Perovskite cell laser scribing vibration suppression system

Abstract

The embodiment of the invention provides a perovskite battery laser scribing vibration suppression system, which comprises a laser device, a vibration suppression device and a vibration suppression device, the light splitting module is arranged on an emergent light path of the laser and divides the processing laser beam into a transmission light path and a reflection light path; the galvanometer system receives the laser of the transmission light path and controls the deflection direction of the laser; the high-speed optical sensor is used for receiving the laser of the reflection light path and detecting the position offset of a light spot in real time; the pre-distortion compensation module is used for generating a compensation signal based on the offset; and the dynamic delay synchronization unit is used for synchronizing the processing signal and the compensation signal. According to the system, a self-feedback light path is formed by differentiating laser beams, so that processing and detection functions are separated, and vibration can be effectively suppressed.

Description

Technical Field

[0001] This application relates to the technical field of laser scribing, and particularly to a vibration suppression system for laser scribing of perovskite cells. Background Art

[0002] Traditional laser scribing systems mostly use mechanical vibration isolation platforms or external sensors for vibration suppression. For example, air-bearing vibration isolation tables are used to isolate ground vibrations, and accelerometers or laser interferometers detect mechanical vibrations and adjust the galvanometer through closed-loop feedback. However, such methods have significant limitations: mechanical vibration isolation has poor effect on suppressing high-frequency vibrations, and external sensors require complex calibration. The signal transmission delay leads to compensation lag, making it difficult to meet the strict real-time requirements of micron-level processing. In addition, traditional solutions rely on indirect detection of the vibration source and are easily interfered by the mechanical structure transfer function. There is a deviation between the actual optical path offset and the sensor data, affecting the compensation accuracy.

[0003] In the prior art, vibration suppression technologies mostly rely on fixed-parameter filtering or passive damping, and cannot dynamically adapt to multi-band vibration interference under complex working conditions. Moreover, relying on high-cost external sensors results in a high system redundancy. Especially in high-speed machining scenarios, factors such as the inertia of the galvanometer, environmental temperature drift, and instantaneous impact are superimposed. Due to excessive delay, traditional closed-loop control is difficult to achieve effective suppression, resulting in defects such as rough and broken scribing edges, severely restricting the yield and performance of precision devices such as perovskite cells and semiconductor wafers.

[0004] Therefore, how to provide a vibration suppression technology for laser scribing has become an urgent problem to be solved. Summary of the Invention

[0005] This application provides a vibration suppression system for laser scribing. The system realizes the separation of processing and detection functions by splitting the laser beam to form a self-feedback optical path, and combines a pre-distortion compensation module and a dynamic delay synchronization unit to adjust the galvanometer angle to offset the offset caused by vibration, thereby achieving vibration suppression during laser scribing.

[0006] In a first aspect, a vibration suppression system for laser scribing is provided. The system includes: a laser for generating a processing laser beam; a beam splitting module disposed on the output optical path of the laser for splitting the processing laser beam into a transmission optical path 105 and a reflection optical path; a galvanometer system for receiving the laser on the transmission optical path and controlling its deflection direction; a high-speed optical sensor for receiving the laser on the reflection optical path and real-time detecting the offset of the spot position; a pre-distortion compensation module for generating a compensation signal based on the offset; and a dynamic delay synchronization unit for synchronizing the processing signal and the compensation signal.

[0007] In combination with the first aspect, in some implementations of the first aspect, the beam splitting module is a polarization beam splitter, and a quarter-wave plate is provided in the transmission optical path to compensate for the change in polarization state.

[0008] It should be understood that a wave plate is an optical element based on the birefringence effect that can introduce a specific phase difference to the orthogonal polarization components of light waves. In this application, the quarter-wave plate provided in the transmission optical path converts linearly polarized light into circularly polarized light, and after being reflected by the galvanometer scanner, passes through the wave plate again to be restored to linearly polarized light orthogonal to the original polarization direction, thereby realizing polarization state compensation. This design ensures the secondary efficient utilization of the reflected light by the beam splitting module, eliminates the energy fluctuation caused by the change in polarization state, improves the energy stability of the processing optical path, and avoids the influence of laser power fluctuation on the scribing depth and edge quality of the perovskite battery.

