Substrate conveying device and semiconductor manufacturing equipment

Abstract

The present application provides a substrate conveying device and semiconductor manufacturing equipment, wherein the substrate conveying device includes: a central fixed shaft; a first conveying roller, including a first fixing member and a first rolling member, wherein the first fixing member is fixed to the central fixed shaft, and the first rolling member is sleeved on the periphery of the first fixing member and can rotate around the central fixed shaft; the first rolling member includes a plurality of first through holes; an exhaust channel, including a first exhaust pipe, wherein the first exhaust pipe is located in the first fixing member, and the first exhaust pipe includes a first air inlet port arranged in the direction of the plane where the substrate is located, and one of the first through holes of the first rolling member is connected to the first air inlet port. The substrate conveying device provided in the present application avoids damage to the surface of the substrate by mechanical stress through adsorption transmission, thereby solving problems such as substrate breakage and film peeling caused by mechanical pressure.

Description

Technical Field

[0001] The present application relates to the technical field of cleaning equipment, and in particular to a substrate conveying device and semiconductor manufacturing equipment. Background Art

[0002] In the display industry, glass substrates undergo various processes during wet etching, photolithography, and cleaning. For example, existing wet processing methods typically utilize rollers arranged sequentially on a conveyor belt to carry glass substrates and transport them between process steps. However, during transport, the substrates can be crushed by the upper rollers, resulting in product breakage or damage to the surface coating. Summary of the Invention

[0003] In view of this, the purpose of this application is to propose a substrate conveying device and semiconductor manufacturing equipment, which solves the problems of damage and film peeling caused by mechanical pressure through adsorption conveying, while improving conveying stability.

[0004] Based on the above objectives, the present application provides a substrate conveying device, which includes:

[0005] Central fixed axis;

[0006] The first conveying roller includes a first fixing member and a first rolling member, wherein the first fixing member is fixed to the central fixed shaft, the first rolling member is sleeved on the periphery of the first fixing member, and the first rolling member is rotatable around the central fixed shaft; the first rolling member includes a plurality of first through holes;

[0007] The exhaust channel includes a first exhaust pipe, which is located in the first fixing member. The first exhaust pipe includes a first air inlet pipe opening arranged toward the plane where the substrate is located, and one of the first through holes of the first rolling member is connected to the first air inlet pipe opening.

[0008] Optionally, the substrate conveying device further includes:

[0009] The second conveying roller includes a second fixing member and a second rolling member, wherein the second fixing member is fixed to the central fixed shaft, the second rolling member is sleeved on the periphery of the second fixing member, and the second rolling member is rotatable around the central fixed shaft; the second rolling member includes a plurality of second through holes;

[0010] In which, the second conveying roller and the first conveying roller are arranged at an axial interval along the central fixed axis, the exhaust channel includes a second exhaust pipe, the second exhaust pipe is located in the second fixing member, the second exhaust pipe includes a second air inlet pipe port arranged toward the plane where the substrate is located, and one of the second through holes of the second rolling member is connected to the second air inlet pipe port.

[0011] Optionally, the air extraction channel includes a central pipeline, and the central pipeline is located in the central fixed shaft;

[0012] The first air extraction pipeline includes a first connecting pipe opening arranged opposite to the first air inlet pipe opening, and the first connecting pipe opening is connected to the central pipe;

[0013] The second air extraction pipeline includes a second connecting pipe opening arranged opposite to the second air inlet pipe opening, and the second connecting pipe opening is communicated with the central pipeline.

[0014] Optionally, the first conveying roller includes a first bearing, the first bearing is located between the first fixing member and the first rolling member, and there is a gap between the first fixing member and the first rolling member.

[0015] Optionally, the plurality of first through holes are evenly distributed along the circumference of the first rolling element.

[0016] Optionally, the first rolling member includes a first support portion and first sidewall portions located on both sides of the first support portion, the first support portion covers the outer circumferential surface of the first fixing member, and the first sidewall portions cover the sidewall surface of the first fixing member.

[0017] Optionally, the second conveying roller includes a second bearing, the second bearing is located between the second fixing member and the second rolling member, and there is a gap between the second fixing member and the second rolling member.

[0018] Optionally, the plurality of second through holes are evenly distributed along the circumference of the second rolling element.

[0019] Optionally, the second rolling member includes a second supporting portion and second sidewall portions located on both sides of the second supporting portion, the second supporting portion covers the outer circumferential surface of the second fixing member, and the second sidewall portions cover the sidewall surface of the second fixing member.

[0020] Optionally, the substrate conveying device further includes:

[0021] The rotation drive assembly includes a driving member, a first transmission member and a second transmission member. The output end of the driving member is connected to the first rolling member through the first transmission member; the second rolling member is connected to the first rolling member through the second transmission member, so that the second rolling member rotates synchronously with the first rolling member.

