Ceramic electrostatic chuck with heating function

Abstract

The present invention provides a ceramic electrostatic chuck with a heating function, comprising an electrostatic chuck body provided with a base; an inner cavity provided within the base, wherein a plurality of evenly distributed heating plates are provided within the base; a lifting mechanism including a driving portion and a lifting column; a rotating mechanism connected to the bottom surface of the heating plates and mounted on the lifting mechanism; an installation mechanism including an insert connected to the bottom of the lifting mechanism and locking assemblies provided on both sides of the insert, the insert being matingly connected to an insert groove provided at the bottom of the base, and the locking assemblies being plugged into locking holes provided on both sides of the insert groove; and an unlocking portion provided below the lifting column. Zoned heating can be achieved by using a plurality of heating plates, and the heating plates can be driven to rotate by the rotating mechanism, thereby facilitating uniform heating within the zone. Furthermore, the installation mechanism allows the heating plates, the lifting mechanism, and the rotating mechanism to be disassembled and maintained.

Description

Technical Field

[0001] The present invention relates to the field of electrostatic chucks, in particular to a ceramic electrostatic chuck with a heating function. Background Art

[0002] Ceramic electrostatic chucks are devices that use static electricity to attract and secure objects. They are widely used in various fields, especially in the semiconductor manufacturing industry.

[0003] At present, electrostatic chucks in the prior art are often provided with a resistance heating structure, which is evenly distributed inside the electrostatic chuck. When the electrostatic chuck is heated, only the entire chuck is heated, and no zoned heating is performed. As a result, different areas on the electrostatic chuck cannot be heated and regulated according to specific conditions. At the same time, the heating structure is installed inside the electrostatic chuck, which is not easy to detach and remove. After long-term use, it may be damaged or malfunction, making it inconvenient to maintain, repair or replace. Summary of the Invention

[0004] In order to solve the technical problems that the electrostatic chuck cannot be heated and temperature controlled in different zones and the heating structure is not easy to remove and maintain, the present invention provides a ceramic electrostatic chuck with a heating function.

[0005] The present invention solves the above technical problems through the following technical solutions:

[0006] The present invention provides a ceramic electrostatic chuck with a heating function, comprising an electrostatic chuck body, wherein the electrostatic chuck body is provided with a base; further comprising: an inner cavity, wherein the inner cavity is provided in the base, and a plurality of evenly distributed heating plates are provided in the base; a lifting mechanism, wherein the lifting mechanism comprises a driving part and a lifting column, wherein the driving part is used to drive the lifting column to move up and down; a rotating mechanism, wherein the rotating mechanism is connected to the bottom surface of the heating plate and the rotating mechanism is installed on the lifting mechanism; and a mounting mechanism, wherein the mounting mechanism comprises an insert connected to the bottom of the lifting mechanism and locking assemblies arranged on both sides of the insert, wherein the insert is locked with the opening The embedding groove at the bottom of the base is matched with the locking assembly, and the locking assembly is plugged into the locking holes on both sides of the embedding groove; the locking assembly has an unlocking part arranged under the lifting column, and the unlocking part is pressed down by the lifting column to unlock the locking assembly; the heat conducting plate, the heat conducting plate can move up and down, and the heat conducting plate is arranged above the heating plate, and the heat conducting plate is elastically connected to the top surface of the inner cavity; the heat dissipation fan, the heat dissipation fan is installed to the side of the base, and the inner side port of the heat dissipation fan is connected to the inner cavity, and a dustproof net is arranged on the outside of the heat dissipation fan; the cleaning mechanism, the cleaning mechanism is arranged on the dustproof net, and the input end of the cleaning mechanism is connected to the heat conducting plate.

[0007] In this technical solution, zoned heating can be achieved through several heating plates, and the heating plates can be driven to rotate by a rotating mechanism, which facilitates uniform heating within the area. Through the installation mechanism, the heating plates, lifting mechanism and rotating mechanism can be disassembled and maintained.

[0008] Preferably, the rotating mechanism includes a telescopic rod, the top end of the telescopic rod is fixedly connected to a second rotating column, and the top end of the second rotating column is fixedly connected to the bottom surface of the heating plate, the second rotating column is rotatably connected to the top end of the lifting column, and the bottom end of the telescopic rod is connected to a second motor.

[0009] In this technical solution, the rotating mechanism is used to drive the heating plate to rotate.

[0010] Preferably, the heat conducting plate is provided with a plurality of evenly distributed heat conducting sub-sheets, and each heat conducting sub-sheet is located above a corresponding heating sheet.

