Measurement device

Abstract

The electrical characteristics of an electronic component are favorably measured. In the measuring device, each of a pair of measuring pieces for holding an element as an electronic element comprises two terminals. The component is well held by each of the two terminals, so that the electrical characteristics of the component can be well measured.

Description

Technical Field

[0001] The present disclosure relates to a measuring device for measuring electrical characteristics of electronic components. Background Art

[0002] In the measuring device described in Patent Document 1, an electronic component held on a conductive holding table is gripped by opposing surfaces of a pair of measuring members, and the electrical characteristics of the electronic component are measured in a state where the holding table has retreated from the electronic component.

[0003] Prior Art Documents

[0004] Patent Documents

[0005] Patent Document 1: International Publication No. 2017 / 009987

[0006] Problems

[0007] An object of the present disclosure is to measure the electrical characteristics of an electronic component well.

[0008] Means, Actions, and Effects for Solving the Problems

[0009] In the measuring device according to the present disclosure, each of a pair of measuring members that grip an element as an electronic component includes two terminals each. Since the element is well gripped by the two terminals each, the electrical characteristics of the element can be measured well. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 is a perspective view of a measuring device according to an embodiment of the present disclosure.

[0011] Figure 2 is a perspective view of a mounting machine including the above-described measuring device.

[0012] Figure 3 is a cross-sectional view of a main part of the above-described measuring device.

[0013] Figure 4 is a top view of the above-described measuring device.

[0014] Figure 5 is a circuit diagram of an air supply unit included in the above-described measuring device.

[0015] Figure 6 is a perspective view of an element that is a measurement object of the above-described measuring device.

[0016] Figure 7 is a diagram conceptually showing the periphery of a nozzle included in the above-described mounting machine.

[0017] Figure 8 is a diagram conceptually showing an electrical characteristic measurement circuit of the above-described measuring device.

[0018] Figure 9 is a diagram conceptually showing a coaxial cable constituting the above-described electrical characteristic measurement circuit.

[0019] Figure 10 is a top view conceptually showing the main part of the above-described measurement device.

[0020] Figure 11 is a side view conceptually showing the main part of the above-described measurement device.

[0021] Figure 12 is a block diagram conceptually showing the periphery of the control device of the above-described measurement device.

[0022] Figure 13 is a flowchart showing an electrical characteristic acquisition program stored in the storage unit of the above-described control device. Detailed Embodiment

[0023] Hereinafter, an installation machine including a measurement device as one embodiment of the present disclosure will be described in detail based on the drawings. The measurement device may be referred to as an electrical characteristic acquisition device.

[0024] Example

[0025] Figure 2 The shown installation machine mounts components on a circuit board and includes a main body 2, a circuit board transfer and holding device 4, a component supply device 6, a head movement device 8, etc.

[0026] The circuit board transfer and holding device 4 transfers and holds a circuit board P (hereinafter simply referred to as the board P) in a horizontal posture. In Figure 2 it, the transfer direction of the board P is set as the x direction, the width direction of the board P is set as the y direction, and the thickness direction of the board P is set as the z direction. The y direction and the z direction are the front-rear direction and the up-down direction of the installation machine, respectively. These x direction, y direction, and z direction are orthogonal to each other. The component supply device 6 supplies electronic components (hereinafter simply referred to as components) s to be mounted on the board P and includes a plurality of tape feeders 14, etc. The head movement device 8 holds and moves a mounting head 16 in the x, y, and z directions. The mounting head 16 has a nozzle 18 for picking up and holding the component s.

[0027] The nozzle 18 holds the component s by negative pressure. In the nozzle 18, as Figure 7As shown, a negative pressure source 20 and a positive pressure source 21 are respectively connected to an air pipe 19 provided in the main body via solenoid valves 20v and 21v as selection devices. By connecting the negative pressure source 20 to the air pipe 19, the component s is adsorbed and held. By connecting the positive pressure source 21 to the air pipe 19, the held component s is released. When the component s is not held by the nozzle 18, the positive pressure source 21 is connected to the air pipe 19, and thus air is ejected from the air pipe 19.

