Microsphere lens probe and two-dimensional material transfer and performance test method based on microsphere lens probe

Abstract

The invention discloses a microsphere lens probe and a two-dimensional material transfer and performance test method based on the microsphere lens probe, and belongs to the technical field of micro-nano operation and characterization. The two-dimensional material in-situ multi-parameter testing method is provided for solving the problem that an existing two-dimensional material transferring mode can cause damage to materials and meeting the requirement for two-dimensional material in-situ multi-parameter testing. The center of the lower surface of the front end of a probe support of the microsphere lens probe is connected with the head end of a probe beam, the tail end of the probe beam is provided with a through hole, the lower portion of the through hole is correspondingly connected with a high-transmittance microsphere, and the high-transmittance microsphere is provided with a polymer soft substrate; the two-dimensional material transfer method is realized based on the microsphere lens probe, and comprises the following steps: fixing a two-dimensional material on a sample table, and enabling the sample table to reach a preset temperature; the microballoon lens probe is controlled to approach the two-dimensional material, Van der Waals force assisted nondestructive pickup of the two-dimensional material is realized by using the polymer soft substrate, and two-dimensional material transfer is realized. The device is used for operating and testing the two-dimensional material.

Description

Technical Field

[0001] The present invention relates to a microsphere lens probe and a two-dimensional material transfer and performance testing method based on the microsphere lens probe, belonging to the technical field of micro-nano operation and characterization. Background Art

[0002] Since graphene was obtained by mechanical exfoliation of graphite, two-dimensional materials with atomic layer thickness have attracted wide attention. Two-dimensional materials are a class of layered materials with atomic-level thickness, in which the layers are combined by van der Waals (vdWs) forces and the atoms within the layers are connected by covalent bonds. Two-dimensional materials have an atomically flat surface, a unique electronic band structure, and novel properties, and have important applications in the fields of electronics, optoelectronics, etc.

[0003] The high-precision and non-destructive transfer of two-dimensional materials is crucial for device applications. At present, a series of precise transfer techniques for two-dimensional materials have been developed, including wet transfer, dry transfer, and transfer in a non-atmospheric environment. Although the existing methods can measure the process of transferring two-dimensional materials onto a specific substrate, the process is cumbersome and usually does not have force feedback, which may cause damage to the materials.

[0004] Therefore, how to achieve efficient and precise transfer without damaging the material properties and perform in-situ time-varying and quantitative measurement of the electrical properties of the material has become an important research topic. Summary of the Invention

[0005] Aiming at the problem that the existing two-dimensional material transfer methods may cause damage to the materials and the need for in-situ multi-parameter testing of two-dimensional materials, the present invention provides a microsphere lens probe and a two-dimensional material transfer and performance testing method based on the microsphere lens probe.

[0006] A microsphere lens probe of the present invention includes a probe holder, a probe beam, a high-transparency microsphere, and a polymer soft substrate;

[0007] The lower surface of the front end of the probe holder is centrally connected to the head end of the probe beam. A through hole is provided at the end of the probe beam, and a high-transparency microsphere is correspondingly connected below the position of the through hole. The high-transparency microsphere is configured with a polymer soft substrate.

[0008] According to the microsphere lens probe of the present invention, the through hole at the end of the probe beam is a round hole, and the corresponding position of the high-transparency microsphere is adhesively fixed to the edge of the through hole with glue.

[0009] According to the microsphere lens probe of the present invention, the preparation method of the polymer soft substrate configured with the high-transparency microsphere is as follows:

[0010] Place the high-transparency microsphere on a silicon wafer, inject a liquid polymer material below the high-transparency microsphere with a micro glass tube, and heat and cure to form a polymer soft substrate for the high-transparency microsphere.

[0011] For the microsphere lens probe according to the present invention, the material of the high-transparency microsphere is polystyrene, barium titanate or polymethyl methacrylate.

