Dust-proof welding device for semiconductor equipment rack accessories

Abstract

The present invention belongs to the field of semiconductor equipment rack welding technology, and specifically relates to a semiconductor equipment rack plate accessory dust-proof welding device. The semiconductor equipment rack plate accessory dust-proof welding device comprises: an air intake plate, on which is opened a plurality of groups of air grooves, one end of which extends to the side wall of the air intake plate, and the other end of which converges at the air intake end of each positioning cylinder thereon; the air intake plate is adapted to the plate accessory, and the positioning cylinder is adapted to the screw hole on the plate accessory. The device can make the protective gas entering the welding chamber form an airflow passing through the welding point, so that the smoke and dust generated when the plate accessory is welded on the square tube enters the air intake duct with the airflow, and is guided and collected by the exhaust component. The smoke and dust will not spread, and it is no longer necessary to build a clean booth on the semiconductor equipment site.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor equipment frame welding, and in particular relates to a dust-proof welding device for semiconductor equipment frame plate accessories. Background Art

[0002] Semiconductor equipment racks are often frame-structured, as shown in Publication (Announcement) No. CN221226174U. Because various components must be mounted within the rack, in addition to welding square tubes, various mounting plates with threaded holes, such as support brackets, component mounting plates, and cylinder mounts, must also be welded to the square tubes. These mounting plates are known as plate accessories.

[0003] Semiconductor equipment racks are relatively large. As described in Publication (Announcement) No. CN117428295B, when welding is performed on-site, the impact on site cleanliness needs to be minimized as much as possible, including but not limited to performing welding operations in a clean booth. Reducing the impact of welding on site cleanliness essentially involves suppressing the spread of welding smoke on-site. However, there are currently few dust-proof welding devices that can suppress the spread of welding smoke when welding plate accessories and racks, namely square tubes. As a result, when manufacturing semiconductor equipment racks on-site, a clean booth large enough to accommodate the racks must be built on-site. Summary of the Invention

[0004] The purpose of the present invention is to provide a dust-proof welding device for a semiconductor equipment frame plate accessory, so as to solve the technical problem that smoke and dust will spread to the surroundings and affect the cleanliness of the site when the plate accessory is welded to the frame of the semiconductor equipment.

[0005] In order to solve the above technical problems, the present invention provides a dust-proof welding device for the rack plate accessories of a semiconductor equipment, comprising: an air intake plate, on which a plurality of air grooves are formed, one end of which extends to the side wall of the air intake plate and the other end of which converges at the air intake end of each positioning tube thereon; the air intake plate is adapted to the plate accessory, and the positioning tube is adapted to the screw hole on the plate accessory, so that when the pressure plate assembly holding the square tube presses the exhaust assembly placed on the plate accessory and extending into the air intake end of each positioning tube together with the plate accessory and the air intake plate onto the square tube, the side wall of the air intake plate and the plate accessories and the square tube on both sides thereof form a welding groove, and the plate accessory covers each air groove to form a corresponding air intake duct; the exhaust assembly is suitable for blowing protective gas from the welding head in the welding assembly connected to the pressure plate assembly to the welding cavity formed by covering the welding groove, and when the welding groove is moved for welding, the air intake duct corresponding to the welded welding groove is opened to exhaust gas, so that the protective gas entering the welding cavity forms an airflow passing through the welding point.

[0006] The beneficial effect of the present invention is that after the pressure plate assembly of the semiconductor equipment rack plate accessory dust-proof welding device hugs the square tube, the air intake plate, plate accessory and exhaust assembly placed at the position of the square tube where the plate accessory needs to be welded can be pressed onto the square tube, so that the plate accessory covers the air groove on the air intake plate to form an air intake duct, and at the same time, the side wall of the air intake plate, the plate accessory and the square tube form a welding groove. In this way, the welding head in the welding assembly can blow protective gas into the welding cavity formed by covering the welding groove, and when the welding groove is moved for welding, the exhaust assembly at the air intake end extending into the positioning cylinder, that is, the air intake duct, opens the air intake duct corresponding to the welded welding groove and performs exhaust, so that the protective gas entering the welding cavity forms an airflow passing through the welding point, so that the smoke generated when the plate accessory is welded on the square tube enters the air intake duct with the airflow and is guided and collected by the exhaust assembly. The smoke will not spread, and there is no need to build a clean booth on the semiconductor equipment site. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the prior art descriptions. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0008] Figure 1 This is an exploded view of the semiconductor equipment rack plate accessory dust-proof welding device of the present invention;

