Knocking equipment for seed-crystal separation

Abstract

The invention discloses knocking equipment for seed crystal separation, which comprises a bracket and an automatic knocking unit mounted on the bracket, and the automatic knocking unit can automatically knock the upper end of a crucible cover. The equipment can automatically knock the upper end of the crucible cover, is convenient and simple to operate, low in labor intensity and high in working efficiency, and is provided with the first gradual change area L1, the constant area L2 and the second gradual change area L3, so that stable separation of the seed crystal and the crucible cover is accelerated under the condition that the crucible cover and the seed crystal are not damaged.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and particularly relates to a knocking device for seed crystal separation. Background Art

[0002] Silicon carbide (SiC) single crystal has excellent semiconductor physical properties such as high thermal conductivity, high breakdown voltage, extremely high carrier mobility, and very high chemical stability. It can be made into high-frequency and high-power electronic devices and optoelectronic devices that work under high-temperature and strong-radiation conditions, and has great application value in the fields of national defense, high technology, industrial production, power supply, and power transformation. It is regarded as the third-generation wide-bandgap semiconductor material with great development prospects.

[0003] At present, when preparing silicon carbide crystals, it is usually necessary to use a seed crystal (the seed crystal serves as the starting crystal and provides a template for the growth of new crystals). In actual installation, most use high-temperature glue to bond the seed crystal to the crucible cover. After the crystal preparation is completed, generally, the knocking method is used to knock the crucible cover, so that the bonding layer is broken and the seed crystal is separated from the crucible cover.

[0004] When using the knocking method to separate the seed crystal from the crucible cover, a carrier (used to carry the combination of the seed crystal and the crucible cover) and a knocking rod are required. Manually use the knocking rod to knock the combination, which has a large working labor intensity and low working efficiency. Therefore, the present application provides a knocking device for seed crystal separation to meet the needs. Summary of the Invention

[0005] The purpose of the present application is to provide a knocking device for seed crystal separation, which is used to solve the technical problems of large working labor intensity and low working efficiency caused by manually knocking the combination.

[0006] To achieve the above purpose, the present application provides the following technical solution: A knocking device for seed crystal separation includes a bracket, and also includes an automatic knocking unit installed on the bracket, and the automatic knocking unit can automatically knock the upper end of the crucible cover.

[0007] As a preferred implementation manner in this embodiment, the automatic knocking unit includes a mounting disk installed on the bracket, a rotating motor installed on the mounting disk, and a toothed ring; A plurality of U-shaped plates are circumferentially arranged in the inner cavity of the mounting disk. A reciprocating lead screw is rotatably arranged on each of the plurality of U-shaped plates, and a ball nut is threadedly sleeved on the reciprocating lead screw. Both side ends of the ball nut are fixed with side plates. One side plate is slidably penetrated by a rod body installed on the U-shaped plate, and an L-shaped rod is slidably penetrated through the other side plate. A roller is rotatably arranged at the upper end of the L-shaped rod, and an elastic impact ball is installed at the lower end of the L-shaped rod. An installation ring is fixed on the L-shaped rod, and the installation ring is connected to the side plate through a compression spring; A driving bar with a wavy structure is installed on the U-shaped plate, and the driving bar is located above the reciprocating lead screw. Plane bars with horizontal upper ends are arranged at both ends of the driving bar, and the upper end surfaces of the plane bars are located between the peak surface and the valley surface of the driving bar; The toothed ring is rotatably arranged in the inner cavity of the mounting disc, and the toothed ring is in tooth engagement with the gear on the output shaft of the rotating motor and the rotating gears arranged at one ends of a plurality of the reciprocating lead screws.

[0008] As a preferred implementation manner in this embodiment, it further includes a knocking intensity self-changing unit, which can automatically change the knocking intensity between the impact ball and the crucible cover according to the needs of the knocking part during the knocking process.

[0009] As a preferred implementation manner in this embodiment, the knocking intensity self-changing unit includes a first gradient area L1, a constant area L2, and a second gradient area L3 arranged in sequence on the driving bar; The height of the wave peaks in the first gradient area L1 gradually increases from right to left; The wave peaks and wave valleys in the constant area L2 remain unchanged, and the height of the wave peaks in the constant area L2 is the height of the highest wave peak in the first gradient area L1; The height of the wave peaks in the second gradient area L3 gradually decreases; The distances between the wave peaks and wave valleys in the first gradient area L1, the constant area L2, and the second gradient area L3 are the same, and the heights of the wave valleys in the first gradient area L1, the constant area L2, and the second gradient area L3 are the same.

