Radio frequency power distribution circuit, radio frequency power amplifier equipment and radio frequency power supply system

Abstract

The invention provides a radio frequency power distribution circuit, radio frequency power amplifier equipment and a radio frequency power supply system, the radio frequency power distribution circuit comprises an input end, N power distribution branches and N output ends, the input end is connected with one end of each power distribution branch, and the other ends of the N power distribution branches are connected with the N output ends in a one-to-one correspondence manner. The input end is used for inputting initial radio frequency electric energy. Each power distribution branch has a corresponding power distribution impedance value, the N power distribution branches are used for distributing the initial radio frequency electric energy to obtain N corresponding sub radio frequency electric energy, and the power value of each sub radio frequency electric energy is related to the power distribution impedance value of the corresponding power distribution branch. Wherein the power division impedance value of at least one power distribution branch is different from the power division impedance values of other power distribution branches, so that the power value of the sub radio frequency electric energy obtained by at least one power distribution branch is different from the power values of other power distributions. According to the invention, uneven power distribution can be quickly realized.

Description

Technical Field

[0001] This application relates to the field of radio frequency technology, and particularly to a radio frequency power distribution circuit, a radio frequency power amplifier device, and a radio frequency power supply system. Background Art

[0002] Currently, with the development of radio frequency power supply technology, radio frequency power supplies are mainly applied in semiconductor devices to provide radio frequency electrical energy for plasma loads. At the same time, the radio frequency electrical energy output by the radio frequency power supply can also be distributed through power distribution to provide radio frequency electrical energy for multiple loads. However, the power values of the radio frequency electrical energy required by each load may not be the same. Therefore, when providing radio frequency electrical energy for multiple loads, how to meet the power value requirements of multiple loads for radio frequency electrical energy has become an issue that needs to be considered. Summary of the Invention

[0003] This application provides a radio frequency power distribution circuit, a radio frequency power amplifier device, and a radio frequency power supply system, which can quickly achieve uneven power distribution to meet the power requirements of multiple loads.

[0004] In a first aspect, a radio frequency power distribution circuit is provided. The radio frequency power distribution circuit includes an input end, N power distribution branches, and N output ends. The input end is connected to one end of each power distribution branch, and the other ends of the N power distribution branches are respectively connected to the N output ends in one-to-one correspondence. The input end is used to input initial radio frequency electrical energy. Each power distribution branch has a corresponding power division impedance value. The N power distribution branches are used to distribute the initial radio frequency electrical energy to obtain N corresponding sub-radio frequency electrical energies respectively. Among them, the power value of each sub-radio frequency electrical energy is related to the power division impedance value of the corresponding power distribution branch. The N output ends are used to be connected to N loads in one-to-one correspondence to transmit the N sub-radio frequency electrical energies to the N loads respectively, where N≥2. Among them, the power division impedance value of at least one power distribution branch is different from the power division impedance values of other power distribution branches, so that the power value of the sub-radio frequency electrical energy obtained by at least one power distribution branch is different from the power values of other power distributions.

[0005] In a possible implementation manner, the ratio of the power values of the sub-radio frequency electrical energies obtained by any two power distribution branches is related to the ratio of the power division impedance values of the two power distribution branches.

[0006] In a possible implementation manner, the N power division impedance values form a first N - value proportional relationship according to their respective ratio relationships. The first N - value proportional relationship includes N equivalent impedance values corresponding to the N power division impedance values in sequence. The N sub - radio - frequency electric energies also form a second N - value proportional relationship according to the ratio relationships of their respective power values. The second N - value proportional relationship includes N equivalent power values corresponding to the power values of the N sub - radio - frequency electric energies in sequence. Among them, the first N - value proportional relationship is related to the second N - value proportional relationship.

[0007] In a possible implementation manner, the input end is used to be connected to a radio - frequency source to input the initial radio - frequency electric energy output by the radio - frequency source. The radio - frequency power amplifier circuit further includes an impedance matching unit. One end of the impedance matching unit is connected to the input end, and the other end of the impedance matching unit is connected to one end of each power distribution branch. Among them, the impedance matching unit has an adjustable matching impedance value, and the impedance matching unit is used to perform impedance matching on the radio - frequency source, the N power distribution branches, and the N loads.

[0008] In a possible implementation manner, the power division impedance value of each power distribution branch is adjustable, and the second N - value proportional relationship changes according to the change of the power division impedance value of at least one power distribution branch.

