Coating equipment and process method thereof

Abstract

The invention provides coating equipment and a process method thereof, and the coating equipment comprises a rotary valve mechanism which is provided with an input channel and N output channels, the input channel is used for being communicated with a remote plasma source, when the rotary valve mechanism is opened, the input channel can convey cleaning gas to the N output channels, and when the rotary valve mechanism is closed, the N output channels can convey the cleaning gas to the N output channels; conveying of the cleaning gas to the N output channels is stopped; and the spraying mechanism is hollow inside and is divided into N areas. According to the invention, the clean gas can be distributed to the N output channels through one rotary valve mechanism, and the output channels are mutually independent, so that the clean gas in the N output channels can be independently conveyed to the N areas of the spraying mechanism and finally reaches the reaction chamber. And the on-off control of the cleaning gas of the N output channels is realized through one rotary valve mechanism, so that the overall structure of the equipment is simplified, and the on-off control of the cleaning gas is simpler.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and particularly relates to a coating equipment and a process method thereof. Background Art

[0002] In the deposition process, after processes such as deposition are carried out in the reaction chamber, the reaction chamber needs to be cleaned to remove process gas residues that may have formed on the chamber walls. A common method is to use a Remote Plasma Source (RPS) for chamber cleaning. The Remote Plasma Source (RPS) excites the cleaning gas through radio frequency or microwave to generate plasma. The free radicals (activated gas molecules) generated after the cleaning gas is excited can play a cleaning role.

[0003] In the deposition equipment, the spraying mechanism usually has multiple pipelines, and process gas or cleaning gas can be introduced into the reaction chamber through the pipelines. In the prior art, usually a valve is separately configured on each pipeline to separately control the on-off of the gas in each pipeline, and the structure is complex.

[0004] In view of this, it is necessary to provide a coating equipment and a process method thereof to solve the above problems. Summary of the Invention

[0005] The purpose of the present invention is to provide a coating equipment to improve the problem that a valve is separately configured on each pipeline in the prior art, resulting in a complex structure.

[0006] The present invention provides a coating equipment, including: A rotary valve mechanism, having an input channel and N output channels, the input channel is used to communicate with the remote plasma source, and N is a positive integer greater than 1; A spraying mechanism, which is hollow inside and divided into N regions, the regions are arranged in one-to-one correspondence with the output channels and the regions are communicated with the corresponding output channels.

[0007] The beneficial effect of the coating equipment provided by the present invention is that: through a rotary valve mechanism, the cleaning gas can be distributed to N output channels, and the output channels are independent of each other, so that the cleaning gas in the N output channels can be independently transported to the N regions of the spraying mechanism and finally reach the inside of the reaction chamber. The on-off control of the cleaning gas in the N output channels is realized through a rotary valve mechanism, which simplifies the overall structure of the equipment, makes the on-off control of the cleaning gas simpler, and also reduces the manufacturing cost of the equipment.

[0008] In a possible embodiment, the rotary valve mechanism includes a hollow shell, a rotary valve body rotatably disposed within the shell, and a driving member drivingly connected to the rotary valve body and configured to drive the rotary valve body to rotate. The rotary valve body includes an inlet corresponding to the input channel and N outlets communicating with the inlet, and the outlets are arranged in one-to-one correspondence with the output channels.

[0009] The beneficial effects are as follows: By driving the rotary valve body to rotate through the driving member, the rotary valve body can be rotated to the open position to distribute the cleaning gas to the N output channels; or, the rotary valve body can be rotated to the closed position to stop introducing the cleaning gas into the N output channels.

[0010] In a possible embodiment, a gap is formed between the rotary valve body and the shell.

[0011] The beneficial effects are as follows: Since there is a gap between the rotary valve body and the shell, during the rotation of the rotary valve body, no mechanical friction will occur between the rotary valve body and the shell, and thus no particles will be generated. When the rotary valve body is in the closed position, purge gas is introduced into the gap through the input channel to fill the gap, which can prevent the leakage problem of the process gas introduced into the output channels.

[0012] In a possible embodiment, at least one end of the rotary valve body is provided with a rotating shaft, the rotating shaft is rotatably disposed on the shell, and a cleaning assembly is provided at the rotating shaft for removing contaminants at the rotating shaft.

[0013] The beneficial effects are as follows: By providing a cleaning assembly at the rotating shaft to remove contaminants at the rotating shaft, it can prevent the contaminants from entering the gap along the rotating shaft and causing pollution problems.

[0014] In a possible embodiment, a part of the rotating shaft extends out of the shell to form a protruding portion. The cleaning assembly includes an air inlet member disposed on the shell and surrounding the protruding portion, and an exhaust member disposed on a side of the air inlet member away from the shell and surrounding the protruding portion. An air inlet chamber surrounding the protruding portion is formed in the air inlet member, and an exhaust chamber surrounding the protruding portion is formed in the exhaust member. The air inlet chamber communicates with the gap and the exhaust chamber respectively.

[0015] In a possible embodiment, the cleaning assembly includes an air inlet pipeline disposed on the air inlet member and communicating with the air inlet chamber, and an exhaust pipeline disposed on the exhaust member and communicating with the exhaust chamber. The air inlet pipeline is connected to a cleaning gas supply assembly, and the exhaust pipeline is connected to an air extraction assembly.

[0016] The beneficial effects are as follows: The cleaning gas supply component introduces cleaning gas into the intake chamber through the intake pipeline to blow away the pollutants on the rotating shaft. At the same time, the air extraction component extracts air, so that the pollutants are taken away together with the cleaning gas through the exhaust chamber and the exhaust pipeline, avoiding the pollution problem caused by the pollutants entering the gap along the rotating shaft.

[0017] In a possible embodiment, the side of the exhaust member away from the intake member and the protruding portion are sealed by a seal.

[0018] The beneficial effects are as follows: The seal plays a sealing role between the side of the exhaust member away from the intake member and the protruding portion, and makes the rotation of the rotating shaft smoother through the bearing.

