Air floating platform air control system for maintaining stability of environment in cavity and processing equipment

Abstract

The invention relates to an air floating platform air control system for maintaining the stability of the environment in a cavity and machining equipment. The air floating platform air control system is used for controlling the air pressure of the surface of an air floating platform in a machining cavity of the machining equipment. The system comprises a positive pressure device, a negative pressure device, a temperature processing device and at least one ventilation cavity, the air inlet end of the positive pressure device is communicated with an air exchange cavity, and the air outlet end of the positive pressure device is communicated with a plurality of air holes in the air floating platform after being communicated with the temperature processing device, so that positive pressure is applied to the surface of the air floating platform; the air inlet end of the negative pressure device is communicated with the multiple air holes in the air floating platform, and the air outlet end of the negative pressure device is communicated with a ventilation cavity so that negative pressure can be applied to the surface of the air floating platform. The air pressure on the surface of the air floating platform is jointly controlled through the positive pressure device and the negative pressure device, and the air supplied to the air floating platform is treated by the temperature treatment device, so that the stability of the air pressure and the temperature in the processing chamber is ensured, and the processing quality in the processing chamber is ensured.

Description

Technical Field

[0001] This application relates to the technical field of air flotation, and particularly relates to an air control system for an air flotation platform and a processing device that maintain a stable environment in a chamber. Background Art

[0002] During the manufacturing process of a display panel, an inkjet printing technique is used to print pixel units on a substrate. Specifically, an inkjet printing device is utilized to inject drops of ink containing pixel unit components into corresponding pixel units one by one, and then through drying and baking to form a film, a desired pixel structure is formed. In this process, the accuracy of the printing position and the printing precision requirements are very high, and directly affect the performance and quality of the display panel.

[0003] During multiple processes of substrate processing, an air flotation device is generally used to support the glass substrate to be printed. The air flotation device lifts the substrate to a horizontal height by blowing out a stable air flow, which can avoid direct contact with the workpiece, will not cause scratching, and can also ensure the cleanliness of the workpiece.

[0004] In related technologies, during various processing steps of the substrate, it is necessary to be in a sealed chamber and process the substrate in a specific process atmosphere environment to improve the film formation quality on the substrate, where the process atmosphere includes temperature, air pressure, etc.

[0005] However, when using the air flotation form to support the substrate in a sealed chamber, the gas output by the air flotation platform will not only affect the air pressure in the sealed chamber. Since the gas is compressed and then transported to the air flotation platform, the work done by the gas causes its temperature to rise. After the high-temperature gas enters the sealed chamber, it affects the temperature in the chamber, and it is difficult to maintain the process atmosphere environment in the chamber, which has an adverse effect on the processing of the substrate and affects the processing quality of the display panel. Summary of the Invention

[0006] An embodiment of this application provides an air control system for an air flotation platform and a processing device that maintain a stable environment in a chamber, so as to solve the technical problem that the air supply form of the air flotation platform in related technologies interferes with the process atmosphere environment in the sealed chamber, has an adverse effect on the processing of the substrate, and affects the processing quality of the display panel.

[0007] In a first aspect, an air control system for an air flotation platform that maintains a stable environment in a chamber is provided, which is used to control the air pressure on the surface of the air flotation platform inside the processing chamber of a processing device; it includes a positive pressure device, a negative pressure device, a temperature processing device, and at least one air exchange chamber;

[0008] The intake end of the positive pressure device is communicated with one of the air exchange chambers, and the outlet end of the positive pressure device is communicated with the temperature processing device and then with a plurality of air holes on the air flotation platform to apply positive pressure on the surface of the air flotation platform;

[0009] The air inlet end of the negative pressure device is communicated with a plurality of air holes on the air floating platform, and the air outlet end of the negative pressure device is communicated with one of the air exchange chambers to apply negative pressure on the surface of the air floating platform.

[0010] In some embodiments, the air inlet end of the positive pressure device and the air outlet end of the negative pressure device are both communicated with the same air exchange chamber.

[0011] In some embodiments, the positive pressure device includes a positive pressure pump, the negative pressure device includes a negative pressure pump, the positive pressure pump and the negative pressure pump are both arranged in the same air exchange chamber, the air inlet end of the positive pressure pump and the air outlet end of the negative pressure pump are both communicated with the air exchange chamber;

[0012] The air outlet end of the positive pressure pump is communicated with a plurality of air holes on the air floating platform through the temperature treatment device; the air inlet end of the negative pressure pump is communicated with a plurality of air holes on the air floating platform.

