Impedance matching device, radio frequency power supply system and plasma source system

Abstract

The present invention discloses an impedance matcher, a radio frequency power supply system, and a plasma source system. The impedance matcher includes: an impedance matching module, a control module, and a plurality of adjustable capacitor modules connected in parallel; the first end of each adjustable capacitor module is electrically connected to the first end of the impedance matching module, and the second end of each adjustable capacitor module is grounded; each adjustable capacitor module includes an adjustable capacitor unit and a switch unit connected in series; the control module is used to control the switch unit in at least one adjustable capacitor module to be turned on when the load is at the current impedance, and to control the switch unit in at least one adjustable capacitor module to be turned off at the same time, and to adjust the capacitance value of the adjustable capacitor unit in the adjustable capacitor module where the at least one disconnected switch unit is located according to the next impedance of the load. The present invention can achieve impedance matching between the radio frequency power supply module and the load while the impedance of the load changes, and can quickly achieve impedance matching.

Description

Technical Field

[0001] The present invention relates to the field of radio frequency technology, and in particular to an impedance matcher, a radio frequency power supply system and a plasma source system. Background Art

[0002] At present, with the development of RF power technology, the impedance matching requirements between RF power modules and loads are becoming increasingly higher.

[0003] An impedance matcher is usually installed between the RF power module and the load. Currently, a common method is to perform impedance matching between the RF power module and the load by adjusting the capacitance value of the adjustable capacitor in the impedance matcher.

[0004] However, the current impedance matcher has a problem of slow capacitance adjustment after the load impedance changes, resulting in a long impedance matching time between the RF power module and the load. Summary of the Invention

[0005] The present invention provides an impedance matcher, a radio frequency power supply system and a plasma source system, which can achieve impedance matching between a radio frequency power supply module and a load while the impedance of the load changes, and can quickly achieve impedance matching.

[0006] According to one aspect of the present invention, an impedance matching box is provided, comprising: an impedance matching module, a control module, and a plurality of adjustable capacitance modules connected in parallel;

[0007] The first end of the impedance matching module is electrically connected to the output end of the RF power supply module, and the second end of the impedance matching module is electrically connected to the input end of the load;

[0008] The first end of each of the adjustable capacitor modules is electrically connected to the first end of the impedance matching module, and the second end of each of the adjustable capacitor modules is grounded; each of the adjustable capacitor modules includes an adjustable capacitor unit and a switch unit connected in series;

[0009] The control module is used to control the switch unit in at least one of the adjustable capacitor modules to be turned on when the load is at the current impedance, and to control the switch unit in at least one of the adjustable capacitor modules to be turned off, and to adjust the capacitance value of the adjustable capacitor unit in the adjustable capacitor module where at least one disconnected switch unit is located according to the next impedance of the load, so that the total capacitance value formed by the adjustable capacitor units after the capacitance value is adjusted matches the next impedance of the load. It is also used to control the currently turned-on switch unit to be turned off and to control the switch unit in the adjustable capacitor module where the adjustable capacitor unit whose capacitance value is adjusted is located to be turned on when the impedance of the load changes from the current impedance to the next impedance.

[0010] Optionally, the plurality of adjustable capacitor modules connected in parallel include two adjustable capacitor modules connected in parallel;

[0011] The control module is used to control the switch unit in one of the adjustable capacitor modules to be turned on when the load is at the current impedance, and to control the switch unit in another adjustable capacitor module to be turned off, and to adjust the capacitance value of the adjustable capacitor unit in the adjustable capacitor module where the turned-off switch unit is located according to the next impedance of the load, so that the capacitance value of the adjusted adjustable capacitor unit matches the next impedance. The control module is also used to control the currently turned-on switch unit to be turned off and to control the currently turned-off switch unit to be turned on when the impedance of the load changes from the current impedance to the next impedance.

[0012] Optionally, the plurality of adjustable capacitor modules connected in parallel include adjustable capacitor modules whose number is equal to the impedance of the load;

[0013] Each impedance of the load corresponds to one of the adjustable capacitor modules;

[0014] The control module is used to adjust the capacitance value of the adjustable capacitance unit in the adjustable capacitance module corresponding to each impedance of the load before each impedance of the load is formed, so that the capacitance value of each adjustable capacitance unit after adjustment matches the impedance of the corresponding load.

[0015] Optionally, the switch unit includes a switch control subunit and a diode;

[0016] The control end of the switch control subunit is electrically connected to the control module, and the output end of the switch control subunit is electrically connected to the anode of the diode;

[0017] The anode of the diode is electrically connected to the first end of the adjustable capacitor unit, and the cathode of the diode is grounded;

[0018] The second end of the adjustable capacitor unit is electrically connected to the first end of the impedance matching module;

[0019] The control module is used to control the diode to be turned on or off through the switch control subunit.