[0028] Reference numeral 22 denotes a camera. The camera 22 photographs the component s held by the nozzle 18, and based on the image photographed by the camera 22, it is determined whether the component s is a component to be mounted on the predetermined circuit board P. Reference numeral 24 denotes a measuring device. The measuring device 24 measures the electrical characteristics of the component s. Examples of the electrical characteristics of the component s include L (inductance), C (capacitance), R (resistance), X (reactance), Z′ (impedance), etc., and one or more of them are measured by the measuring device 24.

[0029] The measuring device 24 is mounted on the mounter and is provided in the main body of the circuit board transfer and holding device 4 via a storage box 26. A waste passage 28 is provided between the storage box 26 and the measuring device 24, and the component s whose electrical characteristics have been measured are accommodated in the storage box 26 via the waste passage 28. The measuring device 24 is provided on the storage box 26 in a manner that enables height adjustment. As Figure 1 shown, a base portion 30 is detachably engaged with the storage box 26 in a manner that enables lifting and lowering, and a measuring table 29 is detachably held by the base portion 30. The base portion 30 and the measuring table 29 can be lifted and lowered integrally. In addition, through holes 29a and 30a (see Figure 3 , Figure 4 ) that can communicate with the waste passage 28 are respectively provided in the measuring table 29 and the base portion 30.

[0030] As Figure 1 shown, the measuring device 24 includes the above-mentioned measuring table 29 and base portion 30, a holding table 32 capable of holding the component s, a pair of measuring members 37 composed of a fixing member 34 and a movable member 36, a holding table moving device 40 for moving the holding table 32, a movable member moving device 41 as an approaching / separating device for approaching / separating the movable member 36 relative to the fixing member 34, a measuring unit 42 (see Figure 4 ), etc. In this embodiment, as Figure 6 shown, the component s has electrodes sp1 and sp2 at both ends, and the length between the pair of electrodes sp1 and sp2 is set as Ap. The portion s can be, for example, a square chip.

[0031] The holding table 32 includes a component placement portion 44 and a placement portion holder 46 for holding the component placement portion 44. A V-groove 44c is formed in the component placement portion 44 to place the component s. As Figure 3As shown, the portion of the component mounting portion 44 where the V-groove 44c is formed (which can be referred to as the component holding portion 65) is an insulator portion made of a low dielectric constant material. A low dielectric constant material generally refers to a material with a relative dielectric constant of 0.3 or less, such as an organic plastic material equivalent to epoxy resin, a ceramic material such as glass, etc. Since the component holding portion 65 is made of a low dielectric constant material, the component s held by the component holding portion 65 is difficult to be charged. In addition, since the component holding portion 65 is not made of a conductive material but is an insulator portion, the electrical characteristics can be measured in a state where the component is held by the component holding portion 65.

[0032] In addition, a cover portion 62 extending in the vertical direction is mounted on the holding table 32. The cover portion 62 moves integrally as the holding table 32 moves.

[0033] The fixing member 34 is held by the fixing member holder 55, and the fixing member holder 55 is fixed to the measurement table 29. The movable member 36 is held by the movable member holder 56 so as to be able to move integrally, and the movable member holder 56 is arranged so as to be able to move relative to the measurement table 29. The movable member 36 can approach / separate from the fixing member 34, and a pair of measurement members 37 can approach / separate from each other.

[0034] The fixing member 34 and the movable member 36 each include: a main body 34h, 36h having facing surfaces 34f, 36f facing each other; and terminal pairs 52, 54 respectively held by the main bodies 34h, 36h.

[0035] The terminal pair 52 includes two terminals 52a, 52b, and the terminal pair 54 includes two terminals 54a, 54b. One end portions of the coaxial cables 58a, 58b are respectively connected to the base end portions of the terminals 52a, 52b via brackets. The front end portions of the terminals 52a, 52b protrude from the facing surface 34f toward the movable member 36. Similarly, the base end portions of the terminals 54a, 54b are connected to one end portions of the coaxial cables 60a, 60b via brackets, and the front end portions protrude from the facing surface 36f toward the fixing member 34.

