Quartz cleaning tank positioning die

Abstract

The invention discloses a quartz cleaning tank positioning mold, and the quartz cleaning tank comprises a quartz plate which comprises a graphite bottom plate; the positioning mechanisms are distributed on the graphite bottom plate, each positioning mechanism comprises an outer fixing part and an inner fixing part, the outer fixing parts are arranged on the periphery of the graphite bottom plate and are oppositely arranged in pairs, and the inner fixing parts are located on one sides of the outer fixing parts; when the quartz plate is vertically arranged on the graphite bottom plate and one side of the quartz plate abuts against the outer fixing part, the inner fixing part abuts against the other side of the quartz plate, and therefore the quartz cleaning tank is positioned. The quartz cleaning tank can be accurately positioned, the operation is simple and convenient, the labor cost is saved, and the production efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor integrated circuits, and particularly to a positioning mold for a quartz cleaning tank. Background Art

[0002] In the production of integrated circuits, almost every process includes a step of silicon wafer cleaning, and the quality of silicon wafer cleaning has a great impact on the performance of devices. During the cleaning process, a high-purity quartz cleaning tank resistant to acid and alkali is required.

[0003] The quartz cleaning tank is a double-layer tank. The upper layer of the double-layer tank is formed by enclosing four quartz plates, and these four quartz plates are connected and fixed by welding. For the welding of the quartz cleaning tank, after reserving the required weld seams, graphite blocks are used to fix the quartz plates, that is, positioning before welding of the quartz cleaning tank is required.

[0004] For the positioning of the quartz cleaning tank, the conventional method is to rely on manual labor to place the graphite blocks together to fix the quartz plates. However, for the positioning mold built manually in this way, the dimensional accuracy of the positioned product is not high, and it needs to be adjusted repeatedly, and it is difficult to meet the product accuracy requirements. Other positioning methods are complex in operation, not easy to operate, and reduce production efficiency.

[0005] Therefore, it is necessary to provide a positioning mold for a quartz cleaning tank to solve the above problems existing in the prior art. Summary of the Invention

[0006] The purpose of the present invention is to provide a positioning mold for a quartz cleaning tank, which is used to accurately position the quartz cleaning tank, is simple to operate, saves labor costs, and improves production efficiency.

[0007] To achieve the above purpose, the technical solution of the present invention is as follows:

[0008] A positioning mold for a quartz cleaning tank, the quartz cleaning tank includes quartz plates, and includes:

[0009] A graphite bottom plate;

[0010] At least four groups of positioning mechanisms, which are distributed on the graphite bottom plate. Each group of the positioning mechanisms includes an outer fixing part and an inner fixing part. The outer fixing parts are arranged on the four sides of the graphite bottom plate and are arranged in pairs opposite to each other. The inner fixing part is located on one side of the outer fixing part. When the quartz plate is vertically placed on the graphite bottom plate and one side of the quartz plate abuts against the outer fixing part, the inner fixing part abuts against the other side of the quartz plate, so as to position the quartz cleaning tank.

[0011] Further, the graphite bottom plate is rectangular, and the four groups of positioning mechanisms are respectively arranged on the four rectangular sides of the graphite bottom plate. The four groups of positioning mechanisms include four outer fixing parts. Among them, two adjacent outer fixing parts are adjusted along the horizontal direction, and the other two outer fixing parts are adjusted along the horizontal direction and / or the vertical direction; on both sides of the adjacent graphite bottom plate, there are first installation grooves along the horizontal direction, and on the other two sides of the graphite bottom plate, there are second installation grooves along the horizontal direction and / or the vertical direction; two adjacent outer fixing parts are installed on the graphite bottom plate through the first installation grooves, and the other two outer fixing parts are installed on the graphite bottom plate through the second installation grooves.

[0012] Further, both the first installation groove and the second installation groove are multiple and are in strip shape.

[0013] Further, it further includes a quick-release part. The quick-release part penetrates into the first installation groove and the second installation groove to connect and fix the outer fixing part with the graphite bottom plate.

[0014] Further, the quick-release part includes a toggle bolt. The toggle bolt penetrates into the first installation groove and the second installation groove to connect and fix the outer fixing part with the graphite bottom plate.

[0015] Further, the outer fixing part includes multiple groups of first convex blocks, and the multiple groups of first convex blocks are evenly distributed on the inner surface of the outer fixing part.