[0009] In combination with the first aspect, in some implementations of the first aspect, the ratio of the transmittance to the reflectance of the transmission optical path and the reflection optical path is 90:10 to 95:5.

[0010] It should be understood that the ratio of the transmittance to the reflectance of the transmission optical path and the reflection optical path refers to the distribution ratio of the incident laser energy by the beam splitting module. In this application, 90% - 95% of the energy is retained in the transmission optical path for processing to ensure the processing efficiency during laser scribing; 5% - 10% of the energy is allocated to the reflection optical path for vibration detection, and its intensity is sufficient to drive a high-speed optical sensor to achieve spot offset detection at the level of ±0.5μm, while avoiding insufficient processing energy caused by excessive beam splitting.

[0011] In combination with the first aspect, in some implementations of the first aspect, the high-speed optical sensor includes: a high-speed CMOS sensor and a collimating lens group.

[0012] It should be understood that the collimating lens group is responsible for beam shaping, focusing, and guiding the laser in the reflection optical path to the high-speed CMOS sensor, and the high-speed CMOS sensor detects the spot position offset in real time through photoelectric conversion.

[0013] In combination with the first aspect, in some implementations of the first aspect, the predistortion compensation module includes: a fast Fourier transform unit for extracting the main frequency component of the vibration spectrum; an adaptive filter for generating a harmonic signal with a phase opposite to that of the main frequency component; and a signal synthesis unit for superimposing the harmonic signal on the galvanometer scanner drive signal.

[0014] It should be understood that the Fast Fourier Transform (FFT) is an algorithm that converts a time-domain signal into a frequency-domain signal, and is used to extract the main vibration frequency component from the spot position offset data. In this application, the FFT analyzes the sensor signal in real time, identifies the vibration frequency, quantifies the amplitude of each frequency component, and combines with an adaptive filtering algorithm to generate a compensation signal with the opposite phase, realizing synchronous suppression of multi-band vibrations, with low compensation response delay, and significantly improving the scribing accuracy and consistency in high-frequency interference scenarios.

[0015] Combined with the first aspect, in some implementation manners of the first aspect, the delay amount of the dynamic delay synchronization unit is calculated by the following formula:

[0016]

[0017] where L is the vibration propagation path length, v is the laser scanning speed, and t 0 is the inherent delay of the system, and t 0 ≤ 10 ns.

[0018] It should be understood that the dynamic delay synchronization unit realizes precise signal synchronization through path delay calculation, thereby ensuring strict synchronization between the processing signal and the compensation signal.

[0019] Combined with the first aspect, in some implementation manners of the first aspect, the reflection optical path is enclosed in an inert gas environment, and a band-pass filter is provided in the optical path, and the central wavelength is consistent with the output wavelength of the laser.

[0020] It should be understood that the band-pass filter is an optical element that selectively transmits light of a specific wavelength, and its central wavelength is strictly matched with the output of the laser. In this application, the filter is integrated into the reflection optical path to block ambient stray light and is suitable for complex industrial environments. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic structural diagram of a vibration suppression system for laser scribing of a perovskite battery provided by this application.

[0022] Figure 2 It is a working flowchart of a predistortion compensation module provided by this application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] The terms used in the following embodiments are only for the purpose of describing specific embodiments and are not intended to limit the present application. As used in the specification and appended claims of the present application, the singular forms "a", "an", "", "the foregoing", "the", and "such" are also intended to include expressions such as "one or more", unless the context clearly indicates otherwise. It should also be understood that in the following embodiments of the present application, "at least one" and "one or more" mean one, two, or more than two. The term "and / or" is used to describe the relationship between associated objects and indicates that three relationships can exist; for example, A and / or B can mean: A exists alone, A and B exist simultaneously, or B exists alone, where A and B can be singular or plural. The character " / " generally indicates that the associated objects before and after are in an "or" relationship.