[0009] Figure 2 This is a schematic diagram of the structure of the semiconductor equipment rack plate accessory dust-proof welding device of the present invention. Figure 1 ;

[0010] Figure 3 This is a schematic diagram of the structure of the semiconductor equipment rack plate accessory dust-proof welding device of the present invention. Figure 2 ;

[0011] Figure 4 yes Figure 3 Enlarged view of point A in the middle;

[0012] Figure 5 It is a schematic structural diagram of the plate attachment of the present invention when it is covered on the air intake plate;

[0013] Figure 6 This is a schematic diagram of the structure of the semiconductor equipment rack plate accessory dust-proof welding device of the present invention. Figure 3 ;

[0014] Figure 7 This is a schematic diagram of the structure of the semiconductor equipment rack plate accessory dust-proof welding device of the present invention. Figure 4 ;

[0015] Figure 8 This is a schematic diagram of the structure of the semiconductor equipment rack plate accessory dust-proof welding device of the present invention. Figure 5 ;

[0016] Figure 9 This is a schematic diagram of the structure of the semiconductor equipment rack plate accessory dust-proof welding device of the present invention. Figure 6 ;

[0017] Figure 10 2. It is a schematic structural diagram of the blowing gap formed by the cover portion of the semiconductor equipment rack plate accessory dust-proof welding device of the present invention;

[0018] Figure 11 This is a schematic diagram of the structure of the welding head of the semiconductor equipment rack plate accessory dust-proof welding device of the present invention. Figure 1 ;

[0019] Figure 12 This is a schematic diagram of the structure of the welding head of the semiconductor equipment rack plate accessory dust-proof welding device of the present invention. Figure 2 ;

[0020] Figure 13 This is a schematic diagram of the structure of the semiconductor equipment rack plate accessory dust-proof welding device of the present invention. Figure 7 ;

[0021] In the picture:

[0022] Air inlet plate 100, positioning cylinder 110, air groove 120, plate attachment 200, screw hole 210, pressure plate assembly 300, convex plate 310, side clamping screw 311, bottom plate 320, lower clamping screw 321, pressure plate arm 330, pressure plate screw 331, exhaust assembly 400, exhaust base plate 410, rotating seat 420, exhaust pipe 430, exhaust hole 431, rotating drive member 440, exhaust hose clamp 451, exhaust hose 452, rotating buffer section 453, welding groove 500, air inlet 600, exhaust port 610, welding assembly 70 0, upper welding head guide rail 710, upper straight part guide groove 711, lower welding head guide rail 720, lower straight part guide groove 721, welding trolley guide rail 730, welding head straight part accommodating cavity 740, welding head head accommodating cavity 750, welding trolley 760, sealing ring 770, track limit clamp 780, welding head 800, welding cavity 810, straight part 820, straight part air flow guide groove 821, tail 830, head 840, cover part 850, cover part air flow guide groove 851, gap blowing hole 852, blowing gap 860, blowing hood 870, blowing joint 880. DETAILED DESCRIPTION

[0023] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments that can be realized by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] Example

[0025] like Figure 1 As shown, the present invention provides a semiconductor equipment rack plate accessory dustproof welding device, comprising: an air intake piece 100, combined with Figure 5 , which has one end extending to the side wall of the air intake plate 100 and the other end converging to the air intake end of each positioning cylinder 110 thereon; Figure 1 and Figure 2 The air intake piece 100 is adapted to the plate attachment 200, and the positioning cylinder 110 is adapted to the screw hole 210 on the plate attachment 200, so that when the pressure plate assembly 300 holding the square tube puts the air extraction assembly 400 placed on the plate attachment 200 and extending into the air intake end of each positioning cylinder 110 together with the plate attachment 200 and the air intake piece 100 on the square tube, and then combines Figure 3 and Figure 4 The side wall of the air intake plate 100 and the plate attachment 200 and the square tube on both sides form a welding groove 500, and the plate attachment 200 covers each gas groove 120 to form a corresponding air intake duct 600; Figure 2 and Figure 4 The exhaust assembly 400 is suitable for blowing protective gas into the welding cavity 810 formed by covering the welding groove 500 when the welding head 800 in the welding assembly 700 connected to the pressure plate assembly 300 is opened, and when the welding groove 500 is moved for welding, the air inlet 600 corresponding to the welded welding groove 500 is opened to exhaust gas, so that the protective gas entering the welding cavity 810 forms an airflow passing through the welding point.

