Cooling runner system of crucible slewing mechanism

Abstract

The cooling runner system comprises a water inlet, a water inlet runner, a water uniformizing device, a water outlet runner and a water outlet, the water inlet runner penetrates through a rotating shaft and is located on the axis of the rotating shaft, the water inlet is formed in the side edge, close to the lower portion, of the water inlet runner, and the output end of the water inlet is connected with the input end of the water inlet runner; a water uniformizing device is arranged in the crucible body, the top of the water inlet flow channel penetrates through the center of the bottom of the crucible body and the water uniformizing device to reach the upper portion of the water uniformizing device, the water uniformizing device comprises a water uniformizing disc and guide pieces, the upper side surface and the lower side surface of the water uniformizing disc are each provided with a plurality of guide pieces diverging towards the periphery, and the guide pieces on each side are arranged in the circumferential direction of the circle center of the water uniformizing disc. The water outlet runner is arranged on the outer ring of the water inlet runner, so that the inner wall of the water outlet runner and the outer wall of the water inlet runner form a water flow passageway for water outlet, the input end of the water flow passageway is connected with the output end of the water uniformizing device, and the output end of the water flow passageway is connected with the water outlet.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum evaporation coating machines, and more specifically, to a cooling channel system for a crucible rotation mechanism. Background Art

[0002] The evaporation coating machine is mainly used for depositing thin films on a substrate. By heating an evaporation source (usually a crucible), the material is evaporated and then condensed onto the surface of the substrate in a vacuum environment. The role of the crucible rotation mechanism is to rotate the crucible evenly to ensure uniform distribution of the evaporated material, and the cooling system is used to control the temperature of the crucible to prevent overheating. The traditional cooling structure is not efficient enough, resulting in unstable temperature control, affecting the coating quality. Moreover, the cooling channel design is unreasonable, leading to heat stress concentration and affecting the service life of the equipment.

[0003] The prior art CN219385299U discloses a crucible with a water-cooling structure, which sets a flow channel wall. Although it can extend the water flow path, the cross-section of the flow channel is fixed and gradually becomes higher from the inside to the outside, which may lead to uneven distribution of water flow velocity. The flow velocity in the area near the water inlet hole is fast, while the flow velocity on the outside decreases, easily forming a turbulent dead corner and reducing the overall heat exchange efficiency. The cooling water flows unidirectionally from the inside to the outside through the spiral flow channel wall, which may result in a large temperature gradient in different regions of the crucible body.

[0004] Therefore, a cooling channel system for a crucible rotation mechanism is needed to solve the problems of heat exchange efficiency and temperature uniformity. Summary of the Invention

[0005] In view of this, in order to solve the problems that the cross-section of the above-mentioned technical inlet flow channel is fixed and gradually becomes higher from the inside to the outside, which may lead to uneven distribution of water flow velocity, the flow velocity in the area near the water inlet hole is fast, while the flow velocity on the outside decreases, easily forming a turbulent dead corner and reducing the overall heat exchange efficiency, and the cooling water flows unidirectionally from the inside to the outside, which may result in a large temperature gradient in different regions of the crucible body, the present invention proposes a cooling channel system for a crucible rotation mechanism. By setting a water distribution device and using guide vanes and diversion holes, the effect of increasing the cooling area is achieved. The inner and outer channels are separated for inlet and outlet water, and at the same time, a top positioning guide groove is set to further make the water flow distribution uniform and improve the cooling effect.