[0036] These terminals 52a, 52b, 54a, 54b are respectively as Figure 10 , Figure 11 shown, in a plate shape extending in one direction, with its one direction corresponding to the approaching / separating direction (y direction) of the pair of measurement members 37, the width direction corresponding to the vertical direction (z direction), and the thickness direction corresponding to the width direction (x direction). The front end portions of the terminals 52a, 52b, the terminals 54a, 54b are wedge-shaped, as Figure 8 , Figure 10 , Figure 11As shown, in the thickness direction, one side is a flat portion, and the other side is an inclined surface that slopes with the front end side being thinner than the base end side. In addition, the two terminals 52a, 52b, and the terminals 54a, 54b are respectively arranged in a state where the flat portions face each other and the inclined portions are on the opposite sides. Thereby, the intervals between the terminals 52a, 52b and between the terminals 54a, 54b can be narrowed, and they can be located near the center of the V-groove 44c.

[0037] As described above, the terminals 52a, 52b, and the terminals 54a, 54b are each formed in a shape with a tapered front end. In addition, in each of the terminals 52a, 52b, and the terminals 54a, 54b, the bottom in the up-down direction reaches the bottom surface of the V-groove 44c. Based on the above, even if the element s to be measured is small, the element s can be well held by the pair of terminal pairs 52, 54.

[0038] In addition, these terminals 52a, 52b, 54a, 54b are made of superhard materials such as quenched materials and cemented carbide. Thereby, deterioration of the pair of terminal pairs 52, 54 can be suppressed. In addition, in this embodiment, the element s is held by the pair of measuring members 34, 36 in a state where the front ends of the terminals 52a, 52b, 54a, 54b slightly penetrate into the electrode portions sp1, sp2 of the element s. Therefore, even if the element s is small, it can be well held by the pair of terminal pairs 52, 54.

[0039] It should be noted that the front end portions of the terminals 52a, 52b, 54a, 54b can be in a shape such as a needle shape as a wedge shape.

[0040] In addition, a pair of protection members 34g, 36g are respectively provided on the pair of main bodies 34h, 36h in a manner of protruding in a direction approaching each other. The protection members 34g, 36g are made of a conductive material. As Figure 11 shown, the length Ag from the facing surfaces 34f, 36f in the approaching / separating direction (y direction) of each of the protection members 34g, 36g is longer than the length Ac from the facing surfaces 34f, 36f of the terminals 52a, 52b and the terminals 54a, 54b. Therefore, when there is no element s and the pair of measuring members 37 approach each other, the protection members 34g, 36g abut against each other to protect the front end portions of the terminal pair 52, 54. In addition, the length Ag of the protection members 34g, 36g is such that even if the element s to be measured is relatively small, the element s can be held by the pair of terminal pairs 52, 54. In other words, the protruding amount (Ag - Ac) of the protection members 34g, 36g protruding from the front end portions of the terminals 52a, 52b, 54a, 54b is longer than 0 and shorter than 1 / 2 of the length Ap of the smallest element s to be measured (refer to Figure 6 )

[0041] AsFigure 3 As shown, an air passage 70 is formed in components on the fixed member side (for example, the upper part of the fixed member 34, the part above the fixed member 34 of the fixed member holder 55, and one or more of the measurement tables 29), and is connected to cylinders 72 and 74 as fluid pressure cylinders, an air source 78, etc. An opening 70a of the air passage 70 is formed obliquely downward. In addition, an ion generator 76 is provided in the air passage 70. The ion generator 76 generates corona discharge to ionize the air. The ionized air discharged from the opening 70a is irradiated onto the element s held by a pair of terminal pairs 52 and 54.

[0042] As Figure 5 shown, the cylinder 72 is a drive source of the holding table moving device 40, and a placement part holder 46 is connected to the piston rod 72p of the cylinder 72. A solenoid valve device 80 is provided between the two air chambers 72a and 72b of the cylinder 72, the air source 78, the air passage 70, and a muffler (atmosphere). The movement of the placement part holder 46 (holding table 32) etc. is controlled by the control of the solenoid valve device 80.

