High and low temperature circulation system

Abstract

The invention discloses a high and low temperature circulation system, relates to the technical field of semiconductor tests, and aims to solve the problems of small temperature range and low temperature control precision of a conventional refrigeration and heating system. A high and low temperature circulation system comprises a refrigeration module and a circulation module connected with the refrigeration module, the refrigeration module comprises a compressor and a heat exchanger set, and a gas-liquid separator is arranged and connected between adjacent heat exchangers in the heat exchanger set; the circulation module comprises a water tank and a heater connected with the water tank, the heater is connected with a water pump, the water pump is connected with a plurality of electromagnetic valves, the circulation module can adjust circulation liquid flowing paths of different temperature sections in a segmented mode, and the refrigeration module achieves ultralow-temperature refrigeration through automatic segregation of mixed refrigeration working media. According to the invention, the temperature control from-150 DEG C to 300 DEG C can be realized, and the heat exchanger group of the refrigeration module can be used for heat exchange, so that the sectional temperature control of different temperature sections can be realized.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor testing, and particularly to a high and low temperature cycling system. Background Art

[0002] After the production of semiconductor components is completed, in order to improve the service life and reliability of semiconductor components, high and low temperature tests need to be carried out on semiconductor components. The low temperature requirement is getting lower and lower, and it can reach -120°C to -150°C. At the same time, a high temperature of 100°C to 200°C is also required to be satisfied simultaneously. Currently, the temperature range of the refrigeration and heating system is small, and the temperature control accuracy is low.

[0003] For the Chinese patent with the publication number CN117433176A, although it can improve the refrigeration and heating efficiency of the system, it cannot solve the problems of the small temperature adjustment range and low temperature control accuracy of the above refrigeration and heating system. Summary of the Invention

[0004] The present invention solves the problems of the small temperature range and low temperature control accuracy of the current refrigeration and heating system, and proposes a high and low temperature cycling system that can achieve temperature control from -150°C to 300°C, and can use the heat exchanger group of the refrigeration module for heat exchange to achieve segmented temperature control in different temperature segments.

[0005] To achieve the above object, the present invention adopts the following technical solutions: A high and low temperature cycling system includes a refrigeration module and a cycling module connected to the refrigeration module. The refrigeration module includes a compressor and a heat exchanger group. An air-liquid separator is arranged and connected between adjacent heat exchangers in the heat exchanger group. The cycling module includes a water tank and a heater connected to the water tank. The heater is connected with a water pump, and the water pump is connected with a plurality of solenoid valves. The cycling module can segmentally adjust the flow path of the circulating liquid in different temperature segments, and the refrigeration module realizes ultra-low temperature refrigeration through the automatic partial condensation of the mixed refrigerant.

[0006] The system of this technical solution consists of a high and low temperature cycling system including a refrigeration module and a cycling module; the refrigeration module realizes ultra-low temperature refrigeration through the automatic partial condensation of a variety of mixed refrigerants and has high temperature control accuracy. The single-stage system can realize the mixed refrigeration of four or more refrigerants, and the lowest can realize ultra-low temperature refrigeration of -120°C to -150°C; the separate refrigeration module can meet the precise temperature control of +40°C to -150°C, and cooperate with the cycling module to achieve temperature control of +300°C to -150°C, with high temperature control accuracy.

[0007] The present invention is further arranged as follows: An oil separator is arranged between the heat exchanger group and the compressor. One end of the oil separator is connected to the compressor, and the other end of the oil separator is provided with a condenser and a first fan. The other end of the condenser is connected with a dryer filter, and the dryer filter is connected to the heat exchanger group.

[0008] In this technical solution, a variety of mixed working fluids at low temperature and low pressure are sucked in from the suction port of the compressor. After compression, they become a high-temperature and high-pressure mixed gas. The oil in the gas is separated by an oil separator, and the separated oil returns to the compressor. The mixed gas separated by the oil separator enters the condenser and is forced to dissipate heat by the first fan to condense into a low-temperature and high-pressure gas-liquid mixture.

[0009] The present invention is further configured as follows: The heat exchanger group includes at least five sequentially connected heat exchangers. An air-liquid separator is provided between adjacent heat exchangers. One end of the air-liquid separator is connected to one of the heat exchangers, and the other end of the air-liquid separator is connected to an electronic expansion valve, and the electronic expansion valve is connected to another heat exchanger.

[0010] In this technical solution, the multiple heat exchangers in the heat exchanger group can perform staged cooling and separation on refrigerants with different boiling points.

[0011] The present invention is further configured as follows: The end of the water pump far from the heater is connected to the user end. First solenoid valves are provided at the inlet and outlet positions of the user end. The first solenoid valves are respectively connected to second solenoid valves and fifteenth solenoid valves. The other end of the second solenoid valve is sequentially connected to a sixth heat exchanger and a third solenoid valve, and the third solenoid valve is connected to the other end of the fifteenth solenoid valve.

[0012] In this technical solution, when the corresponding solenoid valves are opened, the circulating liquid returning from the user end flows through the second solenoid valve into the sixth heat exchanger and is forced to dissipate heat by the second fan for air cooling.

[0013] The present invention is further configured as follows: The third solenoid valve is also respectively connected to a fourth solenoid valve and a fifth solenoid valve. The fourth solenoid valve is connected to a first heat exchanger. The other end of the fifth solenoid valve is respectively connected to a sixth solenoid valve and a seventh solenoid valve. The sixth solenoid valve is respectively connected to the first heat exchanger and the second heat exchanger.

