Mercury cadmium telluride mother liquor forming device and using method
By using a spacer in the mercury tellurized mother liquor molding device to divide the material pipes and connect them through the flow guide holes, the problem of inconsistent components of the mercury tellurized mother liquor is solved, uniform molding and efficient utilization of the mother liquor is achieved, and the repetition of epitaxial growth and yield rate are improved.
Patent Information
- Application Number
- CN202510397976.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-01
- Publication Date
- 2025-06-24
AI Technical Summary
In the liquid phase epitaxial growth process, the components of mercury cadmium tellurium mother liquor are inconsistent, resulting in large differences in components of the mother liquor ingot during cooling, which cannot meet the requirements of epitaxial growth, resulting in waste of raw materials and low yield.
A mercury cadmium tellurium mother liquor forming device is adopted, which includes a material pipe and a plurality of spacers. The spacer divides the material pipe into a fixed volume cavity and is connected through a flow guide hole to ensure that the mother liquor raw material is evenly mixed and molded during heating and cooling.
Through this device, the components consistency of mercury cadmium tellurium mother liquor is ensured, the repetition and utilization rate of the mother liquor are improved, and the production difficulty and cost are reduced.
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Figure CN120189876A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of infrared detector preparation technology, and more specifically, to a mercury cadmium telluride mother solution molding device. In addition, the present invention also relates to a method for using the mercury cadmium telluride mother solution molding device. Background Art
[0002] The core component of an infrared detector is the detector chip, which is composed of infrared photosensitive materials and CMOS readout circuits. After receiving infrared radiation from an object, the infrared photosensitive material generates a response signal, which is received by the CMOS readout circuit chip and processed into an electrical signal that can be recognized by the back-end imaging circuit. HgCdTe material has become the most widely used detector material in the field of infrared detection.
[0003] The basic process of producing HgCdTe thin film materials using horizontal liquid phase epitaxy technology is: according to the requirements of the required material components, first accurately weigh the growth mother liquid of a certain component ratio and put it in the mother liquid tank of the graphite boat, heat the graphite boat until the mother liquid is completely melted and evenly, control a certain cooling rate to slowly cool it down, the solubility of the solute in the liquid solvent decreases with the decrease of temperature, when it reaches the saturated state, pull the graphite boat slider to move the substrate to the bottom of the mother liquid, then cool the mother liquid to supercool and control the growth rate, and a thin film material with a thickness of about several to ten microns will be crystallized and grown on the substrate surface, and the epitaxial growth of the film can be achieved. By adjusting the formula of HgCdTe mother liquid, liquid phase epitaxial film materials with different components can be obtained. HgCdTe mother liquid refers to the raw material for epitaxial growth that is synthesized in advance according to a certain ratio of the three elements of tellurium, cadmium and mercury before epitaxy, so controlling the consistency of the components of HgCdTe mother liquid used for each epitaxy is the key to producing HgCdTe thin film materials.
[0004] Since the HgCdTe mother liquor used in each horizontal liquid phase epitaxy is relatively small, weighing only a dozen grams, and the content of individual elements in the mother liquor is less than 0.1 grams, it is impossible to weigh accurately. Therefore, the most commonly used HgCdTe mother liquor synthesis technology is to weigh and synthesize the tellurium, cadmium and mercury raw materials required for epitaxial growth together dozens of times. The specific method is to weigh the three elements of tellurium, cadmium and mercury according to the target components, evacuate and seal them in a high-purity quartz tube, then put them in a heating furnace, heat them to a high temperature of about 600℃, keep them melted for a long time and mix them evenly, then take out the quartz tube and quickly cool them to room temperature, and finally open the quartz tube to take out the whole mother liquor ingot. In order to keep the HgCdTe mother liquor components used in each epitaxy as consistent as possible, the mother liquor ingot must be smashed into block particles of several millimeters in size and mixed evenly, and in the subsequent epitaxial growth of HgCdTe thin films, an appropriate weight (generally about a dozen grams) of mother liquor will be weighed each time.
