Special sintering furnace for thin film

Abstract

The invention discloses a sintering furnace special for a thin film and relates to the technical field of sintering furnaces. Comprising a rack, a sintering furnace is arranged at the bottom of the rack, an electric heating pipe is arranged in the sintering furnace, and an electric heating controller is arranged on the sintering furnace; a transferring mechanism is arranged at the top of the rack and comprises a lifting disc arranged on the rack in a sliding mode, and base mechanisms are arranged on the lifting disc in an array mode and used for attaching and bearing materials; a pre-processing mechanism is arranged in the center area of the lifting disc and is used for pre-coating processing; the preparation mechanism comprises a processing mounting seat arranged on the lifting disc, the processing mounting seat is provided with four areas, and an inspection mechanism, two coating mechanisms and a pushing mechanism are respectively arranged in the four areas; a dismounting mechanism is further arranged at the top of the rack and used for dismounting the sintered thin film; the preparation operation measures before sintering are perfected, and the operation difficulty of film sintering operation is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of sintering furnaces, and particularly to a sintering furnace dedicated for thin films. Background Art

[0002] A thin film sintering furnace is a device used for sintering thin film materials, commonly found in fields such as electronics, optoelectronics, semiconductors, and solar energy. Sintering is a process of heating powdered materials to make their particles combine into a continuous solid. In the thin film process, the purpose of sintering is to form a uniform, dense, and functional layer of thin film material on a substrate; currently, the functionality of sintering furnaces is poor, and the preliminary preparatory work is not perfect. They can only perform simple transfer and placement, and the operation is cumbersome. Based on this, the present invention proposes a sintering furnace to improve the preparatory operation measures before sintering and reduce the operation difficulty for thin film sintering operations. Summary of the Invention

[0003] In view of the above technical problems, the present invention improves the preparatory operation measures before sintering and reduces the operation difficulty for thin film sintering operations.

[0004] The implementation solution of the present invention is as follows: A sintering furnace dedicated for thin films, including a frame. At the bottom of the frame is a sintering furnace, inside which there are heating tubes, and on the sintering furnace there is a heating controller; at the top of the frame is a transfer mechanism, which includes a lifting plate slidably arranged on the frame. On the lifting plate, there are substrate mechanisms arranged in an array for attaching and carrying materials; in the central area of the lifting plate is a preparatory processing mechanism for preparatory coating processing; the preparatory mechanism includes a processing mounting seat arranged on the lifting plate. The processing mounting seat has four areas, in which there are respectively an inspection mechanism, two coating mechanisms, and a pushing mechanism; on the top of the frame is also a removal mechanism for removing the sintered thin film.

[0005] Further, the transfer mechanism includes an azimuth plate rotatably mounted on the top of the frame, and a first motor arranged on the top of the frame. On the output shaft of the first motor is a first gear, and the first gear meshes with the azimuth plate; on the azimuth plate is a second motor, and on the output shaft of the second motor is a belt structure. On the azimuth plate, there are a second guide rod and a second lead screw movably arranged. The bottom ends of the second guide rod and the second lead screw are connected to the lifting plate, and the second lead screw and the belt structure on the output shaft of the second motor form a screw pair.

[0006] Further, the substrate mechanism includes a flipping gear disk rotatably mounted on the lifting plate. On the flipping gear disk is a substrate flipping frame, and on the substrate flipping frame is telescopically arranged a base layer for attaching and carrying materials; connected to the base layer is a push plate, and between the push plate and the substrate flipping frame is connected a first spring.

[0007] Furthermore, a flipping motor is provided on the lifting disc, and a first gear ring is rotatably installed in the central area of the lifting disc. The first gear ring meshes with the flipping gear discs on each base mechanism. The flipping motor drives any one of the flipping gear discs for linkage.