[0014] In this technical solution, on this basis, the fifth solenoid valve is sequentially connected to the seventh solenoid valve, the ninth solenoid valve, the eleventh solenoid valve, and the thirteenth solenoid valve. The other end of the thirteenth solenoid valve is respectively connected to a check valve between the water tank and the heater and a fourteenth solenoid valve, and the other end of the fourteenth solenoid valve is connected to the fifth heat exchanger. And an eighth solenoid valve is provided between the seventh solenoid valve and the ninth solenoid valve. The other end of the eighth solenoid valve is respectively connected to the second heat exchanger and the third heat exchanger. Similarly, the tenth solenoid valve is respectively connected to the third heat exchanger and the fourth heat exchanger, and the twelfth solenoid valve is respectively connected to the fourth heat exchanger and the fifth heat exchanger.

[0015] The present invention is further configured as follows: The circulation module includes several segmented temperature control modes, including: High-temperature section mode: The temperature is adjusted by the heater and the sixth heat exchanger; Medium and normal-temperature section mode: The temperature is adjusted by the heat exchange between the first heat exchanger and the refrigerant; Low-temperature section mode: The temperature is reduced by the step-by-step heat exchange between the second heat exchanger to the fifth heat exchanger and the refrigerant in sequence.

[0016] In this technical solution, precise temperature control at different temperatures can be achieved through the circulation module. The system temperature control methods for different temperature sections are different, and in the above-mentioned low-temperature section mode, further subdivision can be carried out.

[0017] The present invention is further provided as: The gas-liquid separator includes a first gas-liquid separator. The first gas-liquid separator includes several channels. The third channel of the first gas-liquid separator is connected to a first electronic expansion valve; the second channel of the first gas-liquid separator is connected to the second heat exchanger.

[0018] In this technical solution, the connection relationships of the second gas-liquid separator and the third gas-liquid separator are similar to those of the above-mentioned first gas-liquid separator.

[0019] The present invention is further provided as: The first channel of the first heat exchanger is connected to the compressor, the second channel of the first heat exchanger is connected to the second heat exchanger, the third channel of the first heat exchanger is connected to the circulation module, the fourth channel of the first heat exchanger is respectively connected to the circulation module and the second heat exchanger, and the fifth channel of the first heat exchanger is connected to the condenser.

[0020] In this technical solution, the first heat exchanger is specifically connected to the first gas-liquid separator through its sixth channel.

[0021] The present invention is further provided as: The other end of the compressor is also connected to a capillary tube. The capillary tube is connected to an expansion vessel. The other end of the expansion vessel is connected to a solenoid valve. The other end of the solenoid valve is connected to a third gas-liquid separator.

[0022] The present invention is further provided as: A first pressure sensor and a first temperature sensor are respectively arranged between the compressor and the oil separator.

[0023] In this technical solution, the above-mentioned first pressure sensor and first temperature sensor can monitor the state parameters of the refrigerant and the circulating liquid in real time.

[0024] The present invention can bring the following beneficial effects: A high and low temperature circulation system involved in the present invention can achieve temperature control from -150°C to 300°C, and can use the heat exchanger group of the refrigeration module for heat exchange to achieve segmented temperature control in different temperature sections; it can achieve rapid cooling from high temperature, greatly reducing the cooling time. Brief Description of the Drawings

[0025] Figure 1 is the overall schematic diagram of the present application.

[0026] Figure 2 is the schematic diagram of the high-temperature section temperature control cycle in the present application.

[0027] Figure 3 is the schematic diagram of the normal-temperature section temperature control cycle in the present application.

[0028] Figure 4 is the schematic diagram of the low normal-temperature section temperature control cycle in the present application.

[0029] Figure 5 is the schematic diagram of the low-temperature section temperature control cycle in the present application.

[0030] Figure 6 is the schematic diagram of the deep low-temperature section temperature control cycle in the present application.

[0031] Figure 7 is the schematic diagram of the ultra-low temperature section temperature control cycle in the present application.

[0032] Figure 8 is the schematic diagram of the realization of the rapid cooling function in the present application.

[0033] Reference numerals: 1. Compressor 2. Oil separator 3. Condenser 4. Fan 5. Drier filter 6. First heat exchanger 7. Second heat exchanger 8. Third heat exchanger 9. Fourth heat exchanger 10. Fifth heat exchanger 11. First gas-liquid separator 12. Second gas-liquid separator 13. Third gas-liquid separator 14. First electronic expansion valve 15. Second electronic expansion valve 16. Third electronic expansion valve 17. Fourth electronic expansion valve 18. Solenoid valve 19. Expansion vessel 20. Fifth capillary tube 21. First pressure sensor 22. First temperature sensor 23. Second temperature sensor 24. Third temperature sensor 25. Fourth temperature sensor 26. Second pressure sensor 27. Fifth temperature sensor 30. Water tank 31. Heater 32. Water pump 33. First solenoid valve 34. Second solenoid valve 35. Third heat exchanger 36. Second fan 37. Third solenoid valve 38. Fourth solenoid valve 39. Fifth solenoid valve 40. Sixth solenoid valve 41. Seventh solenoid valve 42. Eighth solenoid valve 43. Ninth solenoid valve 44. Tenth solenoid valve 45. Eleventh solenoid valve 46. Twelfth solenoid valve 47. Thirteenth solenoid valve 48. Fourteenth solenoid valve 49. Check valve 50. Third pressure sensor 51. Sixth temperature sensor 52. Fourth pressure sensor 53. Seventh temperature sensor 54. Fifteenth solenoid valve. Detailed implementation manners

[0034] To make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific implementation manners described herein are only the best embodiments of the present invention, which are only used to explain the present invention and do not limit the protection scope of the present invention. All other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0035] Embodiment 1 This embodiment provides a high and low temperature circulation system. Referring to Figure 1 , it mainly includes a refrigeration module and a circulation module. The refrigeration module is connected to the circulation module. The refrigeration module mainly includes a compressor and a heat exchanger group. In the heat exchanger group, corresponding gas-liquid separators are provided and connected between adjacent heat exchangers. The circulation module mainly includes a water tank 30, a heater 31, a water pump 32 and a plurality of solenoid valves; the water tank 30 can be connected to the heater 31, the heater 31 is connected to the water pump 32, the water pump 32 is sequentially connected to the plurality of solenoid valves, and the circulation module can segmentally adjust the circulation liquid flow path of different temperature segments. The refrigeration module can achieve ultra-low temperature refrigeration through the automatic partial condensation of the mixed refrigeration working medium.