[0016] Further, multiple groups of second convex blocks are arranged on the surface of the inner fixing part facing the quartz plate. When the quartz plate is placed on the graphite bottom plate and abuts against the outer fixing part, the second convex blocks are in contact with the quartz plate.

[0017] Further, the outer fixing part further includes a base part, a vertical part and a right-angled triangle part. The vertical part is fixedly connected with the base part, the right-angled side of the right-angled triangle part is fixedly connected with the vertical part, and the bottom side of the right-angled triangle part is fixedly connected with the base part.

[0018] Further, on the four rectangular sides of the graphite bottom plate, there are reference grooves adapted to the outer fixing parts. In each reference groove, there is the first installation groove or the second installation groove along its length direction. The outer fixing part is fixed in the reference groove through the first installation groove and the second installation groove.

[0019] Further, three groups of first convex blocks are evenly distributed on the inner surface of the outer fixing part, and the first convex blocks are trapezoidal.

[0020] As can be seen from the above technical solutions, the present invention adjusts the outer fixing part in the positioning mechanism horizontally and / or vertically on the graphite bottom plate, which can be applicable to quartz cleaning tanks of various sizes for positioning; and the first convex block and the second convex block are designed to contact the quartz plate, thereby reducing the contact area with the quartz plate and avoiding damage to the quartz plate, achieving precise positioning of the quartz cleaning tank before welding, saving labor costs, improving production efficiency, and greatly simplifying the positioning operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 FIG. is a schematic diagram of the working state of the quartz cleaning tank positioning die according to an embodiment of the present invention;

[0022] Figure 2 is Figure 1 a top view of the working state of the quartz cleaning tank positioning die shown.

[0023] In the figure: 1, graphite bottom plate; 2, outer fixing part; 21, first convex block; 22, base member; 23, vertical member; 24, right triangle member; 3, inner fixing part; 4, quick-release part; 5, quartz plate. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0024] In order to make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings understood by those of ordinary skill in the art in the field to which the present invention belongs. The words such as "including" used herein mean that the elements or objects appearing before this word cover the elements or objects listed after this word and their equivalents, without excluding other elements or objects.

[0025] The following will further describe in detail the specific embodiments of the present invention with reference to the drawings.

[0026] Such as Figure 1 - Figure 2As shown in the figure, an embodiment of the present invention provides a positioning mold for a quartz cleaning tank. The quartz cleaning tank includes a quartz plate 5, and comprises: a graphite bottom plate 1 and at least four groups of positioning mechanisms. The graphite bottom plate 1 serves as a base surface for carrying the positioning mechanisms and the quartz plate 5. At least four groups of positioning mechanisms are distributed on the graphite bottom plate 1. Each group of positioning mechanisms includes an outer fixing part 2 and an inner fixing part 3. The outer fixing parts 2 are respectively arranged on the four sides of the graphite bottom plate 1 and are arranged in pairs opposite to each other. The inner fixing part 3 is located on one side of the outer fixing part 2. When the quartz plate 5 is vertically placed on the graphite bottom plate 1 and one side of the quartz plate 5 abuts against the outer fixing part 2, the inner fixing part 3 abuts against the other side of the quartz plate 5, thereby positioning the quartz cleaning tank.

[0027] The outer fixing part 2, the quartz plate 5 and the inner fixing part 3 are sequentially arranged on the graphite bottom plate 1 from outside to inside. The outer fixing part 2 and the inner fixing part 3 clamp the quartz plate 5 in the middle, making it perpendicular to the graphite bottom plate 1, thereby accurately positioning the quartz cleaning tank, greatly simplifying the positioning operation, saving labor costs and improving production efficiency.

[0028] As Figure 1 - Figure 2 shown, in some embodiments of the present invention, the shape of the graphite bottom plate 1 is rectangular. There are four groups of positioning mechanisms, and the quartz cleaning tank includes four quartz plates 5. Each group of positioning mechanisms is used to position one quartz plate 5. The four groups of positioning mechanisms are respectively arranged on the four rectangular sides of the graphite bottom plate 1, that is, each group of positioning mechanisms is located in the middle position of a rectangular side.