[0019] In a possible embodiment, gas transmission channels are respectively provided on the housing at positions corresponding to each output channel. The gas transmission channels are arranged close to the rotary valve body and communicated with the output channels.

[0020] The beneficial effects are as follows: Through the gas transmission channels of each output channel, air can be separately introduced into each output channel.

[0021] In a possible embodiment, the housing further includes a connecting portion provided in the gas transmission channel. The connecting portion partially blocks the pipe orifice of the output channel, and the gas transmission channel passes through the housing and the connecting portion at the position of the output channel.

[0022] The beneficial effects are as follows: When the process gas enters the gas transmission channel, it will flow along the path of the gas transmission channel, pass through the housing and the connecting portion at the position of the output channel, and enter the output channel.

[0023] In a possible embodiment, the coating equipment further includes an intake pipe mechanism fixedly connected between the rotary valve mechanism and the spraying mechanism. N intake channels are provided in the intake pipe mechanism. The intake channels are arranged in one-to-one correspondence with the output channels, and both ends of the intake channel are communicated with the corresponding output channel and the corresponding area respectively.

[0024] The beneficial effects are as follows: The N intake channels in the intake pipe mechanism introduce the gas in the corresponding output channel into the corresponding area through the intake channels.

[0025] In a possible embodiment, the coating equipment further includes an arc-proof component with insulation provided on the inner wall of the intake channel.

[0026] The beneficial effects are as follows: By providing an arc-proof component with insulation on the inner wall of the intake channel, it can effectively prevent the gas from being ionized and generating arcs when passing through the intake channel.

[0027] In a possible embodiment, the arc-proof component includes a plurality of first arc-proof members spaced along the extending direction of the intake passage and provided on the inner wall of the intake passage. The first arc-proof members are insulating and have through holes in the middle.

[0028] In a possible embodiment, the arc-proof component includes a plurality of second arc-proof members spaced along the extending direction of the intake passage and provided on the inner wall of the intake passage. The second arc-proof members are insulating and are provided with a plurality of perforations at intervals.

[0029] In a possible embodiment, the arc-proof component includes a plurality of first arc-proof members and a plurality of second arc-proof members spaced along the extending direction of the intake passage and provided on the inner wall of the intake passage. The first arc-proof members and the second arc-proof members are arranged alternately and are both insulating. The first arc-proof members have through holes in the middle, and the second arc-proof members are provided with a plurality of perforations at intervals.

[0030] The beneficial effect is that the gas needs to flow through the through holes of the first arc-proof members and / or the perforations of the second arc-proof members. The first arc-proof members and the second arc-proof members can effectively prevent the current from passing through the gas, thereby avoiding ionization and arcing.

[0031] In a possible embodiment, the coating device further includes a gas mixing component respectively communicating with the N output channels. The gas mixing component is used for mixing process gases and separately conveying the mixed process gases to the N output channels.

[0032] The beneficial effect is that the process gases are first mixed and then separately introduced into the N output channels, and then uniformly reach the surface of the substrate through the N regions.

[0033] The present invention also provides a process method for a coating device, including: When a coating reaction occurs, the rotary valve mechanism is closed, and process gases are respectively conveyed to the N output channels. The process gases in the N output channels respectively pass through the N regions, reach the surface of the substrate located in the reaction chamber and undergo a coating reaction, and at the same time, the substrate is in a rotating state.

[0034] The beneficial effect of the process method provided by the present invention is that by closing the rotary valve mechanism, the conveyance of the cleaning gas through the input channel to the N output channels can be stopped, so as to facilitate the conveyance of the process gases.

[0035] In a possible embodiment, after the coating reaction is completed, the rotary valve mechanism is opened, and the remote plasma source excites the cleaning gas and transports it to the input channel. The cleaning gas is distributed by the rotary valve mechanism to the N output channels, and then reaches the reaction chamber through the N regions of the spraying mechanism.

[0036] The beneficial effect is that by opening the rotary valve mechanism, the input channel can transport the cleaning gas to the N output channels. The cleaning gas is distributed to the N output channels and then reaches the reaction chamber through the N regions of the spraying mechanism, achieving full cleaning of the spraying mechanism and the reaction chamber. Description of the Drawings

[0037] Figure 1 Schematic diagram of the coating equipment of the present invention in an embodiment.

[0038] Figure 2 Schematic diagram of the coating equipment of the present invention in another embodiment.

[0039] Figure 3 Schematic diagram of the remote plasma source and the rotary valve mechanism of the coating equipment of the present invention in an embodiment.

[0040] Figure 4 Schematic diagram of the remote plasma source and the rotary valve mechanism of the coating equipment of the present invention in another embodiment.

[0041] Figure 5 Schematic diagram of the rotary valve body of the coating equipment of the present invention.

[0042] Figure 6 Partial perspective view of the rotary valve mechanism of the coating equipment of the present invention.

[0043] Figure 7 Cross-sectional view at the output channel of the coating equipment of the present invention in an embodiment.

[0044] Figure 8 Schematic diagram of the intake channel of the coating equipment of the present invention.

[0045] Figure 9 Schematic diagram of the first arc-proof member of the coating equipment of the present invention.

[0046] Figure 10 Schematic diagram of the second arc-proof member of the coating equipment of the present invention.

[0047] Figure 11 Schematic diagram of the gas mixing assembly of the coating equipment of the present invention.