[0036] Continuing to refer to Figure 1 , an oil separator 2, a condenser 3, a first fan 4 and a dryer filter 5 are respectively provided between the heat exchanger group and the compressor 1; wherein, one end of the oil separator 2 is connected to the compressor 1, the other end of the oil separator 2 is provided and connected with the condenser 3, and a first fan 4 is provided on one side of the condenser 3; the other end of the condenser 3 is connected to the dryer filter 5, and the other end of the dryer filter 5 is connected to the heat exchanger group.

[0037] In addition, a first pressure sensor 21 and a second temperature sensor 22 are provided between the compressor 1 and the oil separator 2, and a second temperature sensor 23 is provided between the dryer filter 5 and the heat exchanger group.

[0038] For the heat exchanger group, it includes at least five sequentially connected heat exchangers. Corresponding gas-liquid separators are provided between adjacent heat exchangers. One end of the gas-liquid separator is connected to one of the heat exchangers, and the other end of the gas-liquid separator is connected to an electronic expansion valve, and the electronic expansion valve is also connected to another heat exchanger.

[0039] In this embodiment, the heat exchanger group includes a first heat exchanger 6, a second heat exchanger 7, a third heat exchanger 8, a fourth heat exchanger 9 and a fifth heat exchanger 10.

[0040] In this technical solution, the multiple heat exchangers of the heat exchanger group can perform staged cooling and separation on refrigerants with different boiling points.

[0041] In the circulation module, one end of the water pump 32 far away from the heater 31 is connected to the user end. A first solenoid valve 33 is arranged at the inlet and outlet positions of the user end. The other end of the first solenoid valve 33 is respectively connected to a second solenoid valve 34 and a fifteenth solenoid valve 54. The other end of the second solenoid valve 34 is sequentially connected to a sixth heat exchanger 35 and a third solenoid valve 37. The third solenoid valve 37 is also connected to the other end of the fifteenth solenoid valve 54.

[0042] In this technical solution, when the corresponding solenoid valve is opened, the circulating liquid returning from the user end flows into the sixth heat exchanger 35 through the second solenoid valve 34 and is forced air-cooled by the second blower 36.

[0043] The third solenoid valve 37 is also respectively connected to a fourth solenoid valve 38 and a fifth solenoid valve 39. The fourth solenoid valve 38 is connected to the first heat exchanger 6. The other end of the fifth solenoid valve 39 is respectively connected to a sixth solenoid valve 40 and a seventh solenoid valve 41. The sixth solenoid valve 40 is respectively connected to the first heat exchanger 6 and the second heat exchanger 7.

[0044] On this basis, the fifth solenoid valve 39 is sequentially connected to the seventh solenoid valve 41, the ninth solenoid valve 43, the eleventh solenoid valve 45, and the thirteenth solenoid valve 47. The other end of the thirteenth solenoid valve 47 is respectively connected to a check valve 49 between the water tank 30 and the heater 31 and a fourteenth solenoid valve 48. The other end of the fourteenth solenoid valve 48 is connected to the fifth heat exchanger 10. And an eighth solenoid valve 42 is arranged between the seventh solenoid valve 41 and the ninth solenoid valve 43. The other end of the eighth solenoid valve 42 is respectively connected to the second heat exchanger 7 and the third heat exchanger 8. Similarly, a tenth solenoid valve 44 is respectively connected to the third heat exchanger 8 and the fourth heat exchanger 9. A twelfth solenoid valve 46 is respectively connected to the fourth heat exchanger 9 and the fifth heat exchanger 10.

[0045] The above-mentioned circulation module can realize multiple segmented temperature control modes, which mainly include a high-temperature section mode, a medium and normal temperature section mode, and a low-temperature section mode. The high-temperature section mode mainly adjusts the temperature through the heater 32 and the sixth heat exchanger 35. The medium and normal temperature section mode mainly adjusts the temperature through the heat exchange between the first heat exchanger 6 and the refrigerant. The low-temperature section mode realizes cooling by sequentially exchanging heat between the second heat exchanger 7 to the fifth heat exchanger 10 and the refrigerant step by step.

[0046] In the refrigeration module, the gas-liquid separator includes a first gas-liquid separator 11. The first gas-liquid separator 11 includes multiple channels. The third channel 113 of the first gas-liquid separator 11 is connected to the first electronic expansion valve 14. The second channel 112 of the first gas-liquid separator 11 is connected to the second heat exchanger 7. The first channel 111 of the first gas-liquid separator 11 is connected to the first heat exchanger 6.

[0047] In this technical solution, the connection relationship between the second gas-liquid separator 12 and the third gas-liquid separator 13 is similar to that of the first gas-liquid separator 11 described above.

[0048] For the first heat exchanger 6, more specifically, the first channel 61 of the first heat exchanger 6 is connected to the compressor 1, the second channel 62 of the first heat exchanger 6 is connected to the second heat exchanger 7, the third channel 63 of the first heat exchanger 6 is connected to the circulation module, the fourth channel 64 of the first heat exchanger 6 is connected to the circulation module and the second heat exchanger 7 respectively, and the fifth channel 65 of the first heat exchanger 6 is connected to the condenser 3. The first heat exchanger 6 is specifically connected to the first gas-liquid separator 11 through its sixth channel 66.

