Self-checking system and method suitable for extremely high vacuum ion pump

Abstract

The invention belongs to the field of extremely-high vacuum ion pumps, and particularly relates to a self-checking system and method suitable for an extremely-high vacuum ion pump, and the system comprises an ion pump power supply body which is used for receiving a control instruction of a power supply main control module, so that the ion pump can work normally; the state measurement module is used for measuring measurement data of the ion pump power supply body and storing the measurement data into the data storage module; the data storage module is used for receiving and storing measurement data from the state measurement module, operation event information of the power supply main control module and fault information generated by the information processing module; the information processing module is used for detecting information transmission among the modules, judging whether the modules work normally or not, analyzing data in the data storage module and judging whether the ion pump power supply body breaks down or not, and if the ion pump power supply body breaks down, the alarm unit is started and then fault information is stored in the data storage module. The fault reason can be analyzed according to the measurement data information and the operation event information, technical human source maintenance is facilitated, and the maintenance efficiency is improved.

Description

Technical Field

[0001] The present invention belongs to the field of extremely high vacuum ion pumps, and specifically relates to a self-checking system and method applicable to extremely high vacuum ion pumps. Background Art

[0002] Industrial intelligence is the trend of current industrial development, which requires that during the operation of equipment, it can self-detect and transmit useful information so that the central control center can monitor the operation of the equipment in real time and issue notifications. Currently, ion pump power supplies do not have a self-detection function, cannot detect equipment failures in a timely manner and analyze the causes of failures, and require personnel to conduct regular inspections and observations, increasing labor consumption and delaying the timing of maintenance, which is inconvenient for personnel to use. Summary of the Invention

[0003] The purpose of the present invention is to provide a self-checking system applicable to extremely high vacuum ion pumps, which realizes real-time detection during operation, discovers faults, analyzes the causes of faults and notifies personnel, is simple to use, saves labor, and improves efficiency to meet the need for intelligent and self-checkable ion pump power supplies.

[0004] The technical solution adopted by the present invention to achieve the above purpose is as follows:

[0005] A self-checking system applicable to extremely high vacuum ion pumps includes: an ion pump power supply body, a power supply main control module, a state measurement module, a data storage module, a data export module, an information processing module, and an alarm unit;

[0006] The ion pump power supply body is respectively connected to the ion pump, the power supply main control module, and the state detection module, and is used to receive the control instructions of the power supply main control module, provide high voltage for the ion pump, and enable the connected ion pump to work normally;

[0007] The state measurement module is connected to the ion pump power supply body, and is used to measure the measurement data of the ion pump power supply body including output voltage, output current, and internal temperature of the power supply, and store it in the data storage module;

[0008] The data storage module is used to receive and store the measurement data from the state measurement module, the operation event information of the power supply main control module, and the fault information generated by the information processing module;

[0009] The data export module is used to export the measurement data, operation event information, and fault information in the data storage module in the form of a file through USB;

[0010] The information processing module is used to detect the information transmission between modules, judge whether each module is working properly, analyze the data in the data storage module, judge whether the ion pump power supply body has a fault, and if a fault occurs, start the alarm unit and store the fault information in the data storage module;

[0011] An alarm unit, which is used to display the fault information generated by the information processing module, and give an audible alarm to remind the nearby personnel that a fault has occurred in the ion pump power supply body. At the same time, it transmits the fault information to the terminal monitoring personnel.

[0012] The state measurement module includes: a voltage measurement unit, a current measurement unit, and a temperature measurement unit, which are respectively connected to the ion pump power supply body;

[0013] The voltage measurement unit is used to measure the output voltage of the ion pump power supply body;

[0014] The current measurement unit is used to measure the output current of the ion pump power supply body;

[0015] The temperature measurement unit is used to measure the internal temperature of the ion pump power supply body.

