Ejector pin ejection device

Abstract

The ejector pin ejection device comprises an ejection unit and an ejector pin assembly, the pushing unit comprises a fixed seat, a push rod and a push rod seat; the push rod seat is mounted on the fixed seat and is provided with a push rod mounting hole, an air guide sleeve, a first air path, a side hole and a first vent hole; the thimble assembly comprises a shell and a thimble; an adsorption hole and an extension hole are formed in one side of the shell in the jacking direction, and the push rod seat can abut against the other side of the shell; an ejector pin mounting hole is formed in the shell; the ejector pin is positioned in the ejector pin mounting hole; when the shell abuts against the push rod base, the side hole, the first air channel, the first vent hole, the interior of the air guide sleeve, the ejector pin mounting hole and the adsorption hole can be sequentially communicated, and the push rod abuts against the ejector pin. Compared with the prior art, the ejector pin ejection device can reduce the damage to the wafer.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor production equipment, and particularly to a thimble ejecting device. Background Art

[0002] A wafer is an important basic material in semiconductor manufacturing. Through a series of processes such as lithography and etching, multiple wafers can be formed on the same wafer. After the wafer is sawn, the wafers will adhere to the blue film. The vision system can move the wafers together with the blue film to the wafer picking position for picking and then send them into the packaging equipment for the next process.

[0003] During the picking process of the wafers, the equipment first uses vacuum to suck the blue film to prevent the blue film from moving. Then, a thimble slowly rises from below the blue film to lift the wafers, creating a gap between the wafers and the blue film for easy picking by the picking device. During this process, strict control is required over the rising height and position accuracy of the thimble. Otherwise, the wafers may crack or break due to inaccurate lifting positions and uneven forces, or the blue film may be pierced, introducing foreign matter to contaminate the wafers. Therefore, ensuring the accuracy of the thimble's lifting position on the wafers is very important for chip quality.

[0004] On the other hand, due to the different specifications of wafers in the prior art, it is often necessary to replace thimbles of different sizes and quantities according to the wafer specifications during production to lift different wafers. However, it has been found that after each replacement of different thimbles, the blue film is often pierced or the lifting position of the wafers deviates, resulting in wafer damage and a high defective rate of the wafers. Summary of the Invention

[0005] Based on this, the purpose of the present invention is to overcome the defects or deficiencies of the prior art and provide a thimble ejecting device.

[0006] The technical solution adopted by the present invention is as follows:

[0007] A thimble ejecting device includes a lifting assembly and a thimble assembly;

[0008] The push-up assembly comprises a push-up unit and a suction unit; the push-up unit comprises a push rod, a push rod seat and an air guide sleeve; the push rod seat is provided with a push rod mounting hole, the air guide sleeve is arranged in the push rod mounting hole, the push rod is slidably inserted in the air guide sleeve, the push rod mounting hole, the air guide sleeve and the push rod are coaxially arranged, and a gap is left between the inner wall of the push rod mounting hole and part of the air guide sleeve to form a first air path; the air guide sleeve has a plurality of first air vents evenly spaced along the circumference of the push rod, the first air vents are arranged corresponding to the first air path, and are used to connect the first air path with the interior of the air guide sleeve; the push rod seat also has a side hole, the side hole is arranged corresponding to the first air path, and is spaced from the first air vent along the extension direction of the push rod, and the suction unit is connected to the side hole;

[0009] The ejector assembly includes a shell and an ejector; the shell is detachably connected to the push rod seat, a suction hole and an extension hole are provided on the side of the shell away from the push rod seat, the shell is also provided with an ejector mounting hole, one end of the ejector mounting hole is connected to the suction hole, and the other end is connected to the interior of the air guide sleeve, the ejector mounting hole and the air guide sleeve are coaxially arranged; the ejector is slidably connected to the ejector mounting hole, and the push rod is used to push the ejector to extend from the extension hole.

[0010] Compared with the prior art, the ejector pin ejection device of the present invention sets the push rod mounting hole, the air guide sleeve and the push rod to be coaxial, the first air path surrounds the outside of the air guide sleeve, and the side holes and the first air holes extending in the circumferential direction are set at both ends of the push rod, so that the airflow distribution in the push rod seat is uniform, and the two ends of the push rod are subjected to uniform circumferential force, so the push rod can be kept on the same axis as the ejector pin, thereby reducing the situation where the ejector pin is tilted due to the offset of the push rod. At the same time, since the ejector pin mounting hole is connected to the air guide sleeve, the airflow distribution in the ejector pin mounting hole can also be kept uniform, the airflow has less impact on the end of the ejector pin, and the ejector pin is not easy to deviate in the extension hole, thereby reducing the defective rate of the chip. In addition, the uniform airflow can also make the adsorption force on the blue film evenly distributed.