[0029] Correspondingly, there are four outer fixing parts 2, which are distributed in the middle positions of the four rectangular sides of the graphite bottom plate 1 and are arranged in pairs opposite to each other. Among them, two adjacent outer fixing parts 2 adjust their positions on the graphite bottom plate 1 along the horizontal direction, and the other two outer fixing parts 2 adjust their positions on the graphite bottom plate 1 along the horizontal direction and / or the vertical direction. The horizontal direction refers to the direction in which any outer fixing part 2 is parallel to the side where it is located, and the vertical direction refers to the direction along the direction close to the center position of the graphite bottom plate 1. The line in the horizontal direction and the line in the vertical direction are perpendicular to each other. For example, the four outer fixing parts 2 are respectively located at the top, bottom, left and right (top, bottom, left and right are Figure 2 shown as top, bottom, left and right). The outer fixing part 2 located at the top and the outer fixing part 2 located at the left can only adjust their positions along the direction parallel to the side where they are located, that is, only along the horizontal direction; the outer fixing part 2 located at the bottom and the outer fixing part 2 located at the right can not only adjust their positions along the direction parallel to the side where they are located, but also adjust their positions along the direction close to the center position of the graphite bottom plate 1, that is, they can adjust their positions along the horizontal direction and also along the vertical direction. Thus, it can be applicable to quartz cleaning tanks of various different sizes.

[0030] Correspondingly, there are also four inner fixing parts 3. The inner fixing parts 3 are arranged on the graphite bottom plate 1 and on one side of the outer fixing parts 2. Each corresponding outer fixing part 2 and inner fixing part 3 cooperate to fix a quartz plate 5. The number of the inner fixing parts 3 corresponds to that of the outer fixing parts 2 one by one. For example, if there are four outer fixing parts 2, then correspondingly, there are also four inner fixing parts 3. At the same time, the positions of the inner fixing parts 3 and the outer fixing parts 2 also correspond to each other one by one. The inner fixing part 3 is rectangular. The quartz plate 5 is leaned against the inner surface of the outer fixing part 2 (the surface of the outer fixing part 2 facing the quartz plate 5) to ensure the perpendicular accuracy of the quartz plate 5 to the graphite bottom plate 1. Then, the inner fixing part 3 is pressed against the quartz plate 5, thereby fixing the quartz plate 5 on the graphite bottom plate 1. In the same way, after fixing the four quartz plates 5, welding is carried out, so as to achieve precise positioning.

[0031] Of course, two groups of positioning mechanisms can also be set up to position a quartz plate 5 at the same time. The specific operation method is analogous to the above embodiment and will not be elaborated here.

[0032] In some embodiments of the present invention, the inner fixing part 3 fixes the quartz plate 5 in the following way: manually pick up the inner fixing part 3 and lean it against the side surface of the quartz plate 5 that has already contacted the outer fixing part 2, and rely on the gravity of the inner fixing part 3 to clamp the quartz plate 5 between the outer fixing part 2 and the inner fixing part 3, so as to ensure that it is fixed perpendicular to the graphite bottom plate 1.

[0033] In other embodiments of the present invention, the inner fixing part 3 fixes the quartz plate 5 in the following way: use a toggle bolt to fix the inner fixing part 3 on the graphite bottom plate 1. When the quartz plate 5 is placed between the outer fixing part 2 and the inner fixing part 3, adjust the position of the inner fixing part 3 on the graphite bottom plate 1, and rely on the inner fixing part 3 to be fixed to the graphite bottom plate 1 with a toggle bolt, so that the quartz plate 5 is fixed perpendicular to the graphite bottom plate 1.

[0034] As Figure 2 shown, in some embodiments of the present invention, first installation grooves along the horizontal direction are provided on both adjacent sides of the graphite bottom plate 1, and second installation grooves along the horizontal direction and / or the vertical direction are provided on the other two sides of the graphite bottom plate 1. Two adjacent outer fixing parts 2 are installed on the graphite bottom plate 1 through the first installation grooves, and the other two outer fixing parts 2 are installed on the graphite bottom plate 1 through the second installation grooves.