[0020] Optionally, the switch control subunit includes a first resistor, a first transistor, a second resistor, a second transistor, a third resistor, a first capacitor, a first inductor, a second inductor, a second capacitor, a fourth resistor and a fifth resistor;

[0021] A first end of the first resistor is electrically connected to the control module, and a second end of the first resistor is grounded;

[0022] The gate of the first transistor is electrically connected to the first end of the first resistor, the first electrode of the first transistor is grounded, and the second electrode of the first transistor is electrically connected to the first end of the second resistor;

[0023] The second end of the second resistor is electrically connected to the gate of the second transistor;

[0024] A first electrode of the second transistor is electrically connected to the first power supply terminal, and a second electrode of the second transistor is electrically connected to the first end of the third resistor;

[0025] The second end of the third resistor is electrically connected to the first end of the first capacitor;

[0026] A first end of the first capacitor is electrically connected to a first end of the first inductor, and a second end of the first capacitor is grounded;

[0027] The second end of the first inductor is electrically connected to the first end of the second inductor;

[0028] The first end of the second inductor is electrically connected to the anode of the diode, and the second end of the second inductor is electrically connected to the first end of the second capacitor;

[0029] A first end of the second capacitor is electrically connected to a first end of the fourth resistor, and a second end of the second capacitor is grounded;

[0030] The second end of the fourth resistor is electrically connected to the second power supply end;

[0031] A first end of the fifth resistor is electrically connected to the first power supply end, and a second end of the fifth resistor is electrically connected to the second end of the second resistor.

[0032] Optionally, the impedance matcher provided in this embodiment further includes a detection module; the detection module includes an amplitude detection unit and a phase detection unit;

[0033] The amplitude detection unit is used to detect the voltage amplitude and current amplitude output by the RF power module;

[0034] The phase detection unit is used to detect the voltage phase and current phase output by the RF power module;

[0035] The control module is used to adjust the output frequency of the radio frequency power module according to the voltage amplitude, the current amplitude, the voltage phase and the current phase.

[0036] Optionally, the impedance matcher provided in this embodiment further includes a directional coupling module and an alarm module;

[0037] The directional coupling module is used to detect the reverse power and forward power between the RF power module and the load;

[0038] The control module is used to adjust the output frequency of the radio frequency power supply module according to the reverse power, and is also used to control the alarm module to send an alarm signal when the forward power is less than a set power.

[0039] Optionally, the impedance matching module includes at least one fixed inductor and at least one fixed capacitor;

[0040] The fixed inductor and the fixed capacitor are connected in series;

[0041] The adjustable capacitor unit includes at least one adjustable capacitor.

[0042] According to another aspect of the present invention, a radio frequency power supply system is provided. The radio frequency power supply system includes a radio frequency power supply module and the impedance matcher provided by any embodiment of the present invention.

[0043] According to another aspect of the present invention, a plasma source system is provided. The plasma source system includes a reaction chamber and the radio frequency power supply system provided by any embodiment of the present invention.

[0044] An embodiment of the present invention provides an impedance matcher connected between a radio frequency power supply module and a load. When the load is at a current impedance, a control module in the impedance matcher determines the total capacitance value based on the capacitance values of the adjustable capacitor units in the adjustable capacitor module where the switch unit that is disconnected by the next impedance adjustment portion of the load is located. When the load impedance changes from the current impedance to the next impedance, the control module in the impedance matcher controls the sum of the capacitance values of the active adjustable capacitor modules in the impedance matcher to be the total capacitance value, where the total capacitance value matches the next impedance. This ensures that the impedance matcher matches the impedance of the radio frequency power supply module with that of the load as the load impedance changes. When the load is a reaction chamber, the type of gas, gas flow rate, gas pressure, and pulse power output by the radio frequency power supply module can cause changes in the load impedance. The control module in the embodiment of the present invention can obtain the load impedance value and the time of impedance change in advance. Therefore, the impedance matcher provided in the embodiment of the present invention is applicable to radio frequency power supply modules that output multi-level pulses and can promptly ensure that the impedance of the load matches that of the radio frequency power supply module when the type of gas, gas flow rate, and gas pressure in the reaction chamber change. The impedance matcher provided in an embodiment of the present invention can adjust the total capacitance value corresponding to a load experiencing impedance changes before the load's impedance changes. This allows matching to be achieved by controlling the conduction of the switch unit simultaneously with the load's impedance changes, eliminating the need to repeatedly adjust the capacitance value based on the changed impedance after the load's impedance changes. This shows that the impedance matcher provided in an embodiment of the present invention can achieve impedance matching between the RF power supply module and the load substantially simultaneously with the load's impedance changes, enabling rapid impedance matching.