[0011] In one embodiment, the ejection unit is further provided with an elastic suction nozzle which is sleeved outside the push rod; the suction nozzle is trumpet-shaped, and the end with a small opening is located in the air guide sleeve, and the end with a large opening is arranged toward the ejector pin mounting hole; when the outer shell is connected to the push rod seat, the suction nozzle abuts against the outer shell, and can connect the interior of the air guide sleeve with the ejector pin mounting hole to ensure the sealing of the air path and reduce the influence of external airflow on the internal airflow of the ejector pin ejection device.

[0012] In one embodiment, the push rod seat is further provided with a sealing assembly, and the sealing assembly includes an O-ring, a first sealing ring and a second sealing ring; the O-ring is located at one end of the push rod mounting hole away from the outer shell, surrounds the push rod and is located between the push rod and the air guide sleeve; the first sealing ring and the second sealing ring are respectively located at both ends of the push rod mounting hole and are located between the air guide sleeve and the push rod seat, so as to seal the internal air path of the ejector pin pushing device, ensure the vacuum degree and improve the adsorption force.

[0013] In one embodiment, the outer shell includes a convex edge, and the convex edge protrudes from the inner wall of the ejector pin mounting hole and surrounds the ejector pin; the ejector pin includes a pin body, a pin head, a flange and a second ventilation hole; the pin body is coaxial with the ejector pin mounting hole and passes through the convex edge; the pin head is arranged at one end of the pin body and can be telescoped inside and outside the protruding hole; the flange surrounds the outside of the pin body and can abut against one side of the convex edge facing the adsorption hole; the second ventilation hole penetrates through the flange and the convex edge along the extension direction of the push rod and is communicated with the ejector pin mounting hole, and the mutually abutted convex edge and flange can prevent the ejector pin from falling off the outer shell.

[0014] In one embodiment, the outer shell further includes a plurality of third ventilation holes, and the third ventilation holes penetrate through the convex edge along the extension direction of the push rod, and the plurality of third ventilation holes are evenly spaced around the outside of the pin body in the circumferential direction; the flange can cover the third ventilation holes. After the convex edge and the flange are separated, the third ventilation holes are opened and then communicated with the second ventilation holes, gradually increasing the air flow in the second ventilation holes, and the air flow flowing through the pin head also gradually increases, and the pin head is subjected to a gradually changing external force, thereby avoiding the pin head from being impacted by a large external force instantaneously and vibrating.

[0015] In one embodiment, the lifting assembly further includes a suction unit, including a solenoid valve and a trachea. The solenoid valve is installed on the fixed seat, and the trachea is communicated with the side hole for generating negative pressure on the adsorption hole to provide the adsorption force for adsorbing the blue film.

[0016] In one embodiment, the lifting assembly further includes a micro switch, which is located on the side of the push rod seat close to the outer shell; when the outer shell is connected to the push rod seat, the micro switch can be pressed to identify whether the outer shell and the push rod seat are successfully docked, ensuring the air path connection between the outer shell and the push rod seat.

[0017] In one embodiment, it also includes a first connecting member and a second connecting member that can be attracted to each other by magnetism; the first connecting member is arranged on the side of the outer shell facing the push rod seat, and the second connecting member is arranged on the push rod seat and opposite to the first connecting member; when the outer shell abuts against the push rod seat, the first connecting member and the second connecting member are attracted to each other to ensure that the outer shell is connected to the push rod seat and their internal air paths are connected.

[0018] In one embodiment, the shell includes a shell and a cover body, the ejector pin is located in the shell, the cover body is detachably covered on one side of the shell in the sliding direction of the ejector pin, and the adsorption hole and the extension hole are opened on the cover body to facilitate the installation of components in the shell.

[0019] In one embodiment, projected along the lifting direction, a plurality of adsorption holes are arranged at uniform intervals around the outer periphery of the extension hole with the axis of the ejector pin installation hole as the center, so that the blue film is subjected to uniform adsorption force.

