Motion control device, magnetic control device and semiconductor equipment

Abstract

The invention provides a motion control device, a magnetic control device and semiconductor equipment, the motion control device comprises a cavity, a lifting transmission module, a supporting seat, a driving shaft and a rotating shaft, a chamber is arranged in the cavity, and a to-be-moved part is placed in the chamber; the lifting transmission module is arranged above the cavity and used for being connected with a first power source. The supporting base is used for being connected with the lifting transmission module and further used for supporting the rotation driving module, and the rotation driving module comprises a second power source. The driving shaft is used for being matched with an output shaft of a second power source through a first matching structure, so that the output shaft of the second power source and the driving shaft cannot move relatively in the circumferential direction of the driving shaft and the axis extending direction; one end of the rotating shaft is arranged in the driving shaft, and the other end is arranged outside the driving shaft and used for being connected with a to-be-moved part; the rotating shaft and the driving shaft are relatively fixed; the axes of the output shaft of the second power source, the rotating shaft and the driving shaft coincide; the moving precision of the to-be-moved part can be improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment, and particularly to a motion control device, a magnetron control device, and a semiconductor equipment. Background Art

[0002] In the field of semiconductor technology, magnetron sputtering is often used to achieve physical vapor deposition. Specifically, an alternating electromagnetic field is formed in the sputtering chamber to extend the movement path of electrons, increase the concentration of plasma, and achieve more depositions to complete the physical vapor deposition of metal ions. Among them, a magnetized moving component (magnetron) is often used to accelerate and guide electrons so that they bombard the target along a specific path. By controlling the lifting and rotation of the magnetized moving component, the efficiency and uniformity of full-target sputtering are improved. However, in the prior art, the rotation of the moving component and its movement relative to the target are relatively complex, and the movement accuracy of the moving component is relatively low. Summary of the Invention

[0003] This application discloses a motion control device, a magnetron control device, and a semiconductor equipment, and the motion control device can improve the movement accuracy of the moving component.

[0004] In a first aspect, this application provides a motion control device, including a cavity, a lifting transmission module, a support base, a driving shaft, and a rotating shaft. There is a chamber inside the cavity for placing the moving component; the lifting transmission module is arranged above the cavity and is used to connect to a first power source; the support base is used to connect to the lifting transmission module and also support the rotation driving module. The rotation driving module includes a second power source, and the second power source outputs power through the output shaft of the second power source; the driving shaft is used to cooperate with the output shaft of the second power source through a first cooperation structure so that the output shaft of the second power source and the driving shaft cannot move relative to each other in the circumferential direction and the axial extension direction of the driving shaft; one end of the rotating shaft is arranged inside the driving shaft, and the other end is arranged outside the driving shaft and is used to connect to the moving component; the rotating shaft and the driving shaft are cooperated through a second cooperation structure to limit the relative rotation of the rotating shaft and the driving shaft in the circumferential direction of the rotating shaft; the rotating shaft and the driving shaft are also cooperated through a third cooperation structure to limit the relative movement of the rotating shaft and the driving shaft in the axial extension direction of the rotating shaft; wherein, the axes of the output shaft of the second power source, the rotating shaft, and the driving shaft coincide; the support base is used to move along the axial extension direction of the rotating shaft under the drive of the first power source, and drive the moving component to move along the axial extension direction of the rotating shaft through the second power source, the driving shaft, and the rotating shaft; the driving shaft is also used to rotate around the axis of the rotating shaft under the drive of the second power source, thereby driving the rotating shaft to rotate around the axis of the rotating shaft, so that the moving component rotates around the axis of the rotating shaft.

[0005] In this solution, the support base is connected to the lifting drive module. The lifting drive module can drive the support base to move along the axial extension direction of the rotation axis under the drive of the first power source, and then drive the rotation drive module supported by the support base to move along the axial extension direction of the rotation axis. The output shaft of the second power source of the rotation drive module is connected to the drive shaft through the first matching structure, and the output shaft of the second power source and the drive shaft cannot move relative to each other in the axial extension direction of the drive shaft. Among them, the axes of the output shaft of the second power source, the rotation axis, and the drive shaft coincide; and then drive the drive shaft to move in the axial extension direction of the rotation axis. One end of the rotation axis is arranged inside the drive shaft, and the other end is arranged outside the drive shaft and is used to connect with the component to be moved. The rotation axis and the drive shaft are also matched through the third matching structure to limit the relative movement of the rotation axis and the drive shaft in the axial extension direction of the rotation axis, so as to drive the rotation axis and the component to be moved to move in the axial extension direction of the rotation axis; the drive shaft is used to cooperate with the output shaft of the second power source through the first matching structure, and the output shaft of the second power source and the drive shaft cannot move relative to each other in the circumferential direction of the drive shaft, that is, the output shaft of the second power source and the drive shaft cannot move relative to each other in the circumferential direction of the rotation axis. The drive shaft can be driven to rotate around the axis of the rotation axis by the second power source. The rotation axis and the drive shaft are matched through the second matching structure to limit the relative rotation of the rotation axis and the drive shaft along the circumferential direction of the rotation axis. Then, the rotation axis is driven to rotate around the axis of the rotation axis through the drive shaft, so that the component to be moved rotates around the axis of the rotation axis. In this way, the movement of the component to be moved in the axial extension direction of the rotation axis can be controlled by the first power source, and the rotation of the component to be moved around the axis of the rotation axis can be controlled by the second power source; compared with the prior art in which the rotation axis and the output shaft of the motor are not coaxially arranged and a belt is used for transmission, the risk of slipping when using a belt transmission in the prior art can be avoided. At the same time, the axes of the output shaft of the second power source, the rotation axis, and the drive shaft coincide, which can reduce the transmission error and vibration, ensure the synchronism and accuracy of power transmission, and then improve the movement accuracy of the rotation axis and the component to be moved connected to the rotation axis.

[0006] In the prior art, both the rotation driving device and the lifting driving device are arranged at the top of the cavity. During the process of the lifting driving device driving the rotating shaft to lift, the position of the rotation driving device changes relative to the rotating shaft. If the rotation driving device is to drive the rotating shaft to rotate, the rotation driving device needs to be provided with a lifting module to keep the relative height of the rotation driving device and the rotating shaft consistent. The lifting of the rotation driving device lags behind and is prone to travel errors, which will cause the relative height between the rotating mechanism and the rotating shaft to change and affect the transmission reliability. In the embodiment of the present application, the support seat is used to be connected to the lifting transmission module and also used to support the rotation driving module. The support seat moves along the axial extension direction of the rotating shaft and drives the rotation driving module to move along the axial extension direction of the rotating shaft at the same time. Moreover, the output shaft of the second power source, the driving shaft and the rotating shaft of the rotation driving module cannot move relative to each other in the axial extension direction of the rotating shaft, that is, there is no lifting lag of the rotation driving module relative to the rotating shaft and there will be no travel error in the movement of the rotation driving module and the rotating shaft, which can ensure the precise control of the lifting and rotation of the moving part to be connected to the rotating shaft.

[0007] Precisely because the support seat in this solution can move along the axial extension direction of the rotating shaft, that is, the lifting movement direction of the support seat is the same as the axial extension direction of the rotating shaft. During the lifting movement of the support seat, it can directly act on the rotation driving module, act on the driving shaft through the output shaft of the second power source of the rotation driving module, and then act on the output shaft connected to the driving shaft, avoiding the phenomenon of lifting lag between the rotating shaft and the rotation driving module, and there will be no travel error in the movement of the rotation driving module and the rotating shaft. By making the axes of the output shaft of the second power source, the rotating shaft and the driving shaft coincide, the inevitable distance between the rotating shafts of the two pulleys caused by using a synchronous belt in the prior art is avoided, and the influence of the lateral force on the rotating shaft during the movement or rotation process due to the existence of the radial interval is avoided, ensuring the reliable movement of the rotating shaft when the support seat moves or the output shaft of the second power source rotates, thereby avoiding the influence on the perpendicularity of the rotating shaft and being able to ensure the precise control of the lifting and rotation of the moving part to be connected to the rotating shaft.