[0012] The present invention also provides a two-dimensional material transfer method based on the microsphere lens probe, which is realized based on the above-mentioned microsphere lens probe and includes: fixing the two-dimensional material on the sample stage and bringing the sample stage to a preset temperature;

[0013] Manipulating the microsphere lens probe to approach the two-dimensional material, and using the polymer soft substrate to achieve van der Waals force-assisted non-destructive pickup of the two-dimensional material, so as to realize the transfer of the two-dimensional material.

[0014] For the two-dimensional material transfer method based on the microsphere lens probe according to the present invention, the sample stage includes a base, an upper support plate, a lower support plate, a heating sheet and a temperature sensor,

[0015] The heating sheet is centrally clamped between the upper support plate and the lower support plate, and the four corners of the upper support plate and the lower support plate are connected and fixed by fasteners; the lower support plate is fixed on the base;

[0016] The two-dimensional material is placed on the upper surface of the upper support plate, and the temperature sensor is used to measure the temperature of the two-dimensional material.

[0017] For the two-dimensional material transfer method based on the microsphere lens probe according to the present invention, the four corners of the upper support plate and the lower support plate are connected and fixed by the cooperation of nuts and bolts.

[0018] For the two-dimensional material transfer method based on the microsphere lens probe according to the present invention, a heat insulation cotton sheet is arranged between the lower support plate and the heating sheet;

[0019] There is a thermal conductive silicone grease coating between the heating sheet, the upper support plate and the two-dimensional material.

[0020] The present invention also provides a two-dimensional material performance testing method based on the microsphere lens probe, which is realized based on the above-mentioned microsphere lens probe and includes: fixing the two-dimensional material on the sample stage and bringing the sample stage to a preset temperature;

[0021] Manipulating the microsphere lens probe to approach the two-dimensional material, and after using the polymer soft substrate to achieve van der Waals force-assisted non-destructive pickup of the two-dimensional material, pressing / placing the two-dimensional material between the raised positive electrode and negative electrode; the positive electrode and the negative electrode are respectively connected to a DC / AC power supply and an ammeter to form a two-dimensional material test circuit;

[0022] Applying a stepped normal force load to the two-dimensional material through the microsphere lens probe, the polymer soft substrate (40) is deformed under the action of the raised positive electrode and negative electrode, so that the two-dimensional material attached to the surface deforms together, generating stress, and measuring the corresponding electrical characteristics; realizing the test of the electrical characteristics induced by the strain of the two-dimensional material;

[0023] By changing the relative positions of the positive electrode and the negative electrode with respect to the polymer soft substrate (40) that has picked up the two-dimensional material, when applying a stepped normal force load to the two-dimensional material, the corresponding current is measured; the test of the influence of the lattice orientation of the two-dimensional material on its strain-induced electrical properties is realized;

[0024] Under different light intensity / spectral signal environments, a stepped normal force load is applied to the two-dimensional material, and the corresponding current is measured; the strain-induced optoelectronic performance test of the two-dimensional material is realized.

[0025] According to the method for testing the properties of two-dimensional materials based on a microsphere lens probe of the present invention, the light intensity / spectral signal data, the stepped normal force load data, and the corresponding current data are processed to obtain the strain-induced electrical property curve and the optoelectronic performance curve of the two-dimensional material; the light intensity / spectral signal is introduced through the through hole of the probe beam of the microsphere lens probe.

[0026] Advantages of the present invention: The present invention provides a probe capable of flexibly grasping two-dimensional materials. Based on this probe, micro-nano operation and measurement of two-dimensional materials with force feedback can be realized, providing a micro-nano implementation approach for the operation, in-situ quantitative optoelectronic detection, and electrical characterization of low-dimensional materials. It includes:

[0027] 1) Under the condition of having force feedback, the relationship between the mechanical stress and electrical properties of two-dimensional materials can be measured in real time and continuously;

[0028] 2) Under the collaborative regulation of force and light, the optoelectronic response characteristics of two-dimensional materials can be obtained synchronously.

[0029] The present invention is particularly suitable for the research on the multi-field coupling effects of atomically thin low-dimensional (one-dimensional, two-dimensional) materials such as transition metal chalcogenides and graphene, providing a new measurement solution for the performance characterization and optimal design of micro-nano devices.