[0011] In this technical solution, several heat-conducting sub-sheets conduct heat in different zones.

[0012] Preferably, the locking assembly includes a locking block; the locking block is slidably connected to a first guide hole provided on a side wall of the insert block; an inner groove is provided in the insert block, and the unlocking portion is installed in the inner groove.

[0013] Preferably, the unlocking part includes a first wedge block and a second wedge block; the first wedge block is fixedly connected to a connecting frame, the connecting frame is fixedly connected to one end of the locking block located in the inner groove, the inclined surface on the first wedge block is in contact with the inclined surface on the second wedge block, the top of the second wedge block is fixedly connected to a pressure rod, and the top of the insert block is provided with a second guide hole that is connected to the top of the inner groove and provides a guide for the pressure rod, and the top end of the pressure rod is located below the lifting column.

[0014] Preferably, one side of the first wedge block is elastically connected to a side wall of the inner groove through a second spring, a concave hole is provided on the top surface of the inner groove, a third spring is provided in the concave hole, and the pressure rod is elastically connected to the top surface of the concave hole through the third spring.

[0015] In this technical solution, the locking assembly is used to lock the insert during installation.

[0016] Preferably, the cleaning mechanism includes a protective shell, which is fixedly mounted on the outer wall of the base, and a connecting groove is provided between the protective shell and the inner cavity, a connecting strip is vertically slidably installed in the connecting groove, one end of the connecting strip is fixedly connected to the heat conduction plate, and the other end of the connecting strip is connected to a transmission part provided in the protective shell, the output end of the transmission part is connected to a cleaning brush, and the cleaning brush is in contact with the dustproof net.

[0017] Preferably, the transmission part includes a second rack; the second rack is fixedly connected to the end of the connecting bar, the second rack is meshed with the first cylindrical gear, the middle part of the first cylindrical gear is fixedly connected to the first rotating shaft, and the first rotating shaft is rotatably installed in the protective shell, the first rotating shaft is fixedly connected to the first bevel gear, the first bevel gear is meshed with the second bevel gear, the second bevel gear is fixedly connected to the second rotating shaft, the second rotating shaft is rotatably installed in the protective shell, the bottom end of the second rotating shaft extends outside the protective shell, and the bottom end of the second rotating shaft is fixedly connected to the second cylindrical gear, the second cylindrical gear is meshed with the first rack, and the first rack is fixed to the cleaning brush through a connecting rod.

[0018] Preferably, the connecting rod is fixed with a guide sleeve, a guide column is installed above the dustproof net, and the guide sleeve is slidably sleeved on the guide column.

[0019] In this technical solution, the cleaning mechanism is used to clean the dustproof net.

[0020] Preferably, it also includes a wiring mechanism; the wiring mechanism includes an insulating ring, a conductive ring is provided on the inner ring of the insulating ring, the conductive ring is coaxially arranged with the circular sleeve, a hard wire is fixed to the bottom end of the circular sleeve, and the hard wire is connected to a conductive slide, the conductive slide is slidably installed on the conductive ring, a soft wire is provided in the circular sleeve, and the heating plate is connected to the hard wire through the soft wire.

[0021] On the basis of conforming to the common sense in this field, the above-mentioned preferred conditions can be arbitrarily combined to obtain the preferred embodiments of the present invention.

[0022] The positive progress effect of the present invention is:

[0023] The ceramic electrostatic chuck with heating function proposed above adopts several independent heating plates to provide independent heating for different areas of the electrostatic chuck, thereby realizing zoned heating temperature control. At the same time, the heating plates are connected to the lifting mechanism, which drives the heating plates to fit and press tightly with the heat-conducting plate, and the heat-conducting plate to fit and press tightly with the top surface of the inner cavity, so that heat is transferred to the electrostatic chuck body during heating. After heating, the lifting mechanism drives the heating plates to separate from the heat-conducting plate, and the heat-conducting plate to separate from the top surface of the inner cavity, thereby avoiding the heating plates, the heat-conducting plate and the top surface of the inner cavity from being compressed in a non-heating state, and preventing damage caused by long-term compression. Furthermore, a rotating mechanism is provided to make the heating plates The heat plate rotates to facilitate the uniform transfer of heat to the area to be heated; further, an installation mechanism is provided, and the locking part in the installation mechanism is powered by the lifting column in the lifting mechanism to achieve unlocking or re-locking, which provides convenience for the disassembly and assembly of the installation mechanism, and facilitates the removal of the installation mechanism from the base, thereby facilitating the inspection and maintenance of the components thereon; a heat dissipation fan is provided to provide rapid heat dissipation and cooling for the electrostatic suction cup after heating, and a cleaning mechanism is provided on the dustproof net of the heat dissipation fan for cleaning, and the cleaning mechanism is connected to the heat conducting plate, and is driven by the up and down movement of the heat conducting plate, so that the cleaning mechanism runs automatically for cleaning, so that the cleaning mechanism does not require external power and control. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic structural diagram of the present invention as a whole.