[0005] However, during the process of rapidly cooling the mercury cadmium telluride mother liquor from a high-temperature molten state to room temperature, due to the large difference in segregation coefficients of the three elements of tellurium, cadmium, and mercury, during the cooling process, there are significant differences in the component contents of various parts of the mother liquor ingot. In particular, the components at the upper and lower ends of the mother liquor ingot deviate greatly from the target component values, and it cannot meet the usage requirements of the epitaxial growth process. Moreover, the diameter of the mother liquor ingot is also required to be relatively small. Otherwise, there will also be obvious component differences between the outer edge and the central region of the mother liquor ingot, and the effective weight of the actually usable mother liquor is very small, resulting in waste of raw materials, low utilization rate, and difficulty in reducing costs. At the same time, it is very difficult to ensure the consistency of the components of the mother liquor weighed each time for epitaxial growth, and it is also difficult to ensure the repeatability and yield of mercury cadmium telluride thin film epitaxial growth, which affects the utilization effect of the mother liquor.
[0006] In summary, how to provide a mother liquor forming device that can make the mother liquor uniformly formed is an urgent problem to be solved by those skilled in the art at present. Summary of the Invention
[0007] In view of this, the purpose of the present invention is to provide a mercury cadmium telluride mother liquor forming device, which solves the problem of inconsistent components of the mercury cadmium telluride mother liquor weighed each time during the current liquid phase epitaxial growth process, and greatly increases the weight ratio of the components consistent with the current ones in the synthesized mother liquor, improves the utilization rate of the three raw materials of mercury cadmium telluride, and at the same time reduces the production difficulty.
[0008] Another purpose of the present invention is to provide a usage method for the above-mentioned mercury cadmium telluride mother liquor forming device.
[0009] In order to achieve the above purpose, the present invention provides the following technical solutions:
[0010] A mercury cadmium telluride mother liquor forming device, comprising:
[0011] A material tube;
[0012] A plurality of isolation sheets, the isolation sheets are installed in the material tube and divide the material tube into a plurality of cavities with fixed volumes. The isolation sheets are provided with through-flow guide holes, so that the plurality of cavities with fixed volumes separated by the isolation sheets can only communicate through the guide holes.
[0013] Further, a plurality of the isolation sheets are arranged in parallel.
[0014] Further, a plurality of the isolation sheets are arranged perpendicular to the axis of the material tube and are uniformly arranged along the length direction of the material tube.
[0015] Further, the guide holes are all located at the edges of the isolation sheets, and the guide holes are semi-circular with the openings facing away from the center of the isolation sheets.
[0016] Further, on two adjacent ones of the spacer sheets, the diversion holes are respectively located on two sides of the axis of the material pipe.
[0017] Further, the present invention further includes:
[0018] a fixing member, which is connected to a plurality of the spacer sheets and is used for keeping the plurality of spacer sheets at a preset distance.
[0019] Further, the fixing member is in a rod-shaped structure, and a plurality of the spacer sheets are fixedly connected to the fixing rod.
[0020] Further, the fixing member and the plurality of spacer sheets are made of the same material and are integrally formed, and the material pipe is made of quartz.
[0021] A usage method, which is applied to the mercury cadmium telluride mother liquor forming device as described above, includes:
[0022] Placing the forming device into the material pipe;
[0023] Preparing mother liquor raw material powder and filling the mother liquor raw material powder into the material pipe;
[0024] Vacuumizing and sealing the material pipe filled with the mother liquor raw material powder;
[0025] Putting the sealed material pipe into a heating furnace for heating and melting the mother liquor raw material powder;
[0026] Taking out the heated material pipe and quickly cooling it to room temperature;
[0027] Cutting the cooled material pipe and taking out the forming device to obtain a plurality of mercury cadmium telluride mother liquor wafers.
[0028] Further, in the step of putting the sealed material pipe into a heating furnace for heating and melting the mother liquor raw material powder;
[0029] The heating furnace is a rocking type synthetic resistance furnace, and the material pipe is rocked while heating.
[0030] The mercury cadmium telluride mother liquor forming device provided by the present invention, when in use, first prepare a material tube for containing the mother liquor raw material, and then prepare a plurality of spacer sheets. The spacer sheets are installed in the material tube and divide the material tube into a number of cavities with a fixed volume. The spacer sheets are provided with through-flow guiding holes, so that the several cavities with a fixed volume separated by the spacer sheets can only communicate through the guiding holes. That is to say, by placing the mother liquor raw material in the material tube, the mother liquor raw material fills the several cavities with a fixed volume separated by the spacer sheets through the guiding holes on the spacer sheets. Then, place the material tube containing the mother liquor raw material into a heating furnace for heating to melt the mother liquor raw material into a liquid state. During the liquid state process, the mother liquor raw material is fully mixed in the material tube, and then it is cooled to room temperature. Due to the action of the several spacer sheets, even if segregation may occur during the cooling process, the composition of each mercury cadmium telluride mother liquor wafer will no longer change, avoiding separation during cooling. Thus, the composition of the mercury cadmium telluride mother liquor used for dozens of epitaxial growths can be ensured to be completely consistent in one synthesis of the mercury cadmium telluride mother liquor. The repeatability and utilization rate of the mother liquor are greatly improved, which is beneficial to cost reduction. At the same time, the production difficulty of the mercury cadmium telluride mother liquor wafer is greatly reduced.