[0048] Description of the reference numerals: 100, remote plasma source; 200, rotary valve mechanism; 210, housing; 211, input channel; 212, output channel; 213, gas delivery channel; 2131, first gas channel section; 2132, second gas channel section; 214, connecting portion; 215, gap; 220, rotary valve body; 221, inlet; 222, outlet; 223, rotating shaft; 2231, protruding portion; 2232, rotating end; 230, driving member; 240, coupling; 250, cleaning assembly; 251, air intake member; 2511, air intake chamber; 252, exhaust member; 2521, exhaust chamber; 253, air intake pipeline; 254, exhaust pipeline; 260, sealing cover; 270, sealing member; 280, bearing; 300, air intake pipe mechanism Structure; 310, air inlet channel; 400, spray mechanism; 410, area; 500, anti-arcing component; 510, first anti-arcing member; 511, first plate; 5111, through hole; 512, first pipe; 520, second anti-arcing member; 521, second plate; 5211, perforation; 522, second pipe; 600, gas mixing component; 610, delivery pipeline; 611, first flow ratio controller; 612, first valve; 620, mixing pipeline; 630, gas mixing member; 640, branch pipeline; 641, second flow ratio controller; 642, second valve; 700, reaction chamber; 710, reaction chamber; 811, support platform; 812, support column; 813, drive adjustment component; 900, exhaust mechanism. DETAILED DESCRIPTION

[0049] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0050] In view of the problems existing in the prior art, an embodiment of the present invention provides a coating device, see Figure 1The coating device includes: a rotary valve mechanism 200 and a spray mechanism 400. The rotary valve mechanism 200 has an input channel 211 and N output channels 212. The input channel 211 is connected to a remote plasma source 100, and the remote plasma source 100 is used to excite a clean gas. When the rotary valve mechanism 200 is in an open position, the input channel 211 can deliver clean gas to the N output channels 212. When the rotary valve mechanism 200 is in a closed position, no clean gas is delivered to the N output channels 212, where N is a positive integer greater than 1. The spray mechanism 400 is hollow inside and is divided into N regions 410. The regions 410 are arranged one-to-one with the output channels 212 and the regions 410 are connected to the corresponding output channels 212.

[0051] The rotary valve mechanism 200 has the function of distributing the cleaning gas. When the rotary valve mechanism 200 is in the open position, the cleaning gas entering the rotary valve mechanism 200 from the input channel 211 will be distributed to N output channels 212, and enter N areas 410 respectively, and finally enter the reaction chamber 710, thereby forming N independent flow paths in the coating equipment. The on-off control of the cleaning gas of the N output channels 212 can be achieved through a rotary valve mechanism 200, which reduces the number of valve settings, simplifies the pipeline settings, and makes the on-off control of each cleaning gas simpler. This solution greatly simplifies the structure of the entire device and reduces the manufacturing cost of the device by simplifying the pipeline and reducing the number of valves.

[0052] In one embodiment, see Figure 3 and Figure 4 The rotary valve mechanism 200 includes a hollow housing 210, a rotary valve body 220 rotatably disposed in the housing 210, and a driving member 230 drivingly connected to the rotary valve body 220 and used to drive the rotary valve body 220 to rotate. The rotary valve body 220 includes an inlet 221 corresponding to the input channel 211 and N outlets 222 communicating with the inlet 221, and the outlets 222 are arranged one by one corresponding to the output channels 212. When the rotary valve body 220 rotates to the open position, the inlet 221 is aligned with and communicated with the input channel 211, and the N outlets 222 are aligned with and communicated with the corresponding output channels 212, respectively, so as to pass the clean gas into the output channels 212; when the rotary valve body 220 rotates to the closed position, the inlet 221 is staggered with the input channel 211, and the N outlets 222 are staggered with the corresponding output channels 212, respectively, so as to stop passing the clean gas into the output channels 212.

[0053] Driven by the driving member 230, the rotary valve body 220 can be switched between an open position and a closed position. When the rotary valve body 220 is in the open position, the inlet 221 is aligned and communicated with the input channel 211. At the same time, the N outlets 222 of the rotary valve body 220 are also respectively aligned and communicated with the corresponding input channels 211. The remote plasma source 100 conveys the excited cleaning gas to the input channel 211. The cleaning gas enters the rotary valve body 220 from the inlet 221, then flows into the N input channels 211 from the N outlets 222 respectively, and then enters the N regions of the spraying mechanism 400 respectively, so as to uniformly reach the surface of the substrate located in the reaction chamber 710. When the rotary valve body 220 is in the closed position, the inlet 221 is offset from the input channel 211, and the N outlets 222 are respectively offset from the corresponding input channels 211. The cleaning gas cannot enter from the inlet 221 of the rotary valve body 220, so as to stop introducing the cleaning gas into the input channel 211.

[0054] In one embodiment, referring to Figure 3 and Figure 4 , a gap 215 is formed between the rotary valve body 220 and the housing 210. When the rotary valve body 220 is in the closed position, purge gas is introduced into the gap 215 through the input channel 211. The purge gas is a gas that does not participate in the reaction. For example, inert gases such as argon. Due to the existence of the gap 215 between the rotary valve body 220 and the housing 210, during the rotation of the rotary valve body 220, there is no contact between the rotary valve body 220 and the housing 210, thus avoiding mechanical friction. Since mechanical friction will not only cause wear of the rotary valve body 220 and the housing 210, but also may generate tiny particles. If these particles enter the process gas, it will have an adverse impact on the product quality. Therefore, the structural design of the gap 215 in this solution can effectively guarantee the product quality. Moreover, when the rotary valve body 220 is in the closed position, purge gas is introduced into the gap 215 through the input channel 211, and the purge gas fills the gap 215 between the rotary valve body 220 and the housing 210, forming a gas pressure barrier, that is, by adjusting the pressure above the input end, to effectively block the leakage of the process gas introduced into the input channel 211 from the gap 215, ensuring airtightness and safety.

[0055] In one embodiment, referring to Figure 3 , the two ends of the rotary valve body 220 are respectively provided with rotating shafts 223, and the two rotating shafts 223 are respectively rotatably arranged on the housing 210. Cleaning assemblies 250 are respectively arranged at the two rotating shafts 223, and the cleaning assemblies 250 are used to remove pollutants at the rotating shafts 223.

[0056] Further, referring to Figure 3In the case where the rotating shafts 223 are respectively provided at both ends of the rotary valve body 220, one of the rotating shafts 223 is connected to the driving member 230, and the rotating shaft 223 is driven to rotate by the driving member 230, thereby driving the rotary valve body 220 to rotate.