[0025] Figure 2 It is a schematic diagram of the structure inside the base of the present invention.

[0026] Figure 3 For the present invention Figure 2 Schematic diagram of the structure with the A part in the middle enlarged.

[0027] Figure 4 It is a structural schematic diagram of the heat dissipation fan, heat conduction plate and cleaning mechanism of the present invention.

[0028] Figure 5 It is a structural schematic diagram of the cleaning mechanism of the present invention.

[0029] Figure 6 Schematic diagram of the distribution structure of the heating plate of the present invention.

[0030] Figure 7 It is a structural schematic diagram of the lifting mechanism, installation mechanism and rotation mechanism of the present invention.

[0031] Figure 8 It is a structural schematic diagram of the bottom end of the mounting mechanism and the lifting mechanism of the present invention.

[0032] Figure 9 For the present invention Figure 8 Schematic diagram of the structure with the B part enlarged.

[0033] Figure 10 It is a structural schematic diagram below the worm gear of the present invention.

[0034] Figure 11 For the present invention Figure 10 Schematic diagram of the structure with the C part enlarged.

[0035] Figure 12 Schematic diagram of the distribution structure of the thermal conductive sub-sheet of the present invention.

[0036] Description of Reference Numerals

[0037] In the figure: 1. Electrostatic chuck body; 101. Base; 102. Inner cavity; 103. Guide groove; 104. Bottom groove; 2. Cooling fan; 3. Heat conducting plate; 301. Movable column; 302. First spring; 303. Heat conducting plate; 4. Lifting mechanism; 401. Guide cylinder; 402. Lifting column; 403. Threaded column; 404. Threaded hole; 405. Protective cover; 406. First motor; 407. First rotating column; 408. Worm; 409. Worm gear; 5. Heating plate; 6. Dust screen; 7. Cleaning mechanism; 701. Connecting bar; 702. Protective shell; 703. First rack; 704. Connecting rod; 705. Cleaning brush; 706. Guide column; 707. Guide sleeve; 708. Second rack; 709. First rotating shaft ;710, first cylindrical gear;711, first bevel gear;712, second bevel gear;713, second rotating shaft;714, second cylindrical gear;8, mounting mechanism;801, insert;802, pressure rod;803, locking block;804, first guide hole;805, connecting frame;806, first wedge block;807, second spring;808, second wedge block;809, second guide hole;810, third spring;811, concave hole;812, inner groove;813, block seat;9, rotating mechanism;901, circular sleeve;902, prism;903, second rotating column;904, second motor;10, wiring mechanism;1001, insulating ring;1002, conductive circular ring;1003, hard wire;1004, conductive slide. DETAILED DESCRIPTION

[0038] The present invention is further described below by way of examples, but the present invention is not limited to the scope of the examples.

[0039] like Figure 1-12 As shown, a ceramic electrostatic chuck with a heating function includes an electrostatic chuck body 1, wherein the electrostatic chuck body 1 is provided with a base 101; and further includes:

[0040] An inner cavity 102, wherein the inner cavity 102 is disposed in the base 101, and a plurality of evenly distributed heating plates 5 are disposed in the base 101;

[0041] A lifting mechanism 4, comprising a driving unit and a lifting column 402, wherein the driving unit is used to drive the lifting column 402 to move up and down;

[0042] A rotating mechanism 9, the rotating mechanism 9 is connected to the bottom surface of the heating plate 5, and the rotating mechanism 9 is installed on the lifting mechanism 4;

[0043] The mounting mechanism 8 includes an insert 801 connected to the bottom of the lifting mechanism 4 and locking assemblies provided on both sides of the insert 801. The insert 801 is engaged with a slot provided in the bottom of the base 101, and the locking assemblies are plugged into the lock holes provided on both sides of the slot. The locking assembly has an unlocking portion provided below the lifting column 402. The unlocking portion is pressed downward by the lifting column 402 to unlock the locking assembly.

