Crystal ingot OF corner automatic detection equipment and detection method thereof

Abstract

The invention relates to crystal ingot OF corner automatic detection equipment and a detection method thereof.The crystal ingot OF corner automatic detection equipment comprises a machine table, a measuring and fixing bottom plate and a protective cover, the measuring and fixing bottom plate is horizontally installed on the upper end face of the machine table, a crystal ingot placing table is transversely installed on the front portion of the upper end face of the measuring and fixing bottom plate, and a crystal ingot is installed on the crystal ingot placing table; a transmission arm is installed on the rear side of the crystal ingot containing table, a detection platform is horizontally installed on the transmission arm in a sliding mode, a photoelectric switch for detecting the plane of the end of a crystal ingot is installed on the detection platform, and a rotating arm motor installation table corresponding to the crystal ingot is installed on the right portion of the upper end face of the machine table. A rotating arm motor with a main shaft facing the crystal ingot is mounted on the rotating arm motor mounting table, and the main shaft of the rotating arm motor is connected with one end of the rotating arm. The device has the characteristics of simple structure, convenience in operation, high data reliability, good precision and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor silicon wafer manufacturing, and particularly relates to an automatic detection device for the OF rotation angle of an ingot and a detection method thereof. Background Art

[0002] For the existing ingot with resin strips adhered, it is necessary to manually measure the rotation angle between OF and the central axis (hereinafter referred to as: rotation angle) to compare whether the deviation between the actual adhesion angle and the measured angle during orientation exceeds the control range. Its measurement accuracy is greatly affected by human factors. In addition, the length of the ingot also needs to be measured manually with a ruler (the minimum scale is 1°. If the scale is smaller, it is not clear to the naked eye), and there is also a large measurement error. From the historical data of crystal orientation control and the experiment on the influence of the single crystal rotation angle on the crystal orientation, it is obtained that the single crystal with the X-axis crystal orientation deviated by 4° is greatly affected by the rotation angle deviation. Therefore, it is crucial to effectively detect the rotation angle deviation accuracy of the adhered resin strips. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide an automatic detection device for the OF rotation angle of an ingot and a detection method thereof. The method and the supporting device structure are reasonable and the operation is convenient. Using automatic measurement improves the accuracy (the reading accuracy is improved from the original minimum scale of 1° to 0.001°). The measurement data is automatically uploaded to the MES system for comparison without manual data recording. The whole detection process becomes time-saving and labor-saving, and the data has high reliability and good accuracy.

[0004] The technical solution adopted by the present invention to solve its technical problems is: to provide an automatic detection device for the OF rotation angle of an ingot, including a machine table, a bottom plate for measurement and fixation, and a protective cover. A bottom plate for measurement and fixation is horizontally installed on the upper end surface of the machine table. A crystal ingot placement table is horizontally installed at the front part of the upper end surface of the bottom plate for measurement and fixation. A crystal ingot is installed on the crystal ingot placement table. A transmission arm is installed at the rear side of the crystal ingot placement table. A detection platform is horizontally slidably installed on the transmission arm. A photoelectric switch for detecting the end plane of the crystal ingot is installed on the detection platform. A rotating arm motor installation platform corresponding to the crystal ingot is installed at the right part of the upper end surface of the machine table. A rotating arm motor with the main shaft facing the crystal ingot is installed on the rotating arm motor installation platform. The main shaft of the rotating arm motor is connected to one end of the rotating arm. A distance measuring sensor is installed at the other end of the rotating arm and corresponds to the outer surface of the crystal ingot. A protective cover covering the rotating arm motor installation platform is installed at the right part of the upper end surface of the machine table. An operation computer is installed on the protective cover.

[0005] In this technical solution, a transmission arm is provided to facilitate driving the detection platform to move horizontally, so that the photoelectric switch can detect the length of the ingot. A swivel arm motor is provided to rotate the swivel arm, and a swivel arm is installed to drive the distance measuring sensor, so that the distance measuring sensor can detect the distance between the distance measuring sensor and the outer surface of the ingot. The measured distance is used to facilitate the calculation computer to calculate the OF rotation angle.