[0030] The present invention overcomes the defect that the load applied during the transfer process of traditional two-dimensional materials is uncontrollable. Based on the optical path formed by the through hole of the probe beam, the high-transparency microsphere, and the polymer soft substrate, the interfacial stress can be monitored in real time through a laser force measurement system, and precise force loading can be achieved in cooperation with the XYZ nano-positioning platform; its method for testing the properties of two-dimensional materials provides a technical basis for the in-situ characterization of the electrical properties of two-dimensional materials under multi-field coupling. Compared with the traditional testing in an independent physical field, the method of the present invention can synchronously apply an adjustable light source when applying a normal force load through a modular probe configuration, and in combination with an electrical measurement module, the current change can be recorded in real time to establish a stress-light intensity-lattice orientation-electrical property coupling response model. Description of the Drawings

[0031] Figure 1It is a schematic structural diagram of the microsphere lens probe of the present invention;

[0032] Figure 2 It is a schematic diagram of the probe hand for setting the microsphere lens probe of the present invention; in the figure, 1 is the probe hand base, 2 is the probe seat, 3 is the microsphere lens probe, and 4 is the fixing plate of the microsphere lens probe;

[0033] Figure 3 It is a schematic structural diagram of the sample stage; in the figure, 100 is a flat substrate loaded with two-dimensional materials, such as a silicon wafer-two-dimensional material composite sample;

[0034] Figure 4 It is Figure 3 the top view of;

[0035] Figure 5 It is a test schematic diagram of the two-dimensional material performance test method based on the microsphere lens probe; in the figure, δ is the deformation of the probe, which is used to represent the force on the probe, that is, the force on the polymer soft substrate, which is the so-called force feedback; V DC is the DC power supply, V AC is the AC power supply, and A represents the ammeter;

[0036] Figure 6 It is a schematic diagram of processing the probe beam by focused ion beam; in the figure, FIB represents Focused ion beam;

[0037] Figure 7 It is a schematic diagram of a through hole being processed at the end of the probe beam;

[0038] Figure 8 It is a schematic diagram of preparing a polymer soft substrate with a high-transparency microsphere;

[0039] Figure 9 It is a schematic diagram of the assembly process of the probe beam and the high-transparency microsphere;

[0040] Figure 10 It is a schematic diagram of the assembly result of the probe beam and the high-transparency microsphere. Detailed implementation manners

[0041] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0042] It should be noted that, without conflict, the embodiments in the present invention and the features in the embodiments can be combined with each other.

[0043] The present invention will be further described below in conjunction with the accompanying drawings, but it is not limited to the present invention.

[0044] Specific Embodiment 1. In combination with Figure 1 , Figure 2 , Figures 6 to 10 As shown, the present invention provides a microsphere lens probe, including a probe holder 10, a probe beam 20, a high-transparency microsphere 30, and a polymer soft substrate 40;

[0045] The lower surface of the front end of the probe holder 10 is centrally connected to the head end of the probe beam 20. A through hole is provided at the end of the probe beam 20, and a high-transparency microsphere 30 is correspondingly connected below the position of the through hole. The high-transparency microsphere 30 is configured with a polymer soft substrate 40.

[0046] The force feedback type micro-nano operation method implemented based on the microsphere lens probe provided in this embodiment includes: installing and adjusting the position of an optical microscope by means of a tabletop, a frame, a one-dimensional large-range adjustment micro-platform, and an XY micrometer positioning stage. The two-dimensional material can be arranged on the sample stage, and the sample stage can be adjusted in position through a sample stage bracket, an XYZ nano-positioning stage, and an XY micrometer positioning stage. At the same time, a laser force measurement system is configured to monitor and feedback the force on the probe during the transfer process of the two-dimensional material. The microsphere lens probe is installed by means of a probe hand bracket and a three-dimensional positioning stage.