[0044] The heat conducting plate 3 is movable up and down, and is disposed above the heating plate 5 , and is elastically connected to the top surface of the inner cavity 102 ;

[0045] A cooling fan 2 is mounted on the side of the base 101 , with the inner opening of the cooling fan 2 communicating with the inner cavity 102 , and a dust screen 6 is provided on the outer side of the cooling fan 2 ;

[0046] The cleaning mechanism 7 is provided on the dustproof net 6 , and an input end of the cleaning mechanism 7 is connected to the heat conducting plate 3 .

[0047] The length of the heating plate 5 is smaller than the width of the embedding block 801 , so that the heating plate 5 can be taken out from the embedding groove.

[0048] like Figure 7-Figure 8 As shown in the figure, as a specific technical solution, the lifting mechanism 4 also includes a guide cylinder 401 and a protective cover 405; the bottom end of the guide cylinder 401 is fixedly connected to the top surface of the insert 801, and the guide cylinder 401 is connected with the lifting column 402 with a clearance fit. A threaded hole 404 with an open bottom end and a closed top end is provided in the lifting column 402 along the length direction. The threaded hole 404 is threadedly connected to a threaded column 403. The bottom end of the threaded column 403 is fixedly connected to a first rotating column 407, and the first rotating column 407 is fixedly connected to the first rotating column 407. 07 is rotatably connected to the middle part of the insert 801, the protective cover 405 is fixedly installed to the bottom surface of the insert 801, the first rotating column 407 extends into the protective cover 405, and the bottom end of the first rotating column 407 is fixedly sleeved with a worm gear 409, the worm gear 409 is meshedly connected with a worm 408, and the worm 408 is rotatably installed in the protective cover 405, and a first motor 406 is fixedly installed on the outer wall of the protective cover 405, and the output end of the first motor 406 is fixedly connected to the end of the worm 408.

[0049] The first motor 406 drives the worm 408 to rotate, and the meshing transmission between the worm 408 and the worm wheel 409 causes the first rotating column 407 and the threaded column 403 to rotate together. The threaded column 403 is screwed with the threaded hole 404 on the lifting column 402, and the lifting column 402 is guided by the guide cylinder 401, so that the lifting column 402 moves up and down to achieve lifting.

[0050] like Figure 7-Figure 8 As shown in the figure, as a specific technical solution, the rotating mechanism 9 includes a telescopic rod, the top of which is fixedly connected to a second rotating column 903, and the top of the second rotating column 903 is fixedly connected to the bottom surface of the heating plate 5. The second rotating column 903 is rotatably connected to the top of the lifting column 402, and the bottom end of the telescopic rod is connected to a second motor 904. The telescopic rod is composed of a circular sleeve 901 and a prism 902. The circular sleeve 901 is provided with a hole along the axis that is clearance-matched with the prism 902. The threaded column 403 is provided with a circular hole along the axis. The circular hole passes through the axis of the first rotating column 407 and the middle of the worm gear 409. The circular sleeve 901 is clearance-fitted into the circular hole, and the bottom end of the circular sleeve 901 is rotatably connected to the bottom inner wall of the protective cover 405. The second motor 904 is fixedly mounted on the bottom outer wall of the protective cover 405.

[0051] When the lifting column 402 moves up and down, the lifting column 402 drives the prism 902 to move together through the second rotating column 903, and the prism 902 slides with the hole in the circular sleeve 901. The above-mentioned telescopic rod design is suitable for the lifting and lowering movement of the lifting column 402 and will not affect the lifting and lowering movement of the lifting column 402. At the same time, the prism 902 is always plugged into the hole in the circular sleeve 901 to ensure that the circular sleeve 901 and the prism 902 can always rotate synchronously together.

[0052] When the second motor 904 drives the circular sleeve 901 to rotate, the second rotating column 903 is rotated through the prism 902 , and the second rotating column 903 rotates the heating plate 5 , thereby rotating the heating plate 5 .

[0053] The plurality of heating plates 5 are each equipped with a set of lifting mechanisms 4 and a set of rotating mechanisms 9, so that the plurality of heating plates 5 can be lifted and rotated independently.