[0022] Optionally, the substrate conveying device further includes:

[0023] A vacuum pumping device is connected to the central pipeline.

[0024] Optionally, the substrate conveying device includes a plurality of parallel central fixed shafts.

[0025] Optionally, a plurality of the first conveying rollers and a plurality of the second conveying rollers are provided on the same central fixed shaft;

[0026] On the same central fixed shaft, the first air extraction pipeline in each of the first conveying rollers and the second air extraction pipeline in each of the second conveying rollers are communicated with the same central pipeline.

[0027] Based on the same inventive concept, the present application also provides a substrate conveying device for carrying and conveying a substrate; the substrate conveying device comprises:

[0028] Central fixed axis;

[0029] The first conveying roller includes a first fixing member and a first rolling member, wherein the first fixing member is fixed to the central fixed shaft, the first rolling member is sleeved on the periphery of the first fixing member, and the first rolling member is rotatable around the central fixed shaft; the first rolling member includes a plurality of first through holes;

[0030] The second conveying roller includes a second fixing member and a second rolling member, wherein the second fixing member is fixed to the central fixed shaft, the second rolling member is sleeved on the periphery of the second fixing member, and the second rolling member is rotatable around the central fixed shaft; the second rolling member includes a plurality of second through holes;

[0031] The exhaust channel includes a first exhaust pipeline, a second exhaust pipeline and a central pipeline, the central pipeline is located in the central fixed axis, the first exhaust pipeline is located in the first fixing member and is connected to at least one first through hole; the second exhaust pipeline is located in the second fixing member and is connected to at least one second through hole; the first exhaust pipeline and the second exhaust pipeline are respectively connected to the central pipeline; the first exhaust pipeline and the second exhaust pipeline both extend in a direction perpendicular to the direction of the substrate.

[0032] Based on the same inventive concept, the present application also provides a semiconductor manufacturing equipment, including any of the substrate conveying devices described above.

[0033] The substrate conveying device provided in the present application is connected to the exhaust channel through the first through hole of the first rolling element, and can form an adsorption area on the surface of the first rolling element, so as to use negative pressure to stably adsorb the substrate on the surface of the first rolling element, replacing the traditional mechanical clamping or pressure contact method, avoiding damage to the substrate surface caused by mechanical stress, and solving problems such as substrate breakage and film peeling caused by mechanical pressure. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the technical solutions in this application or related technologies, the following briefly introduces the drawings required for use in the embodiments or related technical descriptions. Obviously, the drawings described below are merely embodiments of this application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0035] Figure 1 It is a structural schematic diagram of a related substrate conveying device;

[0036] Figure 2 A schematic structural diagram of a substrate conveying device provided in one embodiment of the present application;

[0037] Figure 3 A schematic diagram of the internal structure of a substrate conveying device provided in one embodiment of the present application;

[0038] Figure 4 A schematic diagram of the internal structure of a substrate conveying device provided in another embodiment of the present application;

[0039] Figure 5 for Figure 4 Cross-sectional view along AA direction;

[0040] Figure 6 A schematic structural diagram of a substrate conveying device provided in yet another embodiment of the present application;

[0041] Figure 7 A schematic diagram of the internal structure of a substrate conveying device provided in another embodiment of the present application;

[0042] Figure 8 A schematic structural diagram of a substrate conveying device in a working state provided in yet another embodiment of the present application;

[0043] Figure 9 A top view of a substrate conveying device in operation according to an embodiment of the present application;

[0044] Figure 10A schematic diagram of the partial structure of a display panel manufactured by the semiconductor manufacturing equipment provided in an embodiment of the present application.

[0045] Marking Description:

[0046] 100. Substrate conveying device; 1. Central fixed shaft; 2. First conveyor roller; 21. First fixing member; 22. First rolling member; 220. First through-hole; 221. First support portion; 222. First sidewall portion; 23. First bearing; 3. Second conveyor roller; 31. Second fixing member; 32. Second rolling member; 320. Second through-hole; 321. Second support portion; 322. Second sidewall portion; 33. Second bearing; 4. Exhaust channel; 40. Central pipeline; 41. First exhaust pipeline; 411. First air inlet port; 412. First connecting pipe port; 42. Second exhaust pipe; 421. Second air inlet pipe port; 422. Second connecting pipe port; 5. Rotation drive assembly; 50. Drive member; 51. First transmission member; 52. Second transmission member; 6. Vacuum pumping device; 7. Substrate; 71. Light-emitting unit; 711. Anode layer; 712. Light-emitting functional layer; 713. Cathode layer; 72. Pixel definition layer; 720. Pixel opening; 73. Isolation structure; 730. Isolation opening; 731. Support portion; 732. Shielding portion; 74. Packaging unit. DETAILED DESCRIPTION

[0047] In order to make the objectives, technical solutions and advantages of this application more clear, this application is further described in detail below in combination with specific embodiments and with reference to the accompanying drawings.