[0057] In another embodiment, see Figure 4 A rotating shaft 223 is provided at one end of the rotary valve body 220, and the rotating shaft 223 is rotatably provided on the shell 210. A cleaning component 250 is provided at the rotating shaft 223, and the cleaning component 250 is used to clean the pollutants at the rotating shaft 223. The other end of the rotating shaft 223 is a rotating end 2232, and the rotating end 2232 is rotatably provided on the inner wall of the shell 210.

[0058] For further information, see Figure 4 In the case where a rotating shaft 223 is provided at one end of the rotary valve body 220 , the rotating shaft 223 is connected to the driving member 230 , and the rotating shaft 223 is driven to rotate by the driving member 230 , thereby driving the rotary valve body 220 to rotate.

[0059] Specifically, the driving member 230 may be a device such as a motor or a rotary cylinder that can drive the rotary valve body 220 to rotate. The specific type of the driving member 230 is not limited here and can be flexibly selected according to actual process requirements.

[0060] In one embodiment, see Figure 3 , Figure 4 and Figure 5 The rotating shaft 223 partially extends out of the shell body 210 to form a protruding portion 2231. The cleaning assembly 250 includes an air intake member 251 disposed on the shell body 210 and arranged around the protruding portion 2231, and an exhaust member 252 disposed on a side of the air intake member 251 away from the shell body 210 and arranged around the protruding portion 2231. An air intake chamber 2511 disposed around the protruding portion 2231 is formed in the air intake member 251, and an exhaust chamber 2521 disposed around the protruding portion 2231 is formed in the exhaust member 252. The air intake chamber 2511 is communicated with the gap 215 and the exhaust chamber 2521, respectively.

[0061] In one embodiment, see Figure 3 , Figure 4 and Figure 5, the cleaning assembly 250 further includes an intake pipe 253 disposed on the intake member 251 and communicating with the intake chamber 2511, and an exhaust pipe 254 disposed on the exhaust member 252 and communicating with the exhaust chamber 2521. The intake pipe 253 is connected to the cleaning gas supply assembly, and the exhaust pipe 254 is connected to the air extraction assembly. Cleaning gas is introduced into the intake chamber 2511 through the cleaning gas supply assembly (not shown in the figure). At the same time, the air extraction assembly (not shown in the figure) extracts air to carry away the contaminants at the rotating shaft 223. The cleaning gas supply assembly introduces high-speed flowing cleaning gas into the intake chamber 2511 through the intake pipe 253. Under the scouring of the high-speed air flow, the contaminants on the rotating shaft 223 can be effectively blown away. At the same time, the air extraction assembly extracts air, and the gas containing contaminants is extracted through the exhaust chamber 2521 and the exhaust pipe 254, avoiding the problem of contamination caused by the contaminants entering the gap 215 along the rotating shaft 223.

[0062] In one embodiment, referring to Figure 3 , Figure 4 and Figure 5 , the side of the exhaust member 252 away from the intake member 251 and the protruding portion 2231 are sealed by a seal 270. The seal 270 is an O-ring or the like, and the number and type of the seal 270 are not limited herein. Taking one example, the seal 270 is disposed on the side of the exhaust member 252 away from the intake member 251 and sleeved on the protruding portion 2231. When the rotating shaft 223 rotates, the rotating shaft 223 can rotate within the seal 270. At the same time, under the sealing action of the seal 270, effective sealing can be achieved between the protruding portion 2231 and the seal 270.

[0063] In a specific embodiment, referring to Figure 3 , Figure 4 and Figure 5 , vacuum grease is provided on the seal 270. Since the rotating shaft 223 needs to rotate within the seal 270, the vacuum grease on the seal 270 plays a lubricating role, which can reduce the friction between the seal 270 and the rotating shaft 223 and make the rotating shaft 223 rotate more smoothly. The vacuum grease on the protruding portion 2231 can be removed through the inflation of the cleaning gas supply assembly and the air extraction of the air extraction assembly in the foregoing solution.

[0064] In one embodiment, referring to Figure 3 , Figure 4 and Figure 5 , the protruding portion 2231 is rotatably disposed on the seal cover 260 through a bearing 280, and the number of the bearings 280 is not limited herein. By connecting the protruding portion 2231 and the seal cover 260 through the bearing 280, it can be ensured that the rotating shaft 223 can rotate smoothly and stably during the rotation process without excessive frictional resistance or jamming phenomenon.

[0065] In a specific embodiment, refer to Figure 3 and Figure 4 , there is vacuum grease on the bearing 280. The vacuum grease plays a lubricating role and can significantly reduce the friction of the bearing 280 during rotation.

[0066] In an embodiment, refer to Figure 3 and Figure 4 , a sealing cover 260 is provided on the outer wall of the housing 210 corresponding to the protruding portion 2231, and at least part of the cleaning assembly 250 is arranged inside the sealing cover 260. For example, the intake pipeline 253 extends outside the sealing cover 260 and is connected to the cleaning gas supply assembly, and the exhaust pipeline 254 extends outside the sealing cover 260 and is connected to the air extraction assembly. The design of the sealing cover 260 can prevent the protruding portion 2231 of the rotating shaft 223 from directly contacting the external environment, prevent pollutants in the external environment from falling on the rotating shaft 223, and thus play an insulating and protective role for the protruding portion 2231. The inside of the housing 210 is the vacuum side, and the sealing cover 260 is the atmosphere side. By arranging the cleaning assembly 250 on the protruding portion 2231 where the rotating shaft 223 partially extends out of the housing 210, the pollutants on the protruding portion 2231 can be discharged, and it is avoided that the pollutants enter the gap 215 along the rotating shaft 223 and cause pollution to the vacuum side.

[0067] In a specific embodiment, refer to Figure 3 and Figure 4 , the driving member 230 is located outside the sealing cover 260, and the protruding portion 2231 on the rotating shaft 223 corresponding to the driving member 230 extends outside the sealing cover 260 and is connected to the driving member 230. A coupling 240 is connected between the rotating shaft 223 and the driving member 230 for transmitting power, torque and torsion.