[0013] In some embodiments, a flow equalizing plate is arranged in the air exchange chamber, the flow equalizing plate divides the interior of the air exchange chamber into two parts, and the positive pressure pump and the negative pressure pump are respectively located on opposite sides of the flow equalizing plate.

[0014] In some embodiments, the positive pressure device further includes a positive pressure air tank, and the air outlet end of the positive pressure pump, the temperature treatment device, the positive pressure air tank and the air floating platform are sequentially communicated;

[0015] The negative pressure device further includes a negative pressure air tank, and the air floating platform, the negative pressure air tank and the air inlet end of the negative pressure pump are sequentially communicated.

[0016] In some embodiments, the temperature treatment device includes a heat exchanger and a water chiller, the water chiller acts on the heat exchanger, and the gas output by the positive pressure device is sent to the air floating platform after passing through the heat exchanger.

[0017] In some embodiments, the air control system of the air floating platform for maintaining the environmental stability in the chamber further includes at least one circulation fan, the circulation fan is installed in the air exchange chamber, the air outlet and air return openings of the circulation fan are both communicated with the air exchange chamber, and the air outlet end of the negative pressure device is arranged towards the air return opening of the circulation fan.

[0018] In some embodiments, the processing chamber is communicated with the air exchange chamber;

[0019] The processing chamber is communicated with the air inlet of the circulation fan through a first connecting pipe, and the processing chamber is communicated with the air exchange chamber through a second connecting pipe.

[0020] In some embodiments, the pneumatic control system of the air floating platform for maintaining the stability of the environment in the chamber further includes a purifier, and the purifier is communicated with the air exchange chamber;

[0021] The output end of the purifier is communicated with the air inlet of the circulation fan, and the input end of the purifier is communicated with the air exchange chamber.

[0022] The beneficial effects brought by the technical solution provided by this application include:

[0023] The embodiment of this application provides a pneumatic control system of an air floating platform for maintaining the stability of the environment in the chamber. By synchronously controlling the air pressure state on the surface of the air floating platform through the positive pressure device and the negative pressure device, on the one hand, more accurate flying height control can be carried out to improve the stability of support. On the other hand, the positive pressure device and the negative pressure device blow air and suck air on the surface of the air floating platform respectively, and the air pressure state in the processing chamber is less affected, and there will be no situation where the air pressure in the processing chamber changes greatly due to continuous air supply to the processing chamber. The air pressure state in the processing chamber is more stable, easier to regulate, easier to ensure the air pressure environment state of the workpiece during processing, and ensure the processing quality.

[0024] In addition, when the positive pressure device outputs gas, it needs to do work by compressing the gas, which causes the temperature of the gas output by the positive pressure device to change. The gas output by the positive pressure device is first processed by the temperature processing device and then sent to the air floating platform, so as to ensure that the temperature of the gas output to the processing chamber is basically the same as the temperature in the processing chamber, and it is not easy to have a situation where the temperature in the processing chamber changes greatly due to the air supply of the air floating platform, which is convenient for maintaining the temperature stability in the processing chamber and ensuring the processing quality.

[0025] Furthermore, since the negative pressure device pumps the gas in the processing chamber to the air exchange chamber, and the positive pressure device pumps the gas in the air exchange chamber to the processing chamber, it is ensured that the processing chamber and the air exchange chamber are in the same environment, and the gas composition in the processing chamber is more stable to ensure the processing quality.

[0026] In the second aspect, a processing device is provided, which includes the pneumatic control system of the air floating platform for maintaining the stability of the environment in the chamber as described above, and further includes:

[0027] A processing chamber;

[0028] An air floating platform, the air floating platform is installed in the processing chamber, and the pneumatic control system of the air floating platform for maintaining the stability of the environment in the chamber acts on the air floating platform;

[0029] A voltage stabilizing device, the voltage stabilizing device includes an air supplementing component and an exhaust component, and both the air supplementing component and the exhaust component are communicated with the processing chamber.