[0010] As a preferred implementation manner in this embodiment, the first gradient area L1 accounts for 1 / 7 of the length of the driving bar, the constant area L2 accounts for 5 / 7 of the length of the driving bar, and the second gradient area L3 accounts for 1 / 7 of the length of the driving bar.

[0011] As a preferred implementation manner in this embodiment, it further includes an angle adjustment motor for driving the mounting disc to rotate intermittently, and the output end of the angle adjustment motor is connected to the axis center at the upper end of the mounting disc.

[0012] As a preferred implementation manner in this embodiment, the angle adjustment motor drives the mounting disc to rotate 15 to 20° each time.

[0013] In summary, the technical effects and advantages of the present invention: The structure of the present invention is reasonable. This device can automatically knock the upper end of the crucible cover, with convenient and simple operation, low labor intensity and high work efficiency; In the present invention, a first gradient region L1, a constant region L2, and a second gradient region L3 are provided to accelerate the stable separation of the seed crystal from the crucible lid without damaging the crucible lid and the seed crystal. Description of the Drawings

[0014] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those skilled in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0015] Figure 1 Schematic three-dimensional structure diagram of the present invention; Figure 2 For Figure 1 Schematic upward view and partial enlarged structure diagram in Figure 3 For Figure 2 Schematic U-shaped plate structure diagram in Figure 4 For Figure 3 Schematic enlarged structure diagram at position A in Figure 5 For Figure 3 Schematic drive bar structure diagram in Figure 6 Distribution diagram of the drive bar area.

[0016] In the figures: 101, support; 102, mounting plate; 103, rotary bearing; 104, vertical rod; 105, angle adjustment motor; 106, rotary motor; 107, toothed ring; 108, U-shaped plate; 109, rod body; 110, drive bar; 111, reciprocating lead screw; 112, rotary gear; 113, flat bar; 114, ball nut; 115, L-shaped bar; 116, roller; 117, compression spring; 118, mounting ring; 119, impact ball. Detailed Embodiment

[0017] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.

[0018] Embodiment: A knocking device for separating a seed crystal includes a support 101, and further includes an automatic knocking unit installed on the support 101, and the automatic knocking unit can automatically knock on the upper end of the crucible lid.

[0019] As a preferred implementation manner in this embodiment, as Figures 1-5 shown, the automatic knocking unit includes a mounting disc 102 mounted on a bracket 101, a rotary motor 106 mounted on the mounting disc 102, and a toothed ring 107; A plurality of U-shaped plates 108 are circumferentially arranged in the inner cavity of the mounting disc 102. A reciprocating lead screw 111 is rotatably arranged on each of the plurality of U-shaped plates 108. A ball nut 114 is threadedly sleeved on the reciprocating lead screw 111. Side plates are fixed to both side ends of the ball nut 114. One side plate is slidably penetrated by a rod body 109 mounted on the U-shaped plate 108. An L-shaped rod 115 is slidably penetrated through the other side plate. A roller 116 is rotatably arranged at the upper end of the L-shaped rod 115. An elastic impact ball 119 is mounted at the lower end of the L-shaped rod 115. An installation ring 118 is fixed on the L-shaped rod 115. The installation ring 118 is connected to the side plate by a compression spring 117; A driving strip 110 with a wavy structure is mounted on the U-shaped plate 108. The driving strip 110 is located above the reciprocating lead screw 111. Plane rods 113 with horizontal upper ends are arranged at both ends of the driving strip 110. The upper end surface of the plane rod 113 is located between the wave crest surface and the wave trough surface of the driving strip 110; The toothed ring 107 is rotatably arranged in the inner cavity of the mounting disc 102. The toothed ring 107 is in tooth engagement with the gear on the output shaft of the rotary motor 106 and the rotary gears 112 arranged at one ends of the plurality of reciprocating lead screws 111.

[0020] During use, the combination of the seed crystal and the crucible cover can be directly placed on the carrier, so that the upper end of the crucible cover is directly below the impact ball 119, and the lower end of the impact ball 119 contacts the upper end of the crucible cover. Control the rotary motor 106 to work. Drive the plurality of rotary gears 112 to rotate through the toothed ring 107, and then drive the plurality of reciprocating lead screws 111 to rotate simultaneously, so that the plurality of ball nuts 11 drive the L-shaped rod 115 to perform a linear motion along the axis of the crucible cover and outward. During the movement, the roller 116 will contact the convex part on the driving strip 110 and cause the L-shaped rod 115 to move upward. The compression spring 117 is stretched. When the roller 116 passes over the convex part, the L-shaped rod 115 moves downward to return to its original position through the compression spring 117, and the impact ball 119 contacts and collides with the upper end of the crucible cover by relying on the elastic force of the compression spring 117 and the inertial force of the movement, thereby breaking the bonding layer, and finally separating the crucible cover from the seed crystal, automatically performing the knocking operation, which is convenient and simple to operate, has a low labor intensity and high work efficiency.