[0043] The cylinder 74 is a drive source of the movable member moving device 41, and a movable member holder 56 is connected to the piston rod 74p. The air chambers 74a and 74b of the cylinder 74 are connected to the air source 78, the air passage 70, and a muffler (atmosphere) via a solenoid valve device 82. The movement of the movable member holder 56 (movable member 36) etc. is controlled by the control of the solenoid valve device 82. When the holding table 32 advances and the movable member 36 retracts, air is supplied from the cylinders 72 and 74 to the air passage 70, and air is ejected from the opening 70a.

[0044] In addition, in the present embodiment, an electromagnetic on-off valve 83 is provided between the air source 78 and the air passage 70. The electromagnetic on-off valve 83 is a normally closed valve, and the air source 78 and the air passage 70 are not directly connected. However, the electromagnetic on-off valve 83 switches to the open state when discharging the electricity from the element s held by a pair of terminal pairs 52 and 54, and the air ionized by the ionization generator 76 is ejected from the opening 70a. As described above, in the present embodiment, an air supply unit 85 is constituted by the cylinders 72 and 74, the air source 78, the ion generator 76, the air passage 70, the solenoid valve devices 80 and 82, the electromagnetic on-off valve 83, etc.

[0045] A pair of guide rods 86 and 87 extending in the y direction are provided on the holding table 32 and the movable member holder 56, and a pair of guide rods 88 and 89 extending in the y direction are provided on the movable member holder 56 and the measurement table 29. In addition, by these guide rods 86, 87, 88, 89 (refer to Figure 2), the holding stage 32 and the movable member 36 are capable of relative movement with respect to each other in the y direction with respect to the measurement stage 29, and the holding stage 32 and the movable member 36 are capable of relative movement with respect to each other in the y direction.

[0046] In addition, as Figure 3 shown, a stopper 92 is provided on the fixed member side of the movable member holder 56, and a stopper 90 is provided on the portion of the measurement stage 29 that holds the fixed member holder 55. The stopper 92 defines the proximity limit between the movable member holder 56 and the holding stage 32 (the mounting portion holder 46), and the stopper 90 defines the proximity limit between the fixed member 34 (the measurement stage 29) and the holding stage 32.

[0047] The above coaxial cables 58a, 58b, 60a, 60b respectively form the same structure, as Figure 9 shown, including an inner conductor 140, an insulator (dielectric) 142, an outer conductor 144, a protective film 146, etc. provided coaxially. By providing the outer conductor 144, it is possible to suppress the leakage of the transmitted signal to the outside. In these coaxial cables 58a, 58b, 60a, 60b, one end portions of the inner conductors 140 are respectively connected to the terminals 52a, 52b, 54a, 54b, and the other end portions are respectively connected to the measurement unit 42.

[0048] In addition, the coaxial cables 58a, 58b form a coaxial cable portion 58, and the coaxial cables 60a, 60b form a coaxial cable portion 60. An electrical characteristic measurement circuit 61 is formed by these coaxial cable portions 58, 60, terminal pairs 52, 54, measurement unit 42, etc.

[0049] As Figure 8 schematically shown, the other end portion of the coaxial cable 60a is connected to the Hc terminal and connected to an AC power supply. The output of the AC power supply is supplied to the inner conductor 140 of the coaxial cable 58a and returns via the outer conductor 144. The other end portion of the coaxial cable 60b is connected to the Hp terminal and connected to a voltage sensor. In the coaxial cable 60b, the potential difference between the inner conductor 140 and the outer conductor 144 is detected as the voltage value applied to the element s.

[0050] The other end portion of the coaxial cable 58a is connected to the Lc terminal and connected to a current sensor. In the coaxial cable 58a, the current flowing between the inner conductor 140 and the outer conductor 144 is obtained as the current value flowing through the element s. Strictly speaking, the potential difference of the resistance value Rx of an unillustrated resistor provided between the inner conductor 140 and the outer conductor 144 is obtained, and based on this potential difference and the resistance value Rx, the current flowing through the resistor is obtained.