[0006] A cooling channel system for a crucible rotating mechanism, the crucible rotating mechanism being arranged on the cavity bottom plate 1 of a vacuum evaporation machine. The crucible rotating mechanism includes an electron gun device 2, a crucible body 3, and a rotating mechanism 4. The crucible body 3 is arranged on the top of the rotating mechanism 4, and the electron gun device 2 is arranged on one side of the crucible body 3. The crucible body 3 is driven to rotate by the rotating mechanism 4. After the electron gun device 2 is deflected by a magnetic field, it emits an electron beam to bombard and heat the film material in the crucible to achieve heating. The rotating mechanism 4 includes a rotating shaft 42. It is characterized in that: a cooling channel system is provided inside the rotating mechanism 4 and the crucible body 3. The cooling channel system includes a water inlet 43, a water inlet channel 45, a water distribution device 5, a water outlet channel 46, and a water outlet 44. The water inlet channel 45 penetrates through the rotating shaft 42 and is located on the axis of the rotating shaft 42. The water inlet 43 is arranged on the side of the water inlet channel 45 close to the lower part, and the output end of the water inlet 43 is connected to the input end of the water inlet channel 45. A water distribution device 5 is arranged inside the crucible body 3. The top of the water inlet channel 45 passes through the bottom center of the crucible body 3 and the water distribution device 5 to the upper part of the water distribution device 5. The water distribution device 5 includes a water distribution disc 51 and guide vanes 55. A plurality of guide vanes 55 diverging in all directions are arranged on both the upper and lower surfaces of the water distribution disc 51. Each side of the guide vanes 55 is circumferentially arranged around the center of the water distribution disc 51. The water outlet channel 46 is arranged on the outer circle of the water inlet channel 45, so that the inner wall of the water outlet channel 46 and the outer wall of the water inlet channel 45 form a water flow channel 47 for water outlet. The input end of the water flow channel 47 is connected to the output end of the water distribution device 5, and the output end of the water flow channel 47 is connected to the water outlet 44. After the cooling water enters the water inlet channel 45 from the water inlet 43, it flows upward due to the impact force to the water distribution device 5. After cooling, the water flows downward from the water distribution device 5 into the water flow channel 47 and is then drawn out by the water outlet 44.

[0007] Further, an inlet joint 422 and an outlet joint 423 are arranged on the outer wall of the rotating shaft 42. The output end of the inlet joint 422 is connected to the input end of the water inlet 43, and the output end of the water outlet 44 is communicated with the input end of the outlet joint 423.

[0008] Further, a partition 48 is arranged between the water inlet 43 and the water outlet 44, so that the water inlet 43 and the water outlet 44 are separated for water inlet and outlet.

[0009] Further, the water inlet 43 includes a first water inlet 431 and a second water inlet 432. The first water inlet 431 is provided at the same position on the outer circle of the second water inlet 432. A water storage chamber 49 is provided between the first water inlet 431, the second water inlet 432, and the partition 48. The water inlet flow channel 45 rotates synchronously with the rotating shaft 42. When cooling water is introduced, if the water inlet joint 422 is aligned with the first water inlet 431, it directly enters the water inlet flow channel 45 due to the impact force. If the water inlet joint 422 is not aligned with the first water inlet 431, the cooling water enters the water storage chamber 49 for temporary storage. When the water storage chamber 49 is filled with water to overflow the second water inlet 432, the cooling water directly enters the second water inlet 432 from the water storage chamber 49 and then enters the water inlet flow channel 45.

[0010] In some embodiments, two first water inlets 431 and two second water inlets 432 can be provided, and they are symmetric about the central axis of the water inlet flow channel 45 to increase the water inlet flow rate.

[0011] Further, the crucible body 3 includes a crucible top plate 32 and a bottom sealing plate 33. The crucible top plate 32 and the bottom sealing plate 33 are snap-connected, and a sealing ring is provided at the snap-connection. The water distribution device 5 is arranged between the crucible top plate 32 and the bottom sealing plate 33. A groove 321 is provided at the center of the bottom of the crucible top plate 32. The top of the water inlet flow channel 45 passes through the center of the bottom of the bottom sealing plate 33 and the water distribution device 5 and enters the groove 321. Through fluid simulation analysis, when a water flow with a constant initial pressure flows upward, when passing through the groove 321, the density of the liquid proportion in the groove 321 area is basically the same, making the fluid distribution uniform. After the water flow rushes upward from the water inlet flow channel 45 and reaches the top of the groove 321, it flows downward to the water distribution plate 51 due to gravity.