[0035] In some embodiments of the present invention, both the first mounting groove and the second mounting groove are multiple and are in a long strip shape. For example, there are six first mounting grooves provided on the upper and left sides of the graphite base plate 1, that is, there are six first mounting grooves provided along the horizontal direction on the upper and left sides of the graphite base plate 1. The outer fixing parts 2 located on the upper and left sides are installed in the first mounting grooves for fixing, and the position of the outer fixing part 2 in the first mounting groove can be adjusted arbitrarily along the horizontal direction. The second mounting grooves provided on the lower and right sides of the graphite base plate 1 are 3 rows × 4 columns (wherein, there are 4 in one row and 3 in one column), that is, the second mounting grooves provided along the horizontal direction on the lower and right sides of the graphite base plate 1 are 3 rows, and the second mounting grooves provided along the vertical direction are 4 columns. The outer fixing parts 2 located on the lower and right sides are installed in the second mounting grooves for fixing, and the position of the outer fixing part 2 in the second mounting groove can be adjusted arbitrarily along the horizontal direction and / or the vertical direction. One outer fixing part 2 corresponds to two first mounting grooves or second mounting grooves, and can be flexibly adjusted according to the actual situation. The first mounting groove and the second mounting groove are set in a long strip shape, which can further flexibly adapt to quartz cleaning tanks of any size.

[0036] As Figure 2 shown, in some embodiments of the present invention, the quartz cleaning tank positioning mold further includes a quick-release part 4. The quick-release part penetrates into the first mounting groove and the second mounting groove to connect and fix the outer fixing part 2 with the graphite base plate 1. The quick-release part 4 includes a fastener and a handle, wherein the fastener and the handle can be an integral structure or a split structure. The setting of the quick-release part 4 facilitates the quick adjustment of the position of the outer fixing part 2 in the horizontal and vertical directions, so as to adapt to quartz cleaning tanks of various sizes.

[0037] As Figure 2 shown, in some embodiments of the present invention, the quick-release part 4 includes a toggle bolt. The toggle bolt penetrates into the first mounting groove and the second mounting groove to connect and fix the outer fixing part 2 with the graphite base plate 1. The toggle bolt is convenient for manual installation and disassembly. One outer fixing part 2 is paired with two toggle bolts, which can quickly disassemble and install the outer fixing part 2 installed in the first mounting groove or the second mounting groove, and adjust the position of the outer fixing part 2 on the graphite base plate 1; according to the quartz cleaning tank of the actual size, the outer fixing part 2 is installed in the appropriate first mounting groove and second mounting groove. In this way, the operation is simple and fast, which greatly improves the efficiency.

[0038] As Figure 1 - Figure 2As shown, in some embodiments of the present invention, the outer fixing portion 2 includes multiple groups of first bumps 21. The multiple groups of first bumps 21 are evenly distributed on the inner surface of the outer fixing portion 2. Each group of first bumps 21 includes two first bumps 21. Each group of first bumps 21 is located on both sides of the inner surface of the outer fixing portion 2, thereby relatively expanding the indirect contact area with the quartz plate 5 and fixing the quartz plate 5 more firmly. Since the four first bumps 21 constitute an indirect contact area sufficient to hold up the quartz plate 5, the four first bumps 21 directly contact the quartz plate 5, greatly reducing the direct contact area and avoiding damaging the quartz plate 5. Therefore, in practical applications, only four first bumps 21 are needed.

[0039] In some embodiments of the present invention, multiple groups of second bumps are provided on the surface of the inner fixing portion 3 facing the quartz plate 5. When the quartz plate 5 is placed on the graphite bottom plate 1 and abuts against the outer fixing portion 2, the second bumps contact the quartz plate 5. Providing the second bumps on the inner fixing portion 3 results in a relatively small direct contact surface with the quartz plate 5, avoiding damaging the quartz plate 5. Similarly, in practical applications, only four second bumps are needed.

[0040] As Figure 1 - Figure 2 shown, in some other embodiments of the present invention, no second bumps are provided on the surface of the inner fixing portion 3 facing the quartz plate 5. In this way, the surface of the inner fixing portion 3 facing the quartz plate 5 directly contacts the quartz plate 5 and holds up the quartz plate 5, thereby fixing the quartz plate 5. However, in this embodiment, the contact surface between the inner fixing portion 3 and the quartz plate 5 is too large, which may damage the quartz plate 5.