[0045] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present invention, nor is it intended to limit the scope of the present invention. Other features of the present invention will become readily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0047] Figure 1 This is a schematic structural diagram of an impedance matching device related to the technology of the present invention;

[0048] Figure 2 1 is a schematic structural diagram of an impedance matching box electrically connected to a radio frequency power supply module and a load according to an embodiment of the present invention;

[0049] Figure 3 1 is a schematic structural diagram of another impedance matching box provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load;

[0050] Figure 4 1 is a schematic structural diagram of another impedance matching box provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load;

[0051] Figure 5 1 is a schematic structural diagram of another impedance matching box provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load;

[0052] Figure 6 1 is a schematic structural diagram of another impedance matching box provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load;

[0053] Figure 7 3 is a structural diagram of a radio frequency power supply system provided according to an embodiment of the present invention. DETAILED DESCRIPTION

[0054] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0055] It should be noted that the terms "first", "second", etc. in the description and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0056] Figure 1 This is a schematic diagram of the structure of an impedance matching device related to the technology of the present invention, refer to Figure 1The impedance matcher is connected between the RF power module and the load and includes a control module, a first adjustable capacitor CL1, and a second adjustable capacitor CT1. When the load impedance changes, the control module adjusts the capacitance values of the first and second adjustable capacitors CL1 and CT1 based on the changed impedance to ensure impedance matching between the RF power module and the load. However, the capacitance adjustment speed is too slow, resulting in a high matching delay and preventing rapid impedance matching.

[0057] In order to solve the above-mentioned problem of impedance matching delay, an embodiment of the present invention provides an impedance matcher, which can achieve impedance matching between the RF power supply module and the load while the impedance of the load changes.

[0058] Figure 2 This is a schematic diagram of the structure of an impedance matching box provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load, with reference to FIG. Figure 2 The impedance matching device provided in this embodiment includes: an impedance matching module 110, a control module 120, and a plurality of adjustable capacitor modules 130 connected in parallel; the first end of the impedance matching module 110 is electrically connected to the output end of the RF power supply module 200, and the second end of the impedance matching module 110 is electrically connected to the input end of the load 300; the first end of each adjustable capacitor module 130 is electrically connected to the first end of the impedance matching module 110, and the second end of each adjustable capacitor module 130 is grounded; each adjustable capacitor module 130 includes an adjustable capacitor unit 131 and a switch unit 132 connected in series; the control module 120 is used to control at least one adjustable capacitor when the load 300 is at the current impedance. The switch unit 132 in the module 130 is turned on, and at the same time, the switch unit 132 in at least one adjustable capacitor module 130 is controlled to be turned off, and the capacitance value of the adjustable capacitor unit 131 in the adjustable capacitor module 130 where the at least one disconnected switch unit 132 is located is adjusted according to the next impedance of the load 300, so that the total capacitance value formed by the adjustable capacitor unit 131 after the capacitance value is adjusted matches the next impedance of the load 300. It is also used to control the currently turned on switch unit 132 to be turned off and at the same time control the switch unit 132 in the adjustable capacitor module 130 where the adjustable capacitor unit 131 whose capacitance value is adjusted is located to be turned on when the impedance of the load 300 changes from the current impedance to the next impedance.

[0059] Specifically, the number of adjustable capacitor modules 130 in the impedance matching box 100 provided in this embodiment can be 2, 3, 4, or 5. The switch unit 132 and the adjustable capacitor unit 131 in the same adjustable capacitor module 130 are connected in series. The specific connection method can be that the switch unit 132 is connected between the first end of the impedance matching module 110 and the first end of the adjustable capacitor unit 131, and the second end of the adjustable capacitor unit 131 is grounded. It can also be that the adjustable capacitor unit 131 is connected between the first end of the impedance matching module 110 and the first end of the switch unit 132, and the second end of the switch unit 132 is grounded.

[0060] The capacitance value of the adjustable capacitor unit 131 connected in series with the conductive switch unit 132 affects the impedance matching between the load 300 and the RF power module 200, while the capacitance value of the adjustable capacitor unit 131 connected in series with the disconnected switch unit 132 does not affect the impedance matching between the load 300 and the RF power module 200. The impedance matching module 110 in this embodiment and the adjustable capacitor module 130 in which the conductive switch unit 132 is located work together to achieve impedance matching between the RF power module 200 and the load 300. The impedance matching module 110 can include a fixed inductor, a fixed inductor and a fixed capacitor connected in series, a fixed inductor and an adjustable capacitor connected in series, etc.

[0061] The control module 120 is electrically connected to the control end of each adjustable capacitor unit 131, and the control module 120 can adjust the capacitance value of each adjustable capacitor unit 131. The control module 120 is electrically connected to the control end of each switch unit 132, and the control module 120 can control each switch unit 132 to be turned on or off. When the load 300 is at the current impedance, the control module 120 can control the switch unit 132 in one adjustable capacitor module 130 to be turned on, while controlling the switch unit 132 in at least one adjustable capacitor module 130 to be turned off. It can also control the switch units 132 in two or more adjustable capacitor modules 130 to be turned on, while controlling the switch unit 132 in at least one adjustable capacitor module 130 to be turned off. The switch unit 132 can be a transistor, and can also include a switch control subunit and a diode.