[0047] The laser force measurement system may include a laser generator angle adjustment mechanism, a semiconductor laser generator, an incident laser focusing convex lens, a laser mirror, a reflected laser convex lens, a quadrant position detector, a one-dimensional adjustment micro-platform, and a quadrant position detector two-dimensional adjustment micro-platform, etc.

[0048] In combination with Figure 2 As shown, the probe hand obtained based on the microsphere lens probe is composed of a probe hand base 1, a probe seat 2, a microsphere lens probe 3, and a microsphere lens probe fixing plate 4.

[0049] As an example, the through hole at the end of the probe beam 20 is a round hole, and the corresponding position of the high-transparency microsphere 30 is fixedly bonded to the edge of the through hole with glue. For example, epoxy resin glue can be used. Apply glue in the through hole, align the microsphere, and wait for the glue to cure to complete the preparation.

[0050] The through hole is processed by a Focused Ion Beam (FIB) or laser, etc., to process a micro-hole with a suitable size at the front section of the probe.

[0051] Furthermore, the preparation method for configuring the polymer soft substrate 40 on the high-transparency microsphere 30 is as follows:

[0052] Place the high-transparency microsphere 30 on a silicon wafer, inject a liquid polymer material below the high-transparency microsphere 30 with a micro glass tube, and heat and cure to form the polymer soft substrate 40 of the high-transparency microsphere 30.

[0053] As an example, the material of the high-transparency microsphere 30 is an optically high-transparency material such as polystyrene, barium titanate, or polymethyl methacrylate.

[0054] As an example, the material of the polymer soft substrate 40 is polydimethylsiloxane.

[0055] The microsphere lens probe described in this embodiment can be used in combination with a laser force measurement system and combined with an XYZ three-axis nano-positioning platform to achieve sub-nanometer-level mechanical loading control; an optical path channel is integrated on the probe through the through hole at the end of the probe beam 20, the high-transparency microsphere 30, and the polymer soft substrate 40, and an adjustable light source can be synchronously applied through the optical path, and a conductivity measurement system is used to obtain in-situ characterization of the electrical conductivity of the material under the action of multi-field coupling. The proposed microsphere lens probe in this embodiment and its cooperation with the mechanical system and the optical system break through the limitation of the single mechanical field analysis of the traditional atomic force microscope, and a dynamic response analysis system of multi-field synergistic action can be established through the modular probe structure.

[0056] Specific Embodiment 2. Combination Figure 3 and Figure 4 As shown, the present invention also provides a two-dimensional material transfer method based on a microsphere lens probe, which is realized based on the microsphere lens probe described in Specific Embodiment 1, and includes:

[0057] Fix the two-dimensional material on the sample stage and make the sample stage reach a preset temperature;

[0058] Manipulate the microsphere lens probe to approach the two-dimensional material, and use the polymer soft substrate 40 to achieve van der Waals force-assisted non-destructive pickup of the two-dimensional material, so as to realize the transfer of the two-dimensional material. During the transfer process of the two-dimensional material, the feedback of the interaction force between the probe and the sample can be carried out to control the interaction force between the two.

[0059] In this embodiment, the two-dimensional material is usually placed on a flat substrate such as a silicon wafer; the polymer soft substrate 40 can be heated to the target temperature by a temperature control module.

[0060] Furthermore, the sample stage includes a base 51, an upper support plate 52, a lower support plate 53, a heating sheet 54, and a temperature sensor 55.

[0061] The heating sheet 54 is centrally clamped between the upper support plate 52 and the lower support plate 53, and the four corners of the upper support plate 52 and the lower support plate 53 are fixedly connected by fasteners; the lower support plate 53 is fixed on the base 51.

[0062] The two-dimensional material is placed on the upper surface of the upper support plate 52, and the temperature sensor 55 is used to measure the temperature of the two-dimensional material.

[0063] As an example, the four corners of the upper supporting plate 52 and the lower supporting plate 53 are fixedly connected through the cooperation of nuts 56 and bolts 57.