[0026] The air inlet sheet 100 can be made of the same material as the square tube and plate attachment 200. When the welding head 800 forms a weld pool in the welding groove 500, it is sufficient to burn the square tube and plate attachment 200. The air groove 120 can be obtained by milling, for example.

[0027] After the pressing plate assembly 300 of the semiconductor equipment rack plate accessory dust-proof welding device embraces the square tube, the air intake piece 100, the plate accessory 200 and the exhaust assembly 400 placed at the position where the square tube needs to be welded with the plate accessory 200 can be pressed against the square tube, so that the plate accessory 200 covers the air groove 120 on the air intake piece 100 to form an air intake channel 600, and at the same time, the side wall of the air intake piece 100 forms a welding groove 500 with the plate accessory 200 and the square tube, so that the welding head 800 in the welding assembly 700 can be directed toward the welding cavity 81 formed by covering the welding groove 500. 0 When blowing shielding gas and moving the welding groove 500 for welding, the exhaust assembly 400 at the air inlet end extending into the positioning cylinder 110, that is, the air inlet duct 600, opens the air inlet duct 600 corresponding to the welding groove 500 to be welded and performs exhaust. The shielding gas entering the welding chamber 810 forms an airflow passing through the welding point, so that the smoke and dust generated when the plate accessory 200 is welded to the square tube enters the air inlet duct 600 with the airflow and is guided and collected by the exhaust assembly 400. The smoke and dust will not spread, and it is no longer necessary to build a clean booth at the semiconductor equipment site.

[0028] Combine Figure 1 and Figure 5 One end of each of the air grooves 120 is evenly distributed on the side wall of the air intake sheet 100, and each group of air grooves 120 is arc-shaped, so that the other end of each group of air grooves 120 is distributed in a circular shape at the gathering point of each group; the air intake end of each of the positioning cylinders 110 is connected to one end of the corresponding group of air grooves 120 at the gathering point to form a corresponding air extraction port 610, and each air extraction port 610 corresponds to each of the air intake ducts 600.

[0029] In at least one embodiment, Figure 1 and Figure 5 As shown, the plate attachment 200 is a rectangular plate with four screw holes 210 formed thereon. The air inlet plate 100 adapted thereto is also a rectangular plate with four groups of air grooves 120 formed thereon. The four groups of air grooves 120 converge at four collection points. The air inlet ends of the four positioning cylinders 110 are connected to one end of the corresponding group of air grooves 120 at the collection point. Figure 5 As shown, the four screw holes 210 of the plate attachment 200 pass through the corresponding positioning tubes 110 respectively, and the plate attachment 200 can cover each air groove 120 to form a corresponding air inlet duct 600.

[0030] like Figure 5 As shown, the side wall of the air intake plate 100 has a groove, combined with Figure 5 and Figure 10 , to form an inward-contracted welding groove 500 with the plate attachments 200 and the square tube on both sides of the side wall; Figure 3 and Figure 4As shown, the welding assembly 700 may include: an upper welding head guide rail 710, a lower welding head guide rail 720 and a welding trolley guide rail 730, all of which are connected to the pressing plate assembly 300; Figure 8 and Figure 7 The upper welding head guide rail 710 and the lower welding head guide rail 720 surround the welding groove 500, referring to Figure 6 , and the inner wall of the upper welding head guide rail 710 is sealed when it abuts against the plate attachment 200, and the bottom surface of the lower welding head guide rail 720 is sealed when it abuts against the square tube. The upper welding head guide rail 710 and the lower welding head guide rail 720 are separated to form a welding head straight portion accommodating cavity 740 and a welding head head accommodating cavity 750; the inner wall of the upper welding head guide rail 710 and the bottom surface of the lower welding head guide rail 720 can be abutted and sealed by, for example, setting a sealing gasket; return to Figure 3 and Figure 4 The welding head 800 is connected to the welding carriage 760 on the welding carriage guide rail 730, and extends into the welding head head accommodating cavity 750 through the welding head straight part accommodating cavity 740 to cover a section of the welding groove 500 to form the welding cavity 810, and blow protective gas into the welding cavity 810.