[0049] The channel connection relationships of the second heat exchanger 7, the third heat exchanger 8, the fourth heat exchanger 9, and the fifth heat exchanger 10 are similar to those of the first heat exchanger 6 described above. For more detailed content thereof, reference can be made to Figure 1 the schematic diagram of the connection relationship.

[0050] The second heat exchanger 7 is connected to the second gas-liquid separator 12, and the second gas-liquid separator 12 is connected to the second electronic expansion valve 15. The third heat exchanger 8 is connected to the third gas-liquid separator 13, and the third gas-liquid separator 13 is connected to the third electronic expansion valve 16.

[0051] The other end of the compressor 1 is also connected to the capillary tube 20. The capillary tube 20 is also connected to the expansion vessel 19. The other end of the expansion vessel 19 is connected to the solenoid valve 18. The other end of the solenoid valve 18 is connected to the third gas-liquid separator 13.

[0052] In addition, a third temperature sensor 24 is connected to one end of the fifth heat exchanger 5. A fifth temperature sensor 25 is provided between the fifth heat exchanger 5 and the third electronic expansion valve 16. A second pressure sensor 26 and a fifth temperature sensor 27 are provided between the first heat exchanger 5 and the compressor 1.

[0053] For the refrigeration module, it includes the following working process.

[0054] A variety of low-temperature and low-pressure mixed refrigerants (refrigerants with three or more different boiling points at different temperatures) are sucked in from the suction port of the compressor 1, compressed into a high-temperature and high-pressure mixed gas, and the oil in the gas is separated by the oil separator 2. The separated oil returns to the compressor again. The mixed gas after being separated by the oil separator enters the condenser 3 and is forced to dissipate heat and condense into a low-temperature and high-pressure gas-liquid mixture (the high-boiling refrigerant condenses into a liquid) through the first fan 4.

[0055] The gas-liquid mixture enters the first heat exchanger 6 to further cool the high-boiling refrigerant into a liquid. The gas-liquid mixture after being cooled by the first heat exchanger 6 enters the first gas-liquid separator 11 to separate the gas-liquid mixture into gas and liquid phases.

[0056] The high-boiling-point liquid refrigerant exits from the third channel 113 of the first gas-liquid separator 11, and after throttling and pressure reduction by the first electronic expansion valve 14, the high-boiling-point liquid refrigerant is mixed with the refrigerant after returning from the third heat exchanger 8.

[0057] The medium- and low-boiling-point gaseous mixed refrigerant enters the second heat exchanger 7 through the second channel 112 of the first gas-liquid separator 11 for heat exchange, and in the second heat exchanger 7, the intermediate-boiling-point refrigerant in the medium- and low-boiling-point gaseous mixture is condensed into a liquid.

[0058] The medium- and low-boiling-point gas-liquid mixed refrigerant exiting from the second heat exchanger 7 enters the second gas-liquid separator 12 for separation. The intermediate-boiling-point liquid refrigerant exits from the channel 123, and after throttling and pressure reduction by the second electronic expansion valve 15, the intermediate-boiling-point liquid refrigerant is mixed with the refrigerant after returning from the fourth heat exchanger 9.

[0059] The low-boiling-point refrigerant exits from the channel 122 and enters the third heat exchanger 8, where the low-boiling-point refrigerant is further condensed into a low temperature, and the mixed medium- and high-boiling-point refrigerant in the low-boiling-point refrigerant is further cooled into a low-temperature liquid, making the low-temperature refrigerant purer.

[0060] The refrigerant after heat exchange in the third heat exchanger 8 enters the third gas-liquid separator 13. In the third gas-liquid separator, the separated liquid medium- and high-boiling-point refrigerant exits from the channel 133, and after throttling by the third electronic expansion valve 16, it is mixed with the refrigerant after returning from the second heat exchanger 7.

[0061] The low-boiling-point gaseous refrigerant enters the fourth heat exchanger 9 and is further condensed into a liquid refrigerant, then enters the fifth heat exchanger 10 for heat exchange and becomes a subcooled liquid. The subcooled liquid after heat exchange in the fifth heat exchanger 10 passes through the fourth electronic expansion valve 17 for throttling and pressure reduction to become a low-temperature and low-pressure gas-liquid mixture, and then returns to the fifth heat exchanger 10 to exchange heat with the circulating liquid (channels 103, 104) and the low-boiling-point subcooled liquid (channels 101, 102). The low-boiling-point gas-liquid mixture absorbs the heat of the compressed air and the subcooled liquid and becomes a low-temperature and low-pressure gas, so that the temperature of the circulating liquid and the low-boiling-point subcooled liquid decreases. The low-boiling-point refrigerant gas exiting from the channel 105 returns to the fourth heat exchanger 9. Similarly, the low-boiling-point low-temperature refrigerant returning from the channel 105 to the channel 95 exchanges heat with the refrigerant in the channels 91, 92 and the circulating liquid in the channels 93, 94 respectively.

[0062] The refrigerant returning from the fourth heat exchanger 9 is mixed with the medium-boiling refrigerant after throttling by the second electronic expansion valve 15 and enters the third heat exchanger. The mixed refrigerant exchanges heat with the circulating liquid in the refrigerant channels 83 and 84 of channels 81 and 82 in the third heat exchanger 8. The mixed refrigerant from channel 85 of the third heat exchanger 8 is mixed with the high-boiling refrigerant after throttling by the first electronic expansion valve 14 and enters the second heat exchanger 7. The mixed refrigerant exchanges heat with the circulating liquid in the refrigerant channels 73 and 74 of channels 71 and 72 in the second heat exchanger 7.