[0024] References to "one embodiment" or "some embodiments" or the like described in this specification mean that a particular feature, structure, or characteristic described in connection with that embodiment is included in one or more embodiments of the present application. Thus, statements such as "in one embodiment", "in some embodiments", "in other some embodiments", "in still other embodiments" and the like that appear in different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in another way. The terms "comprising", "including", "having" and their variants all mean "including but not limited to", unless otherwise specifically emphasized in another way.

[0025] With the continuous development of new energy technologies, perovskite batteries are gradually emerging in the energy field with their unique advantages and becoming a highly potential emerging force. In the manufacturing of perovskite batteries, laser scribing is an important part of their production. Through precise laser scribing, large-area perovskite thin-film materials can be divided into independent battery units, realizing modular production of the batteries and ensuring that each unit can work efficiently and stably. However, vibrations are generated during the laser scribing process, and these vibrations will cause deviations during scribing, thus affecting the yield rate of perovskite batteries.

[0026] The embodiment of the present application provides a vibration suppression system for laser scribing of perovskite batteries. This system separates the processing and detection functions by differentiating the laser beam to form a self-feedback optical path, and combines a predistortion compensation module and a dynamic delay synchronization unit to adjust the galvanometer angle to offset the deviation caused by vibrations, realizing vibration suppression during laser scribing.

[0027] Figure 1 It is a schematic structural diagram of a vibration suppression system for laser scribing of perovskite batteries provided by the embodiment of the present application. In some examples, this system includes:

[0028] Laser 101, which is used to generate a processing laser beam;

[0029] Beam splitting module 102, which is arranged on the output light path of laser 101 and splits the processing laser beam into a transmission light path 105 and a reflection light path 103;

[0030] Galvo system 106, which receives the laser of the transmission light path 105 and controls its deflection direction;

[0031] High-speed optical sensor 104, which receives the laser of the reflection light path 103 and detects the spot position offset in real time;

[0032] Predistortion compensation module 108, which generates a compensation signal based on the offset;

[0033] Dynamic delay synchronization unit 109, which is used to synchronize the processing signal and the compensation signal.

[0034] In a possible implementation, the drive circuit of the galvo control module 106 integrates a nonlinear correction table, which is generated by calibration with a laser interferometer, the number of calibration points ≥ 1000 points / axis, and the angle-voltage mapping error ≤ ±0.05%.

[0035] In some examples, the beam splitting module 102 is a polarization beam splitter, and a quarter-wave plate is arranged in the transmission light path 105 to compensate for the change in polarization state.

[0036] In some examples, the ratio of the transmittance to the reflectance of the transmission light path 105 and the reflection light path 103 is 90:10 to 95:5.

[0037] In some examples, the high-speed optical sensor includes: a high-speed CMOS sensor and a collimating lens group.

[0038] In a possible implementation, the spatial resolution of the high-speed CMOS sensor ≤ 1μm / pixel, and the sampling frequency ≥ 20kHz.

[0039] In some examples, refer to Figure 2 , the predistortion compensation module 108 includes:

[0040] Fast Fourier transform unit 1081, which is used to extract the main frequency component of the vibration spectrum;

[0041] Adaptive filter 1082, which is used to generate a harmonic signal with a phase opposite to that of the main frequency component;

[0042] Signal synthesis unit 1083, which superimposes the harmonic signal on the galvo drive signal.

[0043] In a possible implementation, the working process of the predistortion compensation module 108 includes:

[0044] S1: Perform a fast Fourier transform (FFT) on the spot offset to extract the main vibration frequency components with frequencies of f 1 , f 2 , f 3 ...... f n , where f i ∈ [10 Hz, 10 kHz];

[0045] S2: Generate a reverse harmonic signal with a phase difference of 180° according to the main frequency components. The signal amplitude A i satisfies:

[0046]

[0047] where Δx i is the spot offset amplitude corresponding to the vibration frequency f i , with the unit of μm, λ is the laser wavelength with the unit of Hz, f i is the frequency of the main vibration frequency component with the unit of Hz, and k is the proportionality coefficient of the galvanometer system, which can be adjusted according to the actual scenario;

[0048] S3: Use a normalized least mean square (NLMS) adaptive filter to update the harmonic signal amplitude. The convergence step size μ satisfies:

[0049]

[0050] where N is the filter order and P in is the input signal power.