[0031] like Figure 6 and Figure 4 As shown, the upper welding head guide rail 710 and the lower welding head guide rail 720 form a straight portion accommodating cavity 740 of the welding head, and are respectively provided with a straight portion upper guide groove 711 and a straight portion lower guide groove 721; Figure 11 As shown, the welding head 800 may include: a straight portion 820, a Figure 4 and Figure 9 , which is inserted into the sealing ring 770 filled in the straight portion upper guide groove 711 and the straight portion lower guide groove 721, and the sealing ring 770 covers the two walls of the straight portion 820 along the surrounding direction of the welding head straight portion accommodating cavity 740; return to Figure 11 , the tail portion 830 is connected to one end of the straight portion 820, combined Figure 10 , connected to the welding carriage 760; return to Figure 11 , head 840, which is connected to the other end of the straight portion 820, reference Figure 9 and Figure 4 , extending into the welding head accommodating cavity 750, suitable for welding the welding groove 500, such as Figure 9 As shown, a cover portion 850 is connected to both sides of the straight portion accommodating cavity 740 of the welding head in a circumferential direction to form the welding cavity 810 that covers a section of the welding groove 500; the straight portion 820, the tail portion 830 and the head portion 840 of the welding head 800, which perform welding, can be, for example, a flat welding gun; Figure 10As shown, the upper wall of the cover 850 and the upper welding head guide rail 710, the front wall and the plate attachment 200 and the air intake sheet 100, the lower wall and the square tube all have a blowing gap 860, combined with Figure 11 、 Figure 12 and Figure 9 , and the rear wall of the cover 850 that is in contact with the upper welding head guide rail 710 and the lower welding head guide rail 720 is provided with a cover air flow guide groove 851, combined with Figure 11 and Figure 12 The airflow guide groove 851 of the cover is connected to the left and right parts of the straight airflow guide groove 821 opened on the upper and lower walls of the straight part 820, and the left and right parts of the straight airflow guide groove 821 are connected. Figure 9 , the middle of the straight air flow guide groove 821 extends to the welding cavity 810; combined Figure 11 and Figure 12 The wall of the cover 850 located in the blowing gap 860 is provided with gap blowing holes 852. Figure 9 , and the gap blowing hole 852 faces the welding cavity 810; Figure 9 As shown, the other end of the straight portion airflow guide groove 821 extends out of the welding head straight portion accommodating cavity 740 and is covered by the air blowing cover 870.

[0032] like Figure 11 and Figure 9 As shown, the tail portion 830 may be provided with a blowing joint 880 for supplying air to the gap blowing hole 852 .

[0033] like Figure 6 and Figure 9 As shown, by respectively providing a straight portion upper guide groove 711 and a straight portion lower guide groove 721 on the upper welding head guide rail 710 and the lower welding head guide rail 720, the sealing ring 770 can be filled into the straight portion upper guide groove 711 and the straight portion lower guide groove 721, and the sealing ring 770 can also circulate in the straight portion upper guide groove 711 and the straight portion lower guide groove 721. The two walls of the straight portion 820 inserted in the sealing ring 770 along the circumferential direction of the welding head straight portion accommodating cavity 740 can be sealed with the sealing ring 770. The straight portion 820 is provided with a straight portion airflow guide groove 82 The straight air flow guide grooves 821 in the upper and lower walls of 1 can fit with the corresponding sealing ring 770, the upper welding head guide rail 710, and the lower welding head guide rail 720. The covered straight air flow guide grooves 821 can guide the protective gas blown from the blowing hood 870 to the hood air flow guide grooves 851 and the welding chamber 810. The protective gas guided to the hood air flow guide grooves 851 will also be incorporated into the welding chamber 810, and the protective gas blown from the blowing joint 880 will be blown out through the gap blowing holes 852 and will also be incorporated into the welding chamber 810 from both sides.