[0009] In a possible implementation manner, each power distribution branch further includes a power division adjustment end, and the impedance matching unit further includes a matching adjustment end; the radio - frequency power amplifier circuit further includes an adjustment unit. The adjustment unit is connected to the power division adjustment end of each power distribution branch, and the adjustment unit is also connected to the matching adjustment end of the impedance matching unit. Among them, the adjustment unit is used to adjust the power division impedance value of each power distribution branch and adjust the impedance matching value of the impedance matching unit.

[0010] In a possible implementation manner, the radio - frequency power amplifier circuit further includes a control unit. The control unit is connected to the adjustment unit. Among them, the control unit is used to control the adjustment unit to adjust the power division impedance value of at least one power distribution branch or not to adjust the power division impedance value of any power distribution branch at least according to the target power value of each load, so that the first N - value proportional relationship is the target first N - value proportional relationship, so that the power values of the N sub - radio - frequency electric energies obtained by the N power distribution branches are correspondingly the target power values of the N loads; the control unit is also used to control the adjustment unit to adjust the matching impedance value of the impedance matching unit according to the impedance value of the radio - frequency source, the power division impedance value of each power distribution branch, the impedance value of each load, and a preset characteristic impedance value, so as to perform impedance matching on the radio - frequency source, the N power distribution branches, and the N loads.

[0011] In a possible implementation manner, each power distribution branch includes a first capacitor and a first inductor. One end of the first inductor is connected to one end of the corresponding power distribution branch, and the other end of the first inductor is connected to the other end of the corresponding power distribution branch. One end of the first capacitor is connected to both one end of the corresponding power distribution branch and one end of the first inductor, and the other end of the first capacitor is connected to the ground. Wherein, the power division impedance value of each power distribution branch is obtained according to the capacitance value of the corresponding first capacitor and the inductance value of the corresponding first inductor, and the capacitance value of each first capacitor is adjustable so that the power division impedance value of each power distribution branch is adjustable.

[0012] In a possible implementation manner, the inductance values of each first inductor are the same, and the first N - value ratio relationship changes according to the change of the capacitance value of at least one first capacitor.

[0013] In a possible implementation manner, the radio frequency power distribution circuit further includes a switching unit. One end of the switching unit is connected to the other end of each power distribution branch, and the other end of the switching unit is selectively connected to each load. Wherein, when the switching unit conducts the connection path between any one power distribution branch and the corresponding load, it transmits the corresponding sub - radio - frequency electrical energy to the corresponding load, and when it disconnects the connection path between any one power distribution branch and the corresponding load, it stops transmitting the corresponding sub - radio - frequency electrical energy to the corresponding load.

[0014] In a second aspect, a radio frequency power amplifier device is further provided. The radio frequency power amplifier device includes a radio frequency source and a radio frequency power distribution circuit. The radio frequency power distribution circuit includes an input end, N power distribution branches, and N output ends. The input end is connected to one end of each power distribution branch, and the other ends of the N power distribution branches are connected to the N output ends in one - to - one correspondence. The input end is used for inputting initial radio - frequency electrical energy. Each power distribution branch has a corresponding power division impedance value. The N power distribution branches are used for distributing the initial radio - frequency electrical energy to obtain N corresponding sub - radio - frequency electrical energies respectively. Wherein, the power value of each sub - radio - frequency electrical energy is related to the power division impedance value of the corresponding power distribution branch. The N output ends are used for being connected to N loads in one - to - one correspondence to transmit the N sub - radio - frequency electrical energies to the N loads respectively, where N≥2. The power division impedance value of at least one power distribution branch is different from the power division impedance values of other power distribution branches, so that the power value of the sub - radio - frequency electrical energy obtained by at least one power distribution branch is different from the power values of other power distributions.

[0015] In a third aspect, a radio frequency power supply system is further provided, including a radio frequency power amplifier device. The radio frequency power amplifier device includes a radio frequency source and a radio frequency power distribution circuit.

[0016] The radio frequency power distribution circuit, radio frequency power amplifier device and radio frequency power supply system of the present application allocate initial radio frequency electric energy through N power distribution branches configured with corresponding power division impedance values, and respectively obtain N corresponding sub-radio frequency electric energies. Moreover, the power value of each sub-radio frequency electric energy obtained by each power distribution branch is related to the power division impedance value of the corresponding power distribution branch. Furthermore, by configuring the power division impedance value of at least one power distribution branch to be different from that of other power distribution branches, the power value of the sub-radio frequency electric energy obtained by at least one power distribution branch is made different from that of other power distributions, thereby conveniently achieving uneven power distribution and being able to meet the power requirements of multiple loads. Description of the Drawings

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required to be used in the embodiments of the present application or the background technology will be described below.