[0030] Another embodiment of the present application provides a processing device. Since the processing device includes the air-bearing platform air control system for maintaining the stability of the environment in the chamber as described above, the beneficial effects of the processing device are the same as those of the air-bearing platform air control system for maintaining the stability of the environment in the chamber, and will not be elaborated here. Description of the Drawings

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for use in the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0032] Figure 1 Schematic diagram of the air-bearing platform air control system for maintaining the stability of the environment in the chamber provided by the embodiment of the present application;

[0033] Figure 2 Schematic diagrams of various parts of the air-bearing platform air control system for maintaining the stability of the environment in the chamber provided by the embodiment of the present application;

[0034] Figure 3 Internal schematic diagram of the air change chamber provided by the embodiment of the present application;

[0035] Figure 4 Schematic diagram of the air change chamber and the circulation fan provided by the embodiment of the present application.

[0036] In the figure: 1. Processing chamber; 11. First connecting pipe; 12. Second connecting pipe; 2. Air-bearing platform; 3. Positive pressure device; 31. Positive pressure pump; 32. Positive pressure gas tank; 4. Negative pressure device; 41. Negative pressure pump; 42. Negative pressure gas tank; 5. Temperature treatment device; 51. Heat exchanger; 52. Water chiller; 6. Air change chamber; 61. Flow equalizing plate; 62. Air inlet pipe; 63. Exhaust pipe; 7. Circulation fan; 8. Purifier; 91. Supplementary air pipe; 92. Drain pipe. Detailed Embodiments

[0037] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts fall within the scope of protection of the present application.

[0038] The embodiment of the present application provides an air - controlled system for an air - floating platform and a processing device for maintaining a stable environment in a chamber. The air - controlled system controls the air pressure on the surface of the air - floating platform through a positive - pressure device and a negative - pressure device. The gas supplied to the air - floating platform is processed by a temperature - processing device to ensure the stability of the air pressure and temperature in the processing chamber, so as to ensure the processing quality in the processing chamber. The present application solves the technical problem that the air - supply form of the air - floating platform in the related art interferes with the process atmosphere environment in the sealed chamber, has an adverse effect on the processing of the substrate, and affects the processing quality of the display panel.

[0039] Referring to Figure 1 , an air - controlled system for an air - floating platform for maintaining a stable environment in a chamber is used to control the air pressure on the surface of the air - floating platform 2 inside the processing chamber 1 of a processing device. The processing device may include a UV curing device, a baking device, a buffer device, etc. The air - controlled system includes a positive - pressure device 3, a negative - pressure device 4, a temperature - processing device 5, and at least one air - exchange chamber 6.

[0040] Referring to Figure 1 , the positive - pressure device 3 is used to supply gas to the surface of the air - floating platform 2 to form a positive pressure on the surface of the air - floating platform 2. Specifically, the intake end of the positive - pressure device 3 is connected to an air - exchange chamber 6, and the outlet end of the positive - pressure device 3 is connected to the temperature - processing device 5 and then to a plurality of air holes on the air - floating platform 2 to apply a positive pressure on the surface of the air - floating platform 2.

[0041] With such a setting, the positive - pressure device 3 can pump the gas in the air - exchange chamber 6 to the air - floating platform 2 to ensure the gas composition input into the processing chamber 1, avoid polluting the gas composition in the processing chamber 1, and ensure the processing quality in the processing chamber 1. Further, since the gas output by the positive - pressure device 3 is processed by the temperature - processing device 5 before entering the processing chamber 1, the temperature of the gas input into the processing chamber 1 is consistent with the process temperature environment in the processing chamber 1, which is not likely to cause a large - scale temperature fluctuation in the processing chamber 1, is easier to control the temperature in the processing chamber 1, and is easy to ensure that the temperature in the processing chamber 1 is at a stable level to ensure the processing quality in the processing chamber 1.

[0042] Referring to Figure 1 and Figure 2 , the negative - pressure device 4 is used to pump air on the surface of the air - floating platform 2 to form a negative pressure on the surface of the air - floating platform 2. Specifically, the intake end of the negative - pressure device 4 is connected to a plurality of air holes on the air - floating platform 2, and the outlet end of the negative - pressure device 4 is connected to an air - exchange chamber 6 to apply a negative pressure on the surface of the air - floating platform 2.

