Remotely controllable rotating cathode magnetic assembly

Abstract

The invention relates to the technical field of magnetron sputtering magnetic assemblies, in particular to a remotely controllable rotating cathode magnetic assembly. An electric controller is arranged on the atmosphere side of the closed vacuum cavity structure, the outer wall of the electric controller is connected with one end of an atmosphere side communication signal cable, and the other end of the atmosphere side communication signal cable is connected with a vacuum feed-in piece and then connected to the end face of the magnetic assembly feed-through supporting unit through the vacuum side communication signal cable. According to the invention, stable installation and fixation of the magnetic assembly in the rotating tube target material are ensured, accurate adjustment of the relative distance between the magnetic array and the surface segment of the rotating target material is realized through the plurality of electric control driving units, and accurate adjustment of the position of the magnetic array can directly control the magnetic field distribution of the surface of the target material. And compared with the traditional magnetic array adjustment that the whole magnetic assembly must be taken out from sputtering equipment, the magnetic control coating efficiency is greatly improved, and the production cost is reduced.

Description

Technical Field

[0001] The present invention relates to the field of magnetron sputtering, and particularly to a remotely controllable rotating cathode magnetic assembly. Background Art

[0002] Magnetron sputtering coating is a widely used physical vapor deposition process at present. Due to its advantages such as high deposition rate, low deposition temperature, and good film quality, it is widely used in industries such as energy-saving glass, flat panel display, touch screen, optical components, decorative functional films, solid-state energy storage, solar cells, and semiconductor manufacturing.

[0003] Magnetron sputtering belongs to the category of glow discharge and uses the principle of cathode sputtering for coating. The film layer particles come from the cathode sputtering effect of argon ions on the cathode target in the glow discharge. After the argon ions sputter the target atoms, they are deposited on the surface of the component to form the required film layer. The magnetron principle is to control the movement trajectory of electrons in the electric field by the special distribution of orthogonal electromagnetic fields, so that the electrons become cycloid motions in the orthogonal electromagnetic fields, thus greatly increasing the probability of collision with gas molecules. Magnetron sputtering technology has been widely used in places such as building energy-saving glass, display technology, and photovoltaic for large-area coating applications. In order to pursue the beauty and energy-saving effect of energy-saving glass, the low energy consumption, high resolution, and high color saturation of display devices, and the uniform power generation efficiency and longer life of photovoltaic units, these large-area coating applications have put forward higher requirements for the coating uniformity of equipment. As an important means to control coating uniformity, the magnetic assembly has been continuously innovated with new technologies; with the widespread application of the rotating cathode technology, the magnetic assembly installed in the narrow space inside the rotating tube target becomes more and more important for the adjustment and control of coating uniformity.

[0004] The existing published patent WO2009 / 138348A1 "A solution to control the distance problem between the target surface and the magnetic field generator", which: the adjustable installation of the magnetic field generator makes it possible to adjust the distance between the magnetic field generator and the outer wall of the tube. In this publication, the adjustment of the distance of the magnetic field generator relative to the outer wall of the tube is achieved through the adjustment support mechanisms distributed along the length of the tube, and these adjustment support mechanisms can be made longer or shorter as needed. Mechanical systems can be used, for example, installing washers or gaskets on the screws of the fixed bracket to increase the total length of the bracket, or installing adjustment screws in the bracket, and the screws rotate in the threads fixedly connected to the tube and can rotate freely. The teaching drawback of the above publication is that the magnetron must be opened, so only after breaking the vacuum and taking out the magnetic field generator can manual adjustment be carried out. This adjustment is easily affected by various factors such as the newness and oldness of the target, the vacuum degree, and the water temperature, and multiple tests and adjustments need to be carried out back and forth according to the adjustment effect, resulting in a long adjustment period, slow effect, and seriously affecting production efficiency.

[0005] The existing published patent WO2013 / 120920A1 "An end block for rotating and carrying a sputtering target tube and constraining an adjustable magnetic rod inside the target tube" has: the connector inside the end block is used for power supply and communication feeding. The use of these connectors will require a redesign of the typical rotating cathode, and the water supply and power supply terminals of the announced method must be adopted to be implemented.