[0063] The mixed working medium from channel 75 of the second heat exchanger 7 is mixed with the refrigerant after throttling by the third electronic expansion valve 16 and enters the first heat exchanger 6. The mixed refrigerant exchanges heat with the circulating liquid in the refrigerant channels 63 and 6 of channels 65 and 66 in the first heat exchanger 6. The mixed working medium after heat exchange in the first heat exchanger exits from channel 63 and returns to the suction port of the compressor 1.

[0064] For the circulation module, it includes the following working processes.

[0065] Since it includes several segmented temperature control modes, it mainly includes a high-temperature segment mode, a medium-normal temperature segment mode, and a low-temperature segment mode.

[0066] For the high-temperature segment mode, more specifically, in this embodiment, medium-high temperature segment temperature control circulation (+40°C to +300°C) is adopted. For details, reference can be made to Figure 2 , in this case, the first solenoid valve 33 is closed, the fourth solenoid valve 38 is closed, the sixth solenoid valve 40 is closed, the eighth solenoid valve 42 is closed, the tenth solenoid valve 44 is closed, the twelfth solenoid valve 46 is closed, the fourteenth solenoid valve 48 is closed, the fifteenth solenoid valve 54 is closed, the second solenoid valve 34 is opened, the third solenoid valve 37 is opened, the fifth solenoid valve 39 is opened, the seventh solenoid valve 41 is opened, the ninth solenoid valve 43 is opened, the eleventh solenoid valve 45 is opened, and the thirteenth solenoid valve 47 is opened.

[0067] The circulating liquid is replenished from the water tank 30 into the circulation module. The water pump 32 sucks the circulating medium from the heater 31 and transports it to the external user terminal User. The first solenoid valve 33 is installed at the inlet and outlet positions of the user terminal. The first solenoid valve 33 plays a bypass role. The circulating liquid returning from the user terminal User flows through the second solenoid valve 34 into the sixth heat exchanger 35, is forced air-cooled by the second fan 36, and then passes through the third solenoid valve 37, the fifth solenoid valve 39, the seventh solenoid valve 41, the ninth solenoid valve 43, the eleventh solenoid valve 45, and the thirteenth solenoid valve 47 and finally returns to the heater 31. The temperature of the circulating liquid is controlled by jointly controlling and adjusting the temperature of the circulating liquid through the heater 31, the sixth heat exchanger 35, and the second fan 36.

[0068] For the medium and normal temperature range mode, this embodiment includes adopting a medium and normal temperature range temperature control cycle (+25~+40°C). For details, please refer to Figure 3 , in this case, the first solenoid valve 33 is closed, the second solenoid valve 34 is closed, the third solenoid valve 37 is closed, the fifth solenoid valve 39 is closed, the eighth solenoid valve 42 is closed, the tenth solenoid valve 44 is closed, the twelfth solenoid valve 46 is closed, the fourteenth solenoid valve 48 is closed, the fourth solenoid valve 38 is opened, the sixth solenoid valve 40 is opened, the seventh solenoid valve 41 is opened, the ninth solenoid valve 43 is opened, the eleventh solenoid valve 45 is opened, the thirteenth solenoid valve 47 is opened, and the fifteenth solenoid valve 54 is opened.

[0069] The circulating liquid is replenished from the water tank 30 into the circulation system. The water pump 32 sucks the circulating medium from the heater 31 and transports it to the external user terminal User. The first solenoid valve 33 is installed at the inlet and outlet positions of the user terminal. The first solenoid valve 33 functions as a bypass. The circulating liquid returning from the user terminal User flows through the fifteenth solenoid valve 54 and the fourth solenoid valve 38 into the third channel 63 and the fourth channel 64 of the circulating liquid of the first heat exchanger 6, and exchanges heat with the refrigeration working medium in the first channel 61 and the second channel 62 of the refrigeration module. Then it passes through the sixth solenoid valve 40, the seventh solenoid valve 41, the ninth solenoid valve 43, the eleventh solenoid valve 45, and the thirteenth solenoid valve 47 in sequence, and finally returns to the heater 31. The temperature of the circulating liquid is controlled by jointly adjusting the opening degrees of the heater 31 and the first electronic expansion valve 14 of the refrigeration module.

[0070] For the low temperature range mode, this embodiment adopts a low and normal temperature range temperature control cycle (+25~-20°C), a low temperature range temperature control cycle (-20°C~-70°C), a deep low temperature range temperature control cycle (-70°C~-110°C), and an ultra-low temperature range temperature control cycle (-110°C~-150°C).

[0071] For the low and normal temperature range temperature control cycle (+25~-20°C), for details, please refer to Figure 4 , in this mode, the first solenoid valve 33 is closed, the second solenoid valve 34 is closed, the third solenoid valve 37 is closed, the fourth solenoid valve 38 is closed, the seventh solenoid valve 41 is closed, the tenth solenoid valve 44 is closed, the twelfth solenoid valve 46 is closed, the fourteenth solenoid valve 48 is closed, the fifth solenoid valve 39 is opened, the sixth solenoid valve 40 is opened, the eighth solenoid valve 42 is opened, the ninth solenoid valve 43 is opened, the eleventh solenoid valve 45 is opened, the thirteenth solenoid valve 47 is opened, and the fifteenth solenoid valve 54 is opened.

