degree-of-freedom integrated micro space positioning mechanism and an external corner sensing module. The three-degree-of-freedom integrated micro-space positioning mechanism comprises a base, an X-axis positioning mechanism, a Y-axis positioning mechanism, a Z-axis positioning mechanism and a movable platform, the base is in a tetrahedral shape, the X-axis positioning mechanism and the Y-axis positioning mechanism are located on the two adjacent side faces of the tetrahedral shape respectively, and the other two side faces are of hollowed-out structures; the X-axis positioning mechanism and the Y-axis positioning mechanism are the same in structure, and each of the X-axis positioning mechanism and the Y-axis positioning mechanism is composed of two symmetrically-arranged positioning units. The Z-axis positioning mechanism is arranged at the hollow structure in the quadrangle of the base and comprises a Z-axis driver, a rhombic flexible amplifier and a Z-axis flexible guide module. The device is large in movement range, high in flexibility and high in overall positioning precision, and meter-scale space movement stroke and nano-scale positioning precision can be achieved.

Description

Technical Field

[0001] The present invention belongs to the field of precision positioning and precision manipulation, and particularly relates to a multi-degree-of-freedom cross-scale integrated series precision positioning device. Background Art

[0002] With the increasing requirements for the manipulation and assembly accuracy of heterogeneous, heterogeneous, cross-scale, and weakly rigid micro-parts that make up complex micro-devices such as micro inertial navigation devices and micro targets for laser nuclear fusion, more stringent requirements are imposed on the motion stroke, positioning accuracy, and motion flexibility of precision positioning devices. The cross-scale precision positioning device based on the joint-type positioning mechanism is an effective solution that takes into account large stroke, high precision, and high-flexibility motion. In the existing cross-scale precision positioning devices, the macro-space positioning mechanism used to achieve large stroke and high-flexibility motion adopts an open-loop control scheme, resulting in poor positioning accuracy, which limits the further improvement of the positioning accuracy of the cross-scale precision positioning device. At present, the micro-space positioning mechanism for achieving high-precision motion at the end of the cross-scale precision positioning device is mostly composed of a series combination of multiple precision motion platforms. The precision motion platform adopts a motor-ball screw-guide rail configuration, which is large in volume and mass, and is likely to cause large deformation of the macro-space positioning mechanism, thereby affecting the overall positioning accuracy of the device. In addition, the assembly error caused by the connection between platforms and the micron / sub-micron level positioning accuracy of the motor-ball screw-guide rail configuration precision motion platform itself are another important factors limiting the further improvement of the positioning accuracy of the cross-scale precision positioning device. Therefore, a cross-scale precision positioning device with controllable motion of the macro-space positioning mechanism and no assembly, low mass, and high precision of the micro-space positioning mechanism is an important guarantee for achieving sub-micron or even nano-level manipulation and assembly accuracy of micro-parts.

[0003] In addition, to achieve sub-micron or even nano-level manipulation and assembly accuracy of micro-parts, environmental disturbance becomes an influence that cannot be ignored. However, there is currently no solution considering this influence. Summary of the Invention

[0004] The purpose of the present invention is to provide a multi-degree-of-freedom cross-scale integrated series precision positioning device to achieve operations with large stroke and high positioning accuracy in view of the technical defects existing in the prior art.

[0005] The purpose of the present invention is achieved through the following technical solutions: A multi-degree-of-freedom cross-scale integrated series precision positioning device, comprising a multi-degree-of-freedom macro-space positioning mechanism, a three-degree-of-freedom integrated micro-space positioning mechanism and an external rotation angle sensing module; the three-degree-of-freedom integrated micro-space positioning mechanism is serially installed at the end of the multi-degree-of-freedom macro-space positioning mechanism; the three-degree-of-freedom integrated micro-space positioning mechanism includes a base, an X-axis positioning mechanism, a Y-axis positioning mechanism, a Z-axis positioning mechanism and a moving platform, the base is quadrilateral, the X-axis positioning mechanism and the Y-axis positioning mechanism are respectively located on two adjacent side surfaces of the quadrilateral, and the remaining two side surfaces are hollow structures; the X-axis positioning mechanism and the Y-axis positioning mechanism have the same structure and are both composed of two sets of symmetrically arranged positioning units, each set of the positioning units includes a driver, a four-stage flexible amplifier and a flexible guiding module, the Z-axis positioning mechanism is arranged at the hollow structure inside the quadrilateral of the base and includes a Z-axis driver, a rhombic flexible amplifier and a Z-axis flexible guiding module, the Z-axis driver drives the rhombic flexible amplifier, the output end of the rhombic flexible amplifier is connected to the moving platform through the Z-axis flexible guiding module, and the fixed end of the rhombic flexible amplifier is connected to the base; the external rotation angle sensing module is used to detect the rotation angle of the multi-degree-of-freedom macro-space positioning mechanism to achieve closed-loop control.