[0018] Figure 1 Schematic diagram of the radio frequency power distribution circuit in some embodiments of the present application.

[0019] Figure 2 Another schematic diagram of the radio frequency power distribution circuit in some embodiments of the present application.

[0020] Figure 3 Another schematic diagram of the radio frequency power distribution circuit in some embodiments of the present application.

[0021] Figure 4 Schematic diagram of the power distribution branch in some embodiments of the present application.

[0022] Figure 5 Another schematic diagram of the radio frequency power distribution circuit in some embodiments of the present application.

[0023] Figure 6 Schematic diagram of the radio frequency power amplifier device in some embodiments of the present application.

[0024] Figure 7 Schematic diagram of the radio frequency power supply system in some embodiments of the present application.

[0025] Description of the reference numerals: 1, radio frequency power supply system; 1000, radio frequency power amplifier device; 10, radio frequency power distribution circuit; 100, input end; RF1, initial radio frequency electric energy; 200, power distribution branch; C1, first capacitor; L1, first inductor; GND, ground; RF2, sub-radio frequency electric energy; 300, output end; 400, impedance matching unit; 500, adjustment unit; 600, control unit; 700, switch unit; 20, radio frequency source; RL, load. Detailed Embodiments

[0026] Next, in conjunction with the accompanying drawings in the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0027] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0028] Hereinafter, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the embodiments of the present application, unless otherwise stated, the meaning of "a plurality" is two or more.

[0029] In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or server that includes a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products, or devices.

[0030] Please refer to Figure 1 , Figure 1 which is a schematic diagram of a radio frequency power distribution circuit in some embodiments of the present application. As Figure 1As shown, the present application provides a radio frequency power distribution circuit 10. The radio frequency power distribution circuit 10 includes an input terminal 100, N power distribution branches 200, and N output terminals 300. The input terminal 100 is connected to one end of each power distribution branch 200, and the other ends of the N power distribution branches 200 are connected to the N output terminals 300 in one-to-one correspondence. The input terminal 100 is used to input initial radio frequency electrical energy RF1. Each power distribution branch 200 has a corresponding power division impedance value. The N power distribution branches 200 are used to distribute the initial radio frequency electrical energy RF1 to obtain N corresponding sub-radio frequency electrical energies RF2 respectively. Among them, the power value of each sub-radio frequency electrical energy RF2 is related to the power division impedance value of the corresponding power distribution branch 200. The N output terminals 300 are used to be connected to N loads RL in one-to-one correspondence to transmit the N sub-radio frequency electrical energies RF2 to the N loads RL respectively, where N≥2. Among them, the power division impedance value of at least one power distribution branch 200 is different from the power division impedance values of other power distribution branches 200, so that the power value of the sub-radio frequency electrical energy RF2 obtained by at least one power distribution branch 200 is different from the power values of other power distributions.

[0031] Thus, in the above radio frequency power distribution circuit 10 of the present application, by configuring the N power distribution branches 200 with corresponding power division impedance values to distribute the initial radio frequency electrical energy RF1, N corresponding sub-radio frequency electrical energies RF2 are obtained respectively, and the power value of each sub-radio frequency electrical energy RF2 obtained by each power distribution branch 200 is related to the power division impedance value of the corresponding power distribution branch 200. Furthermore, by configuring the power division impedance value of at least one power distribution branch 200 to be different from the power division impedance values of other power distribution branches 200, the power value of the sub-radio frequency electrical energy RF2 obtained by at least one power distribution branch 200 is different from the power values of other power distributions, so that an uneven power distribution is conveniently achieved, and the power requirements of multiple loads RL can be met.

[0032] Specifically, the power division impedance value of at least one power distribution branch 200 is different from the power division impedance values of other power distribution branches 200, so that the power value of the sub-radio frequency electrical energy RF2 transmitted to the corresponding at least one load RL is different from the power value of the sub-radio frequency electrical energy RF2 transmitted to other loads RL.

[0033] In some embodiments, the ratio of the power values of the sub-radio frequency electrical energies RF2 obtained by any two power distribution branches 200 is related to the ratio of the power division impedance values of the two power distribution branches 200.