[0043] Set in this way, that is, the gas on the surface of the air-floating platform 2 is pumped into the air exchange chamber 6 by the negative pressure device 4. By synchronously controlling the air pressure state on the surface of the air-floating platform 2 by the positive pressure device 3 and the negative pressure device 4, on the one hand, more accurate flying height control can be carried out to improve the stability of support. On the other hand, the positive pressure device 3 and the negative pressure device 4 blow air and suck air on the surface of the air-floating platform 2 respectively, and the air pressure state in the processing chamber 1 is less affected, and there will be no situation where the air pressure in the processing chamber 1 changes greatly due to continuous air supply into the processing chamber 1. The air pressure state in the processing chamber 1 is more stable, easier to regulate, easier to ensure the air pressure environment state of the workpiece during processing, and ensure the processing quality.

[0044] Refer to Figure 1 , wherein, in this embodiment, there is one air exchange chamber 6, and the air inlet end of the positive pressure device 3 and the air outlet end of the negative pressure device 4 are both communicated with the same air exchange chamber 6.

[0045] Set in this way, only one air exchange chamber 6 is arranged, which not only saves space, but also the positive pressure device 3 and the negative pressure device 4 respectively pump air and supply air to the air exchange chamber 6, which is easy to maintain the air pressure stability in the air exchange chamber 6, and realizes the gas circulation between the air exchange chamber 6 and the processing chamber 1, and ensures the consistency of the gas supplied into the processing chamber 1.

[0046] Refer to Figure 1 , preferably, the positive pressure pump 31 of the positive pressure device 3 and the negative pressure pump 41 of the negative pressure device 4 are both placed in the same air exchange chamber 6. This can avoid air leakage of the positive pressure pump 31 or the negative pressure pump 41 from affecting the gas components in the air exchange chamber 6 and the processing chamber.

[0047] In other embodiments, the positive pressure pump 31 of the positive pressure device 3 and the negative pressure pump 41 of the negative pressure device 4 can be respectively arranged in different air exchange chambers 6.

[0048] Refer to Figure 1 , in this embodiment, specifically, the positive pressure device 3 includes a positive pressure pump 31, and the negative pressure device 4 includes a negative pressure pump 41. The positive pressure pump 31 and the negative pressure pump 41 are both arranged in the same air exchange chamber 6, and the air inlet end of the positive pressure pump 31 and the air outlet end of the negative pressure pump 41 are both communicated with the air exchange chamber 6. The air outlet end of the positive pressure pump 31 is communicated with a plurality of air holes of the air-floating platform 2 through the temperature treatment device 5; the air inlet end of the negative pressure pump 41 is communicated with a plurality of air holes of the air-floating platform 2.

[0049] Set in this way, the positive pressure pump 31 and the negative pressure pump 41 realize the gas circulation between the air exchange chamber 6 and the processing chamber 1, so as to reduce the possibility of gas component change and avoid the air leakage risk of the positive pressure pump 31 and the negative pressure pump 41.

[0050] Refer to Figure 1 and Figure 3, Further, a flow equalizing plate 61 is provided in the air exchange chamber 6. The flow equalizing plate 61 divides the interior of the air exchange chamber 6 into two parts, and the positive pressure pump 31 and the negative pressure pump 41 are respectively located on opposite sides of the flow equalizing plate 61. Among them, the flow equalizing plate 61 is a plate body provided with mesh holes.

[0051] With this setting, by arranging the flow equalizing plate 61, the airflow in the air exchange chamber 6 is made more stable. When the negative pressure device 4 sucks air, the airflow at the air inlet end of the negative pressure device 4 is more stable, so as to ensure the air extraction flow rate of the negative pressure device 4 and make the gas circulation more stable and uniform.

[0052] Refer to Figure 1 and Figure 3 , where the positive pressure device 3 further includes a positive pressure gas tank 32. The air outlet end of the positive pressure pump 31, the temperature treatment device 5, the positive pressure gas tank 32 and the air floating platform 2 are connected in sequence. The negative pressure device 4 further includes a negative pressure gas tank 42. The air floating platform 2, the negative pressure gas tank 42 and the air inlet end of the negative pressure pump 41 are connected in sequence. In this embodiment, both the positive pressure gas tank 32 and the negative pressure gas tank 42 are located outside the air exchange chamber 6 to miniaturize the air exchange chamber 6, reduce the difficulty of sealing the air exchange chamber 6, and reduce the manufacturing cost.