[0006] The multi-degree-of-freedom macro-space positioning mechanism is installed on a vibration damping mechanism.

[0007] A multi-degree-of-freedom force sensing module for detecting the contact force between the end effector and the part to be operated is installed on the moving platform of the three-degree-of-freedom integrated micro-space positioning mechanism, and the end effector is installed at the top of the multi-degree-of-freedom force sensing module.

[0008] The four-stage flexible amplifier is composed of a first-stage lever mechanism, a second-stage triangular mechanism, a third-stage lever mechanism and a fourth-stage semi-elliptical mechanism, and the output end of the fourth-stage semi-elliptical mechanism is connected to the moving platform through the flexible guiding module; two sets of wavy flexible leaf springs are arranged between the output end of the fourth-stage semi-elliptical mechanism and the base; two sets of laminated flexible leaf springs are respectively arranged at the tops of the two hollow side surfaces of the three-degree-of-freedom integrated micro-space positioning mechanism.

[0009] The multi-degree-of-freedom macro-space positioning mechanism adopts a joint-type series configuration; the multi-degree-of-freedom macro-space positioning mechanism, the three-degree-of-freedom integrated micro-space positioning mechanism and the end effector are serially connected to form an integrated structure.

[0010] The multi-degree-of-freedom macro-space positioning mechanism is a six-degree-of-freedom macro-space positioning mechanism, including a first joint, a second joint, a first robotic arm, a third joint, a fourth joint, a second robotic arm, a fifth joint, a sixth joint, and a seventh joint connected in sequence. The first joint is installed on the base, and the seventh joint is connected to the base of the three-degree-of-freedom integrated micro-space positioning mechanism through a flange and an adapter plate. The external rotation angle sensing module is a rotation angle sensing sensor respectively arranged outside the first joint, the second joint, the third joint, the fourth joint, the fifth joint, the sixth joint, and the seventh joint.

[0011] The rhombic flexible amplifier is composed of four groups of leaf-shaped flexible hinges arranged obliquely. The Z-axis driver is a piezoelectric ceramic driver installed inside the rhombic flexible amplifier, and both ends of the Z-axis driver are respectively connected to two opposite input ends of the rhombic flexible amplifier.

[0012] The flexible guiding module includes an S-shaped flexible mechanism and X / Y-axis leaf-shaped flexible hinges. The output end of the fourth-level semi-elliptical mechanism is connected to the moving platform through the S-shaped flexible mechanism and X / Y-axis leaf-shaped flexible hinges. The Z-axis flexible guiding module is a Z-axis leaf-shaped flexible hinge, and the output end of the rhombic flexible amplifier is connected to the moving platform through the Z-axis leaf-shaped flexible hinge.

[0013] The damping mechanism includes a top plate, a bottom plate, and a "fold-back" shaped flexible vibration absorption unit arranged between the bottom plate and the top plate. The bottom plate, the top plate, and the "fold-back" shaped flexible vibration absorption unit are of an integrated structure and are manufactured by wire cutting in one piece. The "fold-back" shaped flexible vibration absorption units are distributed parallel to the side length direction of the damping mechanism. Silicone elastic shock-absorbing elements are respectively arranged at the four top corners of the damping mechanism, and the silicone elastic shock-absorbing elements are adhesively connected to the bottom plate and the top plate.

[0014] The pipeline of the end effector and the cables of the drivers in the three-degree-of-freedom integrated micro-space positioning mechanism pass through the interior of the multi-degree-of-freedom macro-space positioning mechanism through the hollow structure of the three-degree-of-freedom integrated micro-space positioning mechanism to avoid entanglement.