[0034] Therefore, in the above radio frequency power distribution circuit 10 of the present application, according to the ratio of the power division impedance values of any two power division branches 200, the ratio of the power values of the sub-radio frequency electrical energies RF2 obtained by any two power division branches 200 can be determined, and the power division impedance value of each power division branch 200 can also be set according to the power value of the initial radio frequency electrical energy RF1 and the power value of the sub-radio frequency electrical energy RF2 required by each load RL.

[0035] In some embodiments, N power division impedance values form a first N-value proportional relationship according to their respective ratio relationships. The first N-value proportional relationship includes N equivalent impedance values corresponding to the N power division impedance values in sequence. N sub-radio frequency electrical energies RF2 also form a second N-value proportional relationship according to the ratio relationships of their respective power values. The second N-value proportional relationship includes N equivalent power values corresponding to the power values of the N sub-radio frequency electrical energies RF2 in sequence. Among them, the first N-value proportional relationship is related to the second N-value proportional relationship.

[0036] Therefore, the above radio frequency power distribution circuit 10 in the present application can specifically obtain the first N-value proportional relationship through the required second N-value proportional relationship.

[0037] Furthermore, N sub-radio frequency electrical energies RF2 form a third N-value proportional relationship according to the ratio relationships of their respective current values. The third N-value proportional relationship includes N equivalent current values corresponding to the current values of the N sub-radio frequency electrical energies RF2 in sequence. Among them, the third N-value proportional relationship is related to both the first N-value proportional relationship and the second N-value proportional relationship.

[0038] Among them, the N-value proportional relationship refers to the proportional relationship formed by N values. For example, the first N-value proportional relationship can be z1:z2:……zN, where z1~zN can be the equivalent impedance values from the equivalent impedance value of the first power division impedance value to the equivalent impedance value of the Nth power division impedance value. The third N-value proportional relationship can be s1:s2:……sN, where s1~sN can be the equivalent current values from the equivalent current value of the first sub-radio frequency electrical energy RF2 to the equivalent current value of the Nth sub-radio frequency electrical energy RF2. The second N-value proportional relationship can be y1:y2……yN, where y1~yN can be the equivalent power values from the equivalent power value of the first sub-radio frequency electrical energy RF2 to the equivalent power value of the Nth sub-radio frequency electrical energy RF2. Among them, the product of each power division impedance value and the current value of the corresponding sub-radio frequency electrical energy RF2 is equal, and it is a dimensionless fixed product value. The fixed product value can be L, that is, the product of the Xth power division impedance value and the current value of the Xth sub-radio frequency electrical energy RF2 is the fixed product value L, that is, zX×sX = L. Then the second N-value proportional relationship can be the product of the corresponding power division impedance value and the square of the current value of the corresponding sub-radio frequency electrical energy RF2, that is, the power value of the Xth sub-radio frequency electrical energy RF2 is the product of the Xth power division impedance value and the square of the current value of the Xth sub-radio frequency electrical energy RF2, that is, yX = zX×sX2 Furthermore, the product of each power division impedance value and the power value of the corresponding sub-radio frequency energy RF2 is equal to a fixed product value L, that is, yX = L / zX. Wherein, 2 ≤ X ≤ N. For example, when N = 3 and the first N-value ratio relationship is 100:150:200, L can be 600 or any other value. Taking L = 600 as an example, the third N-value ratio relationship can be 6:4:3, and then the second N-value ratio relationship is 6:4:3.

[0039] Further, the reciprocal ratio of each equivalent impedance value of the first N-value ratio relationship is the second N-value ratio relationship.

[0040] That is, in some embodiments, the ratio of the power values of the sub-radio frequency energy RF2 obtained by any two power distribution branches 200 is related to the ratio of the power division impedance values of the two power distribution branches 200, and may include: the product of the ratio of the power values of the sub-radio frequency energy RF2 obtained by any two power distribution branches 200 and the ratio of the power division impedance values of the two power distribution branches 200 is 1.

[0041] Please refer to Figure 2 , Figure 2 which is another schematic diagram of the radio frequency power distribution circuit in some embodiments of the present application. As Figure 2 shown, the input end 100 is used to connect to the radio frequency source 20 to input the initial radio frequency energy RF1 output by the radio frequency source 20. The radio frequency power amplification circuit further includes an impedance matching unit 400. One end of the impedance matching unit 400 is connected to the input end 100, and the other end of the impedance matching unit 400 is connected to one end of each power distribution branch 200. Wherein, the impedance matching unit 400 has an adjustable matching impedance value, and the impedance matching unit 400 is used to perform impedance matching on the radio frequency source 20, N power distribution branches 200, and N loads RL.