[0041] As Figure 1 shown, in some embodiments of the present invention, three groups of first bumps 21 are evenly provided on the inner surface of the outer fixing portion 2. According to the actual size of the quartz plate 5, the first bumps 21 are flexibly selected. For example, Figure 1 the three groups of first bumps 21 shown in [FIGURE REFERENCE] are respectively located at the upper, middle, and lower positions. When the size of the quartz plate 5 is large, the first bumps 21 in the upper and lower groups are selected; when the size of the quartz plate 5 is small, the first bumps 21 in the middle and lower groups are selected. The number of groups of the first bumps 21 is flexibly designed according to the size requirement of the quartz plate 5. The first bumps 21 are trapezoidal in shape. The smaller surface of the trapezoidal bump contacts the quartz plate 5, and the larger surface of the trapezoidal bump is fixed to the outer fixing portion 2, thereby reducing the contact area with the quartz plate 5 and avoiding damaging the quartz plate 5. The shape of the first bumps 21 can also be other shapes, which will not be listed one by one here. Similarly, the second bumps provided on the inner fixing portion 3 can also be evenly provided in three groups and can be trapezoidal in shape.

[0042] As Figure 1As shown, in some embodiments of the present invention, the external fixing part 2 further includes a base member 22, a vertical member 23, and a right triangle member 24. The vertical member 23 is fixedly connected to the base member 22. One right-angled side of the right triangle member 24 is fixedly connected to the vertical member 23, and the base of the right triangle member 24 is fixedly connected to the base member 22 and the right triangle member 24 is located at the middle position of the base member. The base member 22, the vertical member 23, the right triangle member 24, and the first convex block 21 are of an integral structure. Of course, the base member 22, the vertical member 23, the right triangle member 24, and the first convex block 21 may not adopt an integral structure either. The right triangle member 24 improves the stability of the external fixing part 2.

[0043] As Figure 1 - Figure 2 shown, in some embodiments of the present invention, reference grooves adapted to the external fixing part 2 are provided on the four rectangular sides of the graphite bottom plate 1. The reference grooves serve as the right-angle reference for the external fixing part. The top surface of the base member 22 of the external fixing part 2 is flush with the surface of the graphite bottom plate 1, so that the external fixing part 2 is perpendicular to the graphite bottom plate 1. The number of reference grooves is specifically set according to the actual situation. Each reference groove is provided with a first installation groove or a second installation groove along its length direction. The external fixing part 2 is fixed in the reference groove through the first installation groove and the second installation groove. That is, the base member 22 is placed in the reference groove, and a toggle bolt is used to fasten the base member 22, thereby locking the external fixing part 2 in the reference groove and ensuring that the external fixing part 2 is perpendicular to the graphite bottom plate 1.

[0044] When using the above quartz cleaning tank positioning mold, for example, the positioning mechanism is four groups, that is, both the external fixing part 2 and the internal fixing part 3 are four. The specific operation steps are as follows:

[0045] Step S1: Provide a movable stainless-steel work cart. Using a movable work cart as a workbench can be moved at any time according to production needs, which is very flexible and convenient.

[0046] Step S2: Place a large rectangular graphite bottom plate 1 on the workbench surface of the stainless-steel work cart. This graphite bottom plate 1 has reference grooves serving as right-angle references. Appropriate first installation grooves and second installation grooves are provided in the reference grooves.

[0047] Step S3: Provide four external fixing parts 2 that play a role in limiting and fixing. For example, provide four graphite blocks, which are respectively used to fix the four sides and are adapted to the first installation grooves and second installation grooves provided on the reference grooves. Use toggle bolts to lock in the corresponding first installation grooves and second installation grooves to prevent the graphite blocks from shaking, thereby controlling the perpendicularity of the quartz plate 5 and limiting it.

[0048] Step S4: Adjust the positions of the graphite blocks according to the different sizes of the quartz cleaning tank. For example, the graphite blocks located at the upper and left positions adjust the positions of the first mounting grooves they are in horizontally, but cannot be adjusted vertically. Thus, the graphite blocks at the upper and left positions can be used as reference positions, that is, they are fixed and not disassembled or moved anymore; the graphite blocks at the lower and right positions can be adjusted both horizontally and vertically in the positions of the second mounting grooves they are in, and can be flexibly applied to quartz cleaning tanks of various sizes, becoming a universal mold.

[0049] Step S5: Place the quartz plate 5 in contact with the four first convex blocks 21 of the graphite block, and then press the four inner fixing parts 3 against the quartz plate 5, so as to fix the quartz plate 5 between the graphite block and the inner fixing part 3, thereby forming a quartz cleaning tank with a preset size.