[0072] The circulating liquid is replenished from the water tank 30 into the circulation module. The water pump 32 sucks the circulating medium from the heater 31 and transports it to the external user end User. A first solenoid valve 33 is installed at the inlet and outlet positions of the user end. The first solenoid valve 33 functions as a bypass. The circulating liquid returning from the user end User passes through the fifteenth solenoid valve 54, the fifth solenoid valve 39, the sixth solenoid valve 40 and flows into the circulating liquid channels 73, 74 of the second heat exchanger 7, where it exchanges heat with the refrigeration working medium in the refrigeration module channels 75, 76. Then it successively passes through the eighth solenoid valve 42, the ninth solenoid valve 43, the eleventh solenoid valve 45, the thirteenth solenoid valve 47, and finally returns to the heater 31. The temperature control of the circulating liquid is jointly controlled and adjusted by the opening degrees of the heater 31 and the first electronic expansion valve 14 of the refrigeration system.

[0073] For the temperature control cycle of the low temperature section (-20°C to -70°C), refer to Figure 5 , in this mode, the first solenoid valve 33 is closed, the second solenoid valve 34 is closed, the third solenoid valve 37 is closed, the fourth solenoid valve 38 is closed, the sixth solenoid valve 40 is closed, the ninth solenoid valve 43 is closed, the twelfth solenoid valve 46 is closed, the fourteenth solenoid valve 48 is closed, the fifth solenoid valve 39 is opened, the seventh solenoid valve 41 is opened, the eighth solenoid valve 42 is opened, the tenth solenoid valve 44 is opened, the eleventh solenoid valve 45 is opened, the thirteenth solenoid valve 47 is opened, and the fifteenth solenoid valve 54 is opened.

[0074] The circulating liquid is replenished from the water tank 30 into the circulation module. The water pump 32 sucks the circulating medium from the heater 31 and transports it to the external user end User. A first solenoid valve 33 is installed at the inlet and outlet positions of the user end. The first solenoid valve 33 functions as a bypass. The circulating liquid returning from the user end User passes through the fifteenth solenoid valve 54, the fifth solenoid valve 39, the seventh solenoid valve 41, the eighth solenoid valve 42 and flows into the circulating liquid channels 83, 84 of the third heat exchanger 8, where it exchanges heat with the refrigeration working medium in the refrigeration module channels 85, 86. Then it successively passes through the tenth solenoid valve 44, the eleventh solenoid valve 45, the thirteenth solenoid valve 47, and finally returns to the heater 31. The temperature control of the circulating liquid is jointly controlled and adjusted by the opening degrees of the heater 31 and the second electronic expansion valve 15 of the refrigeration system.

[0075] For the temperature control cycle of the deep low temperature section (-70°C to -110°C), refer to Figure 6 , in this mode, the first solenoid valve 33 is closed, the second solenoid valve 34 is closed, the third solenoid valve 37 is closed, the fourth solenoid valve 38 is closed, the sixth solenoid valve 40 is closed, the eighth solenoid valve 42 is closed, the eleventh solenoid valve 45 is closed, the fourteenth solenoid valve 48 is closed, the fifth solenoid valve 39 is opened, the seventh solenoid valve 41 is opened, the ninth solenoid valve 43 is opened, the tenth solenoid valve 44 is opened, the twelfth solenoid valve 46 is opened, the thirteenth solenoid valve 47 is opened, and the fifteenth solenoid valve 54 is opened.

[0076] The circulating liquid is replenished from the water tank 30 into the circulation module. The water pump 32 sucks the circulating medium from the heater 31 and transports it to the external user terminal User. A first solenoid valve 33 is installed at the inlet and outlet positions of the user terminal. The first solenoid valve 33 functions as a bypass. The circulating liquid returning from the user terminal User passes through the fifteenth solenoid valve 54, the fifth solenoid valve 39, the seventh solenoid valve 41, the ninth solenoid valve 43, and the tenth solenoid valve 44 and flows into the circulating liquid channels 93 and 94 of the fourth heat exchanger 9 to exchange heat with the refrigerant in the refrigeration module channels 95 and 96. Then it passes through the twelfth solenoid valve 46 and the thirteenth solenoid valve 47 in sequence and finally returns to the heater 31. The temperature of the circulating liquid is controlled by jointly controlling and adjusting the opening degrees of the heater 31 and the third electronic expansion valve 16 of the refrigeration system.

[0077] For the temperature control cycle in the ultra-low temperature range (-110°C to -150°C), refer to Figure 7 , in this mode, the first solenoid valve 33 is closed, the second solenoid valve 34 is closed, the third solenoid valve 37 is closed, the fourth solenoid valve 38 is closed, the sixth solenoid valve 40 is closed, the eighth solenoid valve 42 is closed, the tenth solenoid valve 44 is closed, the thirteenth solenoid valve 47 is closed, the fifth solenoid valve 39 is opened, the seventh solenoid valve 41 is opened, the ninth solenoid valve 43 is opened, the eleventh solenoid valve 45 is opened, the twelfth solenoid valve 46 is opened, the fourteenth solenoid valve 48 is opened, and the fifteenth solenoid valve 54 is opened.

[0078] The circulating liquid is replenished from the water tank 30 into the circulation module. The water pump 32 sucks the circulating medium from the heater 31 and transports it to the external user terminal User. A first solenoid valve 33 is installed at the inlet and outlet positions of the user terminal. The first solenoid valve 33 functions as a bypass. The circulating liquid returning from the user terminal User passes through the fifteenth solenoid valve 54, the fifth solenoid valve 39, the seventh solenoid valve 41, the ninth solenoid valve 43, the eleventh solenoid valve 45, and the twelfth solenoid valve 46 and flows into the circulating liquid channels 103 and 104 of the fifth heat exchanger 10 to exchange heat with the refrigerant in the refrigeration module channels 105 and 106. Then it passes through the fourteenth solenoid valve 48 and finally returns to the heater 31. The temperature of the circulating liquid is controlled by jointly controlling and adjusting the opening degrees of the heater 31 and the fourth electronic expansion valve 17 of the refrigeration system.