[0054] like Figure 12 As shown in FIG. 1 , as a specific technical solution, the heat conducting plate 3 is provided with a plurality of evenly distributed heat conducting sub-sheets 303 , and each heat conducting sub-sheet 303 is located above the corresponding heating sheet 5 . Figure 3As shown, a movable column 301 is fixed to the top of the heat-conducting plate 3, and the movable column 301 is T-shaped. A guide groove 103 is provided on the top surface of the inner cavity 102, and a bottom groove 104 is provided below the guide groove 103, and the width of the bottom groove 104 is smaller than the width of the guide groove 103, wherein the movable column 301 passes through the bottom groove 104, and the top end of the movable column 301 is slidably installed in the guide groove 103, and a first spring 302 is provided in the guide groove 103; the first spring 302 provides elastic installation for the heat-conducting plate 3, and the sliding of the movable column 301 and the guide groove 103 provides guidance for the up and down movement of the heat-conducting plate 3.

[0055] When heating one or more areas of the electrostatic chuck body 1, the heating plate 5 of the area to be heated is driven by the lifting mechanism 4 to move the heating plate 5 upward. The heating plate 5 pushes the heat conducting plate 3 to move upward, so that the heat conducting plate 3 is in contact with the top surface of the inner cavity 102. The heating plate 5 of the area to be heated is heated, and the heat is transferred to the area to be heated on the electrostatic chuck body 1 through the heat conducting sub-plate 303.

[0056] Through the above design, different areas of the electrostatic chuck body 1 can be heated according to actual conditions, thereby achieving zoned heating of the electrostatic chuck body 1.

[0057] During the heating process of an area, the rotating mechanism 9 drives the heating plate 5 to rotate, so that the heat-conducting sub-plates 303 in the area are evenly heated, and the heat is evenly transferred to the heat-conducting sub-plates 303, thereby ensuring the uniformity of heating in the area.

[0058] The heat-conducting plate 3 is made of heat-insulating material at locations other than the heat-conducting sub-sheets 303 to prevent heat from being transferred and lost between the heat-conducting sub-sheets 303 .

[0059] When the heating plate 5 moves downward and separates from the heat conducting plate 3 , the first spring 302 provides a restoring force to move the heat conducting plate 3 downward, and the heat conducting plate 3 is separated from the top surface of the inner cavity 102 .

[0060] like Figure 3 As shown, after the heat conducting plate 3 moves to the lowest position, the top of the movable column 301 is supported and blocked by the position between the guide groove 103 and the bottom groove 104, so as to be suspended at the lowest position.

[0061] like Figure 8-Figure 9 As shown, as a specific technical solution, the locking assembly includes a locking block 803; the locking block 803 is slidably connected to a first guide hole 804 opened on the side wall of the insert 801, an inner groove 812 is opened in the insert 801, and the unlocking part is installed in the inner groove 812.

[0062] like Figure 9As shown, the unlocking part includes a first wedge block 806 and a second wedge block 808; the first wedge block 806 is fixedly connected to a connecting frame 805, and the connecting frame 805 is fixedly connected to one end of the locking block 803 located in the inner groove 812, the inclined surface on the first wedge block 806 is in contact with the inclined surface on the second wedge block 808, and the top of the second wedge block 808 is fixedly connected to the pressure rod 802, and the top of the insert block 801 is provided with a second guide hole 809 that is connected to the top of the inner groove 812 and provides a guide for the pressure rod 802, the pressure rod 802 passes through the second guide hole 809, and the top end of the pressure rod 802 is located below the lifting column 402, and a stopper 813 is provided on the pressure rod 802.

[0063] One side of the first wedge block 806 is elastically connected to a side wall of the inner groove 812 through a second spring 807. A concave hole 811 is provided on the top surface of the inner groove 812. A third spring 810 is provided in the concave hole 811. The pressure rod 802 is elastically connected to the top surface of the concave hole 811 through the third spring 810.

[0064] like Figures 8-10 As shown, at this time, the mounting mechanism 8 is installed at the bottom of the base 101, the locking block 803 is inserted into the locking hole, and the mounting mechanism 8 is in the installed state; at this time, the lifting mechanism 4 is not completely retracted, the lifting column 402 is not lowered to the lowest position, and the heating plate 5 and the heat conducting plate 3 are in a separated state, and the heat conducting plate 3 is in the lowest position;

[0065] When the lifting column 402 moves upward, the heating plate 5 can push the heat conducting plate 3 to move upward, so that the heat conducting plate 3 is in contact with the top surface of the inner cavity 102, thereby heating the electrostatic chuck body 1; and when the lifting column 402 moves downward, the lifting column 402 pushes the pressure rod 802 downward, so that the pressure rod 802 drives the second wedge block 808 to move downward together, until the blocking seat 813 is in contact with the top surface of the insert 801, and is blocked. During the downward movement of the second wedge block 808, the third spring 810 is stretched, and at the same time, the second wedge block 808 pushes the first wedge block 806, and the first wedge block 806 drives the locking block 803 to move through the connecting frame 805, leaving the locking hole, and compressing the second spring 807 at the same time; through the above design, the automatic disassembly of the mounting mechanism 8 is realized, which provides convenience for the disassembly of the mounting mechanism 8, and facilitates the separation of the structure on the insert 801 from the electrostatic chuck body 1, thereby facilitating its maintenance and inspection.

