Online verification device and verification method for monitor of ESD (Electro-Static Discharge) online monitoring system

By designing the online calibration method of the ESD online monitoring system monitor, the communication connection between the upper computer and the monitor is used to realize the automated calibration process, solving the problems of high time-consuming and potentially affecting production in the existing technology, and improving the calibration efficiency and system reliability.

CN120178136APending Publication Date: 2025-06-20SUZHOU TA&A ULTRA CLEAN TECH CO LTD +1
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Patent Information

Application Number
CN202510401220.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-04-01
Publication Date
2025-06-20

AI Technical Summary

Technical Problem

The monitor calibration method of the existing ESD monitoring system is time-consuming and may affect production, and may cause production interruption when the number of monitors is large.

Method used

Design an online calibration method for ESD online monitoring system monitor. Through the communication connection between the upper computer and the monitor, it uses precision resistors and electronic switches to perform automatic calibration. The monitor is equipped with a test circuit and an interrupt control circuit to realize automated numerical test and upload of calibration results.

Benefits of technology

Through the online calibration method, the impact of the disassembly and assembly of the monitor on production is avoided, the calibration time is shortened, the calibration efficiency is improved, the number of times sent to a third-party measurement agency for verification is reduced, and the calibration cost is reduced. In addition, the host computer can monitor the status of the monitor in real time, discover and deal with problems in a timely manner, and ensure the reliability of the monitoring system.

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Abstract

The invention relates to the technical field of electronic equipment protection, in particular to an on-line verification device and method for monitors of an ESD on-line monitoring system, and the device comprises an upper computer and a plurality of monitors, the interior of each monitor is provided with a precision resistor with different gears, and during verification, the upper computer issues a verification instruction to the monitor needing to be verified on line; after receiving the verification instruction, the monitor automatically enters an interruption mode, and the precision resistor is switched to a corresponding gear through an electronic switch for numerical value testing; a test result is locally stored in the monitor, and test data is automatically replied to the upper computer; the upper computer judges a verification result according to a preset verification threshold value, if the verification result is not qualified, the verification result is sent to maintenance personnel to adjust the monitor, and secondary verification is carried out after adjustment is completed. According to the invention, on-line verification can be carried out on the monitor, and the influence of monitor dismounting on production is avoided; the verification efficiency is improved, and the verification cost is reduced; and the operation reliability of the monitoring system is ensured.
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Description

Technical Field

[0001] The present invention relates to the technical field of electronic device protection, and particularly to an on-line calibration device and calibration method for an on-line monitor of an ESD on-line monitoring system. Background Art

[0002] ESD (Electro Static Discharge) is electrostatic discharge. Static electricity can be generated by the contact, separation or mutual friction of different substances. For some electrostatic sensitive components, especially some electronic components, electrostatic discharge is likely to cause changes in their performance and failure. Therefore, in the production environment, electrostatic eliminators are used to eliminate the static electricity in the environment to ensure the performance and quality of products. However, the long-term use of electrostatic eliminators will cause their performance to fail. If the performance fails, the electrostatic eliminator will turn into a static electricity source, which will endanger the production of products. Therefore, in the electronics manufacturing industry, an ESD monitoring system is a key device to ensure that the production environment meets the electrostatic control standard. The ESD monitoring system monitors the performance of the electrostatic eliminator through a monitor. During the use of the monitor, if a fault occurs, the reliability of the monitoring result will decrease. Therefore, the monitor needs to be calibrated at regular intervals. In the prior art, there are mainly two methods for calibrating the monitor. The first method is to remove the monitor from the site and send it to a third-party metrology institution for calibration. After passing the calibration, it is reinstalled. This process is time-consuming and may affect production. The second method is that the personnel in the in-plant calibration room carry metrology instruments to the production site to calibrate the monitors one by one. This method is also time-consuming and may cause production interruption when the number of monitors is large. Therefore, it is necessary to improve the calibration method of the monitor. Summary of the Invention

[0003] The first object of the present invention is to solve the problem that the calibration method of the monitor of the ESD monitoring system in the prior art is time-consuming and may affect production, and to provide an on-line calibration method for the monitor of the ESD on-line monitoring system.