[0064] In this embodiment, a heat insulation cotton sheet is arranged between the lower supporting plate 53 and the heating sheet 54;

[0065] There is a thermal conductive silicone grease coating between the heating sheet 54, the upper supporting plate 52 and the two-dimensional material.

[0066] During the specific use process, the heating sheet 54 and the temperature sensor 55 are electrically connected to corresponding electrical equipment.

[0067] Specific Embodiment Three. In combination with Figure 5 As shown, the present invention also provides a method for testing the performance of two-dimensional materials based on a microsphere lens probe, which is realized based on the microsphere lens probe described in Specific Embodiment One, and includes:

[0068] Fix the two-dimensional material on the sample stage and make the sample stage reach a preset temperature;

[0069] Manipulate the microsphere lens probe to approach the two-dimensional material. After realizing the van der Waals force-assisted non-destructive pickup of the two-dimensional material by using the polymer soft substrate (40), press / place the two-dimensional material between the raised positive electrode and negative electrode; the positive electrode and the negative electrode are respectively connected to a DC / AC power supply and an ammeter to form a two-dimensional material test circuit;

[0070] Apply a stepped normal force load to the two-dimensional material through the microsphere lens probe. The polymer soft substrate 40 deforms under the action of the raised positive electrode and negative electrode, causing the two-dimensional material attached to the surface to deform together, generating stress, and measuring the corresponding electrical characteristics; realizing the test of the strain-induced electrical characteristics of the two-dimensional material;

[0071] By changing the relative positions of the positive electrode and the negative electrode and the polymer soft substrate 40 that has picked up the two-dimensional material, when applying a stepped normal force load to the two-dimensional material, measure the corresponding current; realizing the test of the influence of the lattice orientation of the two-dimensional material on its strain-induced electrical characteristics; the relative positions include the corresponding relationships of position and angle.

[0072] Under different light intensity / spectral signal environments, apply a stepped normal force load to the two-dimensional material and measure the corresponding current; realizing the test of the strain-induced opto-electric performance of the two-dimensional material.

[0073] The electrical properties of two-dimensional materials are the core parameters determining their device applications, and the coupled regulation of lattice orientation, external stress field and optical field provides a new dimension for realizing high-performance optoelectronic devices. Specifically, the lattice deformation of two-dimensional materials under pressure will trigger the generation of piezoelectric polarization charges, and this built-in electric field can significantly change the carrier migration path and recombination efficiency; at the same time, the electron-hole pairs generated by photoexcitation can be spatially separated under the action of stress-induced band bending, and this force-light synergy effect provides the possibility to break through the physical limit of traditional single-field regulation. However, existing research is mostly limited to the analysis of the independent action of a single physical field, lacking in-situ characterization means for the dynamic response of multi-field coupling, and the frequent equipment switching during the experiment leads to a decrease in data correlation and an increase in the material damage rate. More critically, the uncontrollable mechanical stress during the transfer process of two-dimensional materials will trigger crack propagation, seriously affecting the accurate evaluation of their intrinsic electrical properties. Therefore, based on this embodiment, an integrated multi-field coupling experimental system can be developed to achieve precise stress-light dual-field cooperative regulation, and a material transfer process with micron-level stress control can be established, which has important scientific value for revealing the multi-physical field coupling mechanism of two-dimensional materials and promoting the research and development of new optoelectronic devices.

[0074] This embodiment realizes force-feedback micro-nano operation and measurement based on a microsphere lens probe. During the transfer process of two-dimensional materials, non-destructive transfer and in-situ test analysis of multi-field coupling of two-dimensional materials can be achieved through the force-feedback sensing of the probe. The method for realizing micro-nano operation of the microsphere lens probe based on force feedback in this embodiment includes: during the transfer process of two-dimensional materials, the interface stress magnitude is monitored in real time through a force-feedback system, and the transfer pressure is dynamically adjusted to be stable within a controllable range to reduce the damage to two-dimensional materials; during the mechanical loading stage, a non-destructive stress transfer interface is constructed using a polymer transparent soft substrate, and a gradient pressure is applied through the force-feedback system. The high visible light transmittance of the microsphere and the transparent substrate ensures the synchronous implementation of the optical field coupling experiment; in terms of dynamic characterization, an electrical measurement module can be integrated to realize in-situ monitoring of the conductivity change of two-dimensional materials under the coupled action of stress-light dual fields. The technical system of this embodiment solves problems such as mechanical damage and inaccurate multi-field coupling response in traditional methods, and provides key technical support for the basic research on the force-optoelectronic properties of two-dimensional materials and the development of flexible devices.