[0015] Compared with the prior art, the beneficial effects brought by the technical solution of the present invention are: 1. The multi-degree-of-freedom cross-scale integrated series precision positioning device of the present invention adopts an integrated structure form in which a multi-degree-of-freedom macro-space positioning mechanism, a three-degree-of-freedom integrated micro-space positioning mechanism, and an end effector are connected in series in sequence. The multi-degree-of-freedom macro-space positioning mechanism has a large working space and a fast movement speed, and can realize the large-range and rapid transfer of parts and complete attitude adjustment. The three-degree-of-freedom integrated micro-space positioning mechanism connected in series has three translational degrees of freedom, which are used to compensate for the positioning errors of the multi-degree-of-freedom macro-space positioning mechanism and complete precise operations. The positioning device of the present invention has a large movement range, high flexibility, and high overall positioning accuracy, realizing the controllable movement of the macro-space positioning mechanism and the non-assembly of the micro-space positioning mechanism, providing an important guarantee for realizing the manipulation and assembly accuracy of micro-parts at the sub-micron level or even the nano-level, and can achieve a movement stroke of the meter-level space and a positioning accuracy of the nano-level.

[0016] 2. In the multi-degree-of-freedom cross-scale integrated series precision positioning device of the present invention, the three-degree-of-freedom integrated micro-space positioning mechanism adopts a space integrated structure, in which there are no connecting components between the X-axis positioning mechanism, the Y-axis positioning mechanism, and the Z-axis positioning mechanism, reducing the assembly error and transmission error, effectively improving its movement accuracy, and ensuring its nano-level movement accuracy. At the same time, through the structural design combination of the X-axis positioning mechanism, the Y-axis positioning mechanism, and the Z-axis positioning mechanism, its planar size and height size are effectively reduced, which helps to realize the compactification of the structure of the multi-degree-of-freedom cross-scale integrated series precision positioning device.

[0017] 3. The bottom of the multi-degree-of-freedom cross-scale integrated series precision positioning device of the present invention is provided with a vibration damping mechanism, which can effectively reduce the environmental vibration and the vibration generated by the movement of the six-degree-of-freedom macro-space positioning mechanism, and helps to improve the operation accuracy. There are no connecting elements between the "folded" flexible vibration absorption unit in the vibration damping mechanism and the top plate and bottom plate of the vibration damping mechanism, reducing the influence of the vibration generated by the environment and the movement device itself on the manipulation accuracy of micro-parts.

[0018] 4. The multi-degree-of-freedom cross-scale integrated series precision positioning device of the present invention has strong versatility. By replacing the end effector and modifying the control program, it can realize the picking and placing operations of different parts without changing the body structure of the multi-degree-of-freedom cross-scale integrated series precision positioning device.

[0019] 5. In the three-degree-of-freedom integrated micro-space positioning mechanism of the multi-degree-of-freedom cross-scale integrated series precision positioning device of the present invention, multiple groups of flexible guiding modules are provided in the X-axis positioning mechanism, the Y-axis positioning mechanism, and the Z-axis positioning mechanism to ensure the movement stroke and movement accuracy of the X-axis positioning mechanism, the Y-axis positioning mechanism, and the Z-axis positioning mechanism, and can effectively ensure the movement accuracy of the moving platform.

[0020] 6. In the multi-degree-of-freedom cross-scale integrated series precision positioning device of the present invention, the vibration damping mechanism adopts an integrated structure and is integrally formed by wire cutting processing technology, which can effectively absorb or buffer vibrations.

[0021] 7. In the multi-degree-of-freedom cross-scale integrated series precision positioning device of the present invention, the three-degree-of-freedom integrated micro-space positioning mechanism adopts a hollow structure inside, and there are no structures designed on two sides, which is convenient for wiring. The cables and pipelines of the end effector and the driver of the three-degree-of-freedom integrated micro-space positioning mechanism can pass through this hollow structure inside the multi-degree-of-freedom macro-space positioning mechanism, effectively avoiding the winding phenomenon caused by the external placement of cables and pipelines.

