Integrated gas path valve group and dilution refrigerator equipment

Abstract

The invention relates to the technical field of refrigeration equipment, and provides an integrated gas path valve group and dilution refrigerator equipment, the integrated gas path valve group comprises a main body seat and a plurality of angle valve seats which are integrally arranged, a plurality of communicated gas path channels are formed in the main body seat, the plurality of gas path channels are provided with at least one vacuum valve, and the vacuum valve is used for controlling on-off of the gas path channels. A plurality of connecting ports communicated with the air channel are formed in the side edge of the main body seat; each corner valve seat is arranged on one connector, the connectors comprise an air inlet and an air outlet, the air inlets are used for being connected with an air tank, and the air outlets are used for being connected with a dilution refrigerator. The main body seat is integrally arranged, so that a circulating gas path is prevented from being formed by welding a clamping sleeve or a vacuum tube, a gas path system is simplified, the occupied area is reduced, and meanwhile, the risk of helium leakage is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of refrigeration equipment, and particularly to an integrated gas circuit valve group and a dilution refrigerator device. Background Art

[0002] A dilution refrigerator is a high-end scientific research instrument that can provide an environment close to absolute zero, and is widely used in scientific research fields such as condensed matter physics, particle physics, and quantum computing.

[0003] In related technologies, in order to reduce connection points and the volume of the gas circuit, the delivery gas circuit of a dilution refrigerator mostly uses compression fittings or welded vacuum tubes, which have the advantages of simple installation, low cost, and good sealing performance, and are suitable for most industrial gas circuit systems in medium and low pressure and normal temperature environments. However, its pressure resistance ability is limited, the installation requirements are high, and it performs poorly in vibration or extreme temperature environments. At the same time, there is a risk of leakage when the compression fitting is repeatedly disassembled and assembled, resulting in the loss of helium-3 gas.

[0004] In the currently commonly used gas circuit connection method, the angle of the steel pipe needs to be adjusted during the installation process, and the entire gas circuit system occupies a large area, which is not conducive to saving space. The gas circuit system uses multiple compression fittings for connection, and there is a risk of leakage. Summary of the Invention

[0005] The present invention aims to at least solve one of the technical problems existing in the related technologies. For this purpose, the present invention proposes an integrated gas circuit valve group, aiming to simplify the gas circuit system and effectively reduce the risk of leakage.

[0006] The present invention also proposes a dilution refrigerator device.

[0007] The integrated gas circuit valve group according to the first aspect embodiment of the present invention includes: A main body seat integrally provided, in which a plurality of interconnected gas circuit channels are formed. At least one vacuum valve is provided in the plurality of gas circuit channels, and the vacuum valve is used to control the on-off of the gas circuit channels. A plurality of connection ports communicating with the gas circuit channels are provided on the side of the main body seat; A plurality of angle valve seats, each of the angle valve seats is installed in one of the connection ports. The plurality of connection ports include an air inlet and an air outlet. The air inlet is used to connect to a gas cylinder, and the air outlet is used to connect to a dilution refrigerator.

[0008] According to the integrated gas circuit valve group of the embodiment of the present invention, gas circuit channels are formed in the main body seat for transporting helium. The connection ports on the main body seat are sealed by the angle valve seats, and external components are connected through the angle valve seats to form a gas cycle for use by the dilution refrigerator. The integrally provided main body seat avoids forming a circulating gas circuit by using compression fittings or welded vacuum tubes, simplifies the gas circuit system, reduces the floor area, and at the same time reduces the risk of helium leakage.

[0009] According to an embodiment of the present invention, a plurality of interconnected gas path channels form a main circulation gas path and a service gas path. A vacuum valve is provided between the main circulation gas path and the service gas path. An inlet valve is connected to the inlet of the main circulation gas path, and an outlet valve is connected to the outlet. The service gas path is connected to the vacuum bucket of the dilution refrigerator, and the service gas path is used to evacuate the vacuum bucket of the dilution refrigerator.