[0012] Further, the cross-section of the groove 321 is a trapezoid with a narrow top and a wide bottom, which provides a guiding effect on the water flow that rushes to the top of the groove 321. The water inlet flow channel 45 rotates synchronously with the rotating shaft 42, so that after the water flow rushes out, it can be divided into multiple tributaries along the side wall of the groove 321 and flow to the upper surface of the water distribution plate 51, and the water flow is more uniform when flowing down, and the cooling effect is uniform.

[0013] Further, a first opening 52 is provided at the center of the water distribution plate 51, so that the water flow rushes through the first opening 52 from the water inlet flow channel 45, reaches the groove 321, and then flows to the water distribution device 5, and is evenly dispersed to the periphery of the water distribution plate 51 through a plurality of guiding fins 55, increasing the cooling area and improving the cooling effect.

[0014] Further, a circle of diversion holes 54 is densely arranged at the edge of the water distribution plate 51. The diversion holes 54 are arranged at equal intervals, so that the water flow is diverted through the diversion holes 54, increasing the cooling area and improving the cooling effect.

[0015] Furthermore, the guiding piece 55 is L-shaped, with a long side and a short side. The short side of the guiding piece 55 is perpendicular to the water distribution plate 51, the long side of the guiding piece 55 is connected to the water distribution plate 51, and the short sides of the guiding pieces 55 are all located on the same side along the circumferential direction, so as to make the water flow in the same direction when passing through each guiding piece 55. The short side of the guiding piece 55 is aligned with the center of the first opening 52.

[0016] Furthermore, a plurality of card slots 421 are annularly arranged at the top of the rotating shaft 42, and a plurality of connecting bolts 31 are annularly arranged in the middle of the crucible body 3. The connecting bolts 31 are clamped with the card slots 421 at the top of the rotating shaft 42 from the upper part of the crucible body 3 downwards. A plurality of second openings 53 surrounding the opening are arranged outside the first opening 52, and each second opening 53 is arranged at an interval from the guiding piece 55 for passing through the connecting bolts 31.

[0017] The beneficial effects of the present invention: The present invention provides a cooling flow channel system for a crucible rotating mechanism. The cooling flow channel system includes a water inlet 43, an inlet water flow channel 45, a water distribution device 5, an outlet water flow channel 46, and a water outlet 44. The inlet water flow channel 45 penetrates through the rotating shaft 42 and is located on the axis of the rotating shaft 42. The water inlet 43 is arranged on the side close to the lower part of the inlet water flow channel 45, and the output end of the water inlet 43 is connected to the input end of the inlet water flow channel 45. A water distribution device 5 is arranged in the crucible body 3. The top of the inlet water flow channel 45 passes through the bottom center of the crucible body 3 and the water distribution device 5 to the upper part of the water distribution device 5. The water distribution device 5 includes a water distribution plate 51 and guiding pieces 55. A plurality of guiding pieces 55 diverging in all directions are arranged on both the upper and lower surfaces of the water distribution plate 51, and each side of the guiding pieces 55 is circumferentially arranged with the center of the water distribution plate 51 as the center. The outlet water flow channel 46 is arranged on the outer circle of the inlet water flow channel 45, so that the inner wall of the outlet water flow channel 46 and the outer wall of the inlet water flow channel 45 form a water flow channel 47 for discharging water. The input end of the water flow channel 47 is connected to the output end of the water distribution device 5, and the output end of the water flow channel 47 is connected to the water outlet 44. After the cooling water enters the inlet water flow channel 45 from the water inlet 43, it flows upwards due to the impact force to the water distribution device 5. After cooling, the water flows downwards from the water distribution device 5 into the water flow channel 47 and is then drawn out by the water outlet 44. Description of the Drawings

[0018] Figure 1 It is the overall structure diagram of the crucible rotating mechanism of the present invention.

[0019] Figure 2 It is the overall external structure diagram of the cooling flow channel system of the crucible rotating mechanism of the present invention.

[0020] Figure 3 It is the sectional view of the cooling flow channel system of the crucible rotating mechanism of the present invention.

[0021] Figure 4 This is a partial sectional view of the cooling channel system of the crucible rotating mechanism of the present invention.

[0022] Figure 5 This is an enlarged structural view of the water inlet and outlet of the cooling channel system of the crucible rotating mechanism of the present invention.