[0008] In a possible implementation, a first hole is formed at the bottom of the drive shaft, and the rotating shaft includes a first shaft that can extend into the first hole; the second mating structure includes a keyway formed on the inner wall of the first hole; the second mating structure further includes a key block protruding from the outer peripheral surface of the first shaft; through the plug-in fit between the key block and the keyway, the rotating shaft and the drive shaft are limited in the circumferential direction of the rotating shaft, so that the rotating shaft and the drive shaft cannot rotate relative to each other in the circumferential direction of the rotating shaft. By forming a first hole at the bottom of the drive shaft and including a first shaft that can extend into the first hole in the rotating shaft, the drive shaft and the rotating shaft can be connected, and through the plug-in fit between the key block and the keyway, it can be used to ensure that the first shaft is assembled at the corresponding position of the first hole, improve the assembly accuracy of the first shaft and the first hole, and when the drive shaft rotates, it can abut against the inner wall of the keyway and drive the key block to rotate synchronously, thereby driving the drive shaft including the first shaft to rotate synchronously, improving the transmission accuracy, and ensuring the transmission effect of the drive shaft.

[0009] In a possible implementation, the third mating structure includes a second hole formed at the top of the drive shaft and a threaded hole formed at the top of the first shaft, and the second hole communicates with the first hole; the third mating structure further includes a connecting member, the first end of the connecting member abuts against the drive shaft, and the second end of the connecting member passes through the second hole and is screwed into the threaded hole to connect and tighten the first shaft, so that the rotating shaft and the drive shaft cannot move relative to each other in the axial extension direction of the rotating shaft. The first end of the connecting member abutting against the drive shaft can limit the movement of the connecting member towards the first shaft, and the second end of the connecting member passes through the second hole and is screwed into the threaded hole located in the first hole to connect and tighten the first shaft, so that the first shaft abuts against the drive shaft, which can limit the movement of the first shaft towards the connecting member, and further make the connected connecting member and the first shaft as a whole unable to move relative to the drive shaft in the axial extension direction of the rotating shaft, so that the rotating shaft and the drive shaft cannot move relative to each other in the axial extension direction of the rotating shaft.

[0010] In a possible embodiment, the lifting drive module includes a fixed seat, a screw, a nut and a guide rail, the fixed seat is fixed relative to the cavity; the screw is rotatably connected to the fixed seat, one end of the screw is connected to the first power source, so that the first power source can drive the screw to rotate around the axis of the screw, and the axis of the screw is parallel to the axis of the rotating shaft; the nut is movably mounted on the screw, and the nut is fixedly connected to the support seat; the guide rail is arranged on the fixed seat, and the extension direction of the guide rail is parallel to the extension direction of the axis of the screw, and the support seat is connected to a slider that can slide with the guide rail, so that when the first power source drives the screw to rotate, it can drive the nut to slide along the extension direction of the axis of the screw and drive the support seat to slide along the extension direction of the guide rail. The lifting transmission module adopts the transmission method of lead screw and nut, which can realize the stepless lifting of the support base connected to the nut. The lead screw and nut transmission structure is compact, and can withstand large loads and maintain stable transmission performance, which helps the support base to maintain accurate position during frequent lifting. The guide rail setting can provide certain support for the support base, avoiding eccentricity affecting transmission accuracy, and can meet the needs of stepless lifting adjustment.

[0011] In a possible embodiment, it also includes an insulating shell connected to the cavity and connected to the chamber; the rotating shaft also includes a second shaft connected to the first shaft, the insulating shell is sleeved on the outer periphery of the second shaft, and the insulating shell is provided with a first protrusion extending toward the second shaft, the first protrusion is used to divide the cavity in the insulating shell into an upper chamber and a lower chamber connected to the chamber, the outer periphery of the second shaft is provided with a second protrusion located below the first protrusion, and the lower chamber is provided with a mechanical seal that abuts against the first protrusion and the second protrusion to form a seal between the upper chamber and the lower chamber. By providing a mechanical seal between the first protrusion and the second protrusion, the sealing between the upper chamber and the lower chamber of the insulating shell can be achieved, ensuring that the liquid in the chamber will not flow into the upper chamber to cause leakage of the liquid in the chamber.

[0012] In a possible embodiment, the insulating shell is provided with a first channel, the first inlet and outlet of the first channel are located on the end surface of the insulating shell facing the support seat, and the second inlet and outlet of the first channel are located at the top of the lower chamber, and the gas located in the lower chamber can be discharged along the first channel, so that the liquid in the chamber can rise to the top of the lower chamber. In this way, the insulating shell is provided with a first channel and the second inlet and outlet of the first channel are located at the top of the lower chamber, so that the gas formed in the chamber can be fully or partially discharged along the first channel after rising to the lower chamber, which effectively increases the amount of water injected into the chamber. At the same time, after the gas is discharged, the liquid in the chamber can move up to the lower chamber as the amount of liquid increases, so that the mechanical seal is immersed in the liquid as a whole, which can effectively lubricate the mechanical seal and improve the reliability and life of the mechanical seal.

[0013] In a possible implementation, a rolling member is provided in the upper cavity. The rolling member includes an inner layer and an outer layer that can rotate relative to each other. The inner layer is sleeved on the outer periphery of the second shaft, and the outer layer is connected to the inner wall of the upper cavity, and the outer layer can move axially along the second shaft relative to the upper cavity. By arranging the rolling member in the upper cavity, relative rotation and sliding between the second shaft of the rotating shaft and the insulating shell can be achieved, assisting the precise movement of the rotating shaft, and at the same time, wear between the rotating shaft and the insulating shell can be avoided, improving the service life of the rotating shaft and the insulating shell.

[0014] In a possible implementation, a feeding component is further included. The feeding component includes a feeding sleeve and a feeding connecting piece. The feeding sleeve includes a barrel body sleeved on the outer periphery of the insulating shell, an extension body provided on the outer side wall at one end of the barrel body. The extension body extends outward along the axial and radial directions of the barrel body and covers a partial circumference of the outer side wall. The other end of the barrel body is connected to the conductive layer located in the inner cavity of the cavity. The extension body includes a connecting portion and two convex structures. The two convex structures are radially symmetrically connected to the barrel body. The connecting portion is connected to the two convex structures and there is an isolation hole between the connecting portion and the barrel body; the feeding connecting piece is located above the cavity and connected to the middle of the connecting portion. The feeding connecting piece is used to connect to a power source to transfer power to the conductive layer through the feeding sleeve. Specifically, the power is transferred to the conductive layer of the cavity through the feeding component. The feeding connecting piece is connected to the middle of the connecting portion, so that the power conduction paths from the feeding connecting piece to the two convex structures are similar. By arranging the two convex structures at one end of the barrel body and radially symmetrically, the power can be conducted to the conductive layer along the barrel body as evenly as possible, realizing the uniform distribution of power.

[0015] In a possible implementation, in order to balance the influence of the isolation hole between the connecting portion and the barrel body on the uniform feeding of power into the barrel body, an arc-shaped notch is further provided on the barrel body. The arc-shaped notch is arranged opposite to the isolation hole, so that the arrangement of the arc-shaped notch can form a specific structural relationship with the isolation hole, improving the effect of uniformly feeding power into the barrel body.

[0016] In a possible implementation, in order to improve the stability of the feeding sleeve and facilitate production and installation, the feeding sleeve is integrally provided.

[0017] In a possible implementation, the cavity is in a cylindrical structure, and the central axis of the barrel body is collinear with the central axis of the cavity. So that the power of the power source is fed into the conductive layer through the barrel body and then evenly distributed by the conductive layer, realizing the uniform distribution of power, and avoiding the problem of uneven power distribution when the barrel body is offset.