[0006] Compensating for target erosion effects is becoming increasingly important as the desire to increase target thickness and operate the sputtering process under more sensitive process conditions increases. The demand for thicker targets is largely driven by the manufacturing cost of ceramic targets, and sputtering coaters are increasingly using thicker targets and coating for longer periods of time. Unfortunately, the magnetic induction intensity (measured in Tesla) of the magnetic array on the target surface typically changes with target thickness, which can affect the uniformity of the coating thickness along the length of the target. Adjusting the uniformity when the target thickness changes requires a corresponding change in the magnetic field distribution. Therefore, the distance between the target surface and the magnetic array surface must be well controlled. Traditional magnetic array adjustment requires removing the entire magnetic assembly from the sputtering equipment, manually adding shims or adjusting via screws, which is time-consuming and labor-intensive, and the adjustment is random, making it difficult to adjust in one step, greatly affecting the efficiency and production cost of magnetron coating.

[0007] In view of this, we provide a remote controllable magnetic assembly system to adjust the magnetic field strength on the target surface during rotating target sputtering. Summary of the invention

[0008] The purpose of the present invention is to provide a remotely controllable rotating cathode magnetic assembly, which solves the problems of the existing rotating magnetron sputtering technology that requires destroying the vacuum when adjusting the magnetic field strength, taking out the magnetic assembly for manual adjustment, etc., which leads to complex adjustment, low efficiency, poor repeatability, and difficulty in adjustment.

[0009] The above technical purpose of the present invention is achieved through the following technical solutions: a remotely controllable rotating cathode magnetic assembly, comprising a rotating cathode target drive end block, a feedthrough support unit, a tubular target arranged therebetween, and a rigid structure of a magnetic assembly, wherein the rigid structure of the magnetic assembly is arranged in the tubular target, the tubular target is arranged to rotate, the rigid structure of the magnetic assembly is arranged to be fixed, and the rigid structure of the magnetic assembly is segmentedly connected with multiple groups of electric control drive units along the length direction, the moving part of the electric control drive unit is fixedly connected with a permanent magnet array assembly, and an electrical controller, a vacuum feedthrough and a communication signal cable connected in sequence are arranged outside the atmosphere of the permanent magnet array assembly, the communication signal cable is located outside the feedthrough support unit, and a communication connector is arranged inside the feedthrough support unit, one end of the communication signal cable is connected to the vacuum feedthrough, and the other end is connected to the communication connector; the communication connector is sent to a single or multiple groups of electric control drive units to control the movement of the corresponding units.

[0010] Preferably, the rotary cathode magnetic assembly is horizontal, and a vacuum structure plate is arranged above it. The electric controller, the vacuum feed-in component and the communication signal cable are installed on the vacuum structure plate.

[0011] Preferably, the rotary cathode magnetic assembly is vertical, and a vacuum structure plate is arranged on its side. The electric controller, the vacuum feed-in component and the communication signal cable are installed on the vacuum structure plate.

[0012] Preferably, a communication module is fixedly installed on the feedthrough support unit. The communication module is connected to the communication signal cable. The communication module is an infrared emitter, and the communication connector is an infrared receiver. At this time, it is arranged inside the rigid structure of the magnetic assembly, and the infrared receiver is connected to one or more groups of electric control drive units.

[0013] Preferably, a magnetic assembly drive side support flange is fixedly connected to one side of the rigid structure of the magnetic assembly close to the drive end block of the rotary cathode target, and a magnetic assembly cover side support flange is fixedly connected to one side of the rigid structure of the magnetic assembly close to the feedthrough support unit.

[0014] Preferably, a water channel side strip for guiding cooling water is fixedly connected to the outer wall of the rigid structure of the magnetic assembly. One end of the water channel side strip is connected to the magnetic assembly cooling water channel outlet, and the other end of the water channel side strip is connected to the magnetic assembly cooling water channel inlet. A gap is provided between the tubular target and the rigid structure of the magnetic assembly. The magnetic assembly cooling water channel outlet leads out cooling water from the side of the magnetic assembly cover side support flange, and the magnetic assembly cooling water channel inlet introduces cooling water from the magnetic assembly drive side support flange.

[0015] Preferably, the communication connector is arranged on the magnetic assembly cover side support flange. An aviation plug is installed inside the feedthrough support unit, and a support end block fixing seat is arranged on the outside. The aviation plug and the communication module are connected in a pin manner. The communication signal cable is connected to the communication connector from the inside through the aviation plug, and the communication signal is connected and communicated with the electric control drive unit installed on the rigid structure of the magnetic assembly through the communication connector.