[0022] 8. External corner perception modules are installed outside each joint of the multi-degree-of-freedom macro-space positioning mechanism of the present invention, which can effectively detect the rotation angle of each joint and help improve its motion accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a schematic diagram of the overall structure of the multi-degree-of-freedom cross-scale integrated series precision positioning device of the present invention; Figure 2 is a schematic diagram of the multi-degree-of-freedom macro-space positioning mechanism; Figure 3 is a schematic diagram of the vibration damping mechanism; Figure 4 is a three-dimensional view of the three-degree-of-freedom integrated micro-space positioning mechanism; Figure 5 is a schematic diagram of the three-degree-of-freedom integrated micro-space positioning mechanism; Figure 6 is a schematic diagram of the X-axis positioning mechanism; Figure 7 is a schematic diagram of the Z-axis positioning mechanism; Figure 8 is a schematic diagram of the structure of the end effector part. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0024] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0025] The schematic diagram of the multi-degree-of-freedom cross-scale integrated series precision positioning device of the present invention is as Figure 1-8 shown, including a multi-degree-of-freedom macro-space positioning mechanism 1, a three-degree-of-freedom integrated micro-space positioning mechanism 2 and an external corner perception module 5. The external corner perception module 5 is used to detect the rotation angle of the multi-degree-of-freedom macro-space positioning mechanism 1 to achieve closed-loop control.

[0026] The three-degree-of-freedom integrated micro-space positioning mechanism 2 is serially installed at the end of the multi-degree-of-freedom macro-space positioning mechanism 1 through an adapter plate. The three-degree-of-freedom integrated micro-space positioning mechanism 2 is designed as a three-dimensional structure, and the three-degree-of-freedom integrated micro-space positioning mechanism 2 includes a base 2-9, an X-axis positioning mechanism 2-1, a Y-axis positioning mechanism 2-2, a Z-axis positioning mechanism 2-3, and a moving platform 2-8. The base 2-9 is quadrilateral, the X-axis positioning mechanism 2-1 and the Y-axis positioning mechanism 2-2 are respectively located on two adjacent side surfaces of the quadrilateral, and the remaining two side surfaces are hollow structures.

[0027] The X-axis positioning mechanism 2-1 and the Y-axis positioning mechanism 2-2 have exactly the same structure and are both composed of two sets of symmetrically arranged positioning units. Figure 6 The following is a schematic diagram of the X-axis positioning mechanism. Taking the X-axis positioning mechanism 2-1 as an example, the structure of each set of positioning units will be described in detail: Each set of the positioning units includes a driver 2-1-9, a four-stage flexible amplifier, and a flexible guiding module. In this embodiment, the four-stage flexible amplifier is composed of a first-stage lever mechanism 2-1-1, a second-stage triangular mechanism 2-1-2, a third-stage lever mechanism 2-1-3, and a fourth-stage semi-elliptical mechanism 2-1-4. The output end of the fourth-stage semi-elliptical mechanism 2-1-4 is connected to the moving platform 2-8 through the flexible guiding module. In this embodiment, the specific connection method of the four-stage flexible amplifier is as follows: The first-stage lever mechanism 2-1-1 is connected to the base 2-9 through a first flexible hinge 2-1-5 and is connected to the second-stage triangular mechanism 2-1-2 through a second flexible hinge 2-1-6. The second-stage triangular mechanism 2-1-2 is connected to the third-stage lever mechanism 2-1-3 through a third flexible hinge 2-1-7. The fixed end of the third-stage lever mechanism 2-1-3 is connected to the base 2-9 through a fourth flexible hinge 2-1-8, and the output end of the third-stage lever mechanism 2-1-3 is connected to the input end of the fourth-stage semi-elliptical mechanism 2-1-4. The fourth-stage semi-elliptical mechanism 2-1-4 reverses the motion generated by the first three-stage flexible amplification mechanisms and converts the planar motion (motion within the paper plane) into a spatial motion (motion perpendicular to the paper plane). The moving platform 2-8 is driven by the flexible guiding module to generate a motion in the X-axis direction or the Y-axis direction.