[0016] The data storage module includes: a measurement data unit, an operation information unit, and a fault information unit;

[0017] The measurement data unit is connected to the state measurement module and is used to receive and store the data generated by the state measurement module;

[0018] The operation information unit is connected to the power supply main control module and is used to store the operation event information during the normal operation of the ion pump power supply controlled by the power supply main control module;

[0019] The fault information unit is connected to the information processing module and is used to store the fault information generated by the information processing module.

[0020] The data export module includes: a file system unit and a USB connection interface;

[0021] The file system unit is used to establish a FAT32 file system to convert the data information in the data storage module into a file format that can be viewed by a computer;

[0022] The USB connection unit is connected to a USB flash drive to write the data information in the data storage module into the USB flash drive.

[0023] The information processing module includes: a fault analysis unit interconnected with a fault judgment unit;

[0024] The fault judgment unit is used to judge whether a fault has occurred in the current ion pump power supply body according to the current data in the measurement data unit and the operation event information in the operation information unit. If a fault occurs, it starts the alarm unit;

[0025] The fault analysis unit is used to analyze the cause of the fault according to the historical data in the measurement data unit and the operation event information in the operation information unit, obtain the fault information, and store the fault information in the data storage module.

[0026] The alarm unit includes an information display module, a buzzer alarm module, and a communication transmission module, which are respectively connected to the information processing module;

[0027] The information display module is used to display the fault information generated by the information processing module;

[0028] The buzzer alarm module is used to buzzer to remind nearby personnel that a fault has occurred in the ion pump power supply body;

[0029] The communication transmission module is used to transmit the fault information to the terminal monitoring personnel.

[0030] The communication transmission module includes a serial communication unit and an Ethernet communication unit;

[0031] Both the serial communication unit and the Ethernet communication unit respectively send the fault occurrence and fault type messages to the terminal monitoring personnel through the serial link.

[0032] A self - testing method for a self - testing system applicable to an extremely high vacuum ion pump includes the following steps:

[0033] 1) The power supply main control module is initialized. The information processing module first performs an initialization detection to detect the status between modules. If no fault occurs in each module, step 2) is executed; if a fault occurs in a certain module, step 5) is executed;

[0034] 2) Send a control instruction to the ion pump power supply body through the power supply main control module to provide high voltage for the ion pump so that the connected ion pump can work normally; and store the operation event information when the power supply main control module controls the normal operation of the ion pump power supply into the data storage module;

[0035] 3) The status measurement module obtains the measurement data of the ion pump power supply body and stores it in the data storage module;

[0036] 4) The information processing module calls and analyzes the measurement data in the data storage module to determine whether a fault has occurred in the ion pump power supply body. If a fault occurs, step 5) is executed;

[0037] On the contrary, if no fault occurs in the ion pump power supply body, steps 3) to 4) are cyclically executed until the ion pump power supply body stops power supply and the ion pump stops working;

[0038] 5) Start the alarm unit. The alarm unit displays the fault information generated by the information processing module, and sounds an alarm to remind nearby personnel that a fault has occurred in the ion pump power supply body. At the same time, the fault information is transmitted to the terminal monitoring personnel.

[0039] The information processing module calls and analyzes the measurement data in the data storage module to determine whether a fault has occurred in the ion pump power supply body. Specifically:

[0040] (1) If the main board temperature of the ion pump power supply body is detected to be higher than the preset value and the duration is higher than the preset value, it is determined that the fault is overheating of the main board;

[0041] (2) If the detected current is higher than the preset value and the duration is higher than the preset value, it is determined that the fault is overcurrent of the channel;

[0042] (3) If the detected voltage is lower than the preset value and the duration is higher than the preset value, it is determined that the fault is undervoltage of the channel;

[0043] (4) Combine the voltage, current, and temperature conditions and compare them with multiple groups of preset values to determine the specific fault type.

[0044] The information processing module first performs an initialization detection to detect the status between modules, specifically:

[0045] The information processing module regularly accesses each module through bus communication. Each module returns status information. If status information is not returned after multiple accesses, or the returned status information is compared with the preset value by the information processing module and is inconsistent, it is determined that the module has a fault.