[0016] Preferably, a first bearing assembly and a second bearing assembly are respectively arranged at the inner and outer connections of the tubular target, and a rotatable coolant seal assembly is arranged at the inner connection of the tubular target.

[0017] By means of the above technical solution, the present invention provides a remotely controllable rotary cathode magnetic assembly, which at least has the following beneficial effects: 1. In the present invention, one side of the magnetic component is butted against the driving end block of the rotating cathode target through the driving side support flange of the magnetic component, and the other side of the magnetic component is fixed to the end cover of the tubular target. Multiple groups of electronically controlled driving units are fixed on the rigid structure of the magnetic component and connected to the permanent magnet array. By inputting control signals on the atmospheric control side to control the electronically controlled driving units, the permanent magnet array can be accurately moved relative to the corresponding position on the surface of the target. The change in the position of the permanent magnet array is directly reflected in the magnetic field distribution on the surface of the target, so that the position of the permanent magnet array of the magnetic component can be adjusted without disassembling the magnetic component device. Compared with the traditional magnetic array adjustment that requires removing the entire magnetic component from the sputtering equipment, the adjustment time and frequency of coating uniformity are reduced, the operation efficiency of the vacuum coating equipment is greatly improved, and the production cost is effectively reduced.

[0018] 2. The thickness of the traditional rotating magnetron sputtering target becomes thinner with production and use. The change in the thickness of the tubular target causes the coating uniformity to change, so it is difficult to use a thicker tubular target. By using the remotely controllable rotating cathode magnetic component of the present invention, the coating uniformity is no longer a problem, and a thicker tubular target can be used, greatly extending the production time of the vacuum coating equipment.

[0019] 3. The communication signal feedthrough of the remotely controllable rotating cathode magnetic component of the present invention is introduced from one side of the support unit, not affected by the double-end structure of the traditional rotating cathode design, reducing the investment threshold for the rotating cathode to use the remotely controllable magnetic component, and making the adjustment of the coating uniformity of the rotating cathode simple.

[0020] 4. To prevent the temperature from rising due to long-term operation or erosion of the tubular target during the adjustment process, the device is provided with cooling water channels and water channel side strips on the magnetic component housing, introducing cooling water into the gap between the tubular target and the magnetic component to take away heat in a timely manner. At the same time, through a series of sealing structures, such as rotatable coolant sealing components, sealing rings, etc., it is ensured that the coolant does not leak when the tubular target and the magnetic component rotate, and the integrity of the vacuum chamber environment is maintained. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 Perspective view schematic diagram of the remotely controllable rotating cathode magnetic component of the present invention; Figure 2 Another perspective view schematic diagram of the remotely controllable rotating cathode magnetic component of the present invention; Figure 3 Another perspective view schematic diagram of the remotely controllable rotating cathode magnetic component of the present invention; Figure 4 Front view schematic diagram of the remotely controllable rotating cathode magnetic component in the present invention; Figure 5 Top view schematic diagram of the remotely controllable rotating cathode magnetic component in the present invention; Figure 6 Schematic right view of the remotely controllable rotating cathode magnetic assembly in the present invention; Figure 7 Schematic enlarged partial view of the remotely controllable rotating cathode magnetic assembly in the present invention; Figure 8 Schematic view showing the internal structure after removing some components of the cross-section of the remotely controllable rotating cathode magnetic assembly in the present invention; Figure 9 Schematic view showing the internal structure after removing some components of the enlarged partial view of the remotely controllable rotating cathode magnetic assembly in the present invention; Figure 10 is Figure 1 Enlarged view of part A of

[0022] Reference numerals: 1, enclosed vacuum structure plate; 2, electrical controller; 3, vacuum feed-in part; 4, communication signal cable; 5, communication module; 6, feedthrough support unit; 8, humidity sensor; 9, seal cover of the electric control drive unit; 10, electric control drive unit; 11, permanent magnet array assembly; 12, tubular target; 13, drive end block of the rotating cathode target; 14, support flange on the drive side of the magnetic assembly; 15, water channel side strip; 16, support flange on the seal cover side of the magnetic assembly; 17, rigid structure body of the magnetic assembly; 18, communication connector; 19, outlet of the magnetic assembly cooling water channel; 20, inlet of the magnetic assembly cooling water channel; 27, aviation plug; 29, first bearing assembly; 30, second bearing assembly; 31, rotatable coolant seal assembly; 33, sealing ring; 34, support assembly; 35, target tube fixing and rotating assembly; 36, fixing assembly; 37, fixing seat of the support end block. Detailed implementation manners