[0053] With this setting, by arranging the positive pressure gas tank 32, the gas extracted by the positive pressure pump 31 is processed by the temperature treatment device 5 and then stored in the positive pressure gas tank 32. The gas can be stabilized and then sent to the air floating platform 2, and the positive pressure gas tank 32 is used to supply gas to the air floating platform 2 to ensure the stability, uniformity and consistency of the gas supply to the air floating platform 2, and ensure that the support of the air floating platform 2 for the workpiece is more stable.

[0054] By arranging the negative pressure gas tank 42 to store the gas extracted from the air floating platform 2 and then sending the gas in the negative pressure gas tank 42 into the air exchange chamber 6, it is avoided that the gas in the air exchange chamber 6 is too much and causes excessive pressure, and it is easy to maintain the air pressure stability in the air exchange chamber 6.

[0055] Refer to Figure 1 , where the air exchange chamber 6 further includes an exhaust pipe 63, and the exhaust pipe 63 is used to discharge the gas in the air exchange chamber 6. When maintaining the air exchange chamber 6, the gas inside it is discharged and then the air exchange chamber 6 is overhauled.

[0056] Refer to Figure 1 , where the air exchange chamber 6 further includes an air inlet pipe 62, and the air inlet pipe 62 is used to directly supply gas into the air exchange chamber 6 to facilitate the measurement of the airtightness of the air exchange chamber 6.

[0057] Both the exhaust pipe 63 and the air inlet pipe 62 are controlled to open and close through valve bodies.

[0058] Refer to Figure 1 and Figure 2, wherein, the temperature treatment device 5 includes a heat exchanger 51 and a water chiller 52, and the water chiller 52 acts on the heat exchanger 51. The gas output by the positive pressure device 3 is sent to the air floating platform 2 after passing through the heat exchanger 51.

[0059] In this embodiment, the air outlet end of the positive pressure pump 31 is communicated with the inlet of the heat exchanger 51, and the outlet of the heat exchanger 51 is communicated with the inlet of the positive pressure gas tank 32, so as to use the heat exchanger 51 to process the temperature of the gas output by the positive pressure pump 31 and store the processed gas in the positive pressure gas tank 32. In this way, it is ensured that the temperature of the gas input into the processing chamber 1 is consistent with the temperature in the processing chamber 1.

[0060] Refer to Figure 1 and Figure 2 , optionally, the air floating platform air control system for maintaining the stability of the environment in the chamber further includes at least one circulation fan 7, and the circulation fan 7 is installed in the air exchange chamber 6. The air outlet and air return ports of the circulation fan 7 are both communicated with the air exchange chamber 6. When the air inlet end of the positive pressure device 3 and the air outlet end of the negative pressure device 4 are respectively connected to two air exchange chambers 6, each air exchange chamber 6 is equipped with a circulation fan 7.

[0061] Refer to Figure 1 and Figure 2 , the circulation fan 7 circulates the air flow in the air exchange chamber 6 by itself and filters sundries such as dust that may exist in the air exchange chamber 6 to ensure the cleanliness of the gas in the air exchange chamber 6, and thus ensure the cleanliness of the gas input into the processing chamber 1.

[0062] Refer to Figure 1 , Figure 3 and Figure 4 , in this embodiment, there is one air exchange chamber 6 and one circulation fan 7. The circulation fan 7 is installed on the top surface of the air exchange chamber 6, and the circulation fan 7 blows air into the air exchange chamber 6 from top to bottom at the top of the air exchange chamber 6. The air return port of the circulation fan 7 is arranged on the side of the air exchange chamber 6 and is close to the bottom of the air exchange chamber 6.

[0063] Refer to Figure 1 and Figure 3 , the air outlet end of the negative pressure device 4 is arranged towards the air return port of the circulation fan 7.

[0064] With such an arrangement, the gas blown into the air exchange chamber 6 by the negative pressure device 4 blows towards the air return port of the circulation fan 7 to accelerate the circulation of the gas in the air exchange chamber 6.

[0065] Wherein, the processing chamber 1 is communicated with the air exchange chamber 6, so that the air pressures in the air exchange chamber 6 and the processing chamber 1 are balanced.

[0066] In some embodiments, the processing chamber 1 and the air exchange chamber 6 are directly communicated through a pipeline.

[0067] Refer to Figure 1, in this embodiment, the processing chamber 1 is communicated with the air inlet of the circulation fan 7 through the first communication pipe 11; the processing chamber 1 is communicated with the air exchange chamber 6 through the second communication pipe 12.