[0031] A method for using the above mercury cadmium telluride mother liquor forming device. BRIEF DESCRIPTION OF THE DRAWINGS
[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the provided drawings.
[0033] Figure 1 It is a schematic structural view of the material tube provided by the present invention;
[0034] Figure 2 It is a schematic structural view of the device provided by the present invention placed in the material tube;
[0035] Figure 3 It is a schematic side view of the device provided by the present invention;
[0036] Figure 4 It is a schematic axonometric view of the device provided by the present invention;
[0037] Figure 5 It is a schematic axonometric view of the partial spacer sheet provided by the present invention;
[0038] Figure 6 It is a schematic view of the method steps provided by the present invention.
[0039] Figures 1-6 Among them, the reference numerals include:
[0040] Material tube 1, isolation sheet 2, fixing piece 3, diversion hole 4. Specific implementation mode
[0041] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.
[0042] The core of the present invention is to provide a mercury cadmium telluride mother liquor forming device, which solves the problem of inconsistent components in the mercury cadmium telluride mother liquor weighed each time in the current liquid phase epitaxial growth process, and greatly increases the weight ratio of the mother liquor after synthesis that is consistent with the current components, improves the utilization rate of the three raw materials of mercury cadmium telluride, and reduces the production difficulty at the same time.
[0043] Another core of the present invention is to provide a usage method for the above-mentioned mercury cadmium telluride mother liquor forming device.
[0044] Please refer to Figures 1-6 , a mercury cadmium telluride mother liquor forming device, including a material tube 1 and isolation sheets 2. There are several isolation sheets 2, which are installed in the material tube 1 and divide the material tube 1 into several cavities with fixed volumes. The isolation sheets 2 are provided with through diversion holes 4, so that the several cavities with fixed volumes separated by the isolation sheets 2 can only communicate through the diversion holes 4.
[0045] It should be noted that the material tube 1 in the embodiments of the present invention can adopt any shape and can be selected according to requirements, such as cylindrical, square columnar, polygonal and other structures.
[0046] In addition, the isolation sheets 2 in the embodiments of the present invention can adopt a shape that matches the material tube 1, and at the same time, the isolation sheets 2 adopt a shape that matches the shape of the material tube 1.
[0047] In addition, the diversion holes 4 in the embodiments of the present invention can be located at any position on the isolation sheets 2, as long as the space inside the material tube 1 can be circulated.
[0048] In addition, the diversion holes 4 in the embodiments of the present invention can adopt any shape. Specifically, they can adopt circular holes, polygonal holes or semi-circular holes, etc.
[0049] In addition, the opening area of the diversion holes 4 in the embodiments of the present invention can be determined according to the area of the isolation sheets 2. Specifically, the opening area of the diversion holes 4 is proportional to the area of the isolation sheets 2, and the ratio is less than 10%.
[0050] In use, first prepare the material tube 1 for containing the mother liquor raw material. Then prepare a plurality of spacer sheets 2. The spacer sheets 2 are installed in the material tube 1 and divide the material tube 1 into a plurality of cavities with a fixed volume. The spacer sheets 2 are provided with through-flow guiding holes 4, so that the plurality of cavities with a fixed volume separated by the spacer sheets 2 can only communicate through the flow guiding holes 4. That is to say, by placing the mother liquor raw material in the material tube 1, the mother liquor raw material fills the plurality of cavities with a fixed volume separated by the spacer sheets 2 through the flow guiding holes 4 on the spacer sheets 2. Then place the material tube 1 containing the mother liquor raw material into the heating furnace for heating to melt the mother liquor raw material into a liquid state. During the liquid state, the mother liquor raw material is fully mixed in the material tube 1, and then it is cooled to room temperature. Due to the action of the plurality of spacer sheets 2, even if segregation may occur during the cooling process, the composition of each mercury cadmium telluride mother liquor wafer will no longer change, avoiding separation during cooling. Thus, the synthesis of the mercury cadmium telluride mother liquor can ensure that the compositions of the mercury cadmium telluride mother liquor used for dozens of epitaxial growths are completely consistent. The repeatability and utilization rate of the mother liquor are greatly improved, which is beneficial to reducing costs. At the same time, the production difficulty of the mercury cadmium telluride mother liquor wafer is greatly reduced.