[0008] Furthermore, the preliminary processing mechanism includes a third guide rod and a third lead screw provided on the lifting disc. A third motor is provided at the top of the third lead screw. The third lead screw is driven by the third motor. A position frame is movably provided on the third guide rod and the third lead screw. The position frame and the third lead screw form a screw pair. An angle motor is provided on the position frame and is used to drive the processing mounting seat. Furthermore, control mechanisms are respectively provided in three areas on the processing mounting seat for driving the inspection mechanism and two coating mechanisms. Among the two coating mechanisms, one is used to coat a non-stick coating on the base mechanism, and the other is used to coat a sintering material. The control mechanism includes a control motor provided on the top of the processing mounting seat. A control gear is provided on the output shaft of the control motor. A second gear ring is rotatably installed on the top of the processing mounting seat. The second gear ring meshes with the control gear. Control lead screws are rotatably installed in the three areas. A clamping gear is rotatably provided on the processing mounting seat and at the top of the control lead screw. An electromagnetic clamping plate is provided inside the clamping gear. The electromagnetic clamping plate clamps the top of the control lead screw to drive the control lead screw to rotate synchronously.

[0009] Furthermore, the control mechanism further includes a control slide seat slidably installed on the processing mounting seat. The control slide seat and the control lead screw form a screw pair. A moving belt and a moving motor are provided on the control slide seat. The moving motor is used to drive the moving belt. The inspection mechanism and the coating mechanism are provided on the control slide seat.

[0010] Furthermore, the inspection mechanism includes a detection electric cylinder slidably installed on the control slide seat. A contact inspection rod is telescopically provided on the telescopic rod of the detection electric cylinder. A displacement sensor is provided on the contact inspection rod to output and feedback the telescopic displacement of the contact inspection rod. The bottom of the detection electric cylinder is attached to the moving belt.

[0011] Furthermore, the coating mechanism includes a coating electric cylinder slidably installed on the control slide seat. The bottom of the coating electric cylinder is attached to the moving belt. A coating head is provided on the telescopic rod of the coating electric cylinder. A transmission box is provided on the processing mounting seat. The transmission box is communicated with the coating head to transmit the sintering material or the non-stick coating.

[0012] Further, the pushing mechanism includes a pushing mounting base provided on the processing mounting base, and a pushing electric cylinder is provided on the pushing mounting base; the removing mechanism includes a transfer motor and an adsorption mounting frame provided on the frame, an adsorption electric cylinder is provided on the adsorption mounting frame, an adsorption part is connected to the telescopic rod of the adsorption electric cylinder, and the adsorption mounting frame is driven by the transfer motor; a first removing electric cylinder is further provided on the frame, a second removing electric cylinder is provided on the telescopic rod of the first removing electric cylinder, and a removing scraper is provided on the telescopic rod of the second removing electric cylinder for removing the sintered film.

[0013] The beneficial effects of the present invention compared with the prior art are as follows: (1) When inspecting the base layer, the contact inspection rod is controlled by the detection electric cylinder to contact the base layer. By transferring the contact point, the contact inspection rod contacts the uneven area on the base layer, generates a telescopic displacement, and the displacement sensor outputs and feeds back its telescopic signal. After the entire area is contacted, the surface flatness of the base layer is analyzed, which is convenient for subsequent replacement and maintenance; (2) Before applying the sintered material coating, a non-stick coating is applied to the base layer by one of the coating mechanisms, which is beneficial for the subsequent detachment of the sintered film; (3) The pushing mechanism pushes the push plate, causing the base layer to slide, so that the base layer extends to the outside of the base turning frame. The adsorption part is controlled by the adsorption electric cylinder to move and adsorb on the film. The first removing electric cylinder controls the movement of the second removing electric cylinder, and the second removing electric cylinder controls the movement of the removing scraper to perform a scraping operation at the joint between the film and the base layer, that is, to detach the film, and then the adsorption mounting frame is controlled by the transfer motor to flip to achieve transfer. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0015] Figure 2 It is a schematic diagram of the installation structure of the lifting plate of the present invention.

[0016] Figure 3 It is a schematic diagram of the installation structure of the processing mounting base of the present invention.

[0017] Figure 4 It is a schematic diagram of the installation structure of the base mechanism of the present invention.

[0018] Figure 5 It is a schematic diagram of the partial structure of the base mechanism of the present invention.

[0019] Figure 6 It is a schematic diagram of the structure of the base layer of the present invention.

[0020] Figure 7 It is a schematic diagram of the installation structure of the inner area of the processing mounting base of the present invention.

