Sealing structure with rotating shaft and vacuum cavity rotating synchronously and rotating equipment

Abstract

The invention discloses a sealing structure with a rotating shaft and a vacuum cavity synchronously rotating and rotating equipment, the sealing structure with the rotating shaft and the vacuum cavity synchronously rotating comprises a rotating assembly, the rotating assembly comprises the rotating shaft, the rotating shaft is rigidly and coaxially connected with a connecting shaft, and a gas circulation path is formed in the connecting shaft; the rotating shaft and the connecting shaft synchronously rotate around the same rotating axis at an equal angular speed and rotate the joint at a high speed. The driving system comprises a driving mechanism and a transmission mechanism; and the dynamic supporting unit is arranged on the rotating part of the high-speed rotating joint and comprises a dynamic bearing pack and a coaxiality monitoring module. The dynamic bearing set can be allowed to be configured to dynamically compensate axial deviation of the rotating shaft and the connecting part, and the coaxiality monitoring module is used for detecting concentricity deviation of the rotating assembly in real time. According to the technical scheme, effective sealing can be provided in the high-speed rotating process, vacuum leakage is prevented, the installation requirement of an originally-designed vacuum sealing piece is greatly lowered, and abrasion and replacement of the sealing piece are reduced.

Description

Technical Field

[0001] The present invention relates to the field of shaft connections, and particularly to a sealing structure and a rotating device in which a rotating shaft and a vacuum chamber rotate synchronously. Background Art

[0002] In existing equipment, a rotating dynamic seal structure composed of a flexible sealing ring is usually adopted between a high-speed rotating shaft and a vacuum chamber.

[0003] However, due to the high flexibility of the material of the sealing component, structural damage is likely to occur during the assembly process, resulting in poor actual sealing effect. At the same time, when the concentricity between the rotating component and the chamber exceeds the tolerance, eccentric wear will occur during operation, resulting in progressive reaming failure of the sealing interface in a short period of time, leading to vacuum decay.

[0004] In addition, the existing assembly process highly depends on the experience of operators and lacks standardized operation specifications. There are significant differences in the installation quality of operators with different technical levels, directly affecting the reliability of the equipment sealing performance and service life. Summary of the Invention

[0005] Aiming at the deficiencies of the prior art, the main object of the present invention is to propose a sealing structure and a rotating device in which a rotating shaft and a vacuum chamber rotate synchronously, aiming to at least solve the related technical problems mentioned in the related art.

[0006] To achieve the above object, a sealing structure in which a rotating shaft and a vacuum chamber rotate synchronously proposed by the present invention includes:

[0007] A rotating assembly, including:

[0008] A rotating shaft, which is rigidly coaxially connected with a connecting shaft, and a gas flow path is provided in the connecting shaft. The rotating shaft and the connecting shaft rotate synchronously at the same angular velocity around the same rotation axis;

[0009] A high-speed rotating joint, which includes a rotating part and a connecting part. The rotating part and the connecting part are rotatably connected, and the rotating part is connected to the end of the connecting shaft, and the connecting part is connected to a vacuum chamber;

[0010] A driving system, including:

[0011] A driving mechanism and a transmission mechanism, and the driving mechanism outputs torque to the rotating assembly through the transmission mechanism;

[0012] A dynamic support unit, which is arranged on the rotating part of the high-speed rotating joint and includes a dynamic bearing group and a coaxiality monitoring module;

[0013] Among them, the dynamic bearing group can be configured to dynamically compensate for the axial offset between the rotating shaft and the connecting part, and the coaxiality monitoring module is used to detect the concentricity deviation of the rotating assembly in real time.

[0014] In an embodiment of the present invention, the driving mechanism is a servo motor or a variable-frequency motor with a closed-loop control function;

[0015] Among them, the output end of the servo motor or the variable-frequency motor is connected to the transmission mechanism through an elastic coupling, and the synchronous transmission error of the transmission mechanism is less than ±0.05°.

[0016] In an embodiment of the present invention, the transmission mechanism is an involute gear pair or a double-sided tooth synchronous belt drive group;

[0017] Among them, the speed ratio range of the input shaft and the output shaft of the involute gear pair or the double-sided tooth synchronous belt drive group is 1:1 to 1:1.15, and the meshing backlash of the gear pair is 0.03 - 0.05 mm.