[0018] In a possible implementation, the height of the top of the insulating shell is higher than the height of the top of the feeding sleeve. So that the rotating shaft in the insulating shell and the feeding sleeve on the outer periphery of the insulating shell are electrically isolated, effectively avoiding the leakage of feeding power to the outside of the cavity, avoiding causing safety risks and ensuring that the power of the power source is fully fed without waste.

[0019] In the second aspect, the present application provides a magnetron device, including a motion control device as described above, wherein the moving component is a magnetron; the magnetron device also has all the beneficial effects of the above-mentioned motion control devices, and can solve the problem of the magnetron movement being too complicated and not precise enough, so as to improve the efficiency and uniformity of the sputtering of the entire target.

[0020] In a third aspect, the present application provides a semiconductor device, which includes the above-mentioned magnetron device. The semiconductor device also has all the beneficial effects of the above-mentioned magnetron device.

[0021] In a fourth aspect, the present application provides a feeding assembly, including a feeding sleeve and a feeding connector, wherein the feeding sleeve includes a barrel and an extension body provided on the outer side wall at one end of the barrel, the extension body extending outward along the axial direction and radial direction of the barrel and covering the local circumference of the outer side wall; the extension body includes a connecting portion and two protruding structures, the two protruding structures are radially symmetrically connected to the barrel, the connecting portion is connected to the two protruding structures and there is an isolation hole between the barrel and the barrel, the feeding connector is connected to the middle part of the connecting portion, and the feeding connector is used to connect to a power source. The feeding assembly is used to realize power transmission to one end of the barrel and then to the other end of the barrel along the extension direction of the barrel, the feeding connector is connected to the middle part of the connecting portion, so that the power conduction path from the feeding connector to the two protruding structures is similar, and by arranging the two protruding structures at one end of the barrel and radially symmetrically, the power can be uniformly conducted along the barrel as much as possible, and the uniform distribution of power can be realized.

[0022] In a possible implementation manner, in order to balance the effect of the isolation hole between the connecting portion and the barrel body on the uniform power feeding into the barrel body, an arc-shaped notch is further provided on the barrel body, and the arc-shaped notch is arranged opposite to the isolation hole.

[0023] In a possible implementation manner, in order to improve the stability of the feeding sleeve and facilitate production and installation, the feeding sleeve is provided in an integrated manner.

[0024] In a possible embodiment, to facilitate the connection between the feeding connector and the connecting part, the feeding connector includes a connecting plate and a connecting column, one side of the connecting plate is connected to the middle of the connecting part, and the middle of the other side of the connecting plate is connected to the connecting column, and the end of the connecting column facing away from the connecting plate is used to connect to the power supply.

[0025] In a possible implementation manner, in order to facilitate installation and removal of the connecting plate and the connecting portion, screw holes are provided around the connecting plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can be obtained based on these drawings.

[0027] Figure 1 Structural schematic diagram of the motion control device provided by the embodiment of the present application without the rotation drive module assembled;

[0028] Figure 2 Structural schematic diagram of the motion control device provided by the embodiment of the present application with the rotation drive module assembled;

[0029] Figure 3 For Figure 2 Cross-sectional view along A-A in;

[0030] Figure 4 Cross-sectional view of the insulating shell provided by the embodiment of the present application;

[0031] Figure 5 Cross-sectional view of the power feeding component provided by the embodiment of the present application;

[0032] Figure 6 Cross-sectional view of the drive shaft provided by the embodiment of the present application;

[0033] Figure 7 Structural schematic diagram of the second mating structure provided by the embodiment of the present application.

[0034] Explanation of reference numerals in the drawings:

[0035] 1 - Cavity;

[0036] 101 - Chamber; 102 - Conductive layer; 103 - Insulating layer;

[0037] 2 - Lifting transmission module;

[0038] 201 - Fixed seat; 202 - Lead screw; 203 - Nut; 204 - Guide rail;

[0039] 3 - Support seat;

[0040] 301 - Slide block; 302 - Bearing;

[0041] 4 - Rotation drive module;

[0042] 401 - Second power source; 402 - Output shaft;

[0043] 5 - Rotation shaft;

[0044] 501 - First shaft; 502 - Second shaft;

[0045] 5021 - The first rod body; 5022 - The second rod body; 5023 - The second protrusion;

[0046] 6 - The component to be moved;

[0047] 7 - The drive shaft;

[0048] 701 - The first hole; 702 - The bump;

[0049] 8 - The first power source;

[0050] 9 - The insulating shell;

[0051] 901 - The first protrusion; 902 - The upper cavity; 903 - The lower cavity; 904 - The first channel;

[0052] 9041 - The first inlet / outlet; 9042 - The second inlet / outlet;

[0053] 10 - The mechanical seal;

[0054] 11 - The rolling element;

[0055] 1101 - The inner layer; 1102 - The outer layer;

[0056] 12 - The feeding assembly;

[0057] 121 - The feeding sleeve; 122 - The feeding connecting piece;

[0058] 1211 - The barrel body; 1212 - The extension body; 1221 - The connecting plate; 1222 - The connecting column;

[0059] 12111 - The arc-shaped notch; 12121 - The connecting part; 12122 - The protruding structure; 12123 - The isolation hole;

[0060] 13 - The first mating structure;

[0061] 14 - The second mating structure;

[0062] 1401 - The keyway; 1402 - The key block;

[0063] 15 - The third mating structure;

[0064] 1501 - The second hole; 1502 - The threaded hole; 1503 - The connecting piece;

[0065] 15011 - The first round hole; 15012 - The second round hole. Specific embodiments

[0066] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0067] In order to enable those skilled in the art of this technology to better understand the solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0068] In a process processing device, a motion control device can be used to drive a magnetron to rotate and to drive the magnetron to lift, so as to compensate for the consumption of a target disposed on the magnetron. However, in the prior art, the rotation of the moving part 6 (magnetron) and its movement relative to the target are relatively complex, and the movement accuracy of the moving part 6 is relatively low.

[0069] Based on this, the present application provides a motion control device to improve the movement accuracy of the moving part 6.

[0070] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "top", "bottom", "inside", "outside", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the indicated position or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0071] The terms used in the following embodiments are only for the purpose of describing specific embodiments, and are not intended to be a limitation of the present application. As used in the specification and appended claims of the present application, the singular forms "a", "an", "the", "above", "said", "this" are also intended to include, for example, the expression "one or more", unless the context clearly indicates otherwise.

[0072] In a first aspect, the present application provides a motion control device, which includes a cavity 1, a lifting transmission module 2, a support base 3, a drive shaft 7, and a rotating shaft 5. A chamber 101 is provided inside the cavity 1, and the chamber 101 is used to place a component to be moved 6. The lifting transmission module 2 is disposed above the cavity 1 and is used to be connected to a first power source 8. The support base 3 is used to be connected to the lifting transmission module 2 and is also used to support a rotation drive module 4. The rotation drive module 4 includes a second power source 401, and the second power source 401 outputs power through an output shaft 402 of the second power source 401. The drive shaft 7 is used to cooperate with the output shaft 402 of the second power source 401 through a first cooperation structure 13, so that the output shaft 402 of the second power source 401 and the drive shaft 7 cannot move relative to each other in the circumferential direction and the axial extension direction of the drive shaft 7. One end of the rotating shaft 5 is disposed inside the drive shaft 7, and the other end is disposed outside the drive shaft 7 and is used to be connected to the component to be moved 6. The rotating shaft 5 and the drive shaft 7 are cooperated through a second cooperation structure 14 to limit the relative rotation of the rotating shaft 5 and the drive shaft 7 in the circumferential direction of the rotating shaft 5. The rotating shaft 5 and the drive shaft 7 are also cooperated through a third cooperation structure 15 to limit the relative movement of the rotating shaft 5 and the drive shaft 7 in the axial extension direction of the rotating shaft 5. Wherein, the axes of the output shaft 402 of the second power source 401, the rotating shaft 5, and the drive shaft 7 coincide. The support base 3 is used to move along the axial extension direction of the rotating shaft 5 under the drive of the first power source 8, and drive the component to be moved 6 to move along the axial extension direction of the rotating shaft 5 through the second power source 401, the drive shaft 7, and the rotating shaft 5. The drive shaft 7 is also used to rotate around the axis of the rotating shaft 5 under the drive of the second power source 401, so as to drive the rotating shaft 5 to rotate around the axis of the rotating shaft 5, and make the component to be moved 6 rotate around the axis of the rotating shaft 5.