[0021] Figure 8 It is a schematic diagram of the installation structure of the control mechanism of the present invention.

[0022] Figure 9 Schematic diagram of the installation structure of the inspection mechanism, coating mechanism and pushing mechanism of the present invention.

[0023] Figure 10 Schematic diagram of the inspection mechanism and coating mechanism of the present invention.

[0024] Figure 11 Schematic diagram of the installation structure of the demolition mechanism of the present invention.

[0025] Reference numerals: 1-frame; 101-first motor; 102-first gear; 103-orientation disk; 2-sintering furnace; 3-electric heating controller; 4-electric heating tube; 5-second motor; 6-second guide rod; 7-second lead screw; 8-lifting disk; 9-third guide rod; 10-third lead screw; 11-third motor; 12-position frame; 13-angle motor; 14-processing mounting seat; 15-rotation motor; 16-rotation gear disk; 17-first gear ring; 18-substrate rotation frame; 19-base layer; 20-push plate; 21-first spring; 22-second gear ring; 23-control gear; 24-control motor; 25-control lead screw; 26-clamping gear; 27-pushing mounting seat; 28-pushing electric cylinder; 29-control sliding seat; 30-moving belt; 31-moving motor; 32-detection electric cylinder; 33-contact inspection rod; 34-transfer box; 35-coating electric cylinder; 36-coating head; 37-first demolition electric cylinder; 38-transfer motor; 39-absorption mounting frame; 40-absorption part; 4001-absorption electric cylinder; 41-second demolition electric cylinder; 42-demolition scraper. Detailed implementation manners

[0026] Example: As Figures 1 to 11 shown, a special sintering furnace for thin films includes a frame 1. A sintering furnace 2 is provided at the bottom of the frame 1. An electric heating tube 4 is provided inside the sintering furnace 2, and an electric heating controller 3 is provided on the sintering furnace 2; A transfer mechanism is provided at the top of the frame 1. The transfer mechanism includes a lifting disk 8 slidably arranged on the frame 1. A substrate mechanism is arranged in an array on the lifting disk 8 for attaching and carrying materials; A preparatory processing mechanism is provided in the central area of the lifting disk 8 for preparatory coating processing; The preparatory mechanism includes a processing mounting seat 14 arranged on the lifting disk 8. The processing mounting seat 14 is provided with four areas, and an inspection mechanism, two coating mechanisms and a pushing mechanism are respectively arranged in the four areas; A demolition mechanism is also provided at the top of the frame 1 for demolishing the sintered thin film.

[0027] The transfer mechanism includes an azimuth disk 103 rotatably mounted on the top of the frame 1, and a first motor 101 arranged on the top of the frame 1. A first gear 102 is provided on the output shaft of the first motor 101, and the first gear 102 meshes with the azimuth disk 103. A second motor 5 is arranged on the azimuth disk 103, and a belt structure is provided on the output shaft of the second motor 5. A second guide rod 6 and a second lead screw 7 are movably arranged on the azimuth disk 103. The bottom ends of the second guide rod 6 and the second lead screw 7 are connected to a lifting disk 8, and the second lead screw 7 forms a screw pair with the belt structure on the output shaft of the second motor 5.

[0028] The base mechanism includes a flipping gear disk 16 rotatably mounted on the lifting disk 8. A base flipping frame 18 is arranged on the flipping gear disk 16. A base layer 19 is telescopically arranged on the base flipping frame 18, and the base layer 19 is used for attaching and carrying materials. A push plate 20 is connected to the base layer 19, and a first spring 21 is connected between the push plate 20 and the base flipping frame 18. A flipping motor 15 is arranged on the lifting disk 8, and a first gear ring 17 is rotatably mounted in the central area of the lifting disk 8. The first gear ring 17 meshes with the flipping gear disks 16 of each base mechanism. The flipping motor 15 drives any one of the flipping gear disks 16 for linkage.