[0068] In an embodiment, refer to Figure 1 , air delivery channels 213 are respectively provided on the housing 210 at positions corresponding to each output channel 212. The air delivery channels 213 are arranged close to the rotary valve body 220 and communicate with the output channels 212. Through the air delivery channels 213 on each output channel 212, process gas can be introduced separately for each output channel 212.

[0069] Specifically, N is 2, 3 or 4, etc., and can be designed according to actual process requirements. Refer to Figure 1, there are also 3 outlets 222 on the rotary valve body 220, and correspondingly there are 3 output channels 212. Gas transmission channels 213 are respectively provided on the housing 210 at the positions corresponding to each output channel 212, that is, there are also 3 gas transmission channels 213. The gas transmission channels 213 are arranged close to the rotary valve body 220 and communicate with the output channels 212. The 3 output channels 212 respectively correspond to different areas 410 of the spraying mechanism 400. For example, the central area, the middle area, and the edge area of the spraying mechanism 400 are concentrically arranged to ensure that the process gas can reach the surface of the substrate more evenly.

[0070] In one embodiment, referring to Figure 6 and Figure 7 , the housing 210 further includes a connecting portion 214 provided in the gas transmission channel 213. The connecting portion 214 partially blocks the nozzle of the output channel 212. The gas transmission channel 213 passes through the housing 210 and the connecting portion 214 at the position of the output channel 212. A first channel opening of the gas transmission channel 213 is formed on the outer wall of the housing 210 at the position of the output channel 212, and a second channel opening of the gas transmission channel 213 is formed on the connecting portion 214 to communicate with the output channel 212. The connecting portion 214 partially blocks the nozzle of the output channel 212, which can be understood as that the connecting portion 214 does not block the flow path in the output channel 212, and the cleaning gas can still flow from the outside of the connecting portion 214 (i.e., the unblocked part). As Figure 10 shown, the connecting portion 214 is located in the radial direction of the output channel 212, and both sides of the connecting portion 214 are unblocked parts through which the cleaning gas can flow. By arranging the connecting portion 214 in the output channel 212 and the gas transmission channel 213 passing through the housing 210 and the connecting portion 214 at the position of the output channel 212, the process gas can be introduced into the output channel 212.

[0071] Referring to Figure 9 and Figure 10 Referring to Figure 6 and Figure 7, the gas transmission channel 213 includes a first airway segment 2131 and a second airway segment 2132 that are connected and communicate with each other. The first airway segment 2131 passes through the housing 210 and the connecting portion 214 located at the output channel 212. The setting direction of the second airway segment 2132 is the same as the pipeline direction of the output channel 212, that is, the second airway segment 2132 will bend within the connecting portion 214 to adjust the airflow path, so that after the process gas flows out of the second airway segment 2132, it can flow more smoothly along the direction of the output channel 212, without impacting the inner wall of the output channel 212 and causing a sudden change in the airflow direction, and avoiding the generation of vortex and turbulence problems. The second airway segment 2132 is located on the axis of the output channel 212, which can ensure that after the gas enters the output channel 212, it can be more evenly distributed within the entire range of the output channel 212, avoiding the generation of vortex and turbulence problems due to uneven airflow distribution.

[0072] In one embodiment, referring to Figure 2 , the coating equipment further includes an intake pipe mechanism 300 fixedly connected between the rotary valve mechanism 200 and the spraying mechanism 400. The intake pipe mechanism 300 is provided with N intake channels 310, and the intake channels 310 are arranged in one-to-one correspondence with the output channels 212. Both ends of the intake channel 310 are respectively communicated with the corresponding output channel 212 and the corresponding area 410.

[0073] In one embodiment, referring to Figure 2 , the coating equipment further includes an arc-proof component 500 provided on the inner wall of the intake channel 310 and having insulation properties. The arc-proof component 500 is made of ceramic or other insulating materials. The arc-proof component 500 has insulation properties and can significantly reduce the attachment and diffusion ability of the arc. When an arc attempts to propagate on the surface of the arc-proof component 500, due to the high-resistance characteristic of the arc-proof component 500, the energy of the arc will rapidly decay, so that it cannot continue to propagate, preventing the gas from being ionized and arcing in the intake channel 310.

[0074] In one embodiment, referring to Figure 8 , the arc-proof component 500 includes a plurality of first arc-proof members 510 spaced along the extending direction of the intake channel 310 and provided on the inner wall of the intake channel 310. The first arc-proof member 510 has insulation properties and a through hole 5111 is provided in the middle. The first arc-proof member 510 has insulation properties, that is, the first arc-proof member 510 has a very high resistivity. The high resistivity can prevent the flow of current, effectively prevent the propagation of the arc in the intake channel 310, reduce the attachment and diffusion of the arc in the intake channel 310, and prevent the gas from being ionized and arcing in the intake channel 310.

[0075] In one embodiment, referring to Figure 8, the arc-proof component 500 includes a plurality of second arc-proof members 520 that are spaced along the extending direction of the intake passage 310 and are provided on the inner wall of the intake passage 310. The second arc-proof members 520 are insulating and are provided with a plurality of perforations 5211 at intervals. The second arc-proof members 520 are insulating, that is, the second arc-proof members 520 have a very high resistivity. The high resistivity can prevent the flow of current, effectively prevent the propagation of the arc in the intake passage 310, greatly reduce the attachment and diffusion of the arc in the intake passage 310, and prevent the gas from being ionized and arcing in the intake passage 310.

[0076] In one embodiment, refer to Figure 8 , the arc-proof component 500 includes a plurality of first arc-proof members 510 and a plurality of second arc-proof members 520 that are spaced along the extending direction of the intake passage 310 and are provided on the inner wall of the intake passage 310. The first arc-proof members 510 and the second arc-proof members 520 are alternately arranged and are both insulating. A through hole 5111 is provided in the middle of the first arc-proof member 510, and a plurality of perforations 5211 are provided in the second arc-proof member 520 at intervals. The first arc-proof members 510 and the second arc-proof members 520 are insulating, that is, the first arc-proof members 510 and the second arc-proof members 520 have a very high resistivity. The high resistivity can prevent the flow of current, effectively prevent the propagation of the arc in the intake passage 310, reduce the attachment and diffusion of the arc in the intake passage 310, and moreover, the first arc-proof members 510 and the second arc-proof members 520 are alternately arranged, which also provides a stronger insulating effect and prevents the gas from being ionized and arcing in the intake passage 310. The combination of the through hole 5111 and the perforations 5211 optimizes the gas flow path and helps the uniform distribution of the plasma.