[0073] Figure 1 FIG. is a schematic structural diagram of the motion control device provided by an embodiment of the present application without the rotation drive module 4 assembled; Figure 2 FIG. is a schematic structural diagram of the motion control device provided by an embodiment of the present application with the rotation drive module 4 assembled; Figure 3 is Figure 2 the cross-sectional view along A-A in; Please refer to Figure 1 , Figure 2 and Figure 3, in this solution, the support base 3 is connected to the lifting drive module 2. Driven by the first power source 8, the lifting drive module 2 can drive the support base 3 to move along the axial extension direction of the rotating shaft 5, and further drive the rotation drive module 4 supported by the support base 3 to move along the axial extension direction of the rotating shaft 5. The output shaft 402 of the second power source 401 of the rotation drive module 4 is connected to the drive shaft 7 through the first mating structure 13, and the output shaft 402 of the second power source 401 and the drive shaft 7 cannot move relative to each other in the axial extension direction of the drive shaft 7. Among them, the axes of the output shaft 402 of the second power source 401, the rotating shaft 5 and the drive shaft 7 coincide; further drive the drive shaft 7 to move in the axial extension direction of the rotating shaft 5. One end of the rotating shaft 5 is arranged inside the drive shaft 7, and the other end is arranged outside the drive shaft 7 and is used to be connected to the component to be moved 6. The rotating shaft 5 and the drive shaft 7 are also mated through the third mating structure 15 to limit the relative movement of the rotating shaft 5 and the drive shaft 7 in the axial extension direction of the rotating shaft 5, so as to drive the rotating shaft 5 and the component to be moved 6 to move in the axial extension direction of the rotating shaft 5; the drive shaft 7 is used to mate with the output shaft 402 of the second power source 401 through the first mating structure 13, and the output shaft 402 of the second power source 401 and the drive shaft 7 cannot move relative to each other in the circumferential direction of the drive shaft 7, that is, the output shaft 402 of the second power source 401 and the drive shaft 7 cannot move relative to each other in the circumferential direction of the rotating shaft 5. The second power source 401 can drive the drive shaft 7 to rotate around the axis of the rotating shaft 5. The rotating shaft 5 and the drive shaft 7 are mated through the second mating structure 14 to limit the relative rotation of the rotating shaft 5 and the drive shaft 7 in the circumferential direction of the rotating shaft 5, and then drive the rotating shaft 5 to rotate around the axis of the rotating shaft 5 through the drive shaft 7, so that the component to be moved 6 rotates around the axis of the rotating shaft 5. In this way, the first power source 8 can control the component to be moved 6 to move in the axial extension direction of the rotating shaft 5, and the second power source 401 can control the component to be moved 6 to rotate around the axis of the rotating shaft 5; compared with the prior art in which the rotating shaft 5 and the output shaft of the motor are not coaxially arranged and a belt is used for transmission, the risk of slipping when using a belt drive in the prior art can be avoided. At the same time, the axes of the output shaft 402 of the second power source 401, the rotating shaft 5 and the drive shaft 7 coincide, which can reduce the transmission error and vibration, ensure the synchronism and accuracy of power transmission, and further improve the movement accuracy of the rotating shaft 5 and the component to be moved 6 connected to the rotating shaft 5.

[0074] Taking the moving part 6 as a magnetron as an example, the lifting transmission module 2 can drive the support base 3 to move along the axial extension direction of the rotating shaft 5 under the drive of the first power source 8, and further drive the rotation drive module 4 supported by the support base 3 to move along the axial extension direction of the rotating shaft 5. The output shaft 402 of the second power source 401 of the rotation drive module 4 is connected to the drive shaft 7 through the first matching structure 13, and the output shaft 402 of the second power source 401 and the drive shaft 7 cannot move relative to each other in the axial extension direction of the drive shaft 7. Among them, the axes of the output shaft 402 of the second power source 401, the rotating shaft 5 and the drive shaft 7 coincide; and then drive the drive shaft 7 to move in the axial extension direction of the rotating shaft 5. One end of the rotating shaft 5 is arranged inside the drive shaft 7, and the other end is arranged outside the drive shaft 7 and is used to connect with the magnetron. The rotating shaft 5 and the drive shaft 7 are also matched through the third matching structure 15 to limit the relative movement of the rotating shaft 5 and the drive shaft 7 in the axial extension direction of the rotating shaft 5, so as to drive the rotating shaft 5 to move in the axial extension direction of the rotating shaft 5, and further drive the magnetron placed in the chamber 101 to move up and down in the chamber 101; the drive shaft 7 is used to cooperate with the output shaft 402 of the second power source 401 through the first matching structure 13, and the output shaft 402 of the second power source 401 and the drive shaft 7 cannot move relative to each other in the circumferential direction of the drive shaft 7, that is, the output shaft 402 of the second power source 401 and the drive shaft 7 cannot move relative to each other in the circumferential direction of the rotating shaft 5. The second power source 401 can drive the drive shaft 7 to rotate around the axis of the rotating shaft 5. The rotating shaft 5 and the drive shaft 7 are matched through the second matching structure 14 to limit the relative rotation of the rotating shaft 5 and the drive shaft 7 along the circumferential direction of the rotating shaft 5, and then drive the rotating shaft 5 to rotate around the axis of the rotating shaft 5 through the drive shaft 7, so that the magnetron placed in the chamber 101 rotates around the axis of the rotating shaft 5 in the chamber 101.

[0075] In the prior art, both the rotation driving device and the lifting driving device are arranged at the top of the cavity. During the process of the lifting driving device driving the rotating shaft to lift, the position of the rotation driving device changes relative to the rotating shaft. If the rotation driving device is to drive the rotating shaft to rotate, the rotation driving device needs to be provided with a lifting module to keep the relative height of the rotation driving device and the rotating shaft consistent. The lifting of the rotation driving device lags behind and is prone to travel errors, which will cause the relative height between the rotating mechanism and the rotating shaft to change, affecting the transmission reliability. In the embodiment of the present application, the support base 3 is used to be connected to the lifting transmission module 2 and also used to support the rotation driving module 4. While the support base 3 moves along the axial extension direction of the rotating shaft 5, it drives the rotation driving module 4 to move along the axial extension direction of the rotating shaft 5. Moreover, the output shaft 402 of the second power source 401 of the rotation driving module 4, the driving shaft 7, and the rotating shaft 5 cannot move relative to each other in the axial extension direction of the rotating shaft 5. That is, there is no lifting lag of the rotation driving module 4 relative to the rotating shaft 5, and there will be no travel error in the movement of the rotation driving module 4 and the rotating shaft 5, which can ensure the precise control of the lifting and rotation of the component 6 to be moved connected to the rotating shaft 5.

[0076] Precisely because the support base 3 in this solution can move along the axial extension direction of the rotating shaft 5, that is, the lifting movement direction of the support base 3 is the same as the axial extension direction of the rotating shaft 5. During the lifting movement of the support base 3, it can directly act on the rotation driving module 4, and through the output shaft 402 of the second power source 401 of the rotation driving module 4, act on the driving shaft 7, and then act on the output shaft 402 connected to the driving shaft 7, avoiding the phenomenon of lifting lag between the rotating shaft 5 and the rotation driving module 4, and there will be no travel error in the movement of the rotation driving module 4 and the rotating shaft 5. By making the axes of the output shaft 402 of the second power source 401, the rotating shaft 5, and the driving shaft 7 coincide, the distance that inevitably appears between the rotation axes of the two belt pulleys caused by using a synchronous belt in the prior art is avoided, and the influence of the lateral force on the rotating shaft 5 during the movement or rotation process due to the existence of the radial interval is avoided, ensuring the reliable movement of the rotating shaft 5 when the support base 3 moves or the output shaft 402 of the second power source 401 rotates, thereby avoiding the influence on the perpendicularity of the rotating shaft 5, and being able to ensure the precise control of the lifting and rotation of the component 6 to be moved connected to the rotating shaft 5.