[0021] It should be noted that: First, the wafers produced by our company are mainly 12 inches and 8 inches in size. The crucible lids required for the corresponding seed crystals are 14 inches and 10 inches respectively. When tapping the upper ends of the 14-inch and 10-inch crucible lids respectively, the number of corresponding reciprocating lead screws 111 is generally not less than eight groups and not less than six groups. Second, during the entire tapping process, the roller 116 does not contact the concave surface of the trough of the drive bar 110, that is, the height of the highest convex part on the drive bar 110 is less than the depth of the depression of the trough, so as to avoid the roller 116 contacting and colliding with the trough surface, which may prevent the impact force from being better transmitted to the crucible lid.

[0022] As a preferred implementation method in this embodiment, it further includes a tapping intensity self-varying unit, which can automatically change the tapping intensity between the impact ball 119 and the crucible lid according to the needs of the tapping part during the tapping process.

[0023] As a preferred implementation method in this embodiment, as Figure 6 shown, the tapping intensity self-varying unit includes a first gradient region L1, a constant region L2, and a second gradient region L3 sequentially arranged on the drive bar 110; The height of the wave peaks in the first gradient region L1 increases continuously from right to left; The wave peaks and wave troughs in the constant region L2 remain unchanged, and the height of the wave peaks in the constant region L2 is the height of the highest wave peak in the first gradient region L1; The height of the wave peaks in the second gradient region L3 gradually decreases; The spacing between each wave peak and wave trough in the first gradient region L1, the constant region L2, and the second gradient region L3 is the same, and the height of each wave trough in the first gradient region L1, the constant region L2, and the second gradient region L3 is the same.

[0024] When the roller 116 moves on the first gradient region L1, the impact intensity of its L-shaped rod 115 on the crucible lid continuously increases. The gradually increasing tapping intensity can give the bonding surface between the crucible lid and the seed crystal a gradually adapting process, reducing the risk of stress concentration and cracking that may be caused by a sudden large impact; Although the tapping intensity in this stage is not large, it has already started to act on the bonding surface between the seed crystal and the crucible lid, which helps with subsequent separation; When the roller 116 moves on the constant region L2, the impact intensity of its L-shaped rod 115 on the crucible lid remains unchanged. It continuously taps with a stable maximum tapping intensity, which can continuously act on the bonding surface between the seed crystal and the crucible lid, accelerating the destruction and separation of the bonding surface. Compared with the gradual increase in the first stage, the stable tapping intensity in this stage can more effectively promote separation and improve the separation efficiency; When the roller 116 moves on the second gradient area L2, the impact intensity of its L-shaped rod 115 on the crucible lid gradually decreases. When the seed crystal is about to or has already separated from the crucible lid, reducing the knocking intensity can avoid causing excessive impact on the already loose seed crystal or crucible lid, which may lead to damage. The gradually decreasing knocking intensity helps to steadily end the knocking process and ensure the smooth separation of the seed crystal.

[0025] Accelerate the stable separation of the seed crystal from the crucible lid without damaging the crucible lid and the seed crystal.

[0026] As a preferred implementation manner in this embodiment, as Figure 6 shown, the first gradient area L1 occupies 1 / 7 of the length of the driving bar 110. By occupying 1 / 7, it can give the bonding surface a gradual adaptation process, and at the same time initially loosen the connection between the seed crystal and the crucible lid, reducing the possible damage caused by the initial impact, creating favorable conditions for the subsequent efficient separation. The constant area L2 occupies 5 / 7 of the length of the driving bar 110. This stage is the core part of the entire knocking process and requires a long enough path to continuously apply a stable maximum knocking intensity to accelerate the separation of the seed crystal from the crucible lid. Occupying 5 / 7 of the total path can ensure enough time for effective knocking, and at the same time it will not be too long to affect the efficiency of the entire process. The second gradient area L3 occupies 1 / 7 of the length of the driving bar 110. When the seed crystal is about to or has already separated from the crucible lid, it is necessary to reduce the knocking intensity to avoid damage, so the path of this stage should not be too long.

[0027] By occupying 1 / 7 of the total path, it can ensure that the knocking intensity is rapidly reduced after the separation of the seed crystal, steadily ending the knocking process, and protecting the already loose seed crystal and crucible lid from further impact.

[0028] With the proportion of each stage set at this value, it can ensure the complete and rapid separation of the crucible lid and the seed crystal.