[0042] Thus, in the above radio frequency power distribution circuit 10 of the present application, by configuring the impedance matching unit 400, not only can impedance matching be performed on the radio frequency source 20 and N loads RL, but also impedance matching needs to be performed on the power division impedance values of each power distribution branch 200 at the same time to avoid large reflected power generated by the N power distribution branches 200.

[0043] In some embodiments, the power division impedance value of each power distribution branch 200 is adjustable, and the second N-value ratio relationship changes according to the change of the power division impedance value of at least one power distribution branch 200.

[0044] Therefore, when adjusting the power division impedance value of at least one power division branch 200 in the above radio frequency power distribution circuit 10 of the present application, the second N-value ratio relationship can be affected, thereby affecting the power value of the sub-radio frequency electrical energy RF2 of the N power division branches 200.

[0045] Please refer to Figure 3 , Figure 3 which is another schematic diagram of the radio frequency power distribution circuit in some embodiments of the present application. As Figure 2 , Figure 3 shown, each power division branch 200 further includes a power division adjustment terminal, and the impedance matching unit 400 further includes a matching adjustment terminal; the radio frequency power amplification circuit further includes an adjustment unit 500, and the adjustment unit 500 is connected to the power division adjustment terminal of each power division branch 200, and the adjustment unit 500 is also connected to the matching adjustment terminal of the impedance matching unit 400. Among them, the adjustment unit 500 is used to adjust the power division impedance value of each power division branch 200 and the impedance matching value of the impedance matching unit 400.

[0046] Therefore, in the above radio frequency power distribution circuit 10 of the present application, by providing the adjustment unit 500 connected to the power division adjustment terminal of each power division branch 200 and the matching adjustment terminal of the impedance matching unit 400, the power division impedance value of each power division branch 200 and the impedance matching value of the impedance matching unit 400 can be adjusted, thereby adjusting the power division impedance value of each power division branch 200 and completing impedance matching.

[0047] In some embodiments, the impedance matching unit 400 may include impedance matchers of types such as π-type, L-type, inverted L-type, etc., and specifically may include electronic components such as capacitors, inductors, and resistors. Among them, the capacitor may be a tunable capacitor, and by adjusting the capacitance value of the tunable capacitor, the impedance matching value of the impedance matching unit 400 is adjusted to achieve impedance matching. The matching adjustment terminal of the impedance matching unit 400 is also the adjustment terminal of the tunable capacitor.

[0048] As Figure 2 , Figure 3As shown, the radio frequency power amplification circuit further includes a control unit 600, and the control unit 600 is connected to the adjustment unit 500. Among them, the control unit 600 is used to control the adjustment unit 500 to adjust the power division impedance value of at least one power distribution branch 200 or not to adjust the power division impedance value of any power distribution branch 200 at least according to the target power value of each load RL, so that the first N-value ratio relationship is the target first N-value ratio relationship, so that the power values of the N sub-radio frequency electric energies RF2 obtained by the N power distribution branches 200 are correspondingly the target power values of the N loads RL; the control unit 600 is further used to control the adjustment unit 500 to adjust the matching impedance value of the impedance matching unit 400 according to the impedance value of the radio frequency source 20, the power division impedance value of each power distribution branch 200, the impedance value of each load RL, and the preset characteristic impedance value, so as to perform impedance matching on the radio frequency source 20, the N power distribution branches 200, and the N loads RL.

[0049] Therefore, in the above radio frequency power distribution circuit 10 of the present application, by setting the control unit 600, the first N-value ratio relationship can be made the target first N-value ratio relationship at least according to the target power value required by each load RL, so that the power values of the N sub-radio frequency electric energies RF2 obtained by the N power distribution branches 200 are correspondingly the target power values of the N loads RL, and the control unit 600 can control the adjustment unit 500 to adjust the matching impedance value of the impedance matching unit 400 according to the impedance value of the radio frequency source 20, the power division impedance value of each power distribution branch 200, the impedance value of each load RL, and the preset characteristic impedance value, so as to perform impedance matching on the radio frequency source 20, the N power distribution branches 200, and the N loads RL.