[0077] Among them, the top of the drive shaft 7 can be located within the support base 3. A bump 702 protruding outward from the outer peripheral surface of the drive shaft 7 is provided at the top of the drive shaft 7. A bearing 302 can be arranged between the support base 3 and the drive shaft 7. The bearing 302 can be arranged in two, and are respectively located on the upper and lower sides of the bump 702. The bearing 302 includes an inner ring and an outer ring that can rotate relative to each other. The inner ring of the bearing 302 is sleeved on the outer peripheral surface of the drive shaft 7 and abuts against one side of the bump 702 in the axial extension direction of the drive shaft 7. When the positions of the two bearings 302 relative to the support base 3 in the axial extension direction of the drive shaft 7 are fixed, the bump 702 can be limited in the axial extension direction of the drive shaft 7 through the inner rings of the two bearings 302, thereby restricting the movement of the drive shaft 7 relative to the support base 3 in the axial extension direction of the drive shaft 7. And the inner ring of the bearing 302 located under the bump 702 supports the bump 702 of the drive shaft 7, offsetting most or even all of the gravity of the drive shaft 7, the rotating shaft 5, and the component to be moved 6, so as to avoid burdening the output shaft 402 of the second power source 401 due to the weights of the drive shaft 7, the rotating shaft 5, and the component to be moved 6. At the same time, the outer ring of the bearing 302 abuts against the support base 3. The drive shaft 7 can rotate relative to the support base 3 around the axis of the drive shaft 7 through the outer ring of the bearing 302, and the accurate radial position of the drive shaft 7 is ensured, so as to improve the torsional situation of the drive shaft 7 during rotation.

[0078] It should be noted that the first mating structure 13 can be, but is not limited to, a coupling. That is, the output shaft 402 of the second power source 401 drives the drive shaft 7 to rotate synchronously through the coupling, and then drives the rotating shaft 5 and the component to be moved 6 to rotate synchronously; both the first power source 8 and the second power source 401 can be, but are not limited to, motors. The coupling and the drive shaft 7 can absorb and buffer the impact and vibration from the output shaft 402, so as to reduce the impact and vibration during the rotation of the output shaft 402.

[0079] Figure 6 It is a cross-sectional view of the drive shaft 7 provided by the embodiment of the present application; Figure 7 It is a schematic structural diagram of the second mating structure 14 provided by the embodiment of the present application; please refer to Figure 6 and Figure 7, in a possible implementation, a first hole 701 is formed at the bottom of the drive shaft 7, and the rotating shaft 5 includes a first shaft 501 that can extend into the first hole 701; the second mating structure 14 includes a keyway 1401 formed on the inner wall of the first hole 701, and the keyway 1401 can be formed at the bottom of the first hole 701; the second mating structure 14 further includes a key block 1402 protruding from the outer peripheral surface of the first shaft 501. When the first shaft 501 extends into the first hole 701, the key block 1402 on the outer peripheral surface of the first shaft 501 can be correspondingly inserted into the keyway 1401 at the bottom of the first hole 701; through the plug-in fit of the key block 1402 and the keyway 1401, the rotating shaft 5 and the drive shaft 7 are limited in the circumferential direction of the rotating shaft 5, so that the rotating shaft 5 and the drive shaft 7 cannot rotate relative to each other in the circumferential direction of the rotating shaft 5. By forming the first hole 701 at the bottom of the drive shaft 7 and including the first shaft 501 that can extend into the first hole 701 for the rotating shaft 5, the drive shaft 7 and the rotating shaft 5 can be connected, and through the plug-in fit of the key block 1402 and the keyway 1401, it can be used to ensure that the first shaft 501 is assembled at the corresponding position of the first hole 701, improve the assembly accuracy of the first shaft 501 and the first hole 701, and when the drive shaft 7 rotates, it can drive the key block 1402 to rotate synchronously by abutting against the inner wall of the keyway 1401, and then drive the drive shaft 7 including the first shaft 501 to rotate synchronously, improve the transmission accuracy, and ensure the transmission effect of the drive shaft 7.

[0080] It should be noted that the distance between the top surface of the keyway 1401 and the bottom end surface of the first hole 701 in the axial extension direction of the drive shaft 7 should be consistent with the length of the key block 1402 in the axial extension direction of the rotating shaft 5, that is, the length of the keyway 1401 in the axial extension direction of the drive shaft 7 should be consistent with the length of the key block 1402 in the axial extension direction of the rotating shaft 5, so that the key block 1402 can be completely inserted into the keyway 1401 and abut against the top surface of the keyway 1401 to limit the relative movement between the drive shaft 7 and the rotating shaft 5.

[0081] Please continue to refer to Figure 6, in a possible implementation, the third mating structure 15 includes a second hole 1501 formed at the top of the drive shaft 7 and a threaded hole 1502 formed at the top of the first shaft 501. The second hole 1501 communicates with the first hole 701. The third mating structure 15 further includes a connecting member 1503. The first end of the connecting member 1503 abuts against the drive shaft 7, and the second end of the connecting member 1503 passes through the second hole 1501 and then is screwed into the threaded hole 1502 to connect and tighten the first shaft 501, so that the rotating shaft 5 and the drive shaft 7 cannot move relative to each other in the axial extension direction of the rotating shaft 5. The first end of the connecting member 1503 abutting against the drive shaft 7 can limit the movement of the connecting member 1503 towards the first shaft 501, and the second end of the connecting member 1503 passes through the second hole 1501 and then is screwed into the threaded hole 1502 located in the first hole 701 to connect and tighten the first shaft 501, so that the first shaft 501 abuts against the drive shaft 7, which can limit the movement of the first shaft 501 towards the connecting member 1503. Furthermore, after the connecting member 1503 and the first shaft 501 are connected, they cannot move relative to the drive shaft 7 as a whole in the axial extension direction of the rotating shaft 5, so that the rotating shaft 5 and the drive shaft 7 cannot move relative to each other in the axial extension direction of the rotating shaft 5.

[0082] Further, the second hole 1501 can be set as a stepped hole. The stepped hole includes a first round hole 15011 with a larger cross-sectional diameter and a second round hole 15012 with a smaller cross-sectional diameter. The first round hole 15011 is located on the side of the second round hole 15012 away from the first hole 701, and a shoulder is formed between the first round hole 15011 and the second round hole 15012. The first round hole 15011 is located above, which is convenient for placing the connecting member 1503 into the first round hole 15011, and driving the connecting member 1503 to move downward until the second end of the connecting member 1503 passes through the second round hole 15012 and then is screwed into the threaded hole 1502 located in the first hole 701 to connect and tighten the first shaft 501. And when the second end of the connecting member 1503 tightens the first shaft 501, the first end of the connecting member 1503 abuts against the shoulder position. The whole connecting member 1503 is placed inside the drive shaft 7, and the first end of the connecting member 1503 abuts against the drive shaft 7 downward, and the first shaft 501 abuts against the drive shaft 7 upward, so that the connecting member 1503 and the first shaft 501 cannot move relative to the drive shaft 7 as a whole in the axial extension direction of the rotating shaft 5 after being connected, ensuring that the rotating shaft 5 and the drive shaft 7 cannot move relative to each other in the axial extension direction of the rotating shaft 5. The connecting member 1503 can be, but is not limited to, a screw. Among them, the first shaft 501 abutting against the drive shaft 7 upward can be realized by the key block 1402 and abutting against the top surface of the key groove 1401, or can be realized by the top of the first shaft 501 abutting against the top end face of the first hole 701, which will not be elaborated here.