[0006] The ingot placement table includes an ingot seat, a horizontal fixing groove and a resin strip. The ingot seat is horizontally installed on the bottom plate for measurement fixing, a horizontal fixing groove is provided in the middle of the ingot seat, and a resin strip is slidably installed in the horizontal fixing groove.

[0007] A servo motor for controlling the movement of the detection platform is installed at the right end of the transmission arm.

[0008] As a supplement to this technical solution, universal wheels are installed at the four corners of the lower end surface of the machine table.

[0009] As a supplement to this technical solution, a push-pull handle is installed at the upper right side of the machine table.

[0010] As a supplement to this technical solution, a docking shaft for docking with the main shaft of the swivel arm motor is provided on the swivel arm, and the docking shaft and the main shaft of the swivel arm motor are docked through a docking shaft sleeve.

[0011] A detection method for an automatic ingot OF rotation angle detection device includes the following specific steps:

[0012] Step 1: Bond one side of the resin strip and the ingot, and after completion, install the resin strip and the ingot in the horizontal fixing groove.

[0013] Step 2: There is a QR code on the ingot. Use a barcode scanner to scan the QR code to record the ingot number, and click the measurement start button on the calculation computer.

[0014] Step 3: Start the servo motor. The servo motor drives the transmission arm, and the transmission arm controls the movement of the detection platform. The photoelectric switch on the detection platform measures the horizontal length of the ingot, and the data is transmitted back to the calculation computer. The length of the ingot is calculated through software operation.

[0015] Step 4: At the same time, start the swivel arm motor. The main shaft of the swivel arm motor drives the swivel arm, and the swivel arm drives the distance measuring sensor. The distance measuring sensor rotates around the outer circle of the ingot, and the rotation angle is 180°. The distance between the detection point and the surface of the ingot is captured by the distance measuring sensor, and the data is automatically uploaded to the software. The software fits the cross-sectional contour of the ingot according to all the data in the coordinate system, and finally calculates the diameter of the ingot and the angle orientation of the flat side.

[0016] Step 5: Finally, the system will perform an arithmetic comparison between the measured data and the target angle value of the ingot to be measured on the system.

[0017] As a supplement to this technical solution, in Step 4, the swing arm motor uses a servo motor, and its rotation speed is: 5° per second to 6° per second.

[0018] As a supplement to this technical solution, in Step 4, the distance measuring sensor needs to measure 18,000 data points, and the distance measuring sensor needs to collect one data point every 0.01°.

[0019] As a supplement to this technical solution, the OF rotation angle of the ingot is located at the upper outer ring of the ingot.

[0020] Beneficial effects: The present invention relates to an automatic detection device for the OF rotation angle of an ingot and its detection method. By setting a transmission arm to conveniently drive the detection platform to move horizontally, the photoelectric switch can detect the length of the ingot. By setting a swing arm motor to rotate the swing arm, and by installing a swing arm to drive the distance measuring sensor, the distance measuring sensor can detect the distance between the distance measuring sensor and the outer surface of the ingot. Using the measured distance above, it is convenient for the arithmetic computer to calculate the OF rotation angle, and it has the characteristics of simple structure, convenient operation, high data reliability, and good accuracy. Description of the Drawings

[0021] Figure 1 is the front view of the present invention;

[0022] Figure 2 is the top view of the present invention;

[0023] Figure 3 is the structural view of the present invention;

[0024] Figure 4 is the top view of the present invention after removing the protective cover and the arithmetic computer.