[0023] Figure 6 This is a connection structural view of the water equalizing device and the bottom sealing plate of the cooling channel system of the crucible rotating mechanism of the present invention.

[0024] Figure 7 This is an enlarged top view of the rotating shaft of the cooling channel system of the crucible rotating mechanism of the present invention.

[0025] Description of main component symbols

[0026] Base plate 1, electron gun device 2, crucible body 3, connecting bolt 31, crucible top plate 32, groove 321, bottom sealing plate 33, rotating mechanism 4, connecting plate 41, rotating shaft 42, card slot 421, water inlet joint 422, water outlet joint 423, water inlet 43, first water inlet 431, second water inlet 432, water outlet 44, water inlet channel 45, water outlet channel 46, water flow channel 47, partition 48, water storage chamber 49, water equalizing device 5, water equalizing plate 51, first opening 52, second opening 53, shunt hole 54, guiding piece 55.

[0027] The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings. Specific embodiments Embodiment 1:

[0028] A cooling channel system for a crucible rotating mechanism. The crucible rotating mechanism is arranged on the cavity bottom plate 1 of a vacuum evaporation coater. The crucible rotating mechanism includes an electron gun device 2, a crucible body 3, and a rotating mechanism 4. The crucible body 3 is arranged on the top of the rotating mechanism 4, and the electron gun device 2 is arranged on one side of the crucible body 3. The crucible body 3 is driven to rotate by the rotating mechanism 4. After the electron gun device 2 is deflected by a magnetic field, it emits an electron beam to bombard and heat the film material in the crucible to achieve heating. The rotating mechanism 4 includes a rotating shaft 42. It is characterized in that: a cooling channel system is arranged inside the rotating mechanism 4 and the crucible body 3. The cooling channel system includes a water inlet 43, an inlet water channel 45, a water distribution device 5, an outlet water channel 46, and a water outlet 44. The inlet water channel 45 penetrates through the rotating shaft 42 and is located on the axis of the rotating shaft 42. The water inlet 43 is arranged on the side of the inlet water channel 45 close to the lower part, and the output end of the water inlet 43 is connected to the input end of the inlet water channel 45. A water distribution device 5 is arranged inside the crucible body 3. The top of the inlet water channel 45 passes through the bottom center of the crucible body 3 and the water distribution device 5 to the upper part of the water distribution device 5. The water distribution device 5 includes a water distribution plate 51 and guide vanes 55. A plurality of guide vanes 55 diverging towards the surroundings are arranged on both the upper and lower surfaces of the water distribution plate 51. Each side of the guide vanes 55 is circumferentially arranged around the center of the water distribution plate 51. The outlet water channel 46 is arranged on the outer ring of the inlet water channel 45, so that the inner wall of the outlet water channel 46 and the outer wall of the inlet water channel 45 form a water flow channel 47 for water outlet. The input end of the water flow channel 47 is connected to the output end of the water distribution device 5, and the output end of the water flow channel 47 is connected to the water outlet 44. After the cooling water enters the inlet water channel 45 from the water inlet 43, it flows upward due to the impact force to the water distribution device 5. After cooling, the water flows downward from the water distribution device 5 into the water flow channel 47 and is then pumped out by the water outlet 44.

[0029] An inlet water joint 422 and an outlet water joint 423 are arranged on the outer wall of the rotating shaft 42. The output end of the inlet water joint 422 is connected to the input end of the water inlet 43, and the output end of the water outlet 44 is communicated with the input end of the outlet water joint 423.

[0030] A partition 48 is arranged between the water inlet 43 and the water outlet 44, so that the water inlet 43 and the water outlet 44 are separated for water inlet and outlet.