[0083] In addition, to ensure that the axes of the drive shaft 7 and the rotating shaft 5 coincide, the first hole 701 can be set to be relatively long, and at the same time, the first shaft 501 can be set to be relatively long to improve the assembly accuracy of the first shaft 501 and the first hole 701. For example, the length of the first hole 701 in the extending direction of the axis of the rotating shaft 5 can be set to be not less than one-half of the length of the drive shaft 7 in the extending direction of the axis of the rotating shaft 5, and the overall length of the drive shaft 7 in the extending direction of the axis of the rotating shaft 5 is not less than one-half of the length of the rotating shaft 5 in the extending direction of the axis of the rotating shaft 5.

[0084] In a possible implementation manner, the lifting drive module includes a fixed seat 201, a lead screw 202, a nut 203, and guide rails 204. The fixed seat 201 is fixed relative to the cavity 1; the lead screw 202 is rotatably connected to the fixed seat 201, and one end of the lead screw 202 is connected to the first power source 8 so that the first power source 8 can drive the lead screw 202 to rotate around the axis of the lead screw 202, and the axis of the lead screw 202 is parallel to the axis of the rotating shaft 5; the nut 203 is movably sleeved on the lead screw 202, and the nut 203 is fixedly connected to the support seat 3; the guide rails 204 are arranged on the fixed seat 201, there are two guide rails 204, and the extending direction of the guide rails 204 is parallel to the extending direction of the axis of the lead screw 202, that is, the extending directions of the two guide rails 204 are both parallel to the extending direction of the axis of the rotating shaft 5. The support seat 3 is connected with a slider 301 that can be slidably matched with the guide rails 204, that is, the support seat 3 is slidably connected to the guide rails 204 through the slider 301, so that when the first power source 8 drives the lead screw 202 to rotate, it can drive the nut 203 to slide along the extending direction of the axis of the lead screw 202 and drive the support seat 3 to slide along the extending direction of the guide rails 204. The lifting transmission module 2 adopts the transmission mode of the lead screw 202 and the nut 203, which can realize the stepless lifting of the support seat 3 connected to the nut 203, and the transmission structure including the lead screw 202 and the nut 203 is compact. At the same time, it can bear a large load and maintain stable transmission performance, which helps the support seat 3 to maintain accurate position during frequent lifting, and at the same time greatly reduces the equipment debugging and adjustment time and improves the equipment operation efficiency. The setting of the guide rails 204 can play a certain supporting role for the support seat 3, avoid eccentricity from affecting the transmission accuracy, and at the same time can meet the needs of stepless lifting adjustment.

[0085] Figure 4 It is a cross-sectional view of the insulating shell 9 provided by the embodiment of the present application; please refer to Figure 4, in a possible implementation, it further includes an insulating shell 9 connected to the cavity 1 and communicating with the chamber 101. The insulating shell 9 is made of an insulating material; the rotating shaft 5 further includes a second shaft 502 connected to the first shaft 501. The second shaft 502 can be a stepped shaft, and the stepped shaft includes a first rod body 5021 with a smaller cross-sectional size and a second rod body 5022 with a larger cross-sectional size. The first rod body 5021 is connected to the bottom of the first shaft 501, and the second rod body 5022 is connected to the component to be moved 6. That is, when the key block 1402 is located at the bottom of the first shaft 501, the first rod body 5021 contacts the key block 1402. The cross-sectional radius of the first rod body 5021 can be set to be equal to the distance between the circumferential surface of the key block 1402 and the axis of the first shaft 501. The part of the circumferential surface at the bottom of the first rod body 5021 where the key block 1402 is not provided forms a stepped surface with the top surface of the first rod body 5021 and the circumferential surface of the first rod body 5021. By abutting the top surface of the first rod body 5021 against the bottom of the driving shaft 7, the length of the first shaft 501 extending into the first hole 701 can also be limited, and the rotating shaft 5 can be abutted against the driving shaft 7 upward; the insulating shell 9 is sleeved on the outer periphery of the second shaft 502, and the insulating shell 9 is provided with a first protrusion 901 extending towards the second shaft 502. The first protrusion 901 is used to divide the cavity in the insulating shell 9 into an upper cavity 902 and a lower cavity 903 communicating with the chamber 101. The first rod body 5021 is arranged to pass through the first protrusion 901 so that part of the second rod body 5022 is located in the lower cavity 903. A second protrusion 5023 is provided on the outer periphery of the second shaft 502 below the first protrusion 901. A mechanical seal 10 is provided in the lower cavity 903 and abuts against the first protrusion 901 and the second protrusion 5023 to form a seal between the upper cavity 902 and the lower cavity 903. By providing a mechanical seal 10 between the first protrusion 901 and the second protrusion 5023, the mechanical seal 10 can be, but is not limited to, a single mechanical seal structure, and the stationary ring and the rotating ring at the top of the mechanical seal 10 are closely attached to form a sealing surface. The spring of the mechanical seal 10 provides a pre-tightening force to press the rotating ring against the stationary ring to the first protrusion 901, so that the seal between the upper cavity 902 and the lower cavity 903 of the insulating shell 9 can be achieved, ensuring that the liquid in the chamber 101 will not flow into the upper cavity 902 and cause leakage of the liquid in the chamber 101.

[0086] In a possible implementation, the insulating housing 9 is provided with a first channel 904. The first channel 904 includes a vertical section and a horizontal section that are connected and perpendicular to each other. The first inlet / outlet 9041 of the first channel 904 is located on the end face of the insulating housing 9 facing the support base 3, that is, the first inlet / outlet 9041 is located at the top of the vertical section. The first inlet / outlet 9041 can be connected to the water supply and return pipeline. The second inlet / outlet 9042 of the first channel 904 is located at the top of the lower cavity 903, that is, the second inlet / outlet 9042 is located at one end of the horizontal section away from the vertical section, so that the gas located in the lower cavity 903 can be discharged along the first channel 904, enabling the liquid in the chamber 101 to rise to the top of the lower cavity 903. The first channel 904 can allow some or all of the gas in the lower cavity 903 to flow out, so as to prevent the gas from accumulating in the lower cavity 903 and being unable to be discharged to form trapped gas. At the same time, when adding liquid to the chamber 101, the first channel 904 can also allow the excess liquid in the lower cavity 903 to be discharged, serving as a basis for indicating that the liquid has been filled. The liquid can be, but is not limited to, deionized water. In this way, by providing the first channel 904 in the insulating housing 9 and the second inlet / outlet 9042 of the first channel 904 being located at the top of the lower cavity 903, the gas formed in the chamber 101 can rise to the lower cavity 903 and then be completely or partially discharged along the first channel 904, effectively increasing the water injection volume in the chamber 101. At the same time, when the gas is discharged, the liquid in the chamber 101 can move up into the lower cavity 903 as the liquid volume increases, enabling the mechanical seal 10 to be completely immersed in the liquid, effectively lubricating the mechanical seal 10, and improving the reliability and service life of the mechanical seal operation.

[0087] In a possible implementation, a rolling member 11 is provided in the upper cavity 902. The rolling member 11 includes an inner layer 1101 and an outer layer 1102 that can rotate relative to each other. The inner layer 1101 is sleeved on the outer periphery of the second shaft 502, and the outer layer 1102 is connected to the inner wall of the upper cavity 902, and the outer layer 1102 can move axially along the second shaft 502 relative to the upper cavity 902. By providing the rolling member 11 in the upper cavity 902, relative rotation and sliding between the second shaft 502 of the rotating shaft 5 and the insulating housing 9 can be achieved, assisting the precise movement of the rotating shaft 5, and at the same time, wear between the rotating shaft 5 and the insulating housing 9 can be avoided, improving the service life of the rotating shaft 5 and the insulating housing 9. In addition, a first flange is provided at the bottom of the insulating housing 9. After the top of the first flange is attached to and connected to the inner wall of the conductive layer 102 in the inner cavity of the cavity 1, a stable connection between the insulating housing 9 and the cavity 1 is achieved. The cavity 1 further includes an insulating layer 103 located outside the conductive layer 102 for electrically isolating the conductive layer 102 from the outside.