[0050] In summary, in the present invention, by designing the outer fixing part in the positioning mechanism to be adjusted horizontally and / or vertically on the graphite bottom plate, it can be applicable to position quartz cleaning tanks of various sizes; and by designing the first convex block and the second convex block to be in contact with the quartz plate, the contact area with the quartz plate is reduced, avoiding damage to the quartz plate, realizing accurate positioning of the quartz cleaning tank before welding, saving labor costs, improving production efficiency, and greatly simplifying the positioning operation.

[0051] Although the embodiments of the present invention have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are all within the scope and spirit of the present invention described in the claims. Moreover, the present invention described herein can have other embodiments and can be implemented or realized in various ways.

Claims

1. A positioning mold for a quartz cleaning tank, the quartz cleaning tank comprising a quartz plate, Characterized in that, Comprising: A graphite bottom plate; At least four groups of positioning mechanisms, which are distributed on the graphite bottom plate. Each group of the positioning mechanisms includes an outer fixing part and an inner fixing part. The outer fixing parts are arranged on the four sides of the graphite bottom plate and are arranged in pairs opposite to each other. The inner fixing part is located on one side of the outer fixing part. When the quartz plate is vertically placed on the graphite bottom plate and one side of the quartz plate abuts against the outer fixing part, the inner fixing part abuts against the other side of the quartz plate, so as to position the quartz cleaning tank.

2. The positioning mold for a quartz cleaning tank according to claim 1, Characterized in that, The graphite bottom plate is rectangular, and the four groups of positioning mechanisms are respectively arranged on the four sides of the rectangle of the graphite bottom plate. The four groups of positioning mechanisms include four outer fixing parts. Among them, two adjacent outer fixing parts are adjusted along the horizontal direction, and the other two outer fixing parts are adjusted along the horizontal direction and / or the vertical direction; First installation grooves along the horizontal direction are provided on both sides of the adjacent graphite bottom plate, and second installation grooves along the horizontal direction and / or the vertical direction are provided on the other two sides of the graphite bottom plate; Two adjacent outer fixing parts are installed on the graphite bottom plate through the first installation grooves, and the other two outer fixing parts are installed on the graphite bottom plate through the second installation grooves.

3. The positioning mold for a quartz cleaning tank according to claim 2, Characterized in that, Both the first installation groove and the second installation groove are multiple and are in strip shapes.

4. The positioning mold for a quartz cleaning tank according to claim 3, Characterized in that, It further includes a quick-release part, and the quick-release part penetrates into the first installation groove and the second installation groove to connect and fix the outer fixing part and the graphite bottom plate.

5. The positioning mold for a quartz cleaning tank according to claim 4, Characterized in that, The quick-release part includes a toggle bolt, and the toggle bolt penetrates into the first installation groove and the second installation groove to connect and fix the outer fixing part and the graphite bottom plate.

6. The positioning mold for a quartz cleaning tank according to claim 1, Characterized in that, The outer fixing part includes multiple groups of first convex blocks, and the multiple groups of first convex blocks are evenly distributed on the inner surface of the outer fixing part.

7. The positioning mold for a quartz cleaning tank according to claim 1, Characterized in that, Multiple groups of second convex blocks are arranged on the surface of the inner fixing part facing the quartz plate. When the quartz plate is placed on the graphite bottom plate and abuts against the outer fixing part, the second convex blocks contact the quartz plate.

8. The positioning mold for a quartz cleaning tank according to claim 1, Characterized in that, The outer fixing part further includes a base part, a vertical part and a right triangle part. The vertical part is fixedly connected to the base part, the right-angled side of the right triangle part is fixedly connected to the vertical part, and the bottom side of the right triangle part is fixedly connected to the base part.

9. The positioning mold for a quartz cleaning tank according to claim 2, Characterized in that, Benchmark grooves adapted to the outer fixing part are formed on the four rectangular sides of the graphite base plate, and the first installation groove or the second installation groove along its length direction is arranged in each of the benchmark grooves, and the outer fixing part is fixed in the benchmark groove through the first installation groove and the second installation groove.

10. The quartz cleaning tank positioning mold according to claim 6, characterized in that the three groups of the first convex blocks are evenly distributed on the inner surface of the outer fixing part, and the first convex blocks are trapezoidal.

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