[0031] The water inlet 43 includes a first water inlet 431 and a second water inlet 432. The first water inlet 431 is provided at the same position on the outer circle of the second water inlet 432. A water storage chamber 49 is provided between the first water inlet 431, the second water inlet 432, and the partition 48. The water inlet flow channel 45 rotates synchronously with the rotating shaft 42. When cooling water is introduced, if the water inlet joint 422 is aligned with the first water inlet 431, it directly enters the water inlet flow channel 45 due to the impact force. If the water inlet joint 422 is not aligned with the first water inlet 431, the cooling water enters the water storage chamber 49 for temporary storage. When the water storage chamber 49 is filled with water to overflow the second water inlet 432, the cooling water directly enters the second water inlet 432 from the water storage chamber 49 and then enters the water inlet flow channel 45.

[0032] Both the first water inlet 431 and the second water inlet 432 can be provided with two, and are symmetric about the central axis of the water inlet flow channel 45 to increase the water inlet flow rate.

[0033] The crucible body 3 includes a crucible top plate 32 and a bottom sealing plate 33. The crucible top plate 32 and the bottom sealing plate 33 are snap-connected, and a sealing ring is provided at the snap-connection. The water distribution device 5 is arranged between the crucible top plate 32 and the bottom sealing plate 33. A groove 321 is provided at the center of the bottom of the crucible top plate 32. The top of the water inlet flow channel 45 passes through the center of the bottom of the bottom sealing plate 33 and the water distribution device 5 and enters the groove 321. Through fluid simulation analysis, when a water flow with a constant initial pressure flows upward, when passing through the groove 321, the density of the liquid proportion in the groove 321 area is basically the same, making the fluid distribution uniform. After the water flow rushes upward from the water inlet flow channel 45 and reaches the top of the groove 321, it flows downward due to gravity to the water distribution plate 51.

[0034] The cross-section of the groove 321 is a trapezoid with a narrow upper part and a wide lower part, providing a guiding effect on the water flow that rushes to the top of the groove 321. The water inlet flow channel 45 rotates synchronously with the rotating shaft 42, so that after the water flow rushes out, it can be divided into multiple branch flows along the side wall of the groove 321 and flow to the upper surface of the water distribution plate 51, making the water flow more uniform when flowing down and the cooling effect uniform.

[0035] A first opening 52 is provided at the center of the water distribution plate 51, so that the water flow rushes through the first opening 52 from the water inlet flow channel 45, reaches the groove 321, and then flows to the water distribution device 5, and is evenly dispersed to the periphery of the water distribution plate 51 through a plurality of guide vanes 55, increasing the cooling area and improving the cooling effect.

[0036] A circle of shunt holes 54 is densely arranged at the edge of the water distribution plate 51. The shunt holes 54 are arranged at equal intervals, so that the water flow is shunted through the shunt holes 54, increasing the cooling area and improving the cooling effect.

[0037] The guiding piece 55 is L-shaped, with a long side and a short side. The short side of the guiding piece 55 is perpendicular to the water distribution plate 51, the long side of the guiding piece 55 is connected to the water distribution plate 51, and the short sides of the guiding pieces 55 are all located on the same side along the circumferential direction of the loop, so as to make the water flow in the same direction when passing through each guiding piece 55. The short side of the guiding piece 55 is aligned with the center of the first opening 52.

[0038] A plurality of clamping grooves 421 are annularly arranged at the top of the rotating shaft 42. A plurality of connecting bolts 31 are annularly arranged in the middle of the crucible body 3. The connecting bolts 31 are clamped with the clamping grooves 421 at the top of the rotating shaft 42 from the upper part of the crucible body 3 downwards. A plurality of second openings 53 surrounding the opening are arranged outside the first opening 52. Each second opening 53 is arranged at an interval from the guiding piece 55 and is used for passing through the connecting bolts 31.