[0048] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present application should have the usual meanings understood by people with ordinary skills in the field to which this application belongs. The "first", "second" and similar words used in the embodiments of the present application do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0049] During the semiconductor manufacturing process, etching deposited films on substrates often requires wet cleaning. For example, substrates may be cleaned using high-pressure water washes, air knives, or liquid knife units. To prevent the substrate from floating or shifting under the impact of high-pressure fluids, a double roller mechanical fixation solution is often used.

[0050] Figure 1 FIG. 1 is a structural diagram of a related substrate conveying device. Figure 1 As shown, in the related art, conveying rollers are respectively provided on the upper and lower sides of the substrate 7 , and the conveying rollers on both sides contact the upper and lower surfaces of the substrate 7 , thereby realizing the conveyance of the substrate 7 .

[0051] The inventors of this application have discovered that the related art, which utilizes a dual roller arrangement positioned vertically, presents the following issues: the upper conveyor roller directly presses against the substrate surface. If the substrate contains a brittle film (such as an ITO film), the pressure can easily cause peeling of the film, resulting in fragments contaminating the process environment and reducing yield. The dual rollers are mechanically fixed, and if the gap between the two rollers decreases due to vibration or installation errors, the substrate may fracture under pressure. Mechanical fixing makes it difficult to completely suppress the subtle vibrations of the substrate under high-speed conveyance or high-pressure impact, affecting process accuracy.

[0052] Based on this, the present application provides a substrate conveying device and semiconductor manufacturing equipment to solve the above problems.

[0053] Figure 2 This is a structural diagram of a substrate conveying device provided in one embodiment of the present application. Figure 3 This is a schematic diagram of the internal structure of a substrate conveying device provided in one embodiment of the present application. Figure 2 、 Figure 3 As shown, an embodiment of the present application provides a substrate conveying device, wherein the substrate conveying device 100 is used to carry and convey a substrate 7. The substrate conveying device 100 includes a central fixed shaft 1, a first conveying roller 2, and an exhaust channel 4. The first conveying roller 2 includes a first fixing member 21 and a first rolling member 22. The first fixing member 21 is fixed to the central fixed shaft 1, and the first rolling member 22 is sleeved on the periphery of the first fixing member 21, and the first rolling member 22 can rotate around the central fixed shaft 1; the first rolling member 22 includes a plurality of first through holes 220. The exhaust channel 4 includes a first exhaust pipe 41, which is located in the first fixing member 21. The first exhaust pipe 41 includes a first air inlet port 411 arranged in the direction of the plane where the substrate 7 is located. One of the first through holes 220 on the first rolling member 22 is connected to the first air inlet port 411.

[0054] For example, relative to the conveying roller on the central fixed axis 1, the direction of the plane where the substrate 7 is located is upward, then the first air inlet pipe port 411 is located at the upper end of the first air exhaust pipe 41, and the first through hole 220 currently connected to the first air inlet pipe port 411 contacts the passing substrate 7, and after the exhaust operation, an adsorption area is formed on the surface of the conveying roller.

[0055] Specifically, the first fixing member 21 is fixedly connected to the central fixed shaft 1. For example, the first fixing member 21 and the central fixed shaft 1 can be integrally formed or welded. Alternatively, for ease of installation, the first fixing member 21 and the central fixed shaft 1 are detachably fixedly connected. The first rolling member 22 is mounted on the periphery of the first fixing member 21 in a sleeve manner and can rotate around the central fixed shaft 1. A plurality of first through holes 220 are provided on the surface of the first rolling member 22, and the first exhaust pipe 41 of the exhaust channel 4 is provided in the first fixing member 21 and is connected to a first through hole 220 above. When the exhaust channel 4 is started, the vacuum adsorption force acts on the substrate 7 through the first through hole 220 connected to the first air inlet port 411, and the substrate 7 is adsorbed on the surface of the first rolling member 22, thereby achieving stable transmission.