[0020] For better understanding and implementation, the present invention is described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of the ejector switching device of the present invention in one viewing angle direction;

[0022] Figure 2 It is a schematic diagram of the overall structure of the ejector switching device of the present invention in another viewing direction;

[0023] Figure 3 It is a side view of the ejector switching device of the present invention;

[0024] Figure 4 For along Figure 3 Sectional projection diagram after cutting along line YY;

[0025] Figure 5 It is a simplified schematic diagram of the ejection unit of the present invention;

[0026] Figure 6 for Figure 4 A partial enlarged view of the middle A;

[0027] Figure 7 for Figure 4 A partial enlarged view of point B in the middle;

[0028] Figure 8 It is a schematic diagram of the overall structure of the ejector assembly of the present invention in one viewing direction;

[0029] Figure 9 is a side cross-sectional view of the ejector assembly of the present invention;

[0030] Figure 10 It is a schematic diagram of the overall structure of the thimble assembly of the present invention in another perspective direction;

[0031] Figure 11 It is a schematic diagram of the internal structure of the outer shell of the present invention;

[0032] Figure 12 It is a top view of the internal structure of the outer shell of the present invention.

[0033] Reference numerals: 10, lifting assembly; 11, pushing unit; 111, fixing seat; 1111, first plate; 1111A, slide rail; 1112, second plate; 112, mounting plate; 113, lifting motor; 114, cam; 115, base; 1151, transmission member; 1152, baffle; 116, push rod; 117, push rod seat; 1171, push rod mounting hole; 1172, first mounting hole; 1173, air guide sleeve; 1174, first air passage; 1175, side hole; 1176, first ventilation hole; 1177, suction nozzle; 1178, sealing assembly; 1178A, O-ring; 1178B, first sealing ring; 1178C, second sealing ring; 1179, second connecting member; 1180, positioning groove; 118, mounting member; 12, suction unit; 121, solenoid valve; 122, air pipe; 13, micro pressure switch; 14, third displacement sensor; 15, insulation unit; 151, first insulation member; 152, second insulation member; 20, thimble assembly; 21, outer shell; 21A, housing; 21B, cover; 211, thimble mounting hole; 212, second mounting hole; 213, protruding hole; 214, adsorption hole; 215, convex edge; 216, third ventilation hole; 218, first connecting member; 219, plug; 22, thimble; 221, needle body; 222, needle tip; 224, second ventilation hole; 225, spring; 226, reset member; Z, lifting direction. Detailed implementation manners

[0034] The applicant of this case analyzed and studied the existing ejector pin ejection device and found that: for the ejector pin device with replaceable ejector pins, both its ejector pin assembly and the lifting assembly are split structures, that is, the ejector pin and the push rod that pushes the ejector pin are split structures. Since the ejector pin relies on the push rod to provide thrust to push the wafer, the coaxiality of the push rod and the ejector pin is relatively high. Otherwise, the ejector pin will tilt due to the offset of the lifting position of the push rod, and finally the lifting position on the wafer will shift. On the other hand, since the blue film adsorption is achieved by extracting air through the air source to form a negative pressure near the blue film. That is to say, the end of the ejector pin and the vicinity of the push rod are often affected by the air flow. Moreover, the push rod and the end of the ejector pin are generally thin. If the air flow distribution around them is uneven, the push rod and the end of the ejector pin are very likely to be subjected to uneven radial forces, resulting in misalignment between the push rod and the ejector pin, tilt of the ejector pin, or offset of the end of the ejector pin in the through hole, etc. Eventually, the lifting position of the ejector pin on the wafer will deviate, and bad situations such as the ejector pin piercing the blue film and the wafer being offset will occur.

[0035] Therefore, in view of the defects existing in the ejector pin ejection device in the prior art, the applicant of this case proposes an ejector pin ejection device, which can make the air flow distribution uniform near the ejector pin and the push rod that pushes the ejector pin to lift through the coaxial push rod mounting hole, air guide sleeve, first air passage and ejector pin mounting hole, thereby reducing the offset between the ejector pin and the push rod, ensuring that the end of the ejector pin can push the wafer at a predetermined position, and thus reducing the damage of the blue film and the wafer. The following are some specific embodiments of this application:

[0036] Please refer to Figure 1 , the ejector pin switching device of the present invention includes a lifting assembly 10, an ejector pin assembly 20 and a controller (not shown in the figure). The lifting assembly 10 can push the ejector pin assembly 20 to move along the lifting direction Z. The ejector pin assembly 20 can adsorb the blue film and move along the lifting direction Z to push the wafer, realizing the separation of the blue film and the wafer. The controller is electrically connected to the lifting assembly 10 and the ejector pin assembly 20 respectively to control their respective movements. In this embodiment, the lifting direction Z is the vertical direction perpendicular to the horizontal plane, but is not limited thereto.