[0028] The schematic diagram of the Z-axis positioning mechanism 2-3 is as Figure 7As shown, the Z-axis positioning mechanism 2-3 is arranged in the hollow structure inside the quadrilateral of the base 2-9 of the three-degree-of-freedom integrated micro-space positioning mechanism 2, thus reducing the structural size of the three-degree-of-freedom integrated micro-space positioning mechanism 2. It includes a Z-axis driver 2-3-4, a rhombic flexible amplifier 2-3-1 and a Z-axis flexible guiding module 2-3-2. The Z-axis driver 2-3-4 drives the rhombic flexible amplifier 2-3-1. The output end of the rhombic flexible amplifier 2-3-1 is connected to the moving platform 2-8 through the Z-axis flexible guiding module 2-3-2, and the fixed end of the rhombic flexible amplifier 2-3-1 is connected to the base 2-9 through a cross beam 2-4. The Z-axis driver 2-3-4 drives the rhombic flexible amplifier 2-3-1, and then drives the moving platform 2-8 to generate a Z-axis movement through the Z-axis flexible guiding module 2-3-2.

[0029] To achieve sub-micron or even nano-level manipulation and assembly accuracy of micro-parts, environmental disturbance becomes an impact that cannot be ignored. In order to avoid the influence of environmental disturbance, in this embodiment, the multi-degree-of-freedom macro-space positioning mechanism 1 is connected to the vibration damping mechanism 3 by bolts, and the vibration damping mechanism 3 is installed on the vibration isolation platform 7.

[0030] Preferably, the base 2-9, the X-axis positioning mechanism 2-1, the Y-axis positioning mechanism 2-2, the Z-axis positioning mechanism 2-3 and the moving platform 2-8 are of a space-solid integrated structure. In order to realize the real-time monitoring of the manipulation force and torque received by the end effector, a multi-degree-of-freedom force sensing module 4 for detecting the contact force between the end effector 6 and the part to be operated is installed on the moving platform 2-8 of the three-degree-of-freedom integrated micro-space positioning mechanism, so as to avoid damage to the micro-parts or the end effector caused by excessive contact force. The multi-degree-of-freedom force sensing module 4 is provided with the end effector 6 at its top. The end effector 6 includes a mounting base 6-2 and an end effector suction head 6-1 mounted on the mounting base, and different types of end effector suction heads 6-1 can be replaced according to different operation objects. The end effector 6 can be a vacuum adsorption type micro-manipulator, a clamping type micro-manipulator, an electromagnetic type micro-manipulator, etc., and various different micro-parts can be picked up by replacing different micro-manipulators.

[0031] To ensure the decoupling performance of the movement of the moving platform, two groups of wavy flexible leaf springs 2-7 are provided between the output end of the fourth-stage semi-elliptical mechanism 2-1-4 and the base 2-9. Two groups of stacked flexible leaf springs 2-6 and 2-5 are respectively provided at the tops of the two hollowed-out sides of the three-degree-of-freedom integrated micro-space positioning mechanism 2 for further eliminating the parasitic displacement of the moving platform 2-8 moving along the X-axis or Y-axis.

[0032] In this embodiment, the multi-degree-of-freedom macro-space positioning mechanism 1 adopts a joint-type series configuration; the multi-degree-of-freedom macro-space positioning mechanism 1, the three-degree-of-freedom integrated micro-space positioning mechanism 2 and the end effector 6 are connected in series to form an integrated structure.

[0033] Among them, the degree of freedom of the multi-degree-of-freedom macro-space positioning mechanism is not less than five degrees of freedom, and the structure of the existing technology can be adopted. In this embodiment, a six-degree-of-freedom macro-space positioning mechanism is taken as an example for illustration: it includes a first joint 1-2, a second joint 1-3, a first robotic arm 1-10, a third joint 1-4, a fourth joint 1-5, a second robotic arm 1-11, a fifth joint 1-6, a sixth joint 1-7 and a seventh joint 1-8 connected in sequence. The first joint 1-2 is installed on the base 1-1, and the seventh joint is connected to the base 2-9 of the three-degree-of-freedom integrated micro-space positioning mechanism through a flange 1-9 and an adapter plate; the external rotation angle sensing module is a rotation angle sensing sensor respectively arranged outside the first joint 1-2, the second joint 1-3, the third joint 1-4, the fourth joint 1-5, the fifth joint 1-6, the sixth joint 1-7 and the seventh joint 1-8. In this embodiment, the rotation angle sensing sensor adopts a circular grating sensor, that is, a first circular grating sensor 5-1 arranged at the first joint, a second circular grating sensor 5-2 arranged at the second joint, a third circular grating sensor 5-3 arranged at the third joint, a fourth circular grating sensor 5-4 arranged at the fourth joint, a circular grating sensor 5-5 arranged at the fifth joint, a sixth circular grating sensor 5-6 arranged at the sixth joint, and a seventh circular grating sensor 5-7 arranged at the seventh joint. The rotation angle sensing sensor is used to detect the rotation angles of the seven joints in the six-degree-of-freedom macro-space positioning mechanism 1 in real time to improve its motion accuracy.