[0004] To achieve the above object, the present invention is realized through the following technical solutions: An on-line calibration method for a monitor of an ESD on-line monitoring system, including a host computer and a plurality of monitors, the monitors are respectively communicatively connected to the host computer, and precision resistors with different gears are provided inside each monitor; an electronic switch is provided in the monitor, and the precision resistor can be adjusted to the required gear through the electronic switch; The calibration process includes the following steps: S1. The host computer on-line issues a calibration instruction to the monitor to be calibrated; S2. After the monitor to be calibrated receives the calibration instruction, the interruption control circuit controls the test circuit to conduct, and switches the precision resistor to the corresponding gear through the electronic switch for numerical testing, detects the loop current and the voltage to the ground, obtains the resistance value through calculation, and saves the test result locally in the monitor; S3. The monitor determines whether the monitor calibration is qualified according to the preset calibration threshold; S4. The monitor uploads the data of the test result and the judgment result to the host computer, and the host computer is responsible for displaying the calibration result and the data; the host computer sends the information of the monitor with unqualified calibration to the maintenance end; S5. The maintenance personnel calibrate the unqualified monitor. After the calibration is completed, the monitor is re-calibrated twice according to the above steps S1-S4, and the calibration result is recorded. If the calibration is qualified, the calibration of the monitor ends. If the calibration is still unqualified, re-calibration is carried out until the monitor calibration is qualified.

[0005] In the above solution, in step S2, when the monitor to be calibrated performs numerical testing, after receiving the calibration instruction from the host computer, the interruption control circuit automatically switches the precision resistor to the test circuit. If the loop resistance value obtained by the test is within the calibration threshold range of the gear set by the precision resistor, it is determined to be qualified. If the obtained resistance value is not within the calibration threshold range of the gear set by the precision resistor, it is determined to be unqualified.

[0006] In the above solution, in step S4, if there is a monitor that is not powered on or the network is disconnected, the host computer pops up a window to display the uncalibrated machine code according to the unresponded information; the maintenance personnel can view the uncalibrated machine according to the machine code, turn on the monitor or connect to the network for calibration.

[0007] In the above solution, in step S5, when the monitor is calibrated, if the calibration fails, it is necessary to disassemble the machine to measure the basic parameters of the circuit and the accuracy of the precision resistor to repair the fault of the monitor.

[0008] The second object of the present invention is to provide an on-line calibration device for a monitor of an ESD on-line monitoring system, which includes a host computer and a plurality of monitors, and the host computer is communicatively connected to each monitor through a communication network; A test circuit is respectively provided in each monitor, a precision resistor and an electronic switch are connected in the test circuit, the precision resistor is a precision resistor with multiple gears, and the gear of the precision resistor can be adjusted through the electronic switch; the test circuit can detect the resistance value of the loop resistance, compare the detected value with the calibration threshold, determine whether the monitor calibration is qualified, and send the judgment result to the host computer; In the host computer, a calibration control circuit for the monitor is provided. The calibration control circuit is electrically connected to each monitor. The calibration control circuit can send a signal to the monitor to turn on the test circuit of the corresponding monitor and detect the resistance value of the loop resistance. The host computer is also electrically connected to the maintenance terminal. If the calibration is qualified, the calibration ends. If the calibration is unqualified, the host computer sends a message to the maintenance terminal to prompt the maintenance personnel to calibrate the monitor.

[0009] In the above solution, an interrupt control circuit is provided in each monitor. After the calibration control circuit in the host computer sends a signal to the monitor, the interrupt control circuit can control the conduction of the test circuit and detect the resistance value of the loop resistance.

[0010] In the above solution, the precision resistor is a precision resistor with an error less than 1%.

[0011] In the above solution, the resistance ranges of the precision resistor include 35MΩ, 0.75MΩ, 1Ω, and 4Ω.