[0037] Specifically, please refer to Figure 2 , the lifting assembly 10 includes a pushing unit 11, a suction unit 12, a micro pressure switch 13, a third displacement sensor 14 and an insulating unit 15.

[0038] Please refer to in combination Figures 3 to 8 , the pushing unit 11 includes a fixed seat 111, a mounting plate 112, a lifting motor 113, a cam 114, a base 115, a push rod 116 and a push rod seat 117.

[0039] The fixed seat 111 is generally L-shaped, including a first plate member 1111 extending along the lifting direction Z and a second plate member 1112 extending in a direction perpendicular to the lifting direction Z. One side of the mounting plate 112 is connected to the second plate member 1112, and the other side is connected to the first plate member 1111. An accommodating space (not labeled) is formed among the mounting plate 112, the first plate member 1111, and the second plate member 1112. The lifting motor 113 is mounted on the mounting plate 112, and its output shaft passes through the mounting plate 112 and extends into the accommodating space, and the axis of the output shaft is perpendicular to the lifting direction Z. The cam 114 is sleeved on the output shaft of the lifting motor 113 and rotates therewith.

[0040] The base 115 is arranged in the accommodating space and can slide along a direction parallel to the lifting direction Z. In this embodiment, a slide rail 1111A extending along a direction parallel to the lifting direction Z is provided on the first plate member 1111. The base 115 is engaged with the slide rail 1111A. A transmission member 1151 protrudes from the side surface of the base 115. The transmission member 1151 can be a roller, a bearing, etc. hinged to the base 115. The outer peripheral surface of the transmission member 1141 abuts against the outer peripheral surface of the cam 114. When the cam 114 rotates, the base 115 is pushed to slide along the slide rail 1111A through the transmission member 1141. The push rod 116 is mounted on the base 115 and extends through the second plate member 1112 toward the ejector pin assembly 20. The push rod seat 117 is covered on the surface of the second plate member 1112 facing away from the accommodating space. Further, the pushing unit 11 further includes a mounting member 118, and the mounting member 118 is fixedly arranged on the mounting plate 112 and is arranged opposite to the first plate member 1111 to further enclose the accommodating space.

[0041] The push rod seat 117 is provided with a push rod mounting hole 1171, a first mounting hole 1172, a gas guide sleeve 1173, a first gas path 1174, side holes 1175, first ventilation holes 1176, a suction nozzle 1177 and a sealing assembly 1178. The push rod mounting hole 1171 is close to the middle of the push rod seat 117 and penetrates through the push rod seat 117 along the jacking direction Z. One end of it is close to the base 115 and the other end is close to the ejector pin assembly 20. The first mounting hole 1172 is arranged on one side of the push rod mounting hole 1171 close to the ejector pin assembly 20. The gas guide sleeve 1173 is fixedly arranged in the push rod mounting hole 1171. The push rod 116 is inserted into the gas guide sleeve 1173, and one end of it passes through the first mounting hole 1172. There is a certain gap between the gas guide sleeve 1173 and the push rod 116 to facilitate the sliding of the push rod 116 in the gas guide sleeve 1173. The gas guide sleeve 1173, the push rod 116 and the push rod mounting hole 1171 are coaxially arranged. The gas guide sleeve 1173 extends in the push rod mounting hole 1171. In the jacking direction Z, the cross-sectional areas of both ends of the gas guide sleeve 1173 are larger than the cross-sectional area of the middle part thereof, so that a first gas path 1174 is formed between the middle part of the gas guide sleeve 1173 and the hole wall of the push rod mounting hole 1171. A plurality of side holes 1175 are radially opened on the side wall of the push rod seat 117 along the push rod mounting hole 1171 and are arranged at intervals in the circumferential direction. They are located on the side close to the base 115 and communicate with the first gas path 1174. The plurality of side holes 1175 surround the outer periphery of the first gas path 1174 at a uniform interval, avoiding the suction force on the side of the push rod 116 close to the base 115 and equalizing the distribution of the airflow in the first gas path 1174. A plurality of first ventilation holes 1176 are radially opened on the side wall of the gas guide sleeve 1173 along the push rod mounting hole 1171 and surround the outer periphery of the push rod 116 at a uniform interval and communicate with the first gas path 1174. The first ventilation holes 1176 are located on the side close to the ejector pin assembly 20, so that the side of the push rod 116 close to the ejector pin assembly 20 is also subjected to uniform suction force. The above gas channel structure realizes the coaxial arrangement of the first gas path 1174 and the push rod 116, and the end of the push rod 116 is subjected to uniform adsorption force, thereby reducing the offset of the gas path on the push rod 116, improving the alignment accuracy with the ejector pin assembly 20, and the gas channel structure is simple, which can improve the gas flow velocity.