[0077] In one embodiment, refer to Figure 8 and Figure 10 , for the case where the arc-proof component 500 includes the first arc-proof member 510 and the second arc-proof member 520, the perforations 5211 are arranged close to the edge of the second arc-proof member 520. The plurality of perforations 5211 are spaced along the circumferential direction of the intake passage 310.

[0078] Since the plasma is charged, when the cleaning gas excited into the plasma enters the intake passage 310, an electric field will be generated in the intake passage 310. Electric field concentration is a phenomenon in which the intensity of the electric field increases significantly in a certain local area 410. This enhancement may lead to the occurrence of ionization and arcing. Ionization refers to the process in which gas molecules or atoms lose electrons under the action of an electric field and become positively charged ions and negatively charged electrons, while arcing refers to the process in which the charged particles generated by ionization form a current channel under the action of an electric field, resulting in a discharge phenomenon.

[0079] The perforations 5211 are arranged near the edge of the second arc-proofing member 520. Electric field lines can pass through the perforations 5211 and are dispersed into a larger area 410, avoiding the concentration of the electric field on the surface of the second arc-proofing member 520, making the distribution of the electric field more uniform within the entire intake passage 310, avoiding excessive local electric field intensity, and avoiding ionization and arcing. The through holes 5111 are located in the middle of the first arc-proofing member 510, that is, the through holes 5111 are located in the middle of the intake passage 310; the perforations 5211 are arranged near the edge of the second arc-proofing member 520, that is, the through holes 5111 are located at the edge within the intake passage 310. Through the combination of the through holes 5111 and the perforations 5211, not only is the gas flow promoted, but also the gas is distributed more uniformly within the entire intake passage 310.

[0080] In a specific embodiment, referring to Figure 8 、 Figure 9 and Figure 10 , the perforations 5211 and the through holes 5111 are arranged staggeredly in the vertical direction. Since ionization usually occurs in the area 410 with a higher electric field intensity, the staggered arrangement of the perforations 5211 and the through holes in the vertical direction helps to disperse the electric field, avoid the concentration of the electric field in a certain area 410, and prevent the gas from ionizing and arcing within the intake passage 310.

[0081] In an embodiment, referring to Figure 8 and Figure 9 , for the case where the arc-proofing assembly 500 includes the first arc-proofing member 510, the first arc-proofing member 510 includes a first plate portion 511 arranged horizontally and a first pipe portion 512 fixedly connected to the first plate portion 511 along the edge of the first plate portion 511. The first plate portion 511 and the first pipe portion 512 have insulation properties. The first pipe portion 512 is tubular and adapted to the intake passage 310. The first pipe portion 512 is arranged on the inner wall of the intake passage 310, and the through holes 5111 are arranged on the first plate portion 511. The first pipe portion 512 has insulation properties and is arranged on the inner wall of the intake passage 310, reducing the collision chance of gas molecules with the inner wall of the intake passage 310 and preventing the gas from ionizing and arcing at the inner wall of the intake passage 310.

[0082] In an embodiment, referring to Figure 8 and Figure 10, for the case where the arc prevention component 500 includes the second arc prevention member 520, the second arc prevention member 520 includes a second plate portion 521 arranged horizontally and a second pipe portion 522 fixedly connected to the second plate portion 521 along the edge of the second plate portion 521. The second plate portion 521 and the second pipe portion 522 have insulation properties. The second pipe portion 522 is tubular and adapted to the intake passage 310. The second pipe portion 522 is provided on the inner wall of the intake passage 310, and a perforation 5211 is provided on the second plate portion 521. The second pipe portion 522 has insulation properties and is provided on the inner wall of the intake passage 310, reducing the collision chance between gas molecules and the inner wall of the intake passage 310 and preventing gas ionization and arcing at the inner wall of the intake passage 310.

[0083] In a specific embodiment, refer to Figure 8 , Figure 9 and Figure 10 , for the case where the arc prevention component 500 includes the first arc prevention member 510 and the second arc prevention member 520, among two adjacent first arc prevention members 510 and second arc prevention members 520, the end face of the first pipe portion 512 of the first arc prevention member 510 and the end face of the second pipe portion 522 of the second arc prevention member 520 are arranged in contact with each other, so that the first pipe portions 512 of several first arc prevention members 510 and the second pipe portions 522 of several second arc prevention members 520 are continuously laid on the inner wall of the intake passage 310. When the gas passes through the set area 410 of the first arc prevention member 510 and the second arc prevention member 520 in the intake passage 310, it will not directly contact the inner wall of the intake passage 310. Since the first pipe portion 512 and the second pipe portion 522 have insulation properties, gas molecules are not easily ionized when passing through, preventing gas ionization and arcing at the inner wall of the intake passage 310.

[0084] In an embodiment, refer to Figure 1 and Figure 11 , the coating equipment further includes a gas mixing assembly 600 respectively communicated with the N output channels 212. The gas mixing assembly 600 is used for mixing process gases and separately conveying the mixed process gases to the N output channels 212.

[0085] In an embodiment, refer to Figure 1 and Figure 11, the gas mixing assembly 600 includes M delivery pipelines 610, a mixing pipeline 620, and N branch pipelines 640. One end of the mixing pipeline 620 is connected to the M delivery pipelines 610 respectively, and the other end of the mixing pipeline 620 is connected to the N gas delivery channels 213 respectively. M is a positive integer greater than 1. By delivering process gases to the M delivery pipelines 610 respectively, for example, the process gases in the M delivery pipelines 610 are different process gases. After the process gases in the M delivery pipelines 610 enter the mixing pipeline 620 and are mixed, they are distributed to the N branch pipelines 640, and enter the corresponding output channels 212 through the gas delivery channels 213 connected to the branch pipelines 640.

