Fault identification system and method based on vibration sensing

Abstract

The invention relates to the technical field of fault recognition systems, in particular to a fault recognition system and method based on vibration sensing, and the system comprises a vibration monitoring module. The system is characterized by further comprising a vibration sensing control module, a gate valve controller module, an alarm signal module, an operation interruption signal module, a data processing and recognition module, a remote monitoring module and an intelligent diagnosis module. The vibration monitoring module internally comprises a vibration sensor; the vibration sensing control module internally comprises a vibration sensing monitoring controller; a gate valve controller is arranged in the gate valve controller module; the alarm signal module internally comprises an alarm signal generation unit; the operation interruption signal module internally comprises a shutdown control system; according to the system, the vibration condition of the drying pump can be monitored in real time, once abnormal vibration is found, an alarm is given or shutdown operation is executed immediately, production line interruption caused by equipment faults is effectively prevented, and early warning prompt can be provided before the faults occur through the intelligent early warning system.

Description

Technical Field

[0001] The present invention relates to the technical field of fault identification systems, and in particular to a fault identification system and method based on vibration sensing. Background Art

[0002] In high-tech industries such as semiconductor manufacturing, LCD, LED, and solar energy, dry pumps play a crucial role. The main function of these pumps is to remove process gases and their by-products during the manufacturing process to maintain a vacuum state in the process chamber. However, as the production process continues, process by-products gradually accumulate and contaminate the internal components of the pump, especially the rotating shaft of the dry pump. This contamination not only reduces the working efficiency of the pump but may also cause unexpected shutdown of the pump, resulting in the interruption of the production line.

[0003] Traditional fault identification systems based on vibration sensing have relatively simple functions and lack intelligent data processing and remote monitoring capabilities. In addition, due to differences in the structure and materials of dry pumps produced by different manufacturers, their vibration characteristics are also different. This makes it necessary to customize the system settings for specific pump models in actual applications, increasing the complexity of system deployment and maintenance.

[0004] Therefore, aiming at the problem that the above traditional fault identification systems often have a single function and lack intelligent data processing and remote monitoring capabilities, a fault identification system and method based on vibration sensing can be designed, which can realize real-time monitoring and early warning of the state of dry pumps and provide an efficient and reliable equipment maintenance solution for high-tech industries such as semiconductor manufacturing. Summary of the Invention

[0005] In order to overcome the problem that traditional fault identification systems often have a single function and lack intelligent data processing and remote monitoring capabilities, resulting in the inability to achieve real-time monitoring and early warning of dry pumps.

[0006] The technical solution of the present invention is: a fault identification system based on vibration sensing, which includes a vibration monitoring module, a vibration perception control module, a valve controller module, an alarm signal module, a running interruption signal module, a data processing and identification module, a remote monitoring module, and an intelligent diagnosis module; wherein, The vibration monitoring module internally includes a vibration sensor for real-time measuring the vibration value of the dry pump and detecting the running state of the pump. The vibration sensor is installed on the gate valve closest to the dry pump; The vibration perception control module internally includes a vibration perception monitoring controller. The vibration sensor transmits vibration data to the vibration perception monitoring controller by wired or wireless means. The vibration perception monitoring controller is used to monitor the signal of the vibration sensor. When abnormal vibration is detected, it issues an alarm or a shutdown instruction and records the vibration data for analysis; Inside the valve controller module, there is a valve controller connected to the vibration perception monitoring controller. After receiving the signal from the vibration perception monitoring controller, the valve controller performs a vacuum cut-off operation; Inside the alarm signal module, there is an alarm signal generation unit. Inside the alarm signal generation unit, there is an alarm signal generator electrically connected to the vibration perception monitoring controller. After comparing the vibration recognition result with the preset threshold by the vibration perception monitoring controller, the alarm signal is sent to the alarm signal generator through a signal line or wirelessly; Inside the operation interruption signal module, there is a shutdown control system connected to the vibration perception monitoring controller. When the vibration value reaches the tripping point, the machine automatically shuts down and cuts off the power supply; Inside the data processing and recognition module, there are a data collection and processing unit and a vibration recognition unit. The data collection and processing unit is used to collect the data of the vibration sensor and perform preprocessing; the vibration recognition unit analyzes the processed data, recognizes the vibration characteristics, and compares them with the preset vibration values; Inside the remote monitoring module, there are a data acquisition unit, a data transmission unit, and a remote analysis unit; inside the data acquisition unit, there is a data collector for real-time acquisition of the vibration data of the dry pump; inside the data transmission unit, there is a data transmission device for transmitting the data; inside the remote analysis unit, there is a remote server; the data collector is connected to the data transmission device by wire or wirelessly; the data transmission device transmits the data to the remote server, and the remote server analyzes and diagnoses the received data to identify the fault type; Inside the intelligent diagnosis module, there are a warning analysis unit and a decision support unit; inside the warning analysis unit, there is an intelligent warning system; the intelligent warning system receives the data from the data processing and recognition module and performs warning analysis on the vibration data of the dry pump according to the preset threshold; the decision support unit provides decision support according to the output of the intelligent warning system.