[0066] The process of reinstalling the insert 801 is as follows: insert the insert 801 into the insert groove, and by driving the lifting column 402 to move upward, the downward pressure on the pressure rod 802 is released. The pressure rod 802 drives the second wedge block 808 to reset together through the elastic force of the third spring 810. The first wedge block 806 is no longer squeezed by the second wedge block 808. The elastic force of the second spring 807 resets the second wedge block 808, the connecting frame 805 and the locking block 803 together, and the locking block 803 is inserted into the keyhole to complete the installation.

[0067] like Figure 9 As shown, the first wedge block 806 and the second wedge block 808 are both right-angled trapezoidal blocks, both of which have an inclined surface, and the inclined surfaces of the two are in contact with each other. When the first wedge block 806 moves downward, it can push the second wedge block 808 to move away from the locking block 803 to unlock it, and the second spring 807 and the third spring 810 provide a reset elastic force for subsequent relocking.

[0068] like Figure 4-Figure 5 As shown, as a specific technical solution, the cleaning mechanism 7 includes a protective shell 702, which is fixedly mounted on the outer wall of the base 101, and a connecting groove is provided between the protective shell 702 and the inner cavity 102, and a connecting strip 701 is vertically slidably installed in the connecting groove, one end of the connecting strip 701 is fixedly connected to the heat conduction plate 3, and the other end of the connecting strip 701 is connected to a transmission part provided in the protective shell 702, and the output end of the transmission part is connected to a cleaning brush 705, and the cleaning brush 705 is in contact with the dustproof net 6.

[0069] The transmission part includes a second rack 708; the second rack 708 is fixedly connected to the end of the connecting bar 701, and the second rack 708 is meshedly connected to the first cylindrical gear 710. The middle part of the first cylindrical gear 710 is fixedly connected to the first rotating shaft 709, and the first rotating shaft 709 is rotatably installed in the protective shell 702. The first rotating shaft 709 is fixedly connected to the first bevel gear 711, the first bevel gear 711 is meshedly connected to the second bevel gear 712, and the second bevel gear 712 is fixedly connected to the second rotating shaft 713. The second rotating shaft 713 is rotatably installed in the protective shell 702, and the bottom end of the second rotating shaft 713 extends outside the protective shell 702, and the bottom end of the second rotating shaft 713 is fixedly connected to the second cylindrical gear 714, the second cylindrical gear 714 is meshedly connected to the first rack 703, and the first rack 703 is fixedly connected to the cleaning brush 705 through the connecting rod 704.

[0070] The connecting rod 704 is fixedly connected to a guide sleeve 707 . A guide post 706 is installed above the dust screen 6 . The guide sleeve 707 is slidably sleeved onto the guide post 706 .

[0071] Among them, the heat dissipation fan 2 is used to cool down the electrostatic suction cup body 1 after heating and use, thereby accelerating the cooling efficiency; in specific implementation, multiple heat dissipation fans 2 can be used, and multiple heat dissipation fans 2 are evenly distributed to both sides of the base 101. The heat dissipation fan 2 on one side blows air into the inner cavity 102, and the heat dissipation fan 2 on the other side exhausts the inner cavity 102, so that air circulation is carried out in the inner cavity 102, which facilitates the dissipation of heat.

[0072] The dustproof net 6 is provided to prevent dust from entering the inner cavity 102 through the heat dissipation fan 2, thereby playing a dustproof role; and the cleaning mechanism 7 is provided to clean the surface of the dustproof net 6 to prevent dust from accumulating thereon and causing blockage.