[0039] The beneficial effects of the present invention: The present invention provides a cooling flow channel system for a crucible rotary mechanism. The cooling flow channel system includes a water inlet 43, a water inlet flow channel 45, a water distribution device 5, a water outlet flow channel 46, and a water outlet 44. The water inlet flow channel 45 penetrates through the rotating shaft 42 and is located on the axis of the rotating shaft 42. The water inlet 43 is arranged on the side close to the lower part of the water inlet flow channel 45, and the output end of the water inlet 43 is connected to the input end of the water inlet flow channel 45. A water distribution device 5 is arranged in the crucible body 3. The top of the water inlet flow channel 45 passes through the bottom center of the crucible body 3 and the water distribution device 5 to the upper part of the water distribution device 5. The water distribution device 5 includes a water distribution plate 51 and guiding pieces 55. A plurality of guiding pieces 55 diverging towards the surroundings are arranged on both the upper and lower surfaces of the water distribution plate 51. Each side of the guiding pieces 55 is circumferentially arranged around the center of the water distribution plate 51. The water outlet flow channel 46 is arranged outside the water inlet flow channel 45, so that the inner wall of the water outlet flow channel 46 and the outer wall of the water inlet flow channel 45 form a water flow channel 47 for water outlet. The input end of the water flow channel 47 is connected to the output end of the water distribution device 5, and the output end of the water flow channel 47 is connected to the water outlet 44. After the cooling water enters the water inlet flow channel 45 from the water inlet 43, it flows upwards due to the impact force to the water distribution device 5. After cooling, the water flows downwards from the water distribution device 5 into the water flow channel 47 and is then pumped out from the water outlet 44.

[0040] The above embodiments only represent several implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation to the scope of the patent of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention should be subject to the appended claims.

Claims

1. A cooling channel system for a crucible rotating mechanism, the crucible rotating mechanism being arranged on a cavity bottom plate (1) of a vacuum evaporation machine, the crucible rotating mechanism comprising an electron gun device (2), a crucible body (3), and a rotating mechanism (4), the crucible body (3) being arranged on the top of the rotating mechanism (4), the electron gun device (2) being arranged on one side of the crucible body (3), the crucible body (3) being driven to rotate by the rotating mechanism (4), the electron gun device (2) emitting an electron beam after a magnetic field is turned to bombard and heat a film material in the crucible to achieve heating, the rotating mechanism (4) comprising a rotating shaft (42), characterized in that: A cooling channel system is provided inside the rotating mechanism (4) and the crucible body (3), the cooling channel system comprising a water inlet (43), a water inlet channel (45), a water uniforming device (5), a water outlet channel (46), and a water outlet (44); the water inlet channel (45) passes through the rotating shaft (42) and is located on the axis of the rotating shaft (42); the water inlet (43) is provided on the side of the water inlet channel (45) close to the bottom; the output end of the water inlet (43) is connected to the input end of the water inlet channel (45); the crucible body (3) is provided with a water uniforming device (5); the top of the water inlet channel (45) passes through the bottom center of the crucible body (3) and the water uniforming device (5) to the upper part of the water uniforming device (5); the water uniforming device (5) comprises a water uniforming plate (51) and a guide plate (55). The upper and lower surfaces of the water-distributing plate (51) are provided with a plurality of guide plates (55) that diverge in all directions, and the guide plates (55) on each side are arranged in the circumferential direction of the center of the water-distributing plate (51); the water outlet channel (46) is arranged on the outer circle of the water inlet channel (45), so that the inner wall of the water outlet channel (46) and the outer wall of the water inlet channel (45) form a water flow channel (47) for water outlet, the input end of the water flow channel (47) is connected to the output end of the water-distributing device (5), and the output end of the water flow channel (47) is connected to the water outlet (44); after the cooling water enters the water inlet channel (45) from the water inlet (43), it flows upward to the water-distributing device (5) due to the impact force, and after cooling is completed, the water flows downward from the water-distributing device (5) into the water flow channel (47), and is then drawn out from the water outlet (44).

2. The cooling channel system of the crucible rotating mechanism according to claim 1, characterized in that: The outer wall of the rotating shaft (42) is provided with a water inlet joint (422) and a water outlet joint (423); the output end of the water inlet joint (422) is connected to the input end of the water inlet (43); and the output end of the water outlet (44) is communicated with the input end of the water outlet joint (423).

3. The cooling channel system of the crucible rotating mechanism according to claim 1, characterized in that: A partition (48) is provided between the water inlet (43) and the water outlet (44), so that the water inlet (43) and the water outlet (44) are separated for water inlet and water outlet.