[0023] The following descriptions are only the preferred implementation manners of the present invention, and the protection scope is not limited to this embodiment. All technical solutions within the idea of the present invention should belong to the protection scope of the present invention. At the same time, it should be pointed out that for those of ordinary skill in the art in this technical field, several improvements and refinements made without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

[0024] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0025] Please refer to Figures 1 - 10As shown in the figure, the present invention provides a remotely controllable rotating cathode magnetic component. An electrical controller 2 is arranged on the atmospheric side of the enclosed vacuum structure plate 1. The enclosed vacuum structure plate 1 can be a vacuum structure cavity or a cathode cover plate, which is used to enclose a vacuum environment. The output signal of the electrical controller 2 is connected to one end of a communication signal cable 4 through a vacuum feedthrough 3. The other end of the communication signal cable 4 is connected with an aviation plug 27. The aviation plug 27 is fixed at the feedthrough support unit 6. The feedthrough support unit 6 is fixedly installed on the support end block fixing seat 37. The magnetic component rigid structure body 17 is connected to a plurality of groups of electronically controlled drive units 10 at multiple positions along the length direction through a flange. The moving part of the electronically controlled drive unit 10 fixed on the magnetic component rigid structure body 17 is connected with a permanent magnet array component 11. The plurality of groups of electronically controlled drive units 10 are used to adjust the position of the permanent magnet array component 11 in sections. A rotating cathode target drive end block 13 is fixed on the enclosed vacuum structure plate 1. The rotating cathode target drive end block 13 is fixedly connected with a tubular target 12. The rotating cathode target drive end block 13 drives the tubular target 12 to rotate. The rotating cathode target drive end block 13 is fixedly connected with the magnetic component rigid structure body 17 through a flange. The communication signal cable 4 is fixedly connected to the inner wall of the enclosed vacuum structure plate 1 through the vacuum feedthrough 3. Fixing the communication signal cable 4 on the inner wall of the enclosed vacuum structure plate 1 through the vacuum feedthrough 3 can ensure that the vacuum environment is not damaged when passing through the vacuum boundary, thereby preventing air from leaking into the vacuum chamber. A humidity sensor 8 is fixedly connected to the inner wall of the feedthrough support unit 6. An electronically controlled drive unit seal cover 9 of the electronically controlled drive unit 10 is arranged on the outer wall of the magnetic component rigid structure body 17. A magnetic component drive side support flange 14 is arranged on one side of the magnetic component rigid structure body 17 close to the rotating cathode target drive end block 13. The magnetic component drive side support flange 14 is used for butt joint and fixation with the rotating cathode target drive end block 13. A magnetic component cover side support flange 16 is arranged on one side of the magnetic component rigid structure body 17 close to the feedthrough support unit 6. The magnetic component cover side support flange 16 is butt-jointed and fixed with the feedthrough support unit 6.

[0026] The outer wall of the rigid structure body 17 of the magnetic assembly is fixed with a water channel side strip 15. A gap is provided between the tubular target 12 and the magnetic assembly. A magnetic assembly cooling water channel outlet 19 is provided on the magnetic assembly cover side support flange 16, and a magnetic assembly cooling water channel inlet 20 is provided on the magnetic assembly driving side support flange 14. The water channel side strip 15 is used to transfer cooling water into the gap between the tubular target 12 and the magnetic assembly for cooling. One end of the water channel side strip 15 is connected to the magnetic assembly cooling water channel outlet 19, and the other end of the water channel side strip 15 is connected to the magnetic assembly cooling water channel inlet 20. The communication signal cable 4 is connected to the humidity sensor 8 through the aviation plug 27, and the aviation plug 27 is connected to the communication connector 18. In addition, the communication connector 18 is connected in parallel with multiple groups of electric control driving units 10 for communication to form a separate feedback. First bearing assemblies 29 and second bearing assemblies 30 are respectively provided at the inner and outer side connection parts of the tubular target 12 and the feedthrough support unit 6 for the smooth rotation of the tubular target 12. A rotatable coolant seal assembly 31 is provided at the inner side connection part of the tubular target 12 and the feedthrough support unit 6 for sealing the cooling water to prevent the cooling water from leaking out during rotation. A sealing ring 33 is provided at the connection part of the feedthrough support unit 6 and the magnetic assembly to prevent the cooling water from entering the connection part. A fixing assembly 36 is provided at the connection part of the feedthrough support unit 6 and the magnetic assembly, and the fixing assembly 36 is used to position and fix the magnetic assembly. The support assembly 34 is fixedly connected to the rigid structure body 17 of the magnetic assembly through the fixing assembly 36; the target tube fixing and rotating assembly 35 is fixedly connected to the tubular target 12 through screws; the support end block fixing seat 37 is fixedly installed in the external chamber.