[0046] The present invention has the following beneficial effects and advantages:

[0047] 1. The present invention can perform self-check during the power-on initialization of the ion pump power supply, avoiding the discovery of existing faults only during actual use, facilitating personnel maintenance, and reducing losses.

[0048] 2. The present invention can perform real-time detection during the operation of the ion pump power supply and remotely notify, facilitating personnel to discover and repair in a timely manner, reducing losses. It avoids the need for inspection personnel to arrive at the scene to discover when encountering sudden faults.

[0049] 3. The present invention can analyze the cause of the fault based on the measured data information and operation event information, facilitating the maintenance of technical personnel and improving the maintenance efficiency;

[0050] 4. The present invention realizes the function of exporting data information and fault information files, facilitating R & D personnel to analyze, find design defects, and continuously improve product reliability;

[0051] 5. The self-check system of the ion pump power supply of the present invention can automatically detect faults occurring during operation and analyze the cause of the faults, improving the current situation where the existing ion pump power supply can only rely on inspection personnel to discover faults and technical personnel to analyze the cause of the faults. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] Figure 1 is a schematic diagram of the overall structure of the present invention;

[0053] Figure 2 It is the overall principle block diagram of the present invention;

[0054] Figure 3 It is the working principle block diagram among the modules of the present invention;

[0055] Figure 4 It is the flowchart of the self-checking method of the present invention. Specific embodiments

[0056] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0057] As Figures 1 to 2 shown, it is the overall structure schematic diagram of the present invention. A self-checking system applicable to an extremely high vacuum ion pump of the present invention is characterized by comprising: an ion pump power supply body, a power supply main control module, a state measurement module, a data storage module, a data export module, an information processing module, and an alarm unit;

[0058] The ion pump power supply body is respectively connected to the ion pump, the power supply main control module, and the state detection module, and is used to receive the control instruction of the power supply main control module, provide high voltage for the ion pump, and enable the connected ion pump to work normally;

[0059] The state measurement module is connected to the ion pump power supply body, and is used to measure the measurement data including the output voltage, output current, and internal temperature of the power supply of the ion pump power supply body, and store it in the data storage module;

[0060] The data storage module is used to receive and store the measurement data from the state measurement module, the operation event information of the power supply main control module, and the fault information generated by the information processing module;

[0061] The data export module is used to export the measurement data, operation event information, and fault information in the data storage module in the form of a file through USB;

[0062] The information processing module is used to detect the information transmission between the modules, judge whether each module is working normally, analyze the data in the data storage module, judge whether the ion pump power supply body has a fault, and if a fault occurs, start the alarm unit and store the fault information in the data storage module;

[0063] The alarm unit is used to display the fault information generated by the information processing module, and give a sound alarm to remind the nearby personnel that the ion pump power supply body has a fault. At the same time, it transmits the fault information to the terminal monitoring personnel.

[0064] As Figure 3 shown, it is the working principle block diagram among the modules of the present invention;

[0065] Among them, the status measurement module includes: a voltage measurement unit, a current measurement unit, and a temperature measurement unit that are respectively connected to the ion pump power supply body;

[0066] The voltage measurement unit is used to measure the output voltage of the ion pump power supply body;

[0067] The current measurement unit is used to measure the output current of the ion pump power supply body;

[0068] The temperature measurement unit is used to measure the internal temperature of the ion pump power supply body.

[0069] As Figure 3 shown, the data storage module includes: a measurement data unit, an operation information unit, and a fault information unit;

[0070] The measurement data unit is connected to the status measurement module and is used to receive and store the data generated by the status measurement module;

[0071] The operation information unit is connected to the power supply main control module and is used to store the operation event information during the normal operation of the ion pump power supply controlled by the power supply main control module;

[0072] The fault information unit is connected to the information processing module and is used to store the fault information generated by the information processing module.