[0034] Recombination Figure 1The exhaust assembly 400 may include: an exhaust base 410, on which a rotating seat 420 corresponding to each positioning cylinder 110 is provided; each rotating seat 420 is provided with an exhaust pipe 430, and the exhaust pipe 430 is transmission-connected to a rotating drive member 440 next to the rotating seat 420; the rotating drive member 440 may be, for example, a motor; Figure 4 and Figure 13 One end of the exhaust pipe 430 extends into the positioning cylinder 110. It should be noted that in order to reduce the interference of the thread line of the screw hole 210 in the plate attachment 200 on other segments, Figure 13 The plate attachment 200 is hidden in the plate, and is offset against the air intake sheet 100, and the outer wall of the air extraction pipe 430 is offset against the air extraction port 610 of the air intake duct 600 of the corresponding group of air grooves 120; Figure 1 As shown, the exhaust pipe 430 extends into the positioning cylinder 110 and has an exhaust hole 431 at one end. Figure 13 , so that the head 840 moves to weld the welding groove 500, and the shielding gas is blown into the welding cavity 810 from the gap blowing hole 852 and the straight part air flow guide groove 821, and then returns to the welding cavity 810. Figure 1 The exhaust pipe 430 is driven by the rotating drive member 440 to rotate and return to Figure 13 The exhaust hole 431 is connected to the exhaust port 610 corresponding to the weld groove 500 to perform exhaust, so that the protective gas entering the welding chamber 810 forms an airflow passing through the welding point.

[0035] The amount and concentration of the shielding gas entering the welding chamber 810 through the blow hood 870 and the blow connector 880 can be adapted to the extraction volume of the exhaust pipe 430, so that the concentration of the shielding gas flow passing through the weld point is sufficient to protect the welding, and the flow rate is sufficient to carry away the smoke generated by the welding. Also, thanks to the shielding gas flow that carries away the smoke generated by the welding, the semiconductor equipment rack plate accessory dust-proof welding device no longer needs to form a fully enclosed closed structure outside the welding groove 500 to prevent the smoke from overflowing. Therefore, the welding carriage 760 no longer needs to consider the adaptation to the closed structure. Welding the welding groove 500 at the corner can also ensure that the smoke does not spread outward, so dust-proof welding is also performed at the corner.

[0036] like Figure 13 As shown, the size of the air extraction hole 431 can be connected to two air extraction ports 610 at the same time. Figure 13 For example, when the head 840 is welding from top to bottom in the welding groove 500, when the weld point is in the current air inlet 600, the exhaust port 610 corresponding to the next air inlet 600 is also connected to the exhaust hole 431, and the protective gas flow can be formed in both the current air inlet 600 and the next air inlet 600. The protective gas flow can also be maintained during continuous welding to take away the smoke generated by welding.

[0037] like Figure 1As shown, the exhaust base plate 410 may be provided with an exhaust hose clamp 451 so that the exhaust hose 452 connected to each exhaust pipe 430 leaves a rotation buffer section 453 between the exhaust hose clamp 451 and the exhaust pipe 430. The exhaust hose 452 can be connected to an external buffer tank and an exhaust pump to achieve exhaust.

[0038] like Figure 2 、 Figure 7 and Figure 8 As shown, the pressure plate assembly 300 may include: a convex plate 310, with side clamping screws 311 on its two arms; a bottom plate 320, which is suitable for connecting with the convex plate 310, and a lower clamping screw 321 is provided on the bottom plate 320; a pressure plate arm 330, which is arranged on the convex plate 310, and a pressure plate screw 331 is provided on the pressure plate arm 330, which is suitable for pressing the vacuum base plate 410 together with the plate attachment 200 and the air intake sheet 100 on the square tube when the vacuum base plate 410 is placed on the plate attachment 200; the upper welding head guide rail 710, the lower welding head guide rail 720 and the welding trolley guide rail 730 are connected to the convex plate 310, and when connected, as shown in FIG. Figure 7 and Figure 8 As shown, a folding rod connection can be used to leave space for the welding carriage 760 and the welding head 800, as shown in FIG. Figure 7 As shown, the folding rod can be detachable in the form of threaded connection, so that when facing square tubes of different specifications, the connection point can be fine-tuned, thereby facilitating the adjustment of the landing point of the lower welding head guide rail 720, refer to Figure 7 and Figure 6 , so that the lower welding head guide rail 720 can have more contact area with the square tube, forming more welding head head accommodating cavities 750, for the cover part 850 of the head 840 to form a welding cavity 810 in these welding head head accommodating cavities 750, so that more welding grooves 500 can be dust-proof welded.