[0062] The total capacitance value is the total capacitance value formed after the control module 120 adjusts the capacitance value of the adjustable capacitance unit 131 in the adjustable capacitance module 130 where the disconnected switch unit 132 is located when the load 300 is at the current impedance. For example, if the control module 120 adjusts the capacitance value of the adjustable capacitance unit 131 in the adjustable capacitance module 130 where one disconnected switch unit 132 is located when the load 300 is at the current impedance, the capacitance value of the adjusted adjustable capacitance unit 131 is the total capacitance value. If the control module 120 adjusts the capacitance value of the adjustable capacitance unit 131 in the adjustable capacitance module 130 where two disconnected switch units 132 are located when the load 300 is at the current impedance, the capacitance value of the two adjusted adjustable capacitance units 131 in parallel is the total capacitance value. Matching the total capacitance value with the next impedance of the load 300 means that when the impedance of the load 300 is the next impedance, the total capacitance value and the matching value corresponding to the impedance matching module 110 can match the impedance of the RF power supply module 200 with the impedance of the load 300. Different impedances of the load 300 correspond to different total capacitance values. The control module 120 is further configured to store the total capacitance values corresponding to different impedances of the load 300. When the next impedance of the load 300 is acquired, the control module 120 is configured to determine the total capacitance value corresponding to the next impedance and adjust the capacitance value of the adjustable capacitance unit 131 in the adjustable capacitance module 130 where the disconnected switch unit 132 is located to adjust the total capacitance value.

[0063] The current impedance of load 300 is the impedance of load 300 at the current stage, and the next impedance of load 300 is the impedance of load 300 at the next stage. The current impedance and the next impedance are not equal; the next impedance of load 300 is adjacent to the current impedance of load 300 and occurs after the current impedance. Different pulse powers output by RF power module 200 result in different impedances of load 300. When load 300 is a reaction chamber capable of generating plasma, the impedance of the reaction chamber (i.e., the impedance of load 300) is related to the type of gas input into the reaction chamber, the gas pressure (also understood as the pressure of the reaction chamber), and the gas flow rate. When at least one of the type of gas, gas pressure, or gas flow rate within the reaction chamber changes, the impedance of the reaction chamber will change. The timing for changes in the power of the pulses output by the RF power module 200 can be set in advance. The timing for changes in the type, pressure, and flow rate of the gas input to the load 300 can also be set in advance. Therefore, the timing for changes in the impedance of the load 300 and the level of the impedance after the change can also be set in advance. The control module 120 can also store the impedance of the load 300 at different time periods.

[0064] The control module 120 can also determine the impedance of the load 300 and the time when the impedance changes by obtaining the power of the pulse output by the RF power module 200 and the time when the pulse power changes, the gas pressure of the gas input into the load 300 and the time when the gas pressure changes, the flow rate of the gas input into the load 300 and the time when the flow rate changes, and the type of gas input into the load 300 and the time when the type changes.

[0065] The total capacitance corresponding to the power of each pulse, each gas pressure, each gas flow rate, and each gas type can be obtained in advance through experiments. When the load 300 is at the current impedance, the control module 120 can determine the next impedance of the load 300 and the total capacitance corresponding to the next impedance by obtaining the power of the pulse output by the RF power module 200 in the next stage, the type, flow rate, and pressure of the gas input to the load 300 in the next stage, and adjust the capacitance of the adjustable capacitor unit 131 in the adjustable capacitor module 130 where at least one disconnected switch unit 132 is located to obtain the corresponding total capacitance value. Therefore, when the impedance of the load 300 changes from the current impedance to the next impedance, the switch unit 132 of the adjustable capacitor module 130 where the adjustable capacitor unit 131 whose capacitance value is adjusted is located is turned on, so that the capacitance value corresponding to the working adjustable capacitor module 130 in the impedance matcher 100 is the total capacitance value. That is, when the impedance of the load 300 changes to the next impedance, the impedance matcher 100 provided in this embodiment can immediately output the total capacitance value and the matching value corresponding to the impedance matching module 110. Only the time for the switch unit 132 to be closed is required to achieve impedance matching between the load 300 and the RF power supply module 200 after the impedance of the load 300 changes, and the matching speed can reach the order of microseconds.

[0066] The impedance matcher 100 provided in this embodiment can be applied to both a radio frequency power module 200 that outputs a single-stage pulse and a radio frequency power module 200 that outputs a multi-stage pulse. For example, when the power of the pulse output by the radio frequency power module 200 changes, the impedance of the load 300 will change. The control module 120 in this embodiment can obtain the power of the next pulse output by the radio frequency power module 200 when the radio frequency power module 200 outputs the current pulse, thereby obtaining the next impedance of the load 300, and according to the capacitance value of the adjustable capacitor unit 131 in the part of the adjustable capacitor module 130 disconnected by the next impedance adjustment switch unit 132, obtain the total capacitance value, and when the output pulse of the radio frequency power module 200 switches from the current pulse to the next pulse, turn on the switch unit 132 of the adjustable capacitor module 130 where the adjustable capacitor unit 131 whose capacitance value is adjusted is located.