[0010] According to an embodiment of the present invention, the plurality of interconnected gas path channels include a front pump section and a rear pump section. The main body seat is provided with a front pump hole and a rear pump hole. One end of the front pump section is connected to the inlet valve, and the other end is connected to the front pump hole. One end of the rear pump section is connected to the rear pump hole, and the other end is connected to the outlet valve. The integrated gas path valve group includes a booster pump, and the booster pump is arranged outside the main body seat. The booster pump is respectively connected to the front pump hole and the rear pump hole.

[0011] According to an embodiment of the present invention, a first valve seat and a second valve seat are connected in the rear pump section. The first valve seat is used to connect to the cold trap outlet, and the second valve seat is used to connect to the cold trap inlet. Among them, the first valve seat communicates with the outlet valve, and the second valve seat communicates with the rear pump hole.

[0012] According to an embodiment of the present invention, a plurality of the gas path channels include an inlet channel. The inlet channel is connected to the inlet valve. The main body seat is provided with a pinhole communicating with the inlet channel. The integrated gas path valve group includes a needle valve. The needle valve is arranged outside the main body seat. The needle valve is connected to the inlet channel through the pinhole, and the needle valve is used to control the intake volume of the inlet channel.

[0013] According to an embodiment of the present invention, the main body seat is provided with a safety hole communicating with the gas path channel. The integrated gas path valve group includes a back pressure valve. The back pressure valve is arranged outside the main body seat. The back pressure valve communicates with the gas path channel through the safety hole.

[0014] According to an embodiment of the present invention, the main body seat is provided with a plurality of the safety holes. The integrated gas path valve group includes at least two of the back pressure valves. Each back pressure valve communicates with the gas path channel through the safety hole.

[0015] According to an embodiment of the present invention, a flow meter is provided near the outlet valve in the gas path channel.

[0016] According to an embodiment of the present invention, the main body seat is made of a metal material or a polymer plastic material.

[0017] According to an embodiment of the second aspect of the present invention, a dilution refrigerator device includes a dilution refrigerator and the above-mentioned integrated gas path valve group. The integrated gas path valve group is connected to the dilution refrigerator.

[0018] The dilution refrigerator device according to an embodiment of the present invention includes the above integrated gas path valve group, and thus has all the technical effects of the above integrated gas path valve group, which will not be elaborated here.

[0019] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or related technologies, the following will briefly introduce the drawings required for use in the description of the embodiments or related technologies. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0021] Figure 1 is a schematic structural diagram of the integrated gas path valve group provided by an embodiment of the present invention.

[0022] Figure 2 is a schematic gas path diagram of the integrated gas path valve group provided by an embodiment of the present invention.

[0023] Figure 3 is a schematic gas path diagram of the integrated gas path valve group during evacuation provided by an embodiment of the present invention.

[0024] Reference Signs: 1, main body seat; 11, hole before the pump; 12, hole after the pump; 13, pinhole; 14, safety hole; 2, angle valve seat; 3, flowmeter; 4, needle valve; 5, back pressure valve. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0025] The following further describes in detail the embodiments of the present invention in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0026] In the description of the embodiments of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the embodiments of the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the embodiments of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0027] In the description of the embodiments of the present invention, it should be noted that unless otherwise clearly defined and limited, the terms "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific situations.

[0028] In the embodiments of the present invention, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature can be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature is at a higher horizontal level than the second feature. The first feature being "under", "beneath" and "underneath" the second feature can be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature is at a lower horizontal level than the second feature.

[0029] In the description of this specification, the descriptions with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0030] As Figure 1 shown, the integrated gas circuit valve group according to the first aspect embodiment of the present invention includes a main body seat 1 and a plurality of angle valve seats 2 integrally provided. A plurality of interconnected gas path channels are formed in the main body seat 1. At least one vacuum valve is provided in the plurality of gas path channels, and the vacuum valve is used to control the on-off of the gas path channels. A plurality of connection ports communicating with the gas path channels are provided on the side of the main body seat 1; each angle valve seat 2 is installed in one connection port. The plurality of angle valve seats 2 include an intake valve and an outlet valve. The intake valve is used to connect to a gas tank, and the outlet valve is used to connect to a dilution refrigerator.