[0086] Further, referring to Figure 1 and Figure 11 , a gas mixing component 630 for gas mixing is provided on the mixing pipeline 620 to ensure that the process gases from the M delivery pipelines 610 can be quickly and fully mixed within the gas mixing component 630.

[0087] Even further, referring to Figure 2 , a first flow rate proportion controller 611 and a first valve 612 are provided on the delivery pipeline 610, and a second flow rate proportion controller 641 and a second valve 642 are provided on the branch pipeline 640. The first flow rate proportion controller 611 is used to monitor and adjust the flow rate proportion of the process gas between different delivery pipelines 610. The second flow rate proportion controller 641 is used to monitor and adjust the flow rate proportion of the mixed process gas between different branch pipelines 640. By adjusting each first flow rate proportion controller 611, it can be ensured that the flow rate of the process gas in each delivery pipeline 610 reaches a predetermined proportion, so as to meet the requirements of the component proportion of the mixed gas. According to the set proportion of the process gas flow rate in each area 410 of the spraying mechanism 400, by adjusting each second flow rate proportion controller 641 to adjust the flow rate of the mixed process gas in each branch pipeline 640, it can be ensured that the process gas can be more evenly distributed on the surface of the substrate, thereby ensuring the uniformity of the coating.

[0088] In one embodiment, referring to Figure 1 and Figure 2 , the coating equipment further includes a reaction chamber 700, a carrier table 811, support columns 812, and a driving and adjusting assembly 813. The spraying mechanism 400 is provided at the top of the reaction chamber 700, and a reaction chamber 710 is formed by enclosing the reaction chamber 700 and the spraying mechanism 400. The carrier table 811 is supported in the reaction chamber 700 by the support columns 812, and the driving and adjusting assembly 813 is used to drive the support columns 812 to move. The lifting movement of the support columns 812 can drive the substrate located on the carrier table 811 to move up and down to meet the requirements of the coating process.

[0089] In one embodiment, referring toFigure 1 and Figure 2 The coating device further includes an air extraction mechanism 900 provided on the reaction chamber 700 and communicating with the reaction chamber 710. The air extraction mechanism 900 is used to extract the remaining gas in the reaction chamber 710 during exhaust to accelerate the exhaust process.

[0090] The present invention also provides a process method for a coating device, including: When a coating reaction occurs, the rotary valve mechanism 200 is closed, and process gases are respectively supplied to N output channels 212. The process gases in the N output channels 212 respectively pass through N regions 410, reach the surface of the substrate located in the reaction chamber 710, and a coating reaction is carried out while the substrate is in a rotating state.

[0091] In one embodiment, closing the rotary valve mechanism 200 includes: rotating the rotary valve body 220 to a closed position so that the inlet 221 is staggered from the input channel 211, and the N outlets 222 are respectively staggered from the corresponding output channels 212.

[0092] In one embodiment, supplying process gases to the N output channels 212 respectively includes: supplying process gases to the N output channels 212 through N gas delivery channels 213 respectively.

[0093] In a specific embodiment, supplying process gases to the N output channels 212 through N gas delivery channels 213 respectively includes: supplying process gases to M delivery pipelines 610 respectively. The process gases in the M delivery pipelines 610 enter the mixing pipeline 620 for mixing and then are distributed to N branch pipelines 640. The mixed process gases in the N branch pipelines 640 are supplied to the N output channels 212 through the N gas delivery channels 213 respectively.

[0094] In one embodiment, the process gases in the N output channels 212 respectively pass through N regions 410, including: the mixed process gases in the N output channels 212 respectively enter N intake channels 310, and the mixed process gases in the N intake channels 310 respectively pass through N regions 410.

[0095] In one embodiment, when the rotary valve mechanism 200 is closed, purge gas is introduced into the gap 215 through the input channel 211.

[0096] In one embodiment, after the coating reaction is completed, the rotary valve mechanism 200 is opened, and the remote plasma source 100 excites cleaning gas and delivers it to the input channel 211. The cleaning gas is distributed to the N output channels 212 through the rotary valve mechanism 200, and then reaches the reaction chamber 710 through the N regions 410 of the spraying mechanism 400.

[0097] In one embodiment, opening the rotary valve mechanism 200 includes: rotating the rotary valve body 220 to the open position, aligning and communicating the inlet 221 with the input channel 211, and aligning and communicating the N outlets 222 with the corresponding output channels 212 respectively.

[0098] In one embodiment, the cleaning gas is distributed to the N output channels 212 through the rotary valve mechanism 200 and then reaches the reaction chamber 710 through the N regions 410 of the spraying mechanism 400, including: being distributed through the rotary valve body 220, the cleaning gas flows out from the N outlets 222 and enters the N output channels 212 respectively, the cleaning gas in the N output channels 212 enters the N intake channels 310 respectively, and the cleaning gas in the N intake channels 310 reaches the reaction chamber 710 through the N regions 410 respectively.

[0099] The process flow of the coating equipment of the present invention will be explained in detail below in conjunction with specific embodiments.

[0100] Taking the coating equipment applied to the PECVD process as an example, when the coating reaction occurs, the rotary valve body 220 is rotated to the closed position, and at the same time, purge gas is introduced into the gap 215 through the input channel 211 to achieve gas sealing. Process gases are respectively supplied to the M delivery pipelines 610. The process gases in the M delivery pipelines 610 enter the mixing pipeline 620 for mixing and then are distributed to the N branch pipelines 640. The mixed process gases in the N branch pipelines 640 are respectively supplied to the N output channels 212 through the N gas delivery channels 213. The mixed process gases in the N output channels 212 enter the N intake channels 310 respectively, and the mixed process gases in the N intake channels 310 reach the substrate surface evenly through the N regions 410 respectively. After the reaction is completed, the rotary valve body 220 is rotated to the open position. The cleaning gas is excited by the remote plasma source 100 and then enters the input channel 211. The cleaning gas enters the rotary valve body 220 from the inlet 221. After being distributed by the rotary valve body 220, it flows out from the N outlets 222 on the rotary valve body 220 and enters the N output channels 212 respectively. The cleaning gas in the N output channels 212 enters the N intake channels 310 respectively, and the cleaning gas in the N intake channels 310 reaches the reaction chamber 710 through the N regions 410 respectively to clean the intake pipe mechanism 300, the spraying mechanism 400, and the reaction chamber 710.