[0079] In addition, this embodiment also proposes a method for realizing rapid cooling, refer to Figure 8 , which can rapidly realize the rapid reduction from the high temperature of +100°C to +300°C to the range of -100°C to -150°C.

[0080] When the temperature of the circulating liquid is in the high-temperature range of +100°C to +300°C and needs to be reduced to the ultra-low temperature range of -100°C to -150°C, the first solenoid valve 33 is closed, the fifth solenoid valve 39 is closed, the sixth solenoid valve 40 is closed, the seventh solenoid valve 41 is closed, the eighth solenoid valve 42 is closed, the eighth solenoid valve 43 is closed, the tenth solenoid valve 44 is closed, the tenth solenoid valve 45 is closed, the eleventh solenoid valve 46 is closed, the thirteenth solenoid valve 47 is closed, the fifteenth solenoid valve 54 is closed, the second solenoid valve 34 is opened, the third solenoid valve 37 is opened, the fourth solenoid valve 38 is opened, and the fourteenth solenoid valve 48 is opened.

[0081] The circulating liquid is replenished from the water tank 30 into the circulation module. The water pump 32 sucks the circulating medium from the heater 31 and transports it to the external user terminal User. The circulating liquid returning from the user terminal User flows through the second solenoid valve 34 into the sixth heat exchanger 35 and is forced to dissipate heat by the second fan, initially cooling the circulating liquid. Then, the circulating liquid flowing through the third solenoid valve 37 and the fourth solenoid valve 38 enters the third and fourth channels 63 and 64 of the first heat exchanger 6 and exchanges heat with the refrigeration working medium in the first and second channels 61 and 62 of the refrigeration module for further cooling. The circulating liquid coming out of the fourth channel 64 of the first heat exchanger 6 enters the circulating liquid channels 73 and 74 of the second heat exchanger 7 and exchanges heat with the refrigeration working medium in the channels 75 and 76 of the refrigeration module for another cooling. The circulating liquid coming out of the channel 74 of the second heat exchanger 7 enters the circulating liquid channels 83 and 84 of the third heat exchanger 8 and exchanges heat with the refrigeration working medium in the channels 85 and 86 of the refrigeration module to further reduce the temperature of the circulating liquid. The circulating liquid coming out of the channel 84 of the third heat exchanger 8 enters the circulating liquid channels 93 and 94 of the fourth heat exchanger 9 and exchanges heat with the refrigeration working medium in the channels 95 and 96 of the refrigeration module to further reduce the temperature of the circulating liquid. The circulating liquid coming out of the channel 94 of the fourth heat exchanger 9 enters the circulating liquid channels 103 and 104 of the fifth heat exchanger 9 and exchanges heat with the refrigeration working medium in the channels 105 and 106 of the refrigeration module to further reduce the temperature of the circulating liquid to complete a cycle of cooling, and finally returns to the heater 31 through the fourteenth solenoid valve.

[0082] When the temperature of the circulating liquid drops below medium normal temperature, the valve control changes as follows.

[0083] 1. When the temperature of the circulating liquid drops to the medium normal temperature range temperature control cycle (+25°C to +40°C), the second solenoid valve 34 is closed, the third solenoid valve 37 is closed, and the fifteenth solenoid valve 54 is opened. The circulating liquid does not pass through the branch of the sixth heat exchanger 35 and is cooled through the first heat exchanger 6.

[0084] 2. When the temperature of the circulating liquid drops to the low normal temperature section for temperature control circulation (+25~-30°C), the second solenoid valve 34 closes, the third solenoid valve 37 closes, the fourth solenoid valve 38 closes, the fifteenth solenoid valve 54 opens, the fifth solenoid valve 39 opens, the sixth solenoid valve 40 opens, and the circulating liquid does not pass through the branch of the sixth heat exchanger 35 and the two branches of the first heat exchanger 6.

[0085] 3. When the temperature of the circulating liquid drops to the low temperature section for temperature control circulation (-30°C~-70°C), the second solenoid valve 34 closes, the third solenoid valve 37 closes, the fourth solenoid valve 38 closes, the sixth solenoid valve 40 closes, the fifteenth solenoid valve 54 opens, the fifth solenoid valve 39 opens, the seventh solenoid valve 41 opens, the eighth solenoid valve 42 opens, and the circulating liquid does not pass through the branch of the sixth heat exchanger 35, the branch of the first heat exchanger 6, and the branch of the second heat exchanger 7.

[0086] 4. When the temperature of the circulating liquid drops to the deep low temperature section for temperature control circulation (-70°C~-110°C), the second solenoid valve 34 closes, the third solenoid valve 37 closes, the fourth solenoid valve 38 closes, the sixth solenoid valve 40 closes, the eighth solenoid valve 42 closes, the fifteenth solenoid valve 54 opens, the fifth solenoid valve 39 opens, the seventh solenoid valve 41 opens, the ninth solenoid valve 43 opens, the tenth solenoid valve 44 opens, and the circulating liquid does not pass through the branch of the sixth heat exchanger 35, the branch of the first heat exchanger 6, the branch of the second heat exchanger 7, and the branch of the third heat exchanger 8.