[0073] As Figure 3 shown, the data export module includes: a file system unit and a USB connection interface;

[0074] The file system unit is used to establish a FAT32 file system to convert the data information in the data storage module into a file format that can be viewed by a computer;

[0075] The USB connection unit is connected to a USB flash drive to write the data information in the data storage module into the USB flash drive. The information processing module includes: a fault analysis unit interconnected with a fault judgment unit;

[0076] The fault judgment unit is used to judge whether the current ion pump power supply body has a fault according to the current data in the measurement data unit and the operation event information in the operation information unit. If a fault occurs, the alarm unit is started;

[0077] The fault analysis unit is used to analyze the cause of the fault according to the historical data in the measurement data unit and the operation event information in the operation information unit, obtain the fault information, and store the fault information in the data storage module.

[0078] As Figure 3 shown, the alarm unit includes: an information display module, a buzzer alarm module, and a communication transmission module that are respectively connected to the information processing module;

[0079] An information display module for displaying the fault information generated by the information processing module;

[0080] A buzzer alarm module for buzzing to alert nearby personnel that a fault has occurred in the ion pump power supply body;

[0081] A communication transmission module for transmitting the fault information to the terminal monitoring personnel.

[0082] The communication transmission module includes: a serial communication unit and an Ethernet communication unit;

[0083] Both the serial communication unit and the Ethernet communication unit respectively send the fault occurrence and fault type messages to the terminal monitoring personnel through the serial link.

[0084] As Figure 4 shown in the flowchart of the self-checking method of the present invention, a self-checking method of a self-checking system for an extremely high vacuum ion pump according to the present invention is characterized by including the following steps:

[0085] 1) Initialize the power supply main control module. After the ion pump power supply is powered on, it will first detect the power supply main control module, status measurement module, data storage module, data export module, information display, and communication transmission module inside the ion pump power supply;

[0086] The information processing module first performs an initialization detection to detect the status between each module. Specifically:

[0087] The information processing module regularly accesses each module through the bus communication method, and each module returns the status information. If the status information is not returned after multiple accesses, or the returned status information is compared with the preset value by the information processing module and is inconsistent, it is determined that the module has a fault.

[0088] The information processing module analyzes the information of each module. If it is found that these modules have a fault, it calls the alarm module to emit an alarm sound, then processes it through the information processing module, stores the fault information through the data storage module, then calls the information display module to display the detailed information, and calls the communication transmission module to notify the user;

[0089] 2) Send a control instruction to the ion pump power supply body through the power supply main control module to provide high voltage for the ion pump so that the connected ion pump can work normally; and store the operation event information when the power supply main control module controls the normal operation of the ion pump power supply into the data storage module;

[0090] 3) The status measurement module obtains the measurement data of the ion pump power supply body and stores it in the data storage module;

[0091] 4) The information processing module calls and analyzes the measurement data in the data storage module to determine whether a fault has occurred in the ion pump power supply body. If a fault has occurred, step 5) is executed;

[0092] Conversely, if no fault has occurred in the ion pump power supply body, steps 3) to 4) are repeatedly executed until the ion pump power supply body stops power supply and the ion pump stops working;

[0093] 5) The alarm unit is started. The alarm unit displays the fault information generated by the information processing module and gives an audible alarm to alert nearby personnel that a fault has occurred in the ion pump power supply body. At the same time, the fault information is transmitted to the terminal monitoring personnel.

[0094] The information processing module calls and analyzes the measurement data in the data storage module to determine whether a fault has occurred in the ion pump power supply body. Specifically:

[0095] (1) If it is detected that the main board temperature of the ion pump power supply body is higher than the preset value and the duration is longer than the preset value, the fault is determined to be overheating of the main board;

[0096] (2) If it is detected that the current is higher than the preset value and the duration is longer than the preset value, the fault is determined to be overcurrent in the channel;

[0097] (3) If it is detected that the voltage is lower than the preset value and the duration is longer than the preset value, the fault is determined to be undervoltage in the channel;

[0098] (4) The voltage, current, and temperature conditions are combined and compared with multiple groups of preset values to determine the specific fault type.