[0031] The integrated gas path valve group according to an embodiment of the present invention forms a gas path channel inside the main body seat 1 for transporting helium gas, seals the connection port on the main body seat 1 through the angle valve seat 2, and connects external components through the angle valve seat 2 to form a gas cycle for use in a dilution refrigerator. The integrally provided main body seat 1 avoids using methods such as card tubes or vacuum tube welding to form a circulating gas path, simplifies the gas path system, reduces the floor area, and at the same time reduces the risk of helium leakage. The integrated gas path valve group has significant advantages in terms of low-temperature performance, vacuum compatibility, thermal conductivity, lightweight, corrosion resistance, and low magnetic susceptibility, and is suitable for ultra-low temperature experiments, quantum computing, and high-precision scientific research. Its high reliability and customized design make it an ideal choice in the field of cryogenic equipment.

[0032] Optionally, the main body seat 1 is made of aluminum alloy. It can be understood that the integrated gas path valve group according to the embodiment of the present invention simplifies the entire gas path system into an aluminum alloy valve group, forms a plurality of interconnected gas path channels by drilling holes inside the aluminum alloy, realizes the penetration and interconnection of the gas paths, and the gas is only transported inside the aluminum alloy valve group, and there are no installation, welding and other processes at the penetration points.

[0033] Exemplarily, the main body seat 1 is a rectangular block structure, and holes are drilled from its side to the inside to form gas path channels. Holes are drilled on multiple sides to make multiple gas path channels communicate with each other to form a gas path channel for transporting helium gas. It can be understood that a plurality of vacuum valves can be installed in the gas path channels to control the on-off between different gas path channels, so that helium gas is transported in a specified direction. In this way, the helium gas output from the gas cylinder can be transported to the gas path channel inside the main body seat 1 through the inlet valve and transported to the dilution refrigerator through the outlet valve.

[0034] In one embodiment, the sealing method between the angle valve seat 2 and the main body seat 1 uses a sealing ring for sealing, which effectively reduces the risk of leakage under low pressure. At the same time, the angle valve seat 2 uses a commercial and mature vacuum angle valve. Only the valve seat is retained, and the valve body (metal pipe flange, interface) is integrated on the main body seat 1, which can reduce the volume of the angle valve seat and is convenient for installation.

[0035] The specific implementation method of the integrated gas path valve group is as follows: According to the gas path design schematic diagram and the size of the planned commercial angle valve seat 2 to be used, holes are drilled inside a whole metal part to realize the mutual penetration of the gas path channels, thereby forming the main body seat 1, and then the valve seat installation structure is processed and the corresponding angle valve seat 2 is installed. The angle valve seat 2 can be pneumatic, electromagnetic-driven, or manual. When it is necessary to connect the gas path, controlling the angle valve seat 2 can realize the overall conduction of the gas path channel.

[0036] It can be understood that multiple gas path channels in the main body seat 1 can all be formed by straight drilling. The intersections of two gas path channels are connected and communicated, which is convenient for production. That is to say, multiple gas path channels are perpendicular or parallel to each other, with a neat structure and convenient for production. In this way, by controlling the depth of the holes, the connection or non-connection between different gas path channels can be controlled, so as to control the gas path direction.

[0037] Please refer to Figures 1 to 3 , according to an embodiment of the present invention, multiple connected gas path channels form a main circulation gas path and a service gas path. A vacuum valve is provided between the main circulation gas path and the service gas path. The intake port of the main circulation gas path is connected with an intake valve, and the outlet port is connected with an outlet valve. The service gas path is connected to the vacuum bucket of the dilution refrigerator, and the service gas path is used to evacuate the vacuum bucket of the dilution refrigerator.

[0038] It can be understood that in different working modes, the main circulation gas path and the service gas path can be connected or disconnected from each other through the vacuum valve. That is, some gas path channels in the main body seat 1 can conduct helium gas and also serve as a vacuum gas path at different time periods during the operation of the system. In this way, the main circulation gas path realizes the gas transportation required for ultra-low temperature refrigeration through the circulation system. When the main circulation gas path is working, the service gas path does not participate. The service gas path can be used to evacuate the air in the vacuum bucket of the dilution refrigerator before dilution refrigeration. Optionally, the service gas path is connected with a leak detection valve seat, and the leak detection valve seat is used to externally connect a leak detector. Since helium gas is easily captured by the helium leak detector, in this way, some angle valve seats 2 can be closed, and the leak detection valve seat is connected to the leak detector, so as to detect whether the integrated gas path valve group leaks. In this way, the main circulation gas path and the service gas path are integrated together in this main body seat 1, reducing the volume and being neater.

[0039] According to an embodiment of the present invention, multiple connected gas path channels include a pre-pump section and a post-pump section. The main body seat 1 is provided with a pre-pump hole 11 and a post-pump hole 12. One end of the pre-pump section is connected with the intake valve, and the other end is connected with the pre-pump hole 11. One end of the post-pump section is connected with the post-pump hole 12, and the other end is connected with the outlet valve. The integrated gas path valve group includes a booster pump, and the booster pump is arranged outside the main body seat 1. The booster pump is respectively connected with the pre-pump hole 11 and the post-pump hole 12.

[0040] It can be understood that the pre-pump section refers to a section of the gas path channel from the intake valve to the pre-pump hole 11 in the gas transportation direction, and the post-pump section refers to a section of the gas path channel from the post-pump hole 12 to the outlet valve in the gas transportation direction. The transported helium gas enters the booster pump from the pre-pump hole 11, and after being pressurized by the booster pump, it is transported to the post-pump hole 12. The helium gas is pressurized by the pump, which is beneficial to the liquefaction of helium gas, so that during subsequent dilution refrigeration, the liquid helium is evaporated to obtain a low temperature. Arranging the booster pump outside the main body seat 1 is convenient for installation and avoids the booster pump occupying the internal space of the main body seat 1.

[0041] According to an embodiment of the present invention, a first valve seat and a second valve seat are connected in the rear section of the pump. The first valve seat is used to connect to the cold trap outlet, and the second valve seat is used to connect to the cold trap inlet. Among them, the first valve seat communicates with the outlet valve, and the second valve seat communicates with the rear pump hole 12.

[0042] It can be understood that the cold trap inlet is mainly used for pre-treating the gas entering the system. Through low-temperature condensation, impurities (such as water vapor, oil vapor, etc.) in the gas are condensed and solidified, thereby reducing the impact of impurities on the refrigeration cycle. The cold trap outlet can also prevent high-temperature gas from directly flowing back into the refrigerator, thereby reducing the reverse transfer of heat and maintaining the low-temperature environment of the refrigerator. In addition, the cold trap outlet also has filtering and adsorption functions, which can further remove impurities in the gas, ensure the purity of the gas returned to the refrigerator, and improve the refrigeration efficiency.

[0043] According to an embodiment of the present invention, the plurality of gas path channels include an intake channel. The intake channel is connected to the intake valve. The main body seat 1 is provided with a pinhole 13 communicating with the intake channel. The integrated gas path valve group includes a needle valve 4. The needle valve 4 is arranged outside the main body seat 1. The needle valve 4 is connected to the intake channel through the pinhole 13. The needle valve 4 is used to control the intake volume of the intake channel. It can be understood that the needle valve 4 is arranged outside the main body seat 1, which is convenient for adjusting the gas volume from the gas tank to the inside of the main body seat 1 from the outside.

[0044] According to an embodiment of the present invention, the main body seat 1 is provided with a safety hole 14 communicating with the gas path channel. The integrated gas path valve group includes a back pressure valve 5. The back pressure valve 5 is arranged outside the main body seat 1. The back pressure valve 5 communicates with the gas path channel through the safety hole 14. It can be understood that the back pressure valve 5 is arranged outside the main body seat 1. When the pressure in the gas path channel inside the main body seat 1 is too high, it will release pressure from the back pressure valve 5, thereby improving safety.

[0045] According to an embodiment of the present invention, the main body seat 1 is provided with a plurality of safety holes 14. The integrated gas path valve group includes at least two back pressure valves 5. Each back pressure valve 5 communicates with the gas path channel through the safety hole 14. It can be understood that setting a plurality of back pressure valves 5 can be connected to different gas path channels, thereby further improving safety.

[0046] According to an embodiment of the present invention, a flow meter 3 is provided near the outlet valve in the gas path channel. It can be understood that the flow meter 3 is used to calculate the gas flow circulating inside the main body seat 1, which is convenient for detecting relevant data to ensure the normal operation of the system.

[0047] According to an embodiment of the present invention, the main body seat 1 is made of a metal material or a polymer plastic material. Exemplarily, the main body seat 1 is made of a metal material suitable for gas transportation such as aluminum alloy, stainless steel, brass, etc., or other polymer plastic materials to reduce weight. The following combines Figure 2 and Figure 3, an embodiment of the present invention is introduced: According to the schematic diagram of the gas circuit design and the dimensions of the commercial angle valve seat 2 planned to be used, holes are drilled inside a whole metal part to achieve the interconnection of the gas circuit channels. Exemplarily, the main body seat 1 includes a first side wall, a second side wall, a third side wall, and a fourth side wall connected in sequence. The first side wall is provided with five connection ports, and each connection port is provided with an angle valve seat 2, namely V1, V2, V3, V4, V5. The second side wall is provided with four connection ports, and each connection port is provided with an angle valve seat 2, namely V6, V7, V8, V9. The third side wall is provided with two connection ports, and each connection port is provided with an angle valve seat 2, namely V10, V11. The fourth side wall is provided with three connection ports, and each connection port is provided with an angle valve seat 2, namely V12, V13, V14.

[0048] Among them, V4 is the intake valve, V13 can be used as the outlet valve, and V11 can be used as the leak detection valve seat. There is a pre-pump hole 11 at the through-hole between V5 and V6, and the post-pump hole 12 communicates with the gas circuit channel corresponding to V14. V1 is connected to the cold trap outlet, and V2 is connected to the cold trap inlet. That is, the gas in the gas tank enters the main body seat 1 from V4, then is transported upward, enters the booster pump through the pre-pump hole 11, and is transported to the post-pump hole 12 by the booster pump. The gas at the post-pump hole 12 flows into the cold trap, then is discharged from the cold trap outlet, and is transported to the dilution refrigerator after passing through the flow meter 3. It can be understood that when the gas passes through the fork of two interconnected gas circuit channels, a vacuum valve is set on the corresponding gas circuit channel to prevent the gas from flowing to non-designated positions, so that the gas is transported along the designated path. For example, Figure 2 a vacuum valve is set on the path between V3 and V4 in

[0049] so that the gas of V4 only flows in the direction of V5 and does not flow in the direction of V3. Figure 3 When the service gas circuit is used for vacuum pumping operation, as

[0050] shown, where V6, V13, V12, V11, V10 are all closed, and the gas in the vacuum bucket of the dilution refrigerator is pumped away by the connected vacuum pump through the VC hole of V9. Figure 2 and Figure 3 in, P represents connected to the pressure gauge; T1 represents connected to the scroll pump; SL2 represents connected to the circulation pump, VC represents connected to the vacuum bucket; V10 and V11 can be used as auxiliary interfaces for leak detection and vacuum pumping operations.

[0051] The dilution refrigerator equipment according to the second aspect embodiment of the present invention includes a dilution refrigerator and the above-mentioned integrated gas circuit valve group, and the integrated gas circuit valve group is connected to the dilution refrigerator.

[0052] The dilution refrigerator device according to an embodiment of the present invention includes the above integrated gas circuit valve group, and thus has all the technical effects of the above integrated gas circuit valve group, which will not be elaborated herein.

[0053] Finally, it should be noted that the above embodiments are only used to illustrate the present invention, rather than to limit the present invention. Although the present invention has been described in detail with reference to the embodiments, those of ordinary skill in the art should understand that various combinations, modifications or equivalent replacements of the technical solutions of the present invention do not depart from the spirit and scope of the technical solutions of the present invention, and should all be covered within the scope of the claims of the present invention.

Claims

1. An integrated gas circuit valve group, characterized in that: include: An integrally arranged main body seat, wherein a plurality of interconnected air passages are formed in the main body seat, wherein the plurality of air passages are provided with at least one vacuum valve, wherein the vacuum valve is used to control the on-off of the air passages, and a plurality of connection ports connected to the air passages are opened on the side of the main body seat; A plurality of angle valve seats, each of which is mounted on one of the connection ports, and the plurality of connection ports include an air inlet and an air outlet, the air inlet is used to connect to a gas tank, and the air outlet is used to connect to a dilution refrigerator.

2. The integrated gas circuit valve group according to claim 1, characterized in that: A plurality of interconnected gas paths form a main circulation gas path and a service gas path. A vacuum valve is provided between the main circulation gas path and the service gas path. The air inlet of the main circulation gas path is connected to the air inlet valve, and the air outlet is connected to the air outlet valve. The service gas path is connected to the vacuum barrel of the dilution refrigerator, and the service gas path is used to evacuate the vacuum barrel of the dilution refrigerator.

3. The integrated gas circuit valve group according to claim 1, characterized in that: The multiple interconnected air paths include a pump front section and a pump rear section. The main body seat is provided with a pump front hole and a pump rear hole. One end of the pump front section is connected to the air inlet valve, and the other end is connected to the pump front hole. One end of the pump rear section is connected to the pump rear hole, and the other end is connected to the air outlet valve. The integrated air path valve group includes a booster pump, which is arranged outside the main body seat and is respectively connected to the pump front hole and the pump rear hole.

4. The integrated gas circuit valve group according to claim 3, characterized in that: A first valve seat and a second valve seat are connected in the rear section of the pump, wherein the first valve seat is used to connect to the outlet cold trap, and the second valve seat is used to connect to the inlet cold trap, wherein the first valve seat is connected to the outlet valve, and the second valve seat is connected to the rear hole of the pump.

5. The integrated gas circuit valve assembly according to claim 1, characterized in that: The multiple gas paths include an air intake channel, which is connected to the air intake valve. The main body seat is provided with a needle hole connected to the air intake channel. The integrated gas path valve group includes a needle valve, which is arranged outside the main body seat. The needle valve is connected to the air intake channel through the needle hole, and the needle valve is used to control the air intake amount of the air intake channel.

6. The integrated gas circuit valve group according to claim 1, characterized in that: The main body seat is provided with a safety hole connected to the gas path channel, and the integrated gas path valve group includes a back pressure valve, which is arranged outside the main body seat and connected to the gas path channel through the safety hole.

7. The integrated gas circuit valve assembly according to claim 6, characterized in that: The main body seat is provided with a plurality of safety holes, the integrated gas circuit valve group includes at least two back pressure valves, and each back pressure valve is connected to the gas circuit channel through the safety hole.

8. The integrated gas circuit valve assembly according to claim 1, characterized in that: A flow meter is provided in the gas passage adjacent to the gas outlet valve.

9. The integrated gas circuit valve assembly according to any one of claims 1 to 8, characterized in that: The main body seat is made of metal material or polymer plastic material.

10. A dilution refrigerator device, characterized in that: The invention comprises a dilution refrigerator and an integrated gas circuit valve assembly according to any one of claims 1 to 9, wherein the integrated gas circuit valve assembly is connected to the dilution refrigerator.

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