[0039] like Figure 6 As shown, the welding trolley guide rail 730 may be provided with a track limit clamp 780, combined with Figure 7 Sometimes, when the specifications of the square tube are small, there will be a part of the air inlet plate 100 without a square tube underneath, and this part will not be welded. The track limit clamp 780 can be set as a safety measure to limit the moving range of the welding carriage 760, preventing smoke and dust from being generated when welding in areas where the protective gas flow cannot be formed.

[0040] The following is an overall description of the working principle of this semiconductor equipment rack plate accessory dustproof welding device. Figure 2, first select the position where the plate accessory 200 needs to be welded on the frame, and after the convex plate 310 and the bottom plate 320 are installed in the corresponding positions, the square tube is clamped by the side clamping screw 311 and the lower clamping screw 321. At this time, the upper welding head guide rail 710, the lower welding head guide rail 720 and the welding trolley guide rail 730 also surround the position where the plate accessory 200 needs to be welded. The welding trolley 760 is on the welding trolley guide rail 730, and the welding head 800 also extends into the welding head head accommodating cavity 750 through the welding head straight part accommodating cavity 740. The air intake sheet 100, the plate accessory 200 and the exhaust base plate 410 are placed in the position where the plate accessory 200 needs to be welded. The plate accessory 200 also abuts against the upper welding head guide rail 710, and the exhaust pipe 430 also extends into the positioning cylinder 110. Then, the exhaust base plate 410, together with the plate accessory 200 and the air intake sheet 100, is pressed onto the square tube through the pressing plate screw 331. refer to Figure 9 and Figure 13 First, for example, shielding gas is blown into the welding chamber 810 through the blowing joint 880 and the blowing hood 870, and the exhaust pipe 430 is slowly rotated by the rotating driving part 440 to adjust the exhaust hole 431 to the position where shielding gas is blown out, that is, the exhaust port 610 position of the air inlet 600 corresponding to a section of the welding groove 500 currently covered by the welding chamber 810. Subsequently, the amount and concentration of the shielding gas entering the welding chamber 810 through the blowing hood 870 and the blowing joint 880 are adapted to the exhaust volume of the exhaust pipe 430. Then, the welding carriage 760, the welding head 800, and the rotating driving part 440 are started to move the welding groove 500 for welding. The weld pool formed in the welding groove 500 burns the square tube and the plate accessory 200 together. During welding, the shielding gas entering the welding chamber 810 forms an airflow passing through the welding point, taking away the smoke generated by welding. After the welding of the board attachment 200 at the position is completed, the dust-proof welding device for the board attachment of the semiconductor equipment frame is removed, and the same operation is performed on the next position where the board attachment 200 needs to be welded.

[0041] In summary, after the pressing plate assembly 300 of the semiconductor equipment rack plate accessory dust-proof welding device embraces the square tube, the air intake piece 100, the plate accessory 200 and the exhaust assembly 400 placed at the position where the square tube needs to be welded with the plate accessory 200 can be pressed tightly onto the square tube, so that the plate accessory 200 covers the air groove 120 on the air intake piece 100 to form an air intake channel 600, and at the same time, the side wall of the air intake piece 100 forms a welding groove 500 with the plate accessory 200 and the square tube, so that the welding head 800 in the welding assembly 700 can be directed toward the welding cavity formed by covering the welding groove 500. 810 blows protective gas and when the welding groove 500 is moved for welding, the exhaust component 400 at the air inlet end extending into the positioning cylinder 110, that is, the air inlet 600, opens the air inlet 600 corresponding to the welded welding groove 500 and performs exhaust, so that the protective gas entering the welding chamber 810 forms an air flow passing through the welding point, so that the smoke and dust generated when the plate accessory 200 is welded on the square tube enters the air inlet 600 with the air flow and is guided by the exhaust component 400 to be collected. The smoke and dust will not spread, and there is no need to build a clean booth at the semiconductor equipment site.