[0007] Preferably, the vibration monitoring module further includes a data amplifier connected to the vibration sensor, which is used to amplify the weak vibration signal output by the vibration sensor. The vibration sensor is an acceleration sensor with high precision, wide frequency band, and low noise, which is used to measure the high-frequency vibration signal of the dry pump.

[0008] Preferably, the vibration perception control module further includes a storage unit, which is used to store the historical vibration data and analysis results for long-term trend analysis and fault prediction.

[0009] Preferably, the valve controller module further includes an emergency cut-off logic. When the vibration perception monitoring controller detects abnormal vibration and reaches the preset emergency threshold, it immediately performs an emergency vacuum cut-off operation to prevent equipment damage.

[0010] Preferably, the alarm signal generator specifically adopts any one of a buzzer or an indicator light, and the alarm signal module adopts audible and visual alarm, SMS alarm or email alarm.

[0011] Preferably, the data processing and recognition module further includes a machine learning algorithm unit for training a model based on historical vibration data.

[0012] A method for a fault recognition system based on vibration sensing, characterized by including the fault recognition system based on vibration sensing as described above, and the steps are as follows: S1: Vibration monitoring and data transmission 1) The vibration sensor in the vibration monitoring module measures the vibration value of the drying pump in real time and detects the operating state of the pump. It is installed on the gate valve closest to the drying pump to ensure that the vibration signal of the drying pump can be accurately captured; 2) The vibration sensor transmits the vibration data to the vibration perception monitoring controller in the vibration perception control module by wired or wireless means. S2: Vibration signal monitoring and analysis 1) The vibration perception monitoring controller receives the signal from the vibration sensor and monitors it. When abnormal vibration is detected, the vibration perception monitoring controller will issue an alarm or a shutdown instruction; 2) At the same time, the vibration perception monitoring controller will also record the vibration data for subsequent analysis. These data include the amplitude and frequency of the vibration; S3: Gate valve control and vacuum cut-off The gate valve controller in the gate valve controller module is connected to the vibration perception monitoring controller. When the vibration perception monitoring controller detects abnormal vibration and issues an instruction, the gate valve controller will perform a vacuum cut-off operation to prevent further damage to the equipment; S4: Alarm signal generation and transmission The alarm signal generation unit in the alarm signal module receives the alarm signal from the vibration perception monitoring controller. These signals are audible and visual alarm, SMS alarm or email alarm, and the alarm signal generator issues corresponding alarm prompts according to the received signals; S5: Operation interruption and power cut-off When the vibration value of the drying pump reaches the trip point, the shutdown control system in the operation interruption signal module will automatically shut down and cut off the power to prevent the further expansion of the fault; S6: Data processing and vibration recognition 1) The data collection and processing unit in the data processing and recognition module is responsible for collecting the data of the vibration sensor and performing preprocessing. These preprocessing operations include data cleaning and filtering, which can improve the accuracy and reliability of the data; 2) The vibration recognition unit is responsible for analyzing the processed data, identifying vibration characteristics, and comparing them with the preset vibration values. Based on the comparison results, it can determine whether there are faults or potential faults in the drying pump; S7: Remote Monitoring and Fault Diagnosis 1) The data collector in the remote monitoring module continuously collects the vibration data of the drying pump and transmits the data to the remote server through the data transmission device; 2) The remote server analyzes and diagnoses the received data, identifies the fault type, and generates corresponding diagnostic reports, which can help the operators quickly locate and solve the faults; S3: Intelligent Early Warning and Decision Support 1) The early warning analysis unit in the intelligent diagnosis module receives the data from the data processing and recognition module and conducts early warning analysis on the vibration data of the drying pump according to the preset thresholds. When the vibration data exceeds the preset thresholds, the early warning analysis unit will issue an early warning prompt; 2) The decision support unit provides decision support based on the output of the intelligent early warning system to help the operators formulate corresponding maintenance plans or fault handling solutions.