[0025] Illustration: 1. Machine table, 2. Bottom plate for measurement fixation, 3. Ingot placement table, 4. Ingot, 5. Protective cover, 6. Arithmetic computer, 7. Universal wheel, 8. Ingot seat, 9. Horizontal fixing groove, 10. Resin strip, 11. Swing arm motor installation platform, 12. Swing arm motor, 13. Docking bushing, 14. Swing arm, 15. Distance measuring sensor, 16. Transmission arm, 17. Servo motor, 18. Control detection platform, 19. Photoelectric switch, 20. Push-pull handle. Detailed Embodiments

[0026] The present invention will be further described below in conjunction with specific embodiments. It should be understood that these embodiments are only used to illustrate the present invention and not to limit the scope of the present invention. In addition, it should be understood that after reading the content taught by the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms also fall within the scope defined by the appended claims of this application.

[0027] An embodiment of the present invention relates to an automatic detection device for the OF rotation angle of an ingot and its detection method. As shown in Figure 1 —4, it includes a machine table 1, a bottom plate 2 for measurement and fixation, and a shield 5. The bottom plate 2 for measurement and fixation is horizontally installed on the upper end surface of the machine table 1. A transverse ingot placement table 3 is installed at the front part of the upper end surface of the bottom plate 2 for measurement and fixation. An ingot 4 is installed on the ingot placement table 3. A transfer arm 16 is installed behind the ingot placement table 3. A detection platform 18 is horizontally slidably installed on the transfer arm 16. A photoelectric switch 19 for detecting the end plane of the ingot 4 is installed on the detection platform 18. A rotating arm motor mounting table 11 corresponding to the ingot 4 is installed at the right part of the upper end surface of the machine table 1. A rotating arm motor 12 with its main shaft facing the ingot 4 is installed on the rotating arm motor mounting table 11. One end of the main shaft of the rotating arm motor 12 is connected to one end of a rotating arm 14. A distance measuring sensor 15 is installed at the other end of the rotating arm 14. The distance measuring sensor 15 corresponds to the outer surface of the ingot 4. A shield 5 covering the rotating arm motor mounting table 11 is installed at the right part of the upper end surface of the machine table 1. An operation computer 6 is installed on the shield 5.

[0028] In this technical solution, the transfer arm 16 is provided to conveniently drive the detection platform 18 to move horizontally, so that the photoelectric switch 19 can detect the length of the ingot 4. The rotating arm motor 12 is provided to rotate the rotating arm 14. The rotating arm 14 is installed to drive the distance measuring sensor 15, so that the distance measuring sensor 15 can detect the distance between the distance measuring sensor 15 and the outer surface of the ingot 4. The above measured distance is used to conveniently calculate the OF rotation angle by the operation computer 6.

[0029] The ingot placement table 3 includes an ingot seat 8, a transverse fixing groove 9, and a resin strip 10. The ingot seat 8 is horizontally installed on the bottom plate 2 for measurement and fixation. A transverse fixing groove 9 is provided in the middle of the ingot seat 8. A resin strip 10 is slidably installed in the transverse fixing groove 9.

[0030] A servo motor 17 for controlling the movement of the detection platform 18 is installed at the right end of the transfer arm 16.

[0031] As a supplement to this technical solution, universal wheels 7 are installed at the four corners of the lower end surface of the machine table 1.

[0032] As a supplement to this technical solution, a push-pull handle 20 is installed at the upper right side of the machine table 1.

[0033] As a supplement to this technical solution, a docking shaft is provided on the rotating arm 14 and is docked with the main shaft of the rotating arm motor 12. The docking shaft and the main shaft of the rotating arm motor 12 are docked through a docking shaft sleeve 13.

[0034] A detection method for an ingot OF rotation angle automatic detection device, characterized in that it includes the following specific steps:

[0035] Step 1: Bond one side of the resin strip 10 and the ingot 4, and after completion, install the resin strip 10 and the ingot 4 in the horizontal fixing groove 9.

[0036] Step 2: A two-dimensional code is provided on the ingot 4. Use a barcode scanner to scan the two-dimensional code to record the number of the ingot 4, and click the measurement start button on the operation computer 6.