[0099] Embodiment 1:

[0100] After the ion pump power supply is powered on, it will first detect the power supply main control module, status measurement module, data storage module, data export module, information display, and communication transmission module in the ion pump power supply. The information processing module analyzes the information of each module. If it is found that a fault has occurred in these modules, the alarm module is called to emit an alarm sound, and then processed by the information processing module. The fault information is stored through the data storage module, and then the information display module is called to display the detailed information, and the communication transmission module is called to notify the user. If the initialization detection is passed, when the ion pump power supply is working, it will analyze the sensor data information in the data storage module in real time, and judge whether a fault has occurred in combination with the operation event information. If a fault has occurred, the information display module, buzzer alarm module, and communication transmission module are started. Then, through the historical data in the measurement data unit and the functions executed by the operation information unit, the cause of the fault is analyzed, and the fault information is stored in the data storage module.

[0101] The present invention can perform real-time detection during the operation of the ion pump power supply and give remote notifications, facilitating early detection by personnel and timely maintenance to reduce losses. It avoids the situation where it is necessary for inspection personnel to arrive at the scene to discover problems when sudden failures occur.

[0102] In summary, the self-checking system of the ion pump power supply of the present invention can automatically detect faults occurring during operation and analyze the causes of the faults, improving the current situation where existing ion pump power supplies can only rely on inspection personnel to discover faults and technical personnel to analyze the causes of the faults.

[0103] The above are only the embodiments of the present invention and are not intended to limit the protection scope of the present invention. Any modifications, equivalent replacements, improvements, expansions, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.

Claims

1. A self-check system applicable to an extremely high vacuum ion pump, characterized in that, it includes: an ion pump power supply body, a power supply main control module, a status measurement module, a data storage module, a data export module, an information processing module, and an alarm unit; The ion pump power supply body is respectively connected to the ion pump, the power supply main control module, and the status detection module, and is used to receive the control instructions of the power supply main control module, provide high voltage for the ion pump, and enable the connected ion pump to work normally; The status measurement module is connected to the ion pump power supply body, and is used to measure the measurement data including the output voltage, output current, and internal temperature of the power supply of the ion pump power supply body, and store it in the data storage module; The data storage module is used to receive and store the measurement data from the status measurement module, the operation event information of the power supply main control module, and the fault information generated by the information processing module; The data export module is used to export the measurement data, operation event information, and fault information in the data storage module in the form of files through USB; The information processing module is used to detect the information transmission between modules, judge whether each module is working properly, analyze the data in the data storage module, judge whether the ion pump power supply body has a fault, and if a fault occurs, start the alarm unit and store the fault information in the data storage module; The alarm unit is used to display the fault information generated by the information processing module, and give a sound alarm to remind the nearby personnel that the ion pump power supply body has a fault. At the same time, it transmits the fault information to the terminal monitoring personnel.

2. A self-check system applicable to an extremely high vacuum ion pump according to claim 1, characterized in that, the status measurement module includes: a voltage measurement unit, a current measurement unit, and a temperature measurement unit respectively connected to the ion pump power supply body; The voltage measurement unit is used to measure the output voltage of the ion pump power supply body; The current measurement unit is used to measure the output current of the ion pump power supply body; The temperature measurement unit is used to measure the internal temperature of the ion pump power supply body.

3. A self-check system applicable to an extremely high vacuum ion pump according to claim 1, characterized in that, the data storage module includes: a measurement data unit, an operation information unit, and a fault information unit; The measurement data unit is connected to the status measurement module and is used to receive and store the data generated by the status measurement module; The operation information unit is connected to the power supply main control module and is used to store the operation event information when the power supply main control module controls the normal operation of the ion pump power supply; The fault information unit is connected to the information processing module and is used to store the fault information generated by the information processing module.