[0042] The nozzle 1177 is an elastic member made of an elastic material, roughly in a horn shape. Its small-end opening is inserted into the air guide sleeve 1173 through the first mounting hole 1172 to seal the opening at one end of the air guide sleeve 1173, and the push rod 116 passes through the nozzle 1177. The nozzle 1177 surrounds the outer periphery of the push rod 116 and has a gap therebetween. Its large-end opening faces the lifting assembly 20, and its small-end opening faces the interior of the air guide sleeve 1173, so that when the air flow flows from the lifting assembly 20 to the base 115, it enters the air guide sleeve 1173 and then flows into the first ventilation hole 1176.

[0043] The sealing assembly 1178 includes an O-ring 1178A, a first sealing ring 1178B, and a second sealing ring 1178C. The O-ring 1178A is located at the opening at one end of the air guide sleeve 1173 close to the base 115, surrounds the outer side of the push rod 116 and is located between the push rod 116 and the air guide sleeve 1173 to seal the gap between the push rod 116 and the air guide sleeve 1173. Moreover, the O-ring 1178A also helps the push rod 116 to maintain coaxiality with the air guide sleeve 1173, which has the effect of reducing the processing accuracy. The first sealing ring 1178B is located inside the push rod mounting hole 1171 on the side close to the thimble assembly 20 and is located between the air guide sleeve 1173 and the push rod seat 117 to prevent air flow from leaking from one end of the first air path 1174. The second sealing ring 1178C is located inside the push rod mounting hole 1171 on the side close to the base 115 and is located between the air guide sleeve 1173 and the push rod seat 117 to prevent air flow from leaking from the other end of the first air path 1174.

[0044] The suction unit 12 includes a solenoid valve 121 and an air pipe 122. The solenoid valve 121 is installed on the fixed seat 111 and is connected to the side hole 1175 through the air pipe 122 and is thus communicated with the first air path 1174. During operation, the solenoid valve 121 sucks air to generate negative pressure, so that the air flow flows from the nozzle 1177 to the first ventilation hole 1176, and then flows out of the push rod mounting hole 1171 through the first air path 1174, and the O-ring 1178A, the first sealing ring 1178B, and the second sealing ring 1178C respectively perform sealing.

[0045] The microswitch 13 is a trigger switch with a trigger mechanism in the prior art, electrically connected to the controller and the lifting motor 113, and is disposed on one side of the push rod seat 117 close to the ejector pin assembly 20. When the ejector pin assembly 20 approaches the push rod seat 117, the ejector pin assembly 20 can press against the microswitch 13 to trigger it and make it emit a signal, so that the controller can recognize that the ejector pin assembly 20 has moved to a place where it can be connected to the push rod seat 117, realize docking with the push rod seat 117, and the ejector pin assembly 20 is connected to the push rod seat 117 in place, thereby improving the docking accuracy between the ejector pin assembly 20 and the push rod seat 117 and providing conditions for the alignment of the gas path between the ejector pin assembly 20 and the push rod seat 117.

[0046] The third displacement sensor 14 is electrically connected to the controller and is used to detect the movement amount of the base 115. In this embodiment, the third displacement sensor 14 is a photoelectric displacement sensor. A baffle 1152 is provided on the side of the base 115 facing the third displacement sensor 14. As the base 115 moves, the baffle 1152 approaches the third displacement sensor 14 and blocks part of the light. The third displacement sensor 14 determines the movement amount of the base 115 according to the amount of light and sends it to the controller. In addition, the third displacement sensor 14 can also be a laser displacement sensor, an ultrasonic displacement sensor or other sensors for measuring displacement amounts in the prior art.

[0047] The insulating unit 15 includes a first insulating member 151 and a second insulating member 152. The first insulating member 151 is installed between the transmission member 1151 and the base 115 to prevent the static electricity on the lifting motor 113 from being conducted to the base 115 and then to the push rod 116. The second insulating member 152 is disposed between the base 115 and the fixed seat 111 to prevent static electricity from being conducted to the base 115.

[0048] Please refer to Figures 9 to 12 , the ejector pin assembly 20 includes a housing 21 and an ejector pin 22. The housing 21 is connected to the hanging plate 23 and is disposed on the outer surface of the hanging plate 23. The ejector pin 22 can slide along the lifting direction Z in the housing 21, and its end can extend and retract inside and outside the housing 21 to push the wafer.