[0029] The preliminary processing mechanism includes a third guide rod 9 and a third lead screw 10 arranged on the lifting disk 8. A third motor 11 is arranged at the top of the third lead screw 10. The third lead screw 10 is driven by the third motor 11. A position frame 12 is movably arranged on the third guide rod 9 and the third lead screw 10. The position frame 12 forms a screw pair with the third lead screw 10, and an angle motor 13 is arranged on the position frame 12 for driving a processing mounting seat 14. Control mechanisms are respectively arranged in three areas on the processing mounting seat 14 for driving an inspection mechanism and two coating mechanisms. Among the two coating mechanisms, one is used for coating a non-stick coating on the base mechanism, and the other is used for coating a sintering material. The control mechanism includes a control motor 24 arranged on the top of the processing mounting seat 14. A control gear 23 is arranged on the output shaft of the control motor 24, and a second gear ring 22 is rotatably mounted on the top of the processing mounting seat 14. The second gear ring 22 meshes with the control gear 23. A control lead screw 25 is rotatably mounted in the three areas. A clamping gear 26 is rotatably arranged on the processing mounting seat 14 and at the top of the control lead screw 25. An electromagnetic clamping plate is arranged inside the clamping gear 26, and the electromagnetic clamping plate clamps the top of the control lead screw 25 to drive the control lead screw 25 to rotate synchronously. The control mechanism further includes a control sliding seat 29 slidably mounted on the processing mounting seat 14. The control sliding seat 29 forms a screw pair with the control lead screw 25. A moving belt 30 and a moving motor 31 are arranged on the control sliding seat 29, and the moving motor 31 is used for driving the moving belt 30. The inspection mechanism and the coating mechanisms are arranged on the control sliding seat 29.

[0030] The inspection mechanism includes a detection electric cylinder 32 slidably mounted on the control slide 29. An inspection contact rod 33 is telescopically arranged on the telescopic rod of the detection electric cylinder 32, and a displacement sensor is arranged on the inspection contact rod 33 to output and feedback the telescopic displacement of the inspection contact rod 33. The bottom of the detection electric cylinder 32 is attached to the moving belt 30. The coating mechanism includes a coating electric cylinder 35 slidably mounted on the control slide 29. The bottom of the coating electric cylinder 35 is attached to the moving belt 30, and a coating head 36 is arranged on the telescopic rod of the coating electric cylinder 35. A transmission box 34 is arranged on the processing mounting seat 14, and the transmission box 34 is communicated with the coating head 36 to transmit sintering materials or non-stick coatings.

[0031] The pushing mechanism includes a pushing mounting seat 27 arranged on the processing mounting seat 14, and a pushing electric cylinder 28 is arranged on the pushing mounting seat 27. The removing mechanism includes a transfer motor 38 and an adsorption mounting frame 39 arranged on the frame 1. An adsorption electric cylinder 4001 is arranged on the adsorption mounting frame 39, and an adsorption part 40 is connected to the telescopic rod of the adsorption electric cylinder 4001. The adsorption mounting frame 39 is driven by the transfer motor 38. A first removing electric cylinder 37 is further arranged on the frame 1, a second removing electric cylinder 41 is arranged on the telescopic rod of the first removing electric cylinder 37, and a removing scraper 42 is arranged on the telescopic rod of the second removing electric cylinder 41 for removing the sintered film.

[0032] Operating principle: Before sintering, the substrate mechanism is pre-treated and inspected. Specifically, the flipping motor 15 drives the flipping gear disk 16 to rotate each substrate mechanism, that is, the substrate flipping frame 18 and the base layer 19 are flipped and face the inner side of the lifting disk 8. By the operation of the third motor 11, the lead screw three 10 rotates, and the position frame 12 can slide, that is, the processing mounting seat 14 is lifted and moved to the inner side of each substrate mechanism. By the operation of the control motor 24, the second gear ring 22 rotates, and the electromagnetic substrate inside the clamping gear 26 clamps and fixes the corresponding control lead screw 25 to drive the control lead screw 25 to rotate, and the control slide 29 moves. The moving motor 31 drives the moving belt 30 to drive the inspection mechanism or the coating mechanism to move. Further, when inspecting the base layer 19, the detection electric cylinder 32 controls the inspection contact rod 33 to contact the base layer 19. By transferring the contact point, the inspection contact rod 33 contacts the uneven area on the base layer 19, generates a telescopic displacement, and outputs and feedbacks its telescopic signal through the displacement sensor. After the entire area is contacted, the surface flatness of the base layer 19 is analyzed, which is convenient for subsequent replacement and maintenance.