[0037] Step 3: Start the servo motor 17. The servo motor 17 drives the transmission arm 16. The transmission arm 16 controls the movement of the detection platform 18. The photoelectric switch 19 on the detection platform 18 measures the horizontal length of the ingot 4, and the data is transmitted back to the operation computer 6. The length of the ingot is calculated through software operation.

[0038] Step 4: At the same time, start the rotating arm motor 12. The main shaft of the rotating arm motor 12 drives the rotating arm 14. The rotating arm 14 drives the distance measuring sensor 15. The distance measuring sensor 15 rotates around the outer circle of the ingot 4, and the rotation angle is 180°. The distance between the detection point and the surface of the ingot 4 is captured through the distance measuring sensor 15, and the data is automatically uploaded to the software. The software fits all the data according to the coordinate system to obtain the cross-sectional profile of the ingot, and finally calculates the diameter of the ingot 4 and the angle orientation of the flat side.

[0039] Step 5: Finally, the system performs arithmetic comparison on the measured data and the target angle value of the ingot 4 to be measured on the system.

[0040] As a supplement to this technical solution, in Step 4, the rotating arm motor 12 adopts a servo motor, and its rotation speed is: 5° per second to 6° per second.

[0041] As a supplement to this technical solution, in Step 4, the distance measuring sensor 15 needs to measure 18,000 data points, and the distance measuring sensor 15 needs to collect one data point every 0.01°.

[0042] As a supplement to this technical solution, the OF rotation angle of the ingot 4 is located at the upper outer circle of the ingot 4.

[0043] Embodiment

[0044] First, 18,000 points are collected through the ranging sensor 15 under the control of the PLC, and then transmitted to the computer 1 for processing through the PLC index pointer method via Ethernet. (That is, L1, L2, L3…L18000).

[0045] After that, the computer 6 calculates the two-dimensional coordinates (Xc, Yc) of the 18,000 points.

[0046] For the swing arm L, the measured value of the sensor L1, X1 = (L - L1)COS0.01°, X2 = (L - L2)COS0.02°,

[0047] X3 = (L - L3)COS0.03°…X18000 = (L - L18000)COS180°;

[0048] Y1 = (L - L1)SIN0.01°, Y2 = (L - L2)SIN 0.02°,

[0049] Y3 = (L - L3)SIN 0.03°…Y18000 = (L - L18000)SIN 180°;

[0050] The obtained 18,000 points are assumed to fit a circle with the center (x, y) and radius R according to the least squares method.

[0051] According to (X1 - x) 2 +(Y1 - y) 2 = R 2 , the requirements for least squares fitting are:

[0052]

[0053] After simplifying the formula according to the fact that the minimum radius cannot be zero:

[0054] x = ∑Xi / N

[0055] y = ∑Yi / N

[0056]

[0057] Finally, after the points (x, y) and radius R of the fitted circle are obtained and the points deviating from the circle are calculated, the fitted straight line y = Kx + b is selected;

[0058] It is obtained that: the angle a of the included angle with the ray formed by (0, 0) to (250, 0);

[0059] That is: y = Kx + b can be regarded as y = Kx;

[0060] The range of the calculation result of the included angle a is 0° ≤ a ≤ 180°);

[0061] Derive the value conversion final angle result:

Claims

1. An automatic detection device for OF angle of ingot, characterized by: The machine comprises a platform (1), a measuring and fixing base plate (2) and a protective cover (5), wherein the measuring and fixing base plate (2) is horizontally mounted on the upper end surface of the platform (1), a crystal ingot placement platform (3) is horizontally mounted in front of the upper end surface of the measuring and fixing base plate (2), a crystal ingot (4) is mounted on the crystal ingot placement platform (3), a transmission arm (16) is mounted on the rear side of the crystal ingot placement platform (3), a detection platform (18) is horizontally slidably mounted on the transmission arm (16), a photoelectric switch (19) for detecting the end plane of the crystal ingot (4) is mounted on the detection platform (18), and the upper end surface of the platform (1) is provided with a plurality of optical sensors (19) for detecting the end plane of the crystal ingot (4). A rotating arm motor mounting platform (11) corresponding to the crystal ingot (4) is installed on the right side of the surface, and a rotating arm motor (12) with its main axis facing the crystal ingot (4) is installed on the rotating arm motor mounting platform (11). The main axis of the rotating arm motor (12) is connected to one end of a rotating arm (14), and a distance sensor (15) is installed on the other end of the rotating arm (14). The distance sensor (15) corresponds to the outer surface of the crystal ingot (4). A protective cover (5) covering the rotating arm motor mounting platform (11) is installed on the right side of the upper end surface of the machine (1), and a computing computer (6) is installed on the protective cover (5).