[0049] The housing 21 includes a thimble mounting hole 211, a second mounting hole 212, an extension hole 213, an adsorption hole 214, a flange 215, a third vent hole 216, and a connecting portion 217. The thimble mounting hole 211 is formed in the housing 21 and extends along the lifting direction Z. The second mounting hole 212 and the extension hole 213 are formed in the housing 21 and communicate with both ends of the thimble mounting hole 211 respectively, wherein the second mounting hole 212 is located on the side close to the push rod seat 117. The thimble 22 is mounted in the thimble mounting hole 211. One end of the thimble mounting hole 211 communicates with the suction nozzle 1177 of the pushing unit 11 through the second mounting hole 212. The opening diameter of the suction nozzle 1177 facing the housing 21 is larger than the aperture of the second mounting hole 212. During use, the suction nozzle 1177 abuts against the housing 21, the thimble mounting hole 211 communicates with the first gas path 1174, and the suction nozzle 117 covers the second mounting hole 212 to prevent gas leakage. The extension hole 213 is coaxially arranged with the thimble mounting hole 211 to ensure that the thimble 22 is coaxially arranged with the thimble mounting hole 211. Among them, according to the size of the wafer, the number of the extension holes 213 can be one or several, and they are close to the axis of the thimble mounting hole 211.

[0050] A plurality of adsorption holes 214 are formed in the housing 21 and arranged circumferentially with the extension hole 213 as the center. The adsorption holes 214 communicate with the thimble mounting hole 211 to form a negative pressure for adsorption. In this embodiment, the adsorption holes 214 are arranged in a row along the radial direction of the extension hole 213, and multiple rows of adsorption holes 214 are evenly and circumferentially arranged around the outside of the extension hole 213 in a radial pattern to provide a uniform adsorption force. In addition, when the number of the extension holes 213 is multiple, a plurality of adsorption holes 214 are evenly spaced with the axis of the thimble mounting hole 211 as the center.

[0051] The flange 215 protrudes from the inner wall of the thimble mounting hole 211 and extends a certain distance along the lifting direction Z around the thimble 22. The third vent hole 216 penetrates the flange 215 along the lifting direction Z to increase the adsorption force. In this embodiment, the number of the third vent holes 216 is four, and they are evenly arranged around the outside of the thimble 22 along the circumferential direction of the thimble 22.

[0052] The ejector pin 22 includes a pin body 221, a pin head 222, a flange 223, a second vent hole 224, a spring sleeve 225, and a reset member 226. The pin body 221 extends in the ejector pin mounting hole 211 and passes through the flange 215. The outer diameter of the pin head 222 is smaller than that of the pin body 221 and is located on one side of the pin body 221 close to the protruding hole 213, and can protrude from the protruding hole 213 outside the housing 21. The flange 223 surrounds the pin body 221 and is located on one side of the flange 215 facing the protruding hole 213. Projected along the lifting direction Z, the cross-sectional area of the flange 223 is larger than that of the flange 215, and can abut against one side of the flange 215 facing the adsorption hole 214. As the pin body 221 slides in the ejector pin mounting hole 211, the flange 223 can cover the flange 215 and limit the sliding of the pin body 221 to prevent the pin body 221 from detaching from the housing 21. The flange 223 can be a split structure with the pin body 221 or an integral structure with the pin body 221. The second vent hole 224 penetrates through the flange 223 and the flange 215 along the lifting direction Z and communicates with the ejector pin mounting hole 211. In this embodiment, the number of the second vent holes 224 is four, and they are evenly distributed around the ejector pin 22 in the circumferential direction of the ejector pin 22. Projected along the ejector pin direction Z, the second vent holes 224 and the third vent holes 216 are arranged in a staggered manner. When the flange 223 covers the flange 215, the third vent holes 216 are blocked by the flange 22 and thus cannot communicate with the adsorption hole 214. The spring sleeve 225 is sleeved on one end of the pin body 221 away from the pin head 111 and is separated from the flange 215 by a certain distance. The two ends of the reset member 226 are respectively abutted against one side of the flange 215 facing away from the adsorption hole 214 and the spring sleeve 225. When the pin head 222 moves outward from the housing 21, the reset member 226 is compressed and applies a force along the lifting direction away from the protruding hole 213 to the spring sleeve 225, so as to facilitate the retraction of the pin head 222 into the housing 21.