[0042] In the embodiments provided herein, it should be understood that the disclosed systems and devices may be implemented in other ways. The embodiments described above are merely illustrative. For example, the division of the mechanism described is merely a logical functional division, and actual implementation may employ other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not implemented.

[0043] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the present invention.

[0044] With the above-described preferred embodiments of the present invention as a guide, those skilled in the art will readily be able to make various changes and modifications without departing from the technical spirit of the present invention. The technical scope of the present invention is not limited to the contents of the specification but must be determined in accordance with the scope of the claims.

Claims

1. A dust-proof welding device for a semiconductor equipment rack plate accessory, characterized in that: include: An air intake plate (100) is provided with a plurality of air grooves (120) each having one end extending to the side wall of the air intake plate (100) and the other end converging to the air intake end of each positioning cylinder (110) thereon; The air intake piece (100) is adapted to the plate attachment (200), and the positioning cylinder (110) is adapted to the screw hole (210) on the plate attachment (200), so that when the pressure plate assembly (300) holding the square tube presses the air extraction assembly (400) placed on the plate attachment (200) and extending into the air intake end of each positioning cylinder (110) together with the plate attachment (200) and the air intake piece (100) onto the square tube, the side wall of the air intake piece (100) forms a welding groove (500) with the plate attachment (200) and the square tube on both sides thereof, and the plate attachment (200) covers each gas groove (120) to form a corresponding air intake duct (600); The exhaust assembly (400) is suitable for blowing protective gas into a welding cavity (810) formed by covering the welding groove (500) through a welding head (800) in a welding assembly (700) connected to the pressure plate assembly (300), and opening an air inlet (600) corresponding to the welding groove (500) to perform exhaust when the welding groove (500) is moved for welding, so that the protective gas entering the welding cavity (810) forms an airflow passing through the welding point; One end of each of the air grooves (120) is evenly distributed on the side wall of the air inlet plate (100), and each group of air grooves (120) is arc-shaped, so that the other end of each group of air grooves (120) is distributed in a circular shape at the gathering point of each group; The air inlet end of each positioning cylinder (110) is connected to one end of the corresponding air group groove (120) at a convergence point to form a corresponding air extraction port (610), and each air extraction port (610) corresponds to each air inlet duct (600); The side wall of the air inlet plate (100) is provided with a groove to form an inwardly contracted welding groove (500) with the plate attachments (200) and the square tube on both sides of the side wall; The welding assembly (700) comprises: An upper welding head guide rail (710), a lower welding head guide rail (720), and a welding trolley guide rail (730) all connected to the pressure plate assembly (300); The upper welding head guide rail (710) and the lower welding head guide rail (720) surround the welding groove (500), and the inner wall of the upper welding head guide rail (710) is sealed when it abuts against the plate attachment (200), and the bottom surface of the lower welding head guide rail (720) is sealed when it abuts against the square tube. The upper welding head guide rail (710) and the lower welding head guide rail (720) are spaced apart to form a welding head straight portion accommodating cavity (740) and a welding head head accommodating cavity (750); A welding head (800) is connected to a welding trolley (760) on a welding trolley guide rail (730), and extends into a welding head head accommodating cavity (750) through a welding head straight portion accommodating cavity (740) to cover a section of the welding groove (500) to form the welding cavity (810), and to blow protective gas into the welding cavity (810).