[0034] In this embodiment, the rhombic flexible amplifier 2-3-1 is composed of four groups of leaf-shaped flexible hinges 2-3-3 arranged obliquely; the Z-axis driver 2-3-4 is a piezoelectric ceramic driver and is installed inside the rhombic flexible amplifier 2-3-1, which can increase the compactness of the device structure. The two ends of the Z-axis driver 2-3-4 are respectively connected to two opposite input ends of the rhombic flexible amplifier 2-3-1.

[0035] In this embodiment, the flexible guiding module includes an S-shaped flexible mechanism 2-10 and an X / Y-axis leaf-shaped flexible hinge 2-11. The output end of the fourth-stage semi-elliptical mechanism 2-1-4 is connected to the moving platform 2-8 through the S-shaped flexible mechanism 2-10 and the X / Y-axis leaf-shaped flexible hinge 2-11. The Z-axis flexible guiding module is a Z-axis leaf-shaped flexible hinge 2-3-2, and the output end of the rhombic flexible amplifier 2-3-1 is connected to the moving platform 2-8 through the Z-axis leaf-shaped flexible hinge 2-3-2.

[0036] In this embodiment, the vibration damping mechanism 3 includes a top plate 3-2, a bottom plate 3-1, and a "folded-back" flexible vibration absorption unit 3-3 disposed between the bottom plate and the top plate. The bottom plate 3-1, the top plate 3-2, and the "folded-back" flexible vibration absorption unit 3-3 are of an integral structure and are manufactured by wire cutting in one piece. The "folded-back" flexible vibration absorption units are distributed in parallel along the side length direction of the vibration damping mechanism. Silicone elastic shock-absorbing elements 3-4 are respectively provided at the four top corners of the vibration damping mechanism 3, and the silicone elastic shock-absorbing elements 3-4 are adhesively connected to the bottom plate 3-1 and the top plate 3-2. The bottom plate 3-1 in the vibration damping mechanism 3 is mounted on the vibration isolation platform 7 by means of bolt connection. When the environment vibrates or vibration occurs during the movement of the multi-degree-of-freedom macro-space positioning mechanism 1, the "folded-back" flexible vibration absorption unit 3-3 and the silicone elastic shock-absorbing elements 3-4 absorb or buffer the vibration to ensure the accuracy of the manipulation and assembly of micro-parts at the sub-micron level or even the nano level.

[0037] When the present invention is in use, the multi-degree-of-freedom macro-space positioning mechanism 1 is used to achieve large-range flexible movement in the working space, and is mainly used to quickly transfer multi-variety and small-batch micro-parts from the loading platform to the operation station. The movement accuracy of the multi-degree-of-freedom macro-space positioning mechanism during this movement process is guaranteed by the circular grating sensors installed on each of its joints. After the multi-degree-of-freedom macro-space positioning mechanism stops moving, the three-degree-of-freedom integrated micro-space positioning mechanism 2 is used to compensate for the positioning error of the multi-degree-of-freedom macro-space positioning mechanism. The three-degree-of-freedom integrated micro-space positioning mechanism is driven by a piezoelectric ceramic actuator, and its moving platform obtains a sufficient movement stroke through the amplification of a flexible amplifier. The movement of the moving platform of the three-degree-of-freedom integrated micro-space positioning mechanism along the X-axis, Y-axis, and Z-axis is decoupled by the designed guiding module to ensure its movement accuracy. After the three-degree-of-freedom integrated micro-space positioning mechanism completes high-precision error compensation, the picking and releasing operations of the micro-parts are realized through the end effector. During this process, the multi-degree-of-freedom force sensing module 4 installed between the end effector and the three-degree-of-freedom integrated micro-space positioning mechanism detects the contact force between the two in real time, thereby preventing the micro-parts or the end effector from being damaged due to excessive contact force.