[0018] In an embodiment of the present invention, a connection sleeve may be fixedly connected to the end of the connecting shaft, and the rotating part is connected to the connection sleeve;

[0019] Among them, the connection surface between the connection sleeve and the rotating part is hermetically connected.

[0020] In an embodiment of the present invention, the dynamic bearing group includes:

[0021] Angular contact ball bearings or deep groove ball bearings arranged in series, and axial preloading force is applied to both of them through a wave spring;

[0022] Among them, the preloading force adjustment range is 50 - 200 N, and the radial clearance of the bearing group ≤0.01 mm.

[0023] In an embodiment of the present invention, a variable pitch spiral cooling flow channel is integrated on the outer wall of the vacuum cavity;

[0024] Among them, the variable pitch spiral cooling flow channel is communicated with the axial coolant channel inside the rotating shaft through the rotating part to form a forced circulation cooling loop, and the coolant flow rate is 2 - 5 L / min.

[0025] In an embodiment of the present invention, the coaxiality monitoring module includes:

[0026] At least two groups of non-contact fiber optic displacement sensors symmetrically arranged on both sides of the rotating part, and the fiber optic displacement sensors are used to detect the radial offset;

[0027] A three-axis vibration sensor installed on the base of the driving mechanism, which is used to collect vibration spectrum data;

[0028] A data fusion processor generates a concentricity dynamic correction instruction based on the radial offset and the vibration spectrum analysis result.

[0029] The present invention also provides a rotating device, which includes a sealing structure in which a rotating shaft and a vacuum chamber rotate synchronously as described in any one of the above.

[0030] The present invention has at least the following beneficial effects:

[0031] The present invention discloses a sealing structure and a rotating device in which a rotating shaft and a vacuum chamber rotate synchronously. Through a more reliable rotating vacuum chamber design, it can provide effective sealing during high-speed rotation to prevent vacuum leakage, and greatly reduce the installation requirements for the original designed vacuum seal, reducing the wear and replacement of the seal. At the same time, it can also predict the life of the high-speed rotating joint, so as to timely correct and adjust it to improve the use effect of the device during actual use. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic structural diagram of an embodiment of the sealing structure in which a rotating shaft and a vacuum chamber rotate synchronously provided by the present invention;

[0033] Figure 2 It is a schematic structural diagram of another embodiment of the sealing structure in which a rotating shaft and a vacuum chamber rotate synchronously provided by the present invention;

[0034] Figure 3 It is a schematic diagram of a coaxiality monitoring module of an embodiment of the sealing structure in which a rotating shaft and a vacuum chamber rotate synchronously provided by the present invention.

[0035] DESCRIPTION OF THE REFERENCE NUMERALS:

[0036] 100, rotating assembly; 110, rotating shaft; 120, connecting shaft; 1211, connecting sleeve; 121, flow path;

[0037] 200, high-speed rotating joint; 210, connecting portion; 220, rotating portion;

[0038] 300, drive system; 310, drive mechanism; 320, transmission mechanism;

[0039] 400, dynamic support unit; 410, dynamic bearing group; 420, coaxiality monitoring module; 411, non-contact fiber optic displacement sensor; 412, triaxial vibration sensor; 433; data fusion processor;

[0040] 500, vacuum chamber; 510, variable pitch spiral cooling flow path. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0041] The technical solutions in the embodiments of the present application will be clearly described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application belong to the scope of protection of the present application.

[0042] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, rather than to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so that the embodiments of the present application can be implemented in an order other than those illustrated or described herein, and the objects distinguished by "first", "second", etc. are generally of the same type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / " generally means that the related objects before and after are in an "or" relationship.

[0043] The sorting device, sorting method, and processing station for neodymium iron boron magnetic blocks provided in the embodiments of the present application will be described in detail below with reference to the accompanying drawings through specific embodiments and their application scenarios.

[0044] Please refer to Figures 1 to 3 , the present invention provides a rotating device, which includes a sealing structure in which a rotating shaft rotates synchronously with a vacuum chamber and the rotating device.