[0053] Furthermore, the housing 21 includes a detachable connected housing body 21A and a cover body 21B. The ejector pin 22 is located inside the housing body 21A. The cover body 21B is covered on one side of the housing body in the lifting direction. The protruding hole 213 and the adsorption hole 214 are opened on the cover body 21B.

[0054] Further, a plurality of first connectors 218 and retractable pins 219 are provided on the bottom surface of the housing 21 facing the push rod seat 117; correspondingly, a plurality of second connectors 1179 and a plurality of positioning grooves 1180 are provided on the top surface of the push rod seat 117 facing the housing 21, and the positioning grooves 1180 can be V-shaped grooves. The first connectors 218 and the second connectors 1179 have magnetism. When the housing 21 and the push rod seat 117 approach each other, even if there is a deviation between the housing 21 and the push rod seat 117, due to the mutual adsorption of the first connectors 218 and the second connectors 1179, a slight relative rotation occurs between the housing 21 and the push rod seat 117, and the pin 219 can slide to the bottom of the positioning groove 1180, realizing the alignment of the housing 21 and the push rod seat 117, and ensuring the communication between the thimble mounting hole 211 and the first air passage 1174. Preferably, the end of the pin 219 located outside is hemispherical. In addition, it can be understood that the pin 219 can also be provided on the top surface of the push rod seat 117, and correspondingly, the positioning groove 1180 is opened on the bottom surface of the housing 21, which can also realize the alignment of the housing 21 and the push rod seat 117 and ensure the communication between the thimble mounting hole 211 and the first air passage 1174.

[0055] Based on the above structure, the working process of the thimble switching device of this embodiment is described.

[0056] Eject the thimble 22 out of the housing 21:

[0057] Step S10: Set the thimble assembly 20 of the required specification above the push rod seat 117;

[0058] Step S20: Control the push unit 11 to move towards the thimble assembly 20 through the controller;

[0059] Step S30: The housing 21 presses the micro pressure switch 13, the controller controls the push unit 11 to stop running, the first connectors 218 and the second connectors 1179 adsorb each other, the pin 219 is inserted into the positioning groove 1180, the suction nozzle 1177 abuts against the housing 21 and covers the second mounting hole 212, and the first air passage 1174 is communicated with the thimble mounting hole 212;

[0060] Step S40: The controller starts the solenoid valve 121 to generate an air flow from the adsorption hole 214 through the thimble mounting hole 212, the second mounting hole 212, the suction nozzle 1177, the first ventilation hole 1177, the first air passage 1174, and the side hole 1175 in sequence, and the blue film is adsorbed;

[0061] Step S50: The controller starts the lifting motor 113, and the lifting motor 113 drives the cam 114 to lift the push rod 116, and the push rod 116 pushes the ejector pin 22 out of the housing 21, thereby pushing the wafer away from the blue film; the third displacement sensor 14 detects the movement amount of the push rod 116;

[0062] Step S60: After the wafer is picked up, under the control of the controller, the lifting motor 113 reverses, and the push rod 116 moves away from the ejector pin 22 until the ejector pin 22 retracts into the housing 21; the solenoid valve 121 stops the air extraction operation.

[0063] Compared with the prior art, the ejector pin ejection device of the present invention has the following advantages:

[0064] 1. It can improve the coaxiality of the push rod and the ejector pin, reduce the influence of air flow on the push rod and the ejector pin, the ejector pin is not easy to shift, and the wafer is not easy to be damaged;

[0065] 2. It can evenly distribute the adsorption force on the blue film;

[0066] 3. It has good sealing performance, can reduce the influence of external gas on the gas path, and improve the adsorption force;

[0067] 4. The ejector pin is not easy to fall off and the structure is simple;

[0068] 5. It can generate a gradually increasing air flow to reduce the influence of the air flow on the needle tip;

[0069] 6. The connection between the push rod seat and the housing is stable and the operation is stable.

[0070] The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the embodiments of the present application. The singular forms "a", "the" and "said" used in the embodiments of the present application and the claims are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that unless otherwise stated, "a plurality" means two or more; the terms "first", "second", "third", etc. are only used for distinction and not for describing a specific order or sequence, nor can they be understood as indicating or implying relative importance. The term "and / or" used herein means and includes any or all possible combinations of one or more of the associated listed items. When the above description refers to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. In the description of the present application, for those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0071] The above-described embodiments merely represent several implementation manners of the present invention. The description thereof is relatively specific and detailed, but it should not be construed as a limitation to the scope of the invention patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and these all fall within the protection scope of the present invention.