[0056] The substrate conveying device 100 of the embodiment of the present application is connected to the exhaust channel 4 through the first through hole 220 of the first rolling member 22 that is currently in contact with the substrate 7. A vacuum adsorption point can be formed at the position of the first through hole 220, thereby using negative pressure to stably adsorb the substrate 7 on the surface of the first rolling member 22, replacing the traditional mechanical clamping or pressure contact method, avoiding damage to the substrate surface caused by mechanical stress, and solving problems such as substrate breakage and film peeling caused by mechanical pressure. Among them, the first rolling member 22 can rotate around the central fixed axis 1, so that the substrate 7 rolls forward with the roller during the conveying process, reducing sliding friction and reducing the risk of scratches on the substrate surface. The nested design of the first fixing member 21 and the first rolling member 22, combined with the built-in exhaust channel 4, realizes the integration of support and adsorption functions, simplifies the device structure, and facilitates installation and maintenance.

[0057] Figure 4 A schematic diagram of the internal structure of a substrate conveying device provided in another embodiment of the present application; Figure 5 for Figure 4 Cross-sectional view along AA direction. Figure 4 、 Figure 5 As shown, in some embodiments, the first conveying roller 2 includes a first bearing 23 . The first bearing 23 is located between the first fixing member 21 and the first rolling member 22 . There is a gap between the first fixing member 21 and the first rolling member 22 .

[0058] Specifically, a first bearing 23 is provided in the first conveyor roller 2, located between the first fixed member 21 and the first rolling member 22. A gap (not shown) is provided between the first fixed member 21 and the first rolling member 22 to prevent them from interfering with their relative rotation. The first bearing 23 reduces friction between the first rolling member 22 and the first fixed member 21, allowing the first rolling member 22 to rotate more smoothly while avoiding vibration caused by mechanical contact. The bearing support allows the first rolling member to rotate freely, reducing mechanical friction between the rolling member and the fixed member, minimizing power loss, and extending the life of the device. The gap design allows the rolling member to float radially or axially within a small range, accommodating positional deviations or vibrations during substrate conveyance, avoiding stress concentration caused by rigid connections, and reducing the risk of substrate damage due to stagnation or excessive resistance.

[0059] In some embodiments, the plurality of first through holes 220 are evenly distributed along the circumference of the first rolling element 22 .

[0060] Specifically, the first through-holes 220 form uniformly distributed suction points on the first rolling element 22, ensuring balanced force on the substrate surface. The circumferentially uniform through-hole layout ensures symmetrical distribution of vacuum suction across the rolling element surface, avoiding localized overly strong or weak suction, and preventing deformation (e.g., bending, wrinkling) or slippage of the substrate due to uneven suction. The uniform suction points ensure a secure fit between the substrate and the rolling element surface, particularly during high-speed transport, reducing the impact of air entrapment or airflow disturbances on suction, thereby improving suction reliability.

[0061] In some embodiments, the first rolling member 22 includes a first support portion 221 and first sidewall portions 222 located on both sides of the first support portion 221 . The first support portion 221 covers the outer peripheral surface of the first fixing member 21 , and the first sidewall portion 222 covers the sidewall surface of the first fixing member 21 .

[0062] Specifically, the first rolling element 22 includes a first support portion 221 and first side wall portions 222 on both sides. The support portion covers the outer peripheral surface of the fixed element, and the side wall portion covers the side wall surface of the fixed element, forming a wrapping structure for the fixed element, thereby enhancing the structural strength of the roller and preventing external impurities from entering the bearing area. The support portion and the side wall portion form a complete covering structure, which increases the effective contact area between the rolling element and the substrate, improves the range of action of the adsorption force, and especially provides additional support for the substrate in the edge area to prevent the edge from warping or detaching from adsorption. The side wall surface covering the fixed element can prevent impurities such as dust and liquid from entering the gap between the fixed element and the rolling element, protect the internal bearings and exhaust pipes, reduce the maintenance frequency, and adapt to complex working conditions such as wet cleaning and coating.

[0063] Figure 6 A schematic structural diagram of a substrate conveying device provided in yet another embodiment of the present application; Figure 7A schematic diagram of the internal structure of a substrate conveying device provided in another embodiment of the present application; Figure 8 This is a structural schematic diagram of a substrate conveying device in working state provided in yet another embodiment of the present application.

[0064] like Figure 6 、 Figure 7 、 Figure 8 As shown, in some other embodiments, in some embodiments, the substrate conveying device 100 further includes a second conveying roller 3, including a second fixing member 31 and a second rolling member 32. The second fixing member 31 is fixed to the central fixed shaft 1, and the second rolling member 32 is sleeved on the periphery of the second fixing member 31 and can rotate around the central fixed shaft 1; the second rolling member 32 includes a plurality of second through holes 320. The second conveying roller 3 and the first conveying roller 2 are arranged axially with respect to the central fixed shaft 1, and the exhaust channel 4 includes a second exhaust pipe 42. The second exhaust pipe 42 is located in the second fixing member 31. The second exhaust pipe 42 includes a second air inlet port 421 arranged in the direction of the plane where the substrate 7 is located. One of the second through holes 320 on the second rolling member 32 is connected to the second air inlet port 421.