[0029] As a preferred implementation manner in this embodiment, as Figure 1 shown, it further includes an angle adjustment motor 105 for driving the installation disk 102 to rotate intermittently. The output end of the angle adjustment motor 105 is connected to the axis at the upper end of the installation disk 102.

[0030] For the seed crystal with very firm bonding, after the roller 116 moves across the entire driving bar 110, the impact position of the impact ball 119 can be changed through the angle adjustment motor 105, and then the roller 116 is made to move in the reverse direction to perform multiple impacts at different positions, which is beneficial to the separation of stubborn seed crystals.

[0031] As a preferred implementation manner in this embodiment, the angle adjustment motor 105 drives the mounting disk 102 to rotate 15 to 20° each time.

[0032] For stubborn seed crystals, the rotation angle each time is controlled within 15 to 20°. An excessively large or small angle will both result in an extended separation time, and the separation speed is optimal within this range.

[0033] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A knocking device for separating seed crystals, comprising a support (101), characterized in that: It also includes an automatic knocking unit installed on the bracket (101), and the automatic knocking unit can automatically knock on the upper end of the crucible cover.

2. A seed crystal separation striking device according to claim 1, characterized in that: The automatic knocking unit comprises a mounting plate (102) mounted on the bracket (101), a rotating motor (106) mounted on the mounting plate (102), and a gear ring (107); The inner cavity of the mounting plate (102) is provided with a plurality of U-shaped plates (108) in a circular shape, and a reciprocating screw rod (111) is rotatably provided on each of the plurality of U-shaped plates (108), and a ball nut (114) is threadedly sleeved on the reciprocating screw rod (111), and side plates are fixed to both side ends of the ball nut (114), one of the side plates is slidably penetrated by a rod body (109) mounted on the U-shaped plate (108), and an L-shaped rod (115) is slidably penetrated on the other side plate, and a roller (116) is rotatably provided on the upper end of the L-shaped rod (115), and an elastic impact ball (119) is installed on the lower end of the L-shaped rod (115), and a mounting ring (118) is fixed on the L-shaped rod (115), and the mounting ring (118) and the side plate are connected via a compression spring (117); A driving bar (110) with a wave-shaped structure is mounted on the U-shaped plate (108), and the driving bar (110) is located above the reciprocating screw rod (111), and two ends of the driving bar (110) are provided with plane rods (113) with horizontal upper ends, and the upper end surface of the plane rod (113) is located between the wave crest surface and the wave trough surface of the driving bar (110); The gear ring (107) is rotatably arranged in the inner cavity of the mounting plate (102), and the gear ring (107) is gear-engaged with a gear on the output shaft of the rotating motor (106) and a rotating gear (112) arranged on one end of a plurality of reciprocating screw rods (111).

3. A seed crystal separation striking device according to claim 2, characterized in that: It also includes a knocking intensity automatic variable unit, which can automatically change the knocking intensity of the impact ball (119) and the crucible cover according to the needs of the knocking part during the knocking process.

4. The knocking device for separating seed crystals according to claim 3, characterized in that: The knocking intensity self-varying unit comprises a first gradual change area L1, a constant area L2, and a second gradual change area L3 which are arranged in sequence on the driving bar (110); The wave crests in the first gradient zone L1 become higher from right to left; The peaks and valleys in the constant region L2 remain unchanged, and the peak height of the constant region L2 is the highest peak height of the first gradual change region L1; The peak height in the second gradient zone L3 gradually decreases; The distances between the crests and troughs in the first gradual change zone L1 , the constant zone L2 and the second gradual change zone L3 are consistent, and the heights of the troughs in the first gradual change zone L1 , the constant zone L2 and the second gradual change zone L3 are consistent.

5. The seed crystal separation striking device according to claim 4, characterized in that: The first gradient zone L1 occupies 1 / 7 of the length of the driving bar (110), the constant zone L2 occupies 5 / 7 of the length of the driving bar (110), and the second gradient zone L3 occupies 1 / 7 of the length of the driving bar (110).

6. The knocking device for separating seed crystals according to claim 2, characterized in that: It also includes an angle adjustment motor (105) for driving the mounting plate (102) to intermittently rotate, wherein the output end of the angle adjustment motor (105) is connected to the axis of the upper end of the mounting plate (102); A rotary bearing (103) is rotatably provided at the upper end of the mounting plate (102), and the rotary bearing (103) is connected to the bracket (101) via a vertical rod (104).

7. The knocking device for separating seed crystals according to claim 6, characterized in that: The angle adjustment motor (105) drives the mounting plate 102 to rotate 15 to 20 degrees each time.

Images