[0013] Advantages of the present invention: This system can continuously monitor the vibration of the drying pump. Once abnormal vibration is detected, it will immediately issue an alarm or perform a shutdown operation, effectively preventing the production line from being interrupted due to equipment failures. Through the intelligent early warning system, early warning prompts can be provided before the occurrence of faults, enabling the operators to have sufficient time to take measures to avoid or reduce losses. When the system detects abnormal vibration and reaches the preset emergency threshold, it can immediately perform an emergency vacuum cut-off operation to prevent further damage to the equipment or the occurrence of safety accidents. The real-time alarm function enables the operators to quickly respond to equipment failures and ensure the safety of the production site. The system integrates multiple modules such as vibration monitoring, data analysis, remote monitoring, and intelligent early warning, realizing the intelligent monitoring and management of the equipment status. The automated shutdown control system and alarm signal generator enable the system to quickly respond to equipment failures without manual intervention. Description of the Drawings

[0014] Figure 1 Shown is the overall framework structure diagram of a fault recognition system and method based on vibration sensing according to the present invention. Detailed Embodiments

[0015] The present invention will be further described below in conjunction with the drawings and embodiments.

[0016] Please refer to Figure 1, the present invention provides an embodiment: The system includes a vibration monitoring module, a vibration perception control module, a valve controller module, an alarm signal module, an operation interruption signal module, a data processing and recognition module, a remote monitoring module, and an intelligent diagnosis module; wherein, The vibration monitoring module internally includes a vibration sensor for measuring the vibration value of the dry pump in real time and detecting the operating state of the pump. The vibration sensor is installed on the gate valve closest to the dry pump. The vibration monitoring module further includes a data amplifier connected to the vibration sensor for amplifying the weak vibration signal output by the vibration sensor. The vibration sensor is an acceleration sensor with high precision, wide frequency band, and low noise, and is used to measure the high-frequency vibration signal of the dry pump; The vibration perception control module internally includes a vibration perception monitoring controller. The vibration sensor transmits vibration data to the vibration perception monitoring controller by wire or wirelessly. The vibration perception monitoring controller is used to monitor the signal of the vibration sensor. When abnormal vibration is detected, it issues an alarm or shutdown instruction, and records the vibration data for analysis. The vibration perception control module further includes a storage unit for storing historical vibration data and analysis results for long-term trend analysis and fault prediction; The valve controller module internally includes a valve controller connected to the vibration perception monitoring controller. The valve controller performs a vacuum cut-off operation after receiving the signal from the vibration perception monitoring controller. The valve controller module further includes an emergency cut-off logic. When the vibration perception monitoring controller detects abnormal vibration and reaches a preset emergency threshold, it immediately performs an emergency vacuum cut-off operation to prevent equipment damage; The alarm signal module internally includes an alarm signal generating unit. The alarm signal generating unit internally is provided with an alarm signal generator electrically connected to the vibration perception monitoring controller. After comparing the vibration recognition result with a preset threshold by the vibration perception monitoring controller, it sends the alarm signal to the alarm signal generator by signal line or wirelessly. The alarm signal generator specifically adopts any one of a buzzer or an indicator light. The alarm signal module adopts audible and visual alarm, SMS alarm, or email alarm; The operation interruption signal module internally includes a shutdown control system connected to the vibration perception monitoring controller. When the vibration value reaches the tripping point, it automatically shuts down and cuts off the power supply; The data processing and recognition module internally includes a data collection and processing unit and a vibration recognition unit. The data collection and processing unit is used to collect the data of the vibration sensor and perform preprocessing; the vibration recognition unit analyzes the processed data, identifies the vibration characteristics, and compares them with the preset vibration value. The data processing and recognition module further includes a machine learning algorithm unit for training a model based on historical vibration