[0051] The other end of the coaxial cable 58b is connected to the Lp terminal. In the coaxial cable 58b, the potential difference between the inner conductor 140 and the outer conductor 144 is detected, and components (such as an oscillator) of the measurement unit 42 (not shown) are controlled so that the detected potential difference is 0. Thus, the current flowing through the above-mentioned resistor is the same as the current flowing through the element s, and in this state, the current flowing through the resistor obtained at the terminal Lc becomes the current value flowing through the element s. In addition, 150 represents an equipotential portion. By providing the equipotential portion 150, the outer conductors 144 of the coaxial cable portions 58 and 60 are set to the same ground potential, so that noise can be reduced and the electrical characteristics of the element s can be measured stably.

[0052] In this way, the coaxial cables 58a, 58b, 60a, and 60b are connected by the four-terminal pair connection method, and the electrical characteristics of the element s are measured by the automatic balance bridge method. The current flowing through the element s and the voltage applied to the element s are measured by different circuits, and in the inner conductor 140 and the outer conductor 144, the currents flowing through them are in opposite directions. Therefore, the generation of magnetic fluxes in the inner conductor 140 and the outer conductor 144 can be suppressed, and the current and voltage flowing through the element s can be measured with high precision.

[0053] However, in the electrical characteristic measurement circuit 61, electrical interference sometimes occurs in parts other than the element s, which affects the measured value of the electrical characteristics of the element s measured by the measurement unit 42. To reduce this influence, a short-circuit correction value and an open-circuit correction value are obtained, the measured value is corrected, and the final electrical characteristics of the element s are obtained, approaching the true electrical characteristics. In this embodiment, the short-circuit correction value is measured in a state where the protection components 34g and 36g are in contact with each other.

[0054] This mounting machine includes a control device 200. As Figure 12 shown, the control device 200 includes a controller 202 mainly composed of a computer and a plurality of drive circuits 204. The controller 202 includes an execution unit 210, a storage unit 212, an input / output unit 214, etc. The input / output unit 214 is respectively connected to the substrate transfer and holding device 4, the component supply device 6, and the head movement device 8 via the drive circuits 204, and is also connected to the solenoid valve devices 80, 82, etc. of the holding table movement device 40 and the movable member movement device 41. In addition, it is connected to the measurement unit 42, the display 216, the movable member position sensor 218, the holding table position sensor 220, the nozzle height sensor 222, etc.

[0055] The electrical characteristics of the element s are measured by executing Figure 13 the electrical characteristic measurement program shown in the flowchart.

[0056] The solenoid valve devices 80, 82, and the electromagnetic on-off valve 83 are controlled based on the output signals of the movable member position sensor 218, the holding table position sensor 220, etc. The measurement results can be displayed on the display 216. The measuring device 24 is always located at the initial position. The movable member 36 is located at the retracted end position, and the holding table 32 is located at the advanced end position.

[0057] In step 1 (hereinafter, simply referred to as S1. The same applies to other steps), it is determined whether a measurement instruction for the electrical characteristics of the component s is issued. For example, in the case where a measurement instruction for the electrical characteristics of the component s is issued, such as in the case of performing changeover adjustment, it is determined to be yes.

[0058] In S2, the open-circuit correction value and the short-circuit correction value are obtained, and the measured open-circuit correction value and short-circuit correction value are stored in the storage unit 212. Then, in S3, the mounting head 16 having the nozzle 18 holding the component s is moved, and the nozzle 18 is lowered on the V-groove 44c to release the component s, and the component s is placed on the V-groove 44c. In S4, the movable member 36 is advanced by the control of the solenoid valve device 82, and the component s is held by the terminal pair 54 of the movable member 36 and the terminal pair 52 of the fixed member 34. It is presumed that the terminal pairs 52, 54 are in contact with the electrode portions sp1, sp2 of the component s and are in an indented state.

[0059] Next, in S5, the component is discharged. The electromagnetic on-off valve 83 is switched to the open state, and the air supplied from the air source 78 is ejected from the opening 70a via the ion generator 76 and the air passage 70. The ejected ions irradiate the component s and the like, thereby discharging the component s.