[0087] 5. When the temperature of the circulating liquid drops to the ultra-low temperature section for temperature control circulation (-110°C~-150°C), the second solenoid valve 34 closes, the third solenoid valve 37 closes, the fourth solenoid valve 38 closes, the sixth solenoid valve 40 closes, the eighth solenoid valve 42 closes, the tenth solenoid valve 44 closes, the fifteenth solenoid valve 54 opens, the fifth solenoid valve 39 opens, the seventh solenoid valve 41 opens, the ninth solenoid valve 43 opens, the eleventh solenoid valve 45 opens, the twelfth solenoid valve 46 opens, and the circulating liquid does not pass through the branch of the sixth heat exchanger 35, the branch of the first heat exchanger 6, the branch of the second heat exchanger 7, the branch of the third heat exchanger 8, and the branch of the fourth heat exchanger 9.

[0088] This embodiment can bring the following technical effects: a large temperature control range, with temperature control achievable in the range from -150°C to +300°C; making full use of the heat exchangers at all levels of the refrigeration module for heat exchange, achieving segmented temperature control in different temperature sections, and a single-stage system can achieve mixed refrigeration with four or more refrigerants; automatic fractionation of multiple mixed refrigerants to achieve high and low temperature cycles; rapid cooling from high temperature can be achieved, greatly reducing the cooling time.

[0089] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit them. Although the present invention has been described in detail with reference to the embodiments, those of ordinary skill in the art should understand that any modification or equivalent replacement of the technical solutions of the present invention does not depart from the spirit and scope of the technical solutions of the present invention, and they should all be covered by the scope of the claims of the present invention.

Claims

1. A high and low temperature circulation system, characterized in that: The invention comprises a refrigeration module and a circulation module connected to the refrigeration module, wherein the refrigeration module comprises a compressor (1) and a heat exchanger group, wherein a gas-liquid separator is arranged and connected between adjacent heat exchangers in the heat exchanger group; the circulation module comprises a water tank (30) and a heater (31) connected to the water tank (30), wherein the heater (31) is connected to a water pump (32), and wherein the water pump (32) is connected to a plurality of solenoid valves; the circulation module is capable of adjusting the flow path of the circulating liquid in different temperature sections in sections, and the refrigeration module realizes ultra-low temperature refrigeration through automatic condensation of a mixed refrigerant.

2. A high and low temperature circulation system according to claim 1, characterized in that: An oil separator (2) is provided between the heat exchanger group and the compressor (1); one end of the oil separator (2) is connected to the compressor (1); the other end of the oil separator (2) is provided with a condenser (3) and a first fan (4); the other end of the condenser (3) is connected to a drying filter (5); and the drying filter (5) is connected to the heat exchanger group.

3. A high and low temperature circulation system according to claim 1 or 2, characterized in that: The heat exchanger group includes at least five heat exchangers connected in sequence, a gas-liquid separator is arranged between adjacent heat exchangers, one end of the gas-liquid separator is connected to one of the heat exchangers, the other end of the gas-liquid separator is connected to an electronic expansion valve, and the electronic expansion valve is connected to another heat exchanger.

4. A high and low temperature circulation system according to claim 2, characterized in that: One end of the water pump (32) away from the heater (31) is connected to a user end, and a first solenoid valve (33) is provided at the inlet and outlet of the user end. The first solenoid valve (33) is respectively connected to a second solenoid valve (34) and a fifteenth solenoid valve (54). The other end of the second solenoid valve (34) is sequentially connected to a sixth heat exchanger (35) and a third solenoid valve (37), and the third solenoid valve (37) is connected to the other end of the fifteenth solenoid valve (54).

5. A high and low temperature circulation system according to claim 4, characterized in that: The third solenoid valve (37) is also connected to a fourth solenoid valve (38) and a fifth solenoid valve (39), respectively; the fourth solenoid valve (38) is connected to the first heat exchanger (6); the other end of the fifth solenoid valve (39) is connected to a sixth solenoid valve (40) and a seventh solenoid valve (41), respectively; the sixth solenoid valve (40) is connected to the first heat exchanger (6) and the second heat exchanger (7).

6. A high and low temperature circulation system according to claim 5, characterized in that: The circulation module includes several segmented temperature control modes, including: In the high temperature section mode, the temperature is adjusted by the heater (32) and the sixth heat exchanger (35); In the medium and normal temperature section mode, the temperature is adjusted by heat exchange with the refrigerant through the first heat exchanger (6); In the low temperature section mode, the temperature is lowered by sequentially exchanging heat with the refrigerant through the second heat exchanger (7) to the fifth heat exchanger (10).

7. A high and low temperature circulation system according to claim 5, characterized in that: The gas-liquid separator comprises a first gas-liquid separator (11), the first gas-liquid separator (11) comprises a plurality of channels, a third channel (113) of the first gas-liquid separator (11) is connected to a first electronic expansion valve (14); and a second channel (112) of the first gas-liquid separator (11) is connected to a second heat exchanger (7).

8. A high and low temperature circulation system according to claim 7, characterized in that: The first channel (61) of the first heat exchanger (6) is connected to the compressor (1), the second channel (62) of the first heat exchanger (6) is connected to the second heat exchanger (7), the third channel (63) of the first heat exchanger (6) is connected to the circulation module, the fourth channel (64) of the first heat exchanger (6) is respectively connected to the circulation module and the second heat exchanger (7), and the fifth channel (65) of the first heat exchanger (6) is connected to the condenser (3).

9. A high and low temperature circulation system according to claim 1 or 2, characterized in that: The other end of the compressor (1) is also connected to a capillary tube (20), the capillary tube (20) is connected to an expansion container (19), the other end of the expansion container (19) is connected to a solenoid valve (18), and the other end of the solenoid valve (18) is connected to a third gas-liquid separator (13).

10. A high and low temperature circulation system according to claim 2, characterized in that: A first pressure sensor (21) and a first temperature sensor (22) are respectively arranged between the compressor (1) and the oil separator (2).

Images