[0073] The operation of the cleaning mechanism 7 is as follows: when the heat conducting plate 3 moves up and down, the heat conducting plate 3 drives the second rack 708 to move through the connecting bar 701, and the meshing transmission between the second rack 708 and the first cylindrical gear 710 causes the first rotating shaft 709 to rotate, and the first bevel gear 711 on the first rotating shaft 709 rotates together, and the meshing transmission between the first bevel gear 711 and the second bevel gear 712 causes the second rotating shaft 713 and the second cylindrical gear 714 to rotate together, and the meshing transmission between the second cylindrical gear 714 and the first rack 703 causes the first rack 703 to drive the connecting rod 704 to move, and then drive the cleaning brush 705 to brush the dustproof net 6 for cleaning; at the same time, when the first rack 703, the connecting rod 704 and the cleaning brush 705 move together, they are guided by the guide column 706 and the guide sleeve 707.

[0074] The above design is used for self-cleaning of the dust screen 6, and the self-cleaning is powered by the up and down movement of the heat conducting plate 3, without the need for an additional power source.

[0075] like Figure 11 As shown, as a specific technical solution, it also includes a wiring mechanism 10; the wiring mechanism 10 includes an insulating ring 1001, the insulating ring 1001 is fixedly connected to the bottom inner wall of the protective cover 405, and a conductive ring 1002 is provided on the inner circle of the insulating ring 1001. The conductive ring 1002 is coaxially arranged with the circular sleeve 901, and a hard wire 1003 is fixed to the bottom end of the circular sleeve 901, and the hard wire 1003 is connected to a conductive slide 1004, and the conductive slide 1004 is slidably installed on the conductive ring 1002. A soft wire is provided in the circular sleeve 901, and the heating plate 5 is connected to the hard wire 1003 through the soft wire.

[0076] The wiring mechanism 10 is used to connect the heating plate 5 to the external circuit when it rotates; the soft wire is of sufficient length in the circular sleeve 901, and it can be spiral-shaped. The top of the soft wire is fixed to the bottom end of the prism 902, and wires are also arranged in the prism 902 and the second rotating column 903 to connect the spiral soft wire to the heating plate 5. The bottom end of the soft wire is fixed to the bottom end of the circular sleeve 901 and connected to the hard wire 1003. The conductive ring 1002 is directly connected to the external circuit.

[0077] When the telescopic rod composed of the circular sleeve 901 and the prism 902 is extended or retracted, the spiral soft wire is stretched or contracted to meet its extension and retraction requirements; when the heating plate 5 rotates, the circular sleeve 901, the prism 902, and the second rotating column 903 rotate together, and the conductive slide 1004 rotates with the above structure, walking on the conductive ring 1002 and performing circular motion, ensuring that it is always connected during rotation, and realizing continuous connection between the heating plate 5 and the external circuit when it rotates.

[0078] The present invention is not limited to the above-described embodiments. Any changes in shape or structure fall within the scope of the present invention. Those skilled in the art may make various changes or modifications to these embodiments without departing from the principles and essence of the present invention. Such changes and modifications fall within the scope of the present invention.

Claims

1. A ceramic electrostatic chuck with a heating function, comprising an electrostatic chuck body (1), wherein the electrostatic chuck body (1) is provided with a base (101); characterized in that: Also includes: An inner cavity (102), wherein the inner cavity (102) is arranged in the base (101), and a plurality of evenly distributed heating plates (5) are arranged in the base (101); A lifting mechanism (4), the lifting mechanism (4) comprising a driving unit and a lifting column (402), the driving unit being used to drive the lifting column (402) to move up and down; A rotating mechanism (9), the rotating mechanism (9) is connected to the bottom surface of the heating plate (5), and the rotating mechanism (9) is mounted on the lifting mechanism (4); the rotating mechanism (9) includes a telescopic rod, the top end of the telescopic rod is fixedly connected to a second rotating column (903), and the top end of the second rotating column (903) is fixedly connected to the bottom surface of the heating plate (5), the second rotating column (903) is rotatably connected to the top end of the lifting column (402), and the bottom end of the telescopic rod is connected to a second motor (904); The mounting mechanism (8) comprises an insert (801) connected to the bottom of the lifting mechanism (4) and locking components arranged on both sides of the insert (801), the insert (801) is connected to the insert groove provided at the bottom of the base (101), and the locking components are plugged into the lock holes provided on both sides of the insert groove; the locking component has an unlocking portion provided below the lifting column (402), and the unlocking portion is pressed downward by the lifting column (402) to unlock the locking component; A heat conducting plate (3), the heat conducting plate (3) being movable up and down, and the heat conducting plate (3) being arranged above the heating plate (5), and the heat conducting plate (3) being elastically connected to the top surface of the inner cavity (102); A heat dissipation fan (2), the heat dissipation fan (2) being mounted on the side of the base (101), with an inner opening of the heat dissipation fan (2) communicating with the inner cavity (102), and a dustproof net (6) being provided on the outer side of the heat dissipation fan (2); A cleaning mechanism (7) is provided on the dustproof net (6), and an input end of the cleaning mechanism (7) is connected to the heat conducting plate (3).