[0068] With such a setting, a cycle is formed between the processing chamber 1 and the air exchange chamber 6 through the circulation fan 7, accelerating the gas circulation in the processing chamber 1 and ensuring that the atmosphere environments in the air exchange chamber 6 and the processing chamber 1 are consistent.

[0069] Refer to Figure 1 and Figure 2 , wherein, the air floating platform air control system for maintaining the stability of the environment in the chamber further includes a purifier 8, and the purifier 8 is communicated with the air exchange chamber 6. In this way, the water and oxygen in the air exchange chamber 6 can be removed through the purifier 8, so as to avoid the water and oxygen being sent into the processing chamber 1 and affecting the atmosphere environment in the processing chamber 1, and to ensure the processing quality.

[0070] In this embodiment, the output end of the purifier 8 is communicated with the air inlet of the circulation fan 7, and the input end of the purifier 8 is communicated with the air exchange chamber 6. With such a setting, the circulation fan 7 enables a gas cycle to be formed between the purifier 8 and the air exchange chamber 6, improving the water and oxygen removal efficiency.

[0071] The embodiment of the present application provides an air floating platform air control system for maintaining the stability of the environment in the chamber. By synchronously controlling the air pressure state on the surface of the air floating platform 2 through the positive pressure device 3 and the negative pressure device 4, on the one hand, more accurate flying height control can be performed, improving the stability of the support. On the other hand, the positive pressure device 3 blows air and the negative pressure device 4 sucks air on the surface of the air floating platform 2, with less influence on the air pressure state in the processing chamber 1. There will be no situation where the air pressure in the processing chamber 1 changes significantly due to continuous air supply into the processing chamber 1. The air pressure state in the processing chamber 1 is more stable, easier to regulate, and easier to ensure the air pressure environment state of the workpiece during processing, ensuring the processing quality.

[0072] In addition, when the positive pressure device 3 outputs gas, work needs to be done to compress the gas, causing the temperature of the gas output by the positive pressure device 3 to change. The gas output by the positive pressure device 3 is first processed by the temperature processing device 5 and then sent to the air floating platform 2, ensuring that the temperature of the gas output into the processing chamber 1 is basically the same as the temperature in the processing chamber 1. It is not easy to have a situation where the temperature in the processing chamber 1 changes significantly due to the air supply of the air floating platform 2, facilitating the maintenance of the temperature stability in the processing chamber 1 and ensuring the processing quality.

[0073] Furthermore, since the negative pressure device 4 pumps the gas in the processing chamber 1 to the air exchange chamber 6, and the positive pressure device 3 pumps the gas in the air exchange chamber 6 into the processing chamber 1, it is ensured that the processing chamber 1 and the air exchange chamber 6 are in the same environment, and the gas components in the processing chamber 1 are more stable, so as to ensure the processing quality.

[0074] Refer toFigure 1 , Another embodiment of the present application provides a processing device, which includes the air-floating platform air control system for maintaining the stability of the environment in the chamber as described above, and also includes a processing chamber 1, an air-floating platform 2, and a pressure stabilizing device.

[0075] The air-floating platform 2 is installed in the processing chamber 1 and is used to support the workpiece. In this embodiment, the workpiece includes a display panel. The air-floating platform air control system for maintaining the stability of the environment in the chamber acts on the air-floating platform 2.

[0076] The pressure stabilizing device includes a gas supplementing component and an exhaust component. Both the gas supplementing component and the exhaust component are communicated with the processing chamber 1. The gas supplementing component includes a gas supplementing pipe 91, and the exhaust component includes an exhaust pipe 92. Both the gas supplementing pipe 91 and the exhaust pipe 92 control the air flow through a proportional valve.

[0077] The air pressure in the processing chamber 1 is controlled by the gas supplementing component and the exhaust component to maintain the stability of the air pressure in the processing chamber 1.

[0078] Another embodiment of the present application provides a processing device. Since this processing device includes the air-floating platform air control system for maintaining the stability of the environment in the chamber as described above, the beneficial effects of this processing device are the same as those of the air-floating platform air control system for maintaining the stability of the environment in the chamber as described above, and will not be elaborated here.

[0079] In the description of the present application, it should be noted that the orientation or positional relationship indicated by terms such as "upper" and "lower" is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present application. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0080] It should be noted that in this application, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.