4. The cooling channel system of the crucible rotating mechanism according to claim 2, characterized in that: The water inlet (43) comprises a first water inlet (431) and a second water inlet (432), wherein the first water inlet (431) is arranged at the same position of the outer circle of the second water inlet (432), and a water storage chamber (49) is arranged between the first water inlet (431), the second water inlet (432) and the partition (48). The water inlet channel (45) rotates synchronously with the rotating shaft (42). When cooling water is introduced, if the water inlet joint (422) is aligned with the first water inlet (431), the cooling water directly enters the water inlet channel (45) due to the impact force; if the water inlet joint (422) is not aligned with the first water inlet (431), the cooling water enters the water storage chamber (49) for temporary storage; when the water storage chamber (49) is filled with water to overflow the second water inlet (432), the cooling water directly enters the second water inlet (432) from the water storage chamber (49) to the water inlet channel (45).

5. The cooling channel system of the crucible rotating mechanism according to claim 1, characterized in that: The crucible body (3) comprises a crucible top plate (32) and a bottom sealing plate (33), the crucible top plate (32) and the bottom sealing plate (33) being clamped together, and a sealing ring is provided at the clamping position; the water distribution device (5) is arranged between the crucible top plate (32) and the bottom sealing plate (33); a groove (321) is provided at the bottom center of the crucible top plate (32); the top of the water inlet channel (45) passes through the bottom center of the bottom sealing plate (33) and the water distribution device (5) to the groove (321); through fluid simulation analysis, a water flow with an initial pressure of a constant value flows upwards; when passing through the groove (321), the density of the liquid proportion in the groove (321) area is substantially the same, so that the fluid is evenly distributed; after the water flow rushes upwards from the water inlet channel (45) and reaches the top of the groove (321), it flows downwards to the water distribution tray (51) due to gravity.

6. The cooling channel system of the crucible rotating mechanism according to claim 5, characterized in that: The cross section of the groove (321) is a trapezoid that is narrow at the top and wide at the bottom, which provides a guide for the water flow that rushes out and reaches the top of the groove (321). The water inlet channel (45) rotates synchronously with the rotating shaft (42), so that the water flow can be divided into multiple branches along the side wall of the groove (321) and flow toward the upper surface of the water distribution plate (51) after rushing out. The water flow is more uniform when flowing down, and the cooling effect is uniform.

7. The cooling channel system of the crucible rotating mechanism according to claim 5, characterized in that: A first opening (52) is provided at the center of the water-distributing plate (51), so that water flows from the water inlet channel (45) through the first opening (52) to reach the groove (321) and flow to the water-distributing device (5), and then is evenly dispersed around the water-distributing plate (51) through a plurality of guide plates (55), thereby increasing the cooling area and improving the cooling effect.

8. The cooling channel system of the crucible rotating mechanism according to claim 1, characterized in that: The edge of the water distribution plate (51) is densely covered with a circle of diversion holes (54), and the diversion holes (54) are evenly spaced, so that water flows through the diversion holes (54) to be diverted, thereby increasing the cooling area and improving the cooling effect.

9. The cooling channel system of the crucible rotating mechanism according to claim 1, characterized in that: The guide piece (55) is L-shaped, and has long and short sides. One side of the short side of the guide piece (55) is perpendicular to the water-distributing plate (51), and one side of the long side of the guide piece (55) is connected to the water-distributing plate (51). The short sides of the guide piece (55) are all located on the same side along the circular direction, so that the water flows in the same direction when passing through each guide piece (55). One side of the short side of the guide piece (55) is aligned with the center of the first opening (52).

10. The cooling channel system of the crucible rotating mechanism according to claim 1, characterized in that: The top ring of the rotating shaft (42) is provided with a plurality of slots (421), the middle ring of the crucible body (3) is provided with a plurality of connecting bolts (31), the connecting bolts (31) are connected with the slots (421) at the top of the rotating shaft (42) from the top of the crucible body (3) downward, and the periphery of the first opening (52) is provided with a plurality of second openings 53 surrounding the opening, each second opening 53 is arranged at an interval with a guide plate (55) and is used for passing the connecting bolts (31).

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