[0033] Before applying the sintering material, a non-stick coating is applied to the base layer 19 by one of the coating mechanisms, which is beneficial for the subsequent detachment of the sintered film. That is, by controlling the coating electric cylinder 35 to change its position, and the coating electric cylinder 35 controls the coating head 36 to approach the base layer 19, and the transmission box 34 transmits the material. The same applies to the subsequent spraying of the sintering material.

[0034] After spraying the sintering material, control the rotation of the base layer 19, that is, the base layer 19 faces the outside of the lifting disk 8, and the base layer 19 is located inside the base turnover frame 18. When coating the sintering material, the material can be effectively blocked and limited.

[0035] Control the processing mounting base 14 to rise, that is, the bottom of the processing mounting base 14 coincides and closes with the lifting disk 8. Through the operation of the second motor 5, control the lifting of the lifting disk 8, and then put the base mechanism into the sintering furnace 2. The lifting disk 8 coincides and closes with the top of the sintering furnace 2. At this time, only the base mechanism is in the sintering furnace 2, and the processing mounting base 14 is not in the sintering furnace 2; control the electric heating tube 4 to perform electric heating through the electric heating controller 3 to carry out the sintering operation; after the sintering operation is completed, lift the lifting disk 8. When removing the sintering film, control the processing mounting base 14 to descend, that is, it is located inside each base mechanism. Push the push plate 20 through the pushing mechanism to make the base layer 19 slide, so that the base layer 19 extends to the outside of the base turnover frame 18. Control the adsorption part 40 to move through the adsorption cylinder 4001 and adsorb on the film. The first removal cylinder 37 controls the second removal cylinder 41 to move, and the second removal cylinder 41 controls the removal scraper 42 to move to perform scraping operation at the joint of the film and the base layer 19, that is, to separate the film. Then control the adsorption mounting frame 39 to turn over through the transfer motor 38 to achieve transfer; further, control the processing mounting base 14 through the angle motor 13 to perform azimuth transformation. Through the operation of the first motor 101, control the azimuth disk 103 to rotate, that is, perform azimuth transformation on each base mechanism.

Claims

1. A thin film sintering furnace, comprising a frame (1), a sintering furnace (2) arranged at the bottom of the frame (1), an electric heating tube (4) arranged inside the sintering furnace (2), and an electric heating controller (3) arranged on the sintering furnace (2); characterized in that: A transfer mechanism is arranged on the top of the frame (1), the transfer mechanism comprising a lifting plate (8) slidably arranged on the frame (1), a base mechanism being arranged in an array on the lifting plate (8) for attaching and carrying materials; a preparatory processing mechanism is arranged in the central area of ​​the lifting plate (8) for preparatory coating processing; the preparatory mechanism comprises a processing mounting seat (14) arranged on the lifting plate (8), the processing mounting seat (14) having four areas, an inspection mechanism, two coating mechanisms and a pushing mechanism being arranged in the four areas respectively; a removal mechanism is also arranged on the top of the frame (1) for removing the sintered film.

2. A thin film sintering furnace according to claim 1, characterized in that: The transfer mechanism comprises an azimuth plate (103) rotatably mounted on the top of the frame (1), and a motor (101) arranged on the top of the frame (1); a gear (102) is arranged on the output shaft of the motor (101), and the gear (102) is meshed with the azimuth plate (103); a motor (5) is arranged on the azimuth plate (103), a belt structure is arranged on the output shaft of the motor (5), a guide rod (6) and a screw rod (7) are movably arranged on the azimuth plate (103), the bottom ends of the guide rod (6) and the screw rod (7) are connected to the lifting plate (8), and the screw rod (7) and the belt structure on the output shaft of the motor (5) form a spiral pair.

3. The thin film sintering furnace according to claim 1, characterized in that: The base mechanism comprises a flip toothed disc (16) rotatably mounted on a lifting disc (8); a base flip frame (18) is arranged on the flip toothed disc (16); a base layer (19) is telescopically arranged on the base flip frame (18); the base layer (19) is used for attaching and carrying materials; a push plate (20) is connected to the base layer (19); a spring (21) is connected between the push plate (20) and the base flip frame (18).