[0075] In this embodiment, a vertical load can be applied to two-dimensional materials in stages through a piezoelectric ceramic actuator, and the measured surface resistance change is synchronously recorded to establish a pressure-conductivity relationship model.

[0076] In this embodiment, the light intensity / spectrum signal data, stepped normal force load data and corresponding current data are processed to obtain the electrical property curve and light-electricity performance curve induced by strain of two-dimensional materials.

[0077] The light intensity / spectrum signal is introduced through the through-hole of the probe beam 20 of the microsphere lens probe, the high-transmission microsphere 30, and the polymer soft substrate 40. Under a constant normal load, the photocurrent signal is collected, etc., to test the influence of light intensity on the electrical properties of two-dimensional materials under the current load.

[0078] In this embodiment, the structure of the sample stage can be the same as that of the sample stage in the second specific embodiment.

[0079] Example:

[0080] 1. System initialization: Fix the prepared sample on the sample holder, install the microsphere lens probe on the probe hand, then install the sample stage and the probe hand on the sample stage bracket and the probe hand bracket respectively, and finally make the electrical connection of the device;

[0081] 2. Energize the heating sheet, control the temperature through the temperature sensor, and heat the sample to the set temperature;

[0082] 3. Initially position the two-dimensional material sample through the cooperation of the XY micrometer positioning stage and the optical microscope, so that the two-dimensional material sample is at the center of the field of view of the optical microscope;

[0083] 4. Adjust the optical lever monitoring device of the microsphere lens probe;

[0084] 5. Prepare to start picking up two-dimensional materials;

[0085] 6. During the process of picking up two-dimensional materials, monitor the force on the probe in real time to ensure that the load is in an appropriate range. After a period of time, quickly lift the probe to pick up the two-dimensional material;

[0086] 7. Overlap the picked-up two-dimensional material on both ends of the electrode, connect a power supply to both ends of the electrode, and measure the current magnitude;

[0087] 8. Apply a stepped normal force load to the two-dimensional material and measure the current magnitude;

[0088] 9. Change the relative position (angle) of the two-dimensional material - electrode, and measure the current magnitude under different normal force loads;

[0089] 10. Change the light intensity / spectrum of the light source in the field of view of the optical microscope, and measure the current magnitude under different normal force loads;

[0090] 11. Process the data to obtain stress-induced electrical, optoelectronic and other characteristic curves.

[0091] Although the present invention has been described herein with reference to particular embodiments, it should be understood that these embodiments are merely examples of the principles and applications of the present invention. Accordingly, it should be understood that numerous modifications may be made to the exemplary embodiments, and other arrangements may be devised, without departing from the spirit and scope of the present invention as defined by the appended claims. It should be understood that the different dependent claims and the features described herein may be combined in a manner different from that described in the original claims. It should also be understood that the features described in connection with separate embodiments may be used in other described embodiments.

Claims

1. A microsphere lens probe, characterized in that: It comprises a probe holder (10), a probe beam (20), highly transparent microspheres (30) and a polymer soft substrate (40); The front lower surface of the probe holder (10) is centrally connected to the head end of the probe beam (20), a through hole is arranged at the end of the probe beam (20), and a high-transmittance microsphere (30) is correspondingly connected below the through hole, and the high-transmittance microsphere (30) is configured with a polymer soft substrate (40).

2. The microsphere lens probe according to claim 1, characterized in that: The through hole at the end of the probe beam (20) is a circular hole, and the corresponding position of the high-transmittance microsphere (30) is fixed to the edge of the through hole by adhesive bonding.