[0045] Through the sealing structure in which the rotating shaft rotates synchronously with the vacuum chamber and the rotating device, the eccentric wear generated during the operation of the device can be effectively reduced, which may otherwise lead to the problem of progressive reaming failure of the sealing interface in a short period of time, resulting in the attenuation of the vacuum degree.

[0046] Specifically, the sealing structure in which the rotating shaft rotates synchronously with the vacuum chamber may include a rotating assembly 100, a driving system 300, and a dynamic support unit 400. Among them, the rotating assembly 100 includes a rotating shaft 110 and a high-speed rotating joint 200, and the high-speed rotating joint 200 is connected to the rotating shaft 110.

[0047] Specifically, a connecting shaft 120 is rigidly coaxially connected to the rotating shaft 110, and a gas flow path 121 is provided in the connecting shaft 120. Therefore, the connecting shaft 120 and the rotating shaft 110 can rotate synchronously, and gas can flow through the flow path 121 located in the connecting shaft 120.

[0048] Further, the high-speed rotary joint 200 includes a rotating part 220 and a connecting part 210. Among them, the rotating part 220 and the connecting part 210 are rotatably connected, and the rotating part 220 can rotate at a high speed relative to the connecting part 210. Specifically, the rotating part 220 is connected to the end of the connecting shaft 120, and a vacuum chamber is connected to the connecting part 210. Under the negative pressure of the vacuum chamber, gas can pass through the circulation path 121 in the connecting shaft 120 and the high-speed rotary joint 200 and then enter the vacuum chamber.

[0049] It should be noted that a connecting sleeve 1211 can be fixedly connected to the end of the connecting shaft 120, and the rotating part 220 is connected to the connecting sleeve 1211. Among them, the connection surface between the connecting sleeve 1211 and the rotating part 220 is hermetically connected. Through the hermetic connection, the sealing performance between the rotating part 220 and the connecting shaft 120 can be effectively ensured. For example, a sealing ring can be provided between the connecting sleeve 1211 and the rotating part 220 to achieve the hermetic connection. However, it is not limited thereto, and it can be determined according to actual needs.

[0050] In some embodiments, the drive system 300 includes a drive mechanism 310 and a transmission mechanism 320, and the drive mechanism 310 outputs torque to the rotating assembly 100 through the transmission mechanism 320.

[0051] Specifically, the drive mechanism 310 is a servo motor or a variable-frequency motor with a closed-loop control function. However, it is not limited thereto, and it can be determined according to actual needs. Among them, the output end of the servo motor or the variable-frequency motor is connected to the transmission mechanism 320 through an elastic coupling, and the synchronous transmission error of the transmission mechanism 320 is less than ±0.05°.

[0052] Further, the transmission mechanism 320 is an involute gear pair or a double-sided tooth synchronous belt drive group.

[0053] Among them, the speed ratio range of the input shaft and the output shaft of the involute gear pair or the double-sided tooth synchronous belt drive group is 1:1 to 1:1.15, and the meshing backlash of the gear pair is between 0.03 and 0.05 mm. It can be understood that the output shaft is connected to the rotating shaft 110 to drive the rotating shaft 110 to rotate.

[0054] In some embodiments, the dynamic support unit 400 is arranged on the rotating part 220 of the high-speed rotary joint 200, and it includes a dynamic bearing group 410 and a coaxiality monitoring module 420. Among them, the dynamic bearing group 410 can be configured to dynamically compensate the axial offset between the rotating shaft 110 and the connecting part 210, and the coaxiality monitoring module 420 is used to detect the concentricity deviation of the rotating assembly 100 in real time.

[0055] Specifically, the dynamic bearing group 410 includes angular contact ball bearings or deep groove ball bearings arranged in series, and axial preloading force is applied to both of them through wave springs. Among them, the adjustment range of the preloading force is 50-200N, and the radial clearance of the bearing group is ≤0.01mm. It can be understood that by setting angular contact ball bearings or deep groove ball bearings, the stability of the rotating shaft 110 during rotation can be effectively ensured, the radial runout during rotation can be reduced, and thus the service life of the high-speed rotary joint 200 can be improved.