[0067] This embodiment provides an impedance matcher connected between a radio frequency power supply module and a load. When the load is at a current impedance, a control module in the impedance matcher determines the total capacitance value based on the capacitance values of the adjustable capacitor units in the adjustable capacitor module where the switch unit that is disconnected by the next impedance adjustment portion of the load is located. When the load impedance changes from the current impedance to the next impedance, the control module in the impedance matcher controls the sum of the capacitance values of the active adjustable capacitor modules in the impedance matcher to be the total capacitance value, where the total capacitance value matches the next impedance. This ensures that the impedance matcher matches the impedance of the radio frequency power supply module with the impedance of the load as the load impedance changes. When the load is a reaction chamber, the type of gas, gas flow rate, gas pressure, and pulse power output by the radio frequency power supply module can cause changes in the load impedance. The control module in this embodiment can obtain the load impedance value and the time of impedance change in advance. Therefore, the impedance matcher provided in this embodiment is applicable to radio frequency power supply modules that output multi-level pulses and can also ensure that the impedance of the load matches the impedance of the radio frequency power supply module in a timely manner when the type of gas, gas flow rate, and gas pressure in the reaction chamber change. The impedance matcher provided in this embodiment can adjust the total capacitance value corresponding to the load experiencing impedance changes before the load's impedance changes. This allows matching to be achieved by controlling the conduction of the switch unit simultaneously with the load's impedance changes, eliminating the need to repeatedly adjust the capacitance value based on the changed impedance after the load's impedance changes. This shows that the impedance matcher provided in this embodiment can achieve impedance matching between the RF power supply module and the load substantially simultaneously with the load's impedance changes, enabling rapid impedance matching.

[0068] Optional, Figure 3 is a structural diagram of another impedance matching box provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load, with reference to FIG. Figure 3 The multiple adjustable capacitor modules 130 connected in parallel include two adjustable capacitor modules 130 connected in parallel; the control module 120 is used to control the switch unit 132 in one adjustable capacitor module 130 to be turned on when the load 300 is at a current impedance, and at the same time control the switch unit 132 in another adjustable capacitor module 130 to be turned off, and adjust the capacitance value of the adjustable capacitor unit 131 in the adjustable capacitor module 130 where the turned-off switch unit 132 is located according to the next impedance of the load 300, so that the capacitance value of the adjusted adjustable capacitor unit 131 matches the next impedance, and is also used to control the currently turned-on switch unit 132 to be turned off and at the same time control the currently turned-off switch unit 132 to be turned on when the impedance of the load 300 changes from the current impedance to the next impedance.

[0069] Specifically, the capacitance value of the adjusted adjustable capacitor unit 131 matches the next impedance, which means that when the impedance of the load 300 is the next impedance, the capacitance value of the adjusted adjustable capacitor unit 131 and the matching value corresponding to the impedance matching module 110 can make the impedance of the RF power supply module 200 match the impedance of the load 300.

[0070] In this embodiment, the switch units 132 in the two adjustable capacitor modules 130 are neither turned on nor turned off at the same time. The control module 120 is configured to control one switch unit 132 to turn on and the other switch unit 132 to turn off when the load 300 is at its current impedance. Furthermore, the control module 120 adjusts the capacitance of the adjustable capacitor unit 131 in the adjustable capacitor module 130 where the turned-off switch unit 132 resides to the capacitance corresponding to the next impedance of the load 300 based on the next impedance of the load 300. This ensures that when the impedance of the load 300 changes from the current impedance to the next impedance, the impedance of the RF power module 200 can immediately match the impedance of the load 300.

[0071] The impedance matcher 100 provided in this embodiment is provided with two adjustable capacitor modules 130, which can not only ensure the impedance matching between the RF power supply module 200 and the load 300 when the impedance of the load 300 changes, but also reduce the number of components in the impedance matcher 100 and reduce the cost of the impedance matcher 100.

[0072] Optional, continue to refer to Figure 2 or Figure 3 The plurality of adjustable capacitor modules 130 connected in parallel include a number of adjustable capacitor modules 130 equal to the impedance of the load 300; each impedance of the load 300 corresponds to an adjustable capacitor module 130; the control module 120 is configured to adjust the capacitance value of the adjustable capacitor unit 131 in the adjustable capacitor module 130 corresponding to each impedance of the load 300 before the impedance of the load 300 is formed, so that the capacitance value of each adjustable capacitor unit 131 after adjustment matches the impedance of the corresponding load 300.

[0073] Exemplarily, the RF power module 200 can output multi-level pulses, and the power of each level of pulse is different, and the same power is the same pulse. Different pulse powers correspond to different impedances of the load 300. Each pulse output by the RF power module 200 corresponds to the impedance of a load 300. The impedance of each load 300 corresponds to an adjustable capacitor module 130. It can be seen that each pulse output by the RF power module 200 corresponds to an adjustable capacitor module 130. Before each pulse is output, the control module 120 adjusts the capacitance value of the adjustable capacitor unit 131 in the adjustable capacitor module 130 corresponding to the pulse, and at the same time as the pulse is switched, turns on the switch unit 132 in the adjustable capacitor module 130 corresponding to the pulse after switching, and turns off the switch unit 132 in the adjustable capacitor module 130 corresponding to the pulse before switching.