[0065] For example, relative to the conveying roller on the central fixed axis 1, the direction of the plane where the substrate 7 is located is upward, then the second air inlet pipe port 421 is located at the upper end of the second exhaust pipe 42, and the second through hole 320 currently connected to the second air inlet pipe port 421 contacts the passing substrate 7.

[0066] Specifically, the structure of the second conveyor roller 3 is substantially identical to that of the first conveyor roller 2. A second fixing member 31 is secured to the central fixed shaft 1, and a second rolling member 32 is sleeved around the periphery of the second fixing member 31 and provided with a second through-hole 320. A second exhaust line 42 is embedded within the second fixing member 31 and communicates with the second through-hole 320. The first and second conveyor rollers are axially spaced apart along the central fixed shaft 1. The central line 40 of the exhaust channel 4 is located at the center of the central fixed shaft 1 and communicates with the corresponding through-holes on the two rollers via a first connecting pipe opening 412 and a second connecting pipe opening 422, respectively. The multiple rollers are distributed axially, creating multiple suction points. This is particularly suitable for large substrates, preventing mid-section sagging or vibration caused by the weight of the substrate or external loads (such as high-pressure water washing or air knife purging) when supported by a single roller, thereby improving conveying stability. The multi-roller structure evenly distributes force on the substrate, offsetting lateral forces that may arise during conveying, preventing substrate shifting or tilting, and ensuring linear conveying accuracy. It should be noted that the number and spacing between the first conveying rollers 2 and the second conveying rollers 3 can be flexibly adjusted according to the size of the substrate and are not specifically limited.

[0067] Furthermore, the air extraction channel 4 includes a central pipeline 40, which is located within the central fixed shaft 1. The first air extraction pipeline 41 includes a first connecting pipe port 412 disposed opposite the first air inlet pipe port 411. The first air inlet pipe port 411 is configured to communicate with the first through hole 220, and the first connecting pipe port 412 is in communication with the central pipeline 40. The second air extraction pipeline 42 includes a second connecting pipe port 422 disposed opposite the second air inlet pipe port 421. The second air inlet pipe port 421 is configured to communicate with the second through hole 320, and the second connecting pipe port 422 is in communication with the central pipeline 40.

[0068] The central pipeline 40 is located inside the central fixed shaft 1, and the first exhaust pipeline 41 and the second exhaust pipeline 42 are connected to the central pipeline 40 through the first connecting pipe port 412 and the second connecting pipe port 422, respectively. The first air inlet port 411 and the second air inlet port 421 correspond to the first through hole 220 and the second through hole 320, respectively, forming a vacuum path from the central pipeline to the adsorption area. This design simplifies the pipeline layout and ensures uniform distribution of adsorption force. Through unified regulation by the central pipeline 40, the vacuum degree of each roller adsorption area is ensured to be consistent, avoiding uneven force on the substrate or adsorption failure due to local suction differences. It is particularly suitable for scenarios where multiple rollers work together.

[0069] like Figure 7 As shown, in some embodiments, the second transport roller 3 includes a second bearing 33, which is located between the second fixing member 31 and the second rolling member 32. A gap exists between the second fixing member 31 and the second rolling member 32. Similar to the first rolling member, the second rolling member is ensured to have low-friction rotation and adaptive adjustment capabilities, ensuring that the dual-roller system maintains consistent rotational flexibility and stress buffering, thereby avoiding deviations in substrate transport synchronization caused by single roller jamming.

[0070] In some embodiments, the plurality of second through holes 320 are evenly distributed along the circumference of the second rolling element 32. This ensures uniform adsorption of the second conveying roller 3, and cooperates with the first conveying roller 2 to form multi-point uniform adsorption, thereby ensuring the stability and position accuracy of the substrate 7 during the conveying process.

[0071] like Figure 7 As shown, in some embodiments, the second rolling member 32 includes a second support portion 321 and a second side wall portion 322 located on both sides of the second support portion 321, the second support portion 321 covers the outer peripheral surface of the second fixing member 31, and the second side wall portion 322 covers the side wall surface of the second fixing member 31.

[0072] The structure of the second transport roller 3 corresponds to that of the first transport roller 2, including a second bearing 33, evenly distributed second through holes 320, a second support portion 321, and a second sidewall portion 322. This ensures that the second transport roller 3 and the first transport roller 2 are functionally symmetrical and work in coordination.