2. The automatic detection device for OF angle of ingot according to claim 1, characterized in that: The ingot placement platform (3) comprises an ingot seat (8), a transverse fixing groove (9) and a resin strip (10); the ingot seat (8) is transversely mounted on a measurement fixing base plate (2); a transverse fixing groove (9) is provided in the middle of the ingot seat (8), and a resin strip (10) is slidably mounted in the transverse fixing groove (9).

3. The automatic detection device for OF angle of ingot according to claim 1, characterized in that: A servo motor (17) for controlling the movement of the detection platform (18) is installed on the right end of the transmission arm (16).

4. The automatic detection device for OF angle of ingot according to claim 1, characterized in that: Universal wheels (7) are installed at the four corners of the lower end surface of the machine platform (1).

5. The automatic detection device for OF angle of ingot according to claim 1, characterized in that: A push-pull handle (20) is installed on the upper right side of the machine platform (1).

6. The automatic detection device for OF angle of ingot according to claim 1, characterized in that: The rotating arm (14) is provided with a docking shaft docked with the main shaft of the rotating arm motor (12), and the docking shaft and the main shaft of the rotating arm motor (12) are docked via a docking shaft sleeve (13).

7. A detection method of an automatic detection device for OF angle of ingot according to claims 1 to 6, characterized in that: The specific steps include: Step 1: bonding the resin strip (10) and one side of the crystal ingot (4), and after completion, installing the resin strip (10) and the crystal ingot (4) in the transverse fixing groove (9); Step 2: A QR code is set on the ingot (4). Use a barcode scanner to scan the QR code to record the number of the ingot (4), and click a measurement start button on the calculation computer (6); Step 3: Start the servo motor (17), the servo motor (17) drives the transmission arm (16), the transmission arm (16) controls the detection platform (18) to move, the photoelectric switch (19) on the detection platform (18) measures the lateral length of the crystal ingot (4), and transmits the data back to the calculation computer (6), and calculates the length of the crystal rod through the software; Step 4: At the same time, the arm motor (12) is started, the main shaft of the arm motor (12) drives the rotating arm (14), the rotating arm (14) drives the distance sensor (15), the distance sensor (15) rotates around the outer ring of the crystal ingot (4), and the rotation angle is 180°. The distance sensor (15) captures the distance between the detection point and the surface of the crystal ingot (4), and then automatically uploads the data to the software. The software fits all the data according to the coordinate system to the cross-sectional profile of the crystal rod, and finally calculates the diameter of the crystal ingot (4) and the angular orientation of the flat edge; Step 5: Finally, the system performs calculations and comparisons on the measured data with the target angle value of the measured crystal ingot (4) on the system.

8. The detection method of the automatic detection device for OF angle of ingot according to claim 7, characterized in that: In step 4, the arm motor (12) is a servo motor with a rotation speed of 5° per second to 6° per second.

9. The detection method of the automatic detection device for OF angle of ingot according to claim 7, characterized in that: In step 4, the distance measuring sensor (15) needs to measure 18,000 data points, and the distance measuring sensor (15) needs to collect one data point every time it rotates 0.01°.

10. The detection method of the automatic detection device for OF angle of ingot according to claim 7, characterized in that: The OF corner of the crystal ingot (4) is located at the upper outer circle of the crystal ingot (4).

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