[0038] The multi-degree-of-freedom cross-scale integrated series precision positioning device of the present invention adopts a structural form in which a three-degree-of-freedom integrated micro-space positioning mechanism is connected in series at the end of a multi-degree-of-freedom macro-space positioning mechanism, and can achieve high flexibility and high-precision positioning in a large working space. The multi-degree-of-freedom cross-scale integrated series precision positioning device is integrated with a multi-degree-of-freedom force sensing module, which can avoid damaging micro-parts and end effectors. The three-degree-of-freedom integrated micro-space positioning mechanism is designed as a three-dimensional structure, which can effectively reduce its structural size. The vibration damping mechanism is installed between the multi-degree-of-freedom macro-space positioning mechanism and the vibration isolation platform, and can effectively absorb the environmental vibration and the vibration generated during the movement of the multi-degree-of-freedom macro-space positioning mechanism, thereby improving the operation accuracy.

[0039] Although the preferred embodiments of the present invention have been described above in conjunction with the accompanying drawings, the present invention is not limited to the above specific embodiments. The above specific embodiments are merely illustrative and not restrictive. Under the inspiration of the present invention, those of ordinary skill in the art can also make many forms without departing from the spirit of the present invention and the scope protected by the claims, and all of these fall within the protection scope of the present invention.

[0040] The present invention is not limited to the embodiments described above. The above description of the specific embodiments is intended to describe and illustrate the technical solutions of the present invention. The above specific embodiments are merely illustrative and not restrictive. Without departing from the spirit of the present invention and the scope protected by the claims, those of ordinary skill in the art can also make many specific transformations in form under the inspiration of the present invention, and all of these fall within the protection scope of the present invention.

Claims

1. A multi-degree-of-freedom cross-scale integrated serial precision positioning device, characterized in that: It includes a multi-degree-of-freedom macro-space positioning mechanism, a three-degree-of-freedom integrated micro-space positioning mechanism and an external corner sensing module; the three-degree-of-freedom integrated micro-space positioning mechanism is installed in series at the end of the multi-degree-of-freedom macro-space positioning mechanism; the three-degree-of-freedom integrated micro-space positioning mechanism includes a base, an X-axis positioning mechanism, a Y-axis positioning mechanism, a Z-axis positioning mechanism and a moving platform, the base is a tetrahedron, the X-axis positioning mechanism and the Y-axis positioning mechanism are respectively located on two adjacent side surfaces of the tetrahedron, and the other two side surfaces are hollow structures; the X-axis positioning mechanism and the Y-axis positioning mechanism have the same structure, and both are composed of two symmetrically arranged sets of positioning mechanisms. The multi-degree-of-freedom macro-space positioning mechanism is composed of positioning units, each group of which includes a driver, a four-stage flexible amplifier and a flexible guide module. The Z-axis positioning mechanism is arranged at the hollow structure inside the quadrilateral of the base, and includes a Z-axis driver, a diamond-shaped flexible amplifier and a Z-axis flexible guide module. The Z-axis driver drives the diamond-shaped flexible amplifier, and the output end of the diamond-shaped flexible amplifier is connected to the moving platform through the Z-axis flexible guide module, and the fixed end of the diamond-shaped flexible amplifier is connected to the base; the external angle sensing module is used to detect the rotation angle of the multi-degree-of-freedom macro-space positioning mechanism to achieve closed-loop control.

2. The multi-degree-of-freedom cross-scale integrated serial precision positioning device according to claim 1, characterized in that: The multi-degree-of-freedom macro-space positioning mechanism is installed on the vibration reduction mechanism.