[0073] like Figure 8 As shown, in some embodiments, the substrate conveying device 100 further includes a rotation drive assembly 5, which includes a driving member 50, a first transmission member 51, and a second transmission member 52. The output end of the driving member 50 is connected to the first rolling member 22 via the first transmission member 51. The second rolling member 32 is connected to the first rolling member 22 via the second transmission member 52, so that the second rolling member 32 rotates synchronously with the first rolling member 22. The driving member 50 drives the first rolling member 22 to rotate via the first transmission member 51, and simultaneously drives the second rolling member 32 to rotate synchronously via the second transmission member 52. The synchronous drive mechanism ensures that the substrate is subjected to uniform force during the conveying process, avoiding substrate distortion caused by differences in roller speed.

[0074] In some embodiments, the substrate conveyor 100 further includes a vacuum pump 6 connected to the central pipeline 40. The vacuum pump 6 is connected to the central pipeline and provides a vacuum source. This ensures a continuous, stable negative pressure in the central pipeline and the various exhaust lines. This ensures sufficient suction force, even during high-load or dynamic conveying, to prevent substrates from falling due to vacuum fluctuations. This system is adaptable to complex environments such as high-pressure water washing, high temperatures, and high dust levels. Stable vacuum suction offsets external interference forces (such as airflow and liquid impact), ensuring reliable substrate conveyance under harsh conditions.

[0075] Figure 9 This is a top view of a substrate conveying device in working state provided in one embodiment of the present application. Figure 9 As shown, in some embodiments, the substrate transport apparatus 100 includes multiple parallel central fixed shafts 1. This parallel shaft layout increases the number of rollers, forming a dense adsorption support array that accommodates the transport of large or extra-large substrates, distributing the substrate load and preventing deformation caused by excessive force at a single point. Specifically, the parallel shaft spacing between the central fixed shafts 1 is adjustable, allowing adjustments based on substrate width or equipment space to accommodate production lines of varying specifications.

[0076] In some embodiments, a plurality of first conveying rollers 2 and a plurality of second conveying rollers 3 are disposed on the same central fixed shaft 1. On the same central fixed shaft 1, a first exhaust pipe 41 in each first conveying roller 2 and a second exhaust pipe 42 in each second conveying roller 3 are connected to the same central pipe 40.

[0077] The multiple first transfer rollers 2 and multiple second transfer rollers 3 on each central fixed shaft 1 are connected via a common central pipeline 40, enabling unified control of vacuum suction. This ensures synchronized start / stop and adjustment of the suction force of each roller on the same shaft, preventing substrate drops or transport jams caused by localized suction failure. This modular design allows a single central fixed shaft 1 to function as a standalone unit, facilitating mass production and maintenance while reducing costs. Furthermore, the dense arrangement of multiple rollers enhances the support capacity of a single shaft, accommodating heavy loads or high-precision transport requirements.

[0078] Based on the same inventive concept, an embodiment of the present application also provides a substrate conveying device 100 for carrying and conveying a substrate 7. The substrate conveying device 100 includes a central fixed shaft 1, a first conveying roller 2, a second conveying roller 3, and an exhaust channel 4. The first conveying roller 2 includes a first fixing member 21 and a first rolling member 22. The first fixing member 21 is fixed to the central fixed shaft 1, and the first rolling member 22 is sleeved around the periphery of the first fixing member 21. The first rolling member 22 can rotate around the central fixed shaft 1; the first rolling member 22 includes a plurality of first through holes 220. The second conveying roller 3 includes a second fixing member 31 and a second rolling member 32. The second fixing member 31 is fixed to the central fixed shaft 1, and the second rolling member 32 is sleeved around the periphery of the second fixing member 31. The second rolling member 32 can rotate around the central fixed shaft 1; the second rolling member 32 includes a plurality of second through holes 320. The exhaust channel 4 includes a first exhaust pipeline 41, a second exhaust pipeline 42 and a central pipeline 40. The central pipeline 40 is located in the central fixed axis 1, the first exhaust pipeline 41 is located in the first fixing member 21, and the second exhaust pipeline 42 is located in the second fixing member 31. The first exhaust pipeline 41 and the second exhaust pipeline 42 are respectively connected to the central pipeline 40; the first exhaust pipeline 41 and the second exhaust pipeline 42 both extend in a direction perpendicular to the direction of the substrate 7.

[0079] Illustratively, the first exhaust pipe 41 is connected to one or more first through holes 220 corresponding to the position of its pipe mouth, and the second exhaust pipe 42 is connected to one or more second through holes 320 corresponding to the position of its pipe mouth. After the exhaust operation, downward suction can be provided when the substrate 7 passes over the first conveying roller 2 and the second conveying roller 3.