[0051] It should be noted that the arrangement direction and position of the spacer sheet 2 in the embodiment of the present invention are not limited. Specifically, the spacer sheet 2 only needs to divide the space in the material tube 1 into several spaces. That is to say, the spacer sheet 2 can be arranged in a direction parallel or perpendicular to the axis of the material tube 1, or in a cross direction.
[0052] Optionally, in some embodiments, the plurality of spacer sheets 2 are arranged in parallel. That is to say, the plurality of spacer sheets 2 are arranged in a parallel direction, which is convenient for the production of the device. At the same time, after the mother liquor is formed, it is also convenient to remove the mother liquor sheet, and it is more convenient to calculate the volume of the mother liquor sheet.
[0053] Optionally, in some embodiments, the plurality of spacer sheets 2 are arranged perpendicular to the axis of the material tube 1 and are evenly arranged along the length direction of the material tube 1. That is to say, the spacer sheets 2 are arranged along the axis direction of the material tube 1 to divide the space in the material tube 1 into several spaces, thereby realizing the formation of the mother liquor sheet.
[0054] It should be noted that the spacing between several spacer sheets 2 in the embodiments of the present invention can be selected and adjusted according to actual production needs. Specifically, the spacing between the spacer sheets 2 is calculated based on the weight of the mercury cadmium telluride mother liquor required for each liquid phase epitaxial growth. The calculation method is as follows: First, according to the weight of the mercury cadmium telluride mother liquor required for each growth, and at the same time according to the density of the mercury cadmium telluride mother liquor at room temperature, the volume of each solid circular wafer of the mercury cadmium telluride mother liquor after synthesis is calculated. The solid density of the mercury cadmium telluride mother liquor at room temperature can be calculated by relevant formulas or directly measured. And the volume of the mercury cadmium telluride mother liquor melted at 600 °C is about 10% larger than the volume at room temperature. In this way, the distance between each spacer sheet 2 can be calculated. By adjusting the spacing and quantity of the spacer sheets 2 placed each time, the preparation of multiple mercury cadmium telluride mother liquor circular wafers with the same or different weights can be completed in one synthesis of the mother liquor. According to the weight of about a dozen grams of mercury cadmium telluride mother liquor usually required for each epitaxy currently, the thickness of each mother liquor circular wafer is usually about a few millimeters.
[0055] In addition, the spacing between each spacer sheet 2 in the embodiments of the present invention can adopt a fixed spacing, that is to say, the spacing between several spacer sheets 2 is the same.
[0056] In other embodiments, the spacing between several spacer sheets 2 is not the same. For example, the spacing between several spacer sheets 2 can be set in an increasing or decreasing manner, or according to production requirements, multiple different spacings are selected so that several spacer sheets 2 have multiple different spacings, realizing the preparation of multiple mercury cadmium telluride mother liquor circular wafers with different weights in a single preparation.
[0057] In addition, the thickness of the spacer sheet 2 in the embodiments of the present invention can be selected and determined according to production requirements. Specifically, the thickness of the spacer sheet 2 can be arbitrarily adjusted under the condition of ensuring that the spacer sheet 2 unit does not deform during the production process.
[0058] In the above embodiments, the solid density of the mercury cadmium telluride mother liquor at room temperature can be calculated by the following formula: , where x is the content of Cd and y is the content of Te. Then, the required volume is calculated from the solid density of the mercury cadmium telluride mother liquor, and the spacing of the spacer sheet 2 is obtained according to the required volume.
[0059] Please refer to Figures 1-6 , in some embodiments, the diversion holes 4 are all located at the edges of the spacer sheet 2. That is to say, the diversion holes 4 are placed at the edge positions of the spacer sheet 2, and the diversion holes 4 are semi-circular with the opening facing away from the center of the spacer sheet 2. The diversion holes 4 are close to the edge positions of the spacer sheet 2, which is convenient for adding the mother liquor raw materials.