3. The multi-degree-of-freedom cross-scale integrated serial precision positioning device according to claim 1 or 2, characterized in that: The moving platform of the three-degree-of-freedom integrated micro-space positioning mechanism is installed with a multi-degree-of-freedom force sensing module for detecting the contact force between the end effector and the operated part, and the end effector is installed on the top of the multi-degree-of-freedom force sensing module.

4. The multi-degree-of-freedom cross-scale integrated serial precision positioning device according to claim 1, characterized in that: The four-stage flexible amplifier consists of a first-stage lever mechanism, a second-stage triangular mechanism, a third-stage lever mechanism and a fourth-stage semi-elliptical mechanism. The output end of the fourth-stage semi-elliptical mechanism is connected to the moving platform through the flexible guide module; two groups of wavy flexible leaf springs are arranged between the output end of the fourth-stage semi-elliptical mechanism and the base; two groups of stacked flexible leaf springs are respectively arranged at the top of the two hollowed-out side surfaces in the three-degree-of-freedom integrated micro-space positioning mechanism.

5. The multi-degree-of-freedom cross-scale integrated serial precision positioning device according to claim 4, characterized in that: The multi-degree-of-freedom macro-space positioning mechanism adopts an articulated serial configuration; the multi-degree-of-freedom macro-space positioning mechanism, the three-degree-of-freedom integrated micro-space positioning mechanism and the end effector are connected in series to form an integrated structure.

6. The multi-degree-of-freedom cross-scale integrated serial precision positioning device according to claim 5, characterized in that: The multi-degree-of-freedom macro-space positioning mechanism is a six-degree-of-freedom macro-space positioning mechanism, including a first joint, a second joint, a first robotic arm, a third joint, a fourth joint, a second robotic arm, a fifth joint, a sixth joint and a seventh joint connected in sequence, the first joint being mounted on a base, the seventh joint being connected to the base of the three-degree-of-freedom integrated micro-space positioning mechanism through a flange and an adapter plate; the external angle sensing module is an angle sensing sensor respectively arranged on the outside of the first joint, the second joint, the third joint, the fourth joint, the fifth joint, the sixth joint and the seventh joint.

7. The multi-degree-of-freedom cross-scale integrated serial precision positioning device according to claim 1, characterized in that: The diamond-shaped flexible amplifier is composed of four groups of inclined leaf-shaped flexible hinges; the Z-axis driver is a piezoelectric ceramic driver installed inside the diamond-shaped flexible amplifier, and the two ends of the Z-axis driver are respectively connected to the two opposite input ends of the diamond-shaped flexible amplifier.

8. The multi-degree-of-freedom cross-scale integrated serial precision positioning device according to claim 1, characterized in that: The flexible guiding module includes an S-shaped flexible mechanism and an X / Y-axis leaf-shaped flexible hinge, and the output end of the fourth-level semi-elliptical mechanism is connected to the moving platform through the S-shaped flexible mechanism and the X / Y-axis leaf-shaped flexible hinge; the Z-axis flexible guiding module is a Z-axis leaf-shaped flexible hinge, and the output end of the diamond-shaped flexible amplifier is connected to the moving platform through the Z-axis leaf-shaped flexible hinge.

9. The multi-degree-of-freedom cross-scale integrated serial precision positioning device according to claim 2, characterized in that: The vibration reduction mechanism includes a top plate, a bottom plate and a "folded" shaped flexible vibration absorbing unit arranged between the bottom plate and the top plate. The bottom plate, the top plate and the "folded" shaped flexible vibration absorbing unit are an integrated structure, which are manufactured by wire cutting and integrated molding. The "folded" shaped flexible vibration absorbing unit is distributed parallel to the side length direction of the vibration reduction mechanism; silicone elastic shock absorbing elements are respectively provided at the four top corners of the vibration reduction mechanism, and the silicone elastic shock absorbing elements are connected to the bottom plate and the top plate by glue.

10. The multi-degree-of-freedom cross-scale integrated serial precision positioning device according to claim 3, characterized in that: The end effector pipeline and the cables of the driver in the three-degree-of-freedom integrated micro-space positioning mechanism pass through the interior of the multi-degree-of-freedom macro-space positioning mechanism through the hollow structure of the three-degree-of-freedom integrated micro-space positioning mechanism to avoid entanglement.

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