[0074] The number of adjustable capacitor modules 130 in the impedance matcher 100 provided in this embodiment is equal to the number of impedances of the load 300. When the impedance of the load 300 changes, the switch unit 132 corresponding to the impedance of the load 300 can be directly turned on. By adjusting the capacitance value of the adjustable capacitor unit 131 in the adjustable capacitor module 130 corresponding to the impedance of the load 300 according to the impedance of the load 300, impedance matching between the RF power supply module 200 and the load 300 can be achieved immediately after the impedance of the load 300 changes.

[0075] Optional, Figure 4 is a structural diagram of another impedance matching box provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load, with reference to FIG. Figure 4 The switch unit 132 includes a switch control subunit 1321 and a diode 1322; the control end of the switch control subunit 1321 is electrically connected to the control module 120, and the output end of the switch control subunit 1321 is electrically connected to the anode of the diode 1322; the anode of the diode 1322 is electrically connected to the first end of the adjustable capacitor unit 131, and the cathode of the diode 1322 is grounded; the second end of the adjustable capacitor unit 131 is electrically connected to the first end of the impedance matching module 110; the control module 120 is used to control the diode 1322 to be turned on or off through the switch control subunit 1321.

[0076] Specifically, in this embodiment, the switch unit 132 is grounded to facilitate rapid heat dissipation from the switch unit 132. By controlling the conduction or disconnection of the diode 1322, this embodiment increases the conduction speed of the switch unit 132, thereby further improving the impedance matching speed between the RF power module 200 and the load 300. The control module 120 is configured to send a control signal to the switch control subunit 1321 to control the conduction or disconnection of the diode 1322.

[0077] Optional, continue to refer to Figure 4The switch control subunit 1321 includes a first resistor R1, a first transistor M1, a second resistor R2, a second transistor M2, a third resistor R3, a first capacitor C1, a first inductor L1, a second inductor L2, a second capacitor C2, a fourth resistor R4 and a fifth resistor R5; a first end of the first resistor R1 is electrically connected to the control module 120, and a second end of the first resistor R1 is grounded; a gate of the first transistor M1 is electrically connected to the first end of the first resistor R1, a first electrode of the first transistor M1 is grounded, and a second electrode of the first transistor M1 is electrically connected to the first end of the second resistor R2; a second end of the second resistor R2 is electrically connected to the gate of the second transistor M2; a first electrode of the second transistor M2 is electrically connected to the first power supply terminal VGH, and a second electrode of the second transistor M2 is electrically connected to the third power supply terminal VGH. The first end of the resistor R3 is electrically connected; the second end of the third resistor R3 is electrically connected to the first end of the first capacitor C1; the first end of the first capacitor C1 is electrically connected to the first end of the first inductor L1, and the second end of the first capacitor C1 is grounded; the second end of the first inductor L1 is electrically connected to the first end of the second inductor L2; the first end of the second inductor L2 is electrically connected to the anode of the diode 1322, and the second end of the second inductor L2 is electrically connected to the first end of the second capacitor C2; the first end of the second capacitor C2 is electrically connected to the first end of the fourth resistor R4, and the second end of the second capacitor C2 is grounded; the second end of the fourth resistor R4 is electrically connected to the second power supply terminal VGL; the first end of the fifth resistor R5 is electrically connected to the first power supply terminal VGH, and the second end of the fifth resistor R5 is electrically connected to the second end of the second resistor R2.

[0078] Specifically, the first power supply terminal VGH is used to receive a first power supply voltage, and the second power supply terminal VGL is used to receive a second power supply voltage. The first power supply voltage is positive, and the second power supply voltage is negative. The first transistor M1 can be an NMOS transistor, and the second transistor M2 can be a PMOS transistor. A first resistor R1 is electrically connected to the first transistor M1, a fifth resistor R5 is electrically connected to the second transistor M2, and the second resistor R2 is connected between the second transistor M2 and the first transistor M1. This ensures that the first transistor M1 is turned on at a high level when it is an NMOS transistor, and that the second transistor M2 is turned on at a low level when it is a PMOS transistor. The fourth resistor R4 and the third resistor R3 are used for current limiting. The first capacitor C1, the first inductor L1, the second capacitor C2, and the second inductor L2 can be used for choke filtering. The control module 120 can send a high level signal to the switch unit 132 to turn on the diode 1322, and send a low level signal to the switch unit 132 to turn off the diode 1322.

[0079] Optional, Figure 5 is a structural diagram of another impedance matching box provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load, with reference to FIG. Figure 5The impedance matcher 100 provided in this embodiment further includes a detection module 140; the detection module 140 includes an amplitude detection unit 141 and a phase detection unit 142; the amplitude detection unit 141 is used to detect the voltage amplitude and current amplitude output by the RF power module 200; the phase detection unit 142 is used to detect the voltage phase and current phase output by the RF power module 200; the control module 120 is used to adjust the output frequency of the RF power module 200 according to the voltage amplitude, current amplitude, voltage phase, and current phase.