[0056] Furthermore, the coaxiality monitoring module 420 may preferably include at least two sets of non-contact fiber optic displacement sensors 411 symmetrically arranged on both sides of the rotating part 220, a three-axis vibration sensor 412 installed on the base of the driving mechanism 310, and a data fusion processor 433.

[0057] Among them, the fiber optic displacement sensor is used to detect the radial offset, and the three-axis vibration sensor 412 installed on the base of the driving mechanism 310 is used to collect vibration spectrum data. And the data fusion processor 433 generates a concentricity dynamic correction instruction based on the radial offset and the vibration spectrum analysis result.

[0058] Specifically, a wavelength modulation type fiber optic sensor may preferably be adopted, and three groups of probes are arranged equidistantly along the circumference of the flange to measure the radial displacement of the rotating assembly 100. The three-axis vibration sensor 412 may preferably be an MEMS accelerometer, which is installed on the key vibration transmission path of the base of the driving mechanism 310, and synchronously collects axial (Z), radial (X / Y) vibration acceleration signals, and obtains a 1 / 3 octave spectrum through FFT conversion. At the same time, the fiber optic signal can also be denoised by wavelet threshold to eliminate the pulse noise caused by electromagnetic interference, and the vibration signal can be band-pass filtered to suppress the mechanical resonance background noise.

[0059] By extracting the harmonic components of the ball passing through the outer ring frequency in the vibration spectrum as characteristic quantities, and monitoring the amplitude change rate of the 2-fold rotating frequency component in the radial vibration acceleration. Finally, a regression model of the fiber optic displacement ΔR and the data of the temperature sensor is established. Finally, by observing the equation to fuse the fiber optic displacement data (high-precision static deviation) and the vibration spectrum characteristics (dynamic trend prediction), the optimal estimated eccentricity ΔR is output.

[0060] For the correction strategy, it may preferably include primary correction and secondary correction. Specifically, when ΔR is less than the first preset value, the phase angle of the driving motor can be finely adjusted through a PID controller. When ΔR is greater than the first preset value, it is preferably allowed to trigger the adjustment of the preloading force of the wave spring of the dynamic bearing group 410. The monitoring of the radial runout of the rotating part and the connecting shaft 120 can be effectively realized, and the service life of the high-speed rotary joint 200 can be predicted.

[0061] To improve the usage effect of the present device during actual use, it is allowed to integrate a variable pitch spiral cooling flow channel 510 on the outer wall of the vacuum chamber 500. Among them, the variable pitch spiral cooling flow channel 510 is communicated with the axial coolant channel inside the rotating shaft 110 through the rotating part 220 to form a forced circulation cooling loop, and the coolant flow rate is 2 - 5 L / min. By setting the variable pitch spiral cooling flow channel 510, it is possible to cool down the rotation during the rotation process.

[0062] It can be understood that through the non-uniform design of the variable pitch spiral flow channel (the pitch changes with the temperature field gradient), the local heat dissipation efficiency is improved to ensure the material property stability of the rotating assembly 100.

[0063] In summary, the present invention discloses a sealing structure and a rotating device in which the rotating shaft and the vacuum chamber rotate synchronously. Through a more reliable design of the rotary vacuum chamber 500, it can provide effective sealing during high-speed rotation, prevent vacuum leakage, and greatly reduce the installation requirements for the original designed vacuum seal, reducing the wear and replacement of the seal. At the same time, it is also possible to predict the service life of the high-speed rotary joint 200, so as to correct and adjust it in time to improve the usage effect of the present device during actual use.

[0064] It should be noted that in this article, the terms "including", "comprising" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "including one..." does not exclude the existence of another identical element in the process, method, article or device including that element. In addition, it should be pointed out that the scope of the methods and devices in the embodiments of the present application is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in the reverse order according to the functions involved. For example, the described methods may be performed in an order different from that described, and various steps may be added, omitted, or combined. Additionally, the features described with reference to certain examples may be combined in other examples.

[0065] The embodiments of the present application have been described above with reference to the accompanying drawings. However, the present application is not limited to the above specific embodiments. The above specific embodiments are merely illustrative and not restrictive. Under the inspiration of the present application, those of ordinary skill in the art can also make many forms without departing from the purpose of the present application and the scope protected by the claims, and all of them belong to the protection scope of the present application.