[0012] In the above solution, the calibration threshold is the resistance value of the corresponding range of the precision resistor ±10%.

[0013] The present invention has positive effects: The on-line calibration method of the monitor of the ESD on-line monitoring system of the present invention can perform on-line calibration on the monitor of the ESD on-line monitoring system, avoiding the impact of the disassembly and assembly of the monitor on production; the calibration time can be greatly shortened and the calibration efficiency can be improved through an automated calibration process; the number of times of sending to a third-party metrology institution for calibration is reduced, and the calibration cost is reduced; the host computer can monitor the status of the monitor in real time, discover and handle problems in time, and ensure the reliability of the operation of the monitoring system. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural block diagram of an on-line calibration device for a monitor of an ESD on-line monitoring system of the present invention.

[0015] Figure 2 It is a calibration flow chart of an on-line calibration method for a monitor of an ESD on-line monitoring system of the present invention.

[0016] The reference numerals in the figure are: host computer 1, monitor 2, precision resistor 3, electronic switch 4, test circuit 5. DETAILED DESCRIPTION OF THE INVENTION

[0017] The technical solutions of the present invention will be clearly and completely described below through embodiments. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0018] Figure 1 It is a structural block diagram of an on-line calibration device for a monitor of the ESD on-line monitoring system of the present invention.

[0019] Figure 2 It is a calibration flow chart of an on-line calibration method for a monitor of the ESD on-line monitoring system of the present invention.

[0020] The reference numerals in the figure are: host computer 1, monitor 2, precision resistor 3, electronic switch 4, test circuit 5, and interrupt control circuit 6.

[0021] The technical solutions of the present invention will be clearly and completely described below through embodiments. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0022] As Figure 1 shown, the on-line calibration device for a monitor of the ESD on-line monitoring system of the present invention includes a host computer 1 and a plurality of monitors 2. The host computer 1 is communicatively connected to each monitor 2 through a communication network; A test circuit 5 is respectively provided in each monitor 2. The test circuit 5 can detect the resistance value of the loop resistance, compare the detected value with the calibration threshold, judge whether the monitor calibration is qualified, and send the judgment result to the host computer 1.

[0023] A precision resistor 3 and an electronic switch 4 are connected in the test circuit 5.

[0024] The precision resistor 3 is used as a standard part for calibration. The smaller the error value, the higher the calibration accuracy of the monitor 2. The precision resistor 3 can use a precision resistor with an error less than 1%. For example, if the resistance value of the precision resistor 3 is 100 MΩ, the error value is ±1 MΩ, that is, the resistance value of the precision resistor 3 should be between 99 MΩ and 101 MΩ.

[0025] The precision resistor 3 can use an external resistor or an internal resistor.

[0026] The external resistor can use a resistor box or a resistance box. The external resistor is connected to the calibration port of the monitor through two wires.

[0027] The internal resistor is a standard resistor provided in the test circuit inside the monitor 2.

[0028] The electronic switch 4 is a selection switch provided in the test circuit 5. The gear position of the precision resistor 3 can be set through the electronic switch. The built-in precision resistor 3 has gear positions of 35 MΩ, 0.75 MΩ, 1 Ω, and 4 Ω.

[0029] The calibration threshold is the resistance value of the corresponding gear of precision resistor 3 ± 10%. For example, if the gear selection of precision resistor 3 is 0.75M / 35M, the measured and displayed value should also be within 0.75M ± 10% / 35M ± 10%. If the measurement result is within the calibration threshold range, it is determined to be qualified; if it is not within the calibration threshold range, it is determined to be unqualified.

[0030] An interruption control circuit 6 is provided in each monitor 2. The interruption control circuit 6 can control the conduction of the test circuit and detect the resistance value of the loop resistance. By setting the interruption control circuit 6, the working state of the monitor 2 can be switched, and the monitor 2 can be switched online between the monitoring state and the calibration state. For example, when the monitor 2 needs to be calibrated, it is switched to the calibration state. After passing the calibration, the monitor 2 can be switched to the monitoring state.