[0080] Specifically, the amplitude detection unit 141 and the phase detection unit 142 are both electrically connected to the control module 120. The amplitude detection unit 141 is configured to send the detected voltage amplitude and current amplitude to the control module 120, and the phase detection unit 142 is configured to send the detected voltage phase and current phase to the control module 120. The control module 120 can monitor the current impedance matching between the RF power module 200 and the load 300 based on the voltage amplitude, current amplitude, voltage phase, and current phase. When the impedance matching between the RF power module 200 and the load 300 does not meet set requirements, the control module 120 sends a first frequency adjustment signal to the RF power module 200. After receiving the first frequency adjustment signal, the RF power module 200 adjusts its output frequency so that the adjusted output frequency of the RF power module 200 can ensure the impedance matching between the RF power module 200 and the load 300 under the current conditions, thereby improving the impedance matching accuracy between the RF power module 200 and the load 300.

[0081] Optional, Figure 6 is a structural diagram of another impedance matching box provided by an embodiment of the present invention when it is electrically connected to a radio frequency power supply module and a load, with reference to FIG. Figure 6 The impedance matcher 100 provided in this embodiment further includes a directional coupling module 150 and an alarm module 160; the directional coupling module 150 is used to detect the reverse power and forward power between the RF power module 200 and the load 300; the control module 120 is used to adjust the output frequency of the RF power module 200 according to the reverse power, and is also used to control the alarm module 160 to send an alarm signal when the forward power is less than the set power.

[0082] Specifically, the directional coupling module 150 can be a directional coupler, and the directional coupling module 150 is connected between the RF power module 200 and the load 300. The directional coupling module 150 can be electrically connected to the wire that transmits the RF signal output by the RF power module 200. The directional coupling module 150 is also electrically connected to the control module 120, and the directional coupling module 150 can send reverse power and forward power to the control module 120. The control module 120 can determine the current impedance matching between the RF power module 200 and the load 300 based on the reverse power, and send a second frequency adjustment signal to the RF power module 200 when the impedance matching between the RF power module 200 and the load 300 does not meet the set requirements. After receiving the second frequency adjustment signal, the RF power module 200 adjusts the output frequency of the RF power module 200 so that the adjusted output frequency of the RF power module 200 can ensure the impedance matching between the RF power module 200 and the load 300, thereby further improving the impedance matching accuracy between the RF power module 200 and the load.

[0083] The forward power can reflect the actual output power of the RF power module 200. When the control module 120 detects that the forward power is less than the set power, it indicates that the actual power output of the RF power module 200 does not meet the requirements of the load 300. In this case, the control module 120 can control the alarm module 160 to issue an alarm signal to prompt personnel to check the situation in a timely manner.

[0084] Optional, continue to refer to Figure 6 The impedance matching module 110 includes at least one fixed inductor LT and at least one fixed capacitor CT; the fixed inductor CT and the fixed capacitor LT are connected in series; and the adjustable capacitor unit 131 includes at least one adjustable capacitor CL.

[0085] Specifically, the impedance matching module 110 includes a fixed inductor LT and a fixed capacitor CT connected in series. It can be seen that the impedance matching module 110 provided in this embodiment corresponds to a fixed matching value. In order to ensure impedance matching between the RF power supply module 200 and the load 300, it is only necessary to adjust the capacitance value of the adjustable capacitor CL in the adjustable capacitor module 130 where the conductive switch unit 132 is located, thereby avoiding adjusting multiple adjustable capacitors CL and increasing the adjustment complexity.

[0086] Figure 7 is a schematic structural diagram of a radio frequency power supply system provided according to an embodiment of the present invention, with reference to Figure 7 The RF power system 400 provided in this embodiment includes the RF power module 200 and the impedance matcher 100 provided in any embodiment of the present invention. Therefore, the beneficial effects of the RF power system including the impedance matcher 100 described in any embodiment of the present invention are not repeated here.

[0087] The plasma source system provided in this embodiment includes a reaction chamber and the radio frequency power supply system provided in any embodiment of the present invention. Therefore, the beneficial effects of the plasma source system including any impedance matching device described in any embodiment of the present invention are not repeated here.

[0088] It should be understood that the various forms of the processes shown above can be used to reorder, add, or delete steps. For example, the steps described in the present invention can be performed in parallel, sequentially, or in a different order, as long as the desired results of the technical solution of the present invention can be achieved. This is not limited herein.

[0089] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.