[0027] When the remotely controllable rotating cathode magnetic assembly of the present invention is in use, an electric controller 2 is installed on the atmospheric control side of the closed vacuum structure plate 1. Its output signal is transmitted to the feedthrough support unit 6 through the communication signal cable 4 and the communication module 5, and then connected to the electric control driving unit 10 inside the magnetic assembly through the internal communication connector 18. In this way, data signals can be transmitted bidirectionally, and the vacuum environment can be ensured not to be damaged when passing through the vacuum boundary, so as to realize the remote control of the electric control driving unit 10 inside the magnetic assembly.

[0028] The rigid structure body 17 of the magnetic assembly is fixedly connected with multiple groups of electric control driving units 10 and permanent magnet array assemblies 11. By controlling single or multiple groups of electric control driving units 10, the distance between the permanent magnet array assembly 11 and the outer surface of the tubular target 12 can be controlled in sections and moved precisely.

[0029] One side of the magnetic assembly is docked with the driving end block 13 of the rotary cathode target through the driving side support flange 14 of the magnetic assembly, and the other side is docked with the feedthrough support unit 6 through the capping side support flange 16 of the magnetic assembly, so as to ensure the stable installation of the overall magnetic assembly. The precise adjustment of the distance between the permanent magnet array assembly 11 and the surface of the tubular target 12 will directly change the magnetic field distribution on the surface of the tubular target 12, so as to achieve the purpose of optimizing electron motion, improving sputtering efficiency and realizing uniform deposition of the film layer.

[0030] To control the constant temperature cooling during the magnetron sputtering process and prevent the temperature from rising due to long-term operation or erosion of the tubular target 12 during the adjustment process, the device fixes the cooling water channel side strip 15 on the rigid structure body 17 of the magnetic assembly, introduces the cooling water into the gap between the tubular target 12 and the magnetic assembly, takes away the heat in time, and at the same time ensures that the coolant does not leak when the tubular target 12 and the magnetic assembly rotate through a series of sealing structures (such as the rotatable coolant seal assembly 31, the sealing ring 33, etc.), and maintains the integrity of the environment in the vacuum chamber.

[0031] The feedthrough support unit 6 can transmit signals in a wired manner (for driving the internal electric control drive unit 10 of the magnetic assembly), or can transmit data in a wireless manner. The present invention can achieve seamless connection and signal intercommunication between the new and old systems without modifying the existing old equipment.

[0032] The feedthrough support unit 6 of the present invention does not rotate, so the power supply for the electric control drive unit 10 can be provided through the wires of the rotatable coolant seal assembly 31, or can be realized by contact power supply or wireless power supply, or any other suitable power supply method known in the art can be selected.

[0033] In the present invention, the remote communication between the magnetic assembly and the electrical controller 2 is through signal transmission using RS485AB wires on both sides of the feedthrough support unit 6. The advantage of RS485 is that it provides stronger anti-interference ability and longer transmission distance, and the transmission rate is fast.

[0034] Another alternative method for the communication signal introduced on the vacuum side to communicate with the remotely controllable rotary cathode magnetic assembly fixed inside the tubular target is to use a pair of high-speed infrared receivers and transmitters. The advantage of high-speed infrared is that there is more versatility in the places where high-speed infrared is installed, because they do not require any special windows for transmission. In addition, high-speed infrared transceivers are not affected by any electromagnetic noise, optical noise or optical impedance. The advantages of high-speed infrared communication make it easier to retrofit cathodes produced by various manufacturers.