[0060] In some other embodiments, the diversion holes 4 can adopt other shapes, such as a polygonal structure, as long as it is determined that the opening of the diversion hole 4 faces the side wall of the material pipe 1.
[0061] For the further convenience of adding the mother liquor raw material, optionally, in some embodiments, a diversion pipe can be used to add the mother liquor raw material. The diversion pipe is inserted into the material pipe 1 through the diversion hole 4, so that the mother liquor raw material can quickly enter the interior of the material pipe 1 through the diversion pipe. At the same time, by moving the position of the diversion pipe to adjust the position of the outlet of the diversion pipe, the cavity between different spacer sheets 2 can be filled with the mother liquor raw material, which is more convenient and fast.
[0062] Optionally, in some embodiments, the diversion pipe is a hollow tubular structure, and a number of openings are provided on the diversion pipe and arranged along its axial direction. Therefore, when adding the mother liquor raw material, the cavities between different spacer sheets 2 can be filled with the mother liquor raw material at the same time.
[0063] Optionally, in some embodiments, in order to further facilitate the filling of the mother liquor material, a funnel-shaped feeding end is installed on the diversion pipe.
[0064] Optionally, in some embodiments, the diversion holes 4 on two adjacent spacer sheets 2 are respectively located on both sides of the axis of the material pipe 1. By restricting the positions of the diversion holes 4, the two adjacent diversion holes 4 are respectively placed on both sides, that is to say, the diversion holes 4 are arranged alternately. During the cooling process, the condensation can be further reduced, and the forming quality of the mother liquor sheet can be improved.
[0065] Optionally, in some embodiments, the material pipe 1 and the spacer sheet 2 can be integrally formed, and a number of spacer sheets 2 can be fixed through the integral forming method.
[0066] Optionally, in some embodiments, it further includes a fixing member 3. The fixing member 3 is connected to a number of the spacer sheets 2 and is used to keep a number of the spacer sheets 2 at a preset distance. That is to say, a number of the spacer sheets 2 are fixed through the fixing member 3 to ensure that the space divided by the spacer sheets 2 remains fixed. At the same time, a number of the spacer sheets 2 are made into a whole through the fixing member 3, which is convenient for installation and disassembly.
[0067] Optionally, in some embodiments, the fixing member 3 can adopt any shape, such as a cylindrical shape.
[0068] Optionally, in some embodiments, the fixing member 3 is a rod-shaped structure, and a number of spacer sheets 2 are fixedly connected to the fixing rod. The fixing of a number of the spacer sheets 2 is realized through the fixing member 3.
[0069] Optionally, in some embodiments, the fixing member 3 and several spacer sheets 2 are made of the same material and integrally formed. The material tube 1 is made of quartz, which has high purity, excellent high-temperature resistance and chemical stability, can maintain its structural integrity at high temperatures, and has little contamination to the melt, making it suitable for the preparation of high-purity semiconductor materials.
[0070] Optionally, in some embodiments, in order to enable the spacing of the spacer sheets 2 to be adjusted according to usage requirements and to make the device reusable, the fixing member 3 is composed of several circular ring structures and further includes a fixing rod. Several fixing members 3 can be sleeved on the fixing rod, and the spacer sheets 2 are fixedly connected to the fixing member 3. Therefore, by adjusting the number of fixing members 3 between the spacer sheets 2, the adjustment of the spacing of the spacer sheets 2 can be achieved, which is more convenient and fast, and can be reused, reducing the preparation cost.
[0071] Optionally, in some embodiments, in order to keep the fixing member 3 relatively fixed on the fixing rod, the fixing rod has a cross-section with a polygonal structure, and at the same time, the inner ring of the fixing member 3 has a shape that matches the fixing rod.
[0072] Optionally, in some embodiments, the fixing member 3 slides with damping between the fixing rods, so that the fixing member 3 can be fixed to the fixing rod.
[0073] Optionally, in some embodiments, in order to achieve different spacings of the spacer sheets 2, the fixing member 3 can be provided with multiple thicknesses. Through the combination of fixing members 3 with different thicknesses, the spacer sheets 2 can have different spacings, meeting the user's need to prepare mother liquid sheets with different thicknesses.