[0060] In S6, the electrical characteristics (e.g., impedance) of the component s are measured. Then, in S7, based on the measured value Zm of the impedance described above, the open-circuit correction value, the short-circuit correction value obtained in S2, etc., the final impedance Zdut of the component s is obtained. In addition, the final impedance Zdut can be displayed on the display 216, or compared with the default value, and the comparison result can be displayed on the display 216, etc.

[0061] Then, after obtaining the final electrical characteristics (impedance) Zdut of the component s, in S8, the movable member 36 is retracted, and the holding table 32 is retracted. By retracting the holding table 32, the pair of measuring members 37 is surrounded by the cover portion 62. As the movable member 36 retracts, air is ejected from the opening 70a, but the air is prevented from diffusing inside the cover portion 62 and flows in a swirling manner. Therefore, the component s can be separated from the terminals 52a, 52b, 54a, 54b, and the component s can be made to fall. The component is accommodated in the component accommodating portion 26 via the waste passage 28. In S9, the holding table 32 is advanced to return to the initial position.

[0062] As described above, in the present embodiment, the element s is well held by a pair of terminal pairs 52 and 54. Therefore, the measurement accuracy of the electrical characteristics of the element s can be improved.

[0063] In addition, the front end portions of the four terminals 52a, 52b, 54a, and 54b are each substantially wedge-shaped. Therefore, at the contact portions of the terminals 52a, 52b, 54a, and 5b that are in contact with the element s, the generation of an oxide film is suppressed as compared with the opposing surfaces 34f and 36f. Therefore, as compared with the case where the element s is held by a pair of opposing surfaces 34f and 36f, a decrease in the reliability of the measured value of the electrical characteristics of the element s can be suppressed.

[0064] Furthermore, a step of detaching the element s from the pair of terminal pairs 52 and 54 by the suction nozzle 18 can be provided between S8 and S9. The element s is mostly held in a state where the front ends of the terminal pairs 52 and 54 are inserted into the electrodes sp1 and sp2. Therefore, there may be a case where the element s cannot be detached from the terminal pairs 52 and 54 due to the air supplied from the opening 70a. In contrast, air can be ejected from the second direction (for example, the vertical direction, i.e., the z direction), which is orthogonal to the first direction (y direction) that is the holding direction of the terminal pairs 52 and 54, to the element s by the suction nozzle 18, or the suction nozzle 18 can be brought into contact with the element s from the z direction. Thereby, the element s can be detached well from the pair of terminal pairs 52 and 54.

[0065] In addition, the main bodies 34h and 36h of the pair of measurement members 37 can also be made of resin. In this case, weight reduction can be achieved and cost reduction can be realized.

[0066] Moreover, a dedicated static elimination unit for discharging the element s can be provided in the measurement device 24, or a dedicated element detachment unit for detaching the element s after the electrical characteristics measurement from the terminal pairs 52 and 54 can be provided, etc. In addition, it is not essential to provide a static elimination unit and an element detachment unit.

[0067] On the other hand, the pair of terminal pairs 52 and 54 can also be respectively configured to be relatively movable with respect to the main bodies 34h and 36h. For example, after measuring the electrical characteristics of the element s, the front end portions of the pair of terminal pairs 52 and 54 can be introduced into the interiors of the main bodies 34h and 36h without protruding from the opposing surfaces 34f and 36f. Thereby, the element s can be detached from the terminals 52a, 52b, 54a, and 54b. In addition, the front end portions of the terminals 52a, 52b, 54a, and 54b can be protected. In the present embodiment, the element detachment unit is constituted by a mechanism that can relatively move the pair of terminal pairs 52 and 54 with respect to the main bodies 34h and 36h.

[0068] As described above, in the present embodiment, a short-circuit correction value acquisition unit is constituted by the electrical characteristic measurement circuit 61, a pair of protection components 34g and 36g, a part of the storage S2 of the control device 200, a part that executes S2, and the like. In addition, a charge removal unit is constituted by an air supply unit 85 including an ion generator 76 and the like. Moreover, a component detachment unit is constituted by the suction nozzle 18 of the head moving device 8 or the suction nozzle 18 of the head moving device 8, a positive pressure source 21, and the like. In addition, the component holding unit 65 corresponds to the insulator part and the low dielectric constant part.