[0051] In a possible implementation, the calculation formula of P in is:

[0052]

[0053] where x(n) is the input signal sequence.

[0054] In a possible implementation, the signal synthesis unit 1083 superimposes the reverse harmonic signals of each frequency band to generate a final compensation signal, and adjusts the driving voltage of the galvanometer system, thereby achieving vibration suppression.

[0055] In some examples, the delay amount of the dynamic delay synchronization unit 109 is calculated by the following formula:

[0056]

[0057] where L is the vibration propagation path length, v is the laser scanning speed, and t0 is the inherent delay of the system, t 0 ≤ 10 ns.

[0058] In some examples, the reflected light path 103 is enclosed in an inert gas environment, and a band-pass filter is provided in the light path, and the central wavelength is the same as the output wavelength of the laser.

[0059] In a possible implementation, the outer shell of the closed light path module 110 is made of a carbon fiber-epoxy composite material, and the coefficient of thermal expansion ≤ 0.5 × 10 -6 / °C, and the inner wall is coated with an anti-reflection coating to suppress stray light reflection.

[0060] The above are only the preferred embodiments of the present invention, and the protection scope of the present invention is not limited to the above embodiments. Any equivalent modifications or changes made by those of ordinary skill in the art according to the disclosure of the present invention shall be included in the protection scope recorded in the claims.

Claims

1. A perovskite cell laser scribing vibration suppression system, characterized in that: include: A laser (101), the laser (101) being used to generate a processing laser beam; A light splitting module (102), the light splitting module (102) being arranged on an outgoing light path of the laser (101) and splitting the processing laser beam into a transmission light path (105) and a reflection light path (103); A galvanometer system (106), the galvanometer system (106) receiving the laser light of the transmission light path (105) and controlling its deflection direction; A high-speed optical sensor (104), the high-speed optical sensor (104) receiving the laser light of the reflection light path (103) and detecting the light spot position offset in real time; A predistortion compensation module (108), the predistortion compensation module (108) generating a compensation signal based on the offset; A dynamic delay synchronization unit (109), the dynamic delay synchronization unit (109) is used to synchronize the processing signal with the compensation signal.

2. The system according to claim 1, characterized in that The light splitting module (102) is a polarization beam splitter, and a quarter wave plate (1051) is arranged in the transmission light path (105), and the quarter wave plate (1051) is used to compensate for changes in polarization states.

3. The system according to claim 2, characterized in that The ratio of the transmittance to the reflectance of the transmission light path (105) and the reflection light path (103) is 90:10 to 95:

5.

4. The system according to claim 1, characterized in that The high-speed optical sensor (104) comprises a high-speed CMOS sensor and a collimating lens group.

5. The system according to claim 1, characterized in that The pre-distortion compensation module (108) comprises: A fast Fourier transform unit (1081), wherein the fast Fourier transform unit (1081) is used to extract a main frequency component of a vibration spectrum; An adaptive filter (1082), the adaptive filter (1082) being used to generate a harmonic signal having a phase opposite to that of the main frequency component; A signal synthesis unit (1083), wherein the signal synthesis unit (1083) superimposes the harmonic signal on the galvanometer drive signal to adjust the drive voltage of the galvanometer system (106).

6. The system according to claim 1, characterized in that The delay amount of the dynamic delay synchronization unit (109) is calculated by the following formula: Wherein, L is the length of the vibration propagation path, v is the laser scanning speed, t0 is the inherent delay of the system, and t0≤10ns.

7. The system according to claim 1, characterized in that The reflective optical path (103) is enclosed in an inert gas environment, and a bandpass filter (1031) is arranged in the optical path, and the central wavelength is consistent with the output wavelength of the laser.

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