[0074] Optionally, in some embodiments, the planes where several fixing members 3 are in contact with each other are smooth surfaces, which can prevent the mother liquid from seeping in.
[0075] In some other embodiments, the contact surface of the fixing member 3 is provided with mutually cooperating grooves and protrusions. By inserting the protrusions into the grooves on adjacent fixing members 3, the clamping of two adjacent fixing members is realized, ensuring the fixed position of the spacer sheet 2.
[0076] Optionally, in some embodiments, the grooves and protrusions can be circular rings, that is, through the grooves and protrusions, not only the fixation of the positions of two adjacent fixing members 3 is realized, but also the prevention of the mother liquid from seeping in, further reducing the waste of the mother liquid.
[0077] In some other embodiments, the fixing member 3 and several spacer sheets 2 are made of the same material and integrally formed. The material tube 1 is made of graphite, which has good thermal conductivity, thermal shock resistance and mechanical strength, and is especially stable at high temperatures, making it suitable for processes that require rapid heating and cooling.
[0078] A usage method, applied to a mercury cadmium telluride mother liquid forming device, includes;
[0079] S1. Place the forming device into the material tube 1;
[0080] S2. Prepare the raw material powder of the mother liquor, and fill the raw material powder of the mother liquor into the material tube 1;
[0081] S3. Vacuumize and seal the material tube 1 filled with the raw material powder of the mother liquor;
[0082] S4. Place the sealed material tube 1 into the heating furnace for heating to melt the raw material powder of the mother liquor;
[0083] S5. Take out the heated material tube 1 and quickly cool it to room temperature;
[0084] S6. Cut open the cooled material tube 1 and take out the forming device to obtain several pieces of mercury cadmium telluride mother liquor wafers.
[0085] In the above embodiments, the specific implementation method is as follows: Accurately weigh the raw materials of the three elements of tellurium, cadmium, and mercury according to the target components of mercury cadmium telluride liquid phase epitaxy. The raw materials are in powder form. Load the mixed raw materials into the material tube 1 that has already placed the spacer 2. Then vacuumize the material tube 1 and seal it by soldering. Then place the quartz tube into the resistance furnace and heat the furnace body to a certain temperature to completely melt the mercury cadmium telluride mother liquor. In this way, the entire melt of the mercury cadmium telluride mother liquor will be evenly distributed into each cavity divided by the spacer 2 in the mother liquor separation tank. At this time, take out the quartz tube and quickly cool it to room temperature. The mother liquor between the spacers 2 quickly solidifies into a solid and separates from each other due to volume shrinkage. Cut open the material tube 1 and take out the spacer 2, and dozens of independently formed mercury cadmium telluride mother liquor wafers can be obtained. Each mercury cadmium telluride mother liquor wafer can be used for one-time epitaxy. Since each mother liquor wafer is separated after being evenly mixed in the molten state, their respective components are all the same. Although segregation may also occur during the subsequent cooling process, the composition of each mercury cadmium telluride mother liquor wafer remains unchanged.
[0086] Using this mercury cadmium telluride mother liquor synthesis device to synthesize mercury cadmium telluride mother liquor, the method is simple. One synthesis of mercury cadmium telluride mother liquor can ensure that the components of dozens of epitaxial mother liquors are exactly the same, greatly improving the repeatability and utilization rate, and is beneficial to reducing costs.
[0087] Optionally, in some embodiments, in order to accelerate the cooling rate of the mother liquor in the material tube 1, the heated material tube 1 can be placed in the coolant to quickly cool the material tube 1, solidify the mother liquor, and further reduce the occurrence of condensation of the mother liquor.
[0088] Optionally, in some embodiments, the sealed material tube 1 is placed in a heating furnace for heating to melt the mother liquor raw material powder. The heating furnace uses a rocking synthetic resistance furnace, and the material tube 1 is rocked while heating. By rocking the material tube 1 in the molten state of the mother liquor material, the mixing of the mother liquor in the material tube 1 is promoted, and the forming quality of the mother liquor is improved.