[0050] Among them, the preset characteristic impedance value can be 50Ω, 75Ω, etc., that is, the impedance values presented by the radio frequency source 20 and the N loads RL after impedance matching.

[0051] In some embodiments, the control unit 600 controls the adjustment unit 500 to adjust the power division impedance value of at least one power distribution branch 200 or not to adjust the power division impedance value of any power distribution branch 200 according to the power value of the initial radio frequency electric energy RF1 and the target power value of each load RL.

[0052] Please refer to Figure 4 , Figure 4 which is a schematic diagram of the power distribution branch in some embodiments of the present application. As Figure 2 , Figure 4As shown, each power distribution branch 200 includes a first capacitor C1 and a first inductor L1. One end of the first inductor L1 is connected to one end of the corresponding power distribution branch 200, and the other end of the first inductor L1 is connected to the other end of the corresponding power distribution branch 200. One end of the first capacitor C1 is connected to both one end of the corresponding power distribution branch 200 and one end of the first inductor L1, and the other end of the first capacitor C1 is connected to the ground GND. Among them, the power division impedance value of each power distribution branch 200 is obtained according to the capacitance value of the corresponding first capacitor C1 and the inductance value of the corresponding first inductor L1, and the capacitance value of each first capacitor C1 is adjustable so that the power division impedance value of each power distribution branch 200 is adjustable.

[0053] Therefore, in the above-mentioned radio frequency power distribution circuit 10 of the present application, by setting that each power distribution branch 200 includes a first capacitor C1 and a first inductor L1, each power distribution branch 200 can have a power division impedance value, and the power division impedance value changes according to the change of the capacitance value of the first capacitor C1.

[0054] Among them, the adjustment end of each first capacitor C1 is a power division adjustment end, and the adjustment unit 500 is connected to the adjustment end of each first capacitor C1 to adjust the capacitance value of the first capacitor C1.

[0055] In some embodiments, the inductance values of each first inductor L1 are the same, and the first N value ratio relationship changes according to the change of the capacitance value of at least one first capacitor C1.

[0056] Therefore, in the above-mentioned radio frequency power distribution circuit 10 of the present application, the first N value ratio relationship can be obtained by calculating the ratio of the capacitance values of each first capacitor C1 and at least according to the inductance value of the first inductor L1.

[0057] In some embodiments, the product of the inductance value of each first inductor L1 and the capacitance value of the corresponding first capacitor C1 is the same, and the inductance value of each first inductor L1 is adjustable.

[0058] Please refer to Figure 5 , Figure 5 which is another schematic diagram of the radio frequency power distribution circuit in some embodiments of the present application. As Figure 5As shown, the radio frequency power distribution circuit 10 further includes a switch unit 700. One end of the switch unit 700 is connected to the other end of each power distribution branch 200, and the other end of the switch unit 700 is selectively connected to each load RL. Among them, the switch unit 700 is used to transmit the corresponding sub-radio frequency electrical energy RF2 to the corresponding load RL when conducting the connection path between any one power distribution branch 200 and the corresponding load RL, and to stop transmitting the corresponding sub-radio frequency electrical energy RF2 to the corresponding load RL when disconnecting the connection path between any one power distribution branch 200 and the corresponding load RL.

[0059] Therefore, in the above radio frequency power distribution circuit 10 of the present application, by setting the switch unit 700, the connection path between any one power distribution branch 200 and the corresponding load RL can be selectively conducted or disconnected to meet the needs of the load RL in different situations.

[0060] Specifically, when a certain load RL does not require the sub-radio frequency electrical energy RF2, by setting the switch unit 700 to disconnect the connection path between the load RL and the corresponding power distribution branch 200, the output of the sub-radio frequency electrical energy RF2 to the load RL can be conveniently stopped. And when the number of loads RL is large, for example, when N>3, the power value of the sub-radio frequency electrical energy RF2 obtained by each power distribution branch 200 is small and may not be able to meet the needs of each load RL. Therefore, the corresponding connection path can be selectively disconnected to first meet the needs of some loads RL.

[0061] In some embodiments, the control unit 600 can also be connected to the switch unit 700. The control unit 600 is also used to control the disconnection of the connection path between at least one load RL and the corresponding power distribution branch 200 when the sum of the target power values of the N loads RL is greater than the power value of the initial radio frequency electrical energy RF1, so that the sum of the target power values of the N loads RL is less than or equal to the power value of the initial radio frequency electrical energy RF1.