2. The ceramic electrostatic chuck with heating function according to claim 1, wherein: The invention also includes a wiring mechanism (10); the wiring mechanism (10) includes an insulating ring (1001), a conductive ring (1002) is provided on the inner ring of the insulating ring (1001), the conductive ring (1002) is coaxially arranged with the circular sleeve (901), a hard wire (1003) is fixed to the bottom end of the circular sleeve (901), and the hard wire (1003) is connected to a conductive slide (1004), the conductive slide (1004) is slidably mounted on the conductive ring (1002), a soft wire is provided in the circular sleeve (901), and the heating plate (5) is connected to the hard wire (1003) via the soft wire.

3. The ceramic electrostatic chuck with heating function according to claim 1, wherein: The heat conducting plate (3) is provided with a plurality of evenly distributed heat conducting sub-sheets (303), and each heat conducting sub-sheet (303) is located above a corresponding heating sheet (5).

4. The ceramic electrostatic chuck with heating function according to claim 1, wherein: The locking assembly comprises a locking block (803); the locking block (803) is slidably connected to a first guide hole (804) provided on a side wall of the insert (801); an inner groove (812) is provided in the insert (801), and the unlocking portion is installed in the inner groove (812).

5. The ceramic electrostatic chuck with heating function according to claim 4, wherein: The unlocking portion includes a first wedge block (806) and a second wedge block (808); the first wedge block (806) is fixedly connected to a connecting frame (805), the connecting frame (805) is fixedly connected to one end of the locking block (803) located in the inner groove (812), the inclined surface on the first wedge block (806) is in contact with the inclined surface on the second wedge block (808), the top of the second wedge block (808) is fixedly connected to a pressure rod (802), the top of the insert block (801) is provided with a second guide hole (809) which is connected to the top of the inner groove (812) and provides a guide for the pressure rod (802), and the top end of the pressure rod (802) is located below the lifting column (402).

6. The ceramic electrostatic chuck with heating function according to claim 5, wherein: One side of the first wedge block (806) is elastically connected to a side wall of the inner groove (812) via a second spring (807); a concave hole (811) is provided on the top surface of the inner groove (812); a third spring (810) is provided in the concave hole (811); and the pressure rod (802) is elastically connected to the top surface of the concave hole (811) via the third spring (810).

7. The ceramic electrostatic chuck with heating function according to claim 1, wherein: The cleaning mechanism (7) includes a protective shell (702), the protective shell (702) is fixedly mounted on the outer wall of the base (101), and a connecting groove is provided between the protective shell (702) and the inner cavity (102), a connecting strip (701) is vertically slidably installed in the connecting groove, one end of the connecting strip (701) is fixedly connected to the heat conducting plate (3), and the other end of the connecting strip (701) is connected to a transmission part provided in the protective shell (702), the output end of the transmission part is connected to a cleaning brush (705), and the cleaning brush (705) is in contact with the dustproof net (6).

8. The ceramic electrostatic chuck with heating function according to claim 7, wherein: The transmission part includes a second rack (708); the second rack (708) is fixedly connected to the end of the connecting bar (701); the second rack (708) is meshedly connected to the first cylindrical gear (710); the middle of the first cylindrical gear (710) is fixedly connected to the first rotating shaft (709), and the first rotating shaft (709) is rotatably installed in the protective shell (702); the first rotating shaft (709) is fixedly connected to the first bevel gear (711), and the first bevel gear (711) is meshedly connected to the second bevel gear (712), the second bevel gear (712) is fixedly connected to a second rotating shaft (713), the second rotating shaft (713) is rotatably installed in the protective shell (702), the bottom end of the second rotating shaft (713) extends outside the protective shell (702), and the bottom end of the second rotating shaft (713) is fixedly connected to a second cylindrical gear (714), the second cylindrical gear (714) is meshedly connected to the first rack (703), and the first rack (703) is fixedly connected to the cleaning brush (705) through a connecting rod (704).

9. The ceramic electrostatic chuck with heating function according to claim 8, wherein: The connecting rod (704) is fixedly connected to a guide sleeve (707), a guide column (706) is installed above the dustproof net (6), and the guide sleeve (707) is slidably sleeved onto the guide column (706).

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