[0089] That is to say, the key point of the embodiment of the present invention is that the material tube 1 and several spacer sheets 2 cooperate with each other. The spacer sheets 2 are installed in the material tube 1 and divide the material tube 1 into several cavities with fixed volumes. The spacer sheets 2 are provided with through-flow guiding holes 4, so that the several cavities with fixed volumes separated by the spacer sheets 2 can only communicate through the flow guiding holes 4. That is to say, by placing the mother liquor raw material in the material tube 1, the mother liquor raw material fills the several cavities with fixed volumes separated by the spacer sheets 2 through the flow guiding holes 4 on the spacer sheets 2. Then, the material tube 1 filled with the mother liquor raw material is placed in the heating furnace for heating to melt the mother liquor raw material into a liquid state. During the liquid state, the mother liquor raw material is fully mixed in the material tube 1, and then it is cooled to room temperature. Due to the action of the several spacer sheets 2, even if segregation may occur during the cooling process, the composition of each mercury cadmium telluride mother liquor wafer will no longer change, avoiding separation during cooling. Therefore, the composition of the mercury cadmium telluride mother liquor used for dozens of epitaxial growths can be guaranteed to be completely consistent in one synthesis of the mercury cadmium telluride mother liquor. The repeatability and utilization rate of the mother liquor are greatly improved, which is beneficial to reducing costs and at the same time greatly reduces the production difficulty of the mercury cadmium telluride mother liquor wafer.
[0090] In this specification, the various embodiments are described in a progressive manner. The key point of each embodiment is to illustrate the differences from other embodiments. The same or similar parts among the various embodiments can be referred to each other.
[0091] The above has introduced in detail a mercury cadmium telluride mother liquor forming device provided by the present invention. Specific examples are used in this article to elaborate on the principle and implementation manner of the present invention. The description of the above embodiments is only used to help understand the method and its core idea of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the protection scope of the present invention.
Claims
1. A mercury cadmium telluride mother liquid molding device, characterized in that: include: Feed pipe (1); A plurality of isolation sheets (2) are provided, the isolation sheets (2) being installed in the material pipe (1) and dividing the material pipe (1) into a plurality of cavities of fixed volumes, the isolation sheets (2) being provided with through-going flow guide holes (4) so that the plurality of cavities of fixed volumes separated by the isolation sheets (2) can be connected only through the flow guide holes (4).
2. The mercury cadmium telluride mother liquid molding device according to claim 1, characterized in that: A plurality of the isolation sheets (2) are arranged in parallel.
3. The mercury cadmium telluride mother liquid molding device according to claim 2, characterized in that: The plurality of isolation sheets (2) are arranged perpendicular to the axis of the material pipe (1) and are evenly arranged along the length direction of the material pipe (1).
4. The mercury cadmium telluride mother liquid molding device according to claim 1, characterized in that: The guide holes (4) are all located at the edge of the isolation plate (2), and the guide holes (4) are semicircular with their openings facing away from the center of the isolation plate (2).
5. The mercury cadmium telluride mother liquid molding device according to claim 4, characterized in that: The guide holes (4) on two adjacent isolation sheets (2) are respectively located on two sides of the axis of the material pipe (1).
6. The mercury cadmium telluride mother liquid molding device according to claim 1, characterized in that: Also includes: A fixing member (3), the fixing member (3) being connected to the plurality of isolation sheets (2) and being used to keep the plurality of isolation sheets (2) at a preset distance.
7. The mercury cadmium telluride mother liquid molding device according to claim 6, characterized in that: The fixing member (3) is a rod-shaped structure, and a plurality of the isolation sheets (2) are fixedly connected to the fixing rod.
8. The mercury cadmium telluride mother liquid molding device according to claim 7, characterized in that: The fixing member (3) and the plurality of isolation sheets (2) are made of the same material and are integrally formed, and the material tube (1) is made of quartz.
9. A method of use, applied to the mercury cadmium telluride mother solution forming device according to any one of claims 1 to 8, characterized in that: include; Placing the molding device in the material tube (1); Preparing mother liquid raw material powder, and filling the mother liquid raw material powder into the material tube (1); The material tube (1) containing the mother liquid raw material powder is evacuated and sealed; The sealed material tube (1) is placed in a heating furnace for heating to melt the mother liquid raw material powder; The heated material tube (1) is taken out and quickly cooled to room temperature; The cooled material tube (1) is cut open and the forming device is taken out to obtain a plurality of mercury cadmium telluride mother liquor discs.
10. A method of use according to claim 9, characterized in that: The sealed material pipe (1) is placed in a heating furnace for heating to melt the mother liquid raw material powder; The heating furnace adopts a swing-type synthetic resistance furnace, and the material pipe (1) is swung while heating.