[0088] Figure 5 A cross-sectional view of the feeding component 12 provided by the embodiment of the present application; please refer to Figure 5, in a possible implementation, it further includes a feeding component 12. The feeding component 12 includes a feeding sleeve 121 and a feeding connecting piece 122. The feeding sleeve 121 and the feeding connecting piece 122 are made of materials with good electrical conductivity and are used for power transfer. The feeding sleeve 121 includes a barrel body 1211 sleeved on the outer periphery of the insulating shell 9, and an extension body 1212 provided on the outer side wall of one end of the barrel body 1211. The extension body 1212 extends outward along the axial and radial directions of the barrel body 1211 and covers a partial circumference of the outer side wall. The other end of the barrel body 1211 is connected to the conductive layer 102 located in the inner cavity of the cavity 1. Specifically, a second flange is provided at the other end of the barrel body 1211, and it is connected by fitting the bottom surface of the second flange to the outer wall of the conductive layer 102, so as to realize the stable connection between the feeding sleeve 121 and the conductive layer 102. The extension body 1212 includes a connecting portion 12121 and two protruding structures 12122. The two protruding structures 12122 are radially symmetrically connected to the barrel body 1211, and the tops of the protruding structures 12122 are flush with the top of the barrel body 1211. The connecting portion 12121 is connected to the two protruding structures 12122 and there is an isolation hole 12123 between it and the barrel body 1211; the feeding connecting piece 122 is located above the cavity 1 and is connected to the middle of the connecting portion 12121. The feeding connecting piece 122 is used to connect to a power source to transfer power to the conductive layer 102 through the feeding sleeve 121. The setting of the isolation hole 12123 can prevent the connecting portion 12121 from being directly connected to the barrel body 1211, thereby avoiding uneven power feeding caused by the conduction of the power source power along one side of the barrel body 1211. The isolation hole 12123 can be a through hole with a cross-section perpendicular to the axis of the rotating shaft 5 being a partial ring, that is, the inner wall of the isolation hole 12123 is designed as an arc surface, so that the distances between the side of the connecting portion 12121 facing the barrel body 1211 and the circumferential surface of the barrel body 1211 are the same everywhere. Specifically, the feeding component 12 is used to transfer power to the conductive layer 102 of the cavity 1. The feeding connecting piece 122 is connected to the middle of the connecting portion 12121, so that the power conduction paths from the feeding connecting piece 122 to the two protruding structures 12122 are similar. By arranging the two protruding structures 12122 at one end of the barrel body 1211 and being radially symmetric, power is as evenly conducted along the barrel body 1211 to the conductive layer 102 as possible to realize uniform power distribution.

[0089] It can be understood that in order to balance the influence of the isolation hole 12123 between the connection part 12121 and the barrel body 1211 on the uniform power feeding into the barrel body 1211, an arc-shaped notch 12111 is also provided on the barrel body 1211. The arc-shaped notch 12111 is arranged opposite to the isolation hole 12123, so that the setting of the arc-shaped notch 12111 can form a specific structural relationship with the isolation hole 12123, improving the effect of uniform power feeding into the barrel body 1211; further, the chamber 101 can be set to have a cylindrical structure, and the central axis of the barrel body 1211 is collinear with the central axis of the chamber 101. Thus, the power of the power supply is uniformly distributed by the conductive layer 102 after being fed into the conductive layer 102 through the barrel body 1211, realizing uniform power distribution (for example, after the barrel body 1211 feeds into the conductive layer 102, the conductive layer 102 uniformly distributes it, making the plasma on the target uniformly distributed), avoiding the problem of uneven power distribution when the barrel body 1211 is biased; in order to improve the stability of the feed sleeve 121 and facilitate production and installation at the same time, the feed sleeve 121 can be integrally provided; in addition, the height of the top of the insulating shell 9 is higher than the height of the top of the feed sleeve 121, and the position of the top of the feed sleeve 121 is one-fourth to one-third of the position from the top to the bottom of the feed sleeve 121. This makes the rotating shaft 5 in the insulating shell 9 and the feed sleeve 121 outside the insulating shell 9 electrically isolated, effectively avoiding the leakage of the feed power to the outside of the cavity 1, avoiding safety risks and ensuring that the power of the power supply is fully fed without waste.

[0090] It should be noted that the feed component 12 in this application can also be adapted to other devices, not limited to being adapted in the motion control device of this application.

[0091] Here, the feeding component 12 includes a feeding sleeve 121 and a feeding connecting piece 122. The feeding sleeve 121 includes a barrel body 1211 and an extension body 1212 provided on the outer side wall of one end of the barrel body 1211. The extension body 1212 extends outward along the axial and radial directions of the barrel body 1211 and covers a partial circumference of the outer side wall; the extension body 1212 includes a connecting portion 12121 and two convex structures 12122. The two convex structures 12122 are radially symmetrically connected to the barrel body 1211. The connecting portion 12121 is connected to the two convex structures 12122 and there is an isolation hole 12123 between the connecting portion 12121 and the barrel body 1211. The isolation hole 12123 can be a through hole with a cross-section perpendicular to the axial direction of the barrel body 1211 being a partial ring, that is, the inner wall of the isolation hole 12123 is designed as an arc surface, so that the distances between various parts of the side of the connecting portion 12121 facing the barrel body 1211 and the circumferential surface of the barrel body 1211 are consistent. The feeding connecting piece 122 is connected to the middle of the connecting portion 12121, and the feeding connecting piece 122 is used to connect to a power source. The feeding component 12 is used to transfer power to one end of the barrel body 1211 and then transfer it to the other end of the barrel body 1211 along the extending direction of the barrel body 1211. The feeding connecting piece 122 is connected to the middle of the connecting portion 12121, so that the power conduction paths from the feeding connecting piece 122 to the two convex structures 12122 are similar. By arranging the two convex structures 12122 at one end of the barrel body 1211 and radially symmetrically, power is as evenly conducted along the barrel body 1211 as possible, realizing the uniform distribution of power.

[0092] In a possible implementation manner, in order to balance the influence of the isolation hole 12123 existing between the connecting portion 12121 and the barrel body 1211 on the uniform feeding of power into the barrel body 1211, the barrel body 1211 is further provided with an arc-shaped notch 12111. The arc-shaped notch 12111 is arranged opposite to the isolation hole 12123, so that the arrangement of the arc-shaped notch 12111 can form a specific structural relationship with the isolation hole 12123, improving the effect of uniformly feeding power into the barrel body 1211.

[0093] In a possible implementation manner, in order to improve the stability of the feeding sleeve 121 and facilitate production and installation at the same time, the feeding sleeve 121 is integrally arranged.

[0094] In a possible implementation, for the convenience of connecting the feed connector 122 and the connection part 12121, the feed connector 122 includes a connection plate 1221 and a connection column 1222. One side of the connection plate 1221 is connected to the middle of the connection part 12121, and the middle of the other side of the connection plate 1221 is connected with the connection column 1222. The end of the connection column 1222 away from the connection plate 1221 is used to connect to the power supply. For the convenience of installing and disassembling the connection plate 1221 and the connection part 12121, screw holes are provided around the connection plate 1221, and the connection plate 1221 is fixed to the middle of the connection part 12121 by screws. When any one of the feed sleeve 121 and the feed connector 122 is damaged, it is convenient to replace.