Claims

1. A sealing structure in which a rotating shaft rotates synchronously with a vacuum chamber, characterized in that: include, A rotating assembly (100) comprising: A rotating shaft (110) is rigidly coaxially connected to a connecting shaft (120), a gas flow path (121) is provided in the connecting shaft (120), and the rotating shaft (110) and the connecting shaft (120) both rotate synchronously at a constant angular velocity around the same rotating shaft (110); A high-speed rotary joint (200), comprising a rotating part (220) and a connecting part (210), wherein the rotating part (220) and the connecting part (210) are rotationally connected, and the rotating part (220) is connected to the end of the connecting shaft (120), and the connecting part (210) is connected to a vacuum chamber; A drive system (300) comprising: a driving mechanism (310) and a transmission mechanism (320), wherein the driving mechanism (310) outputs torque to the rotating assembly (100) through the transmission mechanism (320); A dynamic support unit (400) connected to the rotating part (220) of the high-speed rotary joint (200), comprising a dynamic bearing group (410) and a coaxiality monitoring module (420); The dynamic bearing assembly (410) can be configured to dynamically compensate for the axial offset between the rotating shaft (110) and the connecting portion (210), and the coaxiality monitoring module (420) is used to detect the concentricity deviation of the rotating assembly (100) in real time.

2. The sealing structure for synchronous rotation of the rotating shaft and the vacuum chamber according to claim 1, characterized in that: The driving mechanism (310) is a servo motor or a variable frequency motor with a closed-loop control function; The output end of the servo motor or the variable frequency motor is connected to the transmission mechanism (320) via an elastic coupling, and the synchronous transmission error of the transmission mechanism (320) is less than ±0.05°.

3. The sealing structure for synchronous rotation of the rotating shaft and the vacuum chamber according to claim 2, characterized in that: The transmission mechanism (320) is an involute gear pair or a double-sided tooth synchronous belt transmission group; The speed ratio between the input shaft and the output shaft of the involute gear pair or the double-sided tooth synchronous belt transmission group is in the range of 1:1 to 1:1.15, and the meshing side clearance of the gear pair is in the range of 0.03 to 0.05 mm.

4. The sealing structure for synchronous rotation of the rotating shaft and the vacuum chamber according to claim 1, characterized in that: The end of the connecting shaft (120) can be fixedly connected with a connecting sleeve (1211), and the rotating part (220) is connected to the connecting sleeve (1211); Wherein, the connecting sleeve (1211) is sealingly connected to the connecting surface of the rotating part (220).

5. The sealing structure for synchronous rotation of the rotating shaft and the vacuum chamber according to claim 1, characterized in that: The dynamic bearing assembly (410) comprises: Angular contact ball bearings or deep groove ball bearings arranged in series, both of which are subjected to axial preload by wave springs; Among them, the preload force adjustment range is 50~200N, and the radial clearance of the bearing group is ≤0.01mm.

6. The sealing structure for synchronous rotation of the rotating shaft and the vacuum chamber according to claim 1, characterized in that: The outer wall of the vacuum cavity (500) is integrated with a variable pitch spiral cooling channel (510); The variable pitch spiral cooling channel (510) is connected to the axial coolant channel inside the rotating shaft (110) through the rotating part (220), forming a forced circulation cooling circuit, and the coolant flow rate is 2 to 5 L / min.

7. The sealing structure for synchronous rotation of the rotating shaft and the vacuum chamber according to claim 1, characterized in that: The coaxiality monitoring module (420) comprises: At least two groups of non-contact optical fiber displacement sensors (411) symmetrically arranged on both sides of the rotating part (220), the optical fiber displacement sensors being used to detect radial offset; A three-axis vibration sensor (412) mounted on a base of the drive mechanism (310) and used to collect vibration spectrum data; The data fusion processor (433) generates a concentricity dynamic correction instruction based on the radial offset and the vibration spectrum analysis result.

8. A rotating device, characterized in that: It comprises a sealing structure in which a rotating shaft rotates synchronously with a vacuum chamber as described in any one of claims 1 to 7.

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