4. The thin film sintering furnace according to claim 3, characterized in that: The lifting plate (8) is provided with a turning motor (15), and a gear ring (17) is rotatably mounted in the central area of ​​the lifting plate (8). The gear ring (17) is meshed with the turning gear plates (16) on each base mechanism. The turning motor (15) drives any one of the turning gear plates (16) to achieve linkage.

5. The thin film sintering furnace according to claim 1, characterized in that: The preparatory processing mechanism comprises a guide rod three (9) and a screw rod three (10) arranged on a lifting plate (8), a motor three (11) is arranged on the top of the screw rod three (10), the screw rod three (10) is driven by the motor three (11), a position frame (12) is movably arranged on the guide rod three (9) and the screw rod three (10), the position frame (12) and the screw rod three (10) form a spiral pair, and an angle motor (13) is arranged on the position frame (12), and the angle motor (13) is used to drive the processing mounting seat (14).

6. A thin film dedicated sintering furnace according to claim 5, characterized in that: The three regions on the processing mounting seat (14) are respectively provided with control mechanisms for driving the inspection mechanism and the two coating mechanisms; one of the two coating mechanisms is used to coat the non-stick coating on the base mechanism, and the other is used to coat the sintering material; the control mechanism comprises a control motor (24) arranged on the top of the processing mounting seat (14); a control gear (23) is arranged on the output shaft of the control motor (24); a second gear ring (22) is rotatably mounted on the top of the processing mounting seat (14); the second gear ring (22) is meshed with the control gear (23); a control screw (25) is rotatably mounted in the three regions; a clamping gear (26) is rotatably mounted on the processing mounting seat (14) and located at the top of the control screw (25); an electromagnetic clamping plate is arranged on the inner side of the clamping gear (26); the electromagnetic clamping plate clamps the top of the control screw (25) to drive the control screw (25) to rotate synchronously.

7. A thin film sintering furnace according to claim 6, characterized in that: The control mechanism further comprises a control slide (29) slidably mounted on the processing mounting seat (14); the control slide (29) and the control screw (25) form a spiral pair; a moving belt (30) and a moving motor (31) are arranged on the control slide (29); the moving motor (31) is used to drive the moving belt (30); and the inspection mechanism and the coating mechanism are arranged on the control slide (29).

8. The thin film sintering furnace according to claim 6, characterized in that: The inspection mechanism comprises an inspection electric cylinder (32) slidably mounted on a control slide (29); a contact inspection rod (33) is telescopically arranged on a telescopic rod of the inspection electric cylinder (32); a displacement sensor is arranged on the contact inspection rod (33) to output feedback of the telescopic displacement of the contact inspection rod (33); and the bottom of the inspection electric cylinder (32) is attached to a moving belt (30).

9. The thin film sintering furnace according to claim 6, characterized in that: The coating mechanism comprises a coating electric cylinder (35) on a control slide (29) slidably mounted on a control slide (29), the bottom of the coating electric cylinder (35) being attached to a moving belt (30), and a coating head (36) being arranged on a telescopic rod of the coating electric cylinder (35), and a transmission box (34) being arranged on the processing mounting seat (14), the transmission box (34) being connected to the coating head (36) to transmit sintering material or non-stick coating.

10. The thin film sintering furnace according to claim 1, characterized in that: The pushing mechanism comprises a pushing mounting seat (27) arranged on the processing mounting seat (14), and a pushing electric cylinder (28) is arranged on the pushing mounting seat (27); the dismantling mechanism comprises a transfer motor (38) and an adsorption mounting frame (39) arranged on the frame (1), and an adsorption electric cylinder (4001) is arranged on the adsorption mounting frame (39), and an adsorption portion (40) is connected to the telescopic rod of the adsorption electric cylinder (4001), and the adsorption mounting frame (39) is driven by the transfer motor (38); a dismantling electric cylinder 1 (37) is also arranged on the frame (1), and a dismantling electric cylinder 2 (41) is arranged on the telescopic rod of the dismantling electric cylinder 1 (37), and a dismantling scraper (42) is arranged on the telescopic rod of the dismantling electric cylinder 2 (41), which is used to dismantle the sintered film.

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