[0031] A calibration control circuit for the monitor 2 is provided in the host computer 1. The calibration control circuit is electrically connected to each monitor 2. The calibration control circuit can send a signal to the monitor 2 to make the interruption control circuit 6 of the corresponding monitor control the conduction of the test circuit 5 and detect the resistance value of the loop resistance. The host computer 1 is also electrically connected to the maintenance terminal 7. If the calibration is qualified, the calibration ends; if the calibration is unqualified, the host computer sends a message to the maintenance terminal 7 to prompt the maintenance personnel to calibrate the monitor.

[0032] As Figure 2 shown, for the online calibration method of the monitor of the ESD online monitoring system of the present invention, the calibration process includes the following steps: S1. The host computer issues a calibration instruction to the monitor to be calibrated online; the calibration of the monitor can be designed according to needs. For example, when the monitor is working, it needs to be calibrated at certain time intervals. Therefore, the host computer can control the calibration of multiple monitors. When the working duration of the monitor reaches the preset time interval, the host computer can issue a calibration instruction to the monitor; S2. After the monitor to be calibrated receives the calibration instruction, the interruption control circuit switches the state of the monitor to the test state, the test circuit conducts, the precision resistor is switched to the corresponding gear through the electronic switch, numerical tests are performed through the test circuit, the loop current and the voltage to ground are detected, and the resistance value is obtained by calculation. The resistance value is the voltage to ground divided by the loop current, and the test result is saved locally in the monitor; S3. The monitor determines whether the calibration of the monitor is qualified according to the preset calibration threshold; if the obtained resistance value is within the calibration threshold range of the gear set by the precision resistor, it is determined to be qualified; if the obtained resistance value is not within the calibration threshold range of the gear set by the precision resistor, it is determined to be unqualified; For example, if the resistance range of a precision resistor is 35 MΩ, then the calibration threshold is 35 MΩ ± 10%, that is, 32 MΩ - 38 MΩ. If the measured resistance value is 31 MΩ, it is not within the calibration threshold range and is determined to be unqualified in calibration. If the measured resistance value is 33 MΩ, it is within the calibration threshold range and is determined to be qualified in calibration; S4. The monitor uploads the data of the test result and the judgment result to the host computer, and the host computer is responsible for displaying the calibration result and data; the host computer sends the information of the monitor with unqualified calibration to the maintenance end to remind the maintenance personnel to calibrate the monitor with unqualified calibration; If there is a monitor that is not powered on or the network is disconnected in the monitor, the host computer pops up a window to display the uncalibrated machine code according to the unresponded information; the maintenance personnel can view the uncalibrated machine according to the machine code, power on the monitor or connect it to the network for calibration; S5. The maintenance personnel calibrate the unqualified monitor. After the calibration is completed, the monitor is re-verified twice according to the above steps S1 - S4, and the verification result is recorded. If the verification is qualified, the calibration of the monitor ends. If the verification is still unqualified, the calibration is re-done and the re-verification is carried out until the monitor is verified to be qualified.

[0033] The online calibration method of the monitor of the ESD online monitoring system of the present invention can perform online calibration on the monitor of the ESD online monitoring system, avoiding the influence of the disassembly and assembly of the monitor on production; the automated calibration process can greatly shorten the calibration time and improve the calibration efficiency. In the case of qualified online calibration, the monitor does not need to be disassembled, and only the monitor with unqualified calibration needs to be disassembled for calibration, which can reduce the number of times of sending the monitor to a third-party metrology institution for calibration and reduce the calibration cost; the host computer can monitor the status of the monitor in real time, discover and handle problems in time, and ensure the reliability of the operation of the monitoring system.