data; The remote monitoring module internally includes a data acquisition unit, a data transmission unit, and a remote analysis unit; the data acquisition unit is internally equipped with a data collector for real-time acquisition of the vibration data of the drying pump; the data transmission unit is internally equipped with a data transmission device for transmitting data; the remote analysis unit is internally equipped with a remote server; the data collector is connected to the data transmission device by wired or wireless means; the data transmission device transmits the data to the remote server, and the remote server analyzes and diagnoses the received data to identify the fault type; The intelligent diagnosis module internally includes a warning analysis unit and a decision support unit; the warning analysis unit is internally equipped with an intelligent warning system; the intelligent warning system receives data from the data processing and recognition module and performs warning analysis on the vibration data of the drying pump according to a preset threshold; the decision support unit provides decision support based on the output of the intelligent warning system.

[0017] A method for a fault identification system based on vibration sensing, characterized by including the fault identification system based on vibration sensing as described above, and the steps are as follows: S1: Vibration monitoring and data transmission 1) The vibration sensor in the vibration monitoring module measures the vibration value of the drying pump in real time and detects the operating state of the pump. It is installed on the gate valve closest to the drying pump to ensure that the vibration signal of the drying pump can be accurately captured; 2) The vibration sensor transmits the vibration data to the vibration perception monitoring controller in the vibration perception control module by wired or wireless means; S2: Vibration signal monitoring and analysis 1) The vibration perception monitoring controller receives the signal from the vibration sensor and monitors it. When abnormal vibration is detected, the vibration perception monitoring controller will issue an alarm or shutdown instruction; 2) At the same time, the vibration perception monitoring controller will also record the vibration data for subsequent analysis. These data include the amplitude and frequency of the vibration; S3: Gate valve control and vacuum cut-off The gate valve controller in the gate valve controller module is connected to the vibration perception monitoring controller. When the vibration perception monitoring controller detects abnormal vibration and issues an instruction, the gate valve controller will perform a vacuum cut-off operation to prevent further damage to the equipment; S4: Alarm signal generation and transmission The alarm signal generation unit in the alarm signal module receives the alarm signal from the vibration perception monitoring controller. These signals are acoustic-optical alarms, SMS alarms, or email alarms, and the alarm signal generator issues corresponding alarm prompts according to the received signals; S5: Operation interruption and power cut-off When the vibration value of the dry pump reaches the tripping point, the shutdown control system in the operation interruption signal module will automatically shut down the pump and cut off the power supply to prevent the further expansion of the fault; S6: Data processing and vibration identification 1) The data collection and processing unit in the data processing and identification module is responsible for collecting the data of the vibration sensor and performing preprocessing. These preprocessing operations include data cleaning and filtering, which can improve the accuracy and reliability of the data; 2) The vibration identification unit is responsible for analyzing the processed data, identifying the vibration characteristics, and comparing them with the preset vibration values. Through the comparison results, it can be judged whether there are faults or potential faults in the dry pump; S7: Remote monitoring and fault diagnosis 1) The data collector in the remote monitoring module real-time collects the vibration data of the dry pump and transmits the data to the remote server through the data transmission device; 2) The remote server analyzes and diagnoses the received data, identifies the fault type, and generates corresponding diagnostic reports. These reports can help the operators quickly locate and solve the faults; S3: Intelligent early warning and decision support 1) The early warning analysis unit in the intelligent diagnosis module receives the data from the data processing and identification module and performs early warning analysis on the vibration data of the dry pump according to the preset threshold. When the vibration data exceeds the preset threshold, the early warning analysis unit will issue an early warning prompt; 2) The decision support unit provides decision support according to the output of the intelligent early warning system to help the operators formulate corresponding maintenance plans or fault handling schemes.