[0035] In the present invention, another alternative method for the communication signal introduced on the vacuum side to communicate with the remotely controllable rotating cathode magnetic assembly fixed inside the tubular target is to use the 2.4G wireless connection technology. The advantages of 2.4G wireless communication are long signal transmission distance, strong penetration, high-speed transmission, and strong anti-interference ability.

[0036] Magnetron sputtering is carried out inside a closed vacuum chamber structure. In the present invention, an electrical controller is provided on the atmosphere side of the closed vacuum chamber structure. One end of a communication signal cable 4 is connected to the outer wall of the electrical controller, and the other end of the communication signal cable 4 is connected to a vacuum feedthrough, and then connected to the end face of the magnetic assembly feedthrough support unit through the communication signal cable 4.

[0037] In the present invention, one side of the magnetic assembly is supported and fixed to the driving end block of the rotating cathode target through a flange. The driving end block of the rotating cathode target is connected to one end of the tubular target to drive the tubular target to rotate. The other side of the magnetic assembly and the other side of the tubular target are fixed to the end cover of the tubular target through the magnetic assembly cover side support flange. The rigid structure of the magnetic assembly is connected in sections along the length direction with multiple electric control driving units, and these electric control driving units are fixedly connected to the magnet array; by inputting a control signal on the atmosphere side to make the electric control driving units move precisely, it will drive the fixedly connected magnet array to move together, so that the distance between the magnetic array and the surface of the tubular target is precisely adjusted in sections; the communication and control signals of the electric control driving units are introduced through the magnetic assembly feedthrough support unit fixed on the end cover of the tubular target. The magnetron sputtering rotating cathode technology is typically applied to horizontal coating equipment ( Figure 1 ), vertical coating equipment ( Figure 2 ), and winding coating equipment ( Figure 3 ), and the present invention is typically applied to the above three application scenarios.

[0038] The present invention ensures the stable installation and fixation of the magnetic assembly inside the tubular target. Through multiple electric control driving units, the relative distance between the magnetic array and the surface of the tubular target is precisely adjusted in sections. The precise adjustment of the position of the magnetic array will directly control the magnetic field distribution on the surface of the tubular target, so as to achieve the purpose of controlling the uniformity of magnetron sputtering coating. By adjusting the position of the magnetic array in sections through the electric control driving units, compared with the traditional method of adjusting the entire magnetic assembly by removing it from the sputtering equipment, the magnetron coating efficiency is greatly improved and the production cost is reduced.

[0039] In the present invention, a communication module 5 is used to control the electrical controller 2 and the internal structure. For example, the communication module 5 is fixedly installed on the feedthrough support unit 6. The communication module 5 is connected to the communication signal cable 4. The communication module 5 is an infrared emitter, and the communication connector 18 is an infrared receiver. At this time, it is arranged inside the rigid structure 17 of the magnetic assembly, and the infrared receiver is connected to a single group or multiple groups of electric control driving units 10.

[0040] In the present invention, another alternative method for the communication between the communication signal introduced on the vacuum side and the remotely controllable rotating cathode magnetic assembly fixed inside the tubular target is to use optical fiber and communication connection technology. The advantages of optical fiber and laser communication are large communication capacity, low transmission loss, and high communication quality.

[0041] In the present invention, another alternative method for the communication between the communication signal introduced on the vacuum side and the remotely controllable rotating cathode magnetic assembly fixed inside the tubular target is terahertz communication connection technology. Terahertz communication has a high-speed wireless transmission rate, directional wave velocity transmission, and strong penetration power, and can achieve stable and reliable communication connection.

[0042] In the present invention, another alternative method for the communication between the communication signal introduced on the vacuum side and the remotely controllable rotating cathode magnetic assembly fixed inside the tubular target is wireless Bluetooth communication technology. Wireless Bluetooth communication technology has low power consumption, small size, strong anti-interference ability, and high security.

[0043] The various technologies disclosed in this article can be used to position the entire magnetic assembly drive mechanism as a single unit, or independently position multiple drive mechanism units along the length of the magnet assembly, so as to be able to adjust the uniformity of the process.

[0044] Through the built-in drive and precision control system, the device realizes the remote adjustment of the magnetic field distribution of the rotating cathode sputtering while maintaining the vacuum environment and the cooling of the target tube, solves the problem that the traditional method requires breaking the vacuum for repeated disassembly, installation and adjustment or major modification of the rotating cathode design, effectively controls the adjustment of the film layer uniformity during the sputtering coating process, and greatly improves the production efficiency.