[0034] Although the embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made in these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An online calibration method for an ESD online monitoring system monitor, characterized in that: It includes a host computer and several monitors, the monitors are respectively connected to the host computer for communication, and each monitor is provided with a precision resistor with different gears; an electronic switch is provided in the monitor, and the precision resistor can be adjusted to a required gear through the electronic switch; The verification process includes the following steps: S1. The host computer issues a calibration instruction to the monitor that needs to be calibrated online; S2. After the monitor to be calibrated receives the calibration instruction, the interrupt control circuit controls the test circuit to be turned on, and switches the precision resistor to the corresponding gear through the electronic switch, performs a numerical test, detects the loop current and the voltage to ground, and obtains the resistance value through calculation. The test result is saved locally in the monitor; S3, the monitor determines whether the monitor calibration is qualified according to the preset calibration threshold value; S4. The monitor uploads the test results and judgment results to the host computer, which is responsible for displaying the verification results and data; the host computer sends the information of the monitor that fails the verification to the maintenance end; S5. The maintenance personnel adjust the unqualified monitoring instrument. After the adjustment is completed, the monitoring instrument is recalibrated according to the above steps S1-S4 and the calibration results are recorded. If the calibration is qualified, the calibration of the monitoring instrument is terminated. If the calibration is still unqualified, the adjustment and recalibration are carried out again until the monitoring instrument is calibrated to be qualified.

2. The online calibration method of the ESD online monitoring system monitor according to claim 1 is characterized in that: In step S2, when the monitor that needs to be calibrated is performing a numerical test, after receiving the calibration instruction from the host computer, the interrupt control circuit automatically switches the precision resistor to the test circuit. If the loop resistance value obtained by the test is within the calibration threshold range of the gear set by the precision resistor, it is judged as qualified. If the obtained resistance value is not within the calibration threshold range of the gear set by the precision resistor, it is judged as unqualified.

3. The online calibration method of the ESD online monitoring system monitor according to claim 1 is characterized in that: In step S4, if any of the monitors is not turned on or is disconnected from the network, the host computer will display a pop-up box showing the uncalibrated machine code based on the unanswered information; the maintenance personnel can check the uncalibrated machine based on the machine code, turn on the monitor or connect it to the network for verification.

4. The online calibration method of the ESD online monitoring system monitor according to claim 1 is characterized in that: In step S5, when the monitor is calibrated, if the calibration fails, the monitor must be disassembled to measure the basic parameters of the circuit and the accuracy of the precision resistor, and the fault of the monitor must be repaired.

5. An online calibration device for a monitor of an ESD online monitoring system, characterized in that: It includes a host computer and several monitoring instruments, and the host computer is connected with each monitoring instrument through a communication network; A test circuit is provided in each monitor, in which a precision resistor and an electronic switch are connected. The precision resistor is a precision resistor with multiple gears, and the gear of the precision resistor can be adjusted by the electronic switch; the test circuit can detect the resistance value of the loop resistor, and compare the detected value with the calibration threshold to determine whether the monitor calibration is qualified, and send the judgment result to the host computer; A calibration control circuit for the monitor is provided in the host computer. The calibration control circuit is connected to the electrical signals of each monitor. The calibration control circuit can send a signal to the monitor to turn on the test circuit of the corresponding monitor and detect the resistance value of the loop resistor. The host computer is also connected to the electrical signal of the maintenance end. If the calibration is qualified, the calibration is ended. If the calibration is unqualified, the host computer sends information to the maintenance end to prompt the maintenance personnel to adjust the monitor.

6. The online calibration device of the monitor of the ESD online monitoring system according to claim 5, characterized in that: An interrupt control circuit is provided in each monitor. After the verification control circuit in the host computer sends a signal to the monitor, the interrupt control circuit can control the conduction of the test circuit and detect the resistance value of the loop resistor.

7. The online calibration device of the monitor of the ESD online monitoring system according to claim 5, characterized in that: The precision resistor is a precision resistor with an error of less than 1%.

8. The online calibration device of the monitor of the ESD online monitoring system according to claim 5, characterized in that: The gears of the precision resistor include 35MΩ, 0.75MΩ, 1Ω and 4Ω.

9. The online calibration device of the monitor of the ESD online monitoring system according to claim 5, characterized in that: The verification threshold is ±10% of the resistance value of the precision resistor corresponding to the gear position.