Claims

1. A fault identification system based on vibration sensing, the system comprising a vibration monitoring module; characterized in that: It also includes a vibration sensing control module, a gate valve controller module, an alarm signal module, an operation interruption signal module, a data processing and identification module, a remote monitoring module and an intelligent diagnosis module; among which, The vibration monitoring module includes a vibration sensor that measures the vibration value of the dry pump in real time and detects the operating status of the pump. The vibration sensor is installed on the gate valve closest to the dry pump. The vibration sensing control module includes a vibration sensing monitoring controller, and the vibration sensor transmits vibration data to the vibration sensing monitoring controller via wired or wireless means; The gate valve controller module includes a gate valve controller connected to the vibration sensing monitoring controller. The gate valve controller performs a vacuum cut-off operation after receiving a signal from the vibration sensing monitoring controller. The alarm signal module includes an alarm signal generating unit, and the alarm signal generating unit is provided with an alarm signal generator electrically connected to the vibration sensing monitoring controller; The operation interruption signal module includes a shutdown control system connected to the vibration sensing monitoring controller. When the vibration value reaches the trip point, the machine will automatically shut down and cut off the power supply. The data processing and identification module includes a data collection and processing unit and a vibration identification unit; the data collection and processing unit is used to collect vibration sensor data; the vibration identification unit analyzes the processed data, identifies vibration characteristics, and compares them with preset vibration values; The remote monitoring module includes a data acquisition unit, a data transmission unit and a remote analysis unit; the data acquisition unit is provided with a data collector for collecting vibration data of the drying pump in real time; the data transmission unit is provided with a data transmission device for transmitting data; the remote analysis unit is provided with a remote server; The intelligent diagnosis module includes an early warning analysis unit and a decision support unit; the early warning analysis unit is equipped with an intelligent early warning system.

2. The fault identification system based on vibration sensing according to claim 1, characterized in that: The vibration monitoring module also includes a data amplifier connected to the vibration sensor, which is used to amplify the weak vibration signal output by the vibration sensor. The vibration sensing monitoring controller is used to monitor the signal of the vibration sensor. When abnormal vibration is detected, an alarm or a shutdown command is issued, and the vibration data is recorded for analysis. The vibration sensor is an acceleration sensor with high precision, wide bandwidth and low noise, which is used to measure the high-frequency vibration signal of the dry pump.

3. The fault identification system based on vibration sensing according to claim 1, characterized in that: The vibration sensing control module also includes a storage unit for storing historical vibration data and analysis results, and performing long-term trend analysis and fault prediction.

4. The fault identification system based on vibration sensing according to claim 1, characterized in that: The gate valve controller module also includes emergency cut-off logic. When the vibration sensing monitoring controller detects abnormal vibration and reaches the preset emergency threshold, it immediately performs an emergency vacuum cut-off operation to prevent equipment damage.