Claims

1. A ejector pin ejection device, characterized in that: include: Push-up assembly and ejector assembly; The push-up assembly comprises a push-up unit and a suction unit; the push-up unit comprises a push rod, a push rod seat and an air guide sleeve; the push rod seat is provided with a push rod mounting hole, the air guide sleeve is arranged in the push rod mounting hole, the push rod is slidably inserted in the air guide sleeve, the push rod mounting hole, the air guide sleeve and the push rod are coaxially arranged, and a gap is left between the inner wall of the push rod mounting hole and part of the air guide sleeve to form a first air path; the air guide sleeve has a plurality of first air vents evenly spaced along the circumference of the push rod, the first air vents are arranged corresponding to the first air path, and are used to connect the first air path with the interior of the air guide sleeve; the push rod seat also has a side hole, the side hole is arranged corresponding to the first air path, and is spaced from the first air vent along the extension direction of the push rod, and the suction unit is connected to the side hole; The ejector assembly includes a shell and an ejector; the shell is detachably connected to the push rod seat, a suction hole and an extension hole are provided on the side of the shell away from the push rod seat, the shell is also provided with an ejector mounting hole, one end of the ejector mounting hole is connected to the suction hole, and the other end is connected to the interior of the air guide sleeve, the ejector mounting hole and the air guide sleeve are coaxially arranged; the ejector is slidably connected to the ejector mounting hole, and the push rod is used to push the ejector to extend from the extension hole.

2. The ejector device according to claim 1, characterized in that: The ejection unit is also provided with an elastic suction nozzle which is sleeved outside the push rod; the suction nozzle is trumpet-shaped, and the end with a small opening is located in the air guide sleeve, and the end with a large opening is arranged toward the ejector pin mounting hole; when the outer shell is connected to the push rod seat, the suction nozzle abuts against the outer shell and can connect the interior of the air guide sleeve with the ejector pin mounting hole.

3. The ejector device according to claim 1, characterized in that: The push rod seat is also provided with a sealing assembly, which includes an O-type rubber ring, a first sealing ring and a second sealing ring; the O-type rubber ring is located at the end of the push rod mounting hole away from the outer shell, is arranged around the push rod and is located between the push rod and the air guide sleeve; the first sealing ring and the second sealing ring are respectively located at the two ends of the push rod mounting hole, and are located between the air guide sleeve and the push rod seat.

4. The ejector pin ejection device according to claim 1, characterized in that: The shell includes a convex edge, which is protruded on the inner wall of the ejector pin mounting hole and surrounds the ejector pin; the ejector pin includes a needle body, a needle head, a flange and a second vent hole; the needle body is coaxial with the ejector pin mounting hole and passes through the convex edge; the needle head is arranged at one end of the needle body and can be extended and retracted in and out of the extension hole; the flange surrounds the outside of the needle body and can abut against the side of the convex edge facing the adsorption hole; the second vent hole passes through the flange and the convex edge along the extension direction of the push rod, and is connected to the ejector pin mounting hole.

5. The ejector pin ejection device according to claim 4, characterized in that: The shell also includes a plurality of third ventilation holes, which penetrate the flange along the extension direction of the push rod, and surround the outer side of the needle body at a uniform interval along the circumferential direction; the flange can cover the third ventilation holes.

6. The ejector pin ejection device according to claim 1, characterized in that: The lifting assembly also includes a suction unit, including a solenoid valve and an air pipe, the solenoid valve is installed on the fixing seat, and the air pipe is connected to the side hole to generate negative pressure on the adsorption hole.

7. The ejector pin ejection device according to claim 1, characterized in that: The push-up assembly also includes a micro switch, which is located on a side of the push rod seat close to the shell; when the shell is connected to the push rod seat, the micro switch can be pressed.

8. The ejector pin ejection device according to claim 1, characterized in that: It also includes a first connecting member and a second connecting member that can be attracted to each other by magnetism; the first connecting member is arranged on the side of the outer shell facing the push rod seat, and the second connecting member is arranged on the push rod seat and opposite to the first connecting member; when the outer shell abuts against the push rod seat, the first connecting member and the second connecting member are attracted to each other.

9. The ejector device according to claim 8, characterized in that: The shell comprises a shell and a cover, the ejector pin is located in the shell, the cover is detachably covered on one side of the shell in the sliding direction of the ejector pin, and the adsorption hole and the extension hole are arranged on the cover.

10. The ejector pin ejection device according to claim 1, characterized in that: Projected along the lifting direction, a plurality of adsorption holes are arranged at uniform intervals on the periphery of the extension hole with the axis of the ejector mounting hole as the center.

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