[0069] As described above, in addition to the manner described in the embodiment, the present disclosure can also be implemented in a manner in which various changes and improvements have been made based on the knowledge of those skilled in the art.

[0070] Explanation of reference numerals

[0071] 24: Measurement device; 32: Holding table; 34: Fixing member; 36: Movable member; 34g, 36g: Protection components; 52a, 52b: Terminals; 54a, 54b: Terminals; 42: Measurement unit; 44: Component placement unit; 45: Component holding unit; 58, 60: Coaxial cable parts; 58a, 58b, 60a, 60b: Coaxial cables; 61: Electrical characteristic measurement circuit; 85: Air supply unit; 200: Control device; 202: Storage unit

[0072] Ways that can be applied

[0073] (1) A measurement device that measures the electrical characteristics of an element as an electronic component while the element is held by a pair of measurement members, wherein each of the pair of measurement members includes two terminals each capable of contacting the element.

[0074] The four terminals each including two terminals can be plate-shaped or rod-shaped, respectively. In addition, among the four terminals, at least at the front end portions, they can be formed into a shape that tapers towards the front end, such as a wedge shape. The wedge shape also includes a needle shape. In addition, by setting the front end portions to a wedge shape, the two terminals can approach each other at the front end portions, respectively.

[0075] (2) The measurement device according to item (1), wherein the front end portions of the four terminals each including the two terminals are each substantially wedge-shaped.

[0076] (3) The measurement device according to item (1) or (2), wherein the four terminals each including the two terminals are connected by a four-terminal pair connection method or a four-terminal connection method.

[0077] The four-terminal pair connection method and the four-terminal connection method are connection methods that make the current signal path and the voltage signal path independent. The four-terminal connection method is a connection method in which the measurement current flows only in the inner conductor, and the four-terminal pair connection method is a connection method in which the measurement current flows in the inner conductor of the coaxial cable and a current of the same magnitude and opposite direction flows in the outer conductor.

[0078] (4) The measuring device according to any one of items (1) to (3), wherein each of the pair of measuring members includes a main body having facing surfaces facing each other, and the two terminals are respectively provided so as to protrude from the facing surfaces in a direction approaching each other. The measuring device includes a pair of protection members that are respectively provided on each of the pair of facing surfaces so as to protrude more than the two terminals.

[0079] (5) The measuring device according to item (4), wherein the measuring device includes a short-circuit correction value acquisition unit that acquires a short-circuit correction value in a state where the pair of protection members are in contact with each other.

[0080] The short-circuit correction value is acquired in a state where the front ends of the pair of protection members are in contact with each other. The front ends of the protection members are in a state of protruding from the main body more than the front ends of the terminals.

[0081] (6) The measuring device according to any one of items (1) to (5), wherein the measuring device includes an element holding unit that holds the element, and the pair of measuring members hold the element held by the element holding unit. The element holding unit includes an insulator portion made of an insulator.

[0082] The insulator portion can be made of a low dielectric constant material.

[0083] (7) The measuring device according to item (6), wherein the measuring device includes a discharging unit that discharges the element held by the element holding unit.

[0084] (8) The measuring device according to item (6), wherein the measuring device is provided in a mounting machine that mounts the element on a circuit board, and the mounting machine includes a discharging unit that discharges the element held by the element holding unit.

[0085] The discharging unit can be provided in the measuring device or in the mounting machine. In addition, the discharging unit can discharge the element held by the element holding unit and held by the pair of terminals, that is, a pair of terminal pairs.

[0086] (9) The measuring device according to item (7) or (8), wherein the discharging unit includes an ion generator that irradiates ions to the element.

[0087] The measuring device according to any one of items (1) to (9), wherein the measuring device includes an element detaching unit that detaches the element from each pair of two terminals, i.e., a pair of terminal pairs, after measuring the electrical characteristics.

[0088] The measuring device according to any one of items (1) to (9), wherein the measuring device is provided in a mounting machine for mounting the element on a circuit board, and the mounting machine includes an element detaching unit that detaches the element from each pair of two terminals, i.e., a pair of terminal pairs, after measuring the electrical characteristics.