2. The dust-proof welding device for semiconductor equipment frame plate accessories according to claim 1, characterized in that: The upper welding head guide rail (710) and the lower welding head guide rail (720) form a welding head straight portion accommodating cavity (740) on one side, each of which is provided with a straight portion upper guide groove (711) and a straight portion lower guide groove (721); The welding head (800) comprises: The straight portion (820) is inserted into a sealing ring (770) that is filled and wrapped around the upper guide groove (711) and the lower guide groove (721) of the straight portion, and the sealing ring (770) covers two walls of the straight portion (820) along the circumferential direction of the welding head straight portion accommodating cavity (740); a tail portion (830) connected to one end of the straight portion (820) and connected to the welding carriage (760); A head portion (840) is connected to the other end of the straight portion (820), extends into the welding head head accommodating cavity (750), and is suitable for welding the welding groove (500). Cover portions (850) are connected to both sides of the welding head straight portion accommodating cavity (740) in a circumferential direction, forming the welding cavity (810) that covers a section of the welding groove (500); Blowing gaps (860) are left between the upper wall surface of the cover portion (850) and the upper welding head guide rail (710), the front wall surface and the plate attachment (200) and the air inlet plate (100), and the lower wall surface and the square tube. A cover portion airflow guide groove (851) is opened on the rear wall surface of the cover portion (850) that is in contact with the upper welding head guide rail (710) and the lower welding head guide rail (720). The cover portion airflow guide groove (851) is connected to the left and right parts of the straight portion airflow guide groove (821) opened on the upper and lower walls of the straight portion (820), and the middle part of the straight portion airflow guide groove (821) extends to the welding cavity (810). The wall surface of the cover portion (850) located in the blowing gap (860) is provided with gap blowing holes (852), and the gap blowing holes (852) face the welding cavity (810); The other end of the straight portion airflow guide groove (821) extends out of the welding head straight portion accommodating cavity (740) and is covered by the air blowing cover (870).

3. The dust-proof welding device for semiconductor equipment frame plate accessories according to claim 2, characterized in that: The tail portion (830) is provided with a blowing joint (880) for supplying air to the gap blowing hole (852).

4. The dust-proof welding device for semiconductor equipment frame plate accessories according to claim 2, characterized in that: The air extraction component (400) comprises: An air extraction base plate (410) is provided with a rotating seat (420) corresponding to each positioning cylinder (110); The rotating seat (420) is provided with an air extraction pipe (430), and the air extraction pipe (430) is in transmission connection with a rotating driving member (440) next to the rotating seat (420); One end of the air extraction pipe (430) extends into the positioning cylinder (110) and abuts against the air inlet plate (100), and the outer wall of the air extraction pipe (430) abuts against the air extraction port (610) of the air inlet channel (600) of the corresponding group of air grooves (120); An exhaust hole (431) is formed at one end of the exhaust pipe (430) extending into the positioning cylinder (110) so that when the head (840) is moved to weld the welding groove (500), the protective gas is blown into the welding chamber (810) from the gap blowing hole (852) and the straight air flow guide groove (821). The exhaust pipe (430) is driven to rotate by the rotating driving member (440), so that the exhaust hole (431) is connected to the exhaust port (610) corresponding to the welded welding groove (500) for exhaust, so that the protective gas entering the welding chamber (810) forms an airflow passing through the weld point.

5. The dust-proof welding device for semiconductor equipment frame plate accessories according to claim 4, characterized in that: An exhaust hose clamping platform (451) is provided on the exhaust base plate (410), so that an exhaust hose (452) connected to each exhaust pipe (430) leaves a rotation buffer section (453) between the exhaust hose clamping platform (451) and the exhaust pipe (430).

6. The dust-proof welding device for semiconductor equipment frame plate accessories according to claim 4, characterized in that: The pressure plate assembly (300) comprises: A shaped plate (310) with side clamping screws (311) provided on its two arms; A bottom plate (320) adapted to be connected to the shaped plate (310), wherein a lower clamping screw (321) is provided on the bottom plate (320); A pressure plate arm (330) is provided on the shaped plate (310), and a pressure plate screw (331) is provided on the pressure plate arm (330), adapted to press the air extraction base plate (410) together with the plate attachment (200) and the air intake plate (100) onto the square tube when the air extraction base plate (410) is placed on the plate attachment (200); The upper welding head guide rail (710), the lower welding head guide rail (720), and the welding trolley guide rail (730) are connected to the shaped plate (310).

7. The dust-proof welding device for semiconductor equipment frame plate accessories according to claim 4, characterized in that: A track limiting clamp (780) is provided on the welding trolley guide rail (730).

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