5. The fault identification system based on vibration sensing according to claim 1, characterized in that: After comparing the vibration recognition result with the preset threshold, the vibration sensing monitoring controller sends the alarm signal to the alarm signal generator through a signal line or wirelessly. The alarm signal generator specifically uses any one of a buzzer or an indicator light, and the alarm signal module uses sound and light alarm, SMS alarm or email alarm.

6. The fault identification system based on vibration sensing according to claim 1, characterized in that: The data processing and recognition module also includes a machine learning algorithm unit for training a model based on historical vibration data.

7. The fault identification system based on vibration sensing according to claim 1, characterized in that: The data transmission device in the remote monitoring module transmits data to the remote server, and the remote server analyzes and diagnoses the received data and identifies the fault type. The data collector is connected to the data transmission device via wired or wireless means.

8. The fault identification system based on vibration sensing according to claim 1, characterized in that: The intelligent early warning system receives data from the data processing and identification module, performs early warning analysis on the vibration data of the dry pump according to a preset threshold, and the decision support unit provides decision support based on the output of the intelligent early warning system.

9. A method for fault identification system based on vibration sensing, characterized in that The vibration sensing-based fault identification system according to claim 1-8 comprises the following steps: S1: Vibration monitoring and data transmission 1) The vibration sensor in the vibration monitoring module measures the vibration value of the dry pump in real time and detects the operating status of the pump. It is installed on the gate valve closest to the dry pump to ensure that the vibration signal of the dry pump can be accurately captured; 2) The vibration sensor transmits the vibration data to the vibration sensing monitoring controller in the vibration sensing control module by wired or wireless means; S2: Vibration signal monitoring and analysis 1) The vibration sensing monitoring controller receives the signal from the vibration sensor and monitors it. When abnormal vibration is detected, the vibration sensing monitoring controller will issue an alarm or a shutdown command; 2) At the same time, the vibration sensing monitoring controller will also record vibration data for subsequent analysis, including vibration amplitude and frequency; S3: Gate valve control and vacuum cut-off The gate valve controller in the gate valve controller module is connected to the vibration sensing monitoring controller. When the vibration sensing monitoring controller detects abnormal vibration and issues a command, the gate valve controller will perform a vacuum cut-off operation to prevent further damage to the equipment. S4: Alarm signal generation and transmission The alarm signal generating unit in the alarm signal module receives the alarm signals from the vibration sensing monitoring controller, which are sound and light alarms, SMS alarms or email alarms, and the alarm signal generator issues corresponding alarm prompts according to the received signals; S5: Operation interruption and power cut-off When the vibration value of the dry pump reaches the trip point, the shutdown control system in the operation interruption signal module will automatically shut down and cut off the power supply to prevent the fault from further expanding; S6: Data processing and vibration identification 1) The data collection and processing unit in the data processing and identification module is responsible for collecting the data from the vibration sensor and performing preprocessing. These preprocessing operations include data cleaning and filtering, which can improve the accuracy and reliability of the data; 2) The vibration identification unit is responsible for analyzing the processed data, identifying the vibration characteristics, and comparing them with the preset vibration values. Through the comparison results, it can be determined whether the dry pump has a fault or potential fault; S7: Remote monitoring and fault diagnosis 1) The data collector in the remote monitoring module collects the vibration data of the dry pump in real time and transmits the data to the remote server through the data transmission device; 2) The remote server analyzes and diagnoses the received data, identifies the fault type, and generates corresponding diagnostic reports, which can help operators quickly locate and solve the fault; S3: Intelligent early warning and decision support 1) The early warning analysis unit in the intelligent diagnosis module receives data from the data processing and identification module, and performs early warning analysis on the vibration data of the dry pump according to the preset threshold value. When the vibration data exceeds the preset threshold value, the early warning analysis unit will issue an early warning prompt; 2) The decision support unit provides decision support based on the output of the intelligent early warning system to help operators develop corresponding maintenance plans or fault handling solutions.

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