[0062] In some embodiments, the control unit 600 can also be connected to the radio frequency source 20. The control unit 600 is also used to control and adjust the power value of the initial radio frequency electrical energy RF1 so that the sum of the target power values of the N loads RL is equal to the power value of the initial radio frequency electrical energy RF1.

[0063] Furthermore, the switch unit 700 can include N switches, and the N switches are connected to the N power distribution branches 200 and the N loads RL in one-to-one correspondence. The control unit 600 can be connected to all N switches, and by controlling the conduction or disconnection of each switch, the switch unit 700 is selectively connected to each load RL.

[0064] In some embodiments, the control unit 600 may be a general-purpose processor such as a Central Processing Unit (CPU), or a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), a Field-Programmable Gate Array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, etc., which are logic control devices, or may also be a microprocessor such as a Micro Control Unit (MCU).

[0065] With the above structure, the radio frequency power distribution circuit 10 of the present application conveniently realizes uneven power distribution and can meet the power requirements of multiple loads RL.

[0066] Please refer to Figure 6 , Figure 6 which is a schematic diagram of a radio frequency power amplifier device in some embodiments of the present application. As Figure 6 shown, the present application further provides a radio frequency power amplifier device 1000, which includes a radio frequency source 20 and the radio frequency power distribution circuit 10 in any of the foregoing embodiments.

[0067] Please refer to again Figure 1 . As Figure 1 shown, the radio frequency power distribution circuit 10 includes an input end 100, N power distribution branches 200, and N output ends 300. The input end 100 is connected to one end of each power distribution branch 200, and the other ends of the N power distribution branches 200 are correspondingly connected to the N output ends 300. The input end 100 is used to input initial radio frequency electrical energy RF1. Each power distribution branch 200 has a corresponding power division impedance value. The N power distribution branches 200 are used to distribute the initial radio frequency electrical energy RF1 to obtain N corresponding sub-radio frequency electrical energies RF2 respectively. Among them, the power value of each sub-radio frequency electrical energy RF2 is related to the power division impedance value of the corresponding power distribution branch 200. The N output ends 300 are used to be correspondingly connected to the N loads RL to transmit the N sub-radio frequency electrical energies RF2 to the N loads RL correspondingly, where N≥2. Among them, the power division impedance value of at least one power distribution branch 200 is different from the power division impedance values of other power distribution branches 200, so that the power value of the sub-radio frequency electrical energy RF2 obtained by at least one power distribution branch 200 is different from the power values of other power distributions.

[0068] Among them, for the more specific structure of the radio frequency power distribution circuit 10, reference can be made to the relevant content of the radio frequency power distribution circuit 10 in any of the foregoing embodiments, which will not be elaborated herein.

[0069] Please refer to Figure 7 , Figure 7 which is a schematic diagram of a radio frequency power supply system in some embodiments of the present application. As Figure 7 shown, the present application further provides a radio frequency power supply system 1, and the radio frequency power supply system 1 includes the radio frequency power amplifier device 1000 of any of the foregoing embodiments.

[0070] Through the above structures, the radio frequency power distribution circuit 10, the radio frequency power amplifier device 1000 and the radio frequency power supply system 1 of the present application conveniently achieve uneven power distribution and can meet the power requirements of multiple loads RL.

[0071] The above description is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application can easily think of changes or substitutions, which should all be covered within the protection scope of the present application; without conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A radio frequency power distribution circuit, characterized in that: It comprises an input end, N power distribution branches and N output ends, wherein the input end is connected to one end of each power distribution branch, and the other ends of the N power distribution branches are connected to the N output ends in a one-to-one correspondence; The input end is used to input initial radio frequency electrical energy; Each power distribution branch has a corresponding power distribution impedance value, and the N power distribution branches are used to distribute the initial radio frequency electric energy to obtain N corresponding sub-radio frequency electric energies, wherein the power value of each sub-radio frequency electric energy is related to the power distribution impedance value of the corresponding power distribution branch; The N output terminals are used to be connected to the N loads in a one-to-one correspondence, so as to transmit the N sub-RF electrical energies to the N loads in a corresponding manner, wherein N≥2; Among them, the power division impedance value of at least one power distribution branch is different from the power division impedance values ​​of other power distribution branches, so that the power value of the sub-RF electric energy obtained by at least one power distribution branch is different from the power values ​​of other power distribution branches.