[0080] The substrate conveying device 100 of the present embodiment is connected to the exhaust channel 4 via the first through-hole 220 of the first roller 22 and the exhaust channel 4 via the second through-hole 320 of the second roller 32, thereby forming different vacuum adsorption areas. This utilizes negative pressure to stably adsorb the substrate 7 onto the surfaces of the first roller 22 and the second roller 32, replacing traditional mechanical clamping or pressure contact methods. This prevents mechanical stress from damaging the substrate surface and addresses issues such as breakage and film peeling caused by mechanical pressure on the substrate 7. The first and second exhaust lines 41, 42 extend perpendicular to the substrate 7, allowing the vacuum suction to act directly on the substrate 7 along the normal direction. This reduces lateral force components, prevents substrate 7 from shifting or warping due to tilted suction, and improves adsorption efficiency and stability. Furthermore, multi-point uniform adsorption is achieved, jointly ensuring the stability and positional accuracy of the substrate 7 during transport.

[0081] Based on the same inventive concept, an embodiment of the present application further provides a semiconductor manufacturing equipment, including the substrate conveying device 100 in any of the above embodiments.

[0082] Specifically, semiconductor manufacturing equipment is used to manufacture semiconductor devices, such as display panels. In some display panels, the functional film layers of adjacent light-emitting units can be separated by setting an isolation structure. In this way, in the evaporation process of the functional film layer, it is only necessary to perform evaporation on the entire surface of the display panel, without the need to use a metal mask to prepare the functional film layer of each light-emitting unit separately. This technology is a fine metal mask-free technology and does not need to consider the alignment accuracy during evaporation, so that the gap between the light-emitting units can be designed to be smaller. For example, referring to Figure 10 As shown, such a display panel generally includes a substrate 7, a pixel definition layer 72, an isolation structure 73, a plurality of light-emitting units 71, and a plurality of encapsulation units 74. The pixel definition layer 72 includes a plurality of pixel openings 720. The isolation structure 73 is located on the side of the pixel definition layer 72 away from the substrate 7. The isolation structure 73 includes a plurality of isolation openings 730. The pixel openings 720 are correspondingly connected to the isolation openings 730 for accommodating the light-emitting units 71. The isolation structure 73 includes a supporting portion 731 and a shielding portion 732. The shielding portion 732 is located on the side of the supporting portion 731 away from the substrate 7. The orthographic projection of the supporting portion 731 on the substrate 7 is located within the orthographic projection of the shielding portion 732 on the substrate 7. The encapsulation unit 74 is provided on the side of the light-emitting unit 71 away from the substrate 7. The encapsulation unit 74 extends from the inside of the pixel opening 720 along the sidewall of the isolation structure 73 to the side of the isolation structure 73 away from the substrate 7.

[0083] The substrate conveyor 100 provided in the embodiments of the present application can be applied to wet processing equipment for substrate manufacturing, including wet etching equipment, cleaning and stripping equipment, and the like. The substrate conveyor 100 can also be used to transport substrates in other semiconductor manufacturing equipment, using conveyor rollers to transport substrates so that film layers can be stacked on the substrates to manufacture corresponding semiconductor devices.

[0084] Furthermore, multiple conveyor rollers on the central fixed shaft 1 can simultaneously transport substrates, increasing the substrate transfer speed. On the production line, substrates can be quickly transferred from one process to another, reducing waiting time during the production process and improving overall production efficiency. Regarding transfer stability, the conveyor rollers absorb and support the substrate above, making the substrate transfer more stable and reducing the possibility of shaking and deviation.

[0085] While the present application has been described in conjunction with specific embodiments thereof, many alternatives, modifications and variations of these embodiments will be apparent to those skilled in the art in light of the foregoing description.

[0086] It should be noted that the above description is limited to some embodiments of the present application. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recited in the claims may be performed in an order different from that described in the above embodiments and still achieve the desired results. Furthermore, the processes depicted in the accompanying drawings do not necessarily require the specific order or sequential order shown to achieve the desired results. In certain embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0087] The embodiments of the present application are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the embodiments of the present application should be included in the scope of protection of this application.