Claims

1. An impedance matching box, characterized in that: include: An impedance matching module, a control module, and a plurality of adjustable capacitance modules connected in parallel; The first end of the impedance matching module is electrically connected to the output end of the RF power supply module, and the second end of the impedance matching module is electrically connected to the input end of the load; The first end of each of the adjustable capacitor modules is electrically connected to the first end of the impedance matching module, and the second end of each of the adjustable capacitor modules is grounded; each of the adjustable capacitor modules includes an adjustable capacitor unit and a switch unit connected in series; The control module is used to control the switch unit in at least one of the adjustable capacitor modules to be turned on when the load is at the current impedance, and to control the switch unit in at least one of the adjustable capacitor modules to be turned off, and to adjust the capacitance value of the adjustable capacitor unit in the adjustable capacitor module where at least one disconnected switch unit is located according to the next impedance of the load, so that the total capacitance value formed by the adjustable capacitor units after the capacitance value is adjusted matches the next impedance of the load. It is also used to control the currently turned-on switch unit to be turned off and to control the switch unit in the adjustable capacitor module where the adjustable capacitor unit whose capacitance value is adjusted is located to be turned on when the impedance of the load changes from the current impedance to the next impedance.

2. The impedance matching box according to claim 1, wherein: The plurality of adjustable capacitor modules connected in parallel include two adjustable capacitor modules connected in parallel; The control module is used to control the switch unit in one of the adjustable capacitor modules to be turned on when the load is at the current impedance, and to control the switch unit in another adjustable capacitor module to be turned off, and to adjust the capacitance value of the adjustable capacitor unit in the adjustable capacitor module where the turned-off switch unit is located according to the next impedance of the load, so that the capacitance value of the adjusted adjustable capacitor unit matches the next impedance. The control module is also used to control the currently turned-on switch unit to be turned off and to control the currently turned-off switch unit to be turned on when the impedance of the load changes from the current impedance to the next impedance.

3. The impedance matching box according to claim 1, wherein: The plurality of adjustable capacitor modules connected in parallel include an adjustable capacitor module whose number is equal to the impedance of the load; Each impedance of the load corresponds to one of the adjustable capacitor modules; The control module is used to adjust the capacitance value of the adjustable capacitance unit in the adjustable capacitance module corresponding to each impedance of the load before each impedance of the load is formed, so that the capacitance value of each adjustable capacitance unit after adjustment matches the impedance of the corresponding load.

4. The impedance matching box according to claim 1, wherein: The switch unit includes a switch control subunit and a diode; The control end of the switch control subunit is electrically connected to the control module, and the output end of the switch control subunit is electrically connected to the anode of the diode; The anode of the diode is electrically connected to the first end of the adjustable capacitor unit, and the cathode of the diode is grounded; The second end of the adjustable capacitor unit is electrically connected to the first end of the impedance matching module; The control module is used to control the diode to be turned on or off through the switch control subunit.

5. The impedance matching box according to claim 4, wherein: The switch control subunit includes a first resistor, a first transistor, a second resistor, a second transistor, a third resistor, a first capacitor, a first inductor, a second inductor, a second capacitor, a fourth resistor and a fifth resistor; A first end of the first resistor is electrically connected to the control module, and a second end of the first resistor is grounded; The gate of the first transistor is electrically connected to the first end of the first resistor, the first electrode of the first transistor is grounded, and the second electrode of the first transistor is electrically connected to the first end of the second resistor; The second end of the second resistor is electrically connected to the gate of the second transistor; A first electrode of the second transistor is electrically connected to the first power supply terminal, and a second electrode of the second transistor is electrically connected to the first end of the third resistor; The second end of the third resistor is electrically connected to the first end of the first capacitor; A first end of the first capacitor is electrically connected to a first end of the first inductor, and a second end of the first capacitor is grounded; The second end of the first inductor is electrically connected to the first end of the second inductor; The first end of the second inductor is electrically connected to the anode of the diode, and the second end of the second inductor is electrically connected to the first end of the second capacitor; A first end of the second capacitor is electrically connected to a first end of the fourth resistor, and a second end of the second capacitor is grounded; The second end of the fourth resistor is electrically connected to the second power supply end; A first end of the fifth resistor is electrically connected to the first power supply end, and a second end of the fifth resistor is electrically connected to the second end of the second resistor.

6. The impedance matching box according to claim 1, wherein: Also includes a detection module; the detection module includes an amplitude detection unit and a phase detection unit; The amplitude detection unit is used to detect the voltage amplitude and current amplitude output by the RF power module; The phase detection unit is used to detect the voltage phase and current phase output by the RF power module; The control module is used to adjust the output frequency of the radio frequency power module according to the voltage amplitude, the current amplitude, the voltage phase and the current phase.

7. The impedance matching box according to claim 1, wherein: It also includes a directional coupling module and an alarm module; The directional coupling module is used to detect the reverse power and forward power between the RF power module and the load; The control module is used to adjust the output frequency of the radio frequency power supply module according to the reverse power, and is also used to control the alarm module to send an alarm signal when the forward power is less than a set power.

8. The impedance matching box according to any one of claims 1 to 7, characterized in that: The impedance matching module includes at least one fixed inductor and at least one fixed capacitor; The fixed inductor and the fixed capacitor are connected in series; The adjustable capacitor unit includes at least one adjustable capacitor.

9. A radio frequency power supply system, characterized in that: It comprises a radio frequency power supply module and the impedance matching box according to any one of claims 1 to 8.

10. A plasma source system, characterized in that: It comprises a reaction chamber and the radio frequency power supply system according to claim 9.

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