[0089] The element detaching unit can be, for example, an air brush. In addition, the element detaching unit can include an air supply unit provided in the measuring device, or a suction nozzle of the mounting machine, etc.

[0090] The measuring device according to item (10) or (11), wherein the element detaching unit includes an air supply unit that blows air to the element held by the pair of terminal pairs.

[0091] The measuring device according to item (12), wherein the element is held by the pair of terminal pairs from a first direction, and the air supply unit supplies air to the element from a direction parallel to or orthogonal to the first direction.

[0092] The measuring device according to any one of items (10) to (13), wherein the element detaching unit includes an element contact portion that contacts the element held by the pair of terminal pairs.

[0093] The element contact portion can contact the element from a direction orthogonal to the first direction.

[0094] The measuring device according to any one of items (1) to (14), wherein the mounting machine includes a holding head that holds and moves the element, and the holding head includes a suction nozzle as an element holding member that adsorbs and holds the element, and the suction nozzle detaches the element from each pair of two terminals, i.e., a pair of terminal pairs, after measuring the electrical characteristics.

[0095] The suction nozzle has a function as an air supply unit that blows air to the element and a function as an element contact portion that detaches the element by contacting the element.

[0096] (16)The measuring device according to any one of items (1) to (15), wherein the measuring device includes: an approaching / separating device that causes the pair of measuring members to approach / separate from each other; and a holding table that holds the element. In a state where the element is held by the holding table, the pair of measuring members are caused to approach each other by the approaching / separating device, whereby the electrical characteristics of the element are measured in a state where each of the two terminals is in contact with the element and holds the element.

Claims

1. A measuring device that measures the electrical characteristics of an element as an electronic component while the element is held by a pair of measuring members, wherein, Each of the pair of measurement members includes two terminals each capable of contacting the element. The front end portions of the four terminals each including the two terminals are each substantially wedge-shaped.

2. The measuring device according to claim 1, wherein, Each of the pair of measurement members includes a main body having opposing surfaces facing each other. The two terminals are each provided so as to protrude from the opposing surfaces toward each other. The measuring device includes a pair of protection members each provided protruding from the two terminals on each of the pair of opposing surfaces.

3. The measuring device according to claim 2, wherein, The measuring device includes a short-circuit correction value acquisition unit that acquires a short-circuit correction value in a state where the pair of protection members are in contact with each other.

4. The measuring device according to any one of claims 1 to 3, wherein, The measuring device includes an element holding unit that holds the element. The pair of measurement members hold the element held by the element holding unit. The element holding unit includes an insulator portion made of a low dielectric constant material.

5. The measuring device according to claim 4, wherein, The measuring device includes a static elimination unit that eliminates static electricity from the element held by the element holding unit.

6. The measuring device according to claim 5, wherein, The static elimination unit includes an ion generator that irradiates ions onto the element.

7. The measuring device according to any one of claims 1 to 3, wherein, The measuring device includes an element detachment unit that detaches the element from a pair of terminal pairs serving as the two terminals after measuring the electrical characteristics.

8. The measuring device according to any one of claims 1 to 3, wherein, The measuring device is provided in a mounting machine that mounts the element on a circuit board. The mounting machine includes an element detachment unit that detaches the element from a pair of terminal pairs serving as the two terminals after measuring the electrical characteristics.

9. The measuring device according to claim 8, wherein, The element is held by the pair of terminal pairs from a first direction. The element detachment unit supplies air to the element from a direction orthogonal to the first direction.

10. A measuring device that measures the electrical characteristics of an element as an electronic component while the element is held by a pair of measuring members, wherein, The measuring device includes: a proximity / separation device that brings the pair of measurement members closer to / separates them from each other; and a holding stage that holds the element. Each of the pair of measurement members includes two terminals each capable of contacting the element. In a state where the element is held by the holding stage, the pair of measurement members are brought closer to each other by the proximity / separation device, whereby the electrical characteristics of the element are measured in a state where the two terminals are in contact with the element and holding the element.

Images