2. The radio frequency power distribution circuit according to claim 1, characterized in that: The ratio of the power values ​​of the sub-RF electric energies obtained by any two power distribution branches is related to the ratio of the power division impedance values ​​of the two power distribution branches.

3. The radio frequency power distribution circuit according to claim 2, characterized in that: The N power division impedance values ​​form a first N value proportional relationship according to their respective ratio relationships, the first N value proportional relationship includes N equivalent impedance values ​​corresponding to the N power division impedance values ​​in sequence, and the N sub-RF electric energies also form a second N value proportional relationship according to their respective power value ratio relationships, the second N value proportional relationship includes N equivalent power values ​​corresponding to the power values ​​of the N sub-RF electric energies in sequence; The first N value ratio relationship is related to the second N value ratio relationship.

4. The radio frequency power distribution circuit according to claim 3, characterized in that: The input end is used to be connected to a radio frequency source to input the initial radio frequency electric energy output by the radio frequency source; The RF power amplification circuit further includes an impedance matching unit, one end of which is connected to the input end, and the other end of which is connected to one end of each power distribution branch; The impedance matching unit has an adjustable matching impedance value, and is used to perform impedance matching on the radio frequency source, the N power distribution branches, and the N loads.

5. The radio frequency power distribution circuit according to claim 4, characterized in that: The power distribution impedance value of each power distribution branch is adjustable, and the second N value ratio changes according to the change of the power distribution impedance value of at least one power distribution branch.

6. The radio frequency power distribution circuit according to claim 5, characterized in that: Each power distribution branch further includes a power division adjustment end, and the impedance matching unit further includes a matching adjustment end; the radio frequency power amplification circuit further includes an adjustment unit, and the adjustment unit is connected to the power division adjustment end of each power distribution branch, and the adjustment unit is connected to the matching adjustment end of the impedance matching unit; The adjusting unit is used to adjust the power distribution impedance value of each power distribution branch and to adjust the impedance matching value of the impedance matching unit.

7. The radio frequency power distribution circuit according to claim 6, characterized in that: The radio frequency power amplification circuit further includes a control unit, and the control unit is connected to the adjustment unit; Among them, the control unit is used to control the adjustment unit to adjust the power division impedance value of at least one power distribution branch or not adjust the power division impedance value of any power distribution branch at least according to the target power value of each load, so that the first N value ratio relationship is the target first N value ratio relationship, so that the power values ​​of the N sub-RF electric energies obtained by the N power distribution branches correspond to the target power values ​​of the N loads; the control unit is also used to control the adjustment unit to adjust the matching impedance value of the impedance matching unit according to the impedance value of the RF source, the power division impedance value of each power distribution branch, the impedance value of each load and the preset characteristic impedance value, so as to perform impedance matching on the RF source, the N power distribution branches and the N loads.

8. The radio frequency power distribution circuit according to claim 5, characterized in that: Each power distribution branch includes a first capacitor and a first inductor, one end of the first inductor is connected to one end of the corresponding power distribution branch, the other end of the first inductor is connected to the other end of the corresponding power distribution branch, one end of the first capacitor is connected to one end of the corresponding power distribution branch and one end of the first inductor, and the other end of the first capacitor is connected to the ground; Among them, the power division impedance value of each power distribution branch is obtained according to the capacitance value of the corresponding first capacitor and the inductance value of the corresponding first inductor, and the capacitance value of each first capacitor can be adjusted, so that the power division impedance value of each power distribution branch can be adjusted.

9. The radio frequency power distribution circuit according to claim 8, characterized in that: The inductance value of each first inductor is the same, and the first N value ratio changes according to the change of the capacitance value of at least one first capacitor.

10. The radio frequency power distribution circuit according to claim 4, characterized in that: The RF power distribution circuit further includes a switch unit, one end of which is connected to the other end of each power distribution branch, and the other end of which is selectively connected to each load; In which, the switching unit is used to transmit the corresponding sub-RF power to the corresponding load when the connection path between any power distribution branch and the corresponding load is turned on, and to stop transmitting the corresponding sub-RF power to the corresponding load when the connection path between any power distribution branch and the corresponding load is turned off.

11. A radio frequency power amplifier device, characterized in that: It comprises a radio frequency source and a radio frequency power distribution circuit as described in any one of claims 1 to 9.

12. A radio frequency power supply system, characterized in that: Comprising the radio frequency power amplifier device as claimed in claim 11.

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