[0101] It should be noted that the introduction of the process application scenarios in the present invention is only for illustrative purposes and does not limit the actual process flow of this coating equipment.

[0102] In the description of the present invention, it should be understood that the terms "comprising" and "having" and any variations thereof used herein are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that comprises a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0103] It should be understood that the orientation or positional relationship indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0104] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, the meaning of "a plurality" is two or more.

[0105] Although the embodiments of the present invention have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are all within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical terms or scientific terms used herein should have the ordinary meaning understood by those of ordinary skill in the art to which the present invention pertains.

Claims

1. A coating device, characterized in that: include: A rotary valve mechanism having an input channel and N output channels, wherein the input channel is used to communicate with a remote plasma source, and N is a positive integer greater than 1; The spray mechanism is hollow inside and is divided into N areas, the areas are arranged in one-to-one correspondence with the output channels and the areas are connected to the corresponding output channels.

2. The coating device according to claim 1, characterized in that: The rotary valve mechanism includes a shell with a hollow interior, a rotary valve body rotatably disposed in the shell, and a driving member drivingly connected to the rotary valve body and used to drive the rotary valve body to rotate. The rotary valve body includes an inlet arranged corresponding to the input channel and N outlets connected to the inlet, and the outlets are arranged in a one-to-one correspondence with the output channels.

3. The coating device according to claim 2, characterized in that: A gap is formed between the rotary valve body and the housing.

4. The coating device according to claim 3, characterized in that: At least one end of the rotary valve body is provided with a rotating shaft, the rotating shaft is rotatably arranged on the shell, and a cleaning component is provided at the rotating shaft, and the cleaning component is used to clean the pollutants at the rotating shaft.

5. The coating device according to claim 4, characterized in that: The rotating shaft part extends out of the shell to form a protrusion, and the cleaning assembly includes an air intake member arranged on the shell and around the protrusion, and an exhaust member arranged on a side of the air intake member away from the shell and around the protrusion, an air intake chamber arranged around the protrusion is formed in the air intake member, and an exhaust chamber arranged around the protrusion is formed in the exhaust member, and the air intake chamber is communicated with the gap and the exhaust chamber respectively.

6. The coating device according to claim 5, characterized in that: The cleaning component includes an intake pipeline provided on the intake member and connected to the intake chamber and an exhaust pipeline provided on the exhaust member and connected to the exhaust chamber. The intake pipeline is connected to a cleaning gas supply component, and the exhaust pipeline is connected to an exhaust component.

7. The coating device according to claim 5, characterized in that: A sealing member is provided between the side of the exhaust member away from the intake member and the protruding portion.

8. The coating device according to claim 2, characterized in that: A gas delivery channel is respectively provided on the shell at a position corresponding to each of the output channels. The gas delivery channel is arranged close to the rotary valve body and communicated with the output channel.

9. The coating device according to claim 8, characterized in that: The shell further comprises a connecting portion arranged in the gas transmission channel, the connecting portion partially shields the pipe opening of the output channel, and the gas transmission channel passes through the shell located at the output channel and the connecting portion.

10. The coating device according to claim 1, characterized in that: It also includes an air intake pipe mechanism fixedly connected between the rotary valve mechanism and the spray mechanism, wherein N air intake channels are arranged in the air intake pipe mechanism, and the air intake channels are arranged in a one-to-one correspondence with the output channels, and the two ends of the air intake channels are respectively connected to the corresponding output channels and the corresponding areas.

11. The coating device according to claim 10, characterized in that: It also includes an arc-proof component which is arranged on the inner wall of the air inlet passage and has insulating properties.

12. The coating device according to claim 11, characterized in that: The arc-prevention assembly comprises a plurality of first arc-prevention members which are arranged at intervals on the inner wall of the air inlet passage along the extension direction of the air inlet passage. The first arc-prevention members are insulating and have a through hole in the middle.

13. The coating device according to claim 11, characterized in that: The arc prevention component includes a plurality of second arc prevention members which are arranged at intervals on the inner wall of the air inlet passage along the extension direction of the air inlet passage. The second arc prevention members are insulating and have a plurality of through holes arranged at intervals.

14. The coating device according to claim 11, characterized in that: The anti-arcing component includes a plurality of first anti-arcing parts and a plurality of second anti-arcing parts which are arranged at intervals on the inner wall of the air intake channel along the extension direction of the air intake channel. The first anti-arcing parts and the second anti-arcing parts are arranged alternately and both have insulating properties. A through hole is provided in the middle of the first anti-arcing part, and a plurality of through holes are provided at intervals on the second anti-arcing part.

15. The coating device according to any one of claims 1 to 14, characterized in that: It also includes a gas mixing assembly connected to the N output channels respectively, and the gas mixing assembly is used to mix the process gas and separately deliver the mixed process gas to the N output channels.

16. A process method for coating equipment according to any one of claims 1 to 15, characterized in that: include: During the coating reaction, the rotary valve mechanism is closed to deliver process gas to the N output channels respectively. The process gas in the N output channels passes through the N areas respectively, reaches the surface of the substrate in the reaction chamber and undergoes coating reaction, while the substrate is in a rotating state.

17. The process method of coating equipment according to claim 16, characterized in that: After the coating reaction is completed, the rotary valve mechanism is opened, the remote plasma source excites the cleaning gas and delivers it to the input channel, the cleaning gas is distributed to the N output channels through the rotary valve mechanism, and then reaches the reaction chamber through the N areas of the spray mechanism.

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