4. A self-check system applicable to an extremely high vacuum ion pump according to claim 1, characterized in that, the data export module includes: a file system unit and a USB connection interface; The file system unit is used to establish a FAT32 file system to convert the data information in the data storage module into a file format that can be viewed by a computer; The USB connection unit is connected to a USB flash drive to write the data information in the data storage module into the USB flash drive.

5. A self-check system applicable to an extremely high vacuum ion pump according to claim 1, characterized in that, The information processing module includes: a fault analysis unit connected to a fault judgment unit; The fault judgment unit is configured to determine whether a current ion pump power supply body has a fault according to the current data in the measurement data unit and the operation event information in the operation information unit. If a fault occurs, the alarm unit is started; The fault analysis unit is configured to analyze the cause of the fault according to the historical data in the measurement data unit and the operation event information in the operation information unit, obtain fault information, and store the fault information in the data storage module.

6. The self-checking system for an extremely high vacuum ion pump according to claim 1, characterized in that The alarm unit includes: an information display module, a buzzer alarm module, and a communication transmission module respectively connected to the information processing module; The information display module is configured to display the fault information generated by the information processing module; The buzzer alarm module is configured to buzzer to remind nearby personnel that a fault has occurred in the ion pump power supply body; The communication transmission module is configured to transmit the fault information to the terminal monitoring personnel.

7. The self-checking system for an extremely high vacuum ion pump according to claim 6, characterized in that The communication transmission module includes: a serial communication unit and an Ethernet communication unit; Both the serial communication unit and the Ethernet communication unit respectively send the fault occurrence and fault type messages to the terminal monitoring personnel through a serial link.

8. The self-checking method of the self-checking system for an extremely high vacuum ion pump according to claim 1, characterized in that It includes the following steps: 1) The power supply main control module is initialized. The information processing module first performs an initialization detection to detect the status between each module. If no fault occurs in each module, step 2) is executed. If a fault occurs in a certain module, step 5) is executed; 2) Send a control instruction to the ion pump power supply body through the power supply main control module to provide high voltage for the ion pump so that the connected ion pump can work normally; and store the operation event information when the power supply main control module controls the normal operation of the ion pump power supply in the data storage module; 3) The status measurement module acquires the measurement data of the ion pump power supply body and stores it in the data storage module; 4) The information processing module calls and analyzes the measurement data in the data storage module to determine whether a fault has occurred in the ion pump power supply body. If a fault occurs, step 5) is executed; On the contrary, if no fault occurs in the ion pump power supply body, steps 3) to 4) are cyclically executed until the ion pump power supply body stops power supply and the ion pump stops working; 5) Start the alarm unit. The alarm unit displays the fault information generated by the information processing module and sounds an alarm to remind nearby personnel that a fault has occurred in the ion pump power supply body. At the same time, the fault information is transmitted to the terminal monitoring personnel.

9. The self-checking method of the self-checking system for an extremely high vacuum ion pump according to claim 8, characterized in that When the information processing module calls and analyzes the measurement data in the data storage module to determine whether a fault has occurred in the ion pump power supply body, specifically: (1) If it is detected that the main board temperature of the ion pump power supply body is higher than the preset value and the duration is higher than the preset value, it is determined that the fault is overheating of the main board; (2) If the detected current is higher than the preset value and the duration is higher than the preset value, then it is determined that the fault is overcurrent in the channel; (3) If the detected voltage is lower than the preset value and the duration is higher than the preset value, then it is determined that the fault is undervoltage in the channel; (4) Combine the voltage, current, and temperature conditions and compare them with multiple groups of preset values together to determine the specific fault type.

10. The self-checking method of a self-checking system applicable to an extremely high vacuum ion pump according to claim 8, characterized in that the information processing module first performs initialization detection, specifically: The information processing module regularly accesses each module through bus communication. Each module returns status information. If the status information is not returned after multiple accesses, or the returned status information is compared by the information processing module with the preset value and is inconsistent, then it is determined that the module has a fault.

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