Claims

1. A remotely controllable rotating cathode magnetic assembly, comprising a rotating cathode target drive end block (13), a feedthrough support unit (6), a tubular target (12) and a magnetic assembly rigid structure (17) arranged therebetween, wherein the magnetic assembly rigid structure (17) is arranged in the tubular target (12), the tubular target (12) is rotatably arranged, the magnetic assembly rigid structure (17) is fixedly arranged, the magnetic assembly rigid structure (17) is segmentally connected to a plurality of groups of electric control drive units (10) along the length direction, the moving part of the electric control drive unit (10) is fixedly connected to a permanent magnet array assembly (11), characterized in that: The permanent magnet array assembly (11) is provided with an electrical controller (2), a vacuum feedthrough (3) and a communication signal cable (4) connected in sequence from the outside of the atmosphere, the communication signal cable (4) is located outside the feedthrough support unit (6), a communication connector (18) is provided inside the feedthrough support unit (6), one end of the communication signal cable (4) is connected to the vacuum feedthrough (3), and the other end is connected to the communication connector (18); the communication connector (18) is sent to a single group or multiple groups of electric control drive units (10) to control the movement of the corresponding units.

2. A remotely controllable rotating cathode magnetic assembly according to claim 1, characterized in that: The rotating cathode magnetic assembly is horizontal, with a vacuum structural plate (1) arranged above it, and the electrical controller (2), vacuum feed-in component (3) and communication signal cable (4) are mounted on the vacuum structural plate (1).

3. A remotely controllable rotating cathode magnetic assembly according to claim 1, characterized in that: The rotating cathode magnetic assembly is vertical, and a vacuum structural plate (1) is arranged on its side. The electrical controller (2), the vacuum feed-in component (3) and the communication signal cable (4) are installed on the vacuum structural plate (1).

4. A remotely controllable rotating cathode magnetic assembly according to claim 1, characterized in that: The feedthrough support unit (6) is fixedly mounted with a communication module (5), the communication module (5) being connected to the communication signal cable (4), the communication module (5) being an infrared transmitter, the communication connector (18) being an infrared receiver, which is arranged in the rigid structure (17) of the magnetic assembly, and the infrared receiver being connected to a single group or multiple groups of electric control drive units (10).

5. A remotely controllable rotating cathode magnetic assembly according to claim 1, characterized in that: A magnetic component driving side support flange (14) is fixedly connected to the side of the magnetic component rigid structure (17) close to the rotating cathode target driving end block (13), and a magnetic component covering side support flange (16) is fixedly connected to the side of the magnetic component rigid structure (17) close to the feedthrough support unit (6).

6. A remotely controllable rotating cathode magnetic assembly according to claim 1, characterized in that: The outer wall of the magnetic component rigid structure (17) is fixedly connected with a water channel side strip (15) for guiding cooling water, one end of the water channel side strip (15) is connected with a magnetic component cooling water channel outlet (19), and the other end of the water channel side strip (15) is connected with a magnetic component cooling water channel inlet (20), a gap is provided between the tubular target material (12) and the magnetic component rigid structure (17), the magnetic component cooling water channel outlet (19) draws out cooling water from the magnetic component cover side support flange (16), and the magnetic component cooling water channel inlet (20) draws in cooling water from the magnetic component drive side support flange (14).

7. A remotely controllable rotating cathode magnetic assembly according to claim 6, characterized in that: The communication connector (18) is arranged on the support flange (16) on the side of the magnetic component cover, and a support end block fixing seat (37) is arranged on the outside of the feedthrough support unit (6). An aviation plug (27) is installed in the support end block fixing seat (37). The aviation plug (27) and the communication module (5) are connected in a pin manner. The communication signal cable (4) is connected to the communication connector (18) from the inside through the aviation plug (27), and the communication signal is connected and communicated with the electric control drive unit (10) installed on the rigid structure (17) of the magnetic component through the communication connector (18).

8. A remotely controllable rotating cathode magnetic assembly according to claim 7, characterized in that: The inner and outer connecting parts of the tubular target material (12) are respectively provided with a first bearing assembly (29) and a second bearing assembly (30), and the inner connecting part of the tubular target material (12) is provided with a rotatable coolant sealing assembly (31).

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