Claims

1. A substrate conveying device for carrying and conveying a substrate; characterized in that: include: Central fixed axis; The first conveying roller includes a first fixing member and a first rolling member, wherein the first fixing member is fixed to the central fixed shaft, the first rolling member is sleeved on the periphery of the first fixing member, and the first rolling member is rotatable around the central fixed shaft; the first rolling member includes a plurality of first through holes; an air extraction channel, comprising a first air extraction pipeline, the first air extraction pipeline being located in the first fixing member, the first air extraction pipeline comprising a first air inlet opening arranged toward the plane of the substrate, one of the first through holes of the first rolling member being in communication with the first air inlet opening; The substrate conveying device further includes: The second conveying roller includes a second fixing member and a second rolling member, wherein the second fixing member is fixed to the central fixed shaft, the second rolling member is sleeved on the periphery of the second fixing member, and the second rolling member is rotatable around the central fixed shaft; the second rolling member includes a plurality of second through holes; The second conveying roller and the first conveying roller are spaced apart from each other along the axial direction of the central fixed axis. The exhaust channel includes a second exhaust pipe, which is located in the second fixing member. The second exhaust pipe includes a second air inlet port arranged toward the plane where the substrate is located. One of the second through holes of the second rolling member is connected to the second air inlet port. The air extraction channel includes a central pipeline, and the central pipeline is located in the central fixed shaft; The first air extraction pipeline includes a first connecting pipe opening arranged opposite to the first air inlet pipe opening, and the first connecting pipe opening is connected to the central pipe; The second air extraction pipeline includes a second connecting pipe opening arranged opposite to the second air inlet pipe opening, and the second connecting pipe opening is connected to the central pipe; The central pipeline of the air extraction channel is located at the center of the central fixed axis and is connected to the corresponding through holes on the first conveying roller and the second conveying roller through the first connecting pipe port and the second connecting pipe port respectively.

2. The substrate conveying device according to claim 1, wherein: The first conveying roller includes a first bearing, and the first bearing is located between the first fixing member and the first rolling member. There is a gap between the first fixing member and the first rolling member.

3. The substrate conveying device according to claim 1, wherein: The plurality of first through holes are evenly distributed along the circumference of the first rolling element.

4. The substrate conveying device according to claim 1, wherein: The first rolling member includes a first supporting portion and first sidewall portions located on both sides of the first supporting portion. The first supporting portion covers the outer peripheral surface of the first fixing member, and the first sidewall portions cover the sidewall surface of the first fixing member.

5. The substrate conveying device according to claim 1, wherein: The second conveying roller includes a second bearing, and the second bearing is located between the second fixing member and the second rolling member. There is a gap between the second fixing member and the second rolling member.

6. The substrate conveying device according to claim 1, wherein: The plurality of second through holes are evenly distributed along the circumference of the second rolling element.

7. The substrate conveying device according to claim 1, wherein: The second rolling member includes a second supporting portion and second sidewall portions located on both sides of the second supporting portion. The second supporting portion covers the outer peripheral surface of the second fixing member, and the second sidewall portions cover the sidewall surface of the second fixing member.

8. The substrate conveying device according to claim 1, wherein: The substrate conveying device further includes: The rotation drive assembly includes a driving member, a first transmission member and a second transmission member. The output end of the driving member is connected to the first rolling member through the first transmission member; the second rolling member is connected to the first rolling member through the second transmission member, so that the second rolling member rotates synchronously with the first rolling member.

9. The substrate conveying device according to claim 1, wherein: The substrate conveying device further includes: A vacuum pumping device is connected to the central pipeline.

10. The substrate conveying device according to claim 1, wherein The substrate transfer device includes a plurality of parallel central fixed shafts.

11. The substrate conveying device according to claim 1, wherein: A plurality of the first conveying rollers and a plurality of the second conveying rollers are arranged on the same central fixed shaft; On the same central fixed shaft, the first air extraction pipeline in each of the first conveying rollers and the second air extraction pipeline in each of the second conveying rollers are communicated with the same central pipeline.

12. A substrate conveying device for carrying and conveying a substrate; characterized in that: include: Central fixed axis; The first conveying roller includes a first fixing member and a first rolling member, wherein the first fixing member is fixed to the central fixed shaft, the first rolling member is sleeved on the periphery of the first fixing member, and the first rolling member is rotatable around the central fixed shaft; the first rolling member includes a plurality of first through holes; The second conveying roller includes a second fixing member and a second rolling member, wherein the second fixing member is fixed to the central fixed shaft, the second rolling member is sleeved on the periphery of the second fixing member, and the second rolling member is rotatable around the central fixed shaft; the second rolling member includes a plurality of second through holes; The exhaust channel includes a first exhaust pipeline, a second exhaust pipeline and a central pipeline. The central pipeline is located in the central fixed axis. The first exhaust pipeline is located in the first fixing member and is connected to at least one first through hole. The second exhaust pipeline is located in the second fixing member and is connected to at least one second through hole. The first exhaust pipeline and the second exhaust pipeline are respectively connected to the central pipeline. The first exhaust pipeline and the second exhaust pipeline both extend in a direction perpendicular to the substrate. The central pipeline of the exhaust channel is located at the center of the central fixed axis.

13. A semiconductor manufacturing equipment, characterized in that: The device comprises a substrate conveying device according to any one of claims 1 to 12.

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