[0081] The above are only specific embodiments of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be obvious to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application will not be limited to these embodiments shown herein, but rather to the broadest scope consistent with the principles and novel features claimed herein.

Claims

1. An air control system for an air floating platform for maintaining a stable environment in a chamber, characterized in that: Used to control the air pressure on the surface of the air floating platform inside the processing chamber of the processing equipment; it includes a positive pressure device, a negative pressure device, a temperature processing device and at least one ventilation chamber; The air inlet end of the positive pressure device is connected to the ventilation cavity, and the air outlet end of the positive pressure device is connected to the temperature treatment device and then connected to a plurality of air holes on the air flotation platform to apply positive pressure on the surface of the air flotation platform; The air inlet end of the negative pressure device is communicated with a plurality of air holes on the air floating platform, and the air outlet end of the negative pressure device is communicated with one of the ventilation chambers to apply negative pressure on the surface of the air floating platform.

2. The air control system for an air floating platform for maintaining a stable environment in a chamber according to claim 1, characterized in that: The air inlet end of the positive pressure device and the air outlet end of the negative pressure device are both connected to the same ventilation cavity.

3. The air control system for an air floating platform for maintaining a stable environment in a chamber according to claim 2, characterized in that: The positive pressure device includes a positive pressure pump, and the negative pressure device includes a negative pressure pump. The positive pressure pump and the negative pressure pump are both arranged in the same ventilation cavity, and the air inlet end of the positive pressure pump and the air outlet end of the negative pressure pump are both connected to the ventilation cavity; The air outlet of the positive pressure pump is communicated with the multiple air holes of the air floating platform through the temperature treatment device; the air inlet of the negative pressure pump is communicated with the multiple air holes of the air floating platform.

4. The air control system for an air floating platform for maintaining a stable environment in a chamber according to claim 3, characterized in that: A flow equalizing plate is provided in the ventilation cavity, and the flow equalizing plate divides the interior of the ventilation cavity into two parts. The positive pressure pump and the negative pressure pump are respectively located on opposite sides of the flow equalizing plate.

5. The air control system for an air floating platform for maintaining a stable environment in a chamber according to claim 3, characterized in that: The positive pressure device also includes a positive pressure gas tank, and the gas outlet end of the positive pressure pump, the temperature treatment device, the positive pressure gas tank and the air flotation platform are connected in sequence; The negative pressure device also includes a negative pressure gas tank, and the air floating platform, the negative pressure gas tank and the air inlet end of the negative pressure pump are connected in sequence.

6. The air control system for an air floating platform for maintaining a stable environment in a chamber according to claim 1 or 5, characterized in that: The temperature treatment device includes a heat exchanger and a water cooler. The water cooler acts on the heat exchanger. The gas output by the positive pressure device passes through the heat exchanger and is then sent to the air flotation platform.

7. The air control system for an air floating platform for maintaining a stable environment in a chamber according to claim 1 or 2, characterized in that: It also includes at least one circulation fan, which is installed in the ventilation cavity. The air outlet and return air outlet of the circulation fan are both connected to the ventilation cavity, and the air outlet end of the negative pressure device is arranged toward the return air outlet of the circulation fan.

8. The air control system for an air floating platform for maintaining a stable environment in a chamber according to claim 7, characterized in that: The processing chamber is communicated with the ventilation chamber; The processing chamber is communicated with the air inlet of the circulating fan through a first communicating pipe, and the processing chamber is communicated with the ventilation chamber through a second communicating pipe.

9. The air control system for an air floating platform for maintaining a stable environment in a chamber according to claim 7, characterized in that: Also included is a purifier, the purifier being in communication with the ventilation cavity; The output end of the purifier is communicated with the air inlet of the circulating fan, and the input end of the purifier is communicated with the ventilation cavity.

10. A processing equipment, characterized in that: The air control system for an air floating platform for maintaining a stable environment in a chamber according to any one of claims 1 to 8, further comprising: Processing chamber; An air floating platform, the air floating platform is installed in the processing chamber, and the air floating platform air control system for maintaining the stable environment in the chamber acts on the air floating platform; A pressure stabilizing device, the pressure stabilizing device includes an air supply component and an exhaust component, and the air supply component and the exhaust component are both connected to the processing chamber.

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