[0095] In a second aspect, the present application provides a magnetron control device, including the motion control device as described in any one of the above. The component to be moved 6 is a magnetron. By arranging the above motion control device in the magnetron control device, the support base 3 is driven by the first power source 8 to move up and down, so that the output shaft 402 of the second power source 401, the drive shaft 7 connected to the output shaft 402, the rotating shaft 5 connected to the drive shaft 7, and the magnetron connected to the rotating shaft 5 move up and down synchronously. The output shaft 402 of the second power source 401 can drive the drive shaft 7, the rotating shaft 5 connected to the drive shaft 7, and the magnetron connected to the rotating shaft 5 to rotate synchronously, and there is no interference in the up and down movement and rotation process of the magnetron. The axes of the output shaft 402 of the second power source 401, the rotating shaft 5, and the drive shaft 7 coincide. It can reduce transmission errors and vibrations, ensure the synchronism and accuracy of power transmission, and can accurately control the up and down movement and rotation of the magnetron connected to the rotating shaft 5, and can solve the problems of overly complex and inaccurate movement of the magnetron, so as to improve the efficiency and uniformity of full-target sputtering.

[0096] In a third aspect, the present application provides a semiconductor device. The semiconductor device can be, but is not limited to, a chemical vapor deposition (CVD) device, a physical vapor deposition (PVD) device, a lithography stepper, an ion implantation device. Among them, the above magnetron control device is one of the physical vapor deposition devices. The semiconductor device including this physical vapor deposition device also has all the beneficial effects of the above magnetron control device, which will not be elaborated here.

[0097] It should be noted that in this specification, relational terms such as first and second are only used to distinguish one entity from several other entities, and do not necessarily require or imply any actual relationship or order between these entities.

[0098] In the present specification, the various embodiments are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. For the same or similar parts among the various embodiments, reference can be made to each other.

[0099] In this article, specific examples are used to elaborate on the principles and implementation manners of the present invention. The descriptions of the above embodiments are only used to help understand the method of the present invention and its core idea. It should be noted that for those of ordinary skill in the art in the technical field, without departing from the principle of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the protection scope of the present invention.

Claims

1. A motion control device, characterized in that: include: A cavity body, wherein a chamber is provided inside, and the chamber is used to place the parts to be moved; A lifting transmission module is disposed above the cavity and is used to be connected to the first power source; A support seat, used to be connected to the lifting transmission module, and also used to support the rotation drive module, wherein the rotation drive module includes a second power source, and the second power source outputs power through an output shaft of the second power source; A drive shaft, used to cooperate with the output shaft of the second power source through a first matching structure, so that the output shaft of the second power source and the drive shaft cannot move relative to each other in the circumferential direction and the axial extension direction of the drive shaft; A rotating shaft, one end of which is arranged inside the driving shaft, and the other end of which is arranged outside the driving shaft and is used to be connected to the moving part; the rotating shaft and the driving shaft cooperate with each other through a second cooperation structure to limit the relative rotation of the rotating shaft and the driving shaft along the circumferential direction of the rotating shaft; the rotating shaft and the driving shaft also cooperate with each other through a third cooperation structure to limit the relative movement of the rotating shaft and the driving shaft in the extending direction of the axis of the rotating shaft; wherein the axes of the output shaft of the second power source, the rotating shaft and the driving shaft coincide with each other; The support seat is used to move along the extension direction of the axis of the rotating shaft under the drive of the first power source, and drive the moving part to move along the extension direction of the axis of the rotating shaft through the second power source, the driving shaft and the rotating shaft; The driving shaft is also used to rotate around the axis of the rotating shaft under the drive of the second power source, thereby driving the rotating shaft to rotate around the axis of the rotating shaft, so that the moving part rotates around the axis of the rotating shaft.

2. The motion control device according to claim 1, characterized in that: A first hole is formed at the bottom of the driving shaft, and the rotating shaft comprises a first shaft capable of extending into the first hole; The second matching structure includes a keyway formed on the inner wall of the first hole; The second matching structure also includes a key block protruding from the outer peripheral surface of the first shaft; The key block and the key slot are plugged in and fit with each other so that the rotating shaft and the driving shaft are fitted in the circumferential upper limit direction of the rotating shaft, so that the rotating shaft and the driving shaft cannot rotate relative to each other in the circumferential direction of the rotating shaft.

3. The motion control device according to claim 2, characterized in that: The third matching structure includes a second hole opened at the top of the driving shaft and a threaded hole opened at the top of the first shaft, and the second hole is connected to the first hole; The third matching structure also includes a connecting member, a first end of the connecting member abuts against the driving shaft, and a second end of the connecting member passes through the second hole and is screwed into the threaded hole to connect and tighten the first shaft, so that the rotating shaft and the driving shaft cannot move relative to each other in the axial extension direction of the rotating shaft.

4. The motion control device according to any one of claims 1 to 3, characterized in that: The lifting drive module comprises: A fixing seat, fixed relative to the cavity; A lead screw rotatably connected to the fixed seat, one end of the lead screw being connected to the first power source so that the first power source can drive the lead screw to rotate around the axis of the lead screw, and the axis of the lead screw is parallel to the axis of the rotating shaft; A nut, movably sleeved on the lead screw, and the nut is fixedly connected to the support seat; The guide rail is arranged on the fixed seat, and the extension direction of the guide rail is parallel to the extension direction of the axis of the screw. The support seat is connected with a slider that can slide with the guide rail, so that when the first power source drives the screw to rotate, it can drive the nut to slide along the extension direction of the axis of the screw and drive the support seat to slide along the extension direction of the guide rail.

5. The motion control device according to claim 2, characterized in that: Also included is an insulating shell connected to the cavity and communicating with the chamber; The rotating shaft also includes a second shaft connected to the first shaft, the insulating shell is sleeved on the outer circumference of the second shaft, and the insulating shell is provided with a first protrusion extending toward the second shaft, the first protrusion is used to divide the cavity in the insulating shell into an upper cavity and a lower cavity connected to the cavity, the outer circumference of the second shaft is provided with a second protrusion located below the first protrusion, and the lower cavity is provided with a mechanical seal that abuts against the first protrusion and the second protrusion to form a seal between the upper cavity and the lower cavity.

6. The motion control device according to claim 5, characterized in that: The insulating shell is provided with a first channel, a first inlet and outlet of the first channel are located on the end surface of the insulating shell facing the support seat, and a second inlet and outlet of the first channel are located at the top of the lower chamber, and the gas in the lower chamber can be discharged along the first channel so that the liquid in the chamber can rise to the top of the lower chamber.

7. The motion control device according to claim 5, characterized in that: A rolling element is provided in the upper cavity, and the rolling element includes an inner layer and an outer layer which can rotate relatively, the inner layer is sleeved on the outer circumference of the second shaft, the outer layer is connected to the inner wall of the upper cavity, and the outer layer can move axially along the second shaft relative to the upper cavity.

8. The motion control device according to any one of claims 5 to 7, characterized in that: Also included is a feeding assembly, the feeding assembly comprising: A feeding sleeve, comprising a barrel sleeved on the outer periphery of the insulating shell, an extension body arranged on the outer side wall of one end of the barrel, the extension body extending outwardly along the axial direction and radial direction of the barrel, and covering the local circumference of the outer side wall, the other end of the barrel is connected to the conductive layer located in the inner cavity of the cavity, the extension body comprising a connecting portion and two protruding structures, the two protruding structures are radially symmetrically connected to the barrel, the connecting portion is connected to the two protruding structures and there is an isolation hole between the connecting portion and the barrel; A feeding connector is located above the cavity and connected to the middle of the connecting portion, and the feeding connector is used to connect to a power source to transfer power to the conductive layer through the feeding sleeve.

9. The motion control device according to claim 8, characterized in that: The cylinder body is also provided with an arc-shaped notch, and the arc-shaped notch is arranged opposite to the isolation hole.

10. The motion control device according to claim 8, characterized in that: The feeding sleeve is arranged in an integrated manner.

11. The motion control device according to claim 8, characterized in that: The chamber is in a cylindrical structure, and the central axis of the barrel is colinear with the central axis of the chamber.

12. The motion control device according to claim 8, characterized in that: The top of the insulating shell is located at a height higher than the top of the feeding sleeve.

13. A magnetic control device, characterized in that: It comprises the motion control device as described in any one of claims 1 to 12 above, wherein the component to be moved is a magnetron.

14. A semiconductor device, characterized in that: The semiconductor device comprises the magnetron apparatus according to claim 13.

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