3. The microsphere lens probe according to claim 1, characterized in that: The preparation method of the high-transmittance microspheres (30) and the polymer soft substrate (40) is as follows: The high-transmittance microspheres (30) are placed on a silicon wafer, and liquid polymer materials are injected under the high-transmittance microspheres (30) using a micro glass tube, and heated and solidified to form a polymer soft substrate (40) of the high-transmittance microspheres (30).

4. The microsphere lens probe according to claim 3, characterized in that: The material of the high-transmittance microspheres (30) is polystyrene, barium titanate or polymethyl methacrylate.

5. A two-dimensional material transfer method based on a microsphere lens probe, implemented based on the microsphere lens probe of claim 1, characterized in that include: The two-dimensional material is fixed on a sample stage, and the sample stage is allowed to reach a preset temperature; The microsphere lens probe is manipulated to approach the two-dimensional material, and the polymer soft substrate (40) is used to realize non-destructive picking of the two-dimensional material assisted by van der Waals force, thereby realizing the transfer of the two-dimensional material.

6. The two-dimensional material transfer method based on microsphere lens probe according to claim 5, characterized in that: The sample stage comprises a base (51), an upper supporting plate (52), a lower supporting plate (53), a heating plate (54) and a temperature sensor (55). The heating plate (54) is centrally clamped between the upper supporting plate (52) and the lower supporting plate (53), and the four corners of the upper supporting plate (52) and the lower supporting plate (53) are connected and fixed by fasteners; the lower supporting plate (53) is fixed on the base (51); The two-dimensional material is placed on the upper surface of the upper supporting plate (52), and the temperature sensor (55) is used to measure the temperature of the two-dimensional material.

7. The two-dimensional material transfer method based on microsphere lens probe according to claim 6, characterized in that: The four corners of the upper supporting plate (52) and the lower supporting plate (53) are connected and fixed by nuts (56) and bolts (57).

8. The two-dimensional material transfer method based on microsphere lens probe according to claim 6, characterized in that: A heat insulating cotton sheet is arranged between the lower supporting plate (53) and the heating sheet (54); A heat-conducting silicone grease coating is provided between the heating plate (54), the upper supporting plate (52) and the two-dimensional material.

9. A method for testing the properties of two-dimensional materials based on a microsphere lens probe, implemented based on the microsphere lens probe of claim 1, characterized in that include: Fixing the two-dimensional material on a sample stage and allowing the sample stage to reach a preset temperature; The microsphere lens probe is manipulated to approach the two-dimensional material, and after the two-dimensional material is non-destructively picked up by the polymer soft substrate (40) with the assistance of van der Waals force, the two-dimensional material is pressed / placed between the raised positive electrode and the negative electrode; the positive electrode and the negative electrode are respectively connected to a DC / AC power supply and an ammeter to form a two-dimensional material test circuit; A step normal force load is applied to the two-dimensional material through a microsphere lens probe, and the polymer soft substrate (40) is deformed by the action of the protruding positive electrode and the negative electrode, so that the two-dimensional material attached to the surface is deformed together, generating stress, and measuring the corresponding electrical properties; thus realizing the electrical property test induced by strain of the two-dimensional material; By changing the relative positions of the positive electrode and the negative electrode and the polymer soft substrate (40) on which the two-dimensional material is picked up, when a step normal force load is applied to the two-dimensional material, the corresponding current is measured; To test the effect of lattice orientation of two-dimensional materials on their strain-induced electrical properties; Under different light intensity / spectral signal environments, a stepped normal force load is applied to the two-dimensional material and the corresponding current is measured to achieve strain-induced photoelectric performance testing of the two-dimensional material.

10. The two-dimensional material performance testing method based on microsphere lens probe according to claim 9, characterized in that: The light intensity / spectrum signal data, the step normal force load data and the corresponding current data are processed to obtain the electrical characteristic curve and the photoelectric performance curve induced by the strain of the two-dimensional material; the light intensity / spectrum signal is introduced through the through hole of the probe beam (20) of the microsphere lens probe.

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