A composite air floating stage line and intelligent double platform LDI system

Abstract

The application provides a composite air floating type platform line and an intelligent double-platform LDI system, and belongs to the field of laser intelligent processing.The composite air floating type platform line comprises a linear guide rail, a beam bridge driver, a composite air floating guide module and a bearing beam bridge; the lower part of the bearing beam bridge is driven by the beam bridge driver and is installed on the dovetail-shaped linear guide rail; the composite air floating guide module comprises a rigid air floating assembly and a flexible air floating assembly, and the top and the two sides of the bearing beam bridge are supported on the linear guide rail by the different air floating assemblies; the platform line of the application adopts the composite air floating type, the transmission is more stable, the precision is higher, the transmission precision of exposure imaging is ensured, the work efficiency is improved, and the application in the fields of IC carrier plates, soft plates, HDI plates, multilayer plates, ceramic substrates and alloy plates is facilitated.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of laser processing, and particularly relates to a composite air floating type platform line and an intelligent double-platform LDI system. BACKGROUND

[0002] A laser direct imaging (LDI) is a device for accurately projecting a circuit pattern onto photosensitive material by using a laser beam, so as to form a high-precision circuit board pattern. It is mainly used in the field of circuit board manufacturing, especially in the exposure process in PCB (Printed Circuit Board) technology.

[0003] Generally, a product to be processed needs to be arranged on a platform, however, the existing platform structure is fixed, and mechanical transmission is adopted for driving, and micro motion in the guiding and transferring process can cause precision reduction. Therefore, a novel high-stable transmission platform line needs to be designed. SUMMARY

[0004] In order to overcome the defects of the prior art, the purpose of the present application is to provide a composite air floating type platform line and an intelligent double-platform LDI system, which can solve the above problems.

[0005] A composite air floating type platform line comprises a linear guide rail, a beam bridge driver, a composite air floating guiding module and a bearing beam bridge; the lower part of the bearing beam bridge is mounted on the dovetail-shaped linear guide rail by being driven by the beam bridge driver; the composite air floating guiding module comprises a rigid air floating assembly and a flexible air floating assembly, and the top and both sides of the bearing beam bridge are supported on the linear guide rail by using different air floating assemblies;

[0006] Further, the top of the bearing beam bridge is supported on the top surface of the linear guide rail by the rigid air floating assembly, and the two sides of the bearing beam bridge are supported on the two side outer walls of the linear guide rail by the flexible air floating assembly.

[0007] Further, the linear guide rail is in the dovetail shape with the top surface wide and the bottom surface narrow, and the two sides are symmetrical and inwardly converging from top to bottom, and a guide rail groove is formed on the top surface along the transferring direction, and the fixed part of the beam bridge driver and the grating ruler assembly are mounted in the guide rail groove.

[0008] Further, the two side inner walls of the bearing beam bridge are inwardly converging from top to bottom, matched with the dovetail structure of the linear guide rail, and air floating mounting holes are formed on the top surface and the two side inner walls of the bearing beam bridge perpendicularly, for mounting the composite air floating guiding module.

[0009] Further, the composite air floating type platform line further comprises a platform adjusting module, and the platform adjusting module adopts a lifting platform or a rotating platform.

[0010] Further, the composite air floating type platform line further comprises a negative pressure loading plate module, and the product is positioned and carried through adsorption.

[0011] Further, the rigid air floating assembly and the flexible air floating assembly each comprise an air floating block, an air floating rod and an air floating locking piece, the air floating rod of the rigid air floating assembly is a rigid screw rod, and the air floating rod of the flexible air floating assembly is an elastic rod or a combination of an air floating spring and a rigid end.

[0012] The application further provides an intelligent double-platform LDI system, comprising an exposure station, an A material table, a B material table, a position alignment module and a peripheral module for controlling temperature, humidity and pressure; the A material table and the B material table adopt the composite air floating type platform line; the A material table and the B material table are arranged on the two sides of the exposure station and alternately load and unload; two position alignment modules are arranged above the material tables on the corresponding sides and used for pre-positioning of the materials to be processed; and a post-positioning module is further arranged at the exposure station and used for pre-positioning and post-positioning of the materials to be processed.

[0013] Compared with the prior art, the composite air floating type platform line of the application has the advantages that the transmission is more stable, the precision is higher, the transmission precision of exposure imaging is ensured, the work efficiency is improved, and the application in the fields of IC carrier plates, soft plates, HDI plates, multi-layer plates, ceramic substrates and alloy plates is facilitated. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 FIG. 1 is a schematic view of a composite air floating type platform line of the application;

[0015] Figure 2 FIG. 3 is a partial exploded view of the composite air floating type platform line of the application; Figure 1

[0016] Figure 3 FIG. 5 is a partial assembly view of a carrying beam bridge and a composite air floating guide module of the application;

[0017] Figure 4 FIG. 6 is a schematic view of an intelligent double-platform LDI system of the application.

[0018] In the drawings,

[0019] 10, linear guide rail; 11, guide rail groove; 20, beam bridge driver; 21, stator assembly; 22, mover assembly; 30, composite air floating guide module; 31, rigid air floating assembly; 32, flexible air floating assembly; 40, carrying beam bridge; 41, arch bridge; 42, bridge plate; 43, air floating mounting hole; 50, grating ruler assembly; 60, platform adjustment module; 70, negative pressure loading plate module; 80, buffer stop mechanism; 90, machine rack;

[0020] 100, exposure station;

[0021] 200, A material table; 300, B material table; ​

[0022] 400, alignment module;

[0023] 500, exposure calibration module;

[0024] 600, temperature control module;

[0025] 700, water cooling machine;

[0026] 800, drying machine;

[0027] 900, gas storage tank;

[0028] 1000, air blower. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0030] Composite air floatation stage line

[0031] A composite air floating type platform line, referring to Figures 1-3 The composite air floating type platform line comprises a linear guide rail 10, a beam bridge driver 20, a composite air floating guide module 30 and a bearing beam bridge 40.

[0032] The lower part of the bearing beam bridge 40 is installed on the dovetail-shaped linear guide rail 10 and is driven by the beam bridge driver 20; the composite air floating guide module 30 comprises a rigid air floating assembly 31 and a flexible air floating assembly 32, and the top and both sides of the bearing beam bridge 40 are supported on the linear guide rail 10 by different air floating assemblies; the top of the bearing beam bridge 40 is air-floated supported on the top surface of the linear guide rail 10 by the rigid air floating assembly 31, and the both sides of the bearing beam bridge 40 are air-floated supported on the two side walls of the linear guide rail 10 by the flexible air floating assembly 32.

[0033] The linear guide rail 10 is dovetail-shaped, with the top surface wide and the bottom surface narrow, and symmetrical on both sides and inwardly converging from top to bottom, and a guide rail groove 11 is formed in the top surface along the moving direction, and the fixed part of the beam bridge driver 20 and the grating ruler assembly 50 are installed in the guide rail groove 11.

[0034] The beam bridge driver 20 adopts a linear motor, the stator assembly 21 of the linear motor is installed to the groove bottom of the guide rail groove 11 along the driving direction, and the rotor assembly 22 of the linear motor is installed to the lower wall surface of the top wall of the bearing beam bridge 40.

[0035] Wherein, the rigid air floating assembly 31 and the flexible air floating assembly 32 both include air floating blocks, air floating rods and air floating locking pieces, the air floating rod of the rigid air floating assembly 31 is a rigid screw rod, and the air floating rod of the flexible air floating assembly 32 is an elastic rod or a combination of an air floating spring and a rigid end.

[0036] Wherein, the inner wall surfaces on both sides of the bearing beam bridge 40 are inwardly recessed from top to bottom, match the dovetail-shaped structure of the linear guide rail 10, and are provided with air floating mounting holes 43 which are perpendicular to the top surface and the inner wall surfaces on both sides of the bearing beam bridge 40 for mounting the composite air floating guide module 30.

[0037] The top surface of the bearing beam bridge 40 is provided in a sunken manner, and the connection between the top surface and the side surface is designed in a circular arc. It can be designed in an integral manner, such as being integrally cast; or it can be designed in a split manner. For the split design, the preferred scheme is to splice the two ends as arch bridges 41 and the middle as a bridge plate 42.

[0038] Further, the inner side wall surface of the guide rail groove 11 is provided with the grating ruler assembly 50.

[0039] Further, the composite air floating platform line further comprises a platform adjusting module 60, and the platform adjusting module 60 adopts a lifting platform or a rotary platform.

[0040] In specific examples, the platform adjusting module 60 adopts a lifting platform, and reference can be made to the patents CN 202010723771.9, CN 202110121481.1 and CN 202110134122.X of the applicant, which will not be described here.

[0041] Further, the composite air floating platform line further comprises a negative pressure loading plate module 70 for adsorbing and positioning the carried product.

[0042] In specific examples, the negative pressure loading plate module 70 can adopt the patents CN 202410945386.7 and CN 202311374732.2 of the applicant, which will not be described here.

[0043] A buffer stop mechanism 80 is arranged at the two ends of the linear guide rail 10 and the end portions of the bearing beam bridge 40.

[0044] Referring to Figure 1 , the linear guide rail 10 is arranged on a machine rack 90.

[0045] In the illustrated examples, two sets of beam bridge drivers 20, composite air floating guide modules 30, bearing beam bridges 40, grating ruler assemblies 50, platform adjusting modules 60 and negative pressure loading plate modules 70 are arranged on one linear guide rail 10, so as to realize one-line double-platform.

[0046] Intelligent dual stage LDI system

[0047] An intelligent double-platform LDI system, referring toFigure 4 , comprising an exposure station 100, an A material table 200, a B material table 300, a positioning module 400, and a peripheral module for controlling temperature, humidity, and pressure; the A material table 200 and the B material table 300 adopt the composite air floating type loading table line according to any one of claims 1-8; the A material table 200 and the B material table 300 are arranged on both sides of the exposure station 100 and alternately load and unload; two positioning modules 400 are arranged above the material tables on the corresponding side and are used for pre-positioning of the materials to be processed; and a rear positioning module is arranged at the exposure station 100 and is used for pre-positioning and post-processing of the materials to be processed.

[0048] The peripheral module includes a temperature control module 600, a water cooler 700, a drying machine 800, a gas storage tank 900, and a blower 1000, which are used to regulate the working environment of the exposure station 100 to be in a constant temperature, humidity, and pressure.

[0049] Alternating exposure method for LDI system

[0050] The exposure operation of the DI system is described as follows: the alternate exposure method is based on the aforementioned intelligent double-platform LDI system and includes the following steps (which are repeatedly executed).

[0051] S1, the A material table is loaded, and the B material table is waiting for loading.

[0052] S2, the A material table starts to be positioned, and the B material table is being loaded.

[0053] S3, the A material table is positioned and is ready for exposure, and the B material table is being loaded.

[0054] S4, the A material table is exposed (odd-numbered strip is shown), and the B material table is waiting for positioning.

[0055] S5, the A material table is reset (even-numbered strip is exposed), and the B material table starts to be positioned.

[0056] S6, the A material table is reset and is ready for loading, and the B material table is positioned and is ready for exposure.

[0057] S7, the A material table is being loaded, and the B material table is exposed (odd-numbered strip is shown).

[0058] S8, the A material table starts to be positioned, and the B material table is reset (even-numbered strip is exposed).

[0059] S9, the A material table is positioned, and the B material table is reset and is ready for loading.

[0060] It should be pointed out finally that the above embodiments are only used to illustrate the technical solutions of the present application, but not to limit the same; and although the present application has been described in detail with reference to the foregoing embodiments, it should be appreciated by those skilled in the art that the technical solutions recorded in the foregoing embodiments can be modified, or some technical features thereof can be replaced equivalently; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A composite air-float carrier line, characterized in that: The composite air-floating platform line includes a linear guide rail (10), a beam bridge driver (20), a composite air-floating guide module (30), and a load-bearing beam bridge (40). The lower part of the load-bearing beam bridge (40) is driven by the beam bridge driver (20) and mounted on the dovetail-shaped linear guide rail (10); the composite air-bearing guide module (30) includes a rigid air-bearing component (31) and a flexible air-bearing component (32), and the top and sides of the load-bearing beam bridge (40) are supported on the linear guide rail (10) by different air-bearing components; Both the rigid air flotation assembly (31) and the flexible air flotation assembly (32) include an air flotation block, an air flotation rod and an air flotation locking component. The air flotation rod of the rigid air flotation assembly (31) is a rigid screw, and the air flotation rod of the flexible air flotation assembly (32) is an elastic rod or a combination of an air flotation spring and a rigid end.

2. The composite air-floating carrier line according to claim 1, characterized in that: The top of the load-bearing beam bridge (40) is air-bearing supported on the top surface of the linear guide rail (10) by a rigid air-bearing component (31), and the two sides of the load-bearing beam bridge (40) are air-bearing supported on the outer walls of the two sides of the linear guide rail (10) by a flexible air-bearing component (32).

3. The composite air-float carrier line according to claim 1, characterized in that: The linear guide (10) is a dovetail shape with a wide top surface and a narrow bottom surface, and the two sides are symmetrical and taper inward from top to bottom. A guide groove (11) is opened on the upper surface along the transfer direction. The fixing part of the beam bridge driver (20) and the grating ruler assembly (50) are installed in the guide groove (11).

4. The composite air-floating carrier line according to claim 3, characterized in that: The beam bridge driver (20) uses a linear motor. The stator assembly (21) of the linear motor is installed at the bottom of the guide rail groove (11) along the driving direction, and the mover assembly (22) of the linear motor is installed on the lower wall of the top wall of the beam bridge (40).

5. The composite air-floating carrier line according to claim 3, characterized in that: The inner walls on both sides of the load-bearing beam bridge (40) taper inward from top to bottom to match the dovetail structure of the linear guide rail (10), and air flotation mounting holes (43) are opened perpendicular to the top surface and the inner walls on both sides of the load-bearing beam bridge (40) for installing the composite air flotation guide module (30).

6. The composite air-floating carrier line according to claim 1, characterized in that: The composite air-float platform line also includes a platform adjustment module (60), which is a lifting platform or a rotating platform.

7. The composite air-floating carrier line according to claim 1, characterized in that: The composite air-float carrier line also includes a negative pressure plate module (70), which holds the product by adsorption positioning.

8. An intelligent dual-platform LDI system, characterized in that: It includes an exposure station (100), an A material platform (200), a B material platform (300), an alignment module (400), and peripheral modules for controlling temperature, humidity, and pressure; the A material platform (200) and the B material platform (300) adopt the composite air-floating carrier line as described in any one of claims 1-7; Material A (200) and material B (300) are arranged on both sides of the exposure station (100) and are loaded and unloaded alternately. Two alignment modules (400) are straddled above the corresponding material platforms for front positioning of the material to be processed. The exposure station (100) is also provided